CN111324013B - 化学增幅型正型感光性树脂组成物及其应用 - Google Patents
化学增幅型正型感光性树脂组成物及其应用 Download PDFInfo
- Publication number
- CN111324013B CN111324013B CN201911221344.4A CN201911221344A CN111324013B CN 111324013 B CN111324013 B CN 111324013B CN 201911221344 A CN201911221344 A CN 201911221344A CN 111324013 B CN111324013 B CN 111324013B
- Authority
- CN
- China
- Prior art keywords
- group
- weight
- parts
- structural formula
- carbon atoms
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000011342 resin composition Substances 0.000 title claims abstract description 45
- 229920005989 resin Polymers 0.000 claims abstract description 44
- 239000011347 resin Substances 0.000 claims abstract description 44
- 230000001681 protective effect Effects 0.000 claims abstract description 37
- 239000002904 solvent Substances 0.000 claims abstract description 20
- 239000000758 substrate Substances 0.000 claims abstract description 15
- 239000000463 material Substances 0.000 claims abstract description 8
- -1 alicyclic hydrocarbon Chemical class 0.000 claims description 154
- 150000001875 compounds Chemical class 0.000 claims description 49
- 239000000178 monomer Substances 0.000 claims description 47
- 125000004432 carbon atom Chemical group C* 0.000 claims description 43
- 125000000217 alkyl group Chemical group 0.000 claims description 39
- 239000002253 acid Substances 0.000 claims description 24
- 239000000203 mixture Substances 0.000 claims description 24
- 125000003118 aryl group Chemical group 0.000 claims description 22
- 125000002723 alicyclic group Chemical group 0.000 claims description 20
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 19
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical group [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 16
- 125000003700 epoxy group Chemical group 0.000 claims description 14
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 12
- 125000003545 alkoxy group Chemical group 0.000 claims description 9
- 150000001732 carboxylic acid derivatives Chemical class 0.000 claims description 9
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 8
- 150000004292 cyclic ethers Chemical group 0.000 claims description 6
- 125000003710 aryl alkyl group Chemical group 0.000 claims description 5
- 229910052731 fluorine Inorganic materials 0.000 claims description 4
- 125000001153 fluoro group Chemical group F* 0.000 claims description 3
- 239000004215 Carbon black (E152) Substances 0.000 claims description 2
- 229930195733 hydrocarbon Natural products 0.000 claims description 2
- 125000004430 oxygen atom Chemical group O* 0.000 claims description 2
- 125000005010 perfluoroalkyl group Chemical group 0.000 claims description 2
- 238000004378 air conditioning Methods 0.000 claims 1
- 239000010408 film Substances 0.000 abstract description 76
- 239000000126 substance Substances 0.000 abstract description 25
- 230000003321 amplification Effects 0.000 abstract description 6
- 238000003199 nucleic acid amplification method Methods 0.000 abstract description 6
- 239000010409 thin film Substances 0.000 abstract description 5
- 239000011229 interlayer Substances 0.000 abstract description 4
- 230000003287 optical effect Effects 0.000 abstract description 3
- 238000005253 cladding Methods 0.000 abstract description 2
- 239000011162 core material Substances 0.000 abstract description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 33
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 23
- 230000005855 radiation Effects 0.000 description 21
- XJHABGPPCLHLLV-UHFFFAOYSA-N benzo[de]isoquinoline-1,3-dione Chemical compound C1=CC(C(=O)NC2=O)=C3C2=CC=CC3=C1 XJHABGPPCLHLLV-UHFFFAOYSA-N 0.000 description 20
- 238000000576 coating method Methods 0.000 description 17
- 239000011248 coating agent Substances 0.000 description 16
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 13
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 12
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 12
- AHHWIHXENZJRFG-UHFFFAOYSA-N oxetane Chemical compound C1COC1 AHHWIHXENZJRFG-UHFFFAOYSA-N 0.000 description 11
- 239000004094 surface-active agent Substances 0.000 description 11
- NECRQCBKTGZNMH-UHFFFAOYSA-N 3,5-dimethylhex-1-yn-3-ol Chemical compound CC(C)CC(C)(O)C#C NECRQCBKTGZNMH-UHFFFAOYSA-N 0.000 description 10
- 239000002202 Polyethylene glycol Substances 0.000 description 10
- 229920001223 polyethylene glycol Polymers 0.000 description 10
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 9
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 description 8
- SWXVUIWOUIDPGS-UHFFFAOYSA-N diacetone alcohol Chemical compound CC(=O)CC(C)(C)O SWXVUIWOUIDPGS-UHFFFAOYSA-N 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 8
- OTTZHAVKAVGASB-UHFFFAOYSA-N hept-2-ene Chemical compound CCCCC=CC OTTZHAVKAVGASB-UHFFFAOYSA-N 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 239000000243 solution Substances 0.000 description 8
- 239000002318 adhesion promoter Substances 0.000 description 7
- 230000001476 alcoholic effect Effects 0.000 description 7
- 239000003513 alkali Substances 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 7
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 7
- 238000002360 preparation method Methods 0.000 description 7
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 6
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 6
- 150000001923 cyclic compounds Chemical class 0.000 description 6
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 6
- WTVXIBRMWGUIMI-UHFFFAOYSA-N trifluoro($l^{1}-oxidanylsulfonyl)methane Chemical group [O]S(=O)(=O)C(F)(F)F WTVXIBRMWGUIMI-UHFFFAOYSA-N 0.000 description 6
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 5
- 150000005215 alkyl ethers Chemical class 0.000 description 5
- 125000005843 halogen group Chemical group 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- CSVRUJBOWHSVMA-UHFFFAOYSA-N oxolan-2-yl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC1CCCO1 CSVRUJBOWHSVMA-UHFFFAOYSA-N 0.000 description 5
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 5
- JOLQKTGDSGKSKJ-UHFFFAOYSA-N 1-ethoxypropan-2-ol Chemical compound CCOCC(C)O JOLQKTGDSGKSKJ-UHFFFAOYSA-N 0.000 description 4
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 4
- 239000000654 additive Substances 0.000 description 4
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 4
- 238000004090 dissolution Methods 0.000 description 4
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 4
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 4
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 4
- 125000003566 oxetanyl group Chemical group 0.000 description 4
- 125000003367 polycyclic group Chemical group 0.000 description 4
- 229920001296 polysiloxane Polymers 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 229910000077 silane Inorganic materials 0.000 description 4
- RWNUSVWFHDHRCJ-UHFFFAOYSA-N 1-butoxypropan-2-ol Chemical compound CCCCOCC(C)O RWNUSVWFHDHRCJ-UHFFFAOYSA-N 0.000 description 3
- CNJRPYFBORAQAU-UHFFFAOYSA-N 1-ethoxy-2-(2-methoxyethoxy)ethane Chemical compound CCOCCOCCOC CNJRPYFBORAQAU-UHFFFAOYSA-N 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- XDLMVUHYZWKMMD-UHFFFAOYSA-N 3-trimethoxysilylpropyl 2-methylprop-2-enoate Chemical compound CO[Si](OC)(OC)CCCOC(=O)C(C)=C XDLMVUHYZWKMMD-UHFFFAOYSA-N 0.000 description 3
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 3
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 3
- 229920000877 Melamine resin Polymers 0.000 description 3
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- XBDQKXXYIPTUBI-UHFFFAOYSA-M Propionate Chemical compound CCC([O-])=O XBDQKXXYIPTUBI-UHFFFAOYSA-M 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical class C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 description 3
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical class C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 3
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 3
- 125000001511 cyclopentyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C1([H])[H] 0.000 description 3
- 125000001559 cyclopropyl group Chemical group [H]C1([H])C([H])([H])C1([H])* 0.000 description 3
- 235000014113 dietary fatty acids Nutrition 0.000 description 3
- 150000002148 esters Chemical class 0.000 description 3
- 150000002170 ethers Chemical class 0.000 description 3
- 239000000194 fatty acid Substances 0.000 description 3
- 229930195729 fatty acid Natural products 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 125000002768 hydroxyalkyl group Chemical group 0.000 description 3
- 150000002576 ketones Chemical class 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- YKYONYBAUNKHLG-UHFFFAOYSA-N n-Propyl acetate Natural products CCCOC(C)=O YKYONYBAUNKHLG-UHFFFAOYSA-N 0.000 description 3
- 125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 description 3
- 125000001624 naphthyl group Chemical group 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- QHGUPRQTQITEPO-UHFFFAOYSA-N oxan-2-yl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC1CCCCO1 QHGUPRQTQITEPO-UHFFFAOYSA-N 0.000 description 3
- PNJWIWWMYCMZRO-UHFFFAOYSA-N pent‐4‐en‐2‐one Natural products CC(=O)CC=C PNJWIWWMYCMZRO-UHFFFAOYSA-N 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 229920003002 synthetic resin Polymers 0.000 description 3
- 239000000057 synthetic resin Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- DTGKSKDOIYIVQL-WEDXCCLWSA-N (+)-borneol Chemical group C1C[C@@]2(C)[C@@H](O)C[C@@H]1C2(C)C DTGKSKDOIYIVQL-WEDXCCLWSA-N 0.000 description 2
- KIAJWKWOKTWTIZ-UHFFFAOYSA-N 1,4-dioxonaphthalene-2,3-dicarbonitrile Chemical compound C1=CC=C2C(=O)C(C#N)=C(C#N)C(=O)C2=C1 KIAJWKWOKTWTIZ-UHFFFAOYSA-N 0.000 description 2
- QMJZCDQBADKWAF-UHFFFAOYSA-N 1-[(2-methylpropan-2-yl)oxy]ethyl prop-2-enoate Chemical compound CC(C)(C)OC(C)OC(=O)C=C QMJZCDQBADKWAF-UHFFFAOYSA-N 0.000 description 2
- DURPTKYDGMDSBL-UHFFFAOYSA-N 1-butoxybutane Chemical compound CCCCOCCCC DURPTKYDGMDSBL-UHFFFAOYSA-N 0.000 description 2
- XXNDEOCNKXHSGK-UHFFFAOYSA-N 1-butoxyethyl 2-methylprop-2-enoate Chemical compound CCCCOC(C)OC(=O)C(C)=C XXNDEOCNKXHSGK-UHFFFAOYSA-N 0.000 description 2
- HUIYATRVQOSZEU-UHFFFAOYSA-N 1-cyclohexyloxy-2-ethenylbenzene Chemical compound C=CC1=CC=CC=C1OC1CCCCC1 HUIYATRVQOSZEU-UHFFFAOYSA-N 0.000 description 2
- XXSDRURBACQHHW-UHFFFAOYSA-N 1-cyclohexyloxyethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC(C)OC1CCCCC1 XXSDRURBACQHHW-UHFFFAOYSA-N 0.000 description 2
- UAJRSHJHFRVGMG-UHFFFAOYSA-N 1-ethenyl-4-methoxybenzene Chemical compound COC1=CC=C(C=C)C=C1 UAJRSHJHFRVGMG-UHFFFAOYSA-N 0.000 description 2
- HVBADOTWUFBZMF-UHFFFAOYSA-N 1-ethoxyethyl 2-methylprop-2-enoate Chemical compound CCOC(C)OC(=O)C(C)=C HVBADOTWUFBZMF-UHFFFAOYSA-N 0.000 description 2
- HGERSUQOJQWENV-UHFFFAOYSA-N 1-pentan-2-yloxypropan-2-ol Chemical compound CCCC(C)OCC(C)O HGERSUQOJQWENV-UHFFFAOYSA-N 0.000 description 2
- YRYLWWGGGJOZSB-UHFFFAOYSA-N 1-phenylmethoxyethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC(C)OCC1=CC=CC=C1 YRYLWWGGGJOZSB-UHFFFAOYSA-N 0.000 description 2
- FENFUOGYJVOCRY-UHFFFAOYSA-N 1-propoxypropan-2-ol Chemical compound CCCOCC(C)O FENFUOGYJVOCRY-UHFFFAOYSA-N 0.000 description 2
- SDJHPPZKZZWAKF-UHFFFAOYSA-N 2,3-dimethylbuta-1,3-diene Chemical compound CC(=C)C(C)=C SDJHPPZKZZWAKF-UHFFFAOYSA-N 0.000 description 2
- CPEXFJVZFNYXGU-UHFFFAOYSA-N 2,4,6-trihydroxybenzophenone Chemical compound OC1=CC(O)=CC(O)=C1C(=O)C1=CC=CC=C1 CPEXFJVZFNYXGU-UHFFFAOYSA-N 0.000 description 2
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 2
- WYGWHHGCAGTUCH-UHFFFAOYSA-N 2-[(2-cyano-4-methylpentan-2-yl)diazenyl]-2,4-dimethylpentanenitrile Chemical compound CC(C)CC(C)(C#N)N=NC(C)(C#N)CC(C)C WYGWHHGCAGTUCH-UHFFFAOYSA-N 0.000 description 2
- JFWFAUHHNYTWOO-UHFFFAOYSA-N 2-[(2-ethenylphenyl)methoxymethyl]oxirane Chemical compound C=CC1=CC=CC=C1COCC1OC1 JFWFAUHHNYTWOO-UHFFFAOYSA-N 0.000 description 2
