CN111354674A - 门型结构式定位装置 - Google Patents
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Abstract
本发明涉及一种门型结构式定位装置。其具有:平行于第一方向和第二方向的平坦基座;布置在第一方向上的两个第一线性轴,每个第一线性轴都具有第一线性驱动器,第一线性轴使得框架在第一方向上可移动。框架包括在第二方向上延伸的两个横杆,横杆固定在沿第一方向延伸的两个纵杆处,纵杆与横杆形成框架,每个纵杆与一个第一线性驱动器连接。横杆承载第二线性轴,每个第二线性轴具有平行于第二方向的第二线性驱动器,从而在横杆之间的可移动元件利用第二线性驱动器保持为在第二方向上是可移动的。灵活地构造框架,使得可移动元件除了在第一和第二方向上平移外也能围绕第三方向旋转。
Description
技术领域
本发明涉及一种门型结构式定位装置。这种定位装置例如在半导体制造中用于在平面中精确地定位可移动元件,例如晶圆台。
背景技术
由US 6798088 B2已知一种门型结构式定位装置。具有线性驱动器的两个平行引导部使得具有两个横杆的刚性框架在第一方向上是可移动的。在这些横杆之间,使得可移动元件在第二方向上是可移动的。因此,可移动元件能够在两个方向上被定位。由于框架是刚性的,可移动元件不能够围绕第三方向转动,而围绕第三方向转动可移动元件是半导体制造领域中的要求,以便例如补偿放置在平台上的晶圆的轻微转动。
因此,从EP 206696 B1已知一种门型结构式定位装置,其中,单个横杆与两个平行的线性轴灵活地连接,从而该横杆能够通过相应地控制线性轴而围绕一个方向小幅转动(小角度转动),该方向垂直于定位装置的实际加工平面。因此,可移动元件能够在平面内以所有三个自由度定位(在平面内的两个方向上平移,围绕垂直于平面的第三方向旋转,也称为平面内自由度)。该文献公开了可移动元件的位置检测的不同方法,以便能够特别精确地定位可移动元件。
US 5874820公开了前述两个文献的组合,本发明也由此出发。在该文献中公开了定位装置中的可移动框架,该框架如前述那样可移动地保持在两个平行的线性轴之间。该框架的拐角通过实心铰接部彼此灵活地联接,使得框架能够在一定界限中转动。可移动元件在框架的两个横杆之间被引导。框架和可移动元件借助空气轴承基于定位装置被引导,可移动元件还利用侧方空气轴承沿着框架的两个横杆被引导。然而,这种框架的生产是复杂且昂贵的,因为框架必须由极高价值的材料制造并且必须以用于侧方空气轴承的多个精确加工的引导面来制造。
此外,US 4098001公开了一种特殊的实心铰接部,其具有虚拟转动中心。
发明内容
本发明的目的是提供一种门型结构式定位装置,利用该定位装置能够在一个平面内以三个自由度实现可移动元件的高精度定位,该可移动元件相对于现有技术构造更简单且成本更低。
该目的通过根据本发明的门型结构式定位装置实现。该装置的有利细节由下文给出。
所公开的是一种门型结构式定位装置,具有:与第一方向和第二方向平行的平坦基座;布置在第一方向上的两个第一线性轴,每个第一线性轴具有第一线性驱动器,其中,第一线性轴使得框架在第一方向上可移动。框架包括在第二方向上延伸的两个横杆,横杆固定在沿第一方向延伸的两个纵杆处,并且纵杆与横杆一起形成框架,其中,每个纵杆与第一线性驱动器之一连接。横杆承载第二线性轴,每个第二线性轴具有平行于第二方向的第二线性驱动器,从而布置在横杆之间的可移动元件利用第二线性驱动器在第二方向上保持是可移动的。灵活地构造框架,使得可移动元件除了在第一和第二方向上的平移以外也能够围绕垂直于第一和第二方向的第三方向转动。可移动元件关于第三方向和围绕第一与第二方向的旋转由平坦基座引导,并且关于引导面的第一方向被恰好一个横杆引导,因此,该横杆用作为可移动元件的引导杆。
根据本发明,框架的仅一个引导杆由高价值材料制成并且提供有精确加工的面就足够了,而框架的其他三个杆能够由诸如铝的成本低廉的材料制成。由此,框架一方面能够实施得更轻,这带来了定位装置的动力方面的优势。另一方面,材料成本以及通过简单加工价值不太高的材料所产生的加工成本和由此产生的用于这种框架的总生产成本比现有技术更低。
如果在框架的拐角中以合适的方式将纵杆和横杆相互连接,则也能够在一定界限内关于围绕与平坦基座垂直的第三方向的旋转来定位可移动元件。对此有利的是,铰接部在框架的拐角中总共释放四个位于基座平面中的自由度。这些自由度(在此也被称为平面内自由度)是在第一方向和第二方向上平行于基座平面的平移,以及围绕垂直于基座的第三方向的旋转。在最简单的情况下,这能够通过在框架的四个拐角的每一个中的各一个实心铰接部实现,其中,固体铰接部分别释放围绕第三方向的旋转。因此,框架此时在拐角中能够具有不等于90度的角度。此时,横杆不再垂直于纵杆,但仍然相互平行。
在优选实施方式中,在预加应力的空气轴承与可移动元件之间,定位装置自身具有带虚拟转动中心的铰接部,其中,利用空气轴承在引导杆处引导可移动元件,并且虚拟转动中心位于可移动元件的重心。以这种方式,当可移动元件在第二方向上加速时不产生围绕第三方向的转矩。
附图说明
根据附图,由以下对不同实施方式的描述给出本发明的其他优点和细节。
在此示出,
图1是定位装置的3D图,
图2是定位装置的框架的俯视图,
图3是根据其他实施例的框架的俯视图,
图4是具有虚拟转动中心的铰接部,
图5是图4的铰接部在空气轴承与可移动元件之间的定位。
具体实施方式
图1示出了根据第一实施例的定位装置的3D图。平坦基座B承载两个平行的线性轴Y1、Y2,它们具有第一线性驱动器LMY1、LMY2,线性轴平行于基座B的平面中的第一方向Y。作为线性轴,在此理解为由线性引导部、线性马达和定位测量装置的组合,其常见于定位装置中。利用相应的控制能够以已知的方式定位这些轴。
线性驱动器LMY1、LMY2的可移动电枢分别与框架R的一个纵杆Ca、Cc连接。纵杆Ca、Cc与第一方向Y平行。框架R整体在第一方向Y上以可移动的方式被引导,并且能够通过第一线性驱动器LMY1、LMY2被定位。
此外,框架R具有两个横杆Cb、Cd,横杆基本上在垂直于第一方向Y的第二方向X上延伸。在该第一实施例中,纵杆和横杆Ca、Cc、Cb、Cd在框架R的拐角中利用铰接部G1、G2、G3、G4连接,铰接部实施为实心铰接部,并且分别释放围绕第三方向Z的旋转自由度,第三方向垂直于平坦基座B,而所有其他自由度通过铰接部G1、G2、G3、G4被锁定。由此,框架R能够在一定界限内变形,使得横杆Cb、Cd略微偏离第二方向X。因此,在该实施例中,铰接部G1、G2、G3、G4总共释放了四个平面内自由度。
此外,横杆Cb、Cd分别具有一个第二线性轴X1、X2,第二线性轴具有两个线性驱动器LMX1、LMX2。该第二线性驱动器LMX1、LMX2的可移动电枢与可移动元件S连接,可移动元件的定位是定位装置的真正任务。可移动元件S例如能够承载用于放置晶圆的平台,该平台随后能够利用定位装置在显微镜下被定位。由此,晶圆能够在不同位置处被检查。为了校正在放置晶圆时几乎不可避免的晶圆的轻微转动,通过相反地驱控第二线性驱动器LMX1、LMX2,借助铰接部G1、G2、G3、G4能够引起可移动元件S相应的反向转动。然后,如通常所期望的那样,晶圆的结构在显微镜下精确地平行于第一方向Y和第二方向X定向。
为了保持尽可能小的摩擦,定位装置的可移动部件配备了空气轴承L1、L2,在图2中更好地看到空气轴承的布置。出于更清楚易见的原因,在图2中以及之后的图3中没有示出线性驱动器LMY1、LMY2、LMX1、LMX2,对此请参考图1。
纵杆Ca以及进而整个框架R借助于两个侧方空气轴承L1在基座B的竖直的且在第一方向Y上延伸的凸起处被引导。这里使用的是预加应力的空气轴承,从而框架R的相对置的横杆Cc不必单独地利用侧方空气轴承被引导。但是,在横杆Cc处的这种相对置的侧方空气轴承可以是所示实施方式的可设想变型。此时,彼此相对的空气轴承相互预加应力。
框架R利用四个水平空气轴承L2相对于平坦基座B得以支撑,在图2中很好地看到空气轴承的布置,并且下面更详细地解释空气轴承的优选布置。在此,可以涉及传统的空气轴承,其由框架R的重量预加应力。但是因为框架的重量比较小,所以在此优选的是借助真空预加应力的空气轴承,以便达到水平空气轴承L2足够大的刚性。同样描述也适用于可移动元件S的水平空气轴承L2。
此外,在横杆Cd的指向框架R的内部的引导面GS处,利用预加应力的侧方空气轴承L1引导可移动元件S。因此,该横杆Cd也被称为引导杆Cd。在可移动元件S与引导杆Cd或引导面GS之间的这种侧方空气轴承L1确保,可移动元件S在第一方向Y上跟随框架R的所有移动。换而言之,可移动元件S在第一方向Y上由引导杆Cd的引导面GS引导。
特别有利的是,在框架R中只有引导杆Cd必须由特别高价值的材料(例如热膨胀系数低的或者强度特别高的材料)制成,并且关于其引导面GS必须被特别精确地加工。相反,框架R的其他杆Ca、Cb、Cc能够由价值较低的材料制成,并且不必那么精确地加工。作为用于引导杆Cd的材料,例如提供碳化硅SiC或者氧化铝Al2O3,而其余的杆能够由铝制成。对于框架R的所有杆Ca、Cb、Cc、Cd都适用的是,它们优选地构造为空心轮廓。
图3示出了本发明的另外实施例,其中改变了框架R的拐角设计。现在,在图3中右下方的拐角被构造为没有铰接部的刚性连接部。然而为了获得四个平面内自由度,右上方示出的铰接部G2`因而是实心铰接部,其除了围绕第三方向Z的旋转自由度以外还释放了在第二方向X上的平移自由度,而所有其他的自由度被锁定。因此,连同实心铰接部G1和G3的两个旋转自由度,在框架R中再次存在四个平面内自由度。该框架也能够在一定界限内变形,使得可移动元件S能够围绕第三方向Z转动。铰接部的其他组合也是可行的,只要该组合同样释放了总共四个平面内自由度。
为了如图2和图3中能很好看到那样布置水平空气轴承L2,还有以下解释:框架R通过水平空气轴承L2得到支撑以抵抗重力。在水平空气轴承L2之间的杆Ca、Cb、Cc、Cd是可振动的组件。在放置水平空气轴承L2时应该注意,在空气轴承之间的杆的共振频率大致相等。对于根据本发明的框架R来说,这导致了,框架R在平坦基座B上借助于四个水平空气轴承L2被引导,其中的两个水平空气轴承L2位于纵杆Ca、Cc下方,而且处于纵杆的靠近引导杆Cd的端部处,而另外两个水平空气轴承L2位于与引导杆Cd平行的横杆Cd下方,而且分别处于该横杆Cb的两个端部处。因此,水平空气轴承L2之间的跨过横杆Ca、Cb、Cc的间距大致相同,而由引导杆Cd跨过的水平空气轴承L2的间距略微更大。由于材料性能更好,所以虽然引导杆Cd的跨度更长,但其共振频率与由铝制成的在水平空气轴承L2之间的较短部段的共振频率大致相同。
可替代的且在图中未示出的,也能够提出,例如在更大型机器中,框架R借助于五个水平空气轴承L2在平坦基座B上被引导,其中的各两个水平空气轴承L2位于纵杆Ca、Cc的下方,而且在纵杆的靠近横杆Cb、Cd的端部处,并且其中,另一个水平空气轴承L2位于与引导杆Cd平行的横杆Cb下方,而且位于该横杆Cb的中心。这种布置还使得水平空气轴承L2之间的由铝跨接的区域的间距大致相等,并且使得沿着由高价值材料制成的引导杆Cd的间距更大。对于更小型的机器,在框架R下方仅有三个水平空气轴承就已经足够。为此,图2中的布置在杆Cb的端部处的两个空气轴承L2能够由在杆Cb中心的唯一一个空气轴承代替。
可移动元件S仅在朝向引导杆Cd的一侧上在引导杆的引导面GS处关于第一方向Y被引导的事实,导致该布置具有一定的不对称性。在可移动元件S在第二方向X上加速的情况下,仅布置在可移动元件S一侧上的很重的侧方空气轴承L1产生不希望的转矩。为了避免这种情况,使用图4中示出的具有虚拟转动轴线VA的铰接部VAG,如图5中所示,该铰接部装入在引导面GS处滑动的侧方空气轴承L1与可移动元件S之间。在此,虚拟转动轴线VA延伸穿过可移动元件S的质量重心并且垂直于平坦基座B。在具有侧方空气轴承L1的可移动元件S在第二方向X上加速时,侧方空气轴承L1与加速度成比例地产生转矩和力。转矩被传递到引导杆Cd上,力作用在可移动元件S上的虚拟转动轴线VA处。由于可移动元件S的质量重心和虚拟转动轴线VA恰好位于第二线性驱动器LMX1、LMX2的中心,第二线性驱动器LMX1、LMX2能够完美平衡地利用同样的力加速。
对于围绕中心旋转轴的转动加速度也是如此,其中,电机能够利用同样的彼此相反的力加速,并且得到理想的负荷率。
具有虚拟转动轴线VA的铰接部VAG由两个平行的板P1、P2构成,它们由两个相互倾斜的连接片V1、V2保持间距。连接片V1、V2具有薄弱点并且用作为固体铰接部,从而一个板P2能够向着另一个板P1倾斜。在此,该倾斜运动的虚拟转动轴线VA位于铰接部VAG之外。
此外,具有虚拟转动轴线VA的铰接部VAG具有机械的末端挡块EA,该末端挡块阻止过大的偏转并由此阻止铰接部VAG的损伤。在实例中,这通过一个板P2处的凸起来实现,该凸起伸入到另一板P1处的相对的容纳部或凹陷部中,而不接触另一个板。在最大偏转时,在板P2处的凸起接触在板P1中相对的凹陷部。凸起和凹陷部之间的间隙确定了铰接部VAG的最大可能偏转。
通过具有虚拟转动轴线VA的铰接部VAG,可移动元件S的围绕第三方向Z的旋转与引导杆Cd脱耦。因此,该旋转仅通过两个第二线性驱动器LMX1、LMX2来调整。
优选地,在可移动元件S上的相应结构(即例如放置晶圆的平台或卡盘)被如下地扩建,即,其中心与可移动元件S的中心重合。此时,该共同转动轴对应于最小惯性矩,并且因此实现了最大动力。另外,通过中央虚拟旋转轴不需要在X和Y方向上的额外校正,从而框架R不必为此加速。这实现了可移动元件S的节能控制。
Claims (16)
1.一种门型结构式定位装置,具有:平行于第一方向(Y)和第二方向(X)的平坦基座(B);布置在所述第一方向(Y)上的两个第一线性轴(Y1、Y2),每个第一线性轴都具有第一线性驱动器(LMY1、LMY2),其中,所述第一线性轴(Y1、Y2)使得框架(R)能在所述第一方向(Y)上移动,其中,所述框架(R)包括在所述第二方向(X)上延伸的两个横杆(Cb、Cd),所述横杆被固定在沿所述第一方向(Y)延伸的两个纵杆(Ca、Cc)处,并且所述纵杆与所述横杆(Cb、Cd)一起形成所述框架(R),其中,每个纵杆(Ca、Cc)与一个所述第一线性驱动器(LMY1、LMY2)连接,并且其中,所述横杆(Cb、Cd)承载第二线性轴(X1、X2),每个第二线性轴具有一个平行于所述第二方向(X)的第二线性驱动器(LMX1、LMX2),从而布置在所述横杆(Cb、Cd)之间的可移动元件(S)利用所述第二线性驱动器(LMX1、LMX2)保持为在所述第二方向(X)上是可移动的,其中,灵活地构造所述框架(R),使得所述可移动元件(S)除了在所述第一方向(Y)和所述第二方向(X)上平移以外也能够围绕第三方向(Z)转动,所述第三方向垂直于所述第一方向(Y)和所述第二方向(X),其中,所述可移动元件(S)关于所述第三方向(Z)和围绕所述第一方向(Y)与所述第二方向(X)的旋转被所述平坦基座(B)引导,其特征在于,所述可移动元件(S)关于引导面(GS)的所述第一方向被恰好一个所述横杆(Cb、Cd)引导,因此,所述横杆用作为所述可移动元件(S)的引导杆(Cd)。
2.根据权利要求1所述的定位装置,其特征在于,所述引导杆(Cd)通过铰接部(G1、G2、G2`)与所述纵杆(Ca、Cc)连接,所述铰接部分别实现围绕所述第三方向(Z)的旋转。
3.根据权利要求2所述的定位装置,其特征在于,在所述引导杆(Cd)处的所述铰接部之一(G2`)还实现在所述第一方向(X)上的平移。
4.根据权利要求3所述的定位装置,其特征在于,在所述框架(R)的拐角中,所述横杆(Cb)与所述纵杆(Cc)相互刚性连接。
5.根据权利要求2至4中任一项所述的定位装置,其特征在于,在所述框架(R)的所述纵杆(Ca、Cc)与所述横杆(Cb、Cd)之间,所述铰接部(G1、G2、G2`、G3、G4)将所述纵杆(Ca、Cc)与所述横杆(Cb、Cd)连接,从而赋予所述框架(R)总共四个平面内的自由度。
6.根据权利要求2至5中任一项所述的定位装置,其特征在于,所述铰接部(G1、G2、G2`、G3、G4)是实心铰接部。
7.根据前述权利要求中任一项所述的定位装置,其特征在于,所述引导杆(Cd)由与所述纵杆(Ca、Cc)和第二横杆(Cb)不同的材料制成。
