CN111351451A - Surface micro-topography measuring sensor - Google Patents
Surface micro-topography measuring sensor Download PDFInfo
- Publication number
- CN111351451A CN111351451A CN202010298447.7A CN202010298447A CN111351451A CN 111351451 A CN111351451 A CN 111351451A CN 202010298447 A CN202010298447 A CN 202010298447A CN 111351451 A CN111351451 A CN 111351451A
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- contact pin
- pin shaft
- topography
- stylus
- measuring
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D15/00—Control of mechanical force or stress; Control of mechanical pressure
- G05D15/01—Control of mechanical force or stress; Control of mechanical pressure characterised by the use of electric means
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- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
Abstract
The invention discloses a surface micro-topography measuring sensor, which is used for measuring the topography of the surface of a workpiece to be measured, and comprises the following components: a stylus for measuring a micro-topography; the contact pin shaft is connected with the contact pin at one end and used for moving up and down along with the contact pin when the contact pin measures the micro-topography; the magnetic constant force module is connected with the other end of the contact pin shaft and used for adjusting the measuring force between the contact pin and the workpiece to be measured; the stylus shaft air floatation module surrounds the periphery of the stylus shaft and is used for floating the stylus shaft; and the displacement measuring module is arranged right above the contact pin shaft and used for measuring the displacement of the contact pin shaft in the vertical direction. According to the invention, the air gap is formed on the outer surface of the contact pin shaft through the contact pin shaft air floatation module, so that the contact pin shaft is ensured to suspend and have minimum friction, and the measurement precision of the contact pin is improved. The measuring force between the contact pin and the workpiece to be measured can be adjusted through the magnetic constant force module, so that the contact pin can transmit the surface appearance of the workpiece to the sensor more truly.
Description
Technical Field
The invention relates to the field of surface micro-topography measurement, in particular to a surface micro-topography measurement sensor.
Background
Surface microtopography has been a focus of attention in the field of precision engineering. The surface roughness is a technical index for describing the microscopic geometric shape error of the part, and is an important method for evaluating the machining process. In the manufacturing fields of precision machinery, instruments and meters, ultra-precision machining and the like, surface roughness is an important parameter, and research on measurement theory and research and development on measurement instruments are always important to people.
The roughness measuring instrument can be divided into a contact pin type and a non-contact pin type according to the measuring principle. The traditional contact pin type roughness measuring instrument adopts the measuring principle that after a contact pin moves relative to the surface of a workpiece to be measured, the contact pin fluctuates along with the surface of the workpiece to be measured in the vertical direction, a sensor is used for measuring the small fluctuation, and the surface information of the workpiece to be measured is finally obtained through signal processing.
The contact pin type roughness meter comprises a lever type and a vertical type according to a measuring structure, wherein the lever contact pin type roughness meter has an inevitable cosine error when the height of a measuring surface of the lever contact pin type roughness meter changes due to the characteristics of the measuring structure, and the integral precision of the roughness meter is finally influenced. Therefore, compared with a lever structure, the method for vertically measuring the surface micro-fluctuation has smaller system error in principle and meets the Abbe principle. The key of the roughness measuring instrument is a sensor system. Therefore, there is a need for a new type of surface micro-topography sensor.
Disclosure of Invention
The invention aims to provide a surface micro-topography measuring sensor for improving the measuring precision.
In order to achieve the purpose, the invention provides the following scheme:
a surface micro-topography measurement sensor for measuring the topography of a surface of a workpiece to be measured, comprising:
a stylus for measuring a micro-topography;
the contact pin shaft is connected with the contact pin at one end and used for moving up and down along with the contact pin when the contact pin measures the micro-topography;
the magnetic constant force module is connected with the other end of the contact pin shaft and used for adjusting the measuring force between the contact pin and the workpiece to be measured;
the contact pin shaft air floatation module surrounds the periphery of the contact pin shaft and is used for floating the contact pin shaft;
and the displacement measuring module is arranged right above the contact pin shaft and used for measuring the displacement of the contact pin shaft in the vertical direction.
