CN111590971B - Wave-absorbing/structure integrated material compounded by metamaterial and magnetic medium and preparation method thereof - Google Patents
Wave-absorbing/structure integrated material compounded by metamaterial and magnetic medium and preparation method thereof Download PDFInfo
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Abstract
The invention relates to a wave-absorbing/structure integrated material compounded by a metamaterial and a magnetic medium and a preparation method thereof. The material in turn comprises a first magnetic media material layer comprising a first magnetic media material; the metamaterial layer comprises a metamaterial, and the metamaterial is a periodic structure etched on the nano silver coating film; a second magnetic media material layer comprising a second magnetic media material. The nano-silver coating with certain impedance is etched to form a pattern with a periodic structure to form a metamaterial with certain impedance, the metamaterial is used as a core layer to be combined with upper and lower magnetic media and integrally formed to form the ultra-wideband wave-absorbing/structure integrated material, and the reflectivity of the composite material at 2-18GHz is less than or equal to-8 dB, and the composite material has the polarization insensitivity characteristic.
Description
Technical Field
The invention relates to the technical field of wave-absorbing materials, in particular to a wave-absorbing/structure integrated material compounded by a metamaterial and a magnetic medium and a preparation method thereof.
Background
With the development of microwave detection technology, the system has higher and higher requirements on the broadband absorption performance of microwave absorption materials. The traditional wave-absorbing materials such as ferrite, carbonyl iron powder, metal micro powder and the like can only have wave-absorbing performance in a narrow frequency band range. The structural wave-absorbing material is a main technical means for realizing broadband wave absorption, and is usually a structural form with certain mechanical strength formed by compounding absorbents such as graphite, carbon black and the like with glass fiber reinforced plastics or foam, but the condition for realizing broadband of the structural wave-absorbing material is enough thickness, which is not possessed by a system structure, so that the application of the structural wave-absorbing material is limited to a certain extent. The metamaterial is compounded with the low dielectric medium, so that the thickness of the broadband structure wave-absorbing material can be reduced to a certain extent, but the problem of larger thickness still exists.
Disclosure of Invention
The invention aims to provide a composite wave-absorbing material compounded by a metamaterial and a magnetic medium.
The second purpose of the invention is a preparation method of the composite wave-absorbing material.
In order to achieve the purpose, the invention provides the following technical scheme:
a metamaterial and magnetic medium composite wave-absorbing/structure integrated material sequentially comprises:
a first magnetic media material layer comprising a first magnetic media material;
the metamaterial layer comprises a metamaterial, and the metamaterial is a periodic structure etched on the nano silver coating film; and
a second magnetic media material layer comprising a second magnetic media material.
Preferably, the unit of the periodic structure is a regular hexagon with a side length of 1-3mm, more preferably 2-3mm, and most preferably 2.17 mm.
Preferably, the first magnetic medium material is carbonyl iron powder; and/or
The second magnetic medium material is ferrite.
Preferably, the thickness of the first magnetic medium material layer is 1-1.5 mm;
the thickness of the metamaterial layer is 0.1-0.15 mm; and/or
The thickness of the second magnetic medium material layer is 2-6 mm.
Preferably, the wave-absorbing/structure integrated material compounded by the metamaterial and the magnetic medium has a reflectivity of less than or equal to-8 dB at 2-18 GHz.
A preparation method of the wave-absorbing/structure integrated material compounded by the metamaterial and the magnetic medium comprises the following steps:
(1) preparing a first magnetic medium material film;
(2) preparing a metamaterial;
(3) preparing a second magnetic medium material film;
(4) compounding: and sequentially paving the first magnetic medium material film, the metamaterial and the second magnetic medium material film to a specified thickness, bonding and curing to obtain the wave-absorbing/structure integrated material.
Preferably, the first magnetic medium material film is prepared by the following method:
ball-milling the first magnetic medium material and resin to obtain first slurry; forming the first slurry into a first magnetic medium material film;
preferably, the mass ratio of the first magnetic medium material to the resin is (7-9): (1-3);
preferably, a first dispersing agent is further added for ball milling, and the mass ratio of the first dispersing agent to the first magnetic medium material is preferably (700- & lt 900-): (1-10);
preferably, the first magnetic medium material film has a thickness of 0.1 to 0.2 mm.
