CN111571583B

CN111571583B - Manipulator control method

Info

Publication number: CN111571583B
Application number: CN202010339277.2A
Authority: CN
Inventors: 郭训容; 王晓燕
Original assignee: Beijing Naura Microelectronics Equipment Co Ltd
Current assignee: Beijing Naura Microelectronics Equipment Co Ltd
Priority date: 2020-04-26
Filing date: 2020-04-26
Publication date: 2022-02-22
Anticipated expiration: 2040-04-26
Also published as: CN111571583A

Abstract

The invention discloses a virtual manipulator control method. The method comprises the following steps: receiving an actual operation instruction which is input by a user and aims at the physical manipulator; identifying the instruction type, the brand and the model of the manipulator in the actual operation instruction and forming a unique instruction identifier of the actual operation instruction; matching the unique instruction identification with a preset rule and forming a virtual instruction; judging whether the virtual instruction is correctly executed by the physical manipulator; if the judgment result is yes, the current state and the position information of the physical manipulator are directly output; otherwise, forming a unified instruction command by the virtual instruction according to a preset format, sending the unified instruction command to the virtual manipulator and executing the unified instruction command; and forming a feedback mark based on the unified instruction command, forming the execution state and position information of the virtual manipulator according to the feedback mark, and sending the execution state and position information to the human-computer interface. The real manipulator hardware and the virtual manipulator are seamlessly associated, and the control correctness and reliability of the manipulator are tested to the maximum extent.

Description

Manipulator control method

Technical Field

The invention relates to the technical field of manipulators, in particular to a manipulator control method.

Background

With the development of industrial automation, manipulators are widely used in industry. The manipulator has the advantage that the security is high, can raise the efficiency and quality and reduce the product defective rate. For example, semiconductor cleaning equipment is divided into single-wafer cleaning equipment and trough cleaning equipment, each equipment is provided with a manipulator to realize wafer transmission, and the types of the manipulators adopted by different types of equipment are different due to different sizes and shapes of wafers and different structures of a process chamber and a trough. The communication interfaces, communication modes and communication protocols adopted by different types of manipulators are different, so that the control mode of each manipulator is changed, the control method of the manipulator is changed, and the correct control of the equipment manipulator cannot be guaranteed. Before the hardware installation of the equipment is completed, the manipulator cannot complete the actual action test on the equipment, so that the test reliability is reduced, and the transmission fault of the manipulator frequently occurs on a customer site.

Therefore, it is necessary to provide a manipulator control method, which can satisfy the tests of various manipulators of different types and improve the control accuracy and reliability of the manipulator.

Disclosure of Invention

The invention aims to provide a manipulator control method, which can meet the test requirements of various manipulators of different types and improve the control accuracy and reliability of the manipulators.

In order to achieve the above object, the present invention provides a method for controlling a manipulator, where the manipulator includes a physical manipulator and a virtual manipulator, the method including:

receiving an actual operation instruction input by a user and aiming at the physical manipulator;

identifying the instruction category, the brand and the model of the manipulator in the actual operation instruction and forming a unique instruction identifier of the actual operation instruction, wherein the unique instruction identifier at least comprises the brand name and the model of the manipulator and an instruction name corresponding to the instruction category;

matching the unique instruction identification with a preset rule to form a virtual instruction, wherein the virtual instruction can be recognized and executed by the entity manipulator or the virtual manipulator;

executing the virtual instruction;

judging whether the virtual instruction is correctly executed by the physical manipulator;

if the judgment result is yes, the current state and the position information of the entity manipulator are directly output;

if the judgment result is negative, forming a unified instruction command by the virtual instruction according to a preset format, sending the unified instruction command to the virtual manipulator and executing the unified instruction command;

and forming a feedback mark based on the unified instruction command, forming the execution state and position information of the virtual manipulator according to the feedback mark, and sending the execution state and position information to a human-computer interface.