Optionally, the surface micro-topography measuring sensor further comprises a fixing plate, the fixing plate is respectively connected with the touch pin shaft, the magnetic constant force module and the displacement measuring module, and the fixing plate is used for fixing the touch pin shaft, the magnetic constant force module and the displacement measuring module.
Optionally, the magnetic constant force module includes a force control connecting rod, an annular permanent magnet, an annular coil and a coil holder;
the force control connecting rod comprises a first force control connecting rod and a second force control connecting rod, one end of the first force control connecting rod is connected with the other end of the contact pin shaft, and the first force control connecting rod is perpendicular to the contact pin shaft; the other end of the first force control connecting rod is connected with one end of a second force control connecting rod, the second force control connecting rod is perpendicular to the first force control connecting rod, and the second force control connecting rod and the contact pin shaft are located on the same side of the first force control connecting rod;
the annular permanent magnet is sleeved on the second force control connecting rod;
the coil retainer comprises an upper coil retainer and a lower coil retainer, and the upper coil retainer and the lower coil retainer are both fixed on the fixing plate;
the annular coil comprises an upper annular coil and a lower annular coil, the upper annular coil is sleeved on the upper coil retainer, and the lower annular coil is sleeved on the lower coil retainer;
the annular permanent magnet is positioned between the upper annular coil and the lower annular coil, and the annular permanent magnet, the upper annular coil and the lower annular coil are parallel and coaxial.
Optionally, the stylus shaft comprises a stylus holding part and a piston rod;
one end of the contact pin is positioned in the contact pin fixing part, one end of the piston rod is connected with the magnetic constant force module, and the other end of the piston rod is connected with the contact pin fixing part; the stylus holding part, the piston rod and the stylus are all coaxial.
Optionally, the stylus shaft air floatation module includes an air bearing and a guide block, and the air bearing is sleeved outside the piston rod;
the contact pin shaft also comprises guide hemispheres the number of which is matched with that of the guide blocks; each guiding hemisphere is connected with the piston rod, and each guiding hemisphere is uniformly arranged around the piston rod in a plane.
And aiming at each guide block, one guide hemisphere is contacted with the guide block, and the guide block and the guide hemisphere jointly keep the piston rod in a vertical state all the time.
Optionally, a part of the stylus located inside the stylus holding part is provided with a reflection part.
Optionally, the reflection component includes a cylindrical column sleeved on the contact pin and a reflection layer, and the reflection layer is disposed on a surface of the cylindrical column.
Optionally, the cylindrical column is made of microcrystalline glass.
Optionally, the material of the reflective layer is silver.
Optionally, the fixing plate includes a fixing plate mounting hole and a lens mounting groove.
According to the invention, the air gap is formed on the outer surface of the contact pin shaft through the contact pin shaft air floatation module, so that the contact pin shaft is ensured to suspend and have minimum friction, and the measurement precision of the contact pin is improved. The measuring force between the contact pin and the workpiece to be measured can be adjusted through the magnetic constant force module, so that the contact pin can transmit the surface appearance of the workpiece to the sensor more truly.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without inventive exercise.
FIG. 1 is a diagram of an apparatus configuration of a surface micro-topography measuring sensor according to the present invention;
FIG. 2 is a structural schematic diagram of a contact pin shaft air floatation module;
FIG. 3 is a schematic view of the stylus shaft configuration;
fig. 4 is a schematic view of a fixing plate.
Description of the symbols:
a stylus shaft-1; a stylus holding part-11; a piston rod-12; a guiding hemisphere-13; a contact pin shaft air flotation module-2; an air bearing-21; a guide block-22; a magnetic constant force module-3; a force control link-31; an annular permanent magnet-32; an upper toroidal coil-331; a lower toroidal coil-332; a coil holder-34; a displacement measuring module-4; a reflecting member-41; a fixed plate-5; a lens mounting groove-51; a fixed plate mounting hole-52; and a contact pin-6.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention aims to provide a surface micro-topography measuring sensor for improving the measuring precision.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
FIG. 1 is a diagram of a surface micro-topography measurement sensor apparatus according to the present invention; FIG. 2 is a structural schematic diagram of a contact pin shaft air floatation module; FIG. 3 is a schematic view of the stylus shaft configuration; fig. 4 is a schematic diagram of a structure of a fixed plate, and as shown in fig. 1 to 4, the surface micro-topography measurement sensor according to the present invention includes a stylus 6, a stylus shaft 1, a magnetic constant force module 3, a stylus shaft air bearing module 2, and a displacement measurement module 4.
The stylus 6 is used to measure the micro-topography of the surface of the workpiece to be measured.
One end of the contact pin shaft 1 is connected with the contact pin 6, and the contact pin shaft 1 is used for moving up and down along with the contact pin 6 when the contact pin 6 measures the micro-topography of the surface of a workpiece to be measured.
The stylus shaft 1 specifically includes a stylus holding part 11 and a piston rod 12.
The stylus 6 has one end located inside the stylus holding part 11. A portion of the stylus 6 located inside the stylus holding part 11 is provided with a reflection part 41.
The reflection member 41 includes a cylindrical post fitted over the contact pin 6 and a reflection layer. The reflecting layer is arranged on the surface of the cylindrical column.
The material of the cylindrical column is preferably glass ceramics, but is not limited to glass ceramics. One skilled in the art can select different materials according to actual needs.
The material of the reflective layer is preferably silver, but is not limited to silver.
The reflection component 41 is used for reflecting the laser of the displacement measurement module 4 to realize displacement measurement.
One end of the piston rod 12 is connected to the magnetic constant force module 3, and the other end of the piston rod 12 is connected to the contact pin fixing part 11.
The stylus holding part 11, the piston rod 12 and the stylus 6 are all co-axial.
In order to ensure that the stylus shaft 1 is always kept in a vertical state in the measuring process, the stylus shaft 1 further comprises a guide hemisphere 13.
Each of the guiding hemispheres 13 is connected to the piston rod 12, and each of the guiding hemispheres 13 is arranged uniformly around the piston rod 12 in one plane.
In this embodiment, the guiding hemisphere 13 is a hemisphere.
The magnetic constant force module 3 is connected with the other end of the contact pin shaft 1, and the magnetic constant force module 3 is used for adjusting the measuring force between the contact pin 6 and a workpiece to be measured.
Wherein, the magnetic constant force module 3 further comprises a force control connecting rod 31, an annular permanent magnet 32, an annular coil and a coil holder 34.
The force control connecting rod 31 comprises a first force control connecting rod and a second force control connecting rod, the first force control connecting rod is connected with the other end of the contact pin shaft 1, and the first force control connecting rod is perpendicular to the contact pin shaft 1. The other end of the first force control connecting rod is connected with one end of a second force control connecting rod, the second force control connecting rod is perpendicular to the first force control connecting rod, and the second force control connecting rod and the contact pin shaft 1 are located on the same side of the first force control connecting rod;
the annular permanent magnet 32 is sleeved on the second force control connecting rod;
the coil retainer 34 comprises an upper coil retainer and a lower coil retainer, and the upper coil retainer and the lower coil retainer are both fixed on the fixing plate 5;
the annular coils comprise an upper annular coil 331 and a lower annular coil 332, the upper annular coil 331 is sleeved on the upper coil retainer, and the lower annular coil 332 is sleeved on the lower coil retainer;
the annular permanent magnet 32 is located between the upper annular coil 331 and the lower annular coil 332, and the annular permanent magnet 32 and the upper annular coil 331 are parallel and coaxial with the lower annular coil 332.
When the upper and lower suspension coils pass through currents with the same magnitude and opposite directions, a constant magnetic field is generated near the center of the axis of the coil, the annular permanent magnet 32 overcomes the gravity under the action of the electromagnetic field to keep a constant measuring force between 0.75mN and 1mN between the contact pin 6 and the surface of the workpiece to be measured, and the magnitude of the measuring force can be adjusted by changing the magnitude of the current of the coil according to the hardness degree of the surface material of the workpiece to be measured.
The touch pin shaft air floatation module 2 surrounds the periphery of the touch pin shaft 1, and the touch pin shaft air floatation module 2 is used for enabling the touch pin shaft 1 to suspend.
