CN111308125A - Acceleration detection method based on optical fiber Sagnac interferometer and acceleration meter - Google Patents
Acceleration detection method based on optical fiber Sagnac interferometer and acceleration meter Download PDFInfo
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- CN111308125A CN111308125A CN202010113880.9A CN202010113880A CN111308125A CN 111308125 A CN111308125 A CN 111308125A CN 202010113880 A CN202010113880 A CN 202010113880A CN 111308125 A CN111308125 A CN 111308125A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/093—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by photoelectric pick-up
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
- G01H9/004—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means using fibre optic sensors
Abstract
The invention discloses a method for detecting acceleration based on an optical fiber Sagnac interferometer and an acceleration meter, wherein the method comprises the following steps: the acceleration type probe is adopted and comprises an optical fiber, the optical fiber connects a stator of the acceleration type probe with a mass block, and an acceleration signal of mechanical vibration is converted into an acceleration signal through an interferometer structure. One optional structure of the accelerometer of the present invention is: the optical fiber ring polarization beam splitter comprises a light source, wherein the light source is connected with a beam combining end of a Y-shaped waveguide through a circulator, the circulator is used for inputting signal light output by the light source into the Y-shaped waveguide to perform polarization, modulation and beam splitting, one beam splitting end of the Y-shaped waveguide is connected with one end of an optical fiber ring, and the other beam splitting end of the Y-shaped waveguide is connected with the other end of the optical fiber ring through an acceleration probe; the circulator is connected with a photoelectric detector and is used for inputting the light returned by the Y-shaped waveguide into the photoelectric detector. The invention provides a new research angle for monitoring mechanical waves and has wide application prospect.
Description
Technical Field
The invention relates to a method for detecting acceleration based on an optical fiber Sagnac interferometer and an acceleration meter, which can be used in the field of monitoring of mechanical wave fields, such as natural seismic field monitoring, artificial seismic source response monitoring, building earthquake-resistant experiments, mineral resource development, geophysical exploration, geological disaster early warning and other engineering and scientific research fields.
Background
The mechanical wave is a macroscopic vibration wave formed by mass points in a medium due to the transmission effect among the mass points, and sound waves, seismic waves and the like in nature belong to the category of mechanical waves.
Monitoring the mechanical wave may reflect the physical properties of the medium in the mechanical wave propagation path. For example, natural seismic field monitoring can be realized by picking up displacement, speed or acceleration information of natural seismic waves by using a ground sensor, calculating medium wave impedance information of a path between a seismic wave source and the sensor through a wave equation theory, and further reversely pushing an underground structure to provide data support for deep research.
The existing mechanical wave monitoring sensor mainly adopts a speed type and an acceleration type, the displacement type has a poor use range due to the precision, the acceleration type sensor (namely, an accelerometer) is not published, and the method can be used for manufacturing the sensor and fills the gap.
Disclosure of Invention
Compared with an acceleration type sensor, the acceleration is a derivative function of acceleration mathematically, so that compared with the acceleration type sensor, the method for manufacturing the optical fiber acceleration sensor has more sensitive response to data change and wide application prospect. In addition, different examples are designed according to the cost budget and the precision requirement of the application scene, and the method can adapt to wider scenes.
The technical scheme of the invention is as follows:
the acceleration detection method based on the optical fiber Sagnac interferometer is characterized in that an acceleration type probe is adopted, the acceleration type probe comprises an optical fiber, a stator of the acceleration type probe is connected with a mass block through the optical fiber, and acceleration signals of mechanical vibration are converted into optical signal phase signals.
Furthermore, a Sagnac interferometer light path structure is adopted to convert a phase signal of the acceleration type probe, which is proportional to the vibration acceleration intensity of the mechanical wave, into a vibration acceleration signal of the mechanical wave.
Furthermore, an optical fiber ring in the light path structure of the Sagnac interferometer is a zero-area optical fiber ring, an optical fiber of the zero-area optical fiber ring is wound from one end to the tail end, the winding direction is changed from the tail end to the tail end, the optical fiber is wound back to the initial end in parallel and in a reverse direction, and the effective area of the Sagnac effect of the zero-area optical fiber ring is zero.