Optionally, the instruction classes include atomic instructions and compound instructions, wherein,

the atomic instructions comprise an initialization instruction, an origin searching instruction, a horizontal moving instruction, a vertical moving instruction, a grabbing instruction, a placing instruction, an origin returning instruction, a turning instruction and a graphical instruction;

the compound command class includes a command for the robot to move from an initial position to a destination position and a command for the robot to grasp a component from the initial position and place it in the destination position.

Optionally, forming the unique instruction identifier of the actual operation instruction includes:

and corresponding the brand, the model, the atomic instruction or the composite instruction of the manipulator to a corresponding preset naming space to form the unique instruction identification.

Optionally, matching the unique instruction identifier with a preset rule and forming a virtual instruction includes:

matching the unique instruction identification with a preset configuration file to form a virtual instruction, wherein the configuration file comprises hardware communication modes and communication protocols of a plurality of brands and models of manipulators; the format and the communication mode of the virtual instruction correspond to the command format in the communication protocol.

Optionally, the forming the virtual instruction into a unified instruction command according to a preset format, sending the virtual instruction to a virtual manipulator and executing the virtual instruction includes:

and sending the virtual instruction to a virtual manipulator execution unit for simulating the operation of a real manipulator and executing the virtual instruction, wherein the virtual manipulator execution unit comprises at least one virtual manipulator, and each virtual manipulator execution unit is used for executing the virtual instruction with the same communication mode and communication protocol.

Optionally, the forming a feedback flag based on the unified instruction command includes:

and forming a random feedback mark through a probability distribution random number algorithm based on the time information formed by the unified instruction command.

Optionally, the probability distribution random number algorithm comprises:

and acquiring a first random number uniformly distributed in a [0, 1] interval based on the current time for forming the unified instruction command, generating a second random number according with the running probability distribution of the virtual instruction by the random number through normal distribution transformation, and comparing the second random number with a preset expected value of the probability distribution to generate the feedback mark.

Optionally, comparing the second random number with a preset expected value of the probability distribution to generate the feedback flag includes:

and calculating a difference value between the second random number and the preset expected value, wherein if the difference value is greater than 0, the feedback mark is correct in operation, and if the difference value is less than or equal to 0, the feedback mark is wrong.

Optionally, if the determination result is negative, forming a unified instruction command by the virtual instruction according to a preset format, sending the unified instruction command to the virtual manipulator and executing the unified instruction command, specifically including:

and if the entity manipulator does not return correct execution information after the preset time is exceeded, forming a unified instruction command by the virtual instruction according to a preset format, and sending the unified instruction command to the virtual manipulator for execution.

Optionally, forming the execution state and the position information of the virtual manipulator according to the feedback flag includes:

forming a feedback instruction according to the feedback mark, wherein the feedback instruction comprises instruction execution, normal instruction execution completion, instruction execution failure or instruction execution error;

and converting the feedback instruction into a corresponding execution state and acquiring corresponding position information according to a preset position mapping table.

The invention has the beneficial effects that:

forming a unique instruction identification of the actual operation instruction by identifying the instruction type in the actual operation instruction and the brand and the model of the mechanical arm, matching the unique instruction identification with a preset rule to form a virtual instruction, if the physical mechanical arm cannot correctly execute the virtual instruction, forming a unified instruction command by the virtual instruction according to a preset format, transferring the unified instruction command to the virtual manipulator for execution, forming a feedback mark based on the unified instruction command, and finally forming the execution state and position information of the virtual manipulator according to the feedback mark, the physical manipulator hardware and the virtual manipulator can be seamlessly associated, the running state of the real manipulator is simulated through the virtual manipulator, the command is input in a form of a human-computer interaction interface, the execution state and the position information of the physical manipulator or the virtual manipulator are displayed, the execution efficiency is effectively improved, and the hardware cost is reduced.

