CN111435222B - Motion table follow-up pressure compensation device, photoetching machine system and driving method thereof - Google Patents
Motion table follow-up pressure compensation device, photoetching machine system and driving method thereof Download PDFInfo
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- CN111435222B CN111435222B CN201910032973.6A CN201910032973A CN111435222B CN 111435222 B CN111435222 B CN 111435222B CN 201910032973 A CN201910032973 A CN 201910032973A CN 111435222 B CN111435222 B CN 111435222B
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- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
- G03F7/709—Vibration, e.g. vibration detection, compensation, suppression or isolation
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Abstract
The embodiment of the invention discloses a motion table follow-up pressure compensation device, a photoetching machine system and a driving method thereof. The compensation device comprises: the system comprises at least two pressure compensation channels, a pressure source and a pressure compensation control module, wherein the pressure compensation channels are positioned in the motion platform, and first channel ports of the at least two pressure compensation channels are respectively positioned on a motion windward side and a motion leeward side of the motion platform; the pressure source is communicated with the second channel opening of the pressure compensation channel and provides positive pressure or negative pressure for the pressure compensation channel; the pressure compensation control module is respectively electrically connected with the driving module of the motion table and the pressure source and is used for receiving the driving information of the motion table in the driving module in real time and controlling the pressure source to provide positive pressure or negative pressure in real time according to the driving information of the motion table. The embodiment of the invention can directly compensate the pressure fluctuation generated by the motion platform in the motion state, ensures the pressure stability in the space where the motion platform is positioned, and is beneficial to ensuring the normal work of a measurement system.
Description
Technical Field
The embodiment of the invention relates to the field of semiconductor lithography machines, in particular to a motion table follow-up pressure compensation device, a lithography machine system and a driving method thereof.
Background
Photolithography, which is a process of sequentially transferring a series of chip patterns on a mask to corresponding layers of a silicon wafer by exposure, is a very important process in the semiconductor manufacturing process and is considered as a core step in the large-scale integrated circuit manufacturing. A series of complex and time-consuming photolithography processes in semiconductor manufacturing are mainly performed by corresponding photolithography machines.
The motion platform in the photoetching machine is mainly used for bearing the silicon chip and carrying the silicon chip to complete exposure motion matched with the mask platform under the projection objective. The vertical space of the motion platform in the photoetching machine is narrow, when the motion platform moves, air flow disturbance can be generated in the surrounding air, local pressure fluctuation generated by the air flow disturbance under high-speed motion cannot be ignored, and a high-precision sensor and a measurement assembly near the motion platform can be easily influenced by disturbance force.
Disclosure of Invention
The invention provides a motion table follow-up pressure compensation device, a photoetching machine system and a driving method thereof, which are used for avoiding the interference of pressure fluctuation generated in the motion state of a motion table on a measurement system and ensuring the normal work of the photoetching machine measurement system.
In a first aspect, an embodiment of the present invention provides a motion table follow-up pressure compensation apparatus, including:
the pressure compensation channels are positioned in the motion platform, and first channel ports of the pressure compensation channels are respectively positioned on the motion windward side and the motion leeward side of the motion platform;
the pressure source is communicated with a second channel opening of the pressure compensation channel and provides positive pressure or negative pressure for the pressure compensation channel;
the pressure compensation control module is respectively electrically connected with the driving module of the motion platform and the pressure source and is used for receiving the driving information of the motion platform in the driving module in real time and controlling the pressure source to provide positive pressure or negative pressure in real time according to the driving information of the motion platform, wherein the driving information of the motion platform at least comprises acceleration driving information, deceleration driving information and uniform driving information.
Optionally, the pressure compensation control module controls the pressure source to provide positive pressure or negative pressure in real time according to the driving information of the motion table, and includes:
when the driving information of the motion platform is acceleration driving information or uniform speed driving information, the pressure compensation control module is used for controlling the pressure source to provide negative pressure to the pressure compensation channel with the first channel port positioned on the motion windward side of the motion platform and provide positive pressure to the pressure compensation channel with the first channel port positioned on the motion leeward side of the motion platform in real time according to the acceleration driving information or the uniform speed driving information;
when the driving information of the motion platform is deceleration driving information, the pressure compensation control module is used for controlling the pressure source to provide positive pressure to the pressure compensation channel with the first channel port located on the motion windward side of the motion platform and provide negative pressure to the pressure compensation channel with the first channel port located on the motion leeward side of the motion platform in real time according to the deceleration driving information.
Optionally, the pressure compensation control module controls the pressure source to provide positive pressure or negative pressure in real time according to the driving information of the motion table, and includes:
the pressure compensation control module determines pressure compensation corresponding to the driving information of the motion platform according to the driving information of the motion platform and the relation between preset motion platform driving information and pressure compensation;
and the pressure compensation control module controls the pressure source to provide positive pressure or negative pressure of preset pressure according to the pressure compensation within a preset time before the motion platform moves according to the driving information.
Optionally, the pressure value of the positive pressure provided by the pressure source ranges from 0Pa to 100Pa, and the pressure value of the negative pressure provided by the pressure source ranges from 0Pa to-100 Pa.
Optionally, the motion stage includes four side surfaces, the pressure compensation device includes four pressure compensation channels, and first channel ports of the four pressure compensation channels are respectively located on the four side surfaces of the motion stage; and the second channel openings of the four pressure compensation channels are communicated with the pressure source.
