CN111607766A - Method for improving high-temperature frictional wear resistance of M50 steel - Google Patents

Method for improving high-temperature frictional wear resistance of M50 steel Download PDF

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CN111607766A
CN111607766A CN201911107655.8A CN201911107655A CN111607766A CN 111607766 A CN111607766 A CN 111607766A CN 201911107655 A CN201911107655 A CN 201911107655A CN 111607766 A CN111607766 A CN 111607766A
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steel
magnetron sputtering
wear resistance
target
argon
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李学问
唐光泽
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Harbin University of Science and Technology
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Harbin University of Science and Technology
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5806—Thermal treatment
    • C23C14/582—Thermal treatment using electron bombardment

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention discloses a method for improving high-temperature frictional wear resistance of M50 steel, and relates to a modification method of M50 steel. The invention aims to solve the problem of low high-temperature frictional wear resistance of M50 steel. The method comprises the following steps: step one, pretreating the surface of an M50 steel workpiece; step two, pre-irradiation; thirdly, performing magnetron sputtering on the surface to be treated of the workpiece by using a Cr target, a W target, a Nb target and a Mo target in sequence; and step four, performing electron beam radiation, cooling for 15-30 min, taking out, and cooling in air to finish the improvement of the high-temperature friction and wear resistance of the M50 steel. The method reduces the high-temperature friction coefficient of the M50 steel and improves the high-temperature friction and wear resistance.