Furthermore, a random number with specific probability distribution is generated according to the occurrence time of a real-time event, feedback values of correct execution and failure of the manipulator are obtained through comparison, the actual motion state and information of the manipulator are approximated, and the control correctness and reliability of the manipulator are tested to the greatest extent; meanwhile, the problem of testing the correctness of a manipulator communication protocol, a command format and a feedback information format in advance under the condition that different brands and different types of manipulator hardware are not installed is solved, and the debugging efficiency and the debugging reliability of the manipulator of the equipment are improved.

The apparatus of the present invention has other features and advantages which will be apparent from or are set forth in detail in the accompanying drawings and the following detailed description, which are incorporated herein, and which together serve to explain certain principles of the invention.

Drawings

The above and other objects, features and advantages of the present invention will become more apparent by describing in more detail exemplary embodiments thereof with reference to the attached drawings, in which like reference numerals generally represent like parts.

Fig. 1 shows a step diagram of a method for controlling a robot according to the invention.

Fig. 2 shows a schematic diagram of a manipulator control according to an embodiment of the invention.

Fig. 3 shows a flowchart of the steps of a method for controlling a manipulator according to an embodiment of the invention.

Detailed Description

The existing nuclear fuel post-processing factory end adopts a virtual manipulator control mode based on virtual reality, and comprises a server, a model processing unit, a data acquisition unit, an I/O data exchange and transmission unit, a display unit, a touch screen and a virtual peripheral, wherein operation control instructions of the touch screen and the virtual peripheral are transmitted to the model processing unit through the data acquisition unit and the I/O data exchange and transmission unit, the model processing unit carries out model optimization and action setting, and transmits and displays processed model data on the display unit after the model data is processed again by the server.

The above method has the following disadvantages:

1) model optimization is needed, a mode of combining mesh surface simplification and material processing is adopted, wherein the mesh surface simplification is to uniformly convert various types of mesh surfaces of an original model into triangular mesh surfaces, coordinate conversion is carried out, and the complexity of a model processing unit is increased;

2) the action design in the model processing unit adopts an excitation stepping mode, and makes quantitative displacement or rotation according to the step length, so that the consistency of the action setting and the actual action is reduced;

3) the virtual peripheral devices such as the remote lever and the like can transmit the signals only by converting mechanical operation into electric signals recognized by a computer by using an electromechanical conversion data acquisition card, and errors exist in the transmission rate and the accuracy of transmitted information of the data acquisition card;

4) the data acquisition unit acquires the electric signals by adopting an electromechanical conversion data acquisition card, and the anti-interference capability of the analog signals is poor, so that the hardware cost is increased, the test unreliability is improved, and the adaptability of the test environment is improved.

Therefore, the invention provides a virtual manipulator control method, which can improve the execution efficiency, reduce the hardware cost and test reliability.

The invention will be described in more detail below with reference to the accompanying drawings. While the preferred embodiments of the present invention are shown in the drawings, it should be understood that the present invention may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.

Fig. 1 shows a step diagram of a method for controlling a robot according to the invention. As shown in fig. 1, a robot control method according to the present invention, a robot including a physical robot and a virtual robot, includes:

receiving an actual operation instruction which is input by a user and aims at the physical manipulator;

identifying the instruction type, the brand and the model of the manipulator in the actual operation instruction and forming a unique instruction identifier of the actual operation instruction, wherein the unique instruction identifier at least comprises the brand name and the model of the manipulator and an instruction name corresponding to the instruction type;

matching the unique instruction identification with a preset rule and forming a virtual instruction, wherein the virtual instruction can be recognized and executed by an entity manipulator or a virtual manipulator;

executing the virtual instruction;

if the judgment result is yes, the current state and the position information of the physical manipulator are directly output;

and forming a feedback mark based on the unified instruction command, forming the execution state and position information of the virtual manipulator according to the feedback mark, and sending the execution state and position information to the human-computer interface.