- OCKQMFDZQUFKRD-UHFFFAOYSA-N 2-[(3-ethenylphenyl)methoxymethyl]oxirane Chemical compound C=CC1=CC=CC(COCC2OC2)=C1 OCKQMFDZQUFKRD-UHFFFAOYSA-N 0.000 description 2
- ZADXFVHUPXKZBJ-UHFFFAOYSA-N 2-[(4-ethenylphenyl)methoxymethyl]oxirane Chemical compound C1=CC(C=C)=CC=C1COCC1OC1 ZADXFVHUPXKZBJ-UHFFFAOYSA-N 0.000 description 2
- XLLIQLLCWZCATF-UHFFFAOYSA-N 2-methoxyethyl acetate Chemical compound COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 2
- VAJVDSVGBWFCLW-UHFFFAOYSA-N 3-Phenyl-1-propanol Chemical compound OCCCC1=CC=CC=C1 VAJVDSVGBWFCLW-UHFFFAOYSA-N 0.000 description 2
- QMYGFTJCQFEDST-UHFFFAOYSA-N 3-methoxybutyl acetate Chemical compound COC(C)CCOC(C)=O QMYGFTJCQFEDST-UHFFFAOYSA-N 0.000 description 2
- IMMDDKSPKPABAW-UHFFFAOYSA-N 3-trimethoxysilylpropyl 2-methylprop-2-enoate Chemical compound CO[Si](OC)(OC)CCCOC(=O)C(C)=C.CO[Si](OC)(OC)CCCOC(=O)C(C)=C IMMDDKSPKPABAW-UHFFFAOYSA-N 0.000 description 2
- DEZQZRQRHKJVHD-UHFFFAOYSA-N 4-[(4-hydroxy-2,5-dimethylphenyl)-(3-hydroxyphenyl)methyl]-2,5-dimethylphenol Chemical compound C1=C(O)C(C)=CC(C(C=2C=C(O)C=CC=2)C=2C(=CC(O)=C(C)C=2)C)=C1C DEZQZRQRHKJVHD-UHFFFAOYSA-N 0.000 description 2
- OZJPLYNZGCXSJM-UHFFFAOYSA-N 5-valerolactone Chemical compound O=C1CCCCO1 OZJPLYNZGCXSJM-UHFFFAOYSA-N 0.000 description 2
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 2
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- WOBHKFSMXKNTIM-UHFFFAOYSA-N Hydroxyethyl methacrylate Chemical compound CC(=C)C(=O)OCCO WOBHKFSMXKNTIM-UHFFFAOYSA-N 0.000 description 2
- RRHGJUQNOFWUDK-UHFFFAOYSA-N Isoprene Chemical compound CC(=C)C=C RRHGJUQNOFWUDK-UHFFFAOYSA-N 0.000 description 2
- XNWPXDGRBWJIES-UHFFFAOYSA-N Maclurin Natural products OC1=CC(O)=CC(O)=C1C(=O)C1=CC=C(O)C(O)=C1 XNWPXDGRBWJIES-UHFFFAOYSA-N 0.000 description 2
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 239000004115 Sodium Silicate Substances 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- PLGWCXKQZVGGJA-UHFFFAOYSA-N [[5-[cyano-(2-methylphenyl)methylidene]thiophen-2-ylidene]amino] propane-1-sulfonate Chemical compound C1=CC(=NOS(=O)(=O)CCC)SC1=C(C#N)C1=CC=CC=C1C PLGWCXKQZVGGJA-UHFFFAOYSA-N 0.000 description 2
- 125000002252 acyl group Chemical group 0.000 description 2
- 125000004423 acyloxy group Chemical group 0.000 description 2
- 125000005073 adamantyl group Chemical group C12(CC3CC(CC(C1)C3)C2)* 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 2
- 125000004453 alkoxycarbonyl group Chemical group 0.000 description 2
- 239000002518 antifoaming agent Substances 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 2
- 239000002585 base Substances 0.000 description 2
- 239000012965 benzophenone Substances 0.000 description 2
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 125000000582 cycloheptyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 2
- 125000000640 cyclooctyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C([H])([H])C1([H])[H] 0.000 description 2
- 150000005690 diesters Chemical class 0.000 description 2
- USIUVYZYUHIAEV-UHFFFAOYSA-N diphenyl ether Chemical compound C=1C=CC=CC=1OC1=CC=CC=C1 USIUVYZYUHIAEV-UHFFFAOYSA-N 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- SZXQTJUDPRGNJN-UHFFFAOYSA-N dipropylene glycol Chemical compound OCCCOCCCO SZXQTJUDPRGNJN-UHFFFAOYSA-N 0.000 description 2
- GAEKPEKOJKCEMS-UHFFFAOYSA-N gamma-valerolactone Chemical compound CC1CCC(=O)O1 GAEKPEKOJKCEMS-UHFFFAOYSA-N 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- FUZZWVXGSFPDMH-UHFFFAOYSA-M hexanoate Chemical compound CCCCCC([O-])=O FUZZWVXGSFPDMH-UHFFFAOYSA-M 0.000 description 2
- XLSMFKSTNGKWQX-UHFFFAOYSA-N hydroxyacetone Chemical compound CC(=O)CO XLSMFKSTNGKWQX-UHFFFAOYSA-N 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 2
- 150000002734 metacrylic acid derivatives Chemical class 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Natural products C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 2
- 125000002868 norbornyl group Chemical group C12(CCC(CC1)C2)* 0.000 description 2
- 150000002978 peroxides Chemical class 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 229920000570 polyether Polymers 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 239000003505 polymerization initiator Substances 0.000 description 2
- 229920002635 polyurethane Polymers 0.000 description 2
- 239000004814 polyurethane Substances 0.000 description 2
- RUOJZAUFBMNUDX-UHFFFAOYSA-N propylene carbonate Chemical compound CC1COC(=O)O1 RUOJZAUFBMNUDX-UHFFFAOYSA-N 0.000 description 2
- 125000006239 protecting group Chemical group 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 2
- 229910052911 sodium silicate Inorganic materials 0.000 description 2
- 125000001424 substituent group Chemical group 0.000 description 2
- KZNICNPSHKQLFF-UHFFFAOYSA-N succinimide Chemical compound O=C1CCC(=O)N1 KZNICNPSHKQLFF-UHFFFAOYSA-N 0.000 description 2
- 230000002194 synthesizing effect Effects 0.000 description 2
- 150000003512 tertiary amines Chemical class 0.000 description 2
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 2
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 2
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 2
- ZVBBBYXVYYKYOM-UHFFFAOYSA-N (1,3-dioxoisoindol-2-yl) 2-fluorobenzenesulfonate Chemical compound FC1=CC=CC=C1S(=O)(=O)ON1C(=O)C2=CC=CC=C2C1=O ZVBBBYXVYYKYOM-UHFFFAOYSA-N 0.000 description 1
- GYXAHUXQRATWDV-UHFFFAOYSA-N (1,3-dioxoisoindol-2-yl) trifluoromethanesulfonate Chemical compound C1=CC=C2C(=O)N(OS(=O)(=O)C(F)(F)F)C(=O)C2=C1 GYXAHUXQRATWDV-UHFFFAOYSA-N 0.000 description 1
- PAVQOFIOWZTBJP-UHFFFAOYSA-N (2,2-difluorooxetan-3-yl)methyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC1COC1(F)F PAVQOFIOWZTBJP-UHFFFAOYSA-N 0.000 description 1
- ZTAVRFMHGDRNQR-UHFFFAOYSA-N (2,2-difluorooxetan-3-yl)methyl prop-2-enoate Chemical compound C(C=C)(=O)OCC1C(OC1)(F)F ZTAVRFMHGDRNQR-UHFFFAOYSA-N 0.000 description 1
- XEDWWPGWIXPVRQ-UHFFFAOYSA-N (2,3,4-trihydroxyphenyl)-(3,4,5-trihydroxyphenyl)methanone Chemical compound OC1=C(O)C(O)=CC=C1C(=O)C1=CC(O)=C(O)C(O)=C1 XEDWWPGWIXPVRQ-UHFFFAOYSA-N 0.000 description 1
- QWRVAXMLZCMVSL-UHFFFAOYSA-N (2,4,6-trihydroxyphenyl)-(3,4,5-trihydroxyphenyl)methanone Chemical compound OC1=CC(O)=CC(O)=C1C(=O)C1=CC(O)=C(O)C(O)=C1 QWRVAXMLZCMVSL-UHFFFAOYSA-N 0.000 description 1
- GBQZZLQKUYLGFT-UHFFFAOYSA-N (2,4-dihydroxyphenyl)-(2,3,4-trihydroxyphenyl)methanone Chemical compound OC1=CC(O)=CC=C1C(=O)C1=CC=C(O)C(O)=C1O GBQZZLQKUYLGFT-UHFFFAOYSA-N 0.000 description 1
- OKJFKPFBSPZTAH-UHFFFAOYSA-N (2,4-dihydroxyphenyl)-(4-hydroxyphenyl)methanone Chemical compound C1=CC(O)=CC=C1C(=O)C1=CC=C(O)C=C1O OKJFKPFBSPZTAH-UHFFFAOYSA-N 0.000 description 1
- AXIIFBJDJHDNGW-UHFFFAOYSA-N (2,5-dihydroxyphenyl)-(2,3,4-trihydroxyphenyl)methanone Chemical compound OC1=CC=C(O)C(C(=O)C=2C(=C(O)C(O)=CC=2)O)=C1 AXIIFBJDJHDNGW-UHFFFAOYSA-N 0.000 description 1
- KQDCUEMOGIRBNY-UHFFFAOYSA-N (2,5-dioxo-3,4-diphenylpyrrol-1-yl) 4-fluorobenzenesulfonate Chemical compound C1=CC(F)=CC=C1S(=O)(=O)ON1C(=O)C(C=2C=CC=CC=2)=C(C=2C=CC=CC=2)C1=O KQDCUEMOGIRBNY-UHFFFAOYSA-N 0.000 description 1
- YJBHRGZINIFBKJ-UHFFFAOYSA-N (2,5-dioxo-3,4-diphenylpyrrol-1-yl) 4-methylbenzenesulfonate Chemical compound C1=CC(C)=CC=C1S(=O)(=O)ON1C(=O)C(C=2C=CC=CC=2)=C(C=2C=CC=CC=2)C1=O YJBHRGZINIFBKJ-UHFFFAOYSA-N 0.000 description 1
- RLLFCCPTQOZGOL-UHFFFAOYSA-N (2,5-dioxo-3,4-diphenylpyrrol-1-yl) trifluoromethanesulfonate Chemical compound O=C1N(OS(=O)(=O)C(F)(F)F)C(=O)C(C=2C=CC=CC=2)=C1C1=CC=CC=C1 RLLFCCPTQOZGOL-UHFFFAOYSA-N 0.000 description 1
- PRHKHLYZXJWYMP-UHFFFAOYSA-N (2,5-dioxopyrrolidin-1-yl) 4-fluorobenzenesulfonate Chemical compound C1=CC(F)=CC=C1S(=O)(=O)ON1C(=O)CCC1=O PRHKHLYZXJWYMP-UHFFFAOYSA-N 0.000 description 1
- XFJSTBHMLYKHJF-UHFFFAOYSA-N (2,5-dioxopyrrolidin-1-yl) 4-methylbenzenesulfonate Chemical compound C1=CC(C)=CC=C1S(=O)(=O)ON1C(=O)CCC1=O XFJSTBHMLYKHJF-UHFFFAOYSA-N 0.000 description 1
- HJYNDQNAHMPLSS-UHFFFAOYSA-N (2-methyloxetan-3-yl)methyl 2-methylprop-2-enoate Chemical compound CC1OCC1COC(=O)C(C)=C HJYNDQNAHMPLSS-UHFFFAOYSA-N 0.000 description 1
- XLBGWOVCPLFKCQ-UHFFFAOYSA-N (2-methylphenyl)-(2,3,4-trihydroxyphenyl)methanone Chemical compound CC1=CC=CC=C1C(=O)C1=CC=C(O)C(O)=C1O XLBGWOVCPLFKCQ-UHFFFAOYSA-N 0.000 description 1
- HOSJNFCDDCLEBM-UHFFFAOYSA-N (2-phenyloxetan-3-yl)methyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC1COC1C1=CC=CC=C1 HOSJNFCDDCLEBM-UHFFFAOYSA-N 0.000 description 1
- CVNOAESOWRUEFV-UHFFFAOYSA-N (2-phenyloxetan-3-yl)methyl prop-2-enoate Chemical compound C=CC(=O)OCC1COC1C1=CC=CC=C1 CVNOAESOWRUEFV-UHFFFAOYSA-N 0.000 description 1
- WYTZZXDRDKSJID-UHFFFAOYSA-N (3-aminopropyl)triethoxysilane Chemical compound CCO[Si](OCC)(OCC)CCCN WYTZZXDRDKSJID-UHFFFAOYSA-N 0.000 description 1
- RSHKWPIEJYAPCL-UHFFFAOYSA-N (3-ethyloxetan-3-yl)methyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC1(CC)COC1 RSHKWPIEJYAPCL-UHFFFAOYSA-N 0.000 description 1
- PYEYLPDXIYOCJK-UHFFFAOYSA-N (3-ethyloxetan-3-yl)methyl prop-2-enoate Chemical compound C=CC(=O)OCC1(CC)COC1 PYEYLPDXIYOCJK-UHFFFAOYSA-N 0.000 description 1
- RYNQKSJRFHJZTK-UHFFFAOYSA-N (3-methoxy-3-methylbutyl) acetate Chemical compound COC(C)(C)CCOC(C)=O RYNQKSJRFHJZTK-UHFFFAOYSA-N 0.000 description 1
- CGILRHVKKLYKNE-UHFFFAOYSA-N (3-methyloxetan-3-yl)methyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC1(C)COC1 CGILRHVKKLYKNE-UHFFFAOYSA-N 0.000 description 1
- LQANLNZCIDSHKI-UHFFFAOYSA-N (3-methyloxetan-3-yl)methyl prop-2-enoate Chemical compound C=CC(=O)OCC1(C)COC1 LQANLNZCIDSHKI-UHFFFAOYSA-N 0.000 description 1
- WBYWAXJHAXSJNI-VOTSOKGWSA-M .beta-Phenylacrylic acid Natural products [O-]C(=O)\C=C\C1=CC=CC=C1 WBYWAXJHAXSJNI-VOTSOKGWSA-M 0.000 description 1
- LZDKZFUFMNSQCJ-UHFFFAOYSA-N 1,2-diethoxyethane Chemical compound CCOCCOCC LZDKZFUFMNSQCJ-UHFFFAOYSA-N 0.000 description 1
- KETQAJRQOHHATG-UHFFFAOYSA-N 1,2-naphthoquinone Chemical compound C1=CC=C2C(=O)C(=O)C=CC2=C1 KETQAJRQOHHATG-UHFFFAOYSA-N 0.000 description 1
- HCITUYXHCZGFEO-UHFFFAOYSA-N 1,3,5-triazine-2,4,6-triamine Chemical class NC1=NC(N)=NC(N)=N1.N=C1NC(=N)NC(=N)N1 HCITUYXHCZGFEO-UHFFFAOYSA-N 0.000 description 1
- OARVAKJLXVYWNN-UHFFFAOYSA-N 1-(2-butoxyethoxy)-3-ethenylbenzene Chemical compound C(CCC)OCCOC=1C=C(C=C)C=CC1 OARVAKJLXVYWNN-UHFFFAOYSA-N 0.000 description 1
- KEVOXLPKWBFGPK-UHFFFAOYSA-N 1-(2-cyclohexyloxyethoxy)-3-ethenylbenzene Chemical compound C=CC1=CC=CC(OCCOC2CCCCC2)=C1 KEVOXLPKWBFGPK-UHFFFAOYSA-N 0.000 description 1
- GVZJJCHRBUWKHG-UHFFFAOYSA-N 1-(2-cyclohexyloxyethoxy)-4-ethenylbenzene Chemical compound C1=CC(C=C)=CC=C1OCCOC1CCCCC1 GVZJJCHRBUWKHG-UHFFFAOYSA-N 0.000 description 1
- QWOZZTWBWQMEPD-UHFFFAOYSA-N 1-(2-ethoxypropoxy)propan-2-ol Chemical compound CCOC(C)COCC(C)O QWOZZTWBWQMEPD-UHFFFAOYSA-N 0.000 description 1
- XIKOSBCHVLVLIE-UHFFFAOYSA-N 1-(2-methylpropoxy)ethyl 2-methylprop-2-enoate Chemical compound CC(C)COC(C)OC(=O)C(C)=C XIKOSBCHVLVLIE-UHFFFAOYSA-N 0.000 description 1
- IUUHACHVDUAMJL-UHFFFAOYSA-N 1-(2-methylpropoxy)ethyl prop-2-enoate Chemical compound CC(C)COC(C)OC(=O)C=C IUUHACHVDUAMJL-UHFFFAOYSA-N 0.000 description 1
- DCGPPPOZUPEEHZ-UHFFFAOYSA-N 1-(4-methyl-3-oxopent-4-enoxy)cyclohexane-1,2-dicarboxylic acid Chemical compound CC(=C)C(=O)CCOC1(C(O)=O)CCCCC1C(O)=O DCGPPPOZUPEEHZ-UHFFFAOYSA-N 0.000 description 1
- NCFIKBMPEOEIED-UHFFFAOYSA-N 1-acridin-9-ylpyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C1=C(C=CC=C2)C2=NC2=CC=CC=C12 NCFIKBMPEOEIED-UHFFFAOYSA-N 0.000 description 1
- MKRBAPNEJMFMHU-UHFFFAOYSA-N 1-benzylpyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1CC1=CC=CC=C1 MKRBAPNEJMFMHU-UHFFFAOYSA-N 0.000 description 1
- KDPMXCUVNSMPMN-UHFFFAOYSA-N 1-butoxyethyl prop-2-enoate Chemical compound CCCCOC(C)OC(=O)C=C KDPMXCUVNSMPMN-UHFFFAOYSA-N 0.000 description 1
- FUWDFGKRNIDKAE-UHFFFAOYSA-N 1-butoxypropan-2-yl acetate Chemical compound CCCCOCC(C)OC(C)=O FUWDFGKRNIDKAE-UHFFFAOYSA-N 0.000 description 1
- FNBHVKBYRFDOJK-UHFFFAOYSA-N 1-butoxypropan-2-yl propanoate Chemical compound CCCCOCC(C)OC(=O)CC FNBHVKBYRFDOJK-UHFFFAOYSA-N 0.000 description 1