Preferably, the metamaterial is prepared by the following method:
spreading a polyimide film on a silicon wafer substrate, coating photosensitive adhesive, performing pattern exposure by using a prefabricated mask corresponding to a designed pattern, then developing by using a developing solution, performing copper plating treatment by adopting a vacuum magnetron sputtering process, and finally performing ultrasonic stripping and photoresist removal to form a metamaterial;
preferably, the thickness of the photosensitive glue is 3-5 μm.
Preferably, the second magnetic medium material film is prepared as follows:
ball-milling the second magnetic medium material and resin to obtain second slurry; forming the second slurry into a second magnetic medium material film;
preferably, the mass ratio of the second magnetic medium material to the resin is (7-9): (1-3);
preferably, a second dispersing agent is further added for ball milling, and the mass ratio of the second dispersing agent to the second magnetic medium material is preferably (700- & lt 900-): (1-10);
preferably, the thickness of the second magnetic medium material film is 0.1-0.2 mm.
Preferably, the curing is carried out at 80-100 ℃ and the curing time is preferably 20-40 min.
Advantageous effects
The technical scheme of the invention has the following advantages:
the composite wave-absorbing material provided by the invention is a wave-absorbing/structure integrated material compounded by a metamaterial and a magnetic medium. The nano-silver coating with certain impedance is etched to form a pattern with a periodic structure to form a metamaterial with certain impedance, the metamaterial is used as an intermediate layer to be combined with upper and lower magnetic media and integrally formed to form the ultra-wideband wave-absorbing/structure integrated material, and the reflectivity of the composite material at 2-18GHz is less than or equal to-8 dB, and the composite material has the polarization insensitivity characteristic.
Drawings
FIG. 1 is a schematic structural diagram of a composite wave-absorbing material provided by the invention;
FIG. 2 is a reflectivity curve diagram of the composite wave-absorbing material provided in example 1;
FIG. 3 is a reflectivity curve diagram of the composite wave-absorbing material provided in example 2;
FIG. 4 is a reflectivity curve diagram of the composite wave-absorbing material provided in example 3;
FIG. 5 is a reflectivity curve diagram of the composite wave-absorbing material provided in example 4.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the technical solutions of the present invention will be clearly and completely described below with reference to the embodiments of the present invention. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention. It should be noted that the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
First aspect
The invention provides a wave-absorbing/structure integrated material compounded by a metamaterial and a magnetic medium in a first aspect, as shown in figure 1, the wave-absorbing/structure integrated material compounded by the metamaterial and the magnetic medium comprises the following three material layers:
a first magnetic media material layer comprising a first magnetic media material;
a metamaterial layer comprising a metamaterial; and
a second magnetic media material layer comprising a second magnetic media material;
wherein the metamaterial is a periodic structure etched on the nano silver coating film.
The composite wave-absorbing material provided by the invention is a wave-absorbing/structure integrated material compounded by a metamaterial and a magnetic medium, a pattern with a periodic structure is etched on a nano silver coating film with certain impedance to form the metamaterial with certain impedance, and then the metamaterial is integrally formed with the upper and lower magnetic media as an intermediate layer to form the ultra-wideband wave-absorbing/structure integrated material. The traditional wave-absorbing material generally exists in a wave-absorbing coating mode, but the wave-absorbing coating has a narrow absorption band; the absorbent is compounded into the glass fiber to realize broadband wave absorption, but the thickness is large. The invention fully exerts the resonance loss of the metamaterial and the magnetic loss of the magnetic medium by compounding the metamaterial and the magnetic medium, and realizes broadband wave absorption. Since the metamaterial itself is thin, little extra thickness is added, so the overall thickness is thin. In conclusion, the composite wave-absorbing material provided by the invention has the excellent characteristics of thin thickness, wide absorption band (the reflectivity at 2-18GHz is less than or equal to-8 dB) and insensitive polarization.
In some preferred embodiments, the cells of the periodic structure are regular hexagons having sides of 1 to 3mm, more preferably 2 to 3mm, and most preferably 2.17 mm. The regular hexagon with the edge length characteristic is adopted as the unit structure pattern of the periodic structure, the periodic structure is periodically symmetrical, and the periodic structure is insensitive to the polarization of electromagnetic waves, namely, the periodic structure has excellent wave absorbing performance on electromagnetic waves with different polarizations. After etching, the periodic structure is in a honeycomb shape.