8.根据权利要求7所述的定位装置,其特征在于,所述引导杆(Cd)由碳化硅或氧化铝制成。
9.根据权利要求7或8所述的定位装置,其特征在于,所述纵杆(Ca、Cc)和所述第二横杆(Cb)由铝制成。
10.根据权利要求7至9中任一项所述的定位装置,其特征在于,所述引导杆(Cd)具有空心轮廓。
11.根据权利要求7至10中任一项所述的定位装置,其特征在于,所述框架(R)借助于四个水平空气轴承(L2)在所述平坦基座(B)上被引导,两个所述水平空气轴承(L2)在所述纵杆(Ca、Cc)的下方且位于所述纵杆的靠近所述引导杆(Cd)的端部处,并且另外两个所述水平空气轴承(L2)位于与所述引导杆(Cd)平行的所述横杆(Cb)下方且分别位于该横杆(Cb)的两个端部处。
12.根据权利要求7至10中任一项所述的定位装置,其特征在于,所述框架(R)借助于五个水平空气轴承(L2)在所述平坦基座(B)上被引导,各两个所述水平空气轴承(L2)位于所述纵杆(Ca、Cc)下方且位于所述纵杆的靠近所述横杆(Cb、Cd)的端部处,并且其中,另一个所述水平空气轴承(L2)位于与所述引导杆(Cd)平行的所述横杆(Cb)的下方且位于该横杆(Cb)的中心。
13.根据前述权利要求中任一项所述的定位装置,其特征在于,所述可移动元件(S)在所述引导杆(Cd)的引导面(GS)处借助于预加应力的侧方空气轴承(L1)被引导。
14.根据前述权利要求中任一项所述的定位装置,其特征在于,在所述引导杆(Cd)的引导面(GS)与所述可移动元件(S)之间布置有铰接部(VAG),该铰接部具有用于所述可移动元件(S)围绕所述第三方向(Z)旋转的虚拟转动轴线(VA)。
15.根据权利要求14所述的定位装置,其特征在于,所述虚拟转动轴线(VA)延伸穿过所述可移动元件(S)的重心。
16.根据权利要求14或15所述的定位装置,其特征在于,所述可移动元件(S)围绕与所述第一方向(Y)和所述第二方向(X)垂直的第三方向(Z)的旋转能够借助于所述第二线性驱动器(LMX1、LMX2)来调整。
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- 2019-12-18 JP JP2019227850A patent/JP7477966B2/ja active Active
- 2019-12-19 CN CN201911317880.4A patent/CN111354674B/zh active Active
- 2019-12-19 US US16/720,013 patent/US11466809B2/en active Active
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CN116748860A (zh) * | 2023-08-16 | 2023-09-15 | 湖南路桥建设集团有限责任公司 | 一种贝雷架快速搭接用校正机构及贝雷架快速搭接方法 |
CN116748860B (zh) * | 2023-08-16 | 2023-11-21 | 湖南路桥建设集团有限责任公司 | 一种贝雷架快速搭接用校正机构及贝雷架快速搭接方法 |
Also Published As
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EP3670067B1 (de) | 2022-07-27 |
US20200200324A1 (en) | 2020-06-25 |
KR20200078315A (ko) | 2020-07-01 |
US11466809B2 (en) | 2022-10-11 |
JP2020102621A (ja) | 2020-07-02 |
CN111354674B (zh) | 2022-10-18 |
JP7477966B2 (ja) | 2024-05-02 |
EP3670067A1 (de) | 2020-06-24 |
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