CN111352089B - Two-dimensional galvanometer driving circuit system and driving method of solid-state laser radar - Google Patents

Two-dimensional galvanometer driving circuit system and driving method of solid-state laser radar Download PDF

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Publication number
CN111352089B
CN111352089B CN201811569958.7A CN201811569958A CN111352089B CN 111352089 B CN111352089 B CN 111352089B CN 201811569958 A CN201811569958 A CN 201811569958A CN 111352089 B CN111352089 B CN 111352089B
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axis angle
driving
dimensional galvanometer
slow axis
fast axis
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CN111352089A (en
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陈华钧
宋云峰
李大猛
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Zhejiang Shunchuang Intelligent Optical Technology Co ltd
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Yuyao Sunny Optical Intelligence Technology Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481Constructional features, e.g. arrangements of optical elements
    • G01S7/4817Constructional features, e.g. arrangements of optical elements relating to scanning
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481Constructional features, e.g. arrangements of optical elements
    • G01S7/4814Constructional features, e.g. arrangements of optical elements of transmitters alone

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  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Optical Radar Systems And Details Thereof (AREA)

Abstract

A two-dimensional galvanometer driving circuit system and a driving method of a solid-state laser radar are provided, wherein the driving method comprises the following steps: generating a driving instruction, wherein the driving instruction is used for controlling a micro-electro-mechanical driving unit to drive the two-dimensional galvanometer; acquiring a fast axis angle and a slow axis angle of the two-dimensional galvanometer under the action of the driving command; and generating an adjusting instruction based on the fast axis angle and the slow axis angle of the two-dimensional galvanometer under the action of the driving instruction, and the pre-calibrated driving instruction and a corresponding model between the fast axis angle and the slow axis angle of the two-dimensional galvanometer, wherein the adjusting instruction is used for controlling a micro-electro-mechanical driving unit to drive the two-dimensional galvanometer so as to change the fast axis angle and the slow axis angle of the two-dimensional galvanometer, so that the fast axis angle and the slow axis angle of the two-dimensional galvanometer meet the pre-calibrated driving instruction and the corresponding model between the two-dimensional galvanometer. Thus, the two-dimensional galvanometer is driven by the driving method to realize plane scanning.

Description

Two-dimensional galvanometer driving circuit system and driving method of solid-state laser radar
Technical Field
The invention relates to the field of solid-state laser radars, in particular to a two-dimensional galvanometer driving circuit system and a driving method of a solid-state laser radar.
Background
With the development of technology, the development direction of laser radar is shifting from rotary laser radar to solid state laser radar. The solid-state laser radar in the market is realized based on three technologies of phased array, three-dimensional imaging (3D Flash) and Micro-Electro-Mechanical System (MEMS). The solid-state laser radar technology realized by the phased array principle cancels a mechanical structure, changes the emergent angle of laser by adjusting the phase difference of a transmitting array, and strictly controls the phase through an electric signal to realize beam pointing scanning. A solid-state laser radar adopting a 3D Flash technology mainly outputs a two-dimensional or three-dimensional image by emitting area array light. The 3D Flash laser radar has good stability and low cost.
Compared with the two solid-state laser radars, the laser radar system based on the micro-electromechanical system is technically easy to realize, and has better effect and lower cost. In mems-based lidar systems, the selection of mems devices (mems-controlled optics) is a key technology. The adoption of a two-dimensional galvanometer as a micro-electromechanical system device is a feasible technical scheme.
However, two-dimensional galvanometers are currently used in most laser projectors. Those skilled in the art will appreciate that there are major differences in the operating principles and technical effects of laser projectors and solid-state lidar. In other words, when the two-dimensional galvanometer is applied to a solid-state lidar system, a specific driving circuit system needs to be configured, and the two-dimensional galvanometer is driven by a specific driving method to realize scanning in a specific manner. For example, the two-dimensional galvanometer is driven in a particular manner to achieve planar scanning or the like.
Disclosure of Invention
An object of the present invention is to provide a two-dimensional galvanometer driving circuit system and a driving method for a solid-state laser radar, which can drive a two-dimensional galvanometer in a specific manner to perform planar scanning on a measured object.
Another objective of the present invention is to provide a driving circuit system and a driving method for a two-dimensional galvanometer of a solid-state laser radar, wherein the driving circuit system can adjust a fast axis angle and a slow axis angle of the two-dimensional galvanometer in an angle feedback manner to implement planar scanning.
In order to achieve at least one of the above objects, the present invention provides a two-dimensional galvanometer driving method for a solid-state laser radar, including:
generating a driving instruction, wherein the driving instruction is used for controlling a micro-electromechanical driving unit to drive the two-dimensional galvanometer, and the two-dimensional galvanometer corresponds to a laser unit so as to steer laser projected by the laser unit to a measured object;
acquiring a fast axis angle and a slow axis angle of the two-dimensional galvanometer under the action of the driving command; and
and generating an adjusting instruction based on the fast axis angle and the slow axis angle of the two-dimensional galvanometer under the action of the driving instruction, and the pre-calibrated driving instruction and a corresponding model between the fast axis angle and the slow axis angle of the two-dimensional galvanometer, wherein the adjusting instruction is used for controlling a micro-electro-mechanical driving unit to drive the two-dimensional galvanometer so as to change the fast axis angle and the slow axis angle of the two-dimensional galvanometer, so that the fast axis angle and the slow axis angle of the two-dimensional galvanometer meet the pre-calibrated driving instruction and the corresponding model between the two-dimensional galvanometer, and the pre-calibrated driving instruction and the corresponding model between the two-dimensional galvanometer are obtained when the solid-state laser radar is used for carrying out plane scanning.
In an embodiment of the present invention, wherein the generating of the corresponding model between the pre-calibrated driving command and the two-dimensional galvanometer comprises:
acquiring the distance between the two-dimensional galvanometer and the measured object;
based on the distance, obtaining a fast axis angle and a slow axis angle of the two-dimensional galvanometer under the action of the driving command; and
and generating the pre-calibration model based on the fast axis angle, the slow axis angle and the driving instruction, wherein the pre-calibration model is used for representing the corresponding relation between the driving instruction and the fast axis angle and the slow axis angle of the two-dimensional galvanometer.
In an embodiment of the present invention, the step of generating an adjustment command based on the fast axis angle and the slow axis angle of the two-dimensional galvanometer under the action of the driving command and a pre-calibrated corresponding model between the driving command and the two-dimensional galvanometer includes:
generating a pre-calibration angle based on the pre-calibration model, wherein the pre-calibration angle comprises a pre-calibration fast axis angle and a pre-calibration slow axis angle;
generating the adjusting instruction based on the comparison relationship between the fast axis angle and the pre-calibrated fast axis angle and the comparison relationship between the slow axis angle and the pre-calibrated slow axis angle; and
and controlling the micro-electro-mechanical driving unit to change the fast axis angle and the slow axis angle of the two-dimensional galvanometer based on the adjusting instruction.
In one embodiment of the present invention, wherein obtaining the fast axis angle and the slow axis angle of the two-dimensional galvanometer under the action of the driving command comprises:
acquiring a fast axis feedback signal and a slow axis feedback signal; and
and acquiring the fast axis angle and the slow axis angle of the two-dimensional galvanometer under the action of the driving instruction based on the fast axis feedback signal and the slow axis feedback signal.
In an embodiment of the present invention, the driving instruction includes a fast axis driving instruction and a slow axis driving instruction, where the fast axis driving instruction is used to control the micro-electromechanical driving unit to change a fast axis angle of the two-dimensional galvanometer, and the slow axis driving instruction is used to control the micro-electromechanical driving unit to change a slow axis angle of the two-dimensional galvanometer.
In an embodiment of the present invention, the adjustment instruction includes a fast axis adjustment instruction and a slow axis adjustment instruction, where the fast axis adjustment instruction is used to control the micro-electromechanical driving unit to change the fast axis angle of the two-dimensional galvanometer, and the slow axis adjustment instruction is used to control the micro-electromechanical driving unit to change the slow axis angle of the two-dimensional galvanometer.
In one embodiment of the present invention, the step of obtaining a fast axis feedback signal and a slow axis feedback signal comprises:
amplifying the fast axis feedback signal and the slow axis feedback signal; and
converting signals in the form of analog signals of the fast axis feedback signal and the slow axis feedback signal into digital signals.
In an embodiment of the present invention, after the step of generating a driving command, the method further includes:
converting the driving command in the form of a digital signal into an analog signal; and
and amplifying the signal of the driving command.
According to another aspect of the present invention, the present invention further provides a driving circuit system of a two-dimensional galvanometer of a solid state laser radar, for controlling a micro-electromechanical driving unit to drive a two-dimensional galvanometer so as to implement plane scanning, including:
the conversion unit is in communication connection with the micro-electro-mechanical driving unit and is used for converting digital signals of a driving command and a regulating command into analog signals and converting analog signals of a fast axis feedback signal and a slow axis feedback signal into digital signals; and
the amplifying unit is in communication connection with the converting unit and the micro-electromechanical driving unit and is used for amplifying the driving command, the adjusting command, the fast axis feedback signal and the slow axis feedback signal; and
a processing unit, communicatively coupled to the conversion unit, for performing a method for driving a two-dimensional galvanometer of a solid-state lidar, wherein the method for driving comprises:
generating a driving instruction, wherein the driving instruction is used for controlling a micro-electromechanical driving unit to drive the two-dimensional galvanometer, and the two-dimensional galvanometer corresponds to a laser unit so as to steer laser projected by the laser unit to a measured object;
acquiring a fast axis angle and a slow axis angle of the two-dimensional galvanometer under the action of the driving command; and
and generating an adjusting instruction based on the fast axis angle and the slow axis angle of the two-dimensional galvanometer under the action of the driving instruction, and the pre-calibrated driving instruction and a corresponding model between the fast axis angle and the slow axis angle of the two-dimensional galvanometer, wherein the adjusting instruction is used for controlling a micro-electro-mechanical driving unit to drive the two-dimensional galvanometer so as to change the fast axis angle and the slow axis angle of the two-dimensional galvanometer, so that the fast axis angle and the slow axis angle of the two-dimensional galvanometer meet the pre-calibrated driving instruction and the corresponding model between the fast axis angle and the slow axis angle of the two-dimensional galvanometer, and the pre-calibrated driving instruction and the corresponding model between the two-dimensional galvanometer are obtained during plane scanning based on the solid-state laser radar.
These and other objects, features and advantages of the present invention will become more fully apparent from the following detailed description, the accompanying drawings and the claims.
Drawings
FIG. 1 is a block diagram schematic diagram of a two-dimensional galvanometer-based solid-state lidar system in accordance with a preferred embodiment of the present invention.
FIG. 2 is a schematic diagram of a two-dimensional galvanometer-based solid-state lidar system according to a preferred embodiment of the invention.
FIG. 3A is a schematic diagram of a process for generating a pre-calibration model according to a preferred embodiment of the present invention.
FIG. 3B is a diagram illustrating a process for generating adjustment commands based on a pre-calibration model according to a preferred embodiment of the present invention.
FIG. 3C is a schematic diagram of a process for adjusting the fast axis angle and the slow axis angle of the two-dimensional galvanometer based on adjustment commands, according to a preferred embodiment of the present invention.
Fig. 4 is a schematic diagram of a driving method of a two-dimensional galvanometer of the solid-state lidar according to a preferred embodiment of the invention.
Fig. 5 is a schematic diagram of a driving method of a two-dimensional galvanometer of the solid-state lidar according to a preferred embodiment of the invention.
FIG. 6 is a schematic diagram of a method for generating a pre-calibration model according to a preferred embodiment of the present invention.
FIG. 7 is a diagram illustrating a method for adjusting the fast axis angle and the slow axis angle of a two-dimensional galvanometer based on adjustment commands, in accordance with a preferred embodiment of the present invention.
Detailed Description
The following description is presented to disclose the invention so as to enable any person skilled in the art to practice the invention. The preferred embodiments in the following description are given by way of example only, and other obvious variations will occur to those skilled in the art. The basic principles of the invention, as defined in the following description, may be applied to other embodiments, variations, modifications, equivalents, and other technical solutions without departing from the spirit and scope of the invention.
It will be understood by those skilled in the art that in the present disclosure, the terms "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in an orientation or positional relationship indicated in the drawings for ease of description and simplicity of description, and do not indicate or imply that the referenced devices or components must be in a particular orientation, constructed and operated in a particular orientation, and thus the above terms are not to be construed as limiting the present invention.
It is understood that the terms "a" and "an" should be interpreted as meaning that a number of one element or element is one in one embodiment, while a number of other elements is one in another embodiment, and the terms "a" and "an" should not be interpreted as limiting the number.
As shown in fig. 1 to 3C, a two-dimensional galvanometer-based solid-state lidar system according to a preferred embodiment of the present invention is illustrated, wherein the solid-state lidar system 100 comprises: a laser module 10, a micro-electromechanical module 20 and a driving circuit system 30.
The laser module 10 includes a laser unit 11 capable of generating a laser 111 after being turned on, a laser driving unit 12 for driving the laser unit 11 to emit the laser 111, and a beam shaping unit 13 for shaping the laser 111, wherein the beam shaping unit 13, the laser unit 11, and the two-dimensional galvanometer 21 have their main optical axes always located on the same straight line.
The micro-electromechanical module 20 includes a two-dimensional galvanometer 21 and a micro-electromechanical driving unit 22, wherein the micro-electromechanical driving unit 22 is configured to drive the two-dimensional galvanometer 21, and the two-dimensional galvanometer 21 corresponds to the laser unit 11 to receive the laser 111 from the laser unit 11 and steer the laser 111 to change a propagation direction of the laser 111.
The driving circuit system 30 is communicably connected to the micro-electromechanical module 20, and is configured to control the micro-electromechanical driving unit 22 with a specific driving method, so as to drive the two-dimensional galvanometer 21 to move in a specific manner, so as to implement planar scanning on the object to be measured. More specifically, during the scanning of the measured object by the solid-state lidar system 100, the driving circuit system 30 can control the micro-electromechanical driving unit 22 in a specific manner, so that the two-dimensional galvanometer 21 can be driven in a specific manner to change the fast axis angle and the slow axis angle thereof, so as to modulate the laser 111 and form an area array light, wherein the solid-state lidar system 100 performs a planar scanning on the measured object based on the area array light.
In the process of scanning the measured object by using the solid state laser radar, firstly, the driving circuit system 30 generates a driving instruction 101, and the driving instruction 101 is used for controlling the micro-electromechanical driving unit 22 so as to drive the two-dimensional galvanometer 21 by the micro-electromechanical driving unit 22. It should be understood that the laser light 111 generated by the laser unit 11 is reflected at the two-dimensional galvanometer 21 after being projected to the two-dimensional galvanometer 21 to change the traveling route of the laser light 111. That is, when the relative positional relationship between the two-dimensional galvanometer 21 and the laser unit 11 is changed, the laser light can be projected onto the object to be measured in a specific manner to scan the object in a specific manner. More specifically, in the preferred embodiment of the present application, the driving circuit system 30 drives the two-dimensional galvanometer 21 in a specific manner to modulate the laser 111 to form an area array light for performing a planar scan on the object to be measured.
That is, in order to perform planar scanning of the object to be measured by the solid-state laser radar system, it is necessary to ensure that the oscillation mode of the two-dimensional galvanometer 21 can modulate the laser light 111 to form an area array light. Accordingly, in the preferred embodiment of the present application, the micro-electromechanical module 20 has an angle feedback function for feeding back the angle information (including the fast axis angle and the slow axis angle) of the two-dimensional galvanometer 21 under the action of the driving command 101 in real time.
Here, the mems module 20 has an angle feedback signal 102, wherein the angle feedback signal 102 is sent by the mems module 20 and received by the driving circuitry 30. The angle feedback signal 102 includes a fast axis angle feedback signal 1021 and a slow axis angle feedback signal 1022. The fast axis angle feedback signal 1021 is used for feedback, under the action of the driving instruction 101, the laser 111 is based on a fast axis angle of the two-dimensional galvanometer 21, wherein the slow axis angle feedback signal 1022 is used for feedback, and under the action of the driving instruction 101, the laser 111 is based on a slow axis angle of the two-dimensional galvanometer 21, so that the solid-state laser radar system 100 can obtain the feedback angle of the two-dimensional galvanometer 21. Further, the angle feedback signal 102 (the fast axis angle and the slow axis angle of the two-dimensional galvanometer 21 under the action of the driving command) is received by the driving circuitry 30 to adjust the oscillation mode of the two-dimensional galvanometer 21 by using the angle feedback signal, which will be described in detail later.
In an embodiment of the invention, the driving circuit system 30 may directly receive the fast axis angle feedback signal 1021 and the slow axis angle feedback signal 1022 through an angle sensor to obtain the fast axis angle and the slow axis angle of the two-dimensional galvanometer 21.
In another embodiment of the present invention, the driving circuitry 30 may obtain a distance data 104 between the two-dimensional galvanometer 21 and the measured object through a distance sensor, so that the driving circuitry 30 may obtain a fast axis angle and a slow axis angle of the two-dimensional galvanometer 21 under the action of the driving command 101 based on the distance data 104.
In an embodiment of the present invention, the driving circuitry 30 may acquire a propagation time of the laser 111 between the two-dimensional galvanometer 21 and the measured object through a time sensor to obtain the distance data 104 between the two-dimensional galvanometer 21 and the measured object, so that the driving circuitry 30 acquires a fast axis angle and a slow axis angle of the two-dimensional galvanometer 21 under the action of the driving command 101 based on the distance data 104.
Of course, those skilled in the art will appreciate that there are many ways and hardware to obtain the angle feedback signal 102, and the driving circuitry 30 may obtain the angle feedback signal 102 through any hardware implementation that achieves the same effect, and the invention is not limited thereto.
Further, after receiving the angle feedback signal, the driving circuit system 30 further generates an adjusting instruction based on the fast axis angle and the slow axis angle of the two-dimensional galvanometer 21 under the action of the driving instruction 101 and a pre-calibrated driving instruction and a corresponding model between the fast axis angle and the slow axis angle of the two-dimensional galvanometer, where the adjusting instruction is used to control the micro-electromechanical driving unit 22 to drive the two-dimensional galvanometer 21 so as to change the fast axis angle and the slow axis angle of the two-dimensional galvanometer 21, so that the fast axis angle and the slow axis angle of the two-dimensional galvanometer 21 satisfy the pre-calibrated driving instruction and the corresponding model between the two-dimensional galvanometer.
Here, the pre-calibration model 103 represents a correspondence relationship between the driving command 101 and the fast axis angle and the slow axis angle of the two-dimensional galvanometer 21 when the solid-state lidar system 100 implements plane scanning. That is, in this embodiment of the present application, the driving circuit system 30 controls the micro-electromechanical driving unit 22 based on the pre-calibration model 103 and the driving instruction 101 to drive the two-dimensional galvanometer 21 to change the fast axis angle and the slow axis angle thereof, so that the oscillation mode of the two-dimensional galvanometer 21 meets the requirement of planar scanning.
More specifically, based on the pre-calibration model 103 and the driving instruction 101, the driving circuitry 30 generates a pre-calibration angle 105, and generates an adjustment instruction 106 to control the two-dimensional galvanometer 21 to adjust the fast axis angle and the slow axis angle based on the pre-calibration angle 105 and the fast axis angle and the slow axis angle of the two-dimensional galvanometer 21, wherein the pre-calibration angle 105 includes a pre-calibration fast axis angle 1051 and a pre-calibration slow axis angle 1052. It should be understood here that the pre-calibrated fast axis angle 1051 and the pre-calibrated slow axis angle 1052 represent theoretical fast axis angles and slow axis angles of the two-dimensional galvanometer 21 when performing planar scanning. Correspondingly, the fast axis angle and the slow axis angle of the two-dimensional galvanometer 21 in the angle feedback signal are the actual fast axis angle and the actual slow axis angle of the two-dimensional galvanometer 21 under the action of the driving command 101. Further, based on the actual fast axis angle and slow axis angle of the two-dimensional galvanometer 21 and the theoretical fast axis angle and slow axis angle of the two-dimensional galvanometer 21, whether the oscillation mode of the two-dimensional galvanometer 21 meets a preset standard model can be monitored in real time, that is, the laser can be modulated to form area array light. When the actual fast axis angle and slow axis angle of the two-dimensional galvanometer 21 and the theoretical fast axis angle and slow axis angle of the two-dimensional galvanometer 21 deviate, in the preferred embodiment of the present application, the driving circuit system 30 can generate the adjusting instruction based on the deviation between the two angles, and the adjusting instruction performs feedback adjustment on the feedback mode of the two-dimensional galvanometer 21, so that the fast axis angle and slow axis angle of the two-dimensional galvanometer 21 satisfy the pre-calibrated driving instruction and the corresponding model between the two-dimensional galvanometers, that is, it is ensured that the oscillation mode of the two-dimensional galvanometer 21 can modulate the laser to form area array light, so as to perform plane scanning on the object to be measured.
It is worth mentioning that, compared to the two laser radar systems as described above, the two-dimensional galvanometer-based solid-state laser radar system 100 can obtain the feedback angle of the laser 111 relative to the incident angle of the measured object in real time, and can calibrate the fast axis angle and the slow axis angle of the two-dimensional galvanometer in real time to obtain the accurate scanning result of the measured object.
Further, the pre-calibration model 103 of the solid-state lidar system 100 is generated in a planar scanning process to ensure the accuracy of the pre-calibration angle 105 and the control command 106, so that the driving circuit system 30 obtains a relatively accurate area array light corresponding to the measured object, and the solid-state lidar system 100 scans the measured object more accurately and reliably.
Accordingly, as shown in fig. 1, in the preferred embodiment of the present application, the driving circuitry 30 includes a processing unit 31 for generating the driving command 101 and acquiring and processing the angle feedback signal 102 to generate the adjustment command. The driving circuitry 30 further comprises a conversion unit 32 and an amplification unit 33, wherein the conversion unit 32 is communicatively coupled to the processing unit 31 for converting the form of the commands and signals in the system 100, and wherein the amplification unit 33 is communicatively coupled to the micro-electromechanical driving unit 22 and the conversion unit 32 for amplifying the commands and signals in the system 100.
In one embodiment of the present invention, the processing Unit 31 is implemented as a Micro Controller Unit (MCU), and those skilled in the art will appreciate that the processing Unit 31 can be implemented as any other hardware device capable of achieving the same effect, and the present invention is not limited thereto.
FIG. 3A is a diagram illustrating a process for generating a pre-calibration model by the driving circuitry of the solid-state lidar system in accordance with a preferred embodiment of the present invention. When the solid-state laser radar system 100 drives the two-dimensional galvanometer 21 to perform plane scanning on the measured object, the driving circuit system 30 generates a set of driving instructions 101, wherein the driving instructions 101 include a set of fast axis driving instructions 1011 (X1-Xn) and a set of slow axis driving instructions 1012 (Y1-Yn), and the fast axis driving instructions 1011 (X1-Xn) and the slow axis driving instructions 1012 (Y1-Yn) are a set of digital signals. The conversion unit 32 receives and converts the fast axis drive instructions 1011 (X1-Xn) and the slow axis drive instructions 1012 (Y1-Yn) to convert the fast axis drive instructions 1011 (X1-Xn) and the slow axis drive instructions 1012 (Y1-Yn) into analog signals.
The amplification unit 33 receives and processes the fast axis drive command 1011 (X1-Xn) and the slow axis drive command 1012 (Y1-Yn) to amplify an analog signal, and transmits the amplified analog signal to the micro electro mechanical drive unit 22 to drive the two-dimensional galvanometer 21.
The processing unit 31 obtains distance data 104 between the two-dimensional galvanometer 21 and the measured object, wherein the distance data 104 is used for obtaining a fast axis angle (theta 1) of the two-dimensional galvanometer 21 under the action of the fast axis driving command 1011 (X1-Xn) and the slow axis driving command 1012 (Y1-Yn) x ~θn x ) And slow axis angle (theta 1) y ~θn y ). Further, the processing unit 31 calculates the fast axis angle (θ 1) of the two-dimensional galvanometer 21 based on the fast axis driving command 1011(X1 to Xn) and the slow axis driving command 1012(Y1 to Yn) x ~θn x ) And slow axisAngle (theta 1) y ~θn y ) The pre-calibration model 103 is generated based on the corresponding relationship between the two-dimensional galvanometer 21 and the two-dimensional galvanometer, wherein the pre-calibration fast axis angle 1051 and the pre-calibration slow axis angle 1052 represent the standard fast axis angle and the standard slow axis angle when the solid-state lidar system 100 performs plane scanning on the measured object, which are generated by the pre-calibration model 103.
FIGS. 3B and 3C illustrate process diagrams of the drive circuitry generating the adjustment command based on a pre-calibration model. The processing unit 31 of the drive circuitry 30 generates the drive instruction 101 and the pre-calibration angle 105 based on the drive instruction 101 and the pre-calibration model 103. The micro-electro-mechanical driving unit 22 receives the driving instruction 101 to drive the two-dimensional galvanometer 21, so that the processing unit 31 obtains the fast axis angle and the slow axis angle of the two-dimensional galvanometer 21 under the action of the driving instruction 101. The processing unit 31 generates the adjustment instruction 106 based on the pre-calibrated angle 105 and the fast axis angle and the slow axis angle of the two-dimensional galvanometer 21, wherein the adjustment instruction 106 includes a fast axis adjustment instruction 1061 for controlling the micro-electromechanical driving unit 22 to change the fast axis angle, and a slow axis adjustment instruction 1062 for controlling the micro-electromechanical driving unit 22 to change the slow axis angle, so that the micro-electromechanical driving unit 22 drives the two-dimensional galvanometer 21 to change the fast axis angle and the slow axis angle to the pre-calibrated fast axis angle 1051 and the pre-calibrated slow axis angle 1052 based on the fast axis adjustment instruction 1061 and the slow axis adjustment instruction 1062.