- PJGSRNXINXGKIN-UHFFFAOYSA-N 1-cyclohexyloxyethyl prop-2-enoate Chemical compound C=CC(=O)OC(C)OC1CCCCC1 PJGSRNXINXGKIN-UHFFFAOYSA-N 0.000 description 1
- BQTPKSBXMONSJI-UHFFFAOYSA-N 1-cyclohexylpyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C1CCCCC1 BQTPKSBXMONSJI-UHFFFAOYSA-N 0.000 description 1
- CMCBDXRRFKYBDG-UHFFFAOYSA-N 1-dodecoxydodecane Chemical compound CCCCCCCCCCCCOCCCCCCCCCCCC CMCBDXRRFKYBDG-UHFFFAOYSA-N 0.000 description 1
- LGJCFVYMIJLQJO-UHFFFAOYSA-N 1-dodecylperoxydodecane Chemical compound CCCCCCCCCCCCOOCCCCCCCCCCCC LGJCFVYMIJLQJO-UHFFFAOYSA-N 0.000 description 1
- DPRALGAFYOTKRR-UHFFFAOYSA-N 1-ethenyl-3-(1-methoxyethoxy)benzene Chemical compound COC(C)OC1=CC=CC(C=C)=C1 DPRALGAFYOTKRR-UHFFFAOYSA-N 0.000 description 1
- OAFSVNJTNNDLBG-UHFFFAOYSA-N 1-ethenyl-3-(2-ethoxyethoxy)benzene Chemical compound CCOCCOC1=CC=CC(C=C)=C1 OAFSVNJTNNDLBG-UHFFFAOYSA-N 0.000 description 1
- JZHGRUMIRATHIU-UHFFFAOYSA-N 1-ethenyl-3-methylbenzene Chemical compound CC1=CC=CC(C=C)=C1 JZHGRUMIRATHIU-UHFFFAOYSA-N 0.000 description 1
- MGJHVJKUHCWETL-UHFFFAOYSA-N 1-ethenyl-4-(1-methoxyethoxy)benzene Chemical compound COC(C)OC1=CC=C(C=C)C=C1 MGJHVJKUHCWETL-UHFFFAOYSA-N 0.000 description 1
- VMOQKKFBYIBJOJ-UHFFFAOYSA-N 1-ethenyl-4-(2-ethoxyethoxy)benzene Chemical compound CCOCCOC1=CC=C(C=C)C=C1 VMOQKKFBYIBJOJ-UHFFFAOYSA-N 0.000 description 1
- BHZJDLNIHJCZRF-UHFFFAOYSA-N 1-ethenyl-4-(2-propoxyethoxy)benzene Chemical compound CCCOCCOC1=CC=C(C=C)C=C1 BHZJDLNIHJCZRF-UHFFFAOYSA-N 0.000 description 1
- BOAQRYPEWHXDJB-UHFFFAOYSA-N 1-ethenyl-4-[2-(2-methylpropoxy)ethoxy]benzene Chemical compound CC(C)COCCOC1=CC=C(C=C)C=C1 BOAQRYPEWHXDJB-UHFFFAOYSA-N 0.000 description 1
- RRQYJINTUHWNHW-UHFFFAOYSA-N 1-ethoxy-2-(2-ethoxyethoxy)ethane Chemical compound CCOCCOCCOCC RRQYJINTUHWNHW-UHFFFAOYSA-N 0.000 description 1
- ZIKLJUUTSQYGQI-UHFFFAOYSA-N 1-ethoxy-2-(2-ethoxypropoxy)propane Chemical compound CCOCC(C)OCC(C)OCC ZIKLJUUTSQYGQI-UHFFFAOYSA-N 0.000 description 1
- DBZKLCIHFPDWMJ-UHFFFAOYSA-N 1-ethoxyethyl prop-2-enoate Chemical compound CCOC(C)OC(=O)C=C DBZKLCIHFPDWMJ-UHFFFAOYSA-N 0.000 description 1
- LIPRQQHINVWJCH-UHFFFAOYSA-N 1-ethoxypropan-2-yl acetate Chemical compound CCOCC(C)OC(C)=O LIPRQQHINVWJCH-UHFFFAOYSA-N 0.000 description 1
- ODDDCGGSPAPBOS-UHFFFAOYSA-N 1-ethoxypropan-2-yl propanoate Chemical compound CCOCC(C)OC(=O)CC ODDDCGGSPAPBOS-UHFFFAOYSA-N 0.000 description 1
- GAIKGJPKSGSGJW-UHFFFAOYSA-N 1-methoxyethyl 2-methylprop-2-enoate Chemical compound COC(C)OC(=O)C(C)=C GAIKGJPKSGSGJW-UHFFFAOYSA-N 0.000 description 1
- DQJSFBCVEPQRLA-UHFFFAOYSA-N 1-methoxyethyl prop-2-enoate Chemical compound COC(C)OC(=O)C=C DQJSFBCVEPQRLA-UHFFFAOYSA-N 0.000 description 1
- DOVZUKKPYKRVIK-UHFFFAOYSA-N 1-methoxypropan-2-yl propanoate Chemical compound CCC(=O)OC(C)COC DOVZUKKPYKRVIK-UHFFFAOYSA-N 0.000 description 1
- RJBKWGYRRAKHLV-UHFFFAOYSA-N 1-phenylmethoxyethyl prop-2-enoate Chemical compound C=CC(=O)OC(C)OCC1=CC=CC=C1 RJBKWGYRRAKHLV-UHFFFAOYSA-N 0.000 description 1
- HIDBROSJWZYGSZ-UHFFFAOYSA-N 1-phenylpyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C1=CC=CC=C1 HIDBROSJWZYGSZ-UHFFFAOYSA-N 0.000 description 1
- BBVLSEOAGHGYDQ-UHFFFAOYSA-N 1-propoxyethyl 2-methylprop-2-enoate Chemical compound CCCOC(C)OC(=O)C(C)=C BBVLSEOAGHGYDQ-UHFFFAOYSA-N 0.000 description 1
- BJWLRLHKFLDKKB-UHFFFAOYSA-N 1-propoxyethyl prop-2-enoate Chemical compound CCCOC(C)OC(=O)C=C BJWLRLHKFLDKKB-UHFFFAOYSA-N 0.000 description 1
- DMFAHCVITRDZQB-UHFFFAOYSA-N 1-propoxypropan-2-yl acetate Chemical compound CCCOCC(C)OC(C)=O DMFAHCVITRDZQB-UHFFFAOYSA-N 0.000 description 1
- RVNBCIQRFGXLRD-UHFFFAOYSA-N 1-propoxypropan-2-yl propanoate Chemical compound CCCOCC(C)OC(=O)CC RVNBCIQRFGXLRD-UHFFFAOYSA-N 0.000 description 1
- CKZPMYDFTCDDTB-UHFFFAOYSA-N 1h-naphthalen-1-ide Chemical compound [C-]1=CC=CC2=CC=CC=C21 CKZPMYDFTCDDTB-UHFFFAOYSA-N 0.000 description 1
- VUAXHMVRKOTJKP-UHFFFAOYSA-N 2,2-dimethylbutyric acid Chemical compound CCC(C)(C)C(O)=O VUAXHMVRKOTJKP-UHFFFAOYSA-N 0.000 description 1
- HTQNYBBTZSBWKL-UHFFFAOYSA-N 2,3,4-trihydroxbenzophenone Chemical compound OC1=C(O)C(O)=CC=C1C(=O)C1=CC=CC=C1 HTQNYBBTZSBWKL-UHFFFAOYSA-N 0.000 description 1
- BTRWELPXUDWAGW-UHFFFAOYSA-N 2,4,7,9-tetramethyldecane-4,7-diol Chemical compound CC(C)CC(C)(O)CCC(C)(O)CC(C)C BTRWELPXUDWAGW-UHFFFAOYSA-N 0.000 description 1
- YDUGRFYVCNHEJD-UHFFFAOYSA-N 2-(2-ethyloxetan-3-yl)ethyl 2-methylprop-2-enoate Chemical compound CCC1OCC1CCOC(=O)C(C)=C YDUGRFYVCNHEJD-UHFFFAOYSA-N 0.000 description 1
- JDZWQVILTDKERR-UHFFFAOYSA-N 2-(2-ethyloxetan-3-yl)ethyl prop-2-enoate Chemical compound CCC1OCC1CCOC(=O)C=C JDZWQVILTDKERR-UHFFFAOYSA-N 0.000 description 1
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 1
- SBASXUCJHJRPEV-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethanol Chemical compound COCCOCCO SBASXUCJHJRPEV-UHFFFAOYSA-N 0.000 description 1
- FPVMPEIGFUGTGN-UHFFFAOYSA-N 2-(2-phenyloxetan-3-yl)ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCC1COC1C1=CC=CC=C1 FPVMPEIGFUGTGN-UHFFFAOYSA-N 0.000 description 1
- TWXBKGHMBGYDQI-UHFFFAOYSA-N 2-(2-phenyloxetan-3-yl)ethyl prop-2-enoate Chemical compound C=CC(=O)OCCC1COC1C1=CC=CC=C1 TWXBKGHMBGYDQI-UHFFFAOYSA-N 0.000 description 1
- HUFRRBHGGJPNGG-UHFFFAOYSA-N 2-(2-propan-2-yloxypropoxy)propan-1-ol Chemical compound CC(C)OC(C)COC(C)CO HUFRRBHGGJPNGG-UHFFFAOYSA-N 0.000 description 1
- REPUQJRGWWJJPK-UHFFFAOYSA-N 2-(3-ethyloxetan-3-yl)ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCC1(CC)COC1 REPUQJRGWWJJPK-UHFFFAOYSA-N 0.000 description 1
- VCWMHBBURFAUMN-UHFFFAOYSA-N 2-(3-ethyloxetan-3-yl)ethyl prop-2-enoate Chemical compound C=CC(=O)OCCC1(CC)COC1 VCWMHBBURFAUMN-UHFFFAOYSA-N 0.000 description 1
- JAHNSTQSQJOJLO-UHFFFAOYSA-N 2-(3-fluorophenyl)-1h-imidazole Chemical compound FC1=CC=CC(C=2NC=CN=2)=C1 JAHNSTQSQJOJLO-UHFFFAOYSA-N 0.000 description 1
- LANJTAIJLOLECL-UHFFFAOYSA-N 2-(3-oxopent-4-enoxy)butanedioic acid Chemical compound OC(=O)CC(C(O)=O)OCCC(=O)C=C LANJTAIJLOLECL-UHFFFAOYSA-N 0.000 description 1
- OEPOKWHJYJXUGD-UHFFFAOYSA-N 2-(3-phenylmethoxyphenyl)-1,3-thiazole-4-carbaldehyde Chemical compound O=CC1=CSC(C=2C=C(OCC=3C=CC=CC=3)C=CC=2)=N1 OEPOKWHJYJXUGD-UHFFFAOYSA-N 0.000 description 1
- FZVKKTGLXNQEHZ-UHFFFAOYSA-N 2-(4-methyl-3-oxopent-4-enoxy)butanedioic acid Chemical compound CC(=C)C(=O)CCOC(C(O)=O)CC(O)=O FZVKKTGLXNQEHZ-UHFFFAOYSA-N 0.000 description 1
- XNDCKNKAZCKUNN-UHFFFAOYSA-N 2-(oxetan-3-yl)ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCC1COC1 XNDCKNKAZCKUNN-UHFFFAOYSA-N 0.000 description 1
- TXDUXCHFVCYQFK-UHFFFAOYSA-N 2-(oxetan-3-yl)ethyl prop-2-enoate Chemical compound C=CC(=O)OCCC1COC1 TXDUXCHFVCYQFK-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- RVGLEPQPVDUSOJ-UHFFFAOYSA-N 2-Methyl-3-hydroxypropanoate Chemical compound COC(=O)CCO RVGLEPQPVDUSOJ-UHFFFAOYSA-N 0.000 description 1
- PTTPXKJBFFKCEK-UHFFFAOYSA-N 2-Methyl-4-heptanone Chemical compound CC(C)CC(=O)CC(C)C PTTPXKJBFFKCEK-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- RIACPSCHTTZGON-UHFFFAOYSA-N 2-[2-(1,1,2,2,2-pentafluoroethyl)oxetan-3-yl]ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCC1COC1C(F)(F)C(F)(F)F RIACPSCHTTZGON-UHFFFAOYSA-N 0.000 description 1
- NAHCSJVIDGTUIX-UHFFFAOYSA-N 2-[2-(1,1,2,2,2-pentafluoroethyl)oxetan-3-yl]ethyl prop-2-enoate Chemical compound C(C=C)(=O)OCCC1C(OC1)C(C(F)(F)F)(F)F NAHCSJVIDGTUIX-UHFFFAOYSA-N 0.000 description 1
- BROIUIXXYUQBTD-UHFFFAOYSA-N 2-[2-(trifluoromethyl)oxetan-3-yl]ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCC1COC1C(F)(F)F BROIUIXXYUQBTD-UHFFFAOYSA-N 0.000 description 1
- NQBXSWAWVZHKBZ-UHFFFAOYSA-N 2-butoxyethyl acetate Chemical compound CCCCOCCOC(C)=O NQBXSWAWVZHKBZ-UHFFFAOYSA-N 0.000 description 1
- SZTBMYHIYNGYIA-UHFFFAOYSA-N 2-chloroacrylic acid Chemical compound OC(=O)C(Cl)=C SZTBMYHIYNGYIA-UHFFFAOYSA-N 0.000 description 1
- AFIAIUIEAKCWCD-UHFFFAOYSA-N 2-cyclohexyl-4-[(5-cyclohexyl-4-hydroxy-2-methylphenyl)-(2-hydroxyphenyl)methyl]-5-methylphenol Chemical compound CC1=CC(O)=C(C2CCCCC2)C=C1C(C=1C(=CC(O)=C(C2CCCCC2)C=1)C)C1=CC=CC=C1O AFIAIUIEAKCWCD-UHFFFAOYSA-N 0.000 description 1
- XYIJEFGAYUMNPF-UHFFFAOYSA-N 2-cyclohexyl-4-[(5-cyclohexyl-4-hydroxy-2-methylphenyl)-(3-hydroxyphenyl)methyl]-5-methylphenol Chemical compound CC1=CC(O)=C(C2CCCCC2)C=C1C(C=1C(=CC(O)=C(C2CCCCC2)C=1)C)C1=CC=CC(O)=C1 XYIJEFGAYUMNPF-UHFFFAOYSA-N 0.000 description 1
- ZVUNTIMPQCQCAQ-UHFFFAOYSA-N 2-dodecanoyloxyethyl dodecanoate Chemical compound CCCCCCCCCCCC(=O)OCCOC(=O)CCCCCCCCCCC ZVUNTIMPQCQCAQ-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- WROUWQQRXUBECT-UHFFFAOYSA-N 2-ethylacrylic acid Chemical compound CCC(=C)C(O)=O WROUWQQRXUBECT-UHFFFAOYSA-N 0.000 description 1
- KLPQUCKLVZXJEH-UHFFFAOYSA-N 2-fluoro-4-[2-(3-fluoro-4-hydroxyphenyl)propan-2-yl]phenol Chemical compound C=1C=C(O)C(F)=CC=1C(C)(C)C1=CC=C(O)C(F)=C1 KLPQUCKLVZXJEH-UHFFFAOYSA-N 0.000 description 1
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 description 1
- ICPWFHKNYYRBSZ-UHFFFAOYSA-M 2-methoxypropanoate Chemical compound COC(C)C([O-])=O ICPWFHKNYYRBSZ-UHFFFAOYSA-M 0.000 description 1
- RCEJCSULJQNRQQ-UHFFFAOYSA-N 2-methylbutanenitrile Chemical compound CCC(C)C#N RCEJCSULJQNRQQ-UHFFFAOYSA-N 0.000 description 1
- WRMNZCZEMHIOCP-UHFFFAOYSA-N 2-phenylethanol Chemical compound OCCC1=CC=CC=C1 WRMNZCZEMHIOCP-UHFFFAOYSA-N 0.000 description 1
- 125000000094 2-phenylethyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])C([H])([H])* 0.000 description 1
- YEYKMVJDLWJFOA-UHFFFAOYSA-N 2-propoxyethanol Chemical compound CCCOCCO YEYKMVJDLWJFOA-UHFFFAOYSA-N 0.000 description 1
- WADCPEMKIBAJHH-UHFFFAOYSA-N 3,4-diphenylpyrrole-2,5-dione Chemical compound O=C1NC(=O)C(C=2C=CC=CC=2)=C1C1=CC=CC=C1 WADCPEMKIBAJHH-UHFFFAOYSA-N 0.000 description 1
- QCAHUFWKIQLBNB-UHFFFAOYSA-N 3-(3-methoxypropoxy)propan-1-ol Chemical compound COCCCOCCCO QCAHUFWKIQLBNB-UHFFFAOYSA-N 0.000 description 1
- LWHVGXSTQCXEAF-UHFFFAOYSA-N 3-(3-oxopent-4-enoxy)phthalic acid Chemical compound C(C=C)(=O)CCOC1=C(C(C(=O)O)=CC=C1)C(=O)O LWHVGXSTQCXEAF-UHFFFAOYSA-N 0.000 description 1
- LDBOYMRNYCBDQK-UHFFFAOYSA-N 3-(ethenoxymethyl)-3-ethyloxetane Chemical compound C=COCC1(CC)COC1 LDBOYMRNYCBDQK-UHFFFAOYSA-N 0.000 description 1
- OXUPGAYZJXSHBF-UHFFFAOYSA-N 3-[diethoxy(methyl)silyl]propyl 2-methylprop-2-enoate Chemical compound C(C(=C)C)(=O)OCCC[Si](OCC)(OCC)C.C(C(=C)C)(=O)OCCC[Si](OCC)(OCC)C OXUPGAYZJXSHBF-UHFFFAOYSA-N 0.000 description 1
- OXYZDRAJMHGSMW-UHFFFAOYSA-N 3-chloropropyl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)CCCCl OXYZDRAJMHGSMW-UHFFFAOYSA-N 0.000 description 1
- KNTKCYKJRSMRMZ-UHFFFAOYSA-N 3-chloropropyl-dimethoxy-methylsilane Chemical compound CO[Si](C)(OC)CCCCl KNTKCYKJRSMRMZ-UHFFFAOYSA-N 0.000 description 1
- MFKRHJVUCZRDTF-UHFFFAOYSA-N 3-methoxy-3-methylbutan-1-ol Chemical compound COC(C)(C)CCO MFKRHJVUCZRDTF-UHFFFAOYSA-N 0.000 description 1
- VATRWWPJWVCZTA-UHFFFAOYSA-N 3-oxo-n-[2-(trifluoromethyl)phenyl]butanamide Chemical compound CC(=O)CC(=O)NC1=CC=CC=C1C(F)(F)F VATRWWPJWVCZTA-UHFFFAOYSA-N 0.000 description 1
- LDMRLRNXHLPZJN-UHFFFAOYSA-N 3-propoxypropan-1-ol Chemical compound CCCOCCCO LDMRLRNXHLPZJN-UHFFFAOYSA-N 0.000 description 1
- URDOJQUSEUXVRP-UHFFFAOYSA-N 3-triethoxysilylpropyl 2-methylprop-2-enoate Chemical compound CCO[Si](OCC)(OCC)CCCOC(=O)C(C)=C URDOJQUSEUXVRP-UHFFFAOYSA-N 0.000 description 1
- UUEWCQRISZBELL-UHFFFAOYSA-N 3-trimethoxysilylpropane-1-thiol Chemical compound CO[Si](OC)(OC)CCCS UUEWCQRISZBELL-UHFFFAOYSA-N 0.000 description 1
- KBQVDAIIQCXKPI-UHFFFAOYSA-N 3-trimethoxysilylpropyl prop-2-enoate Chemical compound CO[Si](OC)(OC)CCCOC(=O)C=C KBQVDAIIQCXKPI-UHFFFAOYSA-N 0.000 description 1
- BESKSSIEODQWBP-UHFFFAOYSA-N 3-tris(trimethylsilyloxy)silylpropyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCC[Si](O[Si](C)(C)C)(O[Si](C)(C)C)O[Si](C)(C)C BESKSSIEODQWBP-UHFFFAOYSA-N 0.000 description 1
- NBLFJUWXERDUEN-UHFFFAOYSA-N 4-[(2,3,4-trihydroxyphenyl)methyl]benzene-1,2,3-triol Chemical compound OC1=C(O)C(O)=CC=C1CC1=CC=C(O)C(O)=C1O NBLFJUWXERDUEN-UHFFFAOYSA-N 0.000 description 1