In some preferred embodiments, the first magnetic medium material is carbonyl iron powder and the second magnetic medium material is ferrite. Different magnetic media have corresponding electromagnetic parameters. When carbonyl iron powder is used as the first magnetic medium material and ferrite is used as the second magnetic medium material, the frequency band is 2-18 GHz.
In some preferred embodiments, the thickness d1 of the first magnetic media material layer is 1-1.5 mm; the thickness d2 of the metamaterial layer is 0.1-0.15mm, preferably 0.13 mm; and/or the thickness d3 of the second magnetic medium material layer is 2-6 mm. Too large or too small thickness causes the wave-absorbing performance to change, and broadband wave absorption cannot be realized.
The second aspect
The invention provides a preparation method of a wave-absorbing/structure integrated material compounded by the metamaterial and the magnetic medium in a second aspect, which comprises the following steps:
(1) preparing a first magnetic medium material film;
(2) preparing a metamaterial;
(3) preparing a second magnetic medium material film;
(4) compounding: and sequentially paving the first magnetic medium material film, the metamaterial and the second magnetic medium material film to a specified thickness, bonding and curing to obtain the wave-absorbing/structure integrated material.
Step (1): step (1) is a step of preparing a first magnetic medium material film. The first magnetic medium material film may be prepared as follows: ball-milling the first magnetic medium material and resin to obtain first slurry; the first slurry is shaped into a first film of magnetic media material. Preferably, the mass ratio of the first magnetic medium material to the resin is (7-9): (1-3). During ball milling, a first dispersing agent can be added for ensuring the dispersion effect, and the mass ratio of the first dispersing agent to the first magnetic medium material is preferably (700- & ltSUB- & gt 900): (1-10). The first magnetic medium material film preferably has a thickness of 0.1 to 0.2mm, as a dispersant (including the first dispersant herein and the second dispersant hereinafter may be any conventional dispersant).
Step (2): the step (2) is a step for preparing the metamaterial: the metamaterial is preferably prepared by the following method: the method comprises the steps of paving a polyimide film on a silicon wafer substrate, coating photosensitive glue with a certain thickness, carrying out pattern exposure by using a prefabricated mask corresponding to a designed pattern, then developing by using a developing solution, carrying out copper plating treatment by adopting a vacuum magnetron sputtering process, and finally carrying out ultrasonic stripping and glue removal to form the metamaterial. Preferably, the thickness of the photosensitive glue is 3-5 μm.
And (3): the step (3) is a step of preparing a second magnetic medium material film. The second magnetic medium material film is preferably prepared as follows: ball-milling the second magnetic medium material and resin to obtain second slurry; the second slurry is shaped into a second film of magnetic media material. Preferably, the mass ratio of the second magnetic medium material to the resin is (7-9): (1-3). Preferably, a second dispersing agent is further added for ball milling, and the mass ratio of the second dispersing agent to the second magnetic medium material is preferably (700- & lt 900-): (1-10). Preferably, the thickness of the second magnetic medium material film is 0.1-0.2 mm.
And (4): the step (4) is a step of compounding the layers. And sequentially paving the first magnetic medium material film, the metamaterial and the second magnetic medium material film to a specified thickness, bonding and curing to obtain the composite wave-absorbing material, preferably curing at 80-100 ℃, wherein the curing time is preferably 20-40 min.
The following are examples of the present invention.
Example 1
The composite wave-absorbing material provided by the embodiment is of a three-layer structure, wherein the first layer is made of carbonyl iron powder magnetic medium materials, the thickness of the first layer is 1.2mm, the first layer is formed by paving and pasting carbonyl iron powder magnetic medium films, the second layer is made of metamaterials, the thickness of the second layer is 0.13mm, the third layer is made of ferrite magnetic medium materials, the thickness of the third layer is 3mm, and the third layer is formed by paving and pasting ferrite magnetic medium films. Wherein, the metamaterial is a periodic structure etched on the nano silver coating, the periodic structure unit is a regular hexagon, and the side length is 2.17 mm.
The preparation method comprises the following steps:
(1) weighing 800g of carbonyl iron powder, putting the carbonyl iron powder into a mixing cup, adding 200g of epoxy resin and 5g of dispersing agent, and putting the mixture into a double-planet stirrer to stir for 30 min; and putting the mixture into a ball mill for ball milling for 20min until the slurry is uniformly dispersed to form carbonyl iron powder slurry. And (3) carrying out blade coating on the carbonyl iron powder slurry on centrifugal paper by adopting a blade coater to form a 0.2mm semi-solidified carbonyl iron powder magnetic medium film.
