CN111551037A - 一种两端带水冷的工艺管 - Google Patents
一种两端带水冷的工艺管 Download PDFInfo
- Publication number
- CN111551037A CN111551037A CN202010545036.3A CN202010545036A CN111551037A CN 111551037 A CN111551037 A CN 111551037A CN 202010545036 A CN202010545036 A CN 202010545036A CN 111551037 A CN111551037 A CN 111551037A
- Authority
- CN
- China
- Prior art keywords
- process tube
- sealing ring
- furnace door
- water
- water cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D9/00—Cooling of furnaces or of charges therein
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D9/00—Cooling of furnaces or of charges therein
- F27D2009/0002—Cooling of furnaces
- F27D2009/001—Cooling of furnaces the cooling medium being a fluid other than a gas
- F27D2009/0013—Cooling of furnaces the cooling medium being a fluid other than a gas the fluid being water
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
Abstract
Description
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202010545036.3A CN111551037A (zh) | 2020-06-15 | 2020-06-15 | 一种两端带水冷的工艺管 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN202010545036.3A CN111551037A (zh) | 2020-06-15 | 2020-06-15 | 一种两端带水冷的工艺管 |
Publications (1)
Publication Number | Publication Date |
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CN111551037A true CN111551037A (zh) | 2020-08-18 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN202010545036.3A Pending CN111551037A (zh) | 2020-06-15 | 2020-06-15 | 一种两端带水冷的工艺管 |
Country Status (1)
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CN (1) | CN111551037A (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2022160547A1 (zh) * | 2021-02-01 | 2022-08-04 | 中国电子科技集团公司第四十八研究所 | 一种碳化硅外延炉反应室 |
-
2020
- 2020-06-15 CN CN202010545036.3A patent/CN111551037A/zh active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2022160547A1 (zh) * | 2021-02-01 | 2022-08-04 | 中国电子科技集团公司第四十八研究所 | 一种碳化硅外延炉反应室 |
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Legal Events
Date | Code | Title | Description |
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PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20220310 Address after: 214000 workshop and office space on the south side of the first floor of Plant No. 4, precision machinery industrial park, Xishan District, Wuxi City, Jiangsu Province Applicant after: Sairuida intelligent electronic equipment (Wuxi) Co.,Ltd. Address before: 266000 f / F, 1022 Beilao Road, Licang District, Qingdao City, Shandong Province Applicant before: QINGDAO SUNRED ELECTRONIC EQUIPMENT Co.,Ltd. |
|
TA01 | Transfer of patent application right | ||
CB02 | Change of applicant information |
Address after: 214000 workshop and office space on the south side of the first floor of Plant No. 4, precision machinery industrial park, Xishan District, Wuxi City, Jiangsu Province Applicant after: Sairuida Intelligent Electronic Equipment (Wuxi) Co.,Ltd. Address before: 214000 workshop and office space on the south side of the first floor of Plant No. 4, precision machinery industrial park, Xishan District, Wuxi City, Jiangsu Province Applicant before: Sairuida intelligent electronic equipment (Wuxi) Co.,Ltd. |
|
CB02 | Change of applicant information |