- FNFYXIMJKWENNK-UHFFFAOYSA-N 4-[(2,4-dihydroxyphenyl)methyl]benzene-1,3-diol Chemical compound OC1=CC(O)=CC=C1CC1=CC=C(O)C=C1O FNFYXIMJKWENNK-UHFFFAOYSA-N 0.000 description 1
- CLAQXRONBVEWMK-UHFFFAOYSA-N 4-[(2-hydroxyphenyl)-(4-hydroxy-2,3,5-trimethylphenyl)methyl]-2,3,6-trimethylphenol Chemical compound CC1=C(O)C(C)=CC(C(C=2C(=CC=CC=2)O)C=2C(=C(C)C(O)=C(C)C=2)C)=C1C CLAQXRONBVEWMK-UHFFFAOYSA-N 0.000 description 1
- YNICUQBUXHBYCH-UHFFFAOYSA-N 4-[(4-hydroxy-2,5-dimethylphenyl)-(2-hydroxyphenyl)methyl]-2,5-dimethylphenol Chemical compound C1=C(O)C(C)=CC(C(C=2C(=CC=CC=2)O)C=2C(=CC(O)=C(C)C=2)C)=C1C YNICUQBUXHBYCH-UHFFFAOYSA-N 0.000 description 1
- PFYOKZAFMIWTQL-UHFFFAOYSA-N 4-[(4-hydroxy-2,5-dimethylphenyl)-(4-hydroxyphenyl)methyl]-2,5-dimethylphenol Chemical compound C1=C(O)C(C)=CC(C(C=2C=CC(O)=CC=2)C=2C(=CC(O)=C(C)C=2)C)=C1C PFYOKZAFMIWTQL-UHFFFAOYSA-N 0.000 description 1
- WHKJCZQKHJHUBB-UHFFFAOYSA-N 4-[(4-hydroxy-3,5-dimethylphenyl)-(3-hydroxyphenyl)methyl]-2,6-dimethylphenol Chemical compound CC1=C(O)C(C)=CC(C(C=2C=C(O)C=CC=2)C=2C=C(C)C(O)=C(C)C=2)=C1 WHKJCZQKHJHUBB-UHFFFAOYSA-N 0.000 description 1
- OHKTUDSKDILFJC-UHFFFAOYSA-N 4-[(4-hydroxy-3,5-dimethylphenyl)-(4-hydroxyphenyl)methyl]-2,6-dimethylphenol Chemical compound CC1=C(O)C(C)=CC(C(C=2C=CC(O)=CC=2)C=2C=C(C)C(O)=C(C)C=2)=C1 OHKTUDSKDILFJC-UHFFFAOYSA-N 0.000 description 1
- LCJZSIQEJPHPMR-UHFFFAOYSA-N 4-[(4-hydroxy-3-methylphenyl)-(2-hydroxyphenyl)methyl]-2-methylphenol Chemical compound C1=C(O)C(C)=CC(C(C=2C=C(C)C(O)=CC=2)C=2C(=CC=CC=2)O)=C1 LCJZSIQEJPHPMR-UHFFFAOYSA-N 0.000 description 1
- NHMQOAPPJZFBAG-UHFFFAOYSA-N 4-[(4-hydroxycyclohexyl)methyl]phenol Chemical compound C1CC(O)CCC1CC1=CC=C(O)C=C1 NHMQOAPPJZFBAG-UHFFFAOYSA-N 0.000 description 1
- NYIWTDSCYULDTJ-UHFFFAOYSA-N 4-[2-(2,3,4-trihydroxyphenyl)propan-2-yl]benzene-1,2,3-triol Chemical compound C=1C=C(O)C(O)=C(O)C=1C(C)(C)C1=CC=C(O)C(O)=C1O NYIWTDSCYULDTJ-UHFFFAOYSA-N 0.000 description 1
- YMSALPCDWZMQQG-UHFFFAOYSA-N 4-[2-(2,4-dihydroxyphenyl)propan-2-yl]benzene-1,3-diol Chemical compound C=1C=C(O)C=C(O)C=1C(C)(C)C1=CC=C(O)C=C1O YMSALPCDWZMQQG-UHFFFAOYSA-N 0.000 description 1
- CYTKVAARVZTBKG-UHFFFAOYSA-N 4-[2-(4-hydroxy-3,5-dimethylphenyl)propan-2-yl]benzene-1,2,3-triol Chemical compound CC1=C(O)C(C)=CC(C(C)(C)C=2C(=C(O)C(O)=CC=2)O)=C1 CYTKVAARVZTBKG-UHFFFAOYSA-N 0.000 description 1
- DUDHQMBWDYUTSK-UHFFFAOYSA-N 4-[2-(4-hydroxyphenyl)propan-2-yl]benzene-1,2,3-triol Chemical compound C=1C=C(O)C(O)=C(O)C=1C(C)(C)C1=CC=C(O)C=C1 DUDHQMBWDYUTSK-UHFFFAOYSA-N 0.000 description 1
- XJGTVJRTDRARGO-UHFFFAOYSA-N 4-[2-(4-hydroxyphenyl)propan-2-yl]benzene-1,3-diol Chemical compound C=1C=C(O)C=C(O)C=1C(C)(C)C1=CC=C(O)C=C1 XJGTVJRTDRARGO-UHFFFAOYSA-N 0.000 description 1
- QBFWOUJDPJACIQ-UHFFFAOYSA-N 4-[2-[4-[1,1-bis(4-hydroxy-3-methylphenyl)ethyl]phenyl]propan-2-yl]-2-methylphenol Chemical compound C1=C(O)C(C)=CC(C(C)(C)C=2C=CC(=CC=2)C(C)(C=2C=C(C)C(O)=CC=2)C=2C=C(C)C(O)=CC=2)=C1 QBFWOUJDPJACIQ-UHFFFAOYSA-N 0.000 description 1
- WXYSZTISEJBRHW-UHFFFAOYSA-N 4-[2-[4-[1,1-bis(4-hydroxyphenyl)ethyl]phenyl]propan-2-yl]phenol Chemical compound C=1C=C(C(C)(C=2C=CC(O)=CC=2)C=2C=CC(O)=CC=2)C=CC=1C(C)(C)C1=CC=C(O)C=C1 WXYSZTISEJBRHW-UHFFFAOYSA-N 0.000 description 1
- QLLXOMGGDNSEMO-UHFFFAOYSA-N 4-[bis(4-hydroxy-2,5-dimethylphenyl)methyl]benzene-1,3-diol Chemical compound C1=C(O)C(C)=CC(C(C=2C(=CC(O)=CC=2)O)C=2C(=CC(O)=C(C)C=2)C)=C1C QLLXOMGGDNSEMO-UHFFFAOYSA-N 0.000 description 1
- UWFUILMHBCVIMK-UHFFFAOYSA-N 4-[bis(4-hydroxy-3,5-dimethylphenyl)methyl]benzene-1,2-diol Chemical compound CC1=C(O)C(C)=CC(C(C=2C=C(O)C(O)=CC=2)C=2C=C(C)C(O)=C(C)C=2)=C1 UWFUILMHBCVIMK-UHFFFAOYSA-N 0.000 description 1
- WFCQTAXSWSWIHS-UHFFFAOYSA-N 4-[bis(4-hydroxyphenyl)methyl]phenol Chemical compound C1=CC(O)=CC=C1C(C=1C=CC(O)=CC=1)C1=CC=C(O)C=C1 WFCQTAXSWSWIHS-UHFFFAOYSA-N 0.000 description 1
- XHHCPUPIFYYPCN-UHFFFAOYSA-N 4-[bis(5-cyclohexyl-4-hydroxy-2-methylphenyl)methyl]benzene-1,2-diol Chemical compound CC1=CC(O)=C(C2CCCCC2)C=C1C(C=1C(=CC(O)=C(C2CCCCC2)C=1)C)C1=CC=C(O)C(O)=C1 XHHCPUPIFYYPCN-UHFFFAOYSA-N 0.000 description 1
- ACQVEWFMUBXEMR-UHFFFAOYSA-N 4-bromo-2-fluoro-6-nitrophenol Chemical compound OC1=C(F)C=C(Br)C=C1[N+]([O-])=O ACQVEWFMUBXEMR-UHFFFAOYSA-N 0.000 description 1
- VZUWENLUHWAQDM-UHFFFAOYSA-N 4-hydroxy-4-methylpentan-2-one Chemical compound CC(=O)CC(C)(C)O.CC(=O)CC(C)(C)O VZUWENLUHWAQDM-UHFFFAOYSA-N 0.000 description 1
- RTANHMOFHGSZQO-UHFFFAOYSA-N 4-methoxy-2,4-dimethylpentanenitrile Chemical compound COC(C)(C)CC(C)C#N RTANHMOFHGSZQO-UHFFFAOYSA-N 0.000 description 1
- ZVKOROMISOSLNU-UHFFFAOYSA-N 5-hydroxypentan-2-one Chemical compound C(C)(=O)CCCO.C(C)(=O)CCCO ZVKOROMISOSLNU-UHFFFAOYSA-N 0.000 description 1
- LPEKGGXMPWTOCB-UHFFFAOYSA-N 8beta-(2,3-epoxy-2-methylbutyryloxy)-14-acetoxytithifolin Natural products COC(=O)C(C)O LPEKGGXMPWTOCB-UHFFFAOYSA-N 0.000 description 1
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 1
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- OMPJBNCRMGITSC-UHFFFAOYSA-N Benzoylperoxide Chemical compound C=1C=CC=CC=1C(=O)OOC(=O)C1=CC=CC=C1 OMPJBNCRMGITSC-UHFFFAOYSA-N 0.000 description 1
- 229930185605 Bisphenol Natural products 0.000 description 1
- SDDLEVPIDBLVHC-UHFFFAOYSA-N Bisphenol Z Chemical compound C1=CC(O)=CC=C1C1(C=2C=CC(O)=CC=2)CCCCC1 SDDLEVPIDBLVHC-UHFFFAOYSA-N 0.000 description 1
- MRABAEUHTLLEML-UHFFFAOYSA-N Butyl lactate Chemical compound CCCCOC(=O)C(C)O MRABAEUHTLLEML-UHFFFAOYSA-N 0.000 description 1
- FERIUCNNQQJTOY-UHFFFAOYSA-M Butyrate Chemical compound CCCC([O-])=O FERIUCNNQQJTOY-UHFFFAOYSA-M 0.000 description 1
- FERIUCNNQQJTOY-UHFFFAOYSA-N Butyric acid Natural products CCCC(O)=O FERIUCNNQQJTOY-UHFFFAOYSA-N 0.000 description 1
- PZEIUUOHXQXFCL-UHFFFAOYSA-N C(C(=C)C)(=O)OCCC[Si](OC)(OC)C.C(C(=C)C)(=O)OCCC[Si](OC)(OC)C Chemical compound C(C(=C)C)(=O)OCCC[Si](OC)(OC)C.C(C(=C)C)(=O)OCCC[Si](OC)(OC)C PZEIUUOHXQXFCL-UHFFFAOYSA-N 0.000 description 1
- NQWDLOJHRRRFSZ-UHFFFAOYSA-N C(C(C)C)OCCOC=1C=C(C=C)C=CC1 Chemical compound C(C(C)C)OCCOC=1C=C(C=C)C=CC1 NQWDLOJHRRRFSZ-UHFFFAOYSA-N 0.000 description 1
- YNJLIIRGJZSBGL-UHFFFAOYSA-N C(CC)OCC(=O)OCCCC.C(CC)OC(COCCC)=O Chemical compound C(CC)OCC(=O)OCCCC.C(CC)OC(COCCC)=O YNJLIIRGJZSBGL-UHFFFAOYSA-N 0.000 description 1
- WWKVHPPSCNVSSR-UHFFFAOYSA-N C(CC)OCCOC=1C=C(C=C)C=CC1 Chemical compound C(CC)OCCOC=1C=C(C=C)C=CC1 WWKVHPPSCNVSSR-UHFFFAOYSA-N 0.000 description 1
- ZUIIRWQOICNDLV-UHFFFAOYSA-N C(CCC)OCCOC1=CC=C(C=C)C=C1 Chemical compound C(CCC)OCCOC1=CC=C(C=C)C=C1 ZUIIRWQOICNDLV-UHFFFAOYSA-N 0.000 description 1
- SRRGFPJGSLQFSC-UHFFFAOYSA-N C1(=CC=C(C=C1)S(=O)(=O)OC1C=CC(S1=N)=C(C#N)C1=C(C=CC=C1)C)C Chemical compound C1(=CC=C(C=C1)S(=O)(=O)OC1C=CC(S1=N)=C(C#N)C1=C(C=CC=C1)C)C SRRGFPJGSLQFSC-UHFFFAOYSA-N 0.000 description 1
- RJQBKQZBJUVSAY-UHFFFAOYSA-N CCO[Si](CCCOC(=O)C(C)=C)(OCC)OCC.CCO[Si](CCCOC(=O)C(C)=C)(OCC)OCC Chemical compound CCO[Si](CCCOC(=O)C(C)=C)(OCC)OCC.CCO[Si](CCCOC(=O)C(C)=C)(OCC)OCC RJQBKQZBJUVSAY-UHFFFAOYSA-N 0.000 description 1
- OTYYBJNSLLBAGE-UHFFFAOYSA-N CN1C(CCC1)=O.[N] Chemical compound CN1C(CCC1)=O.[N] OTYYBJNSLLBAGE-UHFFFAOYSA-N 0.000 description 1
- WBYWAXJHAXSJNI-SREVYHEPSA-N Cinnamic acid Chemical compound OC(=O)\C=C/C1=CC=CC=C1 WBYWAXJHAXSJNI-SREVYHEPSA-N 0.000 description 1
- 102100026735 Coagulation factor VIII Human genes 0.000 description 1
- IEPRKVQEAMIZSS-UHFFFAOYSA-N Di-Et ester-Fumaric acid Natural products CCOC(=O)C=CC(=O)OCC IEPRKVQEAMIZSS-UHFFFAOYSA-N 0.000 description 1
- YXHKONLOYHBTNS-UHFFFAOYSA-N Diazomethane Chemical class C=[N+]=[N-] YXHKONLOYHBTNS-UHFFFAOYSA-N 0.000 description 1
- IEPRKVQEAMIZSS-WAYWQWQTSA-N Diethyl maleate Chemical compound CCOC(=O)\C=C/C(=O)OCC IEPRKVQEAMIZSS-WAYWQWQTSA-N 0.000 description 1
- ZAFNJMIOTHYJRJ-UHFFFAOYSA-N Diisopropyl ether Chemical compound CC(C)OC(C)C ZAFNJMIOTHYJRJ-UHFFFAOYSA-N 0.000 description 1
- FPVVYTCTZKCSOJ-UHFFFAOYSA-N Ethylene glycol distearate Chemical compound CCCCCCCCCCCCCCCCCC(=O)OCCOC(=O)CCCCCCCCCCCCCCCCC FPVVYTCTZKCSOJ-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 101000911390 Homo sapiens Coagulation factor VIII Proteins 0.000 description 1
- JVTAAEKCZFNVCJ-UHFFFAOYSA-M Lactate Chemical compound CC(O)C([O-])=O JVTAAEKCZFNVCJ-UHFFFAOYSA-M 0.000 description 1
- YIVJZNGAASQVEM-UHFFFAOYSA-N Lauroyl peroxide Chemical compound CCCCCCCCCCCC(=O)OOC(=O)CCCCCCCCCCC YIVJZNGAASQVEM-UHFFFAOYSA-N 0.000 description 1
- WLLGXSLBOPFWQV-UHFFFAOYSA-N MGK 264 Chemical compound C1=CC2CC1C1C2C(=O)N(CC(CC)CCCC)C1=O WLLGXSLBOPFWQV-UHFFFAOYSA-N 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- XYVQFUJDGOBPQI-UHFFFAOYSA-N Methyl-2-hydoxyisobutyric acid Chemical compound COC(=O)C(C)(C)O XYVQFUJDGOBPQI-UHFFFAOYSA-N 0.000 description 1
- GYCMBHHDWRMZGG-UHFFFAOYSA-N Methylacrylonitrile Chemical compound CC(=C)C#N GYCMBHHDWRMZGG-UHFFFAOYSA-N 0.000 description 1
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 1
- OOPIOHIHEQJONA-UHFFFAOYSA-N NCCCO[Si](OC)(C)CCCN.[N] Chemical compound NCCCO[Si](OC)(C)CCCN.[N] OOPIOHIHEQJONA-UHFFFAOYSA-N 0.000 description 1
- DSOWAVDUSWXVOQ-UHFFFAOYSA-N NCCCO[Si](OC)(OC)CCCN.[N] Chemical compound NCCCO[Si](OC)(OC)CCCN.[N] DSOWAVDUSWXVOQ-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- XWQMBFZXGYKLOD-UHFFFAOYSA-N OC(C(C)=O)(C)C.OC(C(C)=O)(C)C Chemical compound OC(C(C)=O)(C)C.OC(C(C)=O)(C)C XWQMBFZXGYKLOD-UHFFFAOYSA-N 0.000 description 1
- RGIQOCYMNHOGBC-UHFFFAOYSA-N OCC(C(C)=O)C.OCC(C(C)=O)C Chemical compound OCC(C(C)=O)C.OCC(C(C)=O)C RGIQOCYMNHOGBC-UHFFFAOYSA-N 0.000 description 1
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 1
- 239000004695 Polyether sulfone Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 1
- DHXVGJBLRPWPCS-UHFFFAOYSA-N Tetrahydropyran Chemical compound C1CCOCC1 DHXVGJBLRPWPCS-UHFFFAOYSA-N 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- OHRFHGAUSMKRCU-UHFFFAOYSA-N [2-(1,1,2,2,2-pentafluoroethyl)oxetan-3-yl]methyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC1COC1C(F)(F)C(F)(F)F OHRFHGAUSMKRCU-UHFFFAOYSA-N 0.000 description 1
- GSVDAPOIBBPGHO-UHFFFAOYSA-N [2-(1,1,2,2,2-pentafluoroethyl)oxetan-3-yl]methyl prop-2-enoate Chemical compound C(C=C)(=O)OCC1C(OC1)C(C(F)(F)F)(F)F GSVDAPOIBBPGHO-UHFFFAOYSA-N 0.000 description 1
- FARWYUGFTNOIPS-UHFFFAOYSA-N [2-(trifluoromethyl)oxetan-3-yl]methyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC1COC1C(F)(F)F FARWYUGFTNOIPS-UHFFFAOYSA-N 0.000 description 1
- NXPNOQRYNHVYJE-UHFFFAOYSA-N [2-(trifluoromethyl)oxetan-3-yl]methyl prop-2-enoate Chemical compound C(C=C)(=O)OCC1C(OC1)C(F)(F)F NXPNOQRYNHVYJE-UHFFFAOYSA-N 0.000 description 1
- GLCCGSHEKBXUGH-UHFFFAOYSA-N [[5-[cyano-(2-methylphenyl)methylidene]thiophen-2-ylidene]amino] 4-methylbenzenesulfonate Chemical compound C1=CC(C)=CC=C1S(=O)(=O)ON=C(S1)C=CC1=C(C#N)C1=CC=CC=C1C GLCCGSHEKBXUGH-UHFFFAOYSA-N 0.000 description 1
- PCXUSBICWPJFTN-UHFFFAOYSA-N [[cyano-(4-methoxyphenyl)methylidene]amino] 4-methylbenzenesulfonate Chemical compound C1=CC(OC)=CC=C1C(C#N)=NOS(=O)(=O)C1=CC=C(C)C=C1 PCXUSBICWPJFTN-UHFFFAOYSA-N 0.000 description 1
- AXJNFINWUUSNRX-UHFFFAOYSA-N [[cyano-(4-methoxyphenyl)methylidene]amino] octane-1-sulfonate Chemical compound CCCCCCCCS(=O)(=O)ON=C(C#N)C1=CC=C(OC)C=C1 AXJNFINWUUSNRX-UHFFFAOYSA-N 0.000 description 1
- 150000001241 acetals Chemical group 0.000 description 1
- KXKVLQRXCPHEJC-UHFFFAOYSA-N acetic acid trimethyl ester Natural products COC(C)=O KXKVLQRXCPHEJC-UHFFFAOYSA-N 0.000 description 1
- 125000002777 acetyl group Chemical group [H]C([H])([H])C(*)=O 0.000 description 1
- 125000003668 acetyloxy group Chemical group [H]C([H])([H])C(=O)O[*] 0.000 description 1
- 125000005396 acrylic acid ester group Chemical group 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- XYLMUPLGERFSHI-UHFFFAOYSA-N alpha-Methylstyrene Chemical compound CC(=C)C1=CC=CC=C1 XYLMUPLGERFSHI-UHFFFAOYSA-N 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 239000002280 amphoteric surfactant Substances 0.000 description 1
- 239000003945 anionic surfactant Substances 0.000 description 1
- 239000012752 auxiliary agent Substances 0.000 description 1
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 description 1