An optical fiber acceleration meter based on a Sagnac interferometer is characterized by comprising a light source, wherein the light source is connected with a beam combining end of a Y-shaped waveguide through a circulator, the circulator is used for inputting signal light output by the light source into the Y-shaped waveguide to perform polarization, modulation and beam splitting, a beam splitting end of the Y-shaped waveguide is connected with one end of an optical fiber ring, and the other beam splitting end of the Y-shaped waveguide is connected with the other end of the optical fiber ring through an acceleration probe; the circulator is connected with a photoelectric detector and is used for inputting the light returned by the Y-shaped waveguide into the photoelectric detector.
Furthermore, one beam splitting end of the Y-shaped waveguide is connected with one end of the optical fiber ring through a first depolarizer, and the other beam splitting end of the Y-shaped waveguide is connected with the other end of the optical fiber ring through a second depolarizer and the acceleration probe.
An accelerometer based on an optical fiber Sagnac interferometer is characterized by comprising a light source, a light source and an optical fiber ring, wherein the light source is connected with the optical fiber ring through a2 x 2 coupler; one port a1 of the two ports on the same side of the coupler is connected with the light source, the other port a2 of the two ports on the same side of the coupler is connected with a photoelectric detector, one port b1 of the two ports on the other side of the coupler is connected with one end of the optical fiber ring through an accelerometer probe, and the other port b2 of the two ports is connected with the other end of the optical fiber ring through a PZT modulator.
Further, the light source is connected with the port a1 of the coupler through a polarizer; the port b1 of the coupler is connected with one end of the optical fiber ring through a first depolarizer and the accelerometer probe, and the port b2 is connected with the other end of the optical fiber ring through a second depolarizer and the PZT modulator.
An accelerometer based on a fiber Sagnac interferometer is characterized by comprising a light source, a coupler, a fiber loop and a photoelectric detector, wherein the light source is connected with a3 x 3 coupler through a circulator, and the other side of the coupler is connected with the fiber loop; wherein, one port a1 of the three ports on the same side of the coupler is connected with a second photoelectric detector, one port a2 is connected with the light source through the circulator, the other port a3 is connected with a third photoelectric detector, one port b1 of the two ports on the other side of the coupler is connected with one end of the optical fiber ring through an accelerometer probe, and the other port b2 is connected with the other end of the optical fiber ring; the circulator is used for inputting signal light output by the light source into the optical fiber ring through the coupler, and is connected with a first photoelectric detector and used for inputting light returned by the coupler into the first photoelectric detector.
Further, the circulator is connected to port a2 of the coupler via a polarizer, port b1 of the coupler is connected to one end of the fiber ring via a first depolarizer, the accelerometer probe is connected to one end of the fiber ring, and port b2 is connected to the other end of the fiber ring via a second depolarizer.
Further, the photoelectric detector is connected with a signal processing unit, and the signal processing unit calculates the light intensity obtained by the photoelectric detector by utilizing a PGC method
Further calculating to obtain the acceleration; wherein the content of the first and second substances,
for the phase shift produced on the accelerometer probe by the action of the vibration of the mechanical wave at time t,
l is the length of the fiber ring, n is the fiber refractive index, and c is the speed of light.
Further, the signal processing unit is based on a formula
Calculating to obtain the acceleration
Further, the optical fiber ring is a zero-area optical fiber ring.
Further, the zero-area optical fiber ring is a single-mode zero-area optical fiber ring or a polarization-maintaining zero-area optical fiber ring.
An example of a system according to the invention is shown in figure 1. The signal light starts from the light source and passes through the circulator to prevent the non-return light from reversely entering the laser; the light is split and modulated by the Y-shaped waveguide to achieve the purposes of splitting the beam and improving the anti-interference characteristic of the signal; then, the acceleration information of the probe is converted into jerk information through the method of the invention by the optical fiber ring and the acceleration type probe, and the return light photoelectric detector extracts a digital jerk signal.