The feeler pin shaft air floatation module 2 specifically comprises an air bearing 21 and a guide block 22; the air bearing 21 is sleeved outside the piston rod 12.
The stylus shaft 1 acts as the piston rod 12 of the air bearing 21 and makes a winding movement in the air bearing 21, and because the air bearing 21 forms a layer of air film between the inner wall surface and the stylus shaft 1, the influence of friction on dynamic response is greatly reduced, and the air film has enough rigidity to keep the movement in the vertical direction.
For each guide block, one guide hemisphere 13 is in contact with the guide block, and the guide block and the guide hemisphere 13 jointly keep the piston rod in a vertical state all the time.
In this embodiment, the number of the guide blocks and the number of the guide hemispheres 13 are three.
The three guide blocks 22 and the three guide hemispheres 13 on the stylus shaft 1 form a vertical guide reference, and the guide hemispheres 13 are respectively tangent to the guide blocks 22.
When the stylus 6 is operated, the guide hemisphere 13 is in point contact friction with the guide block 22, and the guide block 22 and the guide hemisphere 13 are both made of a low friction self-sliding material. The guide block 22 acts as a vertical guide and constrains five of the six degrees of freedom of the stylus axis 1, and it cannot rotate or tilt, thus avoiding the resulting systematic errors.
The displacement measurement module 4 is arranged right above the contact pin shaft 1, and the displacement measurement module 4 is used for measuring the displacement of the contact pin shaft 1 in the vertical direction.
The displacement measuring module 4 further comprises a reflecting part 41 and a laser interferometer.
The laser interferometer is built above the stylus shaft 1, and the center of the laser interferometer optical path coincides with the axis of the stylus shaft 1.
For ease of installation, the surface micro-topography measuring sensor of the present invention further comprises a fixing plate 5.
The fixed plate 5 is respectively connected with the contact pin shaft 1, the magnetic constant force module 3 and the displacement measurement module 4. The fixed plate 5 is used for fixing the contact pin shaft 1, the magnetic constant force module 3 and the displacement measurement module 4.
The fixing plate 5 is provided with a fixing plate mounting hole 52 and a lens mounting groove 51, and the lens mounting groove 51 is used for mounting a lens.
The surface micro-topography measuring sensor of the invention further provides the following technical effects:
1. the invention adopts the vertical guide reference of the air bearing and the V-shaped block, ensures the suspension and the minimum friction of the stylus shaft, and simultaneously avoids the problems of rotation, inclination and the like of the stylus shaft in the working process, so that the stylus can more truly transmit the surface appearance of the workpiece to the sensor.
2. The invention adopts the magnetic constant force control module, overcomes the dead weight of the contact pin shaft by changing the current in the upper coil and the lower coil, ensures that the measuring force between the contact pin and the workpiece to be measured is kept between 0.75mN and 1mN, and can change the current in the coil to adapt to workpieces with different surface materials, and the magnetic constant force control module leads out a metering cycle through the connecting rod to achieve the purposes of leading out a heat source and reducing thermal expansion errors.
3. The invention adopts the laser interferometry to measure the tiny displacement change of the contact pin, has the characteristics of high precision, high resolution, low uncertainty and the like, realizes the source tracing of the meter definition, and enables the roughness value to be directly measured.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.
The principles and embodiments of the present invention have been described herein using specific examples, which are provided only to help understand the method and the core concept of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the above, the present disclosure should not be construed as limiting the invention.
Claims (10)
1. A surface micro topography measuring sensor for measuring a topography of a surface of a workpiece to be measured, said surface micro topography measuring sensor comprising:
a stylus for measuring a micro-topography;
the contact pin shaft is connected with the contact pin at one end and used for moving up and down along with the contact pin when the contact pin measures the micro-topography;
the magnetic constant force module is connected with the other end of the contact pin shaft and used for adjusting the measuring force between the contact pin and the workpiece to be measured;
the contact pin shaft air floatation module surrounds the periphery of the contact pin shaft and is used for floating the contact pin shaft;
and the displacement measuring module is arranged right above the contact pin shaft and used for measuring the displacement of the contact pin shaft in the vertical direction.