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 1
- 150000008366 benzophenones Chemical class 0.000 description 1
- 235000019400 benzoyl peroxide Nutrition 0.000 description 1
- AOJOEFVRHOZDFN-UHFFFAOYSA-N benzyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC1=CC=CC=C1 AOJOEFVRHOZDFN-UHFFFAOYSA-N 0.000 description 1
- FYGUSUBEMUKACF-UHFFFAOYSA-N bicyclo[2.2.1]hept-2-ene-5-carboxylic acid Chemical compound C1C2C(C(=O)O)CC1C=C2 FYGUSUBEMUKACF-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- TZIHIBIXHWRKRE-UHFFFAOYSA-N bis(1-phenylmethoxyethyl) bicyclo[2.2.1]hept-5-ene-2,3-dicarboxylate Chemical compound C1=CC2CC1C(C(=O)OC(C)OCC=1C=CC=CC=1)C2C(=O)OC(C)OCC1=CC=CC=C1 TZIHIBIXHWRKRE-UHFFFAOYSA-N 0.000 description 1
- WXNRYSGJLQFHBR-UHFFFAOYSA-N bis(2,4-dihydroxyphenyl)methanone Chemical compound OC1=CC(O)=CC=C1C(=O)C1=CC=C(O)C=C1O WXNRYSGJLQFHBR-UHFFFAOYSA-N 0.000 description 1
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 1
- 125000004106 butoxy group Chemical group [*]OC([H])([H])C([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 1
- 239000001191 butyl (2R)-2-hydroxypropanoate Substances 0.000 description 1
- URBZEXMYYYABCQ-UHFFFAOYSA-N butyl 2-butoxyacetate Chemical compound CCCCOCC(=O)OCCCC URBZEXMYYYABCQ-UHFFFAOYSA-N 0.000 description 1
- IKRARXXOLDCMCX-UHFFFAOYSA-N butyl 2-butoxypropanoate Chemical compound CCCCOC(C)C(=O)OCCCC IKRARXXOLDCMCX-UHFFFAOYSA-N 0.000 description 1
- VUEYQLJAKGLDNR-UHFFFAOYSA-N butyl 2-ethoxyacetate Chemical compound CCCCOC(=O)COCC VUEYQLJAKGLDNR-UHFFFAOYSA-N 0.000 description 1
- FYRUCHOYGVFKLZ-UHFFFAOYSA-N butyl 2-ethoxypropanoate Chemical compound CCCCOC(=O)C(C)OCC FYRUCHOYGVFKLZ-UHFFFAOYSA-N 0.000 description 1
- VFGRALUHHHDIQI-UHFFFAOYSA-N butyl 2-hydroxyacetate Chemical compound CCCCOC(=O)CO VFGRALUHHHDIQI-UHFFFAOYSA-N 0.000 description 1
- QSCQBWYZLHJYRJ-UHFFFAOYSA-N butyl 2-hydroxypropanoate 2-hydroxy-2-methylhexanoic acid Chemical compound CCCCOC(=O)C(C)O.CCCCC(C)(O)C(O)=O QSCQBWYZLHJYRJ-UHFFFAOYSA-N 0.000 description 1
- IWPATTDMSUYMJV-UHFFFAOYSA-N butyl 2-methoxyacetate Chemical compound CCCCOC(=O)COC IWPATTDMSUYMJV-UHFFFAOYSA-N 0.000 description 1
- JDJWQETUMXXWPD-UHFFFAOYSA-N butyl 2-methoxypropanoate Chemical compound CCCCOC(=O)C(C)OC JDJWQETUMXXWPD-UHFFFAOYSA-N 0.000 description 1
- BMOACRKLCOIODC-UHFFFAOYSA-N butyl 3-butoxypropanoate Chemical compound CCCCOCCC(=O)OCCCC BMOACRKLCOIODC-UHFFFAOYSA-N 0.000 description 1
- MVWVAXBILFBQIZ-UHFFFAOYSA-N butyl 3-ethoxypropanoate Chemical compound CCCCOC(=O)CCOCC MVWVAXBILFBQIZ-UHFFFAOYSA-N 0.000 description 1
- RRIRSNXZGJWTQM-UHFFFAOYSA-N butyl 3-methoxypropanoate Chemical compound CCCCOC(=O)CCOC RRIRSNXZGJWTQM-UHFFFAOYSA-N 0.000 description 1
- NPCIWFUNUUCNOM-UHFFFAOYSA-N butyl 3-propoxypropanoate Chemical compound CCCCOC(=O)CCOCCC NPCIWFUNUUCNOM-UHFFFAOYSA-N 0.000 description 1
- 125000004063 butyryl group Chemical group O=C([*])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 1
- 150000001244 carboxylic acid anhydrides Chemical group 0.000 description 1
- 125000002843 carboxylic acid group Chemical group 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 239000003093 cationic surfactant Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 125000001309 chloro group Chemical group Cl* 0.000 description 1
- 229930016911 cinnamic acid Natural products 0.000 description 1
- 235000013985 cinnamic acid Nutrition 0.000 description 1
- HNEGQIOMVPPMNR-IHWYPQMZSA-N citraconic acid Chemical compound OC(=O)C(/C)=C\C(O)=O HNEGQIOMVPPMNR-IHWYPQMZSA-N 0.000 description 1
- 229940018557 citraconic acid Drugs 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 239000003431 cross linking reagent Substances 0.000 description 1
- LDHQCZJRKDOVOX-NSCUHMNNSA-N crotonic acid Chemical compound C\C=C\C(O)=O LDHQCZJRKDOVOX-NSCUHMNNSA-N 0.000 description 1
- 125000004093 cyano group Chemical group *C#N 0.000 description 1
- 125000001995 cyclobutyl group Chemical group [H]C1([H])C([H])([H])C([H])(*)C1([H])[H] 0.000 description 1
- CGZZMOTZOONQIA-UHFFFAOYSA-N cycloheptanone Chemical compound O=C1CCCCCC1 CGZZMOTZOONQIA-UHFFFAOYSA-N 0.000 description 1
- 125000002704 decyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 239000013530 defoamer Substances 0.000 description 1
- FHIVAFMUCKRCQO-UHFFFAOYSA-N diazinon Chemical compound CCOP(=S)(OCC)OC1=CC(C)=NC(C(C)C)=N1 FHIVAFMUCKRCQO-UHFFFAOYSA-N 0.000 description 1
- 150000001990 dicarboxylic acid derivatives Chemical class 0.000 description 1
- ZEFVHSWKYCYFFL-UHFFFAOYSA-N diethyl 2-methylidenebutanedioate Chemical compound CCOC(=O)CC(=C)C(=O)OCC ZEFVHSWKYCYFFL-UHFFFAOYSA-N 0.000 description 1
- IEPRKVQEAMIZSS-AATRIKPKSA-N diethyl fumarate Chemical compound CCOC(=O)\C=C\C(=O)OCC IEPRKVQEAMIZSS-AATRIKPKSA-N 0.000 description 1
- 229940019778 diethylene glycol diethyl ether Drugs 0.000 description 1
- 229940028356 diethylene glycol monobutyl ether Drugs 0.000 description 1
- XXJWXESWEXIICW-UHFFFAOYSA-N diethylene glycol monoethyl ether Chemical compound CCOCCOCCO XXJWXESWEXIICW-UHFFFAOYSA-N 0.000 description 1
- 229940075557 diethylene glycol monoethyl ether Drugs 0.000 description 1
- ODQWQRRAPPTVAG-GZTJUZNOSA-N doxepin Chemical compound C1OC2=CC=CC=C2C(=C/CCN(C)C)/C2=CC=CC=C21 ODQWQRRAPPTVAG-GZTJUZNOSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- FWDBOZPQNFPOLF-UHFFFAOYSA-N ethenyl(triethoxy)silane Chemical compound CCO[Si](OCC)(OCC)C=C FWDBOZPQNFPOLF-UHFFFAOYSA-N 0.000 description 1
- NKSJNEHGWDZZQF-UHFFFAOYSA-N ethenyl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)C=C NKSJNEHGWDZZQF-UHFFFAOYSA-N 0.000 description 1
- WOXXJEVNDJOOLV-UHFFFAOYSA-N ethenyl-tris(2-methoxyethoxy)silane Chemical compound COCCO[Si](OCCOC)(OCCOC)C=C WOXXJEVNDJOOLV-UHFFFAOYSA-N 0.000 description 1
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 1
- 125000003754 ethoxycarbonyl group Chemical group C(=O)(OCC)* 0.000 description 1
- SVBSJWKYFYUHTF-UHFFFAOYSA-N ethyl 2-butoxyacetate Chemical compound CCCCOCC(=O)OCC SVBSJWKYFYUHTF-UHFFFAOYSA-N 0.000 description 1
- HMONIZCCNGYDDJ-UHFFFAOYSA-N ethyl 2-butoxypropanoate Chemical compound CCCCOC(C)C(=O)OCC HMONIZCCNGYDDJ-UHFFFAOYSA-N 0.000 description 1
- CKSRFHWWBKRUKA-UHFFFAOYSA-N ethyl 2-ethoxyacetate Chemical compound CCOCC(=O)OCC CKSRFHWWBKRUKA-UHFFFAOYSA-N 0.000 description 1
- GFUIDHWFLMPAGY-UHFFFAOYSA-N ethyl 2-hydroxy-2-methylpropanoate Chemical compound CCOC(=O)C(C)(C)O GFUIDHWFLMPAGY-UHFFFAOYSA-N 0.000 description 1
- ZANNOFHADGWOLI-UHFFFAOYSA-N ethyl 2-hydroxyacetate Chemical compound CCOC(=O)CO ZANNOFHADGWOLI-UHFFFAOYSA-N 0.000 description 1
- LNSXAHXVHYLJEG-UHFFFAOYSA-N ethyl 2-hydroxypropanoate;2-hydroxy-2-methylbutanoic acid Chemical compound CCOC(=O)C(C)O.CCC(C)(O)C(O)=O LNSXAHXVHYLJEG-UHFFFAOYSA-N 0.000 description 1
- JLEKJZUYWFJPMB-UHFFFAOYSA-N ethyl 2-methoxyacetate Chemical compound CCOC(=O)COC JLEKJZUYWFJPMB-UHFFFAOYSA-N 0.000 description 1
- WHRLOJCOIKOQGL-UHFFFAOYSA-N ethyl 2-methoxypropanoate Chemical compound CCOC(=O)C(C)OC WHRLOJCOIKOQGL-UHFFFAOYSA-N 0.000 description 1
- ZXONMBCEAFIRDT-UHFFFAOYSA-N ethyl 2-propoxyacetate Chemical compound CCCOCC(=O)OCC ZXONMBCEAFIRDT-UHFFFAOYSA-N 0.000 description 1
- GIRSHSVIZQASRJ-UHFFFAOYSA-N ethyl 3-butoxypropanoate Chemical compound CCCCOCCC(=O)OCC GIRSHSVIZQASRJ-UHFFFAOYSA-N 0.000 description 1
- BHXIWUJLHYHGSJ-UHFFFAOYSA-N ethyl 3-ethoxypropanoate Chemical compound CCOCCC(=O)OCC BHXIWUJLHYHGSJ-UHFFFAOYSA-N 0.000 description 1
- IJUHLFUALMUWOM-UHFFFAOYSA-N ethyl 3-methoxypropanoate Chemical compound CCOC(=O)CCOC IJUHLFUALMUWOM-UHFFFAOYSA-N 0.000 description 1
- LLACVNYOVGHAKH-UHFFFAOYSA-N ethyl 3-propoxypropanoate Chemical compound CCCOCCC(=O)OCC LLACVNYOVGHAKH-UHFFFAOYSA-N 0.000 description 1
- 229940116333 ethyl lactate Drugs 0.000 description 1
- 150000004665 fatty acids Chemical class 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 125000003709 fluoroalkyl group Chemical group 0.000 description 1
- 239000001530 fumaric acid Substances 0.000 description 1
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 1
- 229940100608 glycol distearate Drugs 0.000 description 1
- 125000001188 haloalkyl group Chemical group 0.000 description 1
- 125000003187 heptyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000005446 heptyloxy group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])O* 0.000 description 1
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000003707 hexyloxy group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])O* 0.000 description 1
- 150000004678 hydrides Chemical class 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 125000004029 hydroxymethyl group Chemical group [H]OC([H])([H])* 0.000 description 1
- 150000003949 imides Chemical class 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 150000007529 inorganic bases Chemical class 0.000 description 1
- GJRQTCIYDGXPES-UHFFFAOYSA-N iso-butyl acetate Natural products CC(C)COC(C)=O GJRQTCIYDGXPES-UHFFFAOYSA-N 0.000 description 1
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 1
- FGKJLKRYENPLQH-UHFFFAOYSA-M isocaproate Chemical compound CC(C)CCC([O-])=O FGKJLKRYENPLQH-UHFFFAOYSA-M 0.000 description 1
- JMMWKPVZQRWMSS-UHFFFAOYSA-N isopropanol acetate Natural products CC(C)OC(C)=O JMMWKPVZQRWMSS-UHFFFAOYSA-N 0.000 description 1
- 229940011051 isopropyl acetate Drugs 0.000 description 1
- GWYFCOCPABKNJV-UHFFFAOYSA-N isovaleric acid Chemical compound CC(C)CC(O)=O GWYFCOCPABKNJV-UHFFFAOYSA-N 0.000 description 1
- OQAGVSWESNCJJT-UHFFFAOYSA-N isovaleric acid methyl ester Natural products COC(=O)CC(C)C OQAGVSWESNCJJT-UHFFFAOYSA-N 0.000 description 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 1
- JDSHMPZPIAZGSV-UHFFFAOYSA-N melamine Chemical compound NC1=NC(N)=NC(N)=N1 JDSHMPZPIAZGSV-UHFFFAOYSA-N 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- HNEGQIOMVPPMNR-NSCUHMNNSA-N mesaconic acid Chemical compound OC(=O)C(/C)=C/C(O)=O HNEGQIOMVPPMNR-NSCUHMNNSA-N 0.000 description 1
- FQPSGWSUVKBHSU-UHFFFAOYSA-N methacrylamide Chemical compound CC(=C)C(N)=O FQPSGWSUVKBHSU-UHFFFAOYSA-N 0.000 description 1
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 1
- FBNXYLDLGARYKQ-UHFFFAOYSA-N methoxy-dimethyl-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](C)(C)CCCOCC1CO1 FBNXYLDLGARYKQ-UHFFFAOYSA-N 0.000 description 1
- 125000001160 methoxycarbonyl group Chemical group [H]C([H])([H])OC(*)=O 0.000 description 1
- BKFQHFFZHGUTEZ-UHFFFAOYSA-N methyl 2-butoxyacetate Chemical compound CCCCOCC(=O)OC BKFQHFFZHGUTEZ-UHFFFAOYSA-N 0.000 description 1
- QBVBLLGAMALJGB-UHFFFAOYSA-N methyl 2-butoxypropanoate Chemical compound CCCCOC(C)C(=O)OC QBVBLLGAMALJGB-UHFFFAOYSA-N 0.000 description 1
- PPFNAOBWGRMDLL-UHFFFAOYSA-N methyl 2-ethoxyacetate Chemical compound CCOCC(=O)OC PPFNAOBWGRMDLL-UHFFFAOYSA-N 0.000 description 1
- YVWPDYFVVMNWDT-UHFFFAOYSA-N methyl 2-ethoxypropanoate Chemical compound CCOC(C)C(=O)OC YVWPDYFVVMNWDT-UHFFFAOYSA-N 0.000 description 1
- YSGBMDFJWFIEDF-UHFFFAOYSA-N methyl 2-hydroxy-3-methylbutanoate Chemical compound COC(=O)C(O)C(C)C YSGBMDFJWFIEDF-UHFFFAOYSA-N 0.000 description 1
- AVVSSORVCLNBOS-UHFFFAOYSA-N methyl 2-propoxyacetate Chemical compound CCCOCC(=O)OC AVVSSORVCLNBOS-UHFFFAOYSA-N 0.000 description 1
- VBCSBEIIIFLVQV-UHFFFAOYSA-N methyl 3-butoxypropanoate Chemical compound CCCCOCCC(=O)OC VBCSBEIIIFLVQV-UHFFFAOYSA-N 0.000 description 1
- HSDFKDZBJMDHFF-UHFFFAOYSA-N methyl 3-ethoxypropanoate Chemical compound CCOCCC(=O)OC HSDFKDZBJMDHFF-UHFFFAOYSA-N 0.000 description 1
- BDJSOPWXYLFTNW-UHFFFAOYSA-N methyl 3-methoxypropanoate Chemical compound COCCC(=O)OC BDJSOPWXYLFTNW-UHFFFAOYSA-N 0.000 description 1
- DMHHINXESLPPMV-UHFFFAOYSA-N methyl 3-propoxypropanoate Chemical compound CCCOCCC(=O)OC DMHHINXESLPPMV-UHFFFAOYSA-N 0.000 description 1
- 229940057867 methyl lactate Drugs 0.000 description 1
- WBYWAXJHAXSJNI-UHFFFAOYSA-N methyl p-hydroxycinnamate Natural products OC(=O)C=CC1=CC=CC=C1 WBYWAXJHAXSJNI-UHFFFAOYSA-N 0.000 description 1
- LVHBHZANLOWSRM-UHFFFAOYSA-N methylenebutanedioic acid Natural products OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 1
