CN111405818B - Micro-channel self-adaptive cooling system integrated with temperature sensor - Google Patents

Micro-channel self-adaptive cooling system integrated with temperature sensor Download PDF

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Publication number
CN111405818B
CN111405818B CN202010216038.8A CN202010216038A CN111405818B CN 111405818 B CN111405818 B CN 111405818B CN 202010216038 A CN202010216038 A CN 202010216038A CN 111405818 B CN111405818 B CN 111405818B
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temperature
micro
channel
unit
temperature sensor
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CN111405818A (en
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王韬
安春全
吴传贵
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University of Electronic Science and Technology of China
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University of Electronic Science and Technology of China
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00—Constructional details common to different types of electric apparatus
    • H05K7/20—Modifications to facilitate cooling, ventilating, or heating
    • H05K7/20218—Modifications to facilitate cooling, ventilating, or heating using a liquid coolant without phase change in electronic enclosures
    • H05K7/20281—Thermal management, e.g. liquid flow control

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  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)

Abstract

A micro-channel self-adaptive heat dissipation system integrated with a temperature sensor belongs to the field of heat management. The heat dissipation system comprises a piezoelectric micropump, a micro-channel radiator, a data collector, a function generator, a voltage amplifier and a self-adaptive controller; the self-adaptive controller controls the data collector to collect the resistance value of the temperature sensor in the micro-channel radiator, the resistance value is converted into temperature, the measured temperature is compared with the set temperature, the output result is amplified by the voltage amplifier and then input into the function generator, and the output flow of the piezoelectric micropump is changed through the waveform output by the function generator. The invention realizes the real-time monitoring and control of the temperature of the micro-channel radiator, and the temperature of the micro-channel radiator is always kept at the set temperature basically unchanged through the closed-loop feedback control of the whole system. The invention has good heat dissipation capability and good temperature uniformity, effectively improves the stability of a heat dissipation system, and is suitable for the heat management of electronic chips, power devices or other equipment.