In an embodiment of the invention, the driving command 101 is a set of digital signals, wherein the converting unit 31 converts the driving command 101 into analog signals and transmits the analog signals to the amplifying unit 33, and the amplifying unit 33 amplifies the analog signals of the driving command 101 and transmits the analog signals to the micro-electromechanical driving unit 22.
In an embodiment of the present invention, the fast axis feedback signal 1021 and the slow axis feedback signal 1022 are a set of analog signals, the amplifying unit 33 receives and amplifies the analog signals of the fast axis feedback signal 1021 and the slow axis feedback signal 1022, and transmits the analog signals of the fast axis feedback signal 1021 and the slow axis feedback signal 1022 to the converting unit 32, and the converting unit 32 converts the analog signals of the fast axis feedback signal 1021 and the slow axis feedback signal 1022 into digital signals, so that the fast axis feedback signal 1021 and the slow axis feedback signal 1022 received by the processing unit 31 are a set of digital signals, and thus, the processing unit 31 can obtain the fast axis angle and the slow axis angle of the two-dimensional galvanometer 21 based on the fast axis feedback signal 1021 and the slow axis feedback signal 1022.
In an embodiment of the present invention, the adjustment instruction 106 is a set of digital signals, wherein the conversion unit 31 converts the adjustment instruction 106 into an analog signal and transmits the analog signal to the amplification unit 33, the amplification unit 33 amplifies the analog signal of the adjustment instruction 106 and transmits the analog signal to the micro electro mechanical driving unit 22, so that the micro electro mechanical driving unit 22 drives the two-dimensional galvanometer 21 to calibrate the fast axis angle and the slow axis angle, and further, the solid-state laser radar system 100 performs plane scanning on the measured object based on the two-dimensional galvanometer 21.
According to another aspect of the application, a two-dimensional galvanometer driving method of the solid-state laser radar is further provided.
Fig. 4 is a schematic diagram illustrating a two-dimensional galvanometer driving method of the solid-state lidar according to a preferred embodiment of the present invention. As shown in fig. 4, a two-dimensional galvanometer driving method 200 of the solid-state lidar is configured to drive the two-dimensional galvanometer to implement planar scanning, where the method 200 includes: generating a driving instruction for controlling a micro-electromechanical driving unit to drive the two-dimensional galvanometer, wherein the two-dimensional galvanometer corresponds to a laser unit to steer laser projected by the laser unit to the measured object 210; acquiring a fast axis angle and a slow axis angle 220 of the two-dimensional galvanometer under the action of the driving command; and generating an adjusting instruction based on the fast axis angle and the slow axis angle of the two-dimensional galvanometer under the action of the driving instruction, and the pre-calibrated driving instruction and a corresponding model between the fast axis angle and the slow axis angle of the two-dimensional galvanometer, wherein the adjusting instruction is used for controlling a micro-electro-mechanical driving unit to drive the two-dimensional galvanometer so as to change the fast axis angle and the slow axis angle of the two-dimensional galvanometer, so that the fast axis angle and the slow axis angle of the two-dimensional galvanometer meet the pre-calibrated driving instruction and the corresponding model between the two-dimensional galvanometer, and the pre-calibrated driving instruction and the corresponding model between the two-dimensional galvanometer are obtained 230 during plane scanning based on the solid-state laser radar.
In the step 210, the driving instruction includes a fast axis driving instruction and a slow axis driving instruction, where the fast axis driving instruction is used to control the micro-electromechanical driving unit to drive the two-dimensional galvanometer so as to change a fast axis angle of the two-dimensional galvanometer, and the slow axis driving instruction is used to control the micro-electromechanical driving unit to drive the two-dimensional galvanometer so as to change a slow axis angle of the two-dimensional galvanometer.
In the step 220, the obtained fast axis angle and the slow axis angle under the action of the driving instruction are feedback angles of a group of driving instructions, so that the micro-electro-mechanical driving unit is controlled to drive the two-dimensional galvanometer based on the feedback angles and corresponding models between the pre-calibrated driving instruction and the fast axis angle and the slow axis angle of the two-dimensional galvanometer.
In other words, when the micro-electromechanical drive unit is controlled to drive the two-dimensional galvanometer, the fast axis angle and the slow axis angle of the two-dimensional galvanometer are unknown, and the scanning effect of the solid-state laser radar based on the two-dimensional galvanometer on the measured object is also unknown. Accordingly, the fast axis angle and the slow axis angle of the two-dimensional galvanometer under the action of the driving instruction are used as a group of feedback angles, so that the fast axis angle and the slow axis angle of the two-dimensional galvanometer are known under the action of the driving instruction, and the scanning effect of the solid-state laser radar based on the two-dimensional galvanometer on the measured object is also known, so that the micro-electro-mechanical driving unit is controlled to drive the two-dimensional galvanometer based on the pre-calibration model and the driving instruction, and an ideal scanning effect is obtained.
Preferably, compared to the scanning method of the laser radar system as described above, the method 300 has a set of angle feedback to calibrate the fast axis angle and the slow axis angle of the two-dimensional galvanometer based on the angle feedback data, so as to obtain an accurate scanning result.
In an embodiment of the present invention, as shown in fig. 6, the generating process of the corresponding model between the pre-calibrated driving command and the two-dimensional galvanometer in step 230 includes: obtaining the distance 231 between the two-dimensional galvanometer and the measured object; based on the distance, obtaining a fast axis angle and a slow axis angle 232 of the two-dimensional galvanometer under the action of the driving command; and generating the pre-calibration model based on the fast axis angle, the slow axis angle and the driving command, wherein the pre-calibration model is used for representing the corresponding relation 233 between the driving command and the fast axis angle and the slow axis angle of the two-dimensional galvanometer.
In particular, the pre-calibration model represents a corresponding relationship between the driving command and a fast axis angle and a slow axis angle of the two-dimensional galvanometer when the solid-state lidar system performs plane scanning. In other words, based on the pre-calibration model and the driving command, a set of standard fast axis angles and slow axis angles of the two-dimensional galvanometer can be obtained. And the standard fast axis angle and the standard slow axis angle are used for calibrating the two-dimensional galvanometer.
In one embodiment of the present invention, as shown in fig. 7, the step 230 includes: generating a pre-calibration angle based on the pre-calibration model, wherein the pre-calibration angle comprises a pre-calibration fast axis angle and a pre-calibration slow axis angle 234; generating the adjusting instruction 235 based on a comparison relationship between the fast axis angle and the pre-calibrated fast axis angle and a comparison relationship between the slow axis angle and the pre-calibrated slow axis angle; and controlling the micro-electro-mechanical driving unit to change the fast axis angle and the slow axis angle 236 of the two-dimensional galvanometer based on the adjusting instruction.
In other words, the adjustment instruction is used to calibrate the fast axis angle and the slow axis angle of the two-dimensional galvanometer such that the fast axis angle and the slow axis angle of the two-dimensional galvanometer are changed to the pre-calibrated fast axis angle and the pre-calibrated slow axis angle.
In an embodiment of the present invention, the adjustment instruction includes a fast axis adjustment instruction and a slow axis adjustment instruction, where the fast axis adjustment instruction is used to control the micro-electromechanical driving unit to change a fast axis angle of the two-dimensional galvanometer, and the slow axis adjustment instruction is used to control the micro-electromechanical driving unit to change a slow axis angle of the two-dimensional galvanometer.
In one embodiment of the present invention, the step 220 comprises: obtaining a fast axis feedback signal and a slow axis feedback signal 221; and acquiring the fast axis angle and the slow axis angle 222 of the two-dimensional galvanometer under the action of the driving command based on the fast axis feedback signal and the slow axis feedback signal.
In an embodiment of the present invention, as shown in fig. 5, the step 221 includes: amplifying the fast axis feedback signal and the slow axis feedback signal 2211; and converting signals in the form of analog signals of the fast axis feedback signal and the slow axis feedback signal into digital signals 2212.
In one embodiment of the present invention, as shown in fig. 4, the step 210 includes: converting the driving instructions in the form of digital signals into analog signals 211; and, amplifying the signal 212 of the drive command.
It is worth proposing that the two-dimensional galvanometer driving method 200 of the solid-state laser radar can drive the two-dimensional galvanometer, so that the solid-state laser radar system 100 can perform plane scanning on the measured object based on the two-dimensional galvanometer, thereby filling up the gap of the two-dimensional galvanometer driving technology in the current solid-state laser radar field.
It will be appreciated by persons skilled in the art that the embodiments of the invention described above and shown in the drawings are given by way of example only and are not limiting of the invention. The objects of the invention have been fully and effectively accomplished. The functional and structural principles of the present invention have been shown and described in the examples, and any variations or modifications of the embodiments of the present invention may be made without departing from the principles.

Claims (9)

1. A two-dimensional galvanometer driving method of a solid-state laser radar is used for driving the two-dimensional galvanometer to realize plane scanning, and is characterized by comprising the following steps:
generating a driving instruction, wherein the driving instruction is used for controlling a micro-electromechanical driving unit to drive the two-dimensional galvanometer, and the two-dimensional galvanometer corresponds to a laser unit so as to steer laser projected by the laser unit to a measured object;
acquiring a fast axis angle and a slow axis angle of the two-dimensional galvanometer under the action of the driving command; and
and generating an adjusting instruction based on the fast axis angle and the slow axis angle of the two-dimensional galvanometer under the action of the driving instruction, and the pre-calibrated driving instruction and a corresponding model between the fast axis angle and the slow axis angle of the two-dimensional galvanometer, wherein the adjusting instruction is used for controlling a micro-electro-mechanical driving unit to drive the two-dimensional galvanometer so as to change the fast axis angle and the slow axis angle of the two-dimensional galvanometer, so that the fast axis angle and the slow axis angle of the two-dimensional galvanometer meet the pre-calibrated driving instruction and the corresponding model between the two-dimensional galvanometer, and further the two-dimensional galvanometer modulates the laser to form planar array light for carrying out planar scanning on the measured object, wherein the pre-calibrated driving instruction and the corresponding model between the two-dimensional galvanometer are obtained based on the solid-state laser radar during planar scanning.
2. The method for driving the two-dimensional galvanometer of the solid-state lidar according to claim 1, wherein the generating process of the corresponding model between the pre-calibrated driving command and the two-dimensional galvanometer comprises:
acquiring the distance between the two-dimensional galvanometer and the measured object;
based on the distance, obtaining a fast axis angle and a slow axis angle of the two-dimensional galvanometer under the action of the driving command; and
and generating the pre-calibration model based on the fast axis angle, the slow axis angle and the driving instruction, wherein the pre-calibration model is used for representing the corresponding relation between the driving instruction and the fast axis angle and the slow axis angle of the two-dimensional galvanometer.
3. The method for driving the two-dimensional galvanometer of the solid-state lidar according to claim 2, wherein the step of generating an adjustment command based on the fast axis angle and the slow axis angle of the two-dimensional galvanometer under the action of the driving command and a corresponding model between the pre-calibrated driving command and the two-dimensional galvanometer comprises:
generating a pre-calibration angle based on the pre-calibration model, wherein the pre-calibration angle comprises a pre-calibration fast axis angle and a pre-calibration slow axis angle;
generating the adjusting instruction based on the comparison relationship between the fast axis angle and the pre-calibrated fast axis angle and the comparison relationship between the slow axis angle and the pre-calibrated slow axis angle; and
and controlling the micro-electro-mechanical driving unit to change the fast axis angle and the slow axis angle of the two-dimensional galvanometer based on the adjusting instruction.
4. The method for driving the two-dimensional galvanometer of the solid-state lidar according to claim 3, wherein obtaining the fast axis angle and the slow axis angle of the two-dimensional galvanometer under the action of the driving command comprises:
acquiring a fast axis feedback signal and a slow axis feedback signal; and
and acquiring the fast axis angle and the slow axis angle of the two-dimensional galvanometer under the action of the driving command based on the fast axis feedback signal and the slow axis feedback signal.
5. The method for driving the two-dimensional galvanometer of the solid-state lidar according to any of claims 1 to 4, wherein the driving command comprises a fast axis driving command and a slow axis driving command, wherein the fast axis driving command is used for controlling the micro-electro-mechanical driving unit to change the fast axis angle of the two-dimensional galvanometer, and wherein the slow axis driving command is used for controlling the micro-electro-mechanical driving unit to change the slow axis angle of the two-dimensional galvanometer.
6. The method for driving the two-dimensional galvanometer of the solid-state lidar according to claim 5, wherein the adjustment command comprises a fast axis adjustment command and a slow axis adjustment command, wherein the fast axis adjustment command is used for controlling the micro-electromechanical driving unit to change the fast axis angle of the two-dimensional galvanometer, and wherein the slow axis adjustment command is used for controlling the micro-electromechanical driving unit to change the slow axis angle of the two-dimensional galvanometer.
7. The method of claim 6, wherein the step of obtaining a fast axis feedback signal and a slow axis feedback signal comprises:
amplifying the fast axis feedback signal and the slow axis feedback signal; and
converting signals in the form of analog signals of the fast axis feedback signal and the slow axis feedback signal into digital signals.
8. The method for driving a two-dimensional galvanometer of a solid-state lidar according to claim 7, wherein the generating a drive command step comprises:
converting the driving command in the form of a digital signal into an analog signal; and
and amplifying the signal of the driving command.
9. A drive circuit system of a two-dimensional galvanometer of a solid-state laser radar is used for controlling a micro-electromechanical drive unit to drive the two-dimensional galvanometer so as to realize plane scanning, and is characterized by comprising:
the conversion unit is in communication connection with the micro-electro-mechanical driving unit and is used for converting digital signals of a driving command and a regulating command into analog signals and converting analog signals of a fast axis feedback signal and a slow axis feedback signal into digital signals; and
the amplifying unit is in communication connection with the converting unit and the micro-electromechanical driving unit and is used for amplifying the driving command, the adjusting command, the fast axis feedback signal and the slow axis feedback signal; and
a processing unit, communicatively coupled to the conversion unit, for performing a method for driving a two-dimensional galvanometer of a solid-state lidar, wherein the method for driving comprises:
generating a driving instruction, wherein the driving instruction is used for controlling a micro-electromechanical driving unit to drive the two-dimensional galvanometer, and the two-dimensional galvanometer corresponds to a laser unit so as to steer laser projected by the laser unit to a measured object;
acquiring a fast axis angle and a slow axis angle of the two-dimensional galvanometer under the action of the driving command; and
generating an adjusting instruction based on the fast axis angle and the slow axis angle of the two-dimensional galvanometer under the action of the driving instruction, and a corresponding model between the pre-calibrated driving instruction and the fast axis angle and the slow axis angle of the two-dimensional galvanometer, wherein the adjusting instruction is used for controlling a micro-electro-mechanical driving unit to drive the two-dimensional galvanometer so as to change the fast axis angle and the slow axis angle of the two-dimensional galvanometer, so that the fast axis angle and the slow axis angle of the two-dimensional galvanometer meet a pre-calibrated driving instruction and a corresponding model between the fast axis angle and the slow axis angle of the two-dimensional galvanometer, so that the two-dimensional galvanometer modulates the laser to form an area array light for carrying out plane scanning on the measured object, and the corresponding model between the pre-calibrated driving instruction and the two-dimensional galvanometer is obtained when the solid-state laser radar is used for carrying out plane scanning.
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