- HNEGQIOMVPPMNR-UHFFFAOYSA-N methylfumaric acid Natural products OC(=O)C(C)=CC(O)=O HNEGQIOMVPPMNR-UHFFFAOYSA-N 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 125000006606 n-butoxy group Chemical group 0.000 description 1
- 125000001280 n-hexyl group Chemical group C(CCCCC)* 0.000 description 1
- 125000000740 n-pentyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- QVEIBLDXZNGPHR-UHFFFAOYSA-N naphthalene-1,4-dione;diazide Chemical compound [N-]=[N+]=[N-].[N-]=[N+]=[N-].C1=CC=C2C(=O)C=CC(=O)C2=C1 QVEIBLDXZNGPHR-UHFFFAOYSA-N 0.000 description 1
- 125000004923 naphthylmethyl group Chemical group C1(=CC=CC2=CC=CC=C12)C* 0.000 description 1
- 239000009360 ningdong Substances 0.000 description 1
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- GSGDTSDELPUTKU-UHFFFAOYSA-N nonoxybenzene Chemical compound CCCCCCCCCOC1=CC=CC=C1 GSGDTSDELPUTKU-UHFFFAOYSA-N 0.000 description 1
- 125000001400 nonyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- JFNLZVQOOSMTJK-KNVOCYPGSA-N norbornene Chemical compound C1[C@@H]2CC[C@H]1C=C2 JFNLZVQOOSMTJK-KNVOCYPGSA-N 0.000 description 1
- NWAHZAIDMVNENC-UHFFFAOYSA-N octahydro-1h-4,7-methanoinden-5-yl methacrylate Chemical compound C12CCCC2C2CC(OC(=O)C(=C)C)C1C2 NWAHZAIDMVNENC-UHFFFAOYSA-N 0.000 description 1
- ZPIRTVJRHUMMOI-UHFFFAOYSA-N octoxybenzene Chemical compound CCCCCCCCOC1=CC=CC=C1 ZPIRTVJRHUMMOI-UHFFFAOYSA-N 0.000 description 1
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000005447 octyloxy group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])O* 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- AMUUFLNQHMIHRP-UHFFFAOYSA-N oxetan-3-ylmethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC1COC1 AMUUFLNQHMIHRP-UHFFFAOYSA-N 0.000 description 1
- ZADZUSCZHASNAH-UHFFFAOYSA-N oxetan-3-ylmethyl prop-2-enoate Chemical compound C=CC(=O)OCC1COC1 ZADZUSCZHASNAH-UHFFFAOYSA-N 0.000 description 1
- OWWPHPPHGZLCLN-UHFFFAOYSA-N oxiran-2-ylmethyl 2-methylidenebutanoate Chemical compound CCC(=C)C(=O)OCC1CO1 OWWPHPPHGZLCLN-UHFFFAOYSA-N 0.000 description 1
- JJOOCDGUAPREGI-UHFFFAOYSA-N oxiran-2-ylmethyl 2-methylidenehexanoate Chemical compound CCCCC(=C)C(=O)OCC1CO1 JJOOCDGUAPREGI-UHFFFAOYSA-N 0.000 description 1
- BEIQFZLRSOTXNT-UHFFFAOYSA-N oxiran-2-ylmethyl 2-methylidenepentanoate Chemical compound CCCC(=C)C(=O)OCC1CO1 BEIQFZLRSOTXNT-UHFFFAOYSA-N 0.000 description 1
- JCGNDDUYTRNOFT-UHFFFAOYSA-N oxolane-2,4-dione Chemical compound O=C1COC(=O)C1 JCGNDDUYTRNOFT-UHFFFAOYSA-N 0.000 description 1
- 125000001820 oxy group Chemical group [*:1]O[*:2] 0.000 description 1
- IWDCLRJOBJJRNH-UHFFFAOYSA-N p-cresol Chemical compound CC1=CC=C(O)C=C1 IWDCLRJOBJJRNH-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 125000004115 pentoxy group Chemical group [*]OC([H])([H])C([H])([H])C([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 1
- 125000001147 pentyl group Chemical group C(CCCC)* 0.000 description 1
- WVDDGKGOMKODPV-ZQBYOMGUSA-N phenyl(114C)methanol Chemical compound O[14CH2]C1=CC=CC=C1 WVDDGKGOMKODPV-ZQBYOMGUSA-N 0.000 description 1
- XKJCHHZQLQNZHY-UHFFFAOYSA-N phthalimide Chemical compound C1=CC=C2C(=O)NC(=O)C2=C1 XKJCHHZQLQNZHY-UHFFFAOYSA-N 0.000 description 1
- 229920001707 polybutylene terephthalate Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 238000006068 polycondensation reaction Methods 0.000 description 1
- 229920006393 polyether sulfone Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920005862 polyol Polymers 0.000 description 1
- 150000003077 polyols Chemical class 0.000 description 1
- 229920001451 polypropylene glycol Polymers 0.000 description 1
- DNAJDTIOMGISDS-UHFFFAOYSA-N prop-2-enylsilane Chemical compound [SiH3]CC=C DNAJDTIOMGISDS-UHFFFAOYSA-N 0.000 description 1
- 125000001501 propionyl group Chemical group O=C([*])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000002572 propoxy group Chemical group [*]OC([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 1
- LVDAGIFABMFXSJ-UHFFFAOYSA-N propyl 2-butoxyacetate Chemical compound CCCCOCC(=O)OCCC LVDAGIFABMFXSJ-UHFFFAOYSA-N 0.000 description 1
- GYOCIFXDRJJHPF-UHFFFAOYSA-N propyl 2-butoxypropanoate Chemical compound CCCCOC(C)C(=O)OCCC GYOCIFXDRJJHPF-UHFFFAOYSA-N 0.000 description 1
- ADOFEJQZDCWAIL-UHFFFAOYSA-N propyl 2-ethoxyacetate Chemical compound CCCOC(=O)COCC ADOFEJQZDCWAIL-UHFFFAOYSA-N 0.000 description 1
- GXKPKHWZTLSCIB-UHFFFAOYSA-N propyl 2-ethoxypropanoate Chemical compound CCCOC(=O)C(C)OCC GXKPKHWZTLSCIB-UHFFFAOYSA-N 0.000 description 1
- ILVGAIQLOCKNQA-UHFFFAOYSA-N propyl 2-hydroxypropanoate Chemical compound CCCOC(=O)C(C)O ILVGAIQLOCKNQA-UHFFFAOYSA-N 0.000 description 1
- CYIRLFJPTCUCJB-UHFFFAOYSA-N propyl 2-methoxypropanoate Chemical compound CCCOC(=O)C(C)OC CYIRLFJPTCUCJB-UHFFFAOYSA-N 0.000 description 1
- HJIYVZIALQOKQI-UHFFFAOYSA-N propyl 3-butoxypropanoate Chemical compound CCCCOCCC(=O)OCCC HJIYVZIALQOKQI-UHFFFAOYSA-N 0.000 description 1
- IYVPXMGWHZBPIR-UHFFFAOYSA-N propyl 3-ethoxypropanoate Chemical compound CCCOC(=O)CCOCC IYVPXMGWHZBPIR-UHFFFAOYSA-N 0.000 description 1
- JCMFJIHDWDKYIL-UHFFFAOYSA-N propyl 3-methoxypropanoate Chemical compound CCCOC(=O)CCOC JCMFJIHDWDKYIL-UHFFFAOYSA-N 0.000 description 1
- YTUFRRBSSNRYID-UHFFFAOYSA-N propyl 3-propoxypropanoate Chemical compound CCCOCCC(=O)OCCC YTUFRRBSSNRYID-UHFFFAOYSA-N 0.000 description 1
- 229940090181 propyl acetate Drugs 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000004742 propyloxycarbonyl group Chemical group 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 150000003242 quaternary ammonium salts Chemical class 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 235000019795 sodium metasilicate Nutrition 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 229960002317 succinimide Drugs 0.000 description 1
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 description 1
- 125000001273 sulfonato group Chemical class [O-]S(*)(=O)=O 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- OQXKWNNTBOKHCC-UHFFFAOYSA-N tert-butyl 2,2-dimethylpropaneperoxoate 2,2,4,4-tetramethylpentaneperoxoic acid Chemical compound C(C)(C)(C)CC(C(=O)OO)(C)C.C(C(C)(C)C)(=O)OOC(C)(C)C OQXKWNNTBOKHCC-UHFFFAOYSA-N 0.000 description 1
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 229940073455 tetraethylammonium hydroxide Drugs 0.000 description 1
- LRGJRHZIDJQFCL-UHFFFAOYSA-M tetraethylazanium;hydroxide Chemical compound [OH-].CC[N+](CC)(CC)CC LRGJRHZIDJQFCL-UHFFFAOYSA-M 0.000 description 1
- 125000003718 tetrahydrofuranyl group Chemical group 0.000 description 1
- 125000003944 tolyl group Chemical group 0.000 description 1
- 125000002827 triflate group Chemical group FC(S(=O)(=O)O*)(F)F 0.000 description 1
- DQZNLOXENNXVAD-UHFFFAOYSA-N trimethoxy-[2-(7-oxabicyclo[4.1.0]heptan-4-yl)ethyl]silane Chemical compound C1C(CC[Si](OC)(OC)OC)CCC2OC21 DQZNLOXENNXVAD-UHFFFAOYSA-N 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
- NQPDZGIKBAWPEJ-UHFFFAOYSA-N valeric acid Chemical compound CCCCC(O)=O NQPDZGIKBAWPEJ-UHFFFAOYSA-N 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 125000005023 xylyl group Chemical group 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
- G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
- G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
- G03F7/0397—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition the macromolecular compound having an alicyclic moiety in a side chain
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1248—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition or shape of the interlayer dielectric specially adapted to the circuit arrangement
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Materials For Photolithography (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Abstract
本发明提供一种化学增幅型正型感光性树脂组成物,其包括树脂(A)、光酸产生剂(B)及溶剂(C)。本发明更包括应用此化学增幅型正型感光性树脂组成物所制得的保护膜,及包括此保护膜的元件。此保护膜具有良好的显影密着性及耐化性,且可应用于薄膜电晶体基板用平坦化膜、层间绝缘膜或光波导路的芯材或包覆材。
Description
技术领域
本发明是有关于一种化学增幅型正型感光性树脂组成物、由其形成的保护膜及具有保护膜的元件。其中,特别是提供一种曝光、显影后形成显影密着性佳、耐化性佳等特性的保护膜用正型感光性树脂组成物。此保护膜适用于液晶显示元件、有机EL显示元件等的薄膜电晶体(Thin Film Transistor;TFT)基板用平坦化膜、层间绝缘膜或光波导路的芯材或包覆材。
背景技术
薄膜电晶体型液晶显示元件或有机电致发光元件(organicelectroluminescence device,有机EL元件)等显示元件,通常包括层间绝缘膜或平坦化膜等绝缘膜。此种绝缘膜通常使用感放射线性组成物来形成。就图案化性能的观点而言,现有习知多使用利用萘醌二迭氮化物(naphthoquinone diazide)等酸产生剂的正型感放射线性树脂组成物(参照日本专利特开2001-354822号公报),做为此种感放射线性组成物,但近年来提出了多种感放射线性组成物。
举例而言,提出了一种正型化学增幅材料,其目的在于:以较使用萘醌二迭氮化物等酸产生剂的前述正型感放射线性树脂组成物具有更高的感度,来形成显示元件用的硬化膜(参照日本专利特开2004-4669号公报)。所述正型化学增幅材料含有交联剂、酸产生剂及酸解离性树脂。酸解离性树脂具有可利用酸的作用而解离的保护基,虽酸解离性树脂本身不溶或者难溶于碱性水溶液中,但通过利用酸的作用,使保护基解离而变得可溶于碱性水溶液中。另外,也提出了含有具有缩醛结构及/或缩酮结构以及环氧基的树脂及酸产生剂的正型感放射线性组成物(参照日本专利特开2004-264623号公报、日本专利特开2011-215596号公报以及日本专利特开2008-304902号公报)。
这些感放射线性树脂组成物中,除了高的放射线感度以外,还需要求即便长期保存,黏度也不会变化的保存稳定性,进而使这些感放射线性树脂组成物形成的硬化膜,可达到不因显影液等而膨润的耐化性。进而,所述硬化膜形成的图案也可达到:在显影后,图案与基板充分密合而难以剥离;硬化膜具有足够的透明性;以及,即便在曝光后进行放置的情况下,图案也与基板充分密合而难以剥离。
然而,目前的感光性树脂组成物的显影密着性、耐化性仍无法令业界所接受。
发明内容
本发明的一个态样在于提出一种化学增幅型正型感光性树脂组成物。在一些实施例中,此化学增幅型正型感光性树脂组成物可包含树脂(A)、光酸产生剂(B)和溶剂(C),以下详述之。
树脂(A)
树脂(A)是由混合物所共聚合而得。此混合物至少包括不饱和羧酸单体(a-1)、含硅烷基的不饱和化合物(a-2)以及含酸解离性基的单体(a-3)。
不饱和羧酸单体(a-1)
本发明的不饱和羧酸单体(a-1)是指包含羧酸基或羧酸酐结构及聚合结合用的不饱和键的化合物,其结构并无特别限制,可包括但不限于不饱和单羧酸化合物、不饱和二羧酸化合物、不饱和酸酐化合物、多环型不饱和羧酸化合物、多环型不饱和二羧酸化合物、多环型不饱和酸酐化合物。
前述不饱和单羧酸化合物的具体例如:(甲基)丙烯酸、丁烯酸、α-氯丙烯酸、乙基丙烯酸、肉桂酸、2-(甲基)丙烯酰乙氧基丁二酸酯、2-(甲基)丙烯酰乙氧基六氢化苯二甲酸酯、2-(甲基)丙烯酰乙氧基苯二甲酸酯、omega-羧基聚己内酯多元醇单丙烯酸酯(商品名为ARONIX M-5300,东亚合成制)。
前述不饱和二羧酸化合物的具体例如:马来酸、富马酸、甲基富马酸、衣康酸、柠康酸等。在本发明的具体例中,不饱和二羧酸酐化合物为前述不饱和二羧酸化合物的酸酐化合物。
前述多环型不饱和羧酸化合物的具体例如:5-羧基双环[2.2.1]庚-2-烯、5-羧基-5-甲基双环[2.2.1]庚-2-烯、5-羧基-5-乙基双环[2.2.1]庚-2-烯、5-羧基-6-甲基双环[2.2.1]庚-2-烯、5-羧基-6-乙基双环[2.2.1]庚-2-烯。
前述多环型不饱和二羧酸化合物的具体例如:5,6-二羧酸二环[2.2.1]庚-2-烯。
前述多环型不饱和二羧酸酐化合物为前述多环型不饱和二羧酸化合物的酸酐化合物。
上述不饱和羧酸单体(a-1)的较佳具体例为丙烯酸、甲基丙烯酸、马来酸酐、2-甲基丙烯酰乙氧基丁二酸酯、2-甲基丙烯酰基乙氧基六氢化苯二甲酸或其组合。
上述不饱和羧酸单体(a-1)可单独或混合多种使用。基于合成树脂(A)的混合物使用量100重量份,不饱和羧酸单体(a-1)的使用量为5重量份至50重量份;较佳为10重量份至45重量份;更佳为15重量份至45重量份。
含硅烷基的不饱和化合物(a-2)
本发明的含硅烷基的不饱和化合物(a-2)具有如下示结构式(1-1)的结构:
在结构式(1-1)中,R1代表氢原子或甲基;R2及R3代表各自独立的碳数为1至12的烷基、苯基、碳数为1至6的烷氧基或结构式(1-2)所示的基团;当R2及R3为多个,各个R2及R3为相同或不同;a代表1至6的整数;b代表1至150的整数;R4代表碳数为1至6的烷基或结构式(1-3)所示的基团。
在结构式(1-2)中,R5、R6及R7代表各自独立的碳数为1至12的烷基或苯基;当R6及R7为多个,各个R6及R7为相同或不同;c代表1至13的整数。
在结构式(1-3)中,R8、R9及R10代表各自独立的碳数为1至12的烷基或苯基。
所述碳数为1至12的烷基的具体例为甲基、乙基、丙基、丁基、戊基、己基、庚基、辛基、壬基或癸基。
所述碳数为1至6的烷氧基的具体例为甲氧基、乙氧基、丙氧基或丁氧基。
所述结构式(1-1)所示的含硅烷基的不饱和化合物(a-2)包括烯丙基硅烷类(allylsilane)和甲基丙烯酸硅烷类(methacrylic silanes),其具体例为3-甲基丙烯酰氧基丙基三甲氧基硅烷(3-methacryloxypropyltrimethoxysilane)、3-甲基丙烯酰氧基丙基三乙氧基硅烷(3-methacryloxypropyltriethoxysilane)、3-甲基丙烯酰氧基丙基甲基二甲氧基硅烷(3-methacryloxypropylmethyldimethoxysilane)、3-甲基丙烯酰氧基丙基甲基二乙氧基硅烷(3-methacryloxypropylmethyldiethoxysilane)、由下述式(1-1-1)至(1-1-6)所示的化合物、由式(1-1-7)所示的(3-甲基丙烯酰氧基)丙基三(三甲基硅氧基)硅烷((3-methacryloyloxy)propyltris(trimethylsiloxy)silane;3MPTS)或FM-0711、FM-0721、FM-0725(Chisso Corporation制造)。
上述结构式(1-1)所示的含硅烷基的不饱和化合物(a-2)的较佳具体例为3-甲基丙烯酰氧基丙基三甲氧基硅烷、3-甲基丙烯酰氧基丙基三乙氧基硅烷、由式(1-1-7)所示的(3-甲基丙烯酰氧基)丙基三(三甲基硅氧基)硅烷、FM-0711(Chisso Corporation制造)或其组合。
上述结构式(1-1)所示的含硅烷基的不饱和化合物(a-2)可单独或混合多种使用。基于合成树脂(A)的混合物使用量100重量份,结构式(1-1)所示的含硅烷基的不饱和化合物(a-2)的使用量为5重量份至50重量份;较佳为10重量份至45重量份;更佳为15重量份至45重量份。倘若合成树脂(A)的混合物中未含有结构式(1-1)所示的含硅烷基的不饱和化合物(a-2),则由此化学增幅型正型感光性树脂组成物形成的保护膜会有显影密着性和耐化性不佳的问题。
含酸解离性基的单体(a-3)
本发明的含酸解离性基的单体(a-3)具有如下结构式(2-1)所示的酸解离性基。
含酸解离性基的单体(a-3)的酸解离性基,在曝光时借由自后述的光酸产生剂(B)产生的酸的作用而解离,并产生极性基,因此原本不溶或难溶于碱水溶液的树脂(A)变成对碱水溶液具可溶性。
所述含酸解离性基的单体(a-3)只要具有如结构式(2-1)的结构,则无特别限定。此含结构式(2-1)的酸解离性基的单体(a-3)可借由酸而容易解离。在上述结构式(2-1)中,R11和R12各自独立为氢原子、烷基、脂环式烃基或芳基,其中所述烷基、脂环式烃基或芳基所具有的氢原子的一部分或全部可被取代;而且,R11及R12不同时为氢原子;R13为烷基、脂环式烃基、芳烷基或者芳基;其中R13的烷基、脂环式烃基、芳烷基及芳基所具有的氢原子的一部分或全部可被取代;R11与R13可连结而形成环状醚结构。例如:R11与R13可相互键结而与R11所键结的碳原子以及R13所键结的氧原子一起形成环状醚结构。
上述R11及R12所表示的脂环式烃基例如可列举碳数为3至20的脂环式烃基等。另外,此碳数为3至20的脂环式烃基可以是多环。上述碳数为3至20的脂环式烃基例如可列举:环丙基、环戊基、环己基、环庚基、环辛基、冰片基、降冰片基、金刚烷基等。
上述R11及R12所表示的芳基例如可列举碳数为6至14的芳基等。上述碳数为6至14的芳基可以是单环,也可以是单环连结而成的结构,还可以是缩合环。上述碳数为6至14的芳基例如可列举苯基、萘基等。
上述R11及R12所表示的可经取代的烷基、脂环式烃基以及芳基的取代基例如可列举:卤素原子、羟基、硝基、氰基、羧基、羰基、脂环式烃基(例如环丙基、环戊基、环己基、环庚基、环辛基、冰片基、降冰片基、金刚烷基等)、芳基(例如苯基、萘基等)、烷氧基(例如甲氧基、乙氧基、丙氧基、正丁氧基、戊氧基、己氧基、庚氧基、辛氧基等碳数为1至20的烷氧基等)、酰基(例如乙酰基、丙酰基、丁酰基、异丁酰基等碳数为2至20的酰基等)、酰氧基(例如乙酰氧基、丙酰氧基、丁酰氧基、第三丁酰氧基、第三戊酰氧基等碳数为2至10的酰氧基等)、烷氧基羰基(例如甲氧基羰基、乙氧基羰基、丙氧基羰基等碳数为2至20的烷氧基羰基)、卤代烷基(例如甲基、乙基、正丙基、正丁基、正戊基、正己基、正辛基、正十二烷基、正十四烷基、正十八烷基等直链状烷基,异丙基、异丁基、第三丁基、新戊基、2-己基、3-己基等分支状烷基等烷基;环丙基、环丁基、环戊基、降冰片基、金刚烷基等脂环式烃基,将上述基团的一部分或者全部的氢原子经卤素原子取代而得的基团)、羟基烷基(例如羟基甲基等)等。