Optionally, the first channel port of the pressure compensation channel includes a plurality of first sub-channel ports, the plurality of first sub-channel ports are communicated with the second channel port, and the plurality of first sub-channel ports are uniformly distributed on one side surface of the moving table in a row along the transverse direction.
Optionally, the shape of the first sub-channel opening is one or more of circular, rectangular, triangular or elliptical.
Optionally, the first sub-channel opening is circular in shape, and the diameter of the first sub-channel opening is 8-10 mm.
Optionally, at least two air ducts are also included; the pressure source is communicated with the second channel openings of the at least two pressure compensation channels one by one through at least two air guide tubes.
Optionally, the second channel port of the pressure compensation channel comprises a plurality of second sub-channel ports, and the airway tube in communication with the second channel port comprises a plurality of sub-airway tubes in communication with the plurality of second sub-channel ports.
Optionally, the pressure source includes an air supply source and a suction source, and the air supply source and the suction source are respectively communicated with the second channel opening of the pressure compensation channel.
Optionally, the pressure compensation device further includes a compensation state switching device, and a first end of the compensation state switching device is communicated with the second channel opening of the pressure compensation channel;
the second end of the compensation state switching device is electrically connected with the pressure compensation control module, and the pressure compensation control module is used for controlling the third end of the compensation state switching device to be communicated with the air supply source in a working state or the air suction source in the working state according to the driving information of the motion table.
In a second aspect, an embodiment of the present invention further provides a lithography system including the motion stage following pressure compensation apparatus according to any one of the first aspect.
Optionally, the lithography system further comprises an illumination system, a mask stage, a mask, a projection system, a frame, a measurement system, a motion stage, and a drive module;
the mask, the mask table, the projection system and the motion table are sequentially positioned on a light path of an emitted light beam of the irradiation system; the projection system penetrates through the frame, the moving table is positioned in an inner cavity of the frame, and the measurement system is positioned on the wall of the inner cavity of the frame and faces the moving table;
the driving module is used for driving the motion table to move.
In a third aspect, an embodiment of the present invention further provides a driving method of a lithography machine, including:
the pressure compensation control module receives the driving information of the motion platform in the driving module in real time; wherein the driving information of the motion table at least comprises acceleration driving information, deceleration driving information and uniform speed driving information;
the pressure compensation control module controls the pressure source to provide positive pressure or negative pressure to at least two pressure compensation channels in real time according to the driving information of the motion table; the pressure compensation channels are positioned in the moving platform, the first channel ports of at least two pressure compensation channels are respectively positioned on the moving windward side and the moving leeward side of the moving platform, and the pressure source is communicated with the second channel ports of the pressure compensation channels.
Optionally, the controlling, by the pressure compensation control module, the pressure source to provide positive pressure or negative pressure to the at least two pressure compensation channels in real time according to the driving information of the motion stage includes:
when the driving information of the motion platform is acceleration driving information or uniform speed driving information, the pressure compensation control module controls the pressure source to provide negative pressure to the pressure compensation channel of which the first channel port is positioned on the windward side of the motion platform and provide positive pressure to the pressure compensation channel of which the first channel port is positioned on the leeward side of the motion platform in real time according to the acceleration driving information or the uniform speed driving information;
when the driving information of the motion platform is deceleration driving information, the pressure compensation control module controls the pressure source to provide positive pressure to the pressure compensation channel with the first channel port located on the motion windward side of the motion platform and provide negative pressure to the pressure compensation channel with the first channel port located on the motion leeward side of the motion platform in real time according to the deceleration driving information.
Optionally, the controlling module for pressure compensation controls the pressure source to provide positive pressure or negative pressure to at least two pressure compensation channels in real time according to the driving information of the motion table, and includes:
the pressure compensation control module determines pressure compensation corresponding to the driving information of the motion platform according to the driving information of the motion platform and the relation between preset motion platform driving information and pressure compensation;
and the pressure compensation control module controls the pressure source to provide positive pressure or negative pressure of preset pressure according to the pressure compensation within a preset time before the motion platform moves according to the driving information.
Optionally, the magnitude of the preset time is positively correlated with the length of the pressure compensation channel from the pressure source to the first channel port.
Optionally, the pressure source includes an air supply source and a suction source, and the air supply source and the suction source are respectively communicated with the second channel opening of the pressure compensation channel; the pressure compensation device also comprises a compensation state switching device, and a first end of the compensation state switching device is communicated with the second channel opening of the pressure compensation channel; the second end of the compensation state switching device is electrically connected with the pressure compensation control module;
the pressure compensation control module controls the pressure source to provide positive pressure or negative pressure to at least two pressure compensation channels in real time according to the driving information of the motion table, and the pressure compensation control module further comprises:
and the pressure compensation control module controls a third end switched by the compensation state switching device to be communicated with the air supply source in a working state or the air suction source in the working state according to the driving information of the motion platform so as to realize real-time control of the pressure source to provide positive pressure or negative pressure for at least two pressure compensation channels.