Description

Method for improving high-temperature frictional wear resistance of M50 steel
Technical Field
The invention relates to a modification method of M50 steel; in particular to a method for improving the high-temperature friction and wear resistance of M50 steel.
Background
As a novel technology, the irradiation of a large-area high-current pulse electron beam generates electron beam pulses with extremely high energy density through an electron gun to bombard the surface of a material, so that the surface of the material is instantaneously melted and solidified at the instantaneous high temperature generated by the electron beam to obtain a fine tissue or an unbalanced phase on the surface, and the change of the surface performance of the material is realized. An alloying layer is deposited on the surface of the substrate by magnetron sputtering, and then the alloying layer and the substrate can be melted and solidified simultaneously by electron beam irradiation, so that alloying is realized. The obtained alloying layer and the substrate are metallurgically bonded, so that the problem of weak bonding force between the coating prepared by other methods and the substrate is thoroughly solved. In addition, because the irradiation energy of the electron beam is concentrated and the time is extremely short, only a few materials close to the surface layer are melted, and most of the base material is still at room temperature, so the method does not change the roughness of the surface of the material. The method is particularly suitable for optimizing the surface property of precision materials such as bearings.
M50 steel is a common bearing steel and is often used in high temperature friction conditions such as aircraft engine bearings, turbine bearings, and the like. Under the working conditions, the better bearing needs high-temperature mechanical property and good stability, particularly needs a small friction coefficient at high temperature, particularly needs to consider the condition that the lubricating oil is interrupted, the friction coefficient between the bearing and the bearing bush needs to be small, and the condition that the temperature is increased due to the increase of the friction coefficient and the friction coefficient is increased due to the increase of the temperature is avoided.
Disclosure of Invention
The invention provides a method for improving the high-temperature frictional wear resistance of M50 steel aiming at the problem of the high-temperature frictional wear resistance of M50 steel.
The invention combines magnetron sputtering and high-current pulsed electron beam irradiation processes to perform Mo-Nb-W-Cr alloying treatment on the surface of M50 steel so as to reduce the high-temperature friction coefficient of M50 steel and improve the high-temperature friction and wear resistance.
The method for improving the high-temperature frictional wear resistance of the M50 steel is completed by the following steps:
step one, pretreating the surface of an M50 steel workpiece;
step two, pre-irradiation;
thirdly, performing magnetron sputtering on the surface to be treated of the workpiece by using a Cr target, a W target, a Nb target and a Mo target in sequence;
and step four, performing electron beam radiation, cooling for 15-30 min, taking out, and cooling in air to finish the improvement of the high-temperature friction and wear resistance of the M50 steel.
Further defined, the pretreatment in the step one is realized by the following steps: the surface of an M50 steel workpiece is gradually ground by using abrasive paper of 320#, 600#, 800#, 1000#, 1500# and 2000#, and a sample is polished to be surface roughness R by using diamond polishing agentaLess than or equal to 0.1 μm, then ultrasonic cleaning with acetone and absolute ethyl alcohol sequentially for 10min, and blow-drying.
Further limiting, the pre-irradiation in the second step is carried out by the following steps of 2.1, placing the pretreated M50 steel workpiece on a workbench in a vacuum chamber, wherein the surface to be treated faces an electron gun, and 2.2, vacuumizing to 4 × 10-4Pa～7×10-4Pa, continuously introducing argon into the vacuum chamber, and irradiating for 50-100 times under the conditions that the air pressure is 0.04-0.08 Pa and the accelerating voltage is controlled at 30 kv.
Further limiting, the magnetron sputtering of the Cr target in the third step is carried out by the following steps of vacuumizing to 6 × 10-4Pa, after the vacuum pumping is finished, continuously introducing argon into the vacuum chamber, carrying out magnetron sputtering under the conditions that the working power is 50w, the working current is 125mA, the working voltage is 400v and the gas filling amount is 600sccm, depositing for 1.5min, stopping introducing the argon, stopping the magnetron sputtering after 25min, turning off the power supply, and cooling for 10min to 20 min.
Further defined, the magnetron sputtering of the W target in the third step is operated according to the following steps that the vacuum is pumped to 6 × 10-4Pa, after the vacuum pumping is finished, continuously introducing argon into the vacuum chamber, carrying out magnetron sputtering under the conditions that the working power is 50w, the working current is 131mA, the working voltage is 380v and the gas charging amount is 505sccm, depositing for 1.5min, stopping introducing the argon, stopping the magnetron sputtering after 25min, turning off the power supply, and cooling for 10 min-20 min.
Further limiting, the magnetron sputtering of Nb target in the third step is carried out by the following steps of vacuumizing to 6 × 10-4Pa, after the vacuum pumping is finished, continuously introducing argon into the vacuum chamber, carrying out magnetron sputtering under the conditions that the working power is 50w, the working current is 161mA, the working voltage is 310v and the gas charging amount is 580sccm, depositing for 1.5min, stopping introducing the argon, stopping the magnetron sputtering after 25min, turning off the power supply, and cooling for 10 min-20 min.
