CN111350713B

CN111350713B - Cylinder and machine table comprising same

Info

Publication number: CN111350713B
Application number: CN201811563669.6A
Authority: CN
Inventors: 刘超群; 孙超; 李晓; 王昭龙
Original assignee: Ningbo Semiconductor International Corp
Current assignee: Ningbo Semiconductor International Corp
Priority date: 2018-12-20
Filing date: 2018-12-20
Publication date: 2022-04-01
Anticipated expiration: 2038-12-20
Also published as: CN111350713A

Abstract

The invention provides an air cylinder and a machine table comprising the same. The cylinder includes: the piston rod penetrates out of the axial end of the cylinder body, and the piston is movably arranged in the cylinder body and connected with the piston rod; the cylinder body includes: the outer cylinder body is fixedly sleeved outside the inner cylinder body and is in sealing connection with the inner cylinder body, and an outer cavity is formed between the inner cylinder body and the outer cylinder body; the piston comprises an inner piston body and an outer piston body, the inner piston body is positioned in the inner cylinder body, and the outer piston body is positioned in the outer chamber and used for synchronously moving with the inner piston body; the side wall of the inner cylinder body is provided with a first hole and a second hole which are communicated with the outer cavity and the inner cylinder body; the side wall of the outer cylinder body is provided with a third hole and a fourth hole which are communicated with the outer cavity and the outside; the first hole and the third hole are positioned on one side of the piston, and the second hole and the fourth hole are positioned on the other side of the piston; with such a configuration, the service life of the cylinder can be increased, and it is preferable that only one piston rod is provided to simplify the structure of the cylinder.

Description

Cylinder and machine table comprising same

Technical Field

The invention relates to the technical field of cylinders, in particular to a cylinder and a machine table comprising the same.

Background

Wafers (wafers) are basic materials for manufacturing semiconductor chips, and inevitably undergo an etching process during their manufacturing.

The etching process is usually performed on an etching machine, and a dry etching machine is commonly used. The dry etching machine is provided with a conveying cavity and an etching cavity, and wafers are conveyed into the etching cavity through the conveying cavity to perform an etching process. When the etching is carried out, in order to avoid pollution and pressure disturbance between the cavities, a door capable of being opened and closed is arranged between the conveying cavity and the etching cavity. In addition, the dry etching machine table is also provided with a lifting device, the lifting device drives a plurality of thimbles to penetrate through the electrostatic chuck, so that the wafer adsorbed on the electrostatic chuck is horizontally supported, and the wafer is conveniently taken and placed by a manipulator. However, the door between the transfer chamber and the etching chamber is often not tightly closed, resulting in a shutdown or production stoppage of the dry etching machine. Not only is the wafer prone to shaking, dropping and the like, but even more by-products (generally polymers) are deposited on the surface of the wafer, which increases the defect rate of the wafer and reduces the processing quality.

Disclosure of Invention

In order to solve the above technical problems, an object of the present invention is to provide a cylinder, which aims to prolong the service life of the cylinder, thereby reducing the shutdown or production stoppage of a dry etching machine.

Another object of the present invention is to provide a cylinder, which is to improve the damping performance of the cylinder, so as to reduce the defects generated by wafer during the etching process.

The invention also aims to provide a machine platform, which comprises the cylinder, and by using the cylinder, the phenomenon of machine platform halt or production halt can be reduced, and the processing quality of products is improved.

Further, in order to achieve the above object, the present invention provides an air cylinder, which includes an air cylinder body, a piston rod and a piston, wherein the piston rod penetrates through an axial end of the air cylinder body, the piston is movably disposed inside the air cylinder body and connected to the piston rod, and wherein:

the cylinder body comprises an inner cylinder body and an outer cylinder body, the outer cylinder body is fixedly sleeved outside the inner cylinder body and is in sealing connection with the inner cylinder body, and an outer cavity is formed between the outer cylinder body and the inner cylinder body;

the piston comprises an inner piston body and an outer piston body, the inner piston body is positioned in the inner cylinder body, and the outer piston body is positioned in the outer chamber and is used for synchronous movement with the inner piston body;

a first hole and a second hole are formed in the side wall of the inner cylinder body, and the first hole and the second hole are communicated with the outer cavity and the inner cylinder body; a third hole and a fourth hole are formed in the side wall of the outer cylinder body, and the third hole and the fourth hole are communicated with the outer chamber and the outside; the first and third bores are located on one side of the piston, and the second and fourth bores are located on the other side of the piston.

Optionally, the piston rod is inserted into the inner cylinder body and connected with the inner piston body;

the inner piston body and the outer piston body are capable of synchronous movement by attraction between each other.