The motion table follow-up pressure compensation device, the photoetching machine system and the driving method thereof provided by the embodiment of the invention have the advantages that at least two pressure compensation channels are arranged in the motion table, and the first channel ports of the pressure compensation channels are respectively arranged on the motion windward side and the motion leeward side of the motion platform, the pressure source is controlled by the pressure compensation control module, the positive pressure or the negative pressure is provided for the pressure compensation channel according to the motion platform driving information in the driving module, so that the pressure fluctuation generated by the motion windward side and the motion leeward side of the motion platform in the motion state can be directly compensated, the pressure stability in the space where the motion platform is located is ensured, the interference of the pressure fluctuation generated by the motion windward side and the motion leeward side of the motion platform in the motion state on a measurement system of the motion platform is avoided, the measurement accuracy of the measurement system is improved, and the normal work of the photoetching machine equipment is ensured.
Drawings
FIG. 1 is a pressure distribution diagram of two motion tables under different motion states;
fig. 2 is a schematic structural diagram of a motion table follow-up pressure compensation device according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of another motion-table servo-actuated pressure compensation device provided in an embodiment of the present invention;
FIG. 4 is a schematic diagram of another motion table servo pressure compensation device according to an embodiment of the present invention;
FIG. 5 is a graph comparing pressure distributions at different times for the motion stage of FIG. 4 in the presence or absence of pressure compensation;
FIG. 6 is a graph of the average pressure of the motion stage of FIG. 4 in both the presence and absence of pressure compensation;
FIG. 7 is a schematic structural diagram of a follow-up pressure compensation device for a motion stage according to an embodiment of the present invention;
FIG. 8 is a schematic structural diagram of a follow-up pressure compensation device for a motion stage according to an embodiment of the present invention;
FIG. 9 is a schematic diagram of a system of a lithography machine according to an embodiment of the present invention;
FIG. 10 is a flowchart of a method for driving a lithography machine according to an embodiment of the present invention;
FIG. 11 is a flowchart of another driving method for a lithography machine according to an embodiment of the present invention;
FIG. 12 is a flowchart illustrating a method for driving a lithography machine according to another embodiment of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.
The embodiment of the invention carries out simulation experiments aiming at the disturbance generated by the surrounding air when the moving platform moves at high speed, the figure 1 is a pressure distribution diagram of two moving platforms under different moving states, referring to the figure 1, specifically, the pressure plane is a wall surface where a measuring system is located 10mm above the moving platform in a photoetching machine, the gray scale of the ordinate represents a pressure value, the gray scale distribution of the same wall surface in the figure 1 under the two moving states of the moving platform is different, and the moving state of the moving platform has obvious interference on the pressure fluctuation of the measuring system in the photoetching machine, so that the measuring system with higher requirement on measuring environment is easily interfered by the moving platform to cause measuring errors and influence the normal work of the photoetching machine.
In view of the above problems, embodiments of the present invention provide a motion table follow-up pressure compensation device. Fig. 2 is a schematic structural diagram of a motion stage follow-up pressure compensation device according to an embodiment of the present invention, and referring to fig. 2, the motion stage follow-up pressure compensation device includes: the pressure compensation channels 11 are positioned inside the moving platform 10, and the first channel ports 111 of the at least two pressure compensation channels 11 are respectively positioned on the moving windward side and the moving leeward side of the moving platform 10; the pressure source 12, the pressure source 12 is communicated with the second channel port 112 of the pressure compensation channel 11, and the pressure source 12 provides positive pressure or negative pressure for the pressure compensation channel 11; the pressure compensation control module 13 is electrically connected to the driving module 20 of the motion stage 10 and the pressure source 12, and is configured to receive driving information of the motion stage 10 in the driving module 20 in real time and control the pressure source 12 to provide positive pressure or negative pressure in real time according to the driving information of the motion stage 10, where the driving information of the motion stage 10 at least includes acceleration driving information, deceleration driving information, and uniform driving information.
In this case, the driving module 20 drives the motion stage 10 to move in the direction indicated by the arrow, and two pressure compensation channels 11 are disposed on the windward side and the leeward side of the motion stage 10. The pressure compensation channel 11 is provided with positive pressure or negative pressure by the pressure source 12, and when the positive pressure is provided, the pressure compensation channel 11 supplies air to the space where the motion platform 10 is located through the first channel port 111; when the pressure source 12 provides negative pressure, the pressure compensation channel 11 pumps the space where the motion stage 10 is located through the first channel port 111. In the actual movement process of the moving platform 10, the pressure fluctuation mainly comes from the action of the moving windward side and the moving leeward side with the gas molecules, and the viscosity influence of the tangential side is relatively small, so that the pressure compensation channels 11 are arranged inside the moving platform 10, and the first channel ports 111 of the two pressure compensation channels 11 are respectively arranged on the moving windward side and the moving leeward side of the moving platform 10, so that the first channel ports 111 can follow the moving platform 10 in the movement state to directly compensate the pressure fluctuation generated by the moving windward side and the moving leeward side.
According to the motion table follow-up pressure compensation device provided by the embodiment of the invention, at least two pressure compensation channels are arranged in the motion table, the first channel ports of the pressure compensation channels are respectively arranged on the motion windward side and the motion leeward side of the motion table, the pressure source is controlled by the pressure compensation control module, and positive pressure or negative pressure is provided for the pressure compensation channels according to the motion table driving information in the driving module, so that pressure fluctuation generated by the motion windward side and the motion leeward side of the motion table in a motion state can be directly compensated, the pressure fluctuation in the space where the motion table is located is ensured to be stable, the interference of the motion windward side and the motion leeward side generated in the motion state of the motion table on a measurement system of the motion table is avoided, the measurement accuracy of the measurement system is improved, and the normal work of photoetching machine equipment is ensured.