Further limiting, in the third step, the Mo target magnetron sputtering is operated according to the following steps of vacuumizing to 6 × 10-4Pa, after the vacuum pumping is finished, continuously introducing argon into the vacuum chamber, carrying out magnetron sputtering under the conditions that the working power is 50w, the working current is 143mA, the working voltage is 350v and the gas filling amount is 450sccm, depositing for 20.5min, stopping introducing the argon, stopping the magnetron sputtering after 25min, turning off the power supply, and cooling for 10 min-20 min.
And further limiting, in the fourth step, the electron beam radiation is to turn the surface to be processed of the workpiece to face the electron beam, argon is introduced into the vacuum chamber, and the workpiece is irradiated for 50-100 times under the conditions that the air pressure is 0.04-0.06 Pa and the acceleration voltage is controlled at 27 kv.
According to the invention, Mo, Nb, W and Cr are added into M50 steel by adopting the process to generate a combined action, so that the probability and the quantity of generated magnelli in the high-temperature friction process are increased, and the high-temperature friction resistance of the material is further improved. The method carries out Mo-Nb-W-Cr alloying on the surface of the M50 steel, has good adhesion with an M50 steel matrix, and obviously improves the high-temperature friction and wear performance of the M50 steel.
Drawings
FIG. 1 is a graph of coefficient of friction.
Detailed Description
Example 1: the method for improving the high-temperature frictional wear resistance of the M50 steel in the embodiment is completed by the following steps:
grinding and polishing the surface of an M50 steel workpiece: firstly, sand paper of 320#, 600#, 800#, 1000#, 1500# and 2000# is adopted for gradual grinding, and a diamond polishing agent is used for polishing a sample to the surface roughness RaLess than or equal to 0.1 μm, respectively cleaning in acetone and anhydrous ethanol for 10min with ultrasonic cleaning instrument, and blow-drying with blower;
step two, pre-irradiation:
step 2.1: placing the pretreated M50 steel workpiece on a workbench in a vacuum chamber, wherein the surface to be treated faces an electron gun;
step 2.2, then vacuumizing to 6 × 10-4Pa, continuously introducing argon into the vacuum chamber, and then introducing the argon into the vacuum chamber at the air pressure0.04 Pa-0.08 Pa, and 100 times of irradiation under the condition of 30kv of accelerating voltage.
Thirdly, performing magnetron sputtering on the surface to be processed of the workpiece by using a Cr target, a W target, a Nb target and a Mo target in sequence, wherein the specific operation is realized by the following steps:
step 3.1, turning the surface to be processed of the workpiece to a Cr target (with the mass purity of 99.9 wt.%) and vacuumizing to 6 × 10-4Pa, after the vacuum pumping is finished, continuously introducing argon into the vacuum chamber, carrying out magnetron sputtering under the conditions that the working power is 50w, the working current is 125mA, the working voltage is 400v and the gas filling amount is 600sccm, depositing for 1.5min, stopping introducing the argon, stopping the magnetron sputtering after 25min, closing the power supply and cooling for 20min (blue glow);
step 3.2, turning the surface to be processed of the workpiece to a W target (the mass purity is 99.9 wt.%), and vacuumizing to 6 × 10-4Pa, after the vacuum pumping is finished, continuously introducing argon into the vacuum chamber, carrying out magnetron sputtering under the conditions that the working power is 50w, the working current is 131mA, the working voltage is 380v and the gas filling amount is 505sccm, depositing for 1.5min, stopping introducing the argon, stopping the magnetron sputtering after 25min, closing the power supply, and cooling for 20min (pink glow);
step 3.3, turning the surface to be processed of the workpiece to an Nb target (the mass purity is 99.9 wt.%), and vacuumizing to 6 × 10-4Pa, after the vacuum pumping is finished, continuously introducing argon into the vacuum chamber, carrying out magnetron sputtering under the conditions that the working power is 50w, the working current is 161mA, the working voltage is 310v and the gas filling amount is 580sccm, depositing for 1.5min, stopping introducing the argon, stopping the magnetron sputtering after 25min, turning off the power supply, and cooling for 20min (pink glow);
step 3.4, turning the surface to be processed of the workpiece to a Mo target (with the mass purity of 99.9 wt.%) and vacuumizing to 6 × 10-4Pa, after the vacuum pumping is finished, continuously introducing argon into the vacuum chamber, carrying out magnetron sputtering under the conditions that the working power is 50w, the working current is 143mA, the working voltage is 350v and the gas filling amount is 450sccm, depositing for 20.5min, stopping introducing the argon, stopping the magnetron sputtering after 25min, closing the power supply, and cooling for 20min (pink glow);
and step four, turning the surface to be processed of the workpiece to face the electron beam, introducing argon into the vacuum chamber, irradiating for 50 times under the conditions that the air pressure is 0.06Pa and the acceleration voltage is controlled at 27kv, cooling for 20min, taking out, and cooling in the air to finish the improvement of the high-temperature frictional wear resistance of the M50 steel.
From FIG. 1 it can be seen that the Mo-Nb-W-Cr alloyed coating prepared in example 1 has a significantly reduced coefficient of friction, and that the addition of Mo-Nb-W-Cr leads to the formation of oxides of the magnelli phase during high-temperature friction, which oxides have a lower coefficient of friction on the one hand and increase the adhesion of the oxide film to the M50 steel substrate on the other hand.