2. The surface micro topography measurement sensor according to claim 1, further comprising a fixing plate, wherein the fixing plate is connected to the contact pin shaft, the magnetic constant force module and the displacement measurement module, respectively, and the fixing plate is used for fixing the contact pin shaft, the magnetic constant force module and the displacement measurement module.
3. The surface micro-topography measurement sensor according to claim 2, wherein the magnetic constant force module comprises a force control link, an annular permanent magnet, an annular coil, and a coil holder;
the force control connecting rod comprises a first force control connecting rod and a second force control connecting rod, one end of the first force control connecting rod is connected with the other end of the contact pin shaft, and the first force control connecting rod is perpendicular to the contact pin shaft; the other end of the first force control connecting rod is connected with one end of a second force control connecting rod, the second force control connecting rod is perpendicular to the first force control connecting rod, and the second force control connecting rod and the contact pin shaft are located on the same side of the first force control connecting rod;
the annular permanent magnet is sleeved on the second force control connecting rod;
the coil retainer comprises an upper coil retainer and a lower coil retainer, and the upper coil retainer and the lower coil retainer are both fixed on the fixing plate;
the annular coil comprises an upper annular coil and a lower annular coil, the upper annular coil is sleeved on the upper coil retainer, and the lower annular coil is sleeved on the lower coil retainer;
the annular permanent magnet is positioned between the upper annular coil and the lower annular coil, and the annular permanent magnet, the upper annular coil and the lower annular coil are parallel and coaxial.
4. The surface micro-topography measurement sensor according to claim 1, wherein the stylus shaft comprises a stylus holding part and a piston rod;
one end of the contact pin is positioned in the contact pin fixing part, one end of the piston rod is connected with the magnetic constant force module, and the other end of the piston rod is connected with the contact pin fixing part; the stylus holding part, the piston rod and the stylus are all coaxial.
5. The surface micro-topography measurement sensor according to claim 4, wherein the stylus shaft air bearing module comprises an air bearing and a guide block, the air bearing is sleeved outside the piston rod;
the contact pin shaft also comprises guide hemispheres the number of which is matched with that of the guide blocks; each guiding hemisphere is connected with the piston rod, and the guiding hemispheres are uniformly arranged around the piston rod in a plane;
and aiming at each guide block, one guide hemisphere is contacted with the guide block, and the guide block and the guide hemisphere jointly keep the piston rod in a vertical state all the time.
6. The surface micro-topography measuring sensor according to claim 4, wherein a part of the stylus located inside the stylus holding part is provided with a reflecting part.
7. The surface micro-topography sensor according to claim 6, wherein the reflection member comprises a cylindrical post fitted over the stylus and a reflection layer provided on a surface of the cylindrical post.
8. The surface nanotopography measurement sensor of claim 7, wherein the cylindrical post material is microcrystalline glass.
9. The surface nanotopography measurement sensor of claim 7, wherein the material of the reflective layer is silver.
10. The surface micro-topography measuring sensor according to claim 2, wherein the fixing plate comprises a fixing plate mounting hole and a lens mounting groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010298447.7A CN111351451A (en) | 2020-04-16 | 2020-04-16 | Surface micro-topography measuring sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010298447.7A CN111351451A (en) | 2020-04-16 | 2020-04-16 | Surface micro-topography measuring sensor |
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| CN111351451A true CN111351451A (en) | 2020-06-30 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202010298447.7A Pending CN111351451A (en) | 2020-04-16 | 2020-04-16 | Surface micro-topography measuring sensor |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112525080A (en) * | 2020-11-13 | 2021-03-19 | 华中科技大学 | Suspension contact pin displacement sensor based on differential polarization interference and detection method |
-
2020
- 2020-04-16 CN CN202010298447.7A patent/CN111351451A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112525080A (en) * | 2020-11-13 | 2021-03-19 | 华中科技大学 | Suspension contact pin displacement sensor based on differential polarization interference and detection method |
| CN112525080B (en) * | 2020-11-13 | 2021-10-15 | 华中科技大学 | Suspension contact pin displacement sensor based on differential polarization interference and detection method |
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