Specifically, referring to fig. 2, the pressure compensation control module 13 controls the pressure source 12 to provide positive pressure or negative pressure in real time according to the driving information of the motion stage 10, including:
when the driving information of the moving platform 10 is the acceleration driving information or the uniform speed driving information, the pressure compensation control module 13 is configured to control the pressure source 12 to provide negative pressure to the pressure compensation channel 11 of the first channel port 111 located on the windward side of the moving platform 10 and provide positive pressure to the pressure compensation channel 11 of the first channel port 111 located on the leeward side of the moving platform 10 according to the acceleration driving information or the uniform speed driving information;
when the driving information of the moving platform 10 is deceleration driving information, the pressure compensation control module 13 is configured to control the pressure source 12 to provide positive pressure to the pressure compensation channel 11 of the first channel port 111 located on the windward side of the moving platform 10 and provide negative pressure to the pressure compensation channel 11 of the first channel port 111 located on the leeward side of the moving platform 10 according to the deceleration driving information.
When the driving information of the moving platform 10 is acceleration driving information or uniform speed driving information, the moving platform performs uniform speed movement or acceleration movement, the windward side of the movement is positive pressure, and the pressure fluctuation around the movement is positive; the motion leeward side of the wind power generator is negative pressure, and the wind power generator is negative to the surrounding pressure fluctuation. At this time, the pressure source 12 can provide negative pressure for pumping air to the pressure compensation channel 11 corresponding to the windward side of the motion and provide positive pressure for supplying air to the pressure compensation channel 11 corresponding to the leeward side of the motion, thereby compensating the pressure fluctuation generated by the motion table 10 during uniform motion or accelerated motion. When the driving information of the motion platform 10 is deceleration driving information, the motion platform performs deceleration motion, the motion windward side of the motion platform is negative pressure, and the pressure fluctuation around the motion platform is negative; the leeward side is positive pressure, and the pressure fluctuation around the leeward side is positive. At this time, the pressure source 12 can supply air to the pressure compensation channel 11 corresponding to the windward side of the motion, namely, provide positive pressure, and pump air to the pressure compensation channel 11 corresponding to the leeward side of the motion, namely, provide negative pressure, so as to compensate the pressure fluctuation generated by the motion table 10 during deceleration motion.
It should be noted that the motion state of the motion stage 10 is controlled by the driving module 20, the motion stage 10 switches the motion state according to the driving information of the driving module 20, and when the motion stage 10 switches the motion state, the pressure compensation control module 13 needs to control the pressure source 12 to adaptively provide positive pressure or negative pressure to the pressure compensation channel 11 for adjustment. For example, when the motion platform 10 changes from acceleration motion to deceleration motion along the same direction, and the windward side and the leeward side of the motion are not changed, the pressure compensation channel 11 for providing positive pressure needs to be changed to provide negative pressure, and the pressure compensation channel 11 for providing negative pressure needs to be changed to provide positive pressure. When the motion platform 10 changes the motion direction in the uniform motion, the motion windward side and the motion leeward side change, and the motion windward side and the motion leeward side can be correspondingly switched to provide negative pressure to the pressure compensation channel 11 corresponding to the motion windward side behind the change direction and provide positive pressure to the pressure compensation channel 11 corresponding to the motion leeward side behind the change direction.
Optionally, the pressure value of the positive pressure provided by the pressure source 12 ranges from 0Pa to 100Pa, and the pressure value of the negative pressure provided by the pressure source ranges from 0Pa to-100 Pa. Wherein, by setting the positive pressure value not to exceed 100Pa and the negative pressure value not to be lower than-100 Pa, the positive pressure or the negative pressure provided by the pressure compensation channel 11 to the space of the motion table 10 can be ensured not to be too large, thereby avoiding the pressure source 12 from generating extra pressure fluctuation and ensuring the pressure stability of the space of the motion table 10 in the motion state.
It is understood that when the positive pressure or the negative pressure is provided to the pressure compensation channel 11 by the pressure source 12, the pressure magnitude of the positive pressure or the negative pressure is not only related to the motion state of the moving platform 10, including the motion direction, the motion speed and the motion acceleration, but also related to the size, the shape, the motion windward side and the motion leeward side of the moving platform 10, and further, may also be related to the structure, the size and the shape of the space where the moving platform 10 is located. Therefore, optionally, the pressure compensation control module 13 controls the pressure source 12 to provide positive pressure or negative pressure in real time according to the driving information of the motion stage 10, including: the pressure compensation control module 13 determines the pressure compensation corresponding to the driving information of the motion table 10 according to the driving information of the motion table 10 and the relationship between the preset driving information of the motion table and the pressure compensation; the pressure compensation control module 13 controls the pressure source to provide positive pressure or negative pressure of the preset pressure according to the pressure compensation at a preset time before the motion table moves according to the driving information.
Under the condition that the space of the motion table 10 and the space of the motion table 10 are determined, the pressure compensation is only related to the motion table driving information, and the preset relationship between the motion table driving information and the pressure compensation can be obtained through reasonable simulation or measurement calculation. Therefore, after the relationship between the preset motion stage driving information and the pressure compensation is known, the pressure compensation is determined according to the driving information, and the pressure in the space where the motion stage 10 is located in the motion state can be kept stable. In addition, since the pressure source 12 needs to provide the positive pressure or the negative pressure through the pressure compensation channel 11, the positive pressure or the negative pressure of the preset pressure is provided in advance at a preset time before the motion of the motion stage, so that the pressure compensation can be performed in time corresponding to the motion state of the motion stage 10 after a certain delay is generated through the pressure compensation channel 11, thereby preventing the delay of the pressure compensation.