Specifically, a unique instruction identification of the actual operation instruction is formed by identifying the instruction type in the actual operation instruction and the brand and the model of the manipulator, the unique instruction identification is matched with a preset rule to form a virtual instruction, if the physical manipulator cannot correctly execute the virtual instruction, forming a unified instruction command by the virtual instruction according to a preset format, transferring the unified instruction command to the virtual manipulator for execution, forming a feedback mark based on the unified instruction command, and finally forming the execution state and position information of the virtual manipulator according to the feedback mark, the physical manipulator hardware and the virtual manipulator can be seamlessly associated, the running state of the real manipulator is simulated through the virtual manipulator, the command is input in a form of a human-computer interaction interface, the execution state and the position information of the physical manipulator or the virtual manipulator are displayed, the execution efficiency is effectively improved, and the hardware cost is reduced.

In one example, the instruction categories include atomic instructions and compound instructions, wherein the atomic instructions include an initialization instruction, a search origin instruction, a horizontal movement instruction, a vertical movement instruction, a grab instruction, a place instruction, an origin return instruction, a flip instruction, and a graphics instruction; the compound command class includes commands for the robot to move from an initial position to a destination position and commands for the robot to pick and place a component from the initial position to the destination position.

Specifically, taking a semiconductor cleaning device as an example, the atomic instruction category mainly includes: initialization instructions, origin point searching instructions, horizontal moving instructions, vertical moving instructions, wafer grabbing instructions, wafer placing instructions, origin point returning instructions, overturning instructions, Map (graphical) instructions and the like. The compound instruction categories mainly include: the manipulator moves from the initial position to the target position, and the manipulator grabs the wafer from the initial position and puts the wafer to the target position.

In one example, forming the unique instruction identification of the actual operation instruction includes:

and (3) corresponding the brand, the model, the atomic instruction or the composite instruction of the manipulator with a corresponding preset naming space to form a unique instruction identifier.

Specifically, different classified brands and different types of atomic instructions or compound instructions are corresponding to corresponding namespaces to form unique instruction identification.

In one example, matching the unique instruction identification with a preset rule and forming the virtual instruction comprises:

matching the unique instruction identification with a preset configuration file to form a virtual instruction, wherein the configuration file comprises hardware communication modes and communication protocols of a plurality of brands and models of manipulators; the format and communication mode of the virtual instruction correspond to the command format in the communication protocol.

Specifically, the identified unique instruction identification is matched with a configuration file, and the configuration file provides hardware communication modes and instruction communication protocols of manipulators of different brands and models. And the matched instruction and the corresponding communication mode correspond to the command format in the communication protocol one by one, so that the instruction corresponds to the manipulator operation command.

In one example, the forming of the virtual instruction into a unified instruction command according to a preset format, sending the virtual instruction to the virtual manipulator and executing includes:

and sending the virtual instruction to a virtual manipulator execution unit for simulating the operation of the physical manipulator and executing the virtual instruction, wherein the virtual manipulator execution unit comprises at least one virtual manipulator, and each virtual manipulator execution unit is used for executing the virtual instruction with the same communication mode and communication protocol.

Specifically, the actual operation instructions of the manipulators with different brands and the same communication modes and communication protocols are sent to a virtual manipulator execution unit by adopting corresponding communication function methods and executed, the communication function methods exceed a preset timer value and do not return correct information, the virtual instructions form a unified instruction command according to a preset format, the communication function methods return correct information, the instruction state and information are directly fed back through manipulator hardware, and the unified instruction command forms a unified instruction command according to the rules of 'manipulator brand, instruction name, carriage return and line change'. The communication function method is well known in the art and is easy to implement, and will not be described herein.

In one example, forming the feedback flag based on the unified instruction command includes:

and forming a random feedback mark through a probability distribution random number algorithm based on the time information formed by the unified command.

Wherein, the probability distribution random number algorithm comprises:

based on the current time for forming the unified command, a first random number which is uniformly distributed in a [0, 1] interval is obtained, a second random number which accords with the running probability distribution of the virtual command is generated by the random number through normal distribution transformation, and the second random number is compared with a preset expected value of the probability distribution to generate a feedback mark.

In one example, comparing the second random number to a preset expected value of the probability distribution to generate the feedback flag comprises:

and calculating the difference value between the second random number and the preset expected value, wherein if the difference value is greater than 0, the feedback mark is correct in operation, and if the difference value is less than or equal to 0, the feedback mark is wrong.

Specifically, the feedback flag, i.e. the difference between the second random number and the preset expected value, may be set to be correct when the difference is greater than 0, i.e. it indicates that the virtual manipulator normally executes the virtual command.

In one example, if the determination result is negative, the virtual instruction forms a unified instruction command according to a preset format, and the unified instruction command is sent to the virtual manipulator and executed, and the method specifically includes:

In the specific implementation process, manipulator instructions of different brands with the same communication modes and communication protocols are sent to the virtual manipulator execution unit by adopting a communication function method, if the communication function method exceeds a preset timer value and does not return correct information, the virtual manipulator execution unit is formed, and if the communication function method returns correct information, the state and the information are directly fed back through manipulator hardware. All manipulators with different brands and the same communication mode and communication protocol form a type of virtual manipulator execution unit, and finally form a plurality of types of virtual manipulator execution units.

In one example, forming the execution state and position information of the virtual manipulator according to the feedback flag includes:

Specifically, according to a randomly generated feedback mark, a feedback instruction and information are formed according to 'manipulator brand, feedback instruction, information, carriage return and line feed', the feedback instruction is consistent with real equipment, the instruction is executed, the execution is normally completed, the execution fails, and an execution error code is obtained through analysis and construction, and the feedback instruction and the information are integrated into a unified feedback instruction. The method comprises the steps of converting the instructions which are being executed, normally completed and failed to be executed into the execution states of corresponding instructions respectively, and obtaining position information according to a preset position mapping table. And finally, outputting the instruction state and the position information to a user.

The method comprises the steps of identifying the instruction type, the brand and the model of the manipulator in an actual operation instruction, forming a unique instruction identification of the actual operation instruction, matching the unique instruction identification with the communication mode and the communication protocol of the manipulator to form a virtual instruction, sending the virtual instruction to a virtual manipulator execution unit matched with the communication mode and the communication protocol through a communication method corresponding to the communication mode and the communication protocol, seamlessly associating real manipulator hardware with the virtual manipulator, generating specific probability distribution random numbers through real-time event occurrence time, comparing to obtain correct and failed feedback values of the manipulator, approximating the real motion state and information of the manipulator, and testing the control correctness and reliability of the manipulator to the greatest extent.

Referring to fig. 2, an embodiment of the present invention further provides a manipulator control apparatus, including a command input and display unit, an identification command unit, a command analysis unit, a plurality of virtual manipulator execution units, a virtual manipulator feedback unit, an information and state analysis unit, and a feedback command unit, where the types of the plurality of virtual manipulator execution units are different, and each type of virtual manipulator execution unit correspondingly simulates all manipulators with different brands, different models, but the communication mode and the communication protocol are the same.

Wherein, the identification instruction unit realizes the functions of: receiving an operation action which is sent by an input and display unit (an input interface or a terminal) and is identified as an atomic instruction or a composite instruction with different brands and different models; the instruction parsing unit functions as: distributing the instructions to different types of virtual manipulator execution units; the virtual manipulator execution unit functions as follows: forming different types of virtual manipulator execution units, receiving different analysis instructions and respectively sending the different analysis instructions to different types of virtual manipulator feedback units; virtual manipulator feedback unit function: the virtual manipulator execution unit generates a random number dynamic feedback mark to generate state and position information according to different instructions and sends the state and position information to the information and state analysis unit; the information and state analysis and construction unit has the functions of: integrating feedback instructions received from the virtual manipulator feedback unit into a unified feedback instruction, and sending the unified feedback instruction to the feedback instruction unit; the feedback instruction unit functions as: and outputting the state and position information to a human-computer interface or a terminal.

In the specific implementation process, the identification instruction unit, the instruction analysis unit, the plurality of virtual manipulator execution units, the virtual manipulator feedback unit, the information and state analysis unit and the feedback instruction unit can be integrated into a virtual manipulator controller (software model), and a PC-end human-computer interface interacting with the virtual manipulator controller is developed, the content externally provided by the human-computer interface of the embodiment mainly comprises an input and output interface, the input and output interface comprises input interface information and output interface information, wherein the input interface information comprises: the method comprises the following steps of (1) manipulator brand, communication mode, manipulator feedback setting, manipulator initialization and operation instructions for taking or placing a film from a source station to a target station; the output interface information includes: the state of the manipulator, the information of the manipulator moving to the station and the coordinate position of the manipulator. The development and design of the program related to the virtual manipulator controller are easy to implement for those skilled in the art, and will not be described in detail herein.

Referring to fig. 3, the control flow of the robot control device according to the present embodiment is as follows:

(1) inputting interface setting manipulator parameters: and setting parameters such as the brand, the model, the communication mode, the feedback mode and the like of the entity manipulator on the input interface.

(2) Sending a manipulator operation instruction: and initializing the set parameters to form an actual operation instruction and sending the actual operation instruction to an identification instruction unit of the virtual manipulator controller.

(3) Recognizing a manipulator instruction: based on the function of the identification instruction unit, the operation instruction sent by the input interface is received, the operation instruction is identified to be an atomic instruction or a compound instruction with different brands and different models, the classified atomic instruction or compound instruction with different brands and different models corresponds to the corresponding name space, a unique instruction identifier is formed, and the unique instruction identifier is sent to the instruction analysis unit.

(4) Analyzing the received unique instruction identifier: matching the unique instruction identification with a preset configuration file based on the function of the instruction analysis unit so as to judge the brand of the manipulator in the unique instruction identification and a corresponding communication mode, wherein the configuration file provides hardware communication modes and instruction communication protocols of manipulators with different brands and models;

the specific matching process adopts a traversal manner, as shown in fig. 3, first matches a brand (model) identified by a unique instruction from a configuration file, such as: whether the brand is brand A, brand B, brand C or other brands, if the related brands are not matched in the configuration file, ending the matching process and feeding back instruction analysis failure, and if the related brands are matched, turning to a matching communication mode, such as: whether the communication mode is A communication mode, whether the communication mode is B communication mode, whether the communication mode is C communication mode or other communication modes, if the relevant communication modes are not matched in the configuration file, the matching process is ended and the instruction analysis is failed to be fed back, if the corresponding communication modes are matched, the corresponding virtual instructions are formed, wherein the virtual instructions correspond to the corresponding communication modes and the command formats in the communication protocol one to one.

The step can realize that the virtual instruction corresponds to the actual operation instruction, and then the virtual instruction with the same communication mode and communication protocol of different brands is sent to the corresponding physical manipulator or virtual manipulator execution unit to be executed by adopting a communication function method.

(5) Executing the virtual instruction:

if the physical manipulator is connected and the information that the physical manipulator returns to correct execution within the time range not exceeding the preset timer setting time is received, directly feeding back the state and position information of the manipulator through manipulator hardware to an output interface for display;

if the information of correct execution is not returned by the entity manipulator beyond the time range set by the preset timer, the virtual instruction is sent to the corresponding virtual manipulator execution unit for execution, and if the virtual manipulator execution unit matched with the communication mode and the brand in the virtual instruction does not exist in the process, the virtual instruction is executed by the type of virtual manipulator execution unit generating the communication mode and the brand signal corresponding to the virtual instruction;

the step can enable all manipulators with different brands and the same communication mode and communication protocol to form a type of virtual manipulator execution unit, and finally can form a plurality of types of virtual manipulator execution units;

and then forming a unified instruction command according to a rule of 'manipulator brand, instruction name, carriage return and line feed', and sending the unified instruction command to a virtual manipulator feedback unit.

(6) Calculating a feedback mark to form a feedback instruction: based on the function of a virtual manipulator feedback unit, receiving a unified instruction command transmitted by a virtual manipulator execution unit, generating random numbers x which are uniformly distributed in a [0, 1] interval by the current time of a user click instruction, converting the random numbers x to generate random numbers which accord with the running probability distribution of the virtual instruction, and comparing the random numbers with an expected value of the assigned probability distribution to generate a feedback mark as correct or failed;

distributing the unified command to different types of virtual manipulator feedback subunits;

according to a feedback mark set by a randomly generated user interface, forming a corresponding feedback instruction according to 'manipulator brand, feedback instruction, information, carriage return and line feed', for example forming a virtual instruction A, B, C or other normal or failed feedback instructions, and sending the feedback instruction to an information and state analysis unit, wherein the feedback instruction is consistent with the feedback instruction of the physical manipulator;

this step can simulate the physical manipulator hardware to execute the random feedback instructions of the virtual instructions.

(7) Resolve to status or location information: analyzing the received feedback instruction to obtain the instruction executing, normal execution completion, execution failure and execution error codes based on the information and state analyzing unit function, and integrating the instruction executing, normal execution completion, execution failure and execution error codes into a feedback instruction;

and respectively converting the instruction in execution, normal execution completion and execution failure into corresponding instruction states, and acquiring position information according to a preset position mapping table.

(8) And outputting the state and position information to an interface or a terminal based on the feedback instruction unit function.

For further detailed description of the present invention, reference is made to the following specific implementation cases:

the user inputs the setting parameters on the input and output interface as follows: brand name: brooks, communication mode: TCP/IP, feedback mode: success; the manipulator is: dirty Arm in ATMRobot. The user selects the Init command.

The virtual manipulator control method based on the invention obtains:

the identification instruction unit outputs: the Brooks brand double-arm manipulator initialization command is Brooks _ DirtyArm _ Init (unique command identification);

the instruction analysis unit outputs: after being executed by the instruction analysis unit, the Brooks brand dual-arm manipulator initialization instruction corresponds to a network port TCP/IP communication mode, and the initialization instruction (Brooks _ DrityArm _ Init) is as follows: 001rc InitializeResource \ r \ n (virtual instruction).

Outputting the functions of the virtual manipulator execution unit: the virtual manipulator execution unit can be divided into other execution units such as a Brooks brand internet access TCP/IP communication protocol execution unit, a Sankyo brand serial port Modbus communication protocol execution unit, a Trio brand internet access DeviceNet communication protocol execution unit and the like. And allocating a Brooks brand double-arm manipulator or single-arm manipulator initialization instruction to a Brooks brand internet protocol TCP/IP communication protocol execution unit, and executing an initialization command 001rc InitializeResource \ r \ n. Respectively adopting communication functions corresponding to communication modes for the initialization command, wherein the communication function adopted by the network port is TcpClient. Open (), a communication function adopted by the serial port is SerialPort; and if the corresponding communication function does not return abnormal information, indicating that the manipulator hardware is connected, and returning the state and the information through the manipulator hardware. If the corresponding communication function returns abnormal information (such as 'cannot be connected due to active rejection of the target computer: 127.0.0.1: 6000') or no return information exceeds the set timer time (such as 3 minutes), unifying the initialization command into a 'manipulator brand, command name, carriage return, line feed' command (unified command). The manipulator brand is in one-to-one correspondence with an integer type and a brand, and the instruction name is a specified format character string. The Brooks brand manipulator initialization command is 1, Init \ r \ n; the initialization command of the Sankyo brand mechanical arm is 2, Init \ r \ n; the initialization command of the Trio brand mechanical arm is 3, Init \ r \ n.

The virtual manipulator feedback unit outputs the following functions: after receiving the unified command '1, Init \ r \ n', the [0, 1] is obtained through the current system time (such as 2019.6.1016: 40)]The uniformly distributed random number is 0.726217463019405, and the random number is transformed into normal distribution

The random number 0.894137845872755 is compared with the preset expected value 0.5, and if the difference is greater than 0, the feedback flag is correct. And distributing the feedback mark to a brand virtual manipulator feedback subunit after obtaining the feedback mark. If the network port is connected with a real Brooks manipulator, the reading return instruction is as follows: ACK \ r \ n. If the robot is a Sankyo robot, the reading return command is 1, RES, RS0<CRLF>. When the real equipment is not connected, if the feedback mark is set to be normal by the user, a feedback instruction is formed, and the Brooks brand is '1', 'ACK \ r \ n'; the brand name of Sankyo is "2, 1, RES, RS0\ r \ n".

And outputting the information and state analysis unit by the functions, wherein if the initialized state information is as follows: InitStarted, InitCompleted, initFailed; the film taking state information is as follows: pickstared, PickCompleted, PickFailed; the position information is: station1, Station2, Station 3. Coordinate information: x, y, z are displaced from the origin. And displaying the position information corresponding to the preset position mapping table according to each Station 1.

The invention inputs the manipulator instruction through the interface without a data acquisition unit, an I/O data exchange and transmission unit and a virtual peripheral. The manipulator feedback information is completed by only an operator through the input interface to transmit a manipulator action instruction and through the analysis of the instruction in the virtual manipulator controller and the information and state analysis, so that the execution efficiency is improved, the hardware cost is reduced, and the test reliability is improved. The virtual manipulator execution unit and the feedback unit input feedback marks to transmit signals according to the interface, the accuracy of the manipulator executing action instructions is improved without the data acquisition unit and the IO data transmission unit, and transmission and signal conversion errors are reduced.

In conclusion, the manipulator control method can seamlessly associate real manipulator hardware with the virtual manipulator, generate random numbers with specific probability distribution through the occurrence time of real-time events, compare the random numbers to obtain correct and failed manipulator feedback values, approach the real motion state and information of the manipulator, and test the control correctness and reliability of the manipulator to the maximum extent. Meanwhile, a transmission mode and an action instruction are input through an interface, so that the problems that a screw rod transmission friction force is generated in the operation process of a virtual peripheral remote rod, an error is generated in the electromechanical conversion data acquisition process and the hardware cost can be reduced are solved. Meanwhile, the problem of testing the correctness of a manipulator communication protocol, a command format and a feedback information format in advance under the condition that different brands and different types of manipulator hardware are not installed is solved, and the debugging efficiency and the debugging reliability of the manipulator of the equipment are improved. The method and the device are suitable for all the fields of semiconductor equipment or industrial control and relate to control equipment operated by a mechanical hand.

Having described embodiments of the present invention, the foregoing description is intended to be exemplary, not exhaustive, and not limited to the embodiments disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments.

Claims

1. A robot control method, the robot including a physical robot and a virtual robot, the method comprising:

executing the virtual instruction;

2. The robot control method according to claim 1, wherein the instruction category includes an atomic instruction and a compound instruction, wherein,

the composite command comprises a command that the manipulator moves from the initial position to the target position and a command that the manipulator grabs the component from the initial position and puts the component to the target position.

3. The manipulator control method according to claim 2, wherein forming the unique instruction identification of the actual operation instruction includes:

4. The manipulator control method according to claim 3, wherein matching the unique instruction identification with a preset rule and forming a virtual instruction comprises:

5. The manipulator control method according to claim 4, wherein the forming of the virtual command into a unified command according to a preset format, sending the virtual command to a virtual manipulator and executing, comprises:

6. The manipulator control method according to claim 1, wherein the forming a feedback flag based on the unified command includes:

7. The robot control method according to claim 6, wherein the probability distribution random number algorithm includes:

8. The manipulator control method according to claim 7, wherein comparing the second random number with a preset expected value of the probability distribution to generate the feedback flag comprises:

9. The manipulator control method according to claim 5, wherein if the determination result is negative, forming a unified command from the virtual command according to a preset format, sending the unified command to the virtual manipulator and executing the unified command, specifically comprising:

10. The manipulator control method according to claim 1, wherein forming the execution state and the position information of the virtual manipulator based on the feedback flag includes: