CN111321388A - Diamond film de-coating method - Google Patents
Diamond film de-coating method Download PDFInfo
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- CN111321388A CN111321388A CN202010223554.3A CN202010223554A CN111321388A CN 111321388 A CN111321388 A CN 111321388A CN 202010223554 A CN202010223554 A CN 202010223554A CN 111321388 A CN111321388 A CN 111321388A
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- diamond film
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- containing gas
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0209—Pretreatment of the material to be coated by heating
- C23C16/0218—Pretreatment of the material to be coated by heating in a reactive atmosphere
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- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The invention discloses a diamond film de-coating method, which comprises the steps of heating a workpiece to a preset temperature, and contacting the surface of the workpiece with a diamond film with oxygen-containing gas to oxidize, burn and remove the diamond film. The diamond film de-coating method provided by the invention realizes the de-coating of the diamond film by adopting an oxidation combustion mode, has the advantages of good de-coating effect, high efficiency, convenience and simplicity in implementation and low cost, only the surface with the diamond film is contacted with oxygen-containing gas, so that the damage to a workpiece substrate material is avoided, the recovery quality of the workpiece substrate material is ensured, the service performance and the service life of a workpiece with the diamond film re-deposited are ensured, toxic and harmful gas harmful to human bodies is not used, and the emission pollution is small.
Description
Technical Field
The invention relates to the technical field of diamond films, in particular to a diamond film de-coating method.
Background
The diamond film is a diamond coating synthesized on a heterogeneous substrate by a Chemical Vapor Deposition (CVD) method, the technology is widely applied to cutting tools, hard alloy tools, dies and the like, the performance of the diamond film is close to that of natural diamond, the cutting speed and the processing efficiency of the cutting tools can be improved, the service life of the cutting tools is prolonged, the surfaces of the hard alloy tools and the dies can have the excellent characteristics of diamond, and the performances of the tools and the dies are improved.
When the diamond film is processed on the base material, the quality of the diamond film does not reach the standard, and the diamond film is worn or peeled off in the use process. However, the existing diamond film de-coating technology is complex and not easy to implement, and easily causes damage to the matrix material, thereby affecting the service performance and the service life of the workpiece.
Disclosure of Invention
The invention aims to solve the technical problems and the technical task of improving the prior art, provides a diamond film de-coating method and solves the problems that the diamond film de-coating method in the prior art easily causes damage to a substrate material and influences the service performance and the service life.
In order to solve the technical problems, the technical scheme of the invention is as follows:
a method for coating a diamond film includes heating a workpiece to a predetermined temperature, and contacting the surface of the workpiece having the diamond film with an oxygen-containing gas to oxidize and burn the diamond film. The diamond film de-coating method provided by the invention realizes the de-coating of the diamond film by using an oxidation combustion mode, the diamond is a carbon isomer, and can be oxidized and combusted to generate carbon dioxide under the conditions of a certain temperature and oxygen, so that the diamond film deposited on a workpiece substrate material can be effectively removed by using the oxidation combustion mode, the de-coating effect is good, the efficiency is high, the implementation is convenient and simple, the cost is low, the damage to the workpiece substrate material can be effectively avoided, the recovery quality of the workpiece substrate material is ensured, the workpiece service performance and the service life of the diamond film re-deposited are ensured, the oxygen-containing gas adopts pure oxygen or air and the like, toxic and harmful gas harmful to human bodies is not used, the main emission is carbon dioxide, and the emission pollution is small.
Furthermore, the preset temperature is 750-900 ℃, so that the diamond film can be fully combusted to generate carbon dioxide, and the de-coating efficiency is guaranteed.
Furthermore, the oxygen-containing gas continuously flows along the surface of the workpiece with the diamond film, and the oxygen-containing gas can take away carbon dioxide generated by combustion of the diamond film, so that the stable and efficient oxidation combustion rate of the diamond film is ensured, and the coating stripping efficiency of the diamond film is ensured.
Furthermore, the surface of the workpiece without the diamond film is covered to avoid the contact with oxygen-containing gas, so that the surface of the workpiece without the diamond film is prevented from being oxidized due to the contact with the oxygen-containing gas at high temperature, and the coating stripping recovery quality of the workpiece is guaranteed.
Furthermore, the workpiece is provided with an inner hole, the wall surface of the inner hole is provided with a diamond film, the workpiece is placed in a sleeve pipe, the inner diameter of the sleeve pipe is matched with the periphery of the workpiece, in addition, the axial direction of the inner hole of the workpiece is along the axial direction of the sleeve pipe, oxygen-containing gas is introduced along the axial direction of the sleeve pipe so that the oxygen-containing gas flows through the inner hole of the workpiece, the sleeve pipe plays a role in positioning and fixing the workpiece, the sleeve pipe wraps the periphery of the workpiece, the inner diameter of the sleeve pipe is matched with the periphery of the workpiece, so that the gap between the sleeve pipe and the workpiece is small, most of the oxygen-containing gas flows through the inner hole of the workpiece in a concentrated manner, the surface of the workpiece, which is not provided with the diamond film, is prevented from being oxidized at high temperature due to the contact of, ensuring the coating stripping sufficiency and avoiding the residual diamond film on the wall surface of the inner hole.
Furthermore, the heating device for heating the workpiece is arranged on the periphery of the sleeve, so that the heating is convenient, the workpiece is heated when the oxygen-containing gas flows through the inner hole of the workpiece, the coating removing effect is guaranteed, the damage to the workpiece base material can be effectively avoided, and the recovery quality of the workpiece base material is guaranteed.
Furthermore, the heating device is an induction heater, alternating current is utilized to generate an alternating magnetic field, and the alternating magnetic field enables eddy current to be generated inside the metal conductor, so that the metal workpiece can rapidly generate heat, the temperature of the workpiece is increased mainly by metal, the heating efficiency is high, the electric energy utilization rate is high, the environment is protected, the energy is saved, and the heating energy consumption is low.
Furthermore, the two ends of the sleeve are connected with end pieces used for limiting the workpiece in the sleeve, the end pieces are provided with vent holes which are right opposite to inner holes of the workpiece and matched with the diameters of inner holes of the workpiece, oxygen-containing gas enters the sleeve along the vent holes, the end pieces guarantee that the workpiece can be stably positioned in the sleeve in the coating removing process, the workpiece is prevented from being flushed out of the sleeve by the oxygen-containing gas, the end pieces play a role in guiding the oxygen-containing gas, the diameters of the vent holes are matched with the diameters of the inner holes of the workpiece, oxygen-containing gas can pass through the inner holes of the workpiece in a concentrated mode, the inner holes of the workpiece are guaranteed to be always in a fully-combusted gas condition, the diamond film oxidation combustion efficiency is guaranteed, the coating removing efficiency is improved, unnecessary oxidation of the workpiece caused by the fact that the oxygen.
Furthermore, a plurality of workpieces are arranged along the axial direction of the sleeve, so that the workpieces can be simultaneously subjected to de-coating processing, and the processing efficiency is improved.
Furthermore, the flow of the oxygen-containing gas is 5-30 ml/min, the completeness of oxidation and combustion of the diamond film is guaranteed, and the coating stripping efficiency is improved.
Compared with the prior art, the invention has the advantages that:
the diamond film de-coating method provided by the invention realizes the de-coating of the diamond film by adopting an oxidation combustion mode, has the advantages of good de-coating effect, high efficiency, convenience and simplicity in implementation and low cost, only the surface with the diamond film is contacted with oxygen-containing gas, so that the damage to a workpiece substrate material is avoided, the recovery quality of the workpiece substrate material is ensured, the service performance and the service life of a workpiece with the diamond film re-deposited are ensured, the oxygen-containing gas adopts pure oxygen or air and the like, no toxic and harmful gas harmful to human bodies is used, the main emission is carbon dioxide, and the emission pollution is small.
Drawings
FIG. 1 is a schematic structural diagram of a device adopted in a diamond film de-coating method.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The diamond film de-coating method disclosed by the embodiment of the invention is convenient and simple to implement, low in cost and high in de-coating efficiency, can effectively remove the diamond film and recover the base material, does not damage the base material, and ensures the service performance and the service life of a workpiece for re-depositing the diamond film.
A method for removing a diamond film comprises the steps of adopting a diamond film oxidation combustion mode to achieve removing, heating a workpiece to a preset temperature of 750-900 ℃, preferably 850 ℃, and enabling the surface of the workpiece with the diamond film to be in contact with oxygen-containing gas, so that the diamond film is removed through oxidation combustion.
Under the high temperature condition, the substrate material of the workpiece is also easily oxidized when being contacted with the oxygen-containing gas, so that the substrate material is easily damaged, therefore, the surface of the workpiece with the diamond film is contacted with the oxygen-containing gas, and simultaneously the surface of the workpiece without the diamond film is required to be covered to avoid the oxidation caused by the contact of the surface of the workpiece with the oxygen-containing gas; in order to improve the stripping efficiency, the combustion sufficiency of the diamond film needs to be ensured, carbon dioxide is generated during the combustion of the diamond film, and the carbon dioxide needs to be discharged to avoid influencing the combustion of the diamond film, so that a mode that oxygen-containing gas continuously flows along the surface of the workpiece with the diamond film is adopted, the oxygen-containing gas continuously supplements new oxygen for the combustion of the diamond film, and simultaneously takes away the carbon dioxide, thereby ensuring the combustion sufficiency of the diamond film.
The diamond film de-coating device based on the diamond film de-coating method is shown in figure 1, the workpiece 4 is a mold core with an inner hole, a diamond film is deposited on the wall surface of the inner hole, when the deposition quality of the diamond film is in a problem or the diamond film is worn after use, the diamond film is removed by the diamond film de-coating method, a base material is recovered, and then the diamond film is re-deposited to realize repeated recycling;
the workpiece 4 is placed in the sleeve 1, the axial direction of the inner hole of the workpiece 4 is along the axial direction of the sleeve 1, the inner diameter of the sleeve 1 is matched with the periphery of the workpiece, the inner diameter of the sleeve is larger than 0.1-0.2 mm of the outer diameter of the workpiece, a workpiece expansion gap is reserved, the gap between the inner wall of the sleeve and the periphery of the workpiece is reduced as much as possible, the heating device 3 is arranged on the periphery of the sleeve 1, oxygen-containing gas passes through the inner hole of the workpiece 4 along the axial direction of the sleeve 1, the gap between the inner wall of the sleeve and the periphery of the workpiece is small, so that oxygen-containing gas can intensively pass through the inner hole of the workpiece 4, the sleeve 1 plays a role of covering the periphery of the workpiece 4 while positioning and fixing the workpiece 4, the periphery;
the two ends of the sleeve 1 are connected with end pieces 2 used for limiting the workpiece 4 in the sleeve 1, the end pieces 2 are provided with vent holes facing inner holes of the workpiece 4, and the vent holes are matched with the inner hole diameters of the workpiece 4, namely, the inner hole diameters of the workpiece 4 are increased, the aperture diameters of the vent holes can be increased, the inner hole diameters of the workpiece 4 are reduced, the aperture diameters of the vent holes need to be correspondingly reduced, the aperture diameters of the vent holes are matched with the inner hole diameters of the workpiece, so that oxygen-containing gas entering the sleeve 1 from the vent holes can intensively pass through the inner holes of the workpiece along the inner holes of the workpiece, the inner holes of the workpiece are ensured to be always in a fully combusted gas condition, unnecessary oxidation of base materials of the workpiece caused by the fact;
specifically, the sleeve 1 and the end piece 2 are made of quartz glass, so that the sleeve 1 and the end piece 2 are high temperature resistant, good in use stability and long in service life, the heating device 3 is an induction heater, the workpiece 4 is specifically a metal workpiece, the induction heater generates an alternating magnetic field by using alternating current to enable eddy current to be generated inside the metal workpiece, so that the metal workpiece is heated rapidly, the heating efficiency is high, the electric energy utilization rate is high, the sleeve 1 and the end piece 2 are environment-friendly and energy-saving, the sleeve 1 and the end piece 2 cannot be directly heated by the induction heater, and the service lives of;
and, sleeve pipe 1 is a long siphunculus, and its inside can hold a plurality of work piece simultaneously, and work piece 4 arranges in proper order along the sleeve pipe axial in sleeve pipe 1, and the hole of work piece 4 is arranged into a straight line, and the air vent of end piece 2 also arranges on a straight line with the hole of work piece 4, ensures that the oxygen-containing gas that lets in the sleeve pipe along the air vent can be smooth and easy flows along the work piece hole, and the burning of guarantee diamond film is abundant, improves and moves back scribbles efficiency.
The oxygen-containing gas is specifically compressed pure oxygen or air and the like, toxic and harmful gas harmful to human bodies is not needed, the flow rate of the oxygen-containing gas is 5-30 ml/min, the current of the induction heater is 550-650A, the mold core is heated to 800-850 ℃, and the heating is carried out for 5-10 min, so that the diamond film in the inner hole of the workpiece can be effectively removed, and the substrate material of the workpiece cannot be damaged.
The above is only a preferred embodiment of the present invention, and it should be noted that the above preferred embodiment should not be considered as limiting the present invention, and the protection scope of the present invention should be subject to the scope defined by the claims. It will be apparent to those skilled in the art that various modifications and adaptations can be made without departing from the spirit and scope of the invention, and these modifications and adaptations should be considered within the scope of the invention.
Claims (10)
1. A diamond film de-coating method is characterized in that a workpiece is heated to a preset temperature, and the surface of the workpiece with a diamond film is contacted with oxygen-containing gas to oxidize, burn and remove the diamond film.
2. The method for deplating a diamond film according to claim 1, wherein the preset temperature is 750-900 ℃.
3. The method for deplating a diamond film according to claim 1, wherein the oxygen-containing gas is continuously flowed along the surface of the workpiece having the diamond film.
4. The method for deplating a diamond film according to claim 1, wherein the surface of the workpiece on which the diamond film is not provided is covered so as not to be in contact with the oxygen-containing gas.
5. The method for deplating a diamond film according to any one of claims 1 to 4, wherein the workpiece has an inner hole and the inner hole wall surface has the diamond film, the workpiece is placed in a sleeve having an inner diameter matching the outer periphery of the workpiece, and the inner hole of the workpiece is axially directed along the sleeve, and an oxygen-containing gas is introduced axially along the sleeve to flow the oxygen-containing gas through the inner hole of the workpiece.
6. The method for deplating a diamond film as recited in claim 5, wherein a heating device for heating the workpiece is provided on the outer periphery of the sleeve.
7. The diamond film decoating method according to claim 6, wherein the heating means is an induction heater.
8. The method for deplating a diamond film according to claim 5, wherein the two ends of the sleeve are connected with end pieces for limiting the workpiece in the sleeve, and the end pieces are provided with vent holes which are opposite to the inner hole of the workpiece and are matched with the diameter of the inner hole of the workpiece.
9. The method for deplating a diamond film according to claim 5, wherein the workpiece is arranged in a plurality along the axial direction of the sleeve.
10. The method for deplating a diamond film according to claim 5, wherein the flow rate of the oxygen-containing gas is 5 to 30 ml/min.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010223554.3A CN111321388A (en) | 2020-03-26 | 2020-03-26 | Diamond film de-coating method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010223554.3A CN111321388A (en) | 2020-03-26 | 2020-03-26 | Diamond film de-coating method |
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| CN111321388A true CN111321388A (en) | 2020-06-23 |
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| CN202010223554.3A Pending CN111321388A (en) | 2020-03-26 | 2020-03-26 | Diamond film de-coating method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112111726A (en) * | 2020-09-30 | 2020-12-22 | 久钻科技(成都)有限公司 | Coating stripping tool for surface coating of inner hole of macroporous mold and using method thereof |
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| US20110312148A1 (en) * | 2010-06-18 | 2011-12-22 | Applied Materials, Inc. | Chemical vapor deposition of ruthenium films containing oxygen or carbon |
| CN105244069A (en) * | 2015-08-31 | 2016-01-13 | 中科华核电技术研究院有限公司 | High-specific-activity radioactive source core target, radioactive rod and novel thimble plug assembly |
| CN105695949A (en) * | 2016-02-24 | 2016-06-22 | 苏州乐晶新材料科技有限公司 | Coating removing method for diamond coated tool |
| CN106245000A (en) * | 2015-06-09 | 2016-12-21 | 信越化学工业株式会社 | The manufacture method of thermal decomposition boron nitride receptacle and thermal decomposition boron nitride receptacle |
| CN107236926A (en) * | 2017-05-05 | 2017-10-10 | 星弧涂层新材料科技（苏州）股份有限公司 | DLC film physics moves back film method and moves back film device |
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2020
- 2020-03-26 CN CN202010223554.3A patent/CN111321388A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20110312148A1 (en) * | 2010-06-18 | 2011-12-22 | Applied Materials, Inc. | Chemical vapor deposition of ruthenium films containing oxygen or carbon |
| CN106245000A (en) * | 2015-06-09 | 2016-12-21 | 信越化学工业株式会社 | The manufacture method of thermal decomposition boron nitride receptacle and thermal decomposition boron nitride receptacle |
| CN105244069A (en) * | 2015-08-31 | 2016-01-13 | 中科华核电技术研究院有限公司 | High-specific-activity radioactive source core target, radioactive rod and novel thimble plug assembly |
| CN105695949A (en) * | 2016-02-24 | 2016-06-22 | 苏州乐晶新材料科技有限公司 | Coating removing method for diamond coated tool |
| CN107236926A (en) * | 2017-05-05 | 2017-10-10 | 星弧涂层新材料科技（苏州）股份有限公司 | DLC film physics moves back film method and moves back film device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112111726A (en) * | 2020-09-30 | 2020-12-22 | 久钻科技(成都)有限公司 | Coating stripping tool for surface coating of inner hole of macroporous mold and using method thereof |
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Application publication date: 20200623 |
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