For an actual structure of the motion platform, an embodiment of the present invention further provides a motion platform follow-up pressure compensation device, fig. 3 is a schematic structural diagram of another motion platform follow-up pressure compensation device provided in the embodiment of the present invention, referring to fig. 3, optionally, the motion platform 10 includes four side surfaces, the pressure compensation device includes four pressure compensation channels 11, and the first channel ports 111 of the four pressure compensation channels 11 are respectively located on the four side surfaces of the motion platform 10; the second port 112 of the four pressure compensation channels 11 is in communication with the pressure source 12.
It should be noted that the figure only shows the schematic internal structure of the pressure compensation channel 11 arranged along the Y-direction side, and the internal structure of the pressure compensation channel 11 arranged along the X-direction side is not shown. The motion platform 10 generally has a rectangular structure with four side surfaces, and the motion process of the motion platform is mostly motion on a horizontal plane, so that the two opposite side surfaces are respectively a motion windward surface and a motion leeward surface, and the pressure compensation channel 11 can be respectively provided with a channel opening for the side surface of the motion platform 10, so as to compensate the pressure wavelength generated by the motion platform 10.
With continued reference to fig. 3, optionally, at least two air ducts 14 are further included in the pressure compensation device, and the pressure source 12 is in one-to-one communication with the second channel openings 112 of the at least two pressure compensation channels 11 through the at least two air ducts 14. Likewise, only the gas ducts corresponding to the pressure compensation channels 11 in the Y-direction are shown, while the gas ducts 14 corresponding to the pressure compensation channels 11 in the X-direction are not shown. The air guide pipes 14 are arranged on the pressure compensation channels 11 in one-to-one correspondence, so that the air supply and the air exhaust of each pressure compensation channel 11 can be independently switched, namely the pressure source provides positive pressure and negative pressure, and the pressure source 12 only needs to change the pressure supply state of each pressure compensation channel.
Fig. 4 shows another following pressure compensation device for a moving platform according to an embodiment of the present invention, referring to fig. 4, further optionally, the first channel port of the pressure compensation channel 11 includes a plurality of first sub-channel ports 1111, the plurality of first sub-channel ports 1111 communicate with the second channel port 112, and the plurality of first sub-channel ports 1111 are uniformly distributed on one side surface of the moving platform 10 in a row along the transverse direction.
Also, for convenience of illustration, the internal structure of the pressure compensation channel 11 on only one side in the Y direction is shown in the figure. By arranging the outlet of the pressure compensation channel 11 at the side surface of the motion table as a plurality of first sub-channel openings 1111, positive pressure or negative pressure can be more uniformly supplied to the motion windward side and the motion leeward side, and pressure fluctuation around the motion table can be better compensated. Optionally, the first sub-channel port 1111 may be a circle as shown in fig. 4, or may be a rectangle, a triangle, or an ellipse, or the shape of each first sub-channel port 1111 may be different, which is not described herein.
As shown in FIG. 4, when the first sub-channel port 1111 is circular in shape, the diameter of the first sub-channel port 111 may be optionally 8-10 mm. The aperture of the first sub-channel port 1111 is moderate at this time, so that stable and gentle pressure can be provided, and meanwhile, the pressure compensation requirement can be met by correspondingly selecting the pressure source 12 with relatively small power.
Taking the motion table follow-up pressure compensation device shown in fig. 4 as an example, the embodiment of the invention also performs simulation verification tests to determine the effect of pressure compensation, fig. 5 is a pressure distribution comparison diagram of the motion table shown in fig. 4 at different moments under two conditions of pressure compensation and no pressure compensation, fig. 6 is an average pressure curve diagram of the motion table shown in fig. 4 under two conditions of pressure compensation and no pressure compensation, wherein the pressure distribution diagram and the average pressure curve are both the pressure condition of the wall surface at the position 10mm above the motion table shown in fig. 4, and fig. 5 corresponds to the pressure distribution diagrams of the motion table at the time t of 5ms, 10ms, 15ms and 20ms under the conditions of accelerated motion of the motion table along the X direction and decelerated motion along the Y direction from top to bottom respectively, as can be known from the comparison of fig. 5 and fig. 6, through the pressure compensation of the motion table follow-up device, the pressure fluctuation on the motion table 10 can be obviously weakened or even, it is clear that a relatively stable pressure state facilitates the measurement of the measurement system in the lithography machine and may improve the measurement accuracy of the measurement system.
Fig. 7 is a schematic structural diagram of another motion table follow-up pressure compensation device according to an embodiment of the present invention, and referring to fig. 7, in the pressure compensation device, alternatively, the second channel opening of the pressure compensation channel 11 may include a plurality of second sub-channel openings 1121, the air duct communicated with the second channel opening includes a plurality of sub-air ducts 141, and the plurality of sub-air ducts 141 are communicated with the plurality of second sub-channel openings 1121. In this case, each pressure compensation channel 11 is directly supplied with positive or negative pressure from the pressure source 12 through a sub-airway 141, so as to avoid the situation that the pressure supplied by the pressure source 12 is insufficient when the airway is shared.