Description

Micro-channel self-adaptive cooling system integrated with temperature sensor
Technical Field
The invention belongs to the field of thermal management, relates to a micro-channel radiator, and particularly relates to a micro-channel self-adaptive radiating system integrated with a temperature sensor.
Background
The micro-channel radiator is developed mainly for solving the cooling of high-density electronic devices and the heat transfer problem of micro-electromechanical systems, and has the structure that a certain number of micro-channels which are not mutually influenced are formed in the radiator, so that liquid is shunted from the micro-channels, and a better radiating effect is achieved. In a single-layer microchannel heat sink, coolant flows through microchannels in one direction to carry away heat on the bottom wall, and the flow rate of the coolant is different, and the heat carried away is also different. However, in practical applications, the power of the electronic chip and the power device is not constant, the time is high and the time is low, the generated heat will change accordingly, and the external environment temperature will also affect the operating temperature. Therefore, the temperature in the micro-channel radiator is further controlled, the working efficiency or the heat dissipation capacity of the micro-channel radiator is changed according to the actual working condition, and the micro-channel radiator has important function and significance for the heat management of electronic chips and power devices in practical application.
However, the current micro-channel heat sink does not have the function of adjusting the heat dissipation capability with the change of the working temperature. In the prior art, a temperature sensor is usually externally arranged at each of a liquid inlet and a liquid outlet of a micro-channel radiator, or a temperature sensor is externally arranged at a certain position of a non-micro-channel radiator in a cooling liquid circulating system, or a temperature sensor is internally arranged in a channel to read and feed back the temperature of cooling liquid. But the micro-channel radiator only has the function of monitoring and reading temperature, when the temperature of the device rises, the micro-channel radiator does not increase the flow to reduce the temperature of the device, and the device can be damaged when the temperature is too high; when the temperature of the device is reduced, the micro-channel radiator can not reduce the power and reduce the flow to save the energy consumption.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides a micro-channel self-adaptive cooling system integrated with a temperature sensor, which aims to change the working efficiency or the cooling capacity of a micro-channel radiator according to the change of the actual working temperature so as to keep the working temperature of an electronic chip and a device at an appropriate temperature as far as possible.
The technical scheme adopted by the invention is as follows:
a micro-channel self-adaptive cooling system integrated with a temperature sensor is characterized by comprising a piezoelectric micro-pump, a micro-channel radiator, a data collector, a function generator, a voltage amplifier and a self-adaptive controller; the micro-channel radiator is integrated with a temperature sensor, and the self-adaptive controller comprises a central control unit, a data acquisition unit, a temperature conversion unit, a temperature comparison unit, a data processing unit and a signal output unit;
the central control unit controls the data acquisition unit through the data acquisition unit, so that the data acquisition unit acquires the resistance value of the temperature sensor; the collected resistance value is transmitted to the temperature comparison unit after being converted into temperature by the temperature conversion unit; the temperature comparison unit compares the converted temperature T with a set temperature T0Comparing, and transmitting the obtained result to a data processing unit; the data processing unit processes the result according to the comparison result, and when the measured temperature T is more than the set temperature T0When, if T-T0If > 3, the output U is 12, otherwise the output U is 1/3 (T-T)0)2+8/3(T－T0) + 1; when the measured temperature T is less than or equal to the set temperature T0If so, outputting U to be 1, wherein U is the voltage signal value transmitted to the next unit; the signal output by the data processing unit is transmitted to the signalThe central control unit controls the signal output unit, transmits the signal received by the signal output unit to the voltage amplifier, amplifies the signal by the voltage amplifier and inputs the amplified signal to the function generator; the waveform output by the function generator changes the output flow of the piezoelectric micropump, so that the heat dissipation capacity of the micro-channel radiator is adjusted, and the purpose of controlling the temperature in the micro-channel radiator is achieved.
Further, the piezoelectric micropump is a pump with adjustable flow.
Further, the micro-channel radiator is a micro-channel radiator integrated with at least one temperature sensor, and the temperature sensor is integrated at the bottom of the micro-channel.
Compared with the prior art, the invention has the beneficial effects that:
the micro-channel self-adaptive cooling system integrated with the temperature sensor provided by the invention realizes real-time monitoring and control of the temperature of the micro-channel radiator, and the temperature of the micro-channel radiator is always kept at the set temperature basically through closed-loop feedback control of the whole system. The invention has the advantages of good heat dissipation capability, good temperature uniformity and the like, effectively improves the stability of a heat dissipation system, and is suitable for heat management of electronic chips, power devices or other equipment.
Drawings
FIG. 1 is a schematic structural diagram of a micro-channel adaptive cooling system integrated with a temperature sensor according to the present invention;
FIG. 2 is a schematic structural diagram of an adaptive controller in the micro flow channel adaptive cooling system integrated with a temperature sensor according to the present invention;
FIG. 3 is a schematic diagram of a micro-channel heat sink in the micro-channel adaptive cooling system integrated with a temperature sensor according to an embodiment; wherein, 1 and 2 are water inlet and outlet of the radiator respectively, and 3 is a micro-channel of the radiator;
FIG. 4 shows the test results of the micro-channel adaptive cooling system with integrated temperature sensor provided in the embodiment when the power of the heat source is constant;
FIG. 5 is a schematic diagram of an embodiment of a micro-channel adaptive cooling system integrated with a temperature sensor, showing the output efficiency of a piezoelectric micro-pump when the set temperature of the system is constant;
fig. 6 is a micro flow channel adaptive cooling system integrated with a temperature sensor according to an embodiment, where the temperature measured by the temperature sensor changes when the set temperature of the system is not changed.
Detailed Description
The technical scheme of the invention is detailed below by combining the accompanying drawings and the embodiment.
As shown in fig. 1, the micro flow channel adaptive cooling system integrated with a temperature sensor provided by the present invention includes a piezoelectric micro pump, a micro flow channel radiator, a data collector, a function generator, a voltage amplifier and an adaptive controller; the micro-channel radiator is a micro-channel radiator integrated with a temperature sensor, and the self-adaptive controller comprises a central control unit, a data acquisition unit, a temperature conversion unit, a temperature comparison unit, a data processing unit and a signal output unit, as shown in fig. 2;
the central control unit of the self-adaptive controller controls the data acquisition unit through the data acquisition unit, so that the data acquisition unit acquires the resistance value of the temperature sensor in the micro-channel radiator; the acquired resistance value is returned to a temperature conversion unit in the self-adaptive controller, and the acquired resistance value is converted into an actual temperature according to a pre-acquired standard curve of temperature-resistance and then is transmitted to a temperature comparison unit; the temperature comparison unit compares the converted temperature T with a set temperature T0Comparing, and transmitting the obtained result to a data processing unit; the data processing unit processes the result according to the comparison result, and when the measured temperature T is more than the set temperature T0When, if T-T0If > 3, the output U is 12, otherwise the output U is 1/3 (T-T)0)2+8/3(T－T0) + 1; when the measured temperature T is less than or equal to the set temperature T0If so, outputting U to be 1, wherein U is the voltage signal value transmitted to the next unit; the signal output by the data processing unit is transmitted to the signal output unit, the central control unit controls the signal output unit, the signal received by the signal output unit is transmitted to the voltage amplifier, and the signal is amplified by the voltage amplifier and then input into the function transmitterThe generator is used for adjusting the voltage amplitude of the driving signal generated by the function generator; the change of the output waveform voltage amplitude of the function generator directly influences the output flow of the piezoelectric micropump, so that the heat dissipation capacity of the micro-channel heat sink is adjusted, and the temperature in the micro-channel heat sink is kept basically unchanged all the time. Therefore, the effect that the heat dissipation capacity of the radiator is self-adaptively matched along with the change of the power consumption of the heat source chip is achieved, and the heat source chip is kept to have stable temperature all the time under different working conditions.
Examples
In this embodiment, the hardware configuration of the data collector is the most common C-DAQ method, Keithley2700 is used as the data collector of the system, and the liquid PS22L piezoelectric micropump manufactured by CurieJet is used. The Keithley2700 data acquisition device has the highest acquisition speed of 500 channels/second, but the accuracy of acquired data is reduced along with the increase of the scanning speed, so that the balance between the acquisition speed and the scanning speed is needed, the appropriate scanning speed is set, and a large amount of experimental data show that the scanning speed is generally set to be 0.002-1 second to be optimal. When the PS22L piezoelectric micropump works, a direct current voltage signal/alternating current voltage signal needs to be externally connected, the normal working power is generally 0.2-0.5 w, the maximum flow can reach 40ml/min, but the actual flow is influenced by flow resistance and cooling liquid, and the actual flow has large deviation. The micro-channel heat sink structure adopted in the embodiment is as shown in fig. 3, and is prepared on a silicon wafer with the thickness of 800nm by adopting laser etching and the thickness of 15mm x 20 mm. Wherein 1 and 2 are water inlets and water outlets of the radiator, the diameter is 1mm, and the depth is 500 nm; 3 is the micro-channel of the radiator, the width is 0.05mm, the length is 9mm, and the depth is 500 nm. The temperature sensor adopted by the embodiment is a film temperature sensor, and is obtained by carrying out magnetron sputtering and electron beam evaporation deposition on a Ti/Pt/Cr/Au metal layer and then stripping with an acetone solvent, and the temperature of 0-200 ℃ can be accurately measured.
The test data of the micro flow channel adaptive cooling system obtained in the embodiment are shown in fig. 4, 5, and 6. FIG. 4 tests the control capability of the system for different target temperatures at constant heat source power; firstly, 1W of heating power is applied to the heat source, then the self-adaptive heat dissipation system is started, the target temperature of the system is set to be 27 degrees, and as can be seen from the figure, the system initially controls the piezoelectric micropump to output at a flow rate close to 40%, and then the output is quickly reduced to 10%, and at the moment, the temperature is quickly stabilized to be 27 degrees and is kept unchanged. Setting the target temperature to 25 ℃ in 100s, and controlling the micro pump to output 80% of flow rate by the system at the moment so as to rapidly reduce the temperature; the micro-pump output then gradually fell back to around 40% where the temperature stabilized to 25.5 degrees.
As can be seen from fig. 5 and 6, when the heat source applies 0.5W of power, the temperature measured by the system is greater than the set temperature, the micro pump is controlled to output at the maximum power, the temperature is reduced to be close to the set temperature, the output power changes along with the temperature in real time, the temperature is stabilized to be close to 21.4 ℃, and the output power is stabilized to be close to 62.5%; when the power of the heat source is changed to 0.9W, the temperature slightly rises, the power of the micropump increases along with the temperature, finally, the temperature is stabilized to be near 21.5 ℃, and the output power is stabilized to be near 67%.

Claims (3)

1. A micro-channel self-adaptive cooling system integrated with a temperature sensor is characterized by comprising a piezoelectric micro-pump, a micro-channel radiator, a data collector, a function generator, a voltage amplifier and a self-adaptive controller; the micro-channel radiator is integrated with a temperature sensor, and the self-adaptive controller comprises a central control unit, a data acquisition unit, a temperature conversion unit, a temperature comparison unit, a data processing unit and a signal output unit;
the central control unit controls the data acquisition unit through the data acquisition unit, so that the data acquisition unit acquires the resistance value of the temperature sensor; the collected resistance value is transmitted to the temperature comparison unit after being converted into temperature by the temperature conversion unit; the temperature comparison unit compares the converted temperature T with a set temperature T0Comparing, and transmitting the obtained result to a data processing unit; the data processing unit processes the data according to the result obtained by comparison, and when the temperature T is more than the set temperature T0When, if T-T0If > 3, the output U is 12, otherwise the output U is 1/3 (T-T)0)2+8/3(T－T0) + 1; when the temperature T is less than or equal to the set temperature T0If yes, outputting U as 1; data processing unit outputThe central control unit controls the signal output unit, transmits the signal received by the signal output unit to the voltage amplifier, and inputs the signal into the function generator after the signal is amplified by the voltage amplifier; the waveform output by the function generator changes the output flow of the piezoelectric micropump, and further adjusts the heat dissipation capacity of the micro-channel radiator.
2. The micro fluidic channel adaptive heat dissipation system of claim 1, wherein the piezoelectric micro pump is a flow adjustable pump.
3. The micro channel adaptive cooling system of claim 1, wherein the micro channel heat sink is a micro channel heat sink integrated with at least one temperature sensor integrated in a bottom of the micro channel heat sink.
CN202010216038.8A 2020-03-25 2020-03-25 Micro-channel self-adaptive cooling system integrated with temperature sensor Active CN111405818B (en)

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JP5150098B2 (en) * 2004-02-23 2013-02-20 日本電気株式会社 Drive circuit for piezoelectric pump and cooling system using the same
US7652372B2 (en) * 2005-04-11 2010-01-26 Intel Corporation Microfluidic cooling of integrated circuits
US9257366B2 (en) * 2013-10-31 2016-02-09 International Business Machines Corporation Auto-compensating temperature valve controller for electro-rheological fluid micro-channel cooled integrated circuit
CN103824826B (en) * 2014-02-21 2017-01-04 电子科技大学 A kind of fluid channel heat dissipating method
CN105977370B (en) * 2016-06-17 2018-06-19 电子科技大学 A kind of embedded refrigeration device based on piezoelectric micropump and preparation method thereof

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