上述R13所表示的烷基、脂环式烃基、芳基可应用上述R11及R12所表示的各基团的说明。此外,上述烷基较佳为碳数为1至6的烷基,更佳为甲基、乙基以及正丙基。上述R13所表示的芳烷基可列举:苄基、苯乙基、萘基甲基、萘基乙基等。
上述R11与R13可相互键结而形成的环状醚结构,较佳为环员数3至20的环状醚结构,更佳为环员数5至8的环状醚结构,又更佳为四氢呋喃以及四氢吡喃。
上述结构式(2-1)所表示的基团例如可列举下述式所表示的基团等。
上述含酸解离性基的单体(a-3)例如可列举:甲基丙烯酸1-乙氧基乙酯、甲基丙烯酸1-甲氧基乙酯、甲基丙烯酸1-正丁氧基乙酯、甲基丙烯酸1-异丁氧基乙酯、甲基丙烯酸1-第三丁氧基乙酯、甲基丙烯酸1-(2-氯乙氧基)乙酯、甲基丙烯酸1-(2-乙基己氧基)乙酯、甲基丙烯酸1-正丙氧基乙酯、甲基丙烯酸1-环己氧基乙酯、甲基丙烯酸1-(2-环己基乙氧基)乙酯、甲基丙烯酸1-苄氧基乙酯、甲基丙烯酸2-四氢吡喃基酯、甲基丙烯酸2-四氢呋喃基酯(2-Tetrahydrofuranyl methacrylate)、丙烯酸1-乙氧基乙酯、丙烯酸1-甲氧基乙酯、丙烯酸1-正丁氧基乙酯、丙烯酸1-异丁氧基乙酯、丙烯酸1-第三丁氧基乙酯、丙烯酸1-(2-氯乙氧基)乙酯、丙烯酸1-(2-乙基己氧基)乙酯、丙烯酸1-正丙氧基乙酯、丙烯酸1-环己氧基乙酯、丙烯酸1-(2-环己基乙氧基)乙酯、丙烯酸1-苄氧基乙酯、丙烯酸2-四氢吡喃基酯、5,6-二(1-甲氧基乙氧基羰基)-2-降冰片烯、5,6-二(1-(环己氧基)乙氧基羰基)-2-降冰片烯、5,6-二(1-(苄氧基)乙氧基羰基)-2-降冰片烯、对-1-乙氧基乙氧基苯乙烯或间-1-乙氧基乙氧基苯乙烯、对-1-甲氧基乙氧基苯乙烯或间-1-甲氧基乙氧基苯乙烯、对-1-正丁氧基乙氧基苯乙烯或间-1-正丁氧基乙氧基苯乙烯、对-1-异丁氧基乙氧基苯乙烯或间-1-异丁氧基乙氧基苯乙烯、对-1-(1,1-二甲基乙氧基)乙氧基苯乙烯或间-1-(1,1-二甲基乙氧基)乙氧基苯乙烯、对-1-(2-氯乙氧基)乙氧基苯乙烯或间-1-(2-氯乙氧基)乙氧基苯乙烯、对-1-(2-乙基己氧基)乙氧基苯乙烯或间-1-(2-乙基己氧基)乙氧基苯乙烯、对-1-正丙氧基乙氧基苯乙烯或间-1-正丙氧基乙氧基苯乙烯、对-1-环己氧基乙氧基苯乙烯或间-1-环己氧基乙氧基苯乙烯、对-1-(2-环己基乙氧基)乙氧基苯乙烯或间-1-(2-环己基乙氧基)乙氧基苯乙烯、对-1-苄氧基乙氧基苯乙烯或间-1-苄氧基乙氧基苯乙烯等。
含酸解离性基的单体(a-3)较佳为甲基丙烯酸1-乙氧基乙酯、甲基丙烯酸1-正丁氧基乙酯、甲基丙烯酸2-四氢吡喃基酯、甲基丙烯酸1-苄氧基乙酯、甲基丙烯酸1-环己氧基乙酯、甲基丙烯酸2-四氢呋喃基酯,更佳为甲基丙烯酸2-四氢吡喃基酯和甲基丙烯酸2-四氢呋喃基酯。
基于所述混合物的使用量为100重量份,所述单体(a-3)的使用量为5重量份至90重量份,较佳为10重量份至80重量份,更佳为15重量份至70重量份。若无使用单体(a-3)时,会有显影密着性不佳、耐化性不佳的问题。
含环氧基的不饱和单体(a-4)
在一些实施例中,所述混合物可进一步包括含环氧基的不饱和单体(a-4)。
所述含环氧基的不饱和单体(a-4)可包括但不限于含环氧基的(甲基)丙烯酸酯化合物、含环氧基的α-烷基丙烯酸酯化合物、环氧丙醚化合物、如结构式(3-1)所示的具有氧杂环丁烷基的乙烯性不饱和单体,及上述的任意组合。
在结构式(3-1)中,R14代表氢原子或碳数为1至4的烷基;R15代表氢原子或碳数为1至4的烷基;R16、R17、R18及R19分别独立地代表氢原子、氟原子、苯基、碳数为1至4的烷基或碳数为1至4的全氟烷基;且a代表1至6的整数。
前述含环氧基的(甲基)丙烯酸酯化合物的具体例如:(甲基)丙烯酸环氧丙酯、(甲基)丙烯酸2-甲基环氧丙酯、(甲基)丙烯酸3,4-环氧丁酯、(甲基)丙烯酸6,7-环氧庚酯、(甲基)丙烯酸3,4-环氧环己酯、(甲基)丙烯酸3,4-环氧环己基甲酯。
前述含环氧基的α-烷基丙烯酸酯化合物的具体例如:α-乙基丙烯酸环氧丙酯、α-正丙基丙烯酸环氧丙酯、α-正丁基丙烯酸环氧丙酯、α-乙基丙烯酸6,7-环氧庚酯。
前述环氧丙醚化合物的具体例如:邻-乙烯基苯甲基环氧丙醚(o-vinylbenzylglycidylether)、间-乙烯基苯甲基环氧丙醚(m-vinylbenzylglycidylether)、对-乙烯基苯甲基环氧丙醚(p-vinylbenzylglycidylether)。
前述如结构式(3-1)所示的具有氧杂环丁烷基的乙烯性不饱和单体的具体例可包含但不限于甲基丙烯酸酯类化合物、丙烯酸酯类化合物或具有如下式(3-2)至式(3-5)所示的结构的不饱和单体。
前述的甲基丙烯酸酯类化合物可包含但不限于3-(甲基丙烯酰氧基甲基)氧杂环丁烷[3-(methacryloyloxymethyl)oxetane;OXMA]、3-(甲基丙烯酰氧基甲基)-3-乙基氧杂环丁烷[3-(methacryloyloxymethyl)-3-ethyloxetane;EOXMA]、3-(甲基丙烯酰氧基甲基)-3-甲基氧杂环丁烷[3-(methacryloyloxymethyl)-3-methyloxetane;MOXMA]、3-(甲基丙烯酰氧基甲基)-2-甲基氧杂环丁烷、3-(甲基丙烯酰氧基甲基)-2-三氟甲基氧杂环丁烷、3-(甲基丙烯酰氧基甲基)-2-五氟乙基氧杂环丁烷、3-(甲基丙烯酰氧基甲基)-2-苯基氧杂环丁烷、3-(甲基丙烯酰氧基甲基)-2,2-二氟氧杂环丁烷、3-(甲基丙烯酰氧基甲基)-2,2,4-三氟氧杂环丁烷、3-(甲基丙烯酰氧基甲基)-2,2,4,4-四氟氧杂环丁烷、3-(甲基丙烯酰氧基乙基)氧杂环丁烷、3-(甲基丙烯酰氧基乙基)-3-乙基氧杂环丁烷、2-乙基-3-(甲基丙烯酰氧基乙基)氧杂环丁烷、3-(甲基丙烯酰氧基乙基)-2-三氟甲基氧杂环丁烷、3-(甲基丙烯酰氧基乙基)-2-五氟乙基氧杂环丁烷、3-(甲基丙烯酰氧基乙基)-2-苯基氧杂环丁烷、2,2-二氟-3-(甲基丙烯酰氧基乙基)氧杂环丁烷、3-(甲基丙烯酰氧基乙基)-2,2,4-三氟氧杂环丁烷或3-(甲基丙烯酰氧基乙基)-2,2,4,4-四氟氧杂环丁烷等的化合物。
上述的丙烯酸酯类化合物可包含但不限于3-(丙烯酰氧基甲基)氧杂环丁烷、3-(丙烯酰氧基甲基)-3-乙基氧杂环丁烷、3-(丙烯酰氧基甲基)-3-甲基氧杂环丁烷、3-(丙烯酰氧基甲基)-2-甲基氧杂环丁烷、3-(丙烯酰氧基甲基)-2-三氟甲基氧杂环丁烷、3-(丙烯酰氧基甲基)-2-五氟乙基氧杂环丁烷、3-(丙烯酰氧基甲基)-2-苯基氧杂环丁烷、3-(丙烯酰氧基甲基)-2,2-二氟氧杂环丁烷、3-(丙烯酰氧基甲基)-2,2,4-三氟氧杂环丁烷、3-(丙烯酰氧基甲基)-2,2,4,4-四氟氧杂环丁烷、3-(丙烯酰氧基乙基)氧杂环丁烷、3-(丙烯酰氧基乙基)-3-乙基氧杂环丁烷、2-乙基-3-(丙烯酰氧基乙基)氧杂环丁烷、3-(丙烯酰氧基乙基)-2-三氟甲基氧杂环丁烷、3-(丙烯酰氧基乙基)-2-五氟乙基氧杂环丁烷、3-(丙烯酰氧基乙基)-2-苯基氧杂环丁烷、2,2-二氟-3-(丙烯酰氧基乙基)氧杂环丁烷、3-(丙烯酰氧基乙基)-2,2,4-三氟氧杂环丁烷或3-(丙烯酰氧基乙基)-2,2,4,4-四氟氧杂环丁烷等的化合物。
前述具有如式(3-2)至式(3-5)所示的结构的不饱和单体如下所示。
在一些实施例中,所述含环氧基的不饱和单体(a-4)可更包含其他具有氧杂环丁烷基的乙烯性不饱和单体,如:3-甲基-3-(乙烯氧基甲基)氧杂环丁烷[3-methyl-3-(vinyloxymethyl)oxetane;MOXV]、3-乙基-3-(乙烯氧基甲基)氧杂环丁烷[3-ethyl-3-(vinyloxymethyl)oxetane;EOXV]、3-丙基-3-(乙烯氧基甲基)氧杂环丁烷、3-甲基-3-(2-乙烯氧基乙基)氧杂环丁烷、3-乙基-3-(2-乙烯氧基乙基)氧杂环丁烷、3-丙基-3-(2-乙烯氧基乙基)氧杂环丁烷、3-甲基-3-(3-乙烯氧基丙基)氧杂环丁烷、3-乙基-3-(3-乙烯氧基丙基)氧杂环丁烷、3-丙基-3-(3-乙烯氧基丙基)氧杂环丁烷、3-甲基-3-(3-乙烯氧基丁基)氧杂环丁烷、3-乙基-3-(3-乙烯氧基丁基)氧杂环丁烷、3-丙基-3-(3-乙烯氧基丁基)氧杂环丁烷、乙二醇[(3-乙基-3-氧杂环丁基)甲基]乙烯基醚、丙二醇[(3-乙基-3-氧杂环丁基)甲基]乙烯基醚或3,3-双[(乙烯氧基)甲基]氧杂环丁烷等的具有氧杂环丁烷基的乙烯基醚化合物。
基于所述混合物的使用量为100重量份,所述含环氧基的不饱和单体(a-4)的使用量为5重量份至80重量份,较佳为10重量份至70重量份,更佳为15重量份至65重量份。若使用含环氧基的不饱和单体(a-4),会有显影密着性佳的优点。
在一些实施例中,较佳的,基于所述混合物的使用量为100重量份,如结构式(3-1)所示的具有氧杂环丁烷基的乙烯性不饱和单体的使用量为5重量份至80重量份,较佳为10重量份至70重量份,更佳为15重量份至65重量份,其可再进一步改善显影密着性。
其他不饱和单体(a-5)
所述用于形成树脂(A)的混合物中,可更包含其他不饱和单体(a-5)。在一些实施例中,其他不饱和单体(a-5)可包括但不限于(甲基)丙烯酸烷基酯、(甲基)丙烯酸脂环族酯、(甲基)丙烯酸芳基酯、不饱和二羧酸二酯、(甲基)丙烯酸羟烷酯、(甲基)丙烯酸酯的聚醚、芳香乙烯化合物及前述以外的其他不饱和化合物。
前述(甲基)丙烯酸烷基酯的具体例如:(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸正丙酯、(甲基)丙烯酸异丙酯、(甲基)丙烯酸正丁酯、(甲基)丙烯酸异丁酯、(甲基)丙烯酸二级丁酯、(甲基)丙烯酸三级丁酯。
前述(甲基)丙烯酸脂环族酯的具体例如:(甲基)丙烯酸环己酯、(甲基)丙烯酸-2-甲基环己酯、三环[5.2.1.02,6]癸-8-基(甲基)丙烯酸酯(或称为(甲基)丙烯酸双环戊酯)、(甲基)丙烯酸二环戊氧基乙酯、(甲基)丙烯酸异冰片酯、(甲基)丙烯酸四氢呋喃酯。
前述(甲基)丙烯酸芳基酯的具体例如:(甲基)丙烯酸苯基酯、(甲基)丙烯酸苯甲酯。
前述不饱和二羧酸二酯的具体例如马来酸二乙酯、富马酸二乙酯、衣康酸二乙酯。
前述(甲基)丙烯酸羟烷酯的具体例如:(甲基)丙烯酸-2-羟基乙酯、(甲基)丙烯酸-2-羟基丙酯。
前述(甲基)丙烯酸酯的聚醚的具体例如:聚乙二醇单(甲基)丙烯酸酯、聚丙二醇单(甲基)丙烯酸酯。
前述芳香乙烯化合物的具体例如:苯乙烯、α-甲基苯乙烯、间-甲基苯乙烯,对-甲基苯乙烯、对-甲氧基苯乙烯。
前述以外的其他不饱和化合物的具体例如:丙烯腈、甲基丙烯腈、氯乙烯、偏二氯乙烯、丙烯酰胺、甲基丙烯酰胺、乙烯乙酯、1,3-丁二烯、异戊二烯、2,3-二甲基1,3-丁二烯、N-环己基马来酰亚胺、N-苯基马来酰亚胺、N-芐基马来酰亚胺,N-丁二酰亚胺基-3-马来酰亚胺苯甲酸酯、N-丁二酰亚胺基-4-马来酰亚胺丁酸酯、N-丁二酰亚胺基-6-马来酰亚胺己酸酯、N-丁二酰亚胺基-3-马来酰亚胺丙酸酯、N-(9-吖啶基)马来酰亚胺。
基于所述混合物的使用量为100重量份,所述其他不饱和单体(a-5)的使用量为0重量份至90重量份,较佳为5重量份至85重量份,更佳为5重量份至80重量份。
制备树脂(A)
本发明的树脂(A)在制造时所使用溶剂可包括但不限于醇、醚、二醇醚、乙二醇烷基醚乙酸醋酸酯、二乙二醇、二丙二醇、丙二醇单烷基醚、丙二醇烷基醚乙酸醋酸酯、丙二醇烷基醚丙酸酯、芳香烃、酮、酯。
前述醇的具体例如:甲醇、乙醇、苯甲醇、2-苯乙醇、3-苯基-1-丙醇。前述醚的具体例如:四氢呋喃。前述二醇醚的具体例如:乙二醇单丙醚、乙二醇单甲醚、乙二醇单***。前述乙二醇烷基醚醋酸酯的具体例如:乙二醇丁醚醋酸酯、乙二醇***醋酸酯、乙二醇甲醚醋酸酯。前述二乙二醇的具体例如:二乙二醇单甲醚、二乙二醇单***、二乙二醇单丁醚、二乙二醇二甲醚、二乙二醇二***、二乙二醇甲***。前述二丙二醇的具体例如:二丙二醇单甲醚、二丙二醇单***、二丙二醇二甲醚、二丙二醇二***、二丙二醇甲***。前述丙二醇单烷基醚的具体例如:丙二醇单甲醚、丙二醇单***、丙二醇单丙醚、丙二醇单丁醚。前述丙二醇烷基醚醋酸酯的具体例如:丙二醇甲醚醋酸酯、丙二醇***醋酸酯、丙二醇丙醚醋酸酯、丙二醇丁醚醋酸酯。前述丙二醇烷基醚丙酸酯的具体例如:丙二醇甲醚丙酸酯、丙二醇***丙酸酯、丙二醇丙醚丙酸酯、丙二醇丁醚丙酸酯。前述芳香烃的具体例如:甲苯、二甲苯。前述酮的具体例如:甲乙酮、环己酮、二丙酮醇。前述酯的具体例如:乙酸甲酯、乙酸乙酯、乙酸丙酯、乙酸丁酯、2-羟基丙酸乙酯、2-羟基-2-甲基丙酸甲酯、2-羟基-2-甲基丙酸乙酯、羟乙酸甲酯、羟乙酸乙酯、羟乙酸丁酯、乳酸甲酯、乳酸丙酯、乳酸丁酯、3-羟基丙酸甲酯、3-羟基丙酸乙酯、3-羟基丙酸丙酯、3-羟基丙酸丁酯、2-羟基-3-甲基丁酸甲酯、甲氧基乙酸甲酯、甲氧基乙酸乙酯、甲氧基乙酸丁酯、乙氧基乙酸甲酯、乙氧基乙酸乙酯、乙氧基乙酸丙酯、乙氧基乙酸丁酯、丙氧基乙酸甲酯、丙氧基乙酸乙酯、丙氧基乙酸丙酯、丙氧基乙酸丁酯、丁氧基乙酸甲酯、丁氧基乙酸乙酯、丁氧基乙酸丙酯、丁氧基乙酸丁酯、3-甲氧基丁基乙酸酯、2-甲氧基丙酸甲酯、2-甲氧基丙酸乙酯、2-甲氧基丙酸丙酯、2-甲氧基丙酸丁酯、2-乙氧基丙酸甲酯、2-乙氧基丙酸乙酯、2-乙氧基丙酸丙酯、2-乙氧基丙酸丁酯、2-丁氧基丙酸甲酯、2-丁氧基丙酸甲酯、2-丁氧基丙酸乙酯、2-丁氧基丙酸丙酯、2-丁氧基丙酸丁酯、3-甲氧基丙酸甲酯、3-甲氧基丙酸乙酯、3-甲氧基丙酸丙酯、3-甲氧基丙酸丁酯、3-乙氧基丙酸甲酯、3-乙氧基丙酸乙酯、3-乙氧基丙酸丙酯、3-乙氧基丙酸丁酯、3-丙氧基丙酸甲酯、3-丙氧基丙酸乙酯、3-丙氧基丙酸丙酯、3-丙氧基丙酸丁酯、3-丁氧基丙酸甲酯、3-丁氧基丙酸乙酯、3-丁氧基丙酸丙酯、3-丁氧基丙酸丁酯。
本发明的树脂(A)在制造时所使用溶剂的较佳具体例为二乙二醇二甲醚、丙二醇甲醚醋酸酯。上述溶剂可单独或混合多种使用。
本发明的树脂(A)在制造时所使用的聚合起始剂,其具体例为偶氮化合物或过氧化物。前述偶氮化合物的具体例如:2,2'-偶氮二异丁腈、2,2'-偶氮二(2,4-二甲基戊腈)、2,2'-偶氮二(4-甲氧基-2,4-二甲基戊腈)、2,2'-偶氮二(2-甲基丁腈)、4,4'-偶氮二(4-氰基戊酸)、2,2'-偶氮二(二甲基-2-甲基丙酸酯)。前述过氧化物的具体例如:过氧化二苯甲酰、过氧化二月桂酰(dilauroyl peroxide)、第三丁基过氧化新戊酸酯(tert-butylperoxypivalate)、1,1-二(第三丁基过氧化)环己烷(1,1-di(tert-butylperoxy)cyclohexane)、过氧化氢。上述聚合起始剂可单独或混合多种使用。
本发明的树脂(A)的重量平均分子量一般为3,000至100,000,较佳为4,000至80,000,更佳为5,000至60,000。本发明的树脂(A)的分子量调整,可使用单一树脂,亦可并用两种或两种以上不同分子量的树脂来达成。
光酸产生剂(B)
光酸产生剂(B)是通过放射线的照射而产生酸的化合物,可使用选自下述结构式(4-1)所表示的肟磺酸酯基的化合物,以及N-磺酰氧基酰亚胺化合物中的至少一种。所述放射线可使用例如可见光线、紫外线、远紫外线、电子束、X射线等。由于本发明的化学增幅型正型感光性树脂组成物含有光酸产生剂(B),使得化学增幅型正型感光性树脂组成物可发挥感放射线(或称感光)的特性,且可具有良好的放射线感度。做为所述化学增幅型正型感光性树脂组成物中的光酸产生剂(B),如后所述可以是化合物的形态,也可以是做为构成树脂(A)的聚合物的一部分而并入树脂(A)的形态,也可以是此二种形态的结合。此些光酸产生剂(B)可单独使用,也可以并用2种以上。
光酸产生剂(B)除了含有包含肟磺酸酯基的肟磺酸酯化合物、N-磺酰氧基酰亚胺化合物以外,还可以含有:鎓盐、含卤素的化合物、重氮甲烷化合物、砜化合物、磺酸酯化合物、羧酸酯化合物等。
所述肟磺酸酯化合物为包含如下结构式(4-1)的肟磺酸酯基的化合物。
在结构式(4-1)中,R20为碳数为1至20的烷基、一价的脂环式烃基、芳基,或是上述基团(烷基、一价的脂环式烃基、芳基)所具有的氢原子被部分或全部取代的基团;以及,*为键结处。
所述R20所表示的烷基较佳为碳数为1至12的直链状或分支状的烷基。
所述R20所表示的一价脂环式烃基较佳为碳数为4至12的脂环式烃基。
所述R20所表示的芳基较佳为碳数为6至20的芳基,更佳为苯基、萘基、甲苯基、二甲苯基。
所述取代基例如可列举:碳数为1至5的烷基、烷氧基、侧氧基、卤素原子等。
含有结构式(4-1)所表示的肟磺酸酯基的化合物例如可列举下述式(4-2)至式(4-4)所表示的肟磺酸酯化合物等。
所述式(4-2)至式(4-4)中,R21与结构式(4-1)的R20为相同含义。所述式(4-2)及式(4-3)中,R22为碳数为1至12的烷基、碳数为1至12的氟烷基。式(4-4)中,X为烷基、烷氧基、或者卤素原子。i为0至3的整数。其中,在i为2或3的情况下,多个X可相同,亦可不同。
所述X所表示的烷基较佳为碳数为1至4的直链状或分支状的烷基。所述X所表示的烷氧基较佳为碳数为1至4的直链状或分支状的烷氧基。所述X所表示的卤素原子较佳为氯原子、氟原子。
所述式(4-4)所表示的肟磺酸酯化合物例如可列举下述式(4-5)至式(4-9)所表示的化合物等。
所述式(4-5)至式(4-9)所表示的化合物分别为:(5-丙基磺酰氧基亚胺基-5H-噻吩-2-亚基)-(2-甲基苯基)乙腈、(5-辛基磺酰氧基亚胺基-5H-噻吩-2-亚基)-(2-甲基苯基)乙腈、(5-樟脑磺酰氧基亚胺基-5H-噻吩-2-亚基)-(2-甲基苯基)乙腈、(5-对甲苯磺酰氧基亚胺基-5H-噻吩-2-亚基)-(2-甲基苯基)乙腈、2-(辛基磺酰氧基亚胺基)-2-(4-甲氧基苯基)乙腈、4-甲基苯基磺酰氧基亚胺基-α-(4-甲氧基苯基)乙腈,可使用市售的上述化合物。
上述N-磺酰氧基酰亚胺化合物例如可列举:N-(三氟甲基磺酰氧基)丁二酰亚胺、N-(樟脑磺酰氧基)丁二酰亚胺、N-(4-甲基苯基磺酰氧基)丁二酰亚胺、N-(2-三氟甲基苯基磺酰氧基)丁二酰亚胺、N-(4-氟苯基磺酰氧基)丁二酰亚胺、N-(三氟甲基磺酰氧基)邻苯二甲酰亚胺、N-(樟脑磺酰氧基)邻苯二甲酰亚胺、N-(2-三氟甲基苯基磺酰氧基)邻苯二甲酰亚胺、N-(2-氟苯基磺酰氧基)邻苯二甲酰亚胺、N-(三氟甲基磺酰氧基)二苯基顺丁烯二酰亚胺、N-(樟脑磺酰氧基)二苯基顺丁烯二酰亚胺、(4-甲基苯基磺酰氧基)二苯基顺丁烯二酰亚胺、N-(2-三氟甲基苯基磺酰氧基)二苯基顺丁烯二酰亚胺、N-(4-氟苯基磺酰氧基)二苯基顺丁烯二酰亚胺、N-(苯基磺酰氧基)双环[2.2.1]庚-5-烯-2,3-二羧基酰亚胺、N-(4-甲基苯基磺酰氧基)双环[2.2.1]庚-5-烯-2,3-二羧基酰亚胺、N-(三氟甲磺酰氧基)双环[2.2.1]庚-5-烯-2,3-二羧基酰亚胺、N-(九氟丁磺酰氧基)双环[2.2.1]庚-5-烯-2,3-二羧基酰亚胺、N-(樟脑磺酰氧基)双环[2.2.1]庚-5-烯-2,3-二羧基酰亚胺、N-(樟脑磺酰氧基)-7-氧杂双环[2.2.1]庚-5-烯-2,3-二羧基酰亚胺、N-(三氟甲基磺酰氧基)-7-氧杂双环[2.2.1]庚-5-烯-2,3-二羧基酰亚胺、N-(4-甲基苯基磺酰氧基)双环[2.2.1]庚-5-烯-2,3-二羧基酰亚胺、N-(4-甲基苯基磺酰氧基)-7-氧杂双环[2.2.1]庚-5-烯-2,3-二羧基酰亚胺、N-(2-三氟甲基苯基磺酰氧基)双环[2.2.1]庚-5-烯-2,3-二羧基酰亚胺、N-(2-三氟甲基苯基磺酰氧基)-7-氧杂双环[2.2.1]庚-5-烯-2,3-二羧基酰亚胺、N-(4-氟苯基磺酰氧基)双环[2.2.1]庚-5-烯-2,3-二羧基酰亚胺、N-(4-氟苯基磺酰氧基)-7-氧杂双环[2.2.1]庚-5-烯-2,3-二羧基酰亚胺、N-(三氟甲基磺酰氧基)双环[2.2.1]庚烷-5,6-氧基-2,3-二羧基酰亚胺、N-(樟脑磺酰氧基)双环[2.2.1]庚烷-5,6-氧基-2,3-二羧基酰亚胺、N-(4-甲基苯基磺酰氧基)双环[2.2.1]庚烷-5,6-氧基-2,3-二羧基酰亚胺、N-(2-三氟甲基苯基磺酰氧基)双环[2.2.1]庚烷-5,6-氧基-2,3-二羧基酰亚胺、N-(4-氟苯基磺酰氧基)双环[2.2.1]庚烷-5,6-氧基-2,3-二羧基酰亚胺、N-(三氟甲基磺酰氧基)萘二甲酰亚胺(N-((trifluoromethylsulfonyl)oxy)naphthalene dicarboximide)、N-(樟脑磺酰氧基)萘二甲酰亚胺、N-(4-甲基苯基磺酰氧基)萘二甲酰亚胺、N-(苯基磺酰氧基)萘二甲酰亚胺、N-(2-三氟甲基苯基磺酰氧基)萘二甲酰亚胺、N-(4-氟苯基磺酰氧基)萘二甲酰亚胺、N-(五氟乙基磺酰氧基)萘二甲酰亚胺、N-(七氟丙基磺酰氧基)萘二甲酰亚胺、N-(九氟丁基磺酰氧基)萘二甲酰亚胺、N-(乙基磺酰氧基)萘二甲酰亚胺、N-(丙基磺酰氧基)萘二甲酰亚胺、N-(丁基磺酰氧基)萘二甲酰亚胺、N-(戊基磺酰氧基)萘二甲酰亚胺、N-(己基磺酰氧基)萘二甲酰亚胺、N-(庚基磺酰氧基)萘二甲酰亚胺、N-(辛基磺酰氧基)萘二甲酰亚胺、N-(壬基磺酰氧基)萘二甲酰亚胺等。
所述鎓盐、含卤素的化合物、重氮甲烷化合物、砜化合物、磺酸酯化合物、羧酸酯化合物等可使用日本专利特开2011-232632号公报中记载的化合物。例如:苄基(4-羟苯基)甲基硫鎓六氟锑酸盐。
基于所述树脂(A)的使用量为100重量份,所述光酸产生剂(B)的使用量为0.1重量份至10重量份,较佳为0.1重量份至8重量份,更佳为0.5重量份至6重量份。若化学增幅型正型感光性树脂组成物中含有结构式(4-1)的肟磺酸酯基的化合物做为所述光酸产生剂(B),所制得的保护膜具有耐化性佳的优点。
溶剂(C)
本发明的溶剂(C)的种类没有特别的限制。溶剂(C)的具体例为含醇式羟基(alcoholic hydroxyl group)的化合物或含羰基(carbonyl group)的环状化合物等。
含醇式羟基的化合物的具体例为丙酮醇(acetol)、3-羟基-3-甲基-2-丁酮(3-hydroxy-3-methyl-2-butanone)、4-羟基-3-甲基-2-丁酮(4-hydroxy-3-methyl-2-butanone)、5-羟基-2-戊酮(5-hydroxy-2-pentanone)、4-羟基-4-甲基-2-戊酮(4-hydroxy-4-methyl-2-pentanone)(亦称为二丙酮醇(diacetone alcohol,简称DAA))、乳酸乙酯(ethyl lactate)、乳酸丁酯(butyl lactate)、丙二醇单甲醚(propylene glycolmonomethyl ether)、丙二醇单***(propylene glycol monoethyl ether,简称PGEE)、丙二醇甲醚醋酸酯(propylene glycol monomethyl ether acetate,简称PGMEA)、丙二醇单正丙醚(propylene glycol mono-n-propyl ether)、丙二醇单正丁醚(propylene glycolmono-n-butyl ether)、丙二醇单第三丁醚(propylene glycol mono-t-butyl ether)、二乙二醇甲***(diethylene glycol methyl ethyl ether)、3-甲氧基-1-丁醇(3-methoxy-1-butanol)、3-甲基-3-甲氧基-1-丁醇(3-methyl-3-methoxy-1-butanol)或其组合。值得注意的是,含醇式羟基的化合物较佳为二丙酮醇、乳酸乙酯、丙二醇单***、丙二醇甲醚醋酸酯或其组合。含醇式羟基的化合物可单独使用或组合多种来使用。
含羰基的环状化合物的具体例为γ-丁内酯(γ-butyrolactone)、γ-戊内酯(γ-valerolactone)、δ-戊内酯(δ-valerolactone)、碳酸丙烯酯(propylene carbonate)、氮-甲基吡咯烷酮(N-methyl pyrrolidone)、环己酮(cyclohexanone)或环庚酮(cycloheptanone)等。值得注意的是,含羰基的环状化合物较佳为γ-丁内酯、氮-甲基吡咯烷酮、环己酮或其组合。含羰基的环状化合物可单独使用或组合多种来使用。
含醇式羟基的化合物可与含羰基的环状化合物组合使用,且其重量比率没有特别限制。含醇式羟基的化合物与含羰基的环状化合物的重量比值较佳为99/1至50/50;更佳为95/5至60/40。
在不损及本发明的效果的范围内,亦可以含有其他溶剂。该其他溶剂的具体例为:(1)酯类:醋酸乙酯、醋酸正丙酯、醋酸异丙酯、醋酸正丁酯、醋酸异丁酯、丙二醇甲醚醋酸酯、3-甲氧基-1-醋酸丁酯或3-甲基-3-甲氧基-1-醋酸丁酯等;(2)酮类:甲基异丁酮、二异丙酮或二异丁酮等;或者(3)醚类:二***、二异丙醚、二正丁醚或二苯醚等。
基于所述树脂(A)的使用量为100重量份所述溶剂(C)的使用量为200重量份至2000重量份,较佳为300重量份至1800重量份,更佳为500重量份至1500重量份。
其他添加剂(D)
选择性地,本发明的化学增幅型正型感光性树脂组成物可包含其他添加剂(D)。具体而言,其他添加剂(D)的具体例为增感剂(sensitizer)、密着助剂(adhesion auxiliaryagent)、界面活性剂(surfactant)、溶解促进剂(solubility promoter)、消泡剂(defoamer)或其组合。
增感剂的种类并无特别的限制。增感剂较佳为使用含有酚式羟基(phenolichydroxy)的化合物,具体例为:
(1)三苯酚型化合物(trisphenol type compound):如三(4-羟基苯基)甲烷、双(4-羟基-3-甲基苯基)-2-羟基苯基甲烷、双(4-羟基-2,3,5-三甲基苯基)-2-羟基苯基甲烷、双(4-羟基-3,5-二甲基苯基)-4-羟基苯基甲烷、双(4-羟基-3,5-二甲基苯基)-3-羟基苯基甲烷、双(4-羟基-3,5-甲基苯基)-2-羟基苯基甲烷、双(4-羟基-2,5-二甲基苯基)-4-羟基苯基甲烷、双(4-羟基-2,5-二甲基苯基)-3-羟基苯基甲烷、双(4-羟基-2,5-二甲基苯基)-2-羟基苯基甲烷、双(4-羟基-3,5-二甲基苯基)-3,4-二羟基苯基甲烷、双(4-羟基-2,5-二甲基苯基)-3,4-二羟基苯基甲烷、双(4-羟基-2,5-二甲基苯基)-2,4-二羟基苯基甲烷、双(4-羟基苯基)-3-甲氧基-4-羟基苯基甲烷、双(5-环己基-4-羟基-2-甲基苯基)-4-羟基苯基甲烷、双(5-环己基-4-羟基-2-甲基苯基)-3-羟基苯基甲烷、双(5-环己基-4-羟基-2-甲基苯基)-2-羟基苯基甲烷或双(5-环己基-4-羟基-2-甲基苯基)-3,4-二羟基苯基甲烷等;
(2)双苯酚型化合物(bisphenol type compound):如双(2,3,4-三羟基苯基)甲烷、双(2,4-二羟基苯基)甲烷、2,3,4-三羟基苯基-4'-羟基苯基甲烷、2-(2,3,4-三羟基苯基)-2-(2',3',4'-三羟基苯基)丙烷、2-(2,4-二羟基苯基)-2-(2',4'-二羟基苯基)丙烷、2-(4-羟基苯基)-2-(4'-羟基苯基)丙烷、2-(3-氟基-4-羟基苯基)-2-(3'-氟基-4'-羟基苯基)丙烷、2-(2,4-二羟基苯基)-2-(4'-羟基苯基)丙烷、2-(2,3,4-三羟基苯基)-2-(4'-羟基苯基)丙烷或2-(2,3,4-三羟基苯基)-2-(4'-羟基-3',5'-二甲基苯基)丙烷等;