Optionally, the piston rod includes an inner piston rod and an outer piston rod, the inner piston rod is inserted into the inner cylinder and connected to the inner piston body, and the outer piston rod is inserted into the outer cylinder and connected to the outer piston body;

the inner piston rod and the outer piston rod are connected together outside the cylinder body.

Optionally, the cylinder body has opposite first and second ends, the first and third bores are both disposed proximate to the first end, the second and fourth bores are both disposed proximate to the second end, and the first bore is further from the first end than the third bore, and the second bore is further from the second end than the fourth bore.

Optionally, the cylinder further includes a damping device, and the damping device is disposed inside the cylinder body and is used for reducing impact of the piston on an axial end of the cylinder body in a movement process.

Optionally, the inner cylinder body is provided with an exhaust cavity, the damping device comprises air storage grooves, and at least one air storage groove is arranged on the inner wall of the exhaust cavity in the axial direction.

Optionally, one end surface of the inner piston body forms a first inner wall of the exhaust cavity, an inner end surface of the inner cylinder body forms a second inner wall of the exhaust cavity, and the first inner wall and the second inner wall are arranged oppositely;

wherein at least one of the air reservoirs is disposed on the first inner wall and/or at least one of the air reservoirs is disposed on the second inner wall.

Optionally, the damping device comprises a plurality of air reservoirs;

only two opposite end surfaces of the inner piston body are respectively provided with at least one air storage groove; alternatively, the first and second electrodes may be,

only two inner end surfaces of the inner cylinder body are respectively provided with at least one air storage groove; alternatively, the first and second electrodes may be,

at least one air storage groove is formed in one inner end face of the inner cylinder body, and at least one air storage groove is formed in one side, deviating from the inner end face, of the inner piston body.

Optionally, the outer piston body is axially aligned with the inner piston body.

Optionally, the outer piston body is magnetically coupled to the inner piston body.

Optionally, the inner cylinder is arranged eccentrically to the outer cylinder.

Optionally, a part of the outer wall of the inner cylinder is connected with the inner wall of the outer cylinder in a sealing manner.

Optionally, the inner cylinder is arranged concentrically with the outer cylinder.

Optionally, the outer cylinder body has opposite top and bottom ends; the third hole is opened at the top end, and/or the fourth hole is opened at the bottom end.

Further, in order to achieve the above object, the present invention provides a machine table, which includes any one of the cylinders.

Optionally, the machine is an etching machine, the etching machine includes a conveying chamber, an etching chamber and a door disposed between the conveying chamber and the etching chamber, and the cylinder is used for driving the door to open and close.

Optionally, the machine is an etching machine, the etching machine includes an etching cavity and a lifting device, the lifting device includes an air cylinder and a thimble connected to the air cylinder, and the air cylinder is used to drive the thimble to lift a substrate located in the etching cavity.

Optionally, the etching machine further includes a chuck for electrostatically adsorbing the substrate, the chuck is located in the etching cavity, and the cylinder is used for driving the plurality of thimbles to pass through the chuck to hold up the substrate.

In summary, in the cylinder and the machine station including the cylinder provided by the present invention, the cylinder includes a cylinder body, a piston rod and a piston, wherein the cylinder body includes an inner cylinder body and an outer cylinder body, two holes are opened on a sidewall of each cylinder body, the two holes are respectively used as an air inlet hole and an air outlet hole, and the piston includes an inner piston body and an outer piston body. In the in-service use, when a piston body goes wrong, another piston body still can drive the piston body continuation motion that has a problem, can improve the life of cylinder like this, thereby ensure that the cylinder can long-time normal use, reduce and cause the board to shut down or the phenomenon of stopping production because of single cylinder damages, also can avoid single cylinder sudden damage load motion that causes in the use hysteresis, shake scheduling problem simultaneously, thereby reduce the production risk, and the whole width of cylinder is also little, be convenient for installation and use.

In a preferred embodiment of the present invention, the piston rod is inserted into the inner cylinder and connected to the inner piston body, and the inner piston body and the outer piston body can move synchronously by an attractive force therebetween, for example, the inner piston body and the outer piston body are magnetically connected to achieve synchronous movement. Compared with the existing double cylinders, the cylinder provided by the invention is connected with an external load by using only one piston rod, and has the advantages of simple structure and low cost. And the synchronous motion of the inner piston body and the outer piston body is realized through the attraction between the inner piston body and the outer piston body, the structure is simple, meanwhile, the sealing performance of the cylinder body is good, and the normal work of the cylinder can be ensured.

In a preferred embodiment of the present invention, the first hole on the inner cylinder and the third hole on the outer cylinder are both disposed near the first end of the cylinder body, and the second hole on the inner cylinder and the fourth hole on the outer cylinder are both disposed near the second end of the cylinder body, and the first hole is further from the first end than the third hole, and the second hole is further from the second end than the fourth hole, so that the first hole (exhaust hole) can be blocked when the inner piston moves in one direction, and the second hole (exhaust hole) can be blocked when the inner piston moves in the opposite direction, at this time, the inner cylinder can stop exhausting, thereby avoiding or reducing the impact of the piston on the axial end of the cylinder body when the piston is limited in the stroke, thereby reducing the vibration of the cylinder at the end of the stroke, and further reducing the adverse effect of the vibration on the production.

In another preferred embodiment of the present invention, the cylinder further comprises a shock-absorbing device provided inside the cylinder body for reducing an impact of the piston on an axial end of the cylinder body at the stroke limit. Specifically, the damping device preferably includes air reservoirs, and at least one of the air reservoirs is disposed on an inner wall of the exhaust chamber in the axial direction. The damping device preferably includes a plurality of air storage grooves, at least one air storage groove is respectively disposed on two opposite end surfaces of the inner piston body, or at least one air storage groove is respectively disposed on two opposite inner end surfaces of the inner cylinder body, or at least one air storage groove is disposed on one inner end surface of the inner cylinder body, and at least one air storage groove is disposed on one side of the inner piston body away from the inner end surface. The air storage groove is used for realizing the shock absorption of the air cylinder, the structure is simple, the impact of the starting/stopping of the air cylinder can be reduced, and the shaking of the air cylinder caused by the instant that the exhaust hole on the inner cylinder body is suddenly blocked by the inner piston body can be reduced, so that the shock absorption performance of the air cylinder is improved. Specifically, the air storage tank is used for buffering the compression of air, so that sudden pressure change caused by sudden 'blocking' of the exhaust hole can be avoided, the stability of the instantaneous motion of the air cylinder is ensured, and the shaking of the load is avoided.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

FIG. 1 is an axial cross-sectional view of a cylinder provided in accordance with an embodiment of the present invention;

FIG. 2a is a schematic diagram of the upward movement of the piston provided by an embodiment of the present invention;

FIG. 2b is a schematic view of the piston moving upward and blocking the vent hole in the inner cylinder according to the embodiment of the present invention;

FIG. 2c is a schematic view of the piston moving upward to a travel limit position according to an embodiment of the present invention;

fig. 3 is a schematic structural diagram of an etching machine according to an embodiment of the present invention.

Description of reference numerals:

1-a transfer chamber; 2-etching the cavity; a door-3; 4-a cylinder; 5-a chuck; 6-a thimble;

110-a cylinder body; 111-inner cylinder; 112-an external cylinder; 113-an outer chamber; 114-an inner chamber; 115-a first hole; 116-a second aperture; 117-third aperture; 118-a fourth well;

120-a piston; 121-an inner piston body; 122-an outer piston body; 130-a piston rod; 140-gas storage tank; a. b, c and d-the positions of the air storage grooves on the inner cylinder body.

Detailed Description

As described in the background, the inventors have found that the gate between the transfer chamber and the etching chamber of a dry etching machine is often not tightly closed, and the wafer is also prone to fluttering, dropping, etc., while the wafer surface is also prone to depositing by-products. The inventor further researches and discovers that the door is often not tightly closed to cause the machine to be frequently stopped or production is stopped and reduce the production efficiency based on the reason that the air cylinder is a single air cylinder and is easy to damage. In addition, because the gas cylinder is easy to vibrate in the working process, the wafer is bounced or even dropped, sometimes the vibration of the gas cylinder also easily causes the by-products on the wall of the etching cavity to be loose and to drop on the surface of the wafer when the etching is carried out, and the surface defect of the wafer is caused.

In order to solve the problem that a single cylinder is easy to damage, the inventor tries to prolong the service life of the cylinder by using double cylinders, but the double cylinders are complex in structure and high in cost. In order to solve the problem of cylinder vibration, the inventor tries to use a spring, a hydraulic damper or an air buffer cylinder, but the spring and the hydraulic damper have complicated structures and high cost. The gas buffering cylinder adopts a gas damping device to realize damping, the gas damping device comprises a buffering sleeve, a buffering sealing ring, a buffering valve and the like, a closed air chamber (namely a buffering cavity) is formed on one side of a piston, the impact of the piston on a cylinder cover is avoided or relieved, and the purpose of buffering is achieved.

Based on the above research, an embodiment of the present invention provides a cylinder, including: the piston rod penetrates out of the axial end of the cylinder body, and the piston is movably arranged in the cylinder body and connected with the piston rod; the cylinder body comprises an inner cylinder body and an outer cylinder body, the outer cylinder body is fixedly sleeved outside the inner cylinder body and is in sealing connection with the inner cylinder body, and an outer cavity is formed between the outer cylinder body and the inner cylinder body; the piston comprises an inner piston body and an outer piston body, the inner piston body is positioned in the inner cylinder body, and the outer piston body is positioned in the outer chamber and is used for synchronous movement with the inner piston body; the side wall of the inner cylinder body is provided with a first hole and a second hole, and the first hole and the second hole are communicated with the outer cavity and the inner cylinder body; a third hole and a fourth hole are formed in the side wall of the outer cylinder body, and the third hole and the fourth hole are communicated with the outer chamber and the outside; the first and third bores are located on one side of the piston, and the second and fourth bores are located on the other side of the piston. Compared with the double cylinders tried by the inventor, the whole width of the cylinder is small, and the installation and the use are convenient.

Further, in some embodiments, the piston rod is inserted into the inner cylinder and connected to the inner piston body. Compared with the double-cylinder tried by the inventor, the cylinder disclosed by the invention is connected with an external load by using only one piston rod, and is simple in structure and low in cost.

Further, in some embodiments, the piston rod includes an inner piston rod and an outer piston rod, the inner piston rod is inserted into the inner cylinder and connected with the inner piston body, the outer piston rod is inserted into the outer cylinder and connected with the outer piston body, and the inner piston rod and the outer piston rod are connected together outside the cylinder body. Optionally, a plurality of outer piston rods are symmetrically arranged in the outer cylinder body, so that friction is reduced, and the working reliability of the cylinder is ensured.

Furthermore, the inner piston body and the outer piston body can synchronously move through mutual attraction force, so that the structure is simple, the sealing performance of the cylinder body is good, and the normal work of the cylinder can be ensured.

Further, the cylinder body has opposite first and second ends, the first and third bores are both disposed proximate the first end, the second and fourth bores are both disposed proximate the second end, and the first bore is further from the first end than the third bore, and the second bore is further from the second end than the fourth bore. Furthermore, the cylinder further comprises a damping device arranged inside the cylinder body and used for reducing the impact of the piston on the axial end part of the cylinder body. Still further, the inner cylinder body is provided with an exhaust cavity, the damping device comprises air storage grooves, and at least one air storage groove is formed in the inner wall, located in the axial direction, of the exhaust cavity. Compared with springs, hydraulic shock absorption and air buffering shock absorption attempted by the inventor, the air storage tank is used for shock absorption, the shock absorption structure is simple, and the impact force generated when the air cylinder starts/stops and the exhaust port is suddenly blocked can be effectively reduced, so that the shock of the air cylinder in the using process is reduced, and the shock absorption performance of the air cylinder is improved.

The invention is described in further detail below with reference to the figures and specific examples. The advantages and features of the present invention will become more apparent from the following description and drawings, it being understood, however, that the concepts of the present invention may be embodied in many different forms and should not be construed as limited to the specific embodiments set forth herein. The drawings are in simplified form and are not to scale, but are provided for convenience and clarity in describing embodiments of the invention.

The terms "first," "second," "third," "fourth," and the like in the description and in the appended claims are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the terms so used are interchangeable under appropriate circumstances such that the embodiments of the invention described herein are, for example, capable of operation in other sequences than described or illustrated herein. Although elements in one drawing may be readily identified as such in other drawings, the present disclosure does not identify each element as being identical to each other in every drawing for clarity of description.

The cylinder and the machine including the cylinder according to the embodiments of the present invention will be further described with reference to the accompanying drawings and specific embodiments. In the following description, a single piston rod is specifically used as a schematic illustration, but the present invention should not be limited thereto.

Fig. 1 is an axial cross-sectional view of a cylinder provided in the present embodiment, and as shown in fig. 1, the cylinder provided in the present embodiment is a double acting cylinder including: a cylinder body 110, a piston 120, and a piston rod 130. The piston rod 130 penetrates through an axial end of the cylinder body 110. Meanwhile, the piston 120 is movably disposed inside the cylinder body 110 and connected to the piston rod 130, so as to drive the piston rod 130 to move. The piston rod 130 is used to connect with an external load to drive the external load to move, for example, upward or downward.

The cylinder body 110 of the present embodiment specifically includes an inner cylinder 111 and an outer cylinder 112, the outer cylinder 112 is fixedly sleeved outside the inner cylinder 111 and is connected to the inner cylinder 111 in a sealing manner, an outer chamber 113 is formed between the outer cylinder 112 and the inner cylinder 111, and an inner chamber 114 is formed in an inner cavity of the inner cylinder 111. In an embodiment, the inner cylinder 111 and the outer cylinder 112 are concentrically arranged to form an annular outer chamber 113 between the inner cylinder 111 and the outer cylinder 112, but the inner cylinder 111 and the outer cylinder 112 may be cylinders or hollow polygonal columns, and the invention is not limited thereto. In another embodiment, the inner cylinder 111 and the outer cylinder 112 may be eccentrically disposed, and optionally, a part of the outer wall of the inner cylinder 111 is hermetically connected to the inner wall of the outer cylinder 112, where compared to the concentric arrangement, the two eccentrically disposed cylinders are difficult to process and expensive.

The cylinder proposed by the embodiment of the present invention will be further described below with the inner and outer cylinder bodies concentrically arranged as an illustration.

As shown in fig. 1, a first hole 115 and a second hole 116 are formed in the side wall of the inner cylinder 111, and both are communicated with the outer chamber 113 and the inner chamber 114. In practice, one of the first hole 115 and the second hole 116 may be used as an exhaust hole, and the other may be used as an intake hole. Correspondingly, a third hole 117 and a fourth hole 118 are formed in the side wall of the outer cylinder 112, and both are communicated with the outer chamber 113 and the outside of the cylinder. Similarly, one of the third hole 117 and the fourth hole 118 may be used as an exhaust hole, and the other may be used as an intake hole. Here, the first and

third holes

115 and 117 are each disposed near a first end (e.g., an upper end) of the cylinder body 110, and the second and

fourth holes

116 and 118 are each disposed near a second end (e.g., a lower end). Thus, when the piston 120 moves, for example, upward, the first and

third holes

115 and 117 simultaneously function as exhaust holes, while the second and

fourth holes

116 and 118 simultaneously function as intake holes. Conversely, when the piston 120 moves, for example, downwards, the first and

third holes

115 and 117 act simultaneously as inlet holes, while the second and

fourth holes

116 and 118 act simultaneously as outlet holes.

In addition to the foregoing, the piston 120 specifically includes an inner piston body 121 and an outer piston body 122. The piston rod 130 penetrates through the inner cylinder 111 and penetrates through at least one axial end of the inner cylinder 111, and one end of the piston rod 130, which extends out of the cylinder, is used for being connected with an external load. Here, the piston rod 130 optionally passes through both axial ends of the inner cylinder 111, and thus, either end of the piston rod 130 may be connected to an external load. In addition, the inner piston body 121 is located in the inner cylinder 111 and connected to the piston rod 130, and the connection manner is not limited in particular, and preferably, the inner piston body is sleeved on and sealed with the piston rod 130. While the outer piston body 122 is located in the outer chamber 113 and is synchronously movable with the inner piston body 121, preferably by means of a mutual attraction force. Alternatively, the outer piston body 122 is aligned with the inner piston body 121 in the axial direction of the cylinder, and both are preferably magnetically connected. For example, the inner piston body 121 is made of a metal material, the metal material is not limited to iron alloy, and the outer piston body 122 is made of a magnet, so that the two piston bodies are coupled due to the magnetic force, and thus, a hole and the like do not need to be formed in the cylinder body, the sealing performance of the cylinder can be better ensured, and the cylinder can work normally.

Further, referring to fig. 2a, the operation of the cylinder according to the embodiment of the present invention will be described in detail, as shown in fig. 2a, if the cylinder is vertically installed, in order to drive the piston 120 to move upward, gas is introduced through the fourth hole 118 to drive the outer piston body 122 to move upward, and at the same time, gas is introduced into the inner chamber 114 through the outer chamber 113 and the second hole 116 to drive the inner piston body 121 to move upward. Further, if the piston 120 moves downward, gas is introduced through the third holes 117 to drive the outer piston body 122 downward, while gas also enters the inner chamber 114 through the outer chamber 113 and the first holes 115 to drive the inner piston body 121 downward.

In practical application, because the inner piston body and the outer piston body can synchronously move, such as synchronously move upwards or downwards, and the movement speeds are the same, when one of the piston bodies has a problem, the other piston body can drive the piston body with the problem to continuously move upwards or downwards under the action of magnetic coupling or other connection modes, so that the service life of the air cylinder can be prolonged, a series of problems caused by damage of a single air cylinder, such as the problem that a door between a conveying cavity and an etching cavity on an etching machine table is not tightly closed, and the problems of load movement delay, shaking and the like caused by sudden damage of the single air cylinder in the use process, are reduced, the machine table is stopped or stopped, and the production efficiency is improved.

It will also be appreciated that during upward movement of the piston 120, the inner cylinder 111 is charged through the second port 116 while being discharged through the first port 115, and the gas discharged from the first port 115 is discharged to the outside of the cylinder via the outer chamber 113 and the third port 117. As for the external cylinder 112, it performs air intake through the fourth hole 118 while performing air exhaust through the third hole 117. Here, the first hole 115 and the third hole 117 may be at the same axial position (i.e., the relative distance in the axial direction is zero) or may be provided at a distance in the axial direction, and similarly, the second hole 116 and the fourth hole 118 may be at the same axial position or different axial positions. Alternatively, the first bore 115 is farther from the upper end of the cylinder body 110 than the third bore 117, and the second bore 116 is farther from the lower end of the cylinder body 110 than the fourth bore 118.

When the first hole 115 is farther away from the upper end of the cylinder body 110 than the third hole 117, and the second hole 116 is farther away from the lower end of the cylinder body 110 than the fourth hole 118, the inner piston body 121 moves upward to block the first hole 115, and at this time, the inner cylinder body 111 stops exhausting, so as to avoid or reduce the impact on the axial end of the cylinder body during the upward movement of the piston 120 at the stroke limit, thereby reducing the vibration of the cylinder at the stroke end, and further reducing the adverse effect of the vibration on the production. Similarly, when the inner piston body 121 moves downward, the second hole 116 can be blocked, and the inner cylinder body 111 stops exhausting, so as to avoid or reduce the impact on the axial end of the cylinder body during the stroke limit during the downward movement of the piston 120.

In the embodiment of the present invention, the outer cylinder 112 has opposite top and bottom ends, and the "top end" and "bottom end" are not limited to the installation direction of the cylinders, and it is understood that the cylinders may be arranged in other directions, such as horizontal arrangement or oblique arrangement, where appropriate. Alternatively, the third hole 117 is opened at the top end of the side wall of the outer cylinder 112, and the fourth hole 118 is preferably opened at the bottom end of the side wall of the outer cylinder 112.

Further, the cylinder of this embodiment further includes a damping device, which is disposed inside the cylinder body 110, and is used to reduce the impact of the piston 120 on the cylinder body 110 during the stroke limitation, and reduce the vibration of the cylinder during the stroke limitation. Here, the "stroke limit" has an upward stroke limit and a downward stroke limit, and is located at a stroke limit position when the piston 120 is in contact with the end surface of the cylinder body, and at this time, the piston stops moving.

Further, the damper of the present embodiment includes the air receiver 140 which is disposed on the inner wall of the exhaust chamber of the inner cylinder 111 in the axial direction, for example, one end surface of the inner piston body 121 constitutes a first inner wall of the exhaust chamber, while one end surface of the inner cylinder 111 constitutes a second inner wall of the exhaust chamber, the first inner wall and the second inner wall being disposed opposite to each other. In this case, at least one air storage groove 140 may be formed on the first inner wall, at least one air storage groove 140 may be formed on the second inner wall, or at least one air storage groove 140 may be formed on both the first inner wall and the second inner wall.

More specifically, the shock absorbing means preferably comprises a plurality of air reservoirs 140. In one embodiment, at least one air storage groove 140 is provided only at both opposite end surfaces of the inner piston body 121, respectively, so that the air storage groove 140 is formed in the corresponding air discharge chamber regardless of the upward or downward movement of the piston. More specifically, at least one air receiver 140 is formed on the upper end surface of the inner piston body 121, while at least one air receiver 140 is formed on the lower end surface of the inner piston body 121, seen in the mounting direction disclosed in fig. 2. So that compressed gas can be stored through the gas storage groove 140 on the axially inner wall of the gas discharge chamber when the piston 120 moves upward or downward. And the present invention does not limit the specific shape of the air reservoir 140, and may be C-shaped or O-shaped, and more preferably, is disposed around the piston rod 130. Furthermore, one or more air storage grooves 140 may be disposed on any end surface of the inner piston body 121, for example, a plurality of air storage grooves 140 may be concentrically disposed around the piston rod 130, or a plurality of air storage grooves 140 may be spaced apart along the circumferential direction of the piston rod 130, and the plurality of air storage grooves 140 are preferably uniformly distributed along the same circumferential direction.

In practical application, as shown in fig. 2b, when the piston 120 moves upward, the inner piston body 121 closes the first hole 115 when passing through the first hole 115, so that the exhaust hole of the inner cylinder 111 is sealed, the exhaust of the inner cylinder 111 is stopped, but the exhaust of the outer cylinder 112 is normal, and finally, as shown in fig. 2c, when the piston 120 moves upward to a stroke limit position, the upward movement is completed. Here, it should be understood that after the first hole 115 is closed, as the piston 120 continues to move upward, the space (i.e., the exhaust chamber) on the upper side of the inner piston body 121 becomes smaller, and the gas pressure increases, so that the impact of the piston 120 on the cylinder body can be avoided or alleviated, thereby performing a buffering function. Therefore, the air storage groove 140 is formed on the upper end surface of the inner piston body 121, so that at the moment that the first hole 115 is suddenly closed by the inner piston body 121, the space on the upper side of the inner piston body 121 cannot generate pressure sudden change, the stability of the instantaneous movement of the air cylinder is ensured, and the load is prevented from shaking.

On the contrary, when the piston 120 moves downwards, the second hole 116 is closed by the inner piston body 121 on the same principle as the upward movement, so that the impact of the piston 120 on the lower part of the cylinder body can be avoided or alleviated, and the buffering effect is achieved.

The present invention is not limited to the formation of the air storage groove 140 on the inner piston body, and the air storage groove 140 may be formed on the inner end surface of the inner cylinder 111. As shown in FIG. 1, the inner end surface of the inner cylinder 111 at the top may be formed with at least one air reservoir 140, for example, the air reservoirs 140 are provided in the areas a, b enclosed by the dotted line in FIG. 1, while the inner end surface of the inner cylinder 111 at the bottom may be formed with at least one air reservoir 140, for example, the areas c, d enclosed by the dotted line in FIG. 1.

In other embodiments, the plurality of air reservoirs 140 may also be configured as follows: at least one air storage groove 140 is formed on one inner end surface of the inner cylinder 111, and at least one air storage groove 140 is formed on an end surface of the inner piston body 121 facing away from the inner end surface, so that the air storage groove 140 is formed in the corresponding exhaust chamber regardless of upward or downward movement. However, the present invention is not limited to this, and in practice, the air storage grooves 140 may be formed on both opposite end surfaces of the inner piston body 121, the air storage grooves 140 may be formed on both opposite end surfaces of the inner cylinder 111, or other alternative ways, as long as at least one air storage groove 140 is formed in the space of the inner cylinder as the exhaust chamber.

Further, this embodiment still provides a board, the board includes the cylinder of this embodiment. Further, the machine is, for example, a dry etching machine, and is configured to etch a substrate, such as a wafer (wafer), a glass substrate, or an LED substrate.

As shown in fig. 3, the dry etching machine further includes a transfer chamber 1 and an etching chamber 2, and the substrate is sent into the etching chamber 2 through the transfer chamber 1 to perform an etching process. A door 3 is arranged between the conveying cavity 1 and the etching cavity 2 and used for avoiding mutual pollution between the conveying cavity 1 and the etching cavity 2 and avoiding pressure disturbance between the two cavities to influence etching quality. The door 3 is connected with a cylinder 4, and the cylinder 4 is used for driving the opening and closing of the door 3.

Further, the dry etching machine also comprises a chuck 5 for electrostatically adsorbing the substrate, wherein the chuck 5 is positioned in the etching cavity 2. The dry etching mechanism further comprises a lifting device, the lifting device comprises one or more air cylinders 4 and ejector pins 6 connected with the air cylinders 4, the one or more air cylinders 4 are used for driving a plurality of ejector pins 6 to penetrate through the chuck 5 to support the substrate so as to be convenient for a manipulator to take and place the substrate, therefore, the air cylinders 4 can drive the ejector pins 6 to ascend or descend, and the substrate is taken and placed.

In the above, the dry etching machine is taken as an example, but in fact, the cylinder may also be applied to other machines, such as a chemical vapor deposition machine, a physical vapor deposition machine, and the like, in these machines, similar to the dry etching machine, the cylinder is also used for driving the thimble to lift up the substrate for vapor deposition so as to facilitate the mechanical arm to pick and place, and in addition, the cylinder may also drive the door on the deposition cavity to open and close, so as to realize the isolation between the deposition cavity and the outside. Therefore, by using the cylinder of the embodiment, the phenomenon of machine halt or production stop can be reduced, and the processing quality of products can be improved.

In conclusion, the cylinder provided by the embodiment of the invention can prolong the service life of the cylinder and has good damping performance. In practical applications, the cylinder provided in this embodiment can be applied to various machines, especially semiconductor processing machines, such as etching machines, vapor deposition machines, etc., so as to reduce the impact force of the cylinder during starting/stopping, and reduce the jitter of the cylinder during operation, thereby avoiding or reducing the impact of vibration on the substrate (e.g., wafer) processing, and ensuring the processing quality of the substrate.

The above description is only for the purpose of describing the preferred embodiments of the present invention and is not intended to limit the scope of the claims of the present invention, and any person skilled in the art can make possible the variations and modifications of the technical solutions of the present invention using the methods and technical contents disclosed above without departing from the spirit and scope of the present invention, and therefore, any simple modification, equivalent change and modification made to the above embodiments according to the technical essence of the present invention belong to the protection scope of the technical solutions of the present invention.

Claims

1. The utility model provides a cylinder, includes cylinder body, piston rod and piston, the piston rod is worn out the axial tip of cylinder body, the piston movably set up in the inside of cylinder body and with the piston rod is connected its characterized in that:

the cylinder body comprises an inner cylinder body and an outer cylinder body, the outer cylinder body is fixedly sleeved outside the inner cylinder body and is in sealing connection with the inner cylinder body, and an annular outer cavity is formed between the outer cylinder body and the inner cylinder body;

the piston comprises an inner piston body and an outer piston body, the inner piston body is positioned in the inner cylinder body, the outer piston body is positioned in the outer chamber and is used for synchronous movement with the inner piston body, and the inner piston body and the outer piston body can be driven to move mutually;

the side wall of the inner cylinder body is provided with a first hole and a second hole, and the first hole and the second hole are communicated with the outer cavity and the inner cylinder body; a third hole and a fourth hole are formed in the side wall of the outer cylinder body, and the third hole and the fourth hole are communicated with the outer chamber and the outside; the first and third bores are located on one side of the piston and the second and fourth bores are located on the other side of the piston; the cylinder body has opposite first and second ends, the first and third bores are both proximate the first end, the second and fourth bores are both proximate the second end, and the first bore is further from the first end than the third bore, and the second bore is further from the second end than the fourth bore.

2. The cylinder of claim 1, wherein the piston rod is inserted into the inner cylinder body and connected with the inner piston body;

3. The cylinder of claim 1, wherein said piston rod comprises an inner piston rod and an outer piston rod, said inner piston rod is inserted into said inner cylinder and connected to said inner piston body, said outer piston rod is inserted into said outer cylinder and connected to said outer piston body;

4. A cylinder according to claim 1, further comprising a damping means disposed within the cylinder body for reducing the impact of the piston on the axial end of the cylinder body.

5. A cylinder according to claim 4, characterized in that the inner block has a venting chamber, and the damping means comprise air reservoirs, at least one of which is arranged on the axially inner wall of the venting chamber.

6. The cylinder according to claim 5, wherein one end surface of the inner piston body constitutes a first inner wall of the exhaust chamber, and an inner end surface of the inner cylinder body constitutes a second inner wall of the exhaust chamber, the first inner wall and the second inner wall being disposed opposite to each other;

7. A cylinder according to claim 4, wherein the damping means comprises a plurality of air reservoirs;

8. A cylinder according to any of claims 1-7, wherein the outer piston body is axially aligned with the inner piston body.

9. A cylinder according to any of claims 1-7, characterized in that the outer piston body is magnetically connected to the inner piston body.

10. A cylinder according to any of claims 1 to 7, wherein the inner block is arranged eccentrically to the outer block.

11. A cylinder according to any of claims 1 to 7, wherein the inner block is arranged concentrically with the outer block.

12. A cylinder according to any of claims 1 to 7, wherein the outer block has opposite top and bottom ends; the third hole is opened at the top end, and/or the fourth hole is opened at the bottom end.

13. A machine comprising a cylinder as claimed in any one of claims 1 to 12.

14. The machine table according to claim 13, wherein the machine table is an etching machine table, the etching machine table comprises a conveying cavity, an etching cavity and a door arranged between the conveying cavity and the etching cavity, and the cylinder is used for driving the door to open and close.

15. The machine table according to claim 14, wherein the machine table is an etching machine table, the etching machine table comprises an etching cavity and a lifting device, the lifting device comprises a cylinder and a thimble connected to the cylinder, and the cylinder is configured to drive the thimble to lift a substrate located in the etching cavity.

16. The apparatus of claim 15, further comprising a chuck for electrostatically attracting the substrate, the chuck being located in the etching chamber, wherein the cylinder is configured to drive the plurality of pins through the chuck to lift the substrate.