Fig. 8 is a schematic structural diagram of a further motion stage servo pressure compensation device according to an embodiment of the present invention, and referring to fig. 8, the pressure source of the pressure compensation device includes an air supply source 121 and a suction source 122, and the air supply source 121 and the suction source 122 are respectively communicated with the second port 112 of the pressure compensation channel 11.
At this time, the air supply source 121 and the suction source 122 are separately controlled by the pressure compensation control module 13, and when the pressure compensation channel 11 requires a positive pressure, the air supply source 121 supplies air to provide the positive pressure, and when the pressure compensation channel 11 requires a negative pressure, the suction source 122 sucks air to provide the negative pressure.
With continued reference to fig. 8, in particular, the pressure compensation device further includes a compensation state switching device 15, a first end 151 of the compensation state switching device 15 is in communication with the second channel opening 112 of the pressure compensation channel 11; the second end 152 of the compensation state switching device 15 is electrically connected to the pressure compensation control module 13, and the pressure compensation control module 13 is configured to control the third end 153 of the compensation state switching device 15 to be conducted with the air supply source 121 in the working state or the air suction source 122 in the working state according to the driving information of the motion stage 10.
The compensation state switching device 15 can be conducted with the air supply source 121 or with the suction source 122 by controlling the third terminal 153. Specifically, since the motion state of the motion table 10 includes the motion direction and the acceleration state, the first channel port 111 of any one of the pressure compensation channels 11 in the motion table 10 may be located on the motion windward side or the motion leeward side of the motion table 10, so that the supply of the positive pressure or the negative pressure by the pressure source 12 needs to be switched according to the state of the motion table 10, for example, when the motion table 10 changes from the acceleration motion to the deceleration motion, it is obvious that the pressure compensation channel 11 corresponding to the first channel port 111 located on the motion windward side needs to be switched from the negative pressure supplied by the suction source 122 to the positive pressure supplied by the air supply source 121, and at this time, the switching can be performed by the compensation state switching device 15.
Fig. 9 is a schematic structural diagram of a lithography system according to an embodiment of the present invention, and referring to fig. 9, the lithography system includes any one of the motion stage following pressure compensation devices 100 according to the above embodiments. The lithography machine also has the beneficial effects of the motion table follow-up pressure compensation device because the motion table follow-up pressure compensation device 100 provided by the embodiment is adopted.
With continued reference to FIG. 9, the lithography system further includes an illumination system 30, a mask 40, a mask stage 50, a projection system 60, a frame 70, a measurement system 80, a motion stage 10, and a drive module 20; the mask 40, the mask stage 50, the projection system 60 and the motion stage 10 are sequentially positioned on the light path of the emission beam of the illumination system 30; the projection system 60 penetrates through the frame 70, the motion table 10 is positioned in an inner cavity of the frame 70, and the measurement system 80 is positioned on the wall of the inner cavity of the frame 70 and faces the motion table 10; the driving module 20 is used for driving the motion stage 10 to move.
An embodiment of the present invention further provides a driving method of a lithography machine, and fig. 10 is a flowchart of the driving method of the lithography machine provided in the embodiment of the present invention, and with reference to fig. 9 and fig. 10, the driving method includes:
s110, the pressure compensation control module receives the driving information of the motion platform in the driving module in real time; the driving information of the motion platform at least comprises acceleration driving information, deceleration driving information and uniform speed driving information;
s120, the pressure compensation control module controls the pressure source to provide positive pressure or negative pressure to at least two pressure compensation channels in real time according to the driving information of the motion platform; the pressure compensation channels are positioned in the moving platform, the first channel ports of the at least two pressure compensation channels are respectively positioned on the moving windward side and the moving leeward side of the moving platform, and the pressure source is communicated with the second channel ports of the pressure compensation channels.
According to the drive method of the photoetching machine provided by the embodiment of the invention, the pressure compensation control module is used for receiving the drive information of the motion platform in the drive module in real time, and the pressure source is controlled in real time according to the drive information to provide positive pressure or negative pressure to at least two pressure compensation channels of which the first channel ports are respectively arranged on the motion windward side and the motion leeward side of the motion platform, so that the pressure fluctuation generated by the motion windward side and the motion leeward side of the motion platform in a motion state can be directly compensated, the pressure stability of the space where the motion platform is positioned is ensured, the interference of the pressure fluctuation generated by the motion windward side and the motion leeward side of the motion platform on a measurement system of the motion platform is avoided, the measurement accuracy of the measurement system is improved, and the normal work of photoetching machine equipment is ensured.
Wherein, S120, the pressure compensation control module, according to the driving information of the motion table, controlling the pressure source to provide positive pressure or negative pressure to the at least two pressure compensation channels in real time comprises: when the driving information of the motion platform is acceleration driving information or uniform speed driving information, the pressure compensation control module is used for controlling the pressure source to provide negative pressure for a pressure compensation channel of which the first channel port is positioned on the motion windward side of the motion platform and provide positive pressure for a pressure compensation channel of which the first channel port is positioned on the motion leeward side of the motion platform in real time according to the acceleration driving information or the uniform speed driving information;
when the driving information of the motion platform is deceleration driving information, the pressure compensation control module is used for controlling the pressure source to provide positive pressure to the pressure compensation channel of the first channel port on the motion windward side of the motion platform and provide negative pressure to the pressure compensation channel of the first channel port on the motion leeward side of the motion platform in real time according to the deceleration driving information.