(3)多核分枝型化合物(polynuclear branched compound):如1-[1-(4-羟基苯基)异丙基]-4-[1,1-双(4-羟基苯基)乙基]苯或1-[1-(3-甲基-4-羟基苯基)异丙基]-4-[1,1-双(3-甲基-4-羟基苯基)乙基]苯等;
(4)缩合型苯酚化合物(condensation type phenol compound):如1,1-双(4-羟基苯基)环己烷等;
(5)多羟基二苯甲酮类(polyhydroxy benzophenone):如2,3,4-三羟基二苯甲酮、2,4,4'-三羟基二苯甲酮、2,4,6-三羟基二苯甲酮、2,3,4-三羟基-2'-甲基二苯甲酮、2,3,4,4'-四羟基二苯甲酮、2,4,2',4'-四羟基二苯甲酮、2,4,6,3',4'-五羟基二苯甲酮、2,3,4,2',4'-五羟基二苯甲酮、2,3,4,2',5'-五羟基二苯甲酮、2,4,6,3',4',5'-六羟基二苯甲酮或2,3,4,3',4',5'-六羟基二苯甲酮等;或
(6)上述各种类含有酚式羟基的化合物的组合。
基于树脂(A)的使用量为100重量份,增感剂的使用量为5重量份至50重量份;较佳为8重量份至40重量份;且更佳为10重量份至35重量份。
密着助剂的具体例为三聚氰胺(melamine)化合物及硅烷系化合物等。密着助剂的作用在于增加由光硬化性聚硅氧烷组成物所形成的薄膜与元件或基板之间的密着性。
三聚氰胺的市售品的具体例为由三井化学制造的商品名为Cymel-300或Cymel-303等;或者由三和化学制造的商品名为MW-30MH、MW-30、MS-11、MS-001、MX-750或MX-706等。
当使用三聚氰胺化合物做为密着助剂时,基于该树脂(A)的使用量为100重量份,三聚氰胺化合物的使用量为0重量份至20重量份;较佳为0.5重量份至18重量份;且更佳为1.0重量份至15重量份。
硅烷系化合物的具体例为乙烯基三甲氧基硅烷、乙烯基三乙氧基硅烷、3-丙烯酰氧基丙基三甲氧基硅烷、乙烯基三(2-甲氧基乙氧基)硅烷、氮-(2-胺基乙基)-3-胺基丙基甲基二甲氧基硅烷、氮-(2-胺基乙基)-3-胺基丙基三甲氧基硅烷、3-胺丙基三乙氧基硅烷、3-环氧丙氧基丙基三甲氧基硅烷、3-环氧丙氧基丙基二甲基甲氧基硅烷、2-(3,4-环氧环己基)乙基三甲氧基硅烷、3-氯丙基甲基二甲氧基硅烷、3-氯丙基三甲氧基硅烷、3-甲基丙烯酰氧基丙基三甲氧基硅烷、3-巯丙基三甲氧基硅烷或由信越化学公司制造的市售品(商品名如KBM403)等。
当使用硅烷系化合物作为密着助剂时,基于树脂(A)的使用量为100重量份,硅烷系化合物的使用量为0重量份至2重量份;较佳为0.05重量份至1重量份;且更佳为0.1重量份至0.8重量份。
界面活性剂的具体例为阴离子系界面活性剂、阳离子系界面活性剂、非离子系界面活性剂、两性界面活性剂、聚硅氧烷系界面活性剂、氟系界面活性剂或其组合。
界面活性剂的实例包括(1)聚乙二醇烷基醚类(polyoxyethylene alkylethers):聚乙二醇十二烷基醚等;(2)聚乙二醇烷基苯基醚类(polyoxyethylene phenylethers):聚乙二醇辛基苯基醚、聚乙二醇壬基苯基醚等;(3)聚乙二醇二酯类(polyethylene glycol diesters):聚乙二醇二月桂酸酯、聚乙二醇二硬酸酯等;(4)山梨糖醇酐脂肪酸酯类(sorbitan fatty acid esters);以及(5)经脂肪酸改质的聚酯类(fatty acid modified polyesters);及(6)经三级胺改质的聚胺基甲酸酯类(tertiaryamine modified polyurethanes)等。界面活性剂的市售商品的具体例为KP(由信越化学工业制造)、SF-8427(由道康宁东丽聚硅氧股份有限公司(Dow Corning Toray SiliconeCo.,Ltd.)制造)、Polyflow(由共荣社油脂化学工业制造)、F-Top(由得克姆股份有限公司制造(Tochem Products Co.,Ltd.))、Megaface(由大日本印墨化学工业(DIC)制造)、Fluorade(由住友3M股份有限公司(Sumitomo 3M Ltd.)制造)、Surflon(由旭硝子制造)、SINOPOL E8008(由中日合成化学制造)、F-475(由大日本印墨化学工业制造)或其组合。
基于树脂(A)的使用量为100重量份,界面活性剂的使用量为0.5重量份至50重量份;较佳为1重量份至40重量份;且更佳为3至30重量份。
消泡剂的实例包括Surfynol MD-20、Surfynol MD-30、EnviroGem AD01、EnviroGem AE01、EnviroGem AE02、Surfynol DF110D、Surfynol 104E、Surfynol 420、Surfynol DF37、Surfynol DF58、Surfynol DF66、Surfynol DF70以及Surfynol DF210(由气体产品(Air products)制造)等。
基于树脂(A)的使用量为100重量份,消泡剂的使用量为1重量份至10重量份;较佳为2重量份至9重量份;且更佳为3重量份至8重量份。
溶解促进剂的实例包括氮-羟基二羧基酰亚胺化合物(N-hydroxydicarboxylicimide)以及含酚式羟基的化合物。溶解促进剂的具体例为邻萘醌二迭氮磺酸酯(B)中所使用的含酚式羟基的化合物。
基于树脂(A)的使用量为100重量份,溶解促进剂的使用量为1重量份至20重量份;较佳为2重量份至15重量份;且更佳为3重量份至10重量份。
化学增幅型正型感光性树脂组成物的具体例为以下列方式来制备:将树脂(A)、光酸产生剂(B)以及溶剂(C)放置于搅拌器中搅拌,使其均匀混合成溶液状态,必要时,可添加其他添加剂(D)。
本发明亦提供一种保护膜,其包含将上述化学增幅型正型感光性树脂组成物涂布于基材上,再经预烤、曝光、显影及后烤处理后所形成。
本发明更提供一种具有保护膜的元件,其包含基材以及所述保护膜。
保护膜的形成方法
在一些实施例中,本发明的化学增幅型正型感光性树脂组成物可用于显示元件的保护膜的形成材料。另外,本发明也包含适用于由化学增幅型正型感光性树脂组成物形成的显示元件用保护膜。
所述保护膜的形成方法包括下述步骤:
(1)使用化学增幅型正型感光性树脂组成物,在基板上形成涂膜的步骤(以下也称为“步骤(1)”);
(2)对上述涂膜的至少一部分照射放射线的步骤(以下也称为“步骤(2)”);
(3)对照射放射线后的上述涂膜进行显影的步骤(以下也称为“步骤(3)”);以及
(4)对显影后的上述涂膜进行加热的步骤(以下也称为“步骤(4)”)。
依据此形成方法,能够形成表面硬度、耐溶剂性、耐热性以及电压保持率优异的显示元件用保护膜。另外,借由使用具有良好感度的化学增幅型正型感光性树脂组成物,能够容易地形成具有微细且精巧的图案的显示元件用保护膜。因此,所形成的显示元件用保护膜适用于液晶显示元件、有机EL显示元件等显示元件。
[步骤(1)]
本步骤中,将化学增幅型正型感光性树脂组成物涂布于基板上而形成涂膜。较佳地,借由预烘烤涂布面而去除溶剂。
基板例如可列举:玻璃、石英、硅基材、树脂等。树脂例如可列举:聚对苯二甲酸乙二酯、聚对苯二甲酸丁二酯、聚醚砜、聚碳酸酯、聚酰亚胺、环状烯烃的开环聚合物以及其氢化物等。预烘烤的条件也根据各成分的种类、调配比例等而有所不同,可设为70℃至120℃、1分钟至10分钟左右。
[步骤(2)]
本步骤中,对所形成的上述涂膜的至少一部分照射放射线来进行曝光。曝光时,通常隔着具有预定图案的光罩进行曝光。用于曝光的放射线较佳为波长于190nm至450nm的范围内的放射线,更佳为包含365nm的紫外线的放射线。曝光量是利用照度计(OAI model356,OAI光学协会(OAIOptical Associates)制造)来测定放射线的波长365nm下的强度而得的值,较佳为500J/m2至6,000J/m2,更佳为1,500J/m2至1,800J/m2。
[步骤(3)]
本步骤中,对照射放射线后的上述涂膜进行显影。借由将曝光后的涂膜进行显影,去除不需要的部分(放射线的照射部分),以形成预定的图案。显影步骤中使用的显影液较佳为碱性的水溶液。碱例如可列举:氢氧化钠、氢氧化钾、碳酸钠、硅酸钠、偏硅酸钠、胺等无机碱;四甲基氢氧化铵、四乙基氢氧化铵等四级铵盐等。
碱水溶液中,也可以适量添加甲醇、乙醇等水溶性有机溶剂或界面活性剂来使用。就获得适当显影性的观点而言,碱水溶液中的碱的浓度较佳为0.1质量%以上、5质量%以下。显影方法例如可列举:覆液法(puddle method)、浸渍法、摇动浸渍法、喷淋法等。显影时间根据化学增幅型正型感光性树脂组成物的组成而有所不同,为10秒至180秒左右。在显影处理之后,借由进行例如流水清洗30秒至90秒,然后利用例如压缩空气或压缩氮,风干涂膜,以形成所需图案。
[步骤(4)]
本步骤中,将上述经显影的涂膜进行加热。加热时,借由使用加热板、烘箱等加热装置,加热图案化的薄膜,以促进树脂(A)的硬化反应,并获得硬化物。加热温度例如为120℃至250℃左右。加热时间根据加热机器的种类而有所不同,例如在加热板上为5分钟至30分钟左右,在烘箱中为30分钟至90分钟左右。另外,也可以使用进行2次以上加热步骤的阶段式烘烤法等。如此一来,可将与做为目标的显示元件用保护膜对应的图案状薄膜形成于基板的表面上。此外,上述硬化膜的用途并不限定于显示元件用保护膜,也可以作为间隔件或层间绝缘膜来利用。
所形成的显示元件用保护膜的膜厚较佳为0.1μm至8μm,更佳为0.1μm至6μm,又更佳为0.1μm至4μm。
附图说明
无
具体实施方式
以下借由数个制备例、实施例和比较例说明本发明的化学增幅型正型感光性树脂组成物的制造方法及其应用。
制备树脂(A)
制备例A-1
在一容积1000毫升的四颈锥瓶上设置氮气入口、搅拌器、加热器、冷凝管及温度计,导入氮气后,添加5重量份的甲基丙烯酸(以下简称MAA)、20重量份的3-甲基丙烯酰氧基丙基三甲氧基硅烷(以下简称MAPTMS)、20重量份的甲基丙烯酸2-四氢呋喃基酯、20重量份的甲基丙烯酸2-羟基乙酯(以下简称HEMA)、25重量份的甲基丙烯酸双环戊酯(以下简称FA-513M)、10重量份的甲基丙烯酸苯甲酯(以下简称BzMA)、10重量份的2,2’-偶氮双(2,4-二甲基戊腈)(以下简称ADVN)以及240重量份的二乙二醇二甲醚(以下简称Diglyme)溶剂。接着,缓慢搅拌上述成份使溶液升温至70℃,并在此温度下聚缩合6小时。然后,将溶剂脱挥后,可得树脂(A-1)。
制备例A-2至A-16以及制备比较例A’-1至A’-4
树脂(A-2)至(A-16)及制备比较例(A’-1)至(A’-4)的制备与前述树脂(A-1)的制备例类似,其中,单体的种类及使用量如表1所示。惟其中溶剂、触媒的使用量、反应温度及聚缩合的反应时间与前述树脂(A-1)不同,亦示于表1。
实施例1
制备化学增幅型正型感光性树脂组成物
将100重量份的树脂(A-1)和0.1重量份的苄基(4-羟苯基)甲基硫鎓六氟锑酸盐(B-1),加入200重量份的丙二醇甲醚醋酸酯(C-1)中,并以摇动式搅拌器(shaking typestirrer)搅拌均匀后,即可制得实施例1的化学增幅型正型感光性树脂组成物。
形成保护膜
在素玻璃基板(100×100×0.7mm)上,以旋转涂布方式得到约3μm的涂膜,接续以110℃预烤2分钟后,在曝光机与涂膜间置入正光阻用光罩,并以曝光机的紫外光照射涂膜,其能量为80mJ/cm2。将曝光后的涂膜浸渍于23℃的2.38%的TMAH水溶液70秒,除去曝光的部分。以清水清洗后,再以曝光机直接照射显影后的涂膜,其能量为300mJ/cm2。最后以220℃后烤45分钟,可获得实施例1的素玻璃基板上的保护膜。
关于实施例1的具体条件以及评价结果,悉如表2所示。
表2
B-1苄基(4-羟苯基)甲基硫鎓六氟锑酸盐(benzyl(4-hydroxyphenyl)methylsulfonium hexafluoroantimonate)
B-2 N-((三氟甲基磺酰氧基)萘二甲酰亚胺(N-((trifluoromethylsulfonyl)oxy)naphthalenedicarboximide)
B-3(5-对甲苯磺酰氧基亚胺基-5H-噻吩-2-亚基))-(2-甲基苯基)乙腈
B-44-甲基苯基磺酰氧基亚胺基-α-(4-甲氧基苯基)乙腈
B-5(5-丙基磺酰氧基亚胺基-5H-噻吩-2-亚基)-(2-甲基苯基)乙腈
C-1丙二醇甲醚醋酸酯PGMEA
C-2二乙二醇甲***
C-3环己酮
D-1 SF-8427(Toray Dow Corning Silicon制·界面活性剂)
D-2 3-环氧丙氧基丙基三甲氧基硅烷(.商品名KBM403,信越化学制,密着助剂)
实施例2至16及比较例1至4
实施例2至16及比较例1至4的化学增幅型正型感光性树脂组成物及保护膜是使用与实施例1相同的方式进行而得。不同的是,实施例2至16及比较例1至4改变组成或使用量等条件。关于实施例2至16及比较例1至4的具体条件及评价结果如表2和表3所示。
表3
B-1苄基(4-羟苯基)甲基硫鎓六氟锑酸盐(benzyl(4-hydroxyphenyl)methylsulfonium hexafluoroantimonate)
B-2 N-(三氟甲基磺酰氧基)萘二甲酰亚胺(N-((trifluoromethylsulfonyl)oxy)naphthalenedicarboximide)
B-3 (5-对甲苯磺酰氧基亚胺基-5H-噻吩-2-亚基)-(2-甲基苯基)乙腈
B-4 4-甲基苯基磺酰氧基亚胺基-α-(4-甲氧基苯基)乙腈
B-5(5-丙基磺酰氧基亚胺基-5H-噻吩-2-亚基)-(2-甲基苯基)乙腈
C—1丙二醇甲醚醋酸酯PGMEA
C-2二乙二醇甲***
C-3环己酮
D-1 SF-8427(Toray Dow Corning Silicon制,界面活性剂)
D-2 3-环氧丙氧基丙基三甲氧基硅烷(商品名KBM403,信越化学制,密着助剂)
评价方式
(1)显影密着性:
以上述保护膜的形成方法,形成化学增幅型正型感光性树脂组成物的涂膜后,隔着具有宽1μm至10μm的线与空间图案的图案光阻,利用水银灯对所述涂膜照射80mJ/cm2的紫外线。接着,使用四甲基氢氧化铵2.38质量%水溶液,在25℃下进行70秒显影处理后,以超纯水进行1分钟流水清洗。利用显微镜来观察清洗后的宽1μm至10μm的线与空间图案的剥离情况,作为显影密着性的评价。
◎:无图案剥离
○:图案少量剥离
△:图案的一部分剥离
×:图案的整个面剥离
(2)耐化性:
以上述保护膜的形成方法,形成化学增幅型正型感光性树脂组成物的涂膜后,使用加温至230℃的烘箱,煅烧所述涂膜30分钟,形成硬化膜。使所述硬化膜在加温至40℃的N-甲基吡咯烷酮溶剂中浸渍6分钟,求出浸渍前后的膜厚变化率(%),作为耐化学品性的指标。
◎:膜厚変化率<5%
○:5%≤膜厚変化率<10%
△:10%≤膜厚変化率<15%
×:15%≤膜厚変化率
如表2所示,当合成化学增幅型正型感光性树脂组成物的树脂(A)的混合物中,包括不饱和羧酸单体(a-1)、含硅烷基的不饱和化合物(a-2)和含酸解离性基的单体(a-3)时,由化学增幅型正型感光性树脂组成物形成的保护膜可具有良好的显影密着性和耐化性。在某些实施例中,当此混合物进一步包括含环氧基的不饱和单体(a-4)时,且特别是具有氧杂环丁烷的不饱和单体,可进一步改善保护膜的显影密着性。在又一些实施例中,当化学增幅型正型感光性树脂组成物使用具有肟磺酸酯基的化合物的光酸产生剂(B)时,也可进一步改善保护膜的耐化性。
另一方面,如表3所示,倘若合成化学增幅型正型感光性树脂组成物的树脂(A)的混合物中,未使用含硅烷基的不饱和化合物(a-2)及/或含酸解离性基的单体(a-3)时,所制得的保护膜的耐化性和显影密着性都不佳。
应用本发明的化学增幅型正型感光性树脂组成物,借由特定的单体合成的树脂(A),可形成具有良好显影密着性和耐化性的保护膜。此保护膜可例如用于显示元件。
虽然本发明已以实施方式揭露如上,然其并非用以限定本发明,在本发明所属技术领域中任何具有通常知识者,在不脱离本发明的精神和范围内,当可作各种的更动与润饰,因此本发明的保护范围当视申请专利范围所界定者为准。
Claims (8)
1.一种化学增幅型正型感光性树脂组成物,其特征在于,该化学增幅型正型感光性树脂组成物包括:
树脂(A);
光酸产生剂(B);以及
溶剂(C),
其中,该树脂(A)是由混合物所共聚合而得,该混合物包括不饱和羧酸单体(a-1)、结构式(1-1)所示的含硅烷基的不饱和化合物(a-2),以及含结构式(2-1)所示的酸解离性基的单体(a-3):
在该结构式(1-1)中,该R1代表氢原子或甲基;该R2及该R3代表各自独立的碳数为1至12的烷基、苯基、碳数为1至6的烷氧基或结构式(1-2)所示的基团;当该R2及该R3为多个,各个该R2及该R3为相同或不同;该a代表1至6的整数;该b代表1至150的整数;该R4代表碳数为1至6的烷基或结构式(1-3)所示的基团;
在该结构式(1-2)中,该R5、该R6及该R7代表各自独立的碳数为1至12个的烷基或苯基;当该R6及该R7为多个,各个该R6及该R7为相同或不同;该c代表1至13的整数;及
在该结构式(1-3)中,该R8、该R9及该R10代表各自独立的碳数为1至12的烷基或苯基;
在该结构式(2-1)中,该R11和该R12各自独立为氢原子、烷基、脂环式烃基或芳基,其中该烷基、该脂环式烃基或该芳基所具有的氢原子的一部分或全部可被取代;而且,该R11及该R12不同时为氢原子;该R13为烷基、脂环式烃基、芳烷基或者芳基;其中该R13的该烷基、该脂环式烃基、该芳烷基及该芳基所具有的氢原子的一部分或全部可被取代;该R11与该R13可相互键结而与该R11所键结的碳原子以及该R13所键结的氧原子一起形成环状醚结构;
基于该混合物的使用量为100重量份,该不饱和羧酸单体(a-1)的使用量为5重量份至50重量份,该含硅烷基的不饱和化合物(a-2)的使用量为5重量份至50重量份,以及,该含酸解离性基的单体(a-3)的使用量为5重量份至90重量份。
2.根据权利要求1所述的化学增幅型正型感光性树脂组成物,其特征在于,该混合物包括含环氧基的不饱和单体(a-4)。
3.根据权利要求2所述的化学增幅型正型感光性树脂组成物,其特征在于,该含环氧基的不饱和单体(a-4)具有如下结构式(3-1)所示的结构的不饱和单体:
在该结构式(3-1)中,该R14代表氢原子或碳数为1至4的烷基;该R15代表氢原子或碳数为1至4的烷基;该R16、该R17、该R18及该R19分别独立地代表氢原子、氟原子、苯基、碳数为1至4的烷基或碳数为1至4的全氟烷基;且该a代表1至6的整数。
4.根据权利要求1所述的化学增幅型正型感光性树脂组成物,其特征在于,该光酸产生剂(B)为含下列结构式(4-1)的肟磺酸酯基的化合物:
在该结构式(4-1)中,该R20为碳数为1至20的烷基、脂环式烃基、芳基,或是上述基团所具有的氢原子被部分或全部取代的基团;以及,该*为键结处。
5.根据权利要求1所述的化学增幅型正型感光性树脂组成物,其特征在于,基于该树脂(A)的使用量为100重量份,该光酸产生剂(B)的使用量为0.1重量份至10重量份,该溶剂(C)的使用量为200重量份至2000重量份。
6.根据权利要求1所述的化学增幅型正型感光性树脂组成物,其特征在于,基于该混合物的使用量为100重量份,该含环氧基的不饱和单体(a-4)的使用量为5重量份至80重量份。
7.一种保护膜,其特征在于,该保护膜是将一如权利要求1至6任一项所述的化学增幅型正型感光性树脂组成物涂布于基材上,再经预烤、曝光、显影及后烤处理后所形成。
8.一种具有保护膜的元件,其特征在于,该具有保护膜的元件包含基材以及如权利要求7所述的保护膜。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW107145347 | 2018-12-14 | ||
TW107145347A TWI795489B (zh) | 2018-12-14 | 2018-12-14 | 化學增幅型正型感光性樹脂組成物及其應用 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN111324013A CN111324013A (zh) | 2020-06-23 |
CN111324013B true CN111324013B (zh) | 2023-12-01 |
Family
ID=71163278
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201911221344.4A Active CN111324013B (zh) | 2018-12-14 | 2019-12-03 | 化学增幅型正型感光性树脂组成物及其应用 |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN111324013B (zh) |
TW (1) | TWI795489B (zh) |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101876791A (zh) * | 2009-05-01 | 2010-11-03 | 富士胶片株式会社 | 正型感光性树脂组合物以及使用了该组合物的固化膜形成方法 |
CN102221781A (zh) * | 2010-04-14 | 2011-10-19 | Jsr株式会社 | 正型放射线敏感性组合物、层间绝缘膜及其形成方法 |
CN103376649A (zh) * | 2012-04-25 | 2013-10-30 | Jsr株式会社 | 感放射线性组合物、显示元件用层间绝缘膜以及其形成方法 |
CN104345567A (zh) * | 2013-07-25 | 2015-02-11 | 奇美实业股份有限公司 | 感光性聚硅氧烷组合物及其应用 |
JP2015069179A (ja) * | 2013-09-30 | 2015-04-13 | Jsr株式会社 | 感放射線性樹脂組成物、硬化膜、その形成方法、及び表示素子 |
CN105301898A (zh) * | 2014-07-31 | 2016-02-03 | Jsr株式会社 | 感放射线性树脂组合物、硬化膜及其形成方法以及显示元件 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6390125B2 (ja) * | 2014-03-13 | 2018-09-19 | Jsr株式会社 | 硬化性樹脂組成物、表示素子用硬化膜、その形成方法及び表示素子 |
-
2018
- 2018-12-14 TW TW107145347A patent/TWI795489B/zh active
-
2019
- 2019-12-03 CN CN201911221344.4A patent/CN111324013B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101876791A (zh) * | 2009-05-01 | 2010-11-03 | 富士胶片株式会社 | 正型感光性树脂组合物以及使用了该组合物的固化膜形成方法 |
CN102221781A (zh) * | 2010-04-14 | 2011-10-19 | Jsr株式会社 | 正型放射线敏感性组合物、层间绝缘膜及其形成方法 |
CN103376649A (zh) * | 2012-04-25 | 2013-10-30 | Jsr株式会社 | 感放射线性组合物、显示元件用层间绝缘膜以及其形成方法 |
CN104345567A (zh) * | 2013-07-25 | 2015-02-11 | 奇美实业股份有限公司 | 感光性聚硅氧烷组合物及其应用 |
JP2015069179A (ja) * | 2013-09-30 | 2015-04-13 | Jsr株式会社 | 感放射線性樹脂組成物、硬化膜、その形成方法、及び表示素子 |
CN105301898A (zh) * | 2014-07-31 | 2016-02-03 | Jsr株式会社 | 感放射线性树脂组合物、硬化膜及其形成方法以及显示元件 |
Also Published As
Publication number | Publication date |
---|---|
CN111324013A (zh) | 2020-06-23 |
TWI795489B (zh) | 2023-03-11 |
TW202021995A (zh) | 2020-06-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR101762150B1 (ko) | 포지티브형 감방사선성 조성물, 층간 절연막 및 그 형성 방법 | |
JP5817717B2 (ja) | ポジ型感放射線性組成物、表示素子用層間絶縁膜及びその形成方法 | |
US9541832B2 (en) | Photosensitive resin composition, protective film and element having the same | |
JP6318634B2 (ja) | 感光性シロキサン組成物、硬化膜及び素子 | |
KR20110110713A (ko) | 포지티브형 감방사선성 조성물, 층간 절연막 및 그 형성 방법 | |
KR102252030B1 (ko) | 경화성 수지 조성물, 표시 소자용 경화막, 그의 형성 방법 및 표시 소자 | |
TW201122728A (en) | Positive rediation-sensitive resin composition, interlayer insulation film and method for forming the same | |
CN106909028B (zh) | 感光性树脂组成物、保护膜以及液晶显示元件 | |
JP5630068B2 (ja) | ポジ型感放射線性組成物、層間絶縁膜及びその形成方法 | |
CN111324013B (zh) | 化学增幅型正型感光性树脂组成物及其应用 | |
JP2020084105A (ja) | アクリル重合化ポリシロキサン、これを含んでなる組成物、およびこれを用いた硬化膜 | |
CN111381438B (zh) | 化学增幅型正型感光性树脂组成物及其应用 | |
TWI796410B (zh) | 化學增幅型正型感光性樹脂組成物及其應用 | |
TWI665519B (zh) | 正型感光性樹脂組成物及其應用 | |
JP2015084109A (ja) | ポジ型感放射線性組成物、液晶表示素子用層間絶縁膜及び液晶表示素子の製造方法 | |
CN116360211A (zh) | 化学增幅型正型感光性树脂组成物、保护膜及具有保护膜的元件 | |
TWI818026B (zh) | 化學增幅型正型感光性樹脂組成物、保護膜及元件 | |
TWI830850B (zh) | 化學增幅型正型感光性樹脂組成物及其應用 | |
CN112394618A (zh) | 化学增幅型正型感光性树脂组成物及所制保护膜和组件 | |
CN115437214A (zh) | 化学增幅型正型感光性树脂组合物、保护膜以及具有保护膜的元件 | |
JP7063049B2 (ja) | 感放射線性組成物およびその用途 | |
KR20080011880A (ko) | 감광성 유기 절연막의 밀착성 개선을 위한 조성물 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |