CN111371435B - 多层铁电薄膜叠堆的***功率源应用 - Google Patents

多层铁电薄膜叠堆的***功率源应用 Download PDF

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CN111371435B
CN111371435B CN202010189685.4A CN202010189685A CN111371435B CN 111371435 B CN111371435 B CN 111371435B CN 202010189685 A CN202010189685 A CN 202010189685A CN 111371435 B CN111371435 B CN 111371435B
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高志鹏
刘艺
杨佳
刘雨生
韩旭
谷伟
高刘德
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Abstract

本发明公开了多层铁电薄膜叠堆的***功率源应用，属于功率源技术领域，利用Pb(Mg1/ 3Nb2/3)O3‑PbZrO3‑PbTiO3制备铁电薄膜单层，所述铁电薄膜单层上设置有叉指电极；将铁电薄膜单层进行叠堆，构成铁电多层薄膜叠堆样品，所述铁电多层薄膜叠堆样品的叠堆层数≥5层，铁电薄膜单层之间利用叉指电极并联连接；所述铁电薄膜单层的厚度≤100μm。本申请首次利用PMN‑PZT铁电薄膜的冲击放电特性，得到了脉冲大电流信号。发明人的这一发明对于铁电脉冲功率源的小型化发展，有着非常重要的意义。采用本申请的***功率源应用，能够有效缩小铁电脉冲功率源的体积，具有显著的进步意义。实际测试结果表明：与现有块状陶瓷作为功率源相比，本申请***功率源的体积能缩小至1/20左右。

Description

多层铁电薄膜叠堆的***功率源应用
技术领域
本发明涉及功率源技术领域，具体为多层铁电薄膜叠堆的***功率源应用。本申请首次公开了利用PMN-PZT铁电薄膜多层叠堆制备小型***功率源的应用，对于铁电脉冲电源的小型化发展具有非常重要的意义。
背景技术
***功率源技术是利用***产生冲击波作用于铁电材料，使其放出脉冲电流的功率源技术。铁电材料在前期通过外电场极化储存电荷能量，之后施加冲击压力使材料结构发生变化，释放出电荷能量。因此，利用铁电陶瓷的极化储能-冲击放能的性质可以制作成高功率、大电流和高电压的脉冲电源。此项技术在国防和工业领域中，有着非常重要的应用。
目前，工业界最广泛使用和研究的材料为块状的铁电陶瓷。而如何进一步降低脉冲电源的体积，或提高单位体积的电输出性能，则成为人们研究的重点。
发明内容
本发明的发明目的在于，提供多层铁电薄膜叠堆的***功率源应用，以提高单位体积的电输出性能。本申请首次利用PMN-PZT铁电薄膜的冲击放电特性，得到了脉冲大电流信号。发明人的这一发明对于铁电脉冲功率源的小型化发展，有着非常重要的意义。采用本申请，能够有效缩小铁电脉冲功率源的体积，具有显著的进步意义。
为了实现上述目的，本发明采用如下技术方案：
多层铁电薄膜叠堆的***功率源应用，利用Pb(Mg1/3Nb2/3)O3-PbZrO3-PbTiO3制备铁电薄膜单层，所述铁电薄膜单层上设置有叉指电极；将铁电薄膜单层进行叠堆，构成铁电多层薄膜叠堆样品，所述铁电多层薄膜叠堆样品的叠堆层数≥5层，铁电薄膜单层之间利用叉指电极并联连接；所述铁电薄膜单层的厚度≤100μm。
所述铁电薄膜单层的厚度为3～100μm。
所述铁电薄膜单层的压电常数d33≥400pC/N。优选的，所述铁电薄膜单层的压电常数d33为400～1000pC/N。
所述铁电薄膜单层的剩余极化强度≥20pC/cm2。优选的，所述铁电薄膜单层的压电常数d33为20～80pC/N。
所述叠堆层数为5～500层。
对铁电多层薄膜叠堆样品进行测试，测试过程如下：将铁电多层薄膜叠堆样品外电极短路连接，短路电路上串上电磁感应线圈，再将铁电多层薄膜叠堆样品置于含能材料表面，并利用环氧灌封作为铁电多层薄膜叠堆样品的支撑和绝缘；点燃含能材料，利用含能材料产生的动态冲击波作用于铁电多层薄膜叠堆样品，使其放出储存的电荷能量。
所述含能材料为***。
所述***产生的冲击压力≥5.0GPa。优选的，所述***产生的冲击压力为5.0～100.0GPa。
针对前述问题，本申请提供多层铁电薄膜叠堆的***功率源应用。目前，现有的爆轰都是用的块状陶瓷作为功率源，而对于铁电薄膜的***功率源应用，还鲜有研究。PMN-PZT铁电材料具有优良的铁电、压电性能，具有非常广泛的应用。而本申请是首次利用Pb(Mg1/3Nb2/3)O3-PbZrO3-PbTiO3(以下简称：PMN-PZT)铁电薄膜的冲击放电特性，得到了脉冲大电流信号，即首次提出PMN-PZT铁电薄膜作为***功率源的应用。这一发现对于铁电脉冲功率源的小型化发展，有着非常重要的意义。采用本申请，能大幅度减小功率源的体积，提高单位体积的电输出性能。实际测试结果表明：与现有块状陶瓷作为功率源相比，本申请***功率源的体积能缩小至1/20左右，具有显著的进步意义。
进一步，为了验证本申请的技术效果，发明人进行了实验，实验步骤如下。
(1)样品准备
PMN-PZT单层铁电薄膜的剩余极化强度>20pC/cm2，单层压电常数d33>400pC/N，单层薄膜厚度<100μm；将PMN-PZT单层铁电薄膜进行叠堆，叠堆层数>5层，每层薄膜利用叉指电极并联连接，构成铁电多层薄膜叠堆样品(如图1、图2所示，图1给出了单层PMN-PZT铁电薄膜的结构图，图2给出了铁电多层薄膜叠堆样品的叠堆示意图，图2给出了5层的叠堆示意图；图2中，位于铁电多层薄膜叠堆样品内的为叉指内电极，位于铁电多层薄膜叠堆样品外侧的为叉指外电极，正正叉指内电极之间、负负叉指内电极之间分别通过叉指外电极相连，形成功率源的正、负两极；在制备过程中，叉指电极与铁电薄膜是一起烧结出来的)。
(2)***脉冲电源的装配
将制备的铁电多层薄膜叠堆样品外电极短路连接，短路连接外电路上串上电磁感应线圈，并将铁电多层薄膜叠堆样品置于***表面，利用环氧灌封作为支撑和绝缘，如图3所示。在具体操作中，铁电多层薄膜叠堆样品的正、负极分别设置铜电极作为外电极，外电极之间通过短路导线相连，电磁感应线圈串在短路导线上，电磁感应线圈与示波器相连；铁电多层薄膜叠堆样品设置在塑料底座上，并采用环氧灌封作为支撑和绝缘，环氧灌封将铁电多层薄膜叠堆样品、铜电极、塑料底座、短路导线的一部分构成待测功率源主体；待测功率源主体整体置于***上。图3中，电磁感应线圈与示波器构成测试部分，其他部件构成装置部分。
(3)***实验与信号采集
点火***，利用******的动态冲击波作用于铁电多层薄膜叠堆样品，使其放出储存的电荷能量。当******产生的冲击压力≥5.0GPa，在外加电阻负载上能测试到脉冲电流(如图4、图5所示，图4给出了电源工作过程示意图，图5给出了采用本发明获得的典型的电流脉冲信号示意图)。
综上，本发明公开了利用Pb(Mg1/3Nb2/3)O3-PbZrO3-PbTiO3铁电薄膜多层叠堆的***功率源应用，其对于铁电脉冲电源的小型化发展具有非常重要的意义。实际测试结果表明：与现有块状陶瓷作为功率源相比，本申请***功率源的体积能缩小至1/20左右，能大幅度减小功率源的体积，提高单位体积的电输出性能。同时，实施例的***测试结果表明，本申请能满足高功率、大电流和高电压的脉冲电源的需求，可应用于国防和工业领域中，具有非常重要的意义。
附图说明
本发明将通过例子并参照附图的方式说明，其中：
图1为单层PMN-PZT铁电薄膜的结构图。
图2为铁电多层薄膜叠堆样品的堆叠示意图。
图3为测试装置的整体结构示意图。
图4为本申请***功率源的工作过程示意图。
图5为采用本发明获得的典型的电流脉冲信号示意图。
附图标记：1、PMN-PZT单层铁电薄膜，2、叉指内电极，3、叉指外电极，4、测试部分，5、装置部分，6、外电极，7、环氧灌封，8、铁电多层薄膜叠堆样品，9、***，10、塑料底座，11、短路导线，20、电磁感应线圈，21、示波器。
具体实施方式
本说明书中公开的所有特征，或公开的所有方法或过程中的步骤，除了互相排斥的特征和/或步骤以外，均可以以任何方式组合。
本说明书中公开的任一特征，除非特别叙述，均可被其他等效或具有类似目的的替代特征加以替换。即，除非特别叙述，每个特征只是一系列等效或类似特征中的一个例子而已。
下述实施例中，均采用图1～图3的装置进行测试。
实施例1
(1)样品制备
制备铁电多层薄膜叠堆样品：PMN-PZT单层铁电薄膜的剩余极化强度25pC/cm2，单层压电常数d33＝500pC/N，单层薄膜厚度80μm，叠堆层数34层，每层薄膜利用叉指电极并联连接。
(2)***脉冲电源的装配
将铁电多层薄膜叠堆外电极短路连接，外电路上串上电磁感应线圈，并利用环氧灌封作为支撑和绝缘，形成待测功率源主体；再将待测功率源主体置于***表面。
(3)***实验与信号采集
点火***，利用******的动态冲击波作用于铁电多层薄膜叠堆样品，使其放出储存的电荷能量。
本实施例中，******产生的冲击压力6.0GPa，在外加电阻负载上能测试到脉冲电流，电流信号如下表1所示。
表1实施例1的测定结果
峰值电流(A) 445
半高脉宽(μs) 2.10
响应时间(μs) 1.30
实施例2
(1)样品制备
制备铁电多层薄膜叠堆样品：PMN-PZT单层铁电薄膜的剩余极化强度25pC/cm2，单层压电常数d33＝500pC/N，单层薄膜厚度80μm，叠堆层数34层，每层薄膜利用叉指电极并联连接。
(2)***脉冲电源的装配
将铁电多层薄膜叠堆外电极短路连接，外电路上串上电磁感应线圈，再将铁电多层薄膜叠堆样品置于***表面，并利用环氧灌封作为支撑和绝缘。
(3)***实验与信号采集
点火***，利用******的动态冲击波作用于铁电多层薄膜叠堆样品，使其放出储存的电荷能量。
本实施例中，******产生的冲击压力6.5GPa，在外加电阻负载上能测试到脉冲电流，电流信号如下表2所示。
表2实施例2的测定结果
峰值电流(A) 495
半高脉宽(μs) 2.15
响应时间(μs) 1.22
实施例3
(1)样品制备
制备铁电多层薄膜叠堆样品：PMN-PZT单层铁电薄膜的剩余极化强度25pC/cm2，单层压电常数d33＝500pC/N，单层薄膜厚度80μm，叠堆层数34层，每层薄膜利用叉指电极并联连接。
(2)***脉冲电源的装配
将铁电多层薄膜叠堆外电极短路连接，外电路上串上电磁感应线圈，再将铁电多层薄膜叠堆样品置于***表面，并利用环氧灌封作为支撑和绝缘。
(3)***实验与信号采集
点火***，利用******的动态冲击波作用于铁电多层薄膜叠堆样品，使其放出储存的电荷能量。
本实施例中，******产生的冲击压力7.7GPa，在外加电阻负载上能测试到脉冲电流，电流信号如下表3所示。
表3实施例3的测定结果
峰值电流(A) 640
半高脉宽(μs) 1.89
响应时间(μs) 1.11
本发明并不局限于前述的具体实施方式。本发明扩展到任何在本说明书中披露的新特征或任何新的组合，以及披露的任一新的方法或过程的步骤或任何新的组合。

Claims (9)

1.多层铁电薄膜叠堆的***功率源应用，其特征在于，利用Pb(Mg1/3Nb2/3)O3-PbZrO3-PbTiO3制备铁电薄膜单层，所述铁电薄膜单层上设置有叉指电极；将铁电薄膜单层进行叠堆，构成铁电多层薄膜叠堆样品，所述铁电多层薄膜叠堆样品的叠堆层数≥5层，铁电薄膜单层之间利用叉指电极并联连接；所述铁电薄膜单层的厚度≤100μm；
利用含能材料产生的动态冲击波作用于铁电多层薄膜叠堆样品，使其放出储存的电荷能量。
2.根据权利要求1所述的多层铁电薄膜叠堆的***功率源应用，其特征在于，所述铁电薄膜单层的厚度为3~100μm。
3. 根据权利要求1所述的多层铁电薄膜叠堆的***功率源应用，其特征在于，所述铁电薄膜单层的压电常数d33≥400 pC/N。
4. 根据权利要求1~3任一项所述的多层铁电薄膜叠堆的***功率源应用，其特征在于，所述铁电薄膜单层的剩余极化强度≥20 pC/cm2。
5.根据权利要求1~3任一项所述的多层铁电薄膜叠堆的***功率源应用，其特征在于，所述叠堆层数为5~500层。
6.根据权利要求4所述的多层铁电薄膜叠堆的***功率源应用，其特征在于，所述叠堆层数为5~500层。
7.根据权利要求1所述的多层铁电薄膜叠堆的***功率源应用，其特征在于，对铁电多层薄膜叠堆样品进行测试，测试过程如下：将铁电多层薄膜叠堆样品外电极短路连接，短路电路上串上电磁感应线圈，再将铁电多层薄膜叠堆样品置于含能材料表面，并利用环氧灌封作为铁电多层薄膜叠堆样品的支撑和绝缘；点燃含能材料，利用含能材料产生的动态冲击波作用于铁电多层薄膜叠堆样品，使其放出储存的电荷能量。
8.根据权利要求7所述的多层铁电薄膜叠堆的***功率源应用，其特征在于，所述含能材料为***。
9. 根据权利要求8所述的多层铁电薄膜叠堆的***功率源应用，其特征在于，所述***产生的冲击压力≥5.0 GPa。
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