Claims (8)

1. A method for improving the high-temperature frictional wear resistance of M50 steel is characterized by comprising the following steps:
step one, pretreating the surface of an M50 steel workpiece;
step two, pre-irradiation;
thirdly, performing magnetron sputtering on the surface to be treated of the workpiece by using a Cr target, a W target, a Nb target and a Mo target in sequence;
and step four, performing electron beam radiation, cooling for 15-30 min, taking out, and cooling in air to finish the improvement of the high-temperature friction and wear resistance of the M50 steel.
2. The method for improving the high-temperature frictional wear resistance of M50 steel as claimed in claim 1, wherein the pretreatment in step one is carried out by the following steps: the surface of an M50 steel workpiece is gradually ground by using abrasive paper of 320#, 600#, 800#, 1000#, 1500# and 2000#, and a sample is polished to be surface roughness R by using diamond polishing agentaLess than or equal to 0.1 μm, then ultrasonic cleaning with acetone and absolute ethyl alcohol sequentially for 10min, and blow-drying.
3. The method for improving the high-temperature frictional wear resistance of M50 steel as claimed in claim 1, wherein the pre-irradiation in step two is performed by the following steps:
step 2.1: placing the pretreated M50 steel workpiece on a workbench in a vacuum chamber, wherein the surface to be treated faces an electron gun;
step 2.2, then vacuumize to 4 × 10-4Pa～7×10-4Pa, continuously introducing argon into the vacuum chamber, and irradiating for 50-100 times under the conditions that the air pressure is 0.04-0.08 Pa and the accelerating voltage is controlled at 30 kv.
4. The method for improving the high-temperature frictional wear resistance of M50 steel as claimed in claim 1, wherein the magnetron sputtering of Cr target in step three is performed by evacuating to 6 × 10-4Pa, after the vacuum pumping is finished, continuously introducing argon into the vacuum chamber, carrying out magnetron sputtering under the conditions that the working power is 50w, the working current is 125mA, the working voltage is 400v and the gas filling amount is 600sccm, depositing for 1.5min, stopping introducing the argon, stopping the magnetron sputtering after 25min, turning off the power supply, and cooling for 10min to 20 min.
5. The method for improving the high-temperature frictional wear resistance of M50 steel as claimed in claim 1, wherein the magnetron sputtering of W target in the third step is performed by evacuating to 6 × 10-4Pa, after the vacuum pumping is finished, continuously introducing argon into the vacuum chamber, carrying out magnetron sputtering under the conditions that the working power is 50w, the working current is 131mA, the working voltage is 380v and the gas charging amount is 505sccm, depositing for 1.5min, stopping introducing the argon, stopping the magnetron sputtering after 25min, turning off the power supply, and cooling for 10 min-20 min.
6. The method for improving the high-temperature frictional wear resistance of M50 steel as claimed in claim 1, wherein the magnetron sputtering of Nb target in step three is performed by evacuating to 6 × 10-4Pa, after the vacuum pumping is finished, continuously introducing argon into the vacuum chamber, carrying out magnetron sputtering under the conditions that the working power is 50w, the working current is 161mA, the working voltage is 310v and the gas charging amount is 580sccm, depositing for 1.5min, stopping introducing the argon, stopping the magnetron sputtering after 25min, turning off the power supply, and cooling for 10 min-20 min.
7. The method for improving the high-temperature frictional wear resistance of M50 steel as claimed in claim 1, wherein the Mo target magnetron sputtering in step three is performed by evacuating to 6 × 10-4Pa, after the vacuum pumping is finished, continuously introducing argon into the vacuum chamber, carrying out magnetron sputtering under the conditions that the working power is 50w, the working current is 143mA, the working voltage is 350v and the gas filling amount is 450sccm, depositing for 20.5min, stopping introducing the argon, stopping the magnetron sputtering after 25min, turning off the power supply, and cooling for 10 min-20 min.
8. The method for improving the high-temperature frictional wear resistance of M50 steel as claimed in claim 1, wherein in the fourth step, the electron beam irradiation is performed by turning the surface to be processed of the workpiece to face the electron beam, introducing argon gas into the vacuum chamber, and irradiating 50-100 times under the conditions of the air pressure of 0.04-0.06 Pa and the acceleration voltage of 27 kv.
CN201911107655.8A 2019-11-13 2019-11-13 Method for improving high-temperature frictional wear resistance of M50 steel Pending CN111607766A (en)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07233442A (en) * 1994-02-21 1995-09-05 Hitachi Metals Ltd Wear resistant and corrosion resistant bearing steel excellent in rolling fatigue property
US20090180725A1 (en) * 2008-01-15 2009-07-16 The Timken Company X-Ray Tube Rotating Anode Assembly Bearing
CN106498304A (en) * 2016-09-12 2017-03-15 北京工业大学 A kind of corrosion resisting bearing and preparation method thereof

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07233442A (en) * 1994-02-21 1995-09-05 Hitachi Metals Ltd Wear resistant and corrosion resistant bearing steel excellent in rolling fatigue property
US20090180725A1 (en) * 2008-01-15 2009-07-16 The Timken Company X-Ray Tube Rotating Anode Assembly Bearing
CN106498304A (en) * 2016-09-12 2017-03-15 北京工业大学 A kind of corrosion resisting bearing and preparation method thereof

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
张旭: ""M50钢强流脉冲电子束Mo合金化层组织与高温摩擦性能研究"", 《中国优秀博硕士学位论文全文数据库 (硕士) 工程科技Ⅰ辑》 *

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Application publication date: 20200901