(2) And (3) paving a polyimide film on a silicon wafer substrate, coating photosensitive glue with the thickness of 3um, performing pattern exposure by using a prefabricated mask corresponding to a designed pattern, developing by using a developing solution, performing copper plating treatment by adopting a vacuum magnetron sputtering process, and finally performing ultrasonic stripping and glue removal to form the designed metamaterial.
(3) Weighing 750g of ferrite, putting the ferrite into a mixing cup, adding 250g of epoxy resin and 5g of dispersing agent, and putting the mixture into a double-planet stirrer to stir for 30 min; and (4) putting the ferrite slurry into a ball mill for ball milling for 20min until the slurry is uniformly dispersed to form ferrite slurry. And (3) carrying out blade coating on the ferrite slurry on the centrifugal paper by adopting a blade coater to form a 0.2mm semi-solidified ferrite magnetic medium film.
(4) And sequentially paving the ferrite magnetic medium film, the metamaterial and the carbonyl iron powder magnetic medium film to a specified thickness according to a design structure. And after the bonding is finished, putting the materials into a high-temperature furnace to be cured for 40min at the temperature of 80 ℃ to obtain the wave-absorbing/structure integrated material based on the composition of the metamaterial and the magnetic medium.
The reflectivity of the composite material is less than-5 dB at 2.6-18GHz, the absorption bandwidth reaches 15GHz, and the wave-absorbing performance has polarization insensitivity, as shown in figure 2. The composite material has the excellent characteristics of thin thickness, wide frequency absorption and insensitive polarization.
Example 2
The composite wave-absorbing material provided by the embodiment is of a three-layer structure, wherein the first layer is made of carbonyl iron powder magnetic medium materials, the thickness of the first layer is 1.4mm, the first layer is formed by paving and pasting carbonyl iron powder magnetic medium films, the second layer is made of metamaterials, the thickness of the second layer is 0.13mm, the third layer is made of ferrite magnetic medium materials, the thickness of the third layer is 3.2mm, and the third layer is formed by paving and pasting ferrite magnetic medium films. Wherein, the metamaterial is a periodic structure etched on the nano silver coating, the periodic structure unit is a regular hexagon, and the side length is 2.17 mm.
(1) Weighing 820g of carbonyl iron powder, putting the carbonyl iron powder into a mixing cup, adding 180g of epoxy resin and 5g of dispersing agent, and putting the mixture into a double-planet stirrer to stir for 30 min; and putting the mixture into a ball mill for ball milling for 20min until the slurry is uniformly dispersed to form carbonyl iron powder slurry. And (3) carrying out blade coating on the carbonyl iron powder slurry on centrifugal paper by adopting a blade coater to form a 0.2mm semi-solidified carbonyl iron powder magnetic medium film.
(2) And (3) paving a polyimide film on a silicon wafer substrate, coating photosensitive glue with the thickness of 3um, performing pattern exposure by using a prefabricated mask corresponding to a designed pattern, developing by using a developing solution, performing copper plating treatment by adopting a vacuum magnetron sputtering process, and finally performing ultrasonic stripping and glue removal to form the designed metamaterial.
(3) Weighing 800g of ferrite, putting the ferrite into a mixing cup, adding 200g of epoxy resin and 5g of dispersing agent, and putting the mixture into a double-planet stirrer to stir for 30 min; and (4) putting the ferrite slurry into a ball mill for ball milling for 20min until the slurry is uniformly dispersed to form ferrite slurry. And (3) carrying out blade coating on the ferrite slurry on the centrifugal paper by adopting a blade coater to form a 0.2mm semi-solidified ferrite magnetic medium film.
(4) And sequentially paving the ferrite magnetic medium film, the metamaterial and the carbonyl iron powder magnetic medium film to a specified thickness according to a design structure. And after the bonding is finished, putting the materials into a high-temperature furnace to be cured for 40min at the temperature of 80 ℃ to obtain the wave-absorbing/structure integrated material based on the composition of the metamaterial and the magnetic medium.
The reflectivity of the composite material is less than-8 dB at 2.6-18GHz, the absorption bandwidth reaches 15GHz, and the wave-absorbing performance has polarization insensitivity, as shown in figure 3. The composite material has the excellent characteristics of thin thickness, wide frequency absorption and insensitive polarization.
Example 3
The composite wave-absorbing material provided by the embodiment is of a three-layer structure, wherein the first layer is made of carbonyl iron powder magnetic medium materials, the thickness of the first layer is 1mm, the composite wave-absorbing material is formed by paving and pasting carbonyl iron powder magnetic medium films, the second layer is made of metamaterials, the thickness of the second layer is 0.13mm, the third layer is made of ferrite magnetic medium materials, the thickness of the third layer is 4mm, and the composite wave-absorbing material is formed by paving and pasting ferrite magnetic medium films. Wherein, the metamaterial is a periodic structure etched on the nano silver coating, the periodic structure unit is a regular hexagon, and the side length is 2.17 mm.
(1) Weighing 800g of carbonyl iron powder, putting the carbonyl iron powder into a mixing cup, adding 200g of epoxy resin and 5g of dispersing agent, and putting the mixture into a double-planet stirrer to stir for 30 min; and putting the mixture into a ball mill for ball milling for 20min until the slurry is uniformly dispersed to form carbonyl iron powder slurry. And (3) carrying out blade coating on the carbonyl iron powder slurry on centrifugal paper by adopting a blade coater to form a 0.2mm semi-solidified carbonyl iron powder magnetic medium film.
(2) And (3) paving a polyimide film on a silicon wafer substrate, coating photosensitive glue with the thickness of 3um, performing pattern exposure by using a prefabricated mask corresponding to a designed pattern, developing by using a developing solution, performing copper plating treatment by adopting a vacuum magnetron sputtering process, and finally performing ultrasonic stripping and glue removal to form the designed metamaterial.
(3) Weighing 750g of ferrite, putting the ferrite into a mixing cup, adding 250g of epoxy resin and 5g of dispersing agent, and putting the mixture into a double-planet stirrer to stir for 30 min; and (4) putting the ferrite slurry into a ball mill for ball milling for 20min until the slurry is uniformly dispersed to form ferrite slurry. And (3) carrying out blade coating on the ferrite slurry on the centrifugal paper by adopting a blade coater to form a 0.2mm semi-solidified ferrite magnetic medium film.
(4) And sequentially paving the ferrite magnetic medium film, the metamaterial and the carbonyl iron powder magnetic medium film to a specified thickness according to a design structure. And after the bonding is finished, putting the materials into a high-temperature furnace to be cured for 40min at the temperature of 80 ℃ to obtain the wave-absorbing/structure integrated material based on the composition of the metamaterial and the magnetic medium.
The reflectivity of the composite material is less than-5 dB at 2.6-18GHz, the absorption bandwidth reaches 15GHz, and the wave-absorbing performance has polarization insensitivity, as shown in figure 4. The composite material has the excellent characteristics of thin thickness, wide frequency absorption and insensitive polarization.
Example 4
The composite wave-absorbing material provided by the embodiment is of a three-layer structure, wherein the first layer is made of carbonyl iron powder magnetic medium materials, the thickness of the first layer is 1.2mm, the first layer is formed by paving and pasting carbonyl iron powder magnetic medium films, the second layer is made of metamaterials, the thickness of the second layer is 0.13mm, the third layer is made of ferrite magnetic medium materials, the thickness of the third layer is 3.0mm, and the third layer is formed by paving and pasting ferrite magnetic medium films. Wherein, the metamaterial is a periodic structure etched on the nano silver coating, the periodic structure unit is a regular hexagon, and the side length is 2.17 mm.
(1) Weighing 800g of carbonyl iron powder, putting the carbonyl iron powder into a mixing cup, adding 200g of epoxy resin and 5g of dispersing agent, and putting the mixture into a double-planet stirrer to stir for 30 min; and putting the mixture into a ball mill for ball milling for 20min until the slurry is uniformly dispersed to form carbonyl iron powder slurry. And (3) carrying out blade coating on the carbonyl iron powder slurry on centrifugal paper by adopting a blade coater to form a 0.2mm semi-solidified carbonyl iron powder magnetic medium film.
(2) And (3) paving a polyimide film on a silicon wafer substrate, coating photosensitive glue with the thickness of 3um, performing pattern exposure by using a prefabricated mask corresponding to a designed pattern, developing by using a developing solution, performing copper plating treatment by adopting a vacuum magnetron sputtering process, and finally performing ultrasonic stripping and glue removal to form the designed metamaterial.
(3) Weighing 750g of ferrite, putting the ferrite into a mixing cup, adding 250g of epoxy resin and 5g of dispersing agent, and putting the mixture into a double-planet stirrer to stir for 30 min; and (4) putting the ferrite slurry into a ball mill for ball milling for 20min until the slurry is uniformly dispersed to form ferrite slurry. And (3) carrying out blade coating on the ferrite slurry on the centrifugal paper by adopting a blade coater to form a 0.2mm semi-solidified ferrite magnetic medium film.
(4) And sequentially paving the ferrite magnetic medium film, the metamaterial and the carbonyl iron powder magnetic medium film to a specified thickness according to a design structure. And after the bonding is finished, putting the materials into a high-temperature furnace to be cured for 40min at the temperature of 80 ℃ to obtain the wave-absorbing/structure integrated material based on the composition of the metamaterial and the magnetic medium.
The reflectivity of the composite material is less than-4 dB at 2.6-18GHz, and the wave-absorbing performance is poor, as shown in figure 5.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (8)
1. A metamaterial and magnetic medium composite wave-absorbing/structure integrated material is characterized by sequentially comprising:
a first magnetic media material layer comprising a first magnetic media material;
the metamaterial layer comprises a metamaterial, and the metamaterial is a periodically symmetrical structure etched on the nano silver coating film;
the thickness of the metamaterial layer is 0.1-0.15 mm;
a second magnetic media material layer comprising a second magnetic media material;
the unit of the periodic symmetric structure is a regular hexagon, and the side length is 1-3 mm;
the first magnetic medium material is carbonyl iron powder;
the second magnetic medium material is ferrite;
the thickness of the first magnetic medium material layer is 1-1.5 mm;
the thickness of the second magnetic medium material layer is 2-6 mm;
the reflectivity of the wave-absorbing/structure integrated material is less than or equal to-8 dB at 2-18 GHz.
2. The integrated material according to claim 1,
the unit of the periodic symmetrical structure is a regular hexagon, and the side length is 2-3 mm.
3. The integrated material according to claim 1,
the unit of the periodic symmetrical structure is a regular hexagon, and the side length is 2.17 mm.
4. A method for producing the integrated material of any one of claims 1 to 3, characterized by comprising the steps of:
(1) preparing a first magnetic medium material film;
(2) preparing a metamaterial;
(3) preparing a second magnetic medium material film;
(4) compounding: and sequentially paving the first magnetic medium material film, the metamaterial and the second magnetic medium material film to a specified thickness, bonding and curing to obtain the wave-absorbing/structure integrated material.
5. The production method according to claim 4,
the first magnetic medium material film is prepared by adopting the following method:
ball-milling the first magnetic medium material and resin to obtain first slurry; forming the first slurry into a first magnetic medium material film;
the mass ratio of the first magnetic medium material to the resin is (7-9): (1-3);
adding a first dispersing agent for ball milling, wherein the mass ratio of the first dispersing agent to the first magnetic medium material is (700-: (1-10);
the thickness of the first magnetic medium material film is 0.1-0.2 mm.
6. The production method according to claim 4 or 5,
the metamaterial is prepared by the following method:
spreading a polyimide film on a silicon wafer substrate, coating photosensitive adhesive, performing pattern exposure by using a prefabricated mask corresponding to a designed pattern, then developing by using a developing solution, performing copper plating treatment by adopting a vacuum magnetron sputtering process, and finally performing ultrasonic stripping and photoresist removal to form a metamaterial;
the thickness of the photosensitive adhesive is 3-5 μm.
7. The production method according to claim 4,
the second magnetic medium material film is prepared according to the following method:
performing ball milling on the second magnetic medium material and resin to obtain second slurry; forming the second slurry into a second magnetic medium material film;
the mass ratio of the second magnetic medium material to the resin is (7-9): (1-3);
adding a second dispersing agent for ball milling, wherein the mass ratio of the second dispersing agent to the second magnetic medium material is (700-: (1-10);
the thickness of the second magnetic medium material film is 0.1-0.2 mm.
8. The production method according to claim 4,
the curing is carried out at 80-100 ℃ for 20-40 min.
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