In addition, in view of the fact that there is a certain delay in the pressure response of the first channel port when the pressure source provides positive pressure or negative pressure to the pressure compensation channel, an embodiment of the present invention further provides a driving method of a lithography machine, and fig. 11 is a flowchart of another driving method of a lithography machine provided by an embodiment of the present invention, and with reference to fig. 11, the driving method includes:
s210, the pressure compensation control module receives the driving information of the motion platform in the driving module in real time; the driving information of the motion platform at least comprises acceleration driving information, deceleration driving information and uniform speed driving information;
s220, the pressure compensation control module determines pressure compensation corresponding to the driving information of the motion platform according to the driving information of the motion platform and the relation between the preset driving information of the motion platform and the pressure compensation;
s230, the pressure compensation control module presets time before the motion platform moves according to the driving information and controls the pressure source to provide positive pressure or negative pressure of preset pressure according to pressure compensation; the pressure compensation channels are positioned in the moving platform, the first channel ports of the at least two pressure compensation channels are respectively positioned on the moving windward side and the moving leeward side of the moving platform, and the pressure source is communicated with the second channel ports of the pressure compensation channels.
Wherein the preset time is positively correlated with the length of the pressure compensation channel from the pressure source to the first channel port.
Further, in order to realize that the pressure source provides positive pressure and negative pressure separately, the embodiment of the present invention provides the motion table follow-up pressure compensation device as shown in fig. 8, wherein the pressure source of the pressure compensation device includes an air supply source and an air suction source, and the air supply source and the air suction source are respectively communicated with the second channel opening of the pressure compensation channel; the pressure compensation device also comprises a compensation state switching device, and a first end of the compensation state switching device is communicated with a second channel opening of the pressure compensation channel; and the second end of the compensation state switching device is electrically connected with the pressure compensation control module. For the pressure compensation device, an embodiment of the present invention further provides a driving method of a lithography machine, and fig. 12 is a flowchart of a driving method of another lithography machine provided by an embodiment of the present invention, and with reference to fig. 8 and 12, the driving method includes:
s310, the pressure compensation control module receives the driving information of the motion platform in the driving module in real time; the driving information of the motion platform at least comprises acceleration driving information, deceleration driving information and uniform speed driving information;
s320, the pressure compensation control module controls a third end switched by the compensation state switching device to be communicated with an air supply source in a working state or an air suction source in the working state according to the driving information of the motion platform so as to realize real-time control of the pressure source to provide positive pressure or negative pressure for at least two pressure compensation channels; the pressure compensation channels are positioned in the moving platform, the first channel ports of the at least two pressure compensation channels are respectively positioned on the moving windward side and the moving leeward side of the moving platform, and the pressure source is communicated with the second channel ports of the pressure compensation channels.
It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious modifications, rearrangements, combinations and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.
Claims (19)
1. A motion stage compliant pressure compensation apparatus comprising:
the pressure compensation channels are positioned in the motion platform, and first channel ports of the pressure compensation channels are respectively positioned on the motion windward side and the motion leeward side of the motion platform;
the pressure source is communicated with a second channel opening of the pressure compensation channel and provides positive pressure or negative pressure for the pressure compensation channel;
the pressure compensation control module is respectively electrically connected with the driving module of the motion platform and the pressure source and is used for receiving the driving information of the motion platform in the driving module in real time and controlling the pressure source to provide positive pressure or negative pressure in real time according to the driving information of the motion platform, wherein the driving information of the motion platform at least comprises acceleration driving information, deceleration driving information and uniform driving information.
2. The pressure compensation device of claim 1, wherein the pressure compensation control module controls the pressure source to provide positive pressure or negative pressure in real time according to the driving information of the motion stage, and comprises:
when the driving information of the motion platform is acceleration driving information or uniform speed driving information, the pressure compensation control module is used for controlling the pressure source to provide negative pressure to the pressure compensation channel with the first channel port positioned on the motion windward side of the motion platform and provide positive pressure to the pressure compensation channel with the first channel port positioned on the motion leeward side of the motion platform in real time according to the acceleration driving information or the uniform speed driving information;
when the driving information of the motion platform is deceleration driving information, the pressure compensation control module is used for controlling the pressure source to provide positive pressure to the pressure compensation channel with the first channel port located on the motion windward side of the motion platform and provide negative pressure to the pressure compensation channel with the first channel port located on the motion leeward side of the motion platform in real time according to the deceleration driving information.
3. The pressure compensation device of claim 2, wherein the pressure compensation control module controls the pressure source to provide positive pressure or negative pressure in real time according to the driving information of the motion stage, and comprises:
the pressure compensation control module determines pressure compensation corresponding to the driving information of the motion platform according to the driving information of the motion platform and the relation between preset motion platform driving information and pressure compensation;
and the pressure compensation control module controls the pressure source to provide positive pressure or negative pressure of preset pressure according to the pressure compensation within a preset time before the motion platform moves according to the driving information.
4. A pressure compensating device as claimed in claim 3, wherein the pressure source provides a positive pressure at a pressure value in the range 0 to 100Pa and a negative pressure at a pressure value in the range 0 to-100 Pa.
5. The pressure compensation device of claim 1, wherein the motion stage comprises four sides, the pressure compensation device comprises four pressure compensation channels, and first channel ports of the four pressure compensation channels are respectively located at the four sides of the motion stage; and the second channel openings of the four pressure compensation channels are communicated with the pressure source.
6. The pressure compensation device of claim 5, wherein the first opening of the pressure compensation channel comprises a plurality of first sub-openings, the plurality of first sub-openings are communicated with the second opening, and the plurality of first sub-openings are uniformly distributed on one side surface of the motion table along a transverse direction in a row.
7. A pressure compensating device as claimed in claim 6, wherein the first sub-channel port is one or more of circular, rectangular, triangular or elliptical in shape.
8. A pressure compensating device as claimed in claim 6, wherein the first sub-channel mouth is circular in shape and has a diameter of 8-10 mm.
9. A pressure compensating device as claimed in claim 5 or 6, further comprising at least two gas ducts; the pressure source is communicated with the second channel openings of the at least two pressure compensation channels one by one through at least two air guide tubes.
10. The pressure compensating device of claim 9, wherein the second opening of the pressure compensating channel comprises a second plurality of sub-openings, and the airway tube in communication with the second opening comprises a plurality of sub-airway tubes in communication with the second plurality of sub-openings.
11. The pressure compensating device of claim 1, wherein the pressure source comprises a gas supply and a suction source, the gas supply and suction sources being in respective communication with the second port of the pressure compensating channel.
12. The pressure compensating device of claim 11, further comprising a compensation state switching device, a first end of the compensation state switching device being in communication with the second channel opening of the pressure compensation channel;
the second end of the compensation state switching device is electrically connected with the pressure compensation control module, and the pressure compensation control module is used for controlling the third end of the compensation state switching device to be communicated with the air supply source in a working state or the air suction source in the working state according to the driving information of the motion table.
13. A lithography system comprising a motion stage compliant pressure compensation device as claimed in any one of claims 1 to 12.
14. The lithography system of claim 13, further comprising an illumination system, a mask stage, a mask, a projection system, a frame, a measurement system, a motion stage, and a drive module;
the mask, the mask table, the projection system and the motion table are sequentially positioned on a light path of an emitted light beam of the irradiation system; the projection system penetrates through the frame, the moving table is positioned in an inner cavity of the frame, and the measurement system is positioned on the wall of the inner cavity of the frame and faces the moving table;
the driving module is used for driving the motion table to move.
15. A method of driving a lithography machine, comprising:
the pressure compensation control module receives the driving information of the motion platform in the driving module in real time; wherein the driving information of the motion table at least comprises acceleration driving information, deceleration driving information and uniform speed driving information;
the pressure compensation control module controls the pressure source to provide positive pressure or negative pressure to at least two pressure compensation channels in real time according to the driving information of the motion table; the pressure compensation channels are positioned in the moving platform, the first channel ports of at least two pressure compensation channels are respectively positioned on the moving windward side and the moving leeward side of the moving platform, and the pressure source is communicated with the second channel ports of the pressure compensation channels.
16. The driving method according to claim 15, wherein the pressure compensation control module controlling the pressure source to provide positive pressure or negative pressure to at least two pressure compensation channels in real time according to the driving information of the motion stage comprises:
when the driving information of the motion platform is acceleration driving information or uniform speed driving information, the pressure compensation control module controls the pressure source to provide negative pressure to the pressure compensation channel of which the first channel port is positioned on the windward side of the motion platform and provide positive pressure to the pressure compensation channel of which the first channel port is positioned on the leeward side of the motion platform in real time according to the acceleration driving information or the uniform speed driving information;
when the driving information of the motion platform is deceleration driving information, the pressure compensation control module controls the pressure source to provide positive pressure to the pressure compensation channel with the first channel port located on the motion windward side of the motion platform and provide negative pressure to the pressure compensation channel with the first channel port located on the motion leeward side of the motion platform in real time according to the deceleration driving information.
17. The driving method according to claim 16, wherein the pressure compensation control module controls the pressure source to provide positive pressure or negative pressure to at least two pressure compensation channels in real time according to the driving information of the motion stage, and comprises:
the pressure compensation control module determines pressure compensation corresponding to the driving information of the motion platform according to the driving information of the motion platform and the relation between preset motion platform driving information and pressure compensation;
and the pressure compensation control module controls the pressure source to provide positive pressure or negative pressure of preset pressure according to the pressure compensation within a preset time before the motion platform moves according to the driving information.
18. The driving method according to claim 17, wherein the magnitude of the preset time is positively correlated with the length of the pressure compensation passage from the pressure source to the first passage port.
19. The driving method according to claim 15, wherein the pressure source includes a gas supply source and a suction source, the gas supply source and the suction source being respectively communicated with the second passage opening of the pressure compensation passage; the pressure compensation device also comprises a compensation state switching device, and a first end of the compensation state switching device is communicated with the second channel opening of the pressure compensation channel; the second end of the compensation state switching device is electrically connected with the pressure compensation control module;
the pressure compensation control module controls the pressure source to provide positive pressure or negative pressure to at least two pressure compensation channels in real time according to the driving information of the motion table, and the pressure compensation control module further comprises:
and the pressure compensation control module controls a third end switched by the compensation state switching device to be communicated with the air supply source in a working state or the air suction source in the working state according to the driving information of the motion platform so as to realize real-time control of the pressure source to provide positive pressure or negative pressure for at least two pressure compensation channels.
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