The optical fiber accelerometer provided by the invention measures acceleration information based on optical signals, and signals are transmitted in optical fibers during sensing (namely mechanical wave action), so that the optical fiber accelerometer can resist electromagnetic interference and corrosion and can be suitable for severe environments based on the characteristics of the optical fibers; because the optical signal is adopted, the transmission speed is high, and the rapid measurement can be realized; the detection precision can be greatly improved by an optical sensing mode based on an interferometer optical path system; because the Sagnac interferometer is a reciprocity light path, compared with other interferometer light path structures, the detection mode based on the Sagnac interferometer can greatly reduce nonreciprocal noise in the light path and improve the signal-to-noise ratio of signals.
The embodiments of the present invention are as follows:
as shown in fig. 1, this patent uses an acceleration type probe that converts the vibratory action of mechanical waves into a phase signal proportional to the mechanical vibration acceleration intensity. Specifically, in fig. 2: a is a mass block, B is an optical fiber wound between the stator C and the mass block A, and light enters from the input port 4 and exits from the output port 5. When there is mechanical wave vibration, the vibration is sensed by the stator near the ground or the seismic source, and the system can be regarded as a mass block-spring system, so the stretching length of the optical fiber is in direct proportion to the acceleration intensity of the mechanical wave; the phase of the optical signal transmitted in the optical fiber will also shift according to the stress-strain effect of the optical fiber, and the shift is proportional to the acceleration intensity of the mechanical wave. The vibration of the mechanical wave is applied to the acceleration type probe to generate a phase shift
As shown in fig. 2, the optical fiber ring is a zero-area optical fiber ring, and the winding method thereof is different from a general optical fiber winding method in a certain degree, and the specific method is as follows: the optical fiber is wound from one end to the tail end, the winding direction is changed, and the optical fiber is wound back to the initial end in parallel and reversely; quadrupole symmetry equal winding can still be used between layers of the wound optical fiber to reduce the influence of the temperature field. By such a winding, incident and outgoing light respectively propagate in opposite annular directions, and according to the Sagnac effect, light passes through such a ring with zero effective area of the Sagnac effect, so the Sagnac phase shift due to the angular velocity of the ring is not present, i.e. an effective area of the ring of 0 is achieved, hence the so-called zero-area ring. Will be provided with
Spread out at t- τ:
for a fiber loop with a length L-10 km,
at this time τ2～10- 9s, at this time τ2Term and higher order infinite term o (tau)2) Can be ignored, then:
wherein
I.e. jerk.
For the light path of the Sagnac interferometer shown in fig. 1, let the input light field of the beam combining port 1 be E0，
Phase shifting of modulation of Y-shaped waveguides, in which modulation is for signal transportAnd moving to a modulation frequency point with higher frequency to avoid the interference of low-frequency instrument noise. According to the modulation and light splitting properties of the Y-type waveguide, the optical fields of the first and second beam splitting ports 2 and 3 are:
the resulting light intensity at the photodetector is thus:
expressed by the formula (2) by the PGC method
Obtaining the jerk
The attached figures 1, 4, 5 and 6 respectively show a high-precision polarization-maintaining Sagnac structure optical fiber plus accelerometer scheme, a high-precision polarization-eliminating Sagnac structure optical fiber plus accelerometer scheme, a medium-low cost polarization-maintaining Sagnac structure optical fiber plus accelerometer scheme and a low-cost polarization-eliminating single-mode optical fiber plus accelerometer scheme based on the principle according to the cost budget and the precision requirement of an application scene.
The principle can be realized by adopting a six-port 3 × 3 coupler, and compared with the prior two-port device (Y-shaped waveguide or 2 × 2 coupler), the principle does not need a modulator (Y-shaped waveguide or PZT modulator), and the modulation and demodulation of signals can be realized by the self-phase shift of the 3 × 3 coupler and three paths of output signals. The three-way output signal (i.e., the detection signals of the three photodetectors) due to the 3 × 3 coupler exists
As shown in fig. 7, the three signals are:
the sum of the average of the formula (6), the formula (7) and the formula (8) can be obtained
The direct current quantity can be removed by subtracting the formula (6), the formula (7) and the formula (8); note the book
Two paths of the three paths of signals without the direct current are differentiated and subtracted, and are multiplied by the other path at the same time, so that a new three paths of signals can be obtained:
by adding the equations (9), (10) and (11), it is possible to obtain:
integrating the signal and passing through a high-pass filter to obtain the required phi (t) and further obtain the acceleration
Fig. 7 and fig. 8 show a low-cost polarization-maintaining Sagnac structured fiber-optic plus accelerometer scheme and a low-cost polarization-eliminating Sagnac structured fiber-optic plus accelerometer scheme based on the principle.
Compared with the prior art, the invention has the following positive effects:
the invention provides an optical fiber and accelerometer, which fills the blank in the field of optical fiber and accelerometer, and can provide a new research angle for mechanical wave monitoring due to the sensitivity of the optical fiber and accelerometer to data change. In addition, the optical fiber accelerometer is based on an anti-EMI and high-stability optical fiber, can be suitable for a more severe field environment, can greatly reduce the requirement on mechanical wave detection, and can quickly and accurately measure the acceleration information of mechanical waves; because the Sagnac interferometer is a reciprocity light path, compared with other interferometer light path structures, the detection mode based on the Sagnac interferometer can greatly reduce nonreciprocal noise in the light path and improve the signal-to-noise ratio of signals.
Drawings
FIG. 1 is a schematic diagram of a high precision polarization maintaining Sagnac structure fiber optic plus accelerometer;
FIG. 2 is a schematic view of an acceleration-type probe;
FIG. 3 is a schematic view of a zero area fiber loop winding process;
FIG. 4 is a schematic diagram of a high precision depolarized Sagnac structured fiber plus accelerometer;
FIG. 5 is a schematic diagram of a medium to low cost polarization-preserving Sagnac structure fiber optic plus accelerometer;
FIG. 6 is a schematic diagram of a low cost depolarized single mode fiber plus accelerometer;
FIG. 7 is a schematic diagram of a medium to low cost polarization-preserving Sagnac structure fiber optic plus accelerometer;
FIG. 8 is a schematic diagram of a low cost depolarized single mode fiber plus accelerometer.
The system comprises a 1-beam combination port, a 2-first beam splitting port, a 3-second beam splitting port, a 3-input port and a 4-output port, wherein the beam combination port is connected with the 3-input port; a-mass block, B-optical fiber and C-stator.
Detailed Description
The present invention is described in further detail below with reference to the attached drawings.
Scheme 1: the optical path structure of the scheme is shown in the attached figure 1, wherein the manufacturing method of the zero-area optical fiber ring is shown in the attached figure 2: the optical fiber is wound from one end, the winding direction is changed from the tail end to the tail end, and the optical fiber is wound back to the initial end in parallel and reversely, so that the effective area of the optical fiber ring is ensured to be 0; quadrupole symmetry equal winding can still be used between layers of the wound optical fiber to reduce the influence of the temperature field. The scheme reduces the influence of polarization randomness, and can realize high-precision optical fiber and accelerometer based on the polarization-preserving Sagnac interferometer.
Scheme 2: the optical path structure of the scheme is shown in the attached figure 4, wherein the manufacturing method of the zero-area optical fiber ring is shown in the attached figure 2: the optical fiber is wound from one end, the winding direction is changed from the tail end to the tail end, and the optical fiber is wound back to the initial end in parallel and reversely, so that the effective area of the optical fiber ring is ensured to be 0; quadrupole symmetry equal winding can still be used between layers of the wound optical fiber to reduce the influence of the temperature field. The scheme also reduces the influence of polarization randomness, and can realize the high-precision fiber-plus-accelerometer based on the depolarization Sagnac interferometer.
Scheme 3: the optical path structure of the scheme is shown in the attached figure 5, wherein the manufacturing method of the zero-area optical fiber ring is shown in the attached figure 2: the optical fiber is wound from one end, the winding direction is changed from the tail end to the tail end, and the optical fiber is wound back to the initial end in parallel and reversely, so that the effective area of the optical fiber ring is ensured to be 0; quadrupole symmetry equal winding can still be used between layers of the wound optical fiber to reduce the influence of the temperature field. The scheme adopts the polarization maintaining optical fiber, so that the influence of polarization randomness is reduced; and because the Y-shaped waveguide is replaced by the 2 multiplied by 2 coupler, the cost is reduced, and the fiber-optic accelerometer based on the polarization-maintaining Sagnac interferometer with low cost and medium cost can be realized.
Scheme 4: the optical path structure of the scheme is shown in the attached figure 6, wherein the manufacturing method of the zero-area optical fiber ring is shown in the attached figure 2: the optical fiber is wound from one end, the winding direction is changed from the tail end to the tail end, and the optical fiber is wound back to the initial end in parallel and reversely, so that the effective area of the optical fiber ring is ensured to be 0; quadrupole symmetry equal winding can still be used between layers of the wound optical fiber to reduce the influence of the temperature field. In the scheme, the Y-shaped waveguide is replaced by the combination of the 2 multiplied by 2 coupler and the optical polarizer, and the polarization maintaining fiber is replaced by the single-mode fiber, so that the cost is reduced, and the fiber and accelerometer based on the depolarization Sagnac interferometer with low cost can be realized.
Scheme 5: the optical path structure of the scheme is shown in the attached figure 7, wherein the manufacturing method of the zero-area optical fiber ring is shown in the attached figure 2: the optical fiber is wound from one end, the winding direction is changed from the tail end to the tail end, and the optical fiber is wound back to the initial end in parallel and reversely, so that the effective area of the optical fiber ring is ensured to be 0; quadrupole symmetry equal winding can still be used between layers of the wound optical fiber to reduce the influence of the temperature field. The scheme adopts the polarization maintaining optical fiber, so that the influence of polarization randomness is reduced; and because the Y-shaped waveguide is replaced by the 3 multiplied by 3 coupler, a modulator is omitted, the cost is reduced, and the fiber-optic accelerometer based on the polarization-preserving Sagnac interferometer with low cost and medium cost can be realized.
Scheme 6: the optical path structure of the scheme is shown in the attached figure 8, wherein the manufacturing method of the zero-area optical fiber ring is shown in the attached figure 2: the optical fiber is wound from one end, the winding direction is changed from the tail end to the tail end, and the optical fiber is wound back to the initial end in parallel and reversely, so that the effective area of the optical fiber ring is ensured to be 0; quadrupole symmetry equal winding can still be used between layers of the wound optical fiber to reduce the influence of the temperature field. In the scheme, the Y-shaped waveguide is replaced by the combination of the 3 multiplied by 3 coupler and the optical polarizer, the polarization maintaining fiber is replaced by the single-mode fiber, the modulator is omitted, the cost is reduced, and the low-cost fiber and accelerometer based on the depolarization Sagnac interferometer can be realized.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.
Claims (13)
1. The acceleration detection method based on the optical fiber Sagnac interferometer is characterized in that an acceleration type probe is adopted, the acceleration type probe comprises an optical fiber, a stator of the acceleration type probe is connected with a mass block through the optical fiber, and acceleration signals of mechanical vibration are converted into optical signal phase signals.
2. The method for detecting the jerk based on the fiber Sagnac interferometer of claim 1, wherein a light path structure of the Sagnac interferometer is adopted to convert a phase signal proportional to the intensity of the vibration acceleration of the mechanical wave of the acceleration type probe into a vibration jerk signal of the mechanical wave.
3. The method of claim 2, wherein the fiber loop in the optical path structure of the Sagnac interferometer is a zero-area fiber loop, the fiber of the zero-area loop is wound from one end, the winding direction is changed from the tail end to the tail end, the fiber is wound back to the initial end in parallel and in reverse, and the effective area of the Sagnac effect of the zero-area loop is zero.
4. An accelerometer based on an optical fiber Sagnac interferometer is characterized by comprising a light source, wherein the light source is connected with a beam combining end of a Y-shaped waveguide through a circulator, the circulator is used for inputting signal light output by the light source into the Y-shaped waveguide to perform polarization, modulation and beam splitting, a beam splitting end of the Y-shaped waveguide is connected with one end of an optical fiber ring, and the other beam splitting end of the Y-shaped waveguide is connected with the other end of the optical fiber ring through an acceleration probe; the circulator is connected with a photoelectric detector and is used for inputting the light returned by the Y-shaped waveguide into the photoelectric detector.
5. The fiber Sagnac interferometer-based accelerometer of claim 4, wherein one split end of the Y-waveguide is connected to one end of the fiber loop via a first depolarizer, and the other split end of the Y-waveguide is connected to the other end of the fiber loop via a second depolarizer and the acceleration probe.
6. An accelerometer based on an optical fiber Sagnac interferometer is characterized by comprising a light source, a light source and an optical fiber ring, wherein the light source is connected with the optical fiber ring through a2 x 2 coupler; one port a1 of the two ports on the same side of the coupler is connected with the light source, the other port a2 of the two ports on the same side of the coupler is connected with a photoelectric detector, one port b1 of the two ports on the other side of the coupler is connected with one end of the optical fiber ring through an accelerometer probe, and the other port b2 of the two ports is connected with the other end of the optical fiber ring through a PZT modulator.
7. The fiber-optic Sagnac interferometer-based accelerometer of claim 6, wherein the light source is connected to port a1 of the coupler via a polarizer; the port b1 of the coupler is connected with one end of the optical fiber ring through a first depolarizer and the accelerometer probe, and the port b2 is connected with the other end of the optical fiber ring through a second depolarizer and the PZT modulator.
8. An accelerometer based on a fiber Sagnac interferometer is characterized by comprising a light source, a coupler, a fiber loop and a photoelectric detector, wherein the light source is connected with a3 x 3 coupler through a circulator, and the other side of the coupler is connected with the fiber loop; wherein, one port a1 of the three ports on the same side of the coupler is connected with a second photoelectric detector, one port a2 is connected with the light source through the circulator, the other port a3 is connected with a third photoelectric detector, one port b1 of the two ports on the other side of the coupler is connected with one end of the optical fiber ring through an accelerometer probe, and the other port b2 is connected with the other end of the optical fiber ring; the circulator is used for inputting signal light output by the light source into the optical fiber ring through the coupler, and is connected with a first photoelectric detector and used for inputting light returned by the coupler into the first photoelectric detector.
9. The fiber Sagnac interferometer-based accelerometer of claim 8, wherein the circulator is connected to port a2 of the coupler via a polarizer, port b1 of the coupler is connected to one end of the fiber ring via a first depolarizer, the accelerometer probe is connected to one end of the fiber ring, and port b2 is connected to the other end of the fiber ring via a second depolarizer.
10. As claimed in any one of claims 4 to 9The accelerometer based on the optical fiber Sagnac interferometer is characterized in that the photoelectric detector is connected with a signal processing unit, and the signal processing unit calculates and obtains the light intensity according to the light intensity obtained by the photoelectric detector by utilizing a PGC method
Further calculating to obtain the acceleration; wherein the content of the first and second substances,
for the phase shift produced on the accelerometer probe by the action of the vibration of the mechanical wave at time t,
l is the length of the fiber ring, n is the fiber refractive index, and c is the speed of light.
11. The fiber Sagnac interferometer-based accelerometer of claim 10, wherein the signal processing unit is based on a formula
Calculating to obtain the acceleration
12. A fibre-optic Sagnac interferometer-based accelerometer according to any of claims 4 to 11, wherein said fibre loop is a zero area fibre loop.
13. The fiber-optic Sagnac interferometer-based accelerometer of claim 12, wherein the zero area fiber loop is a single mode zero area fiber loop or a polarization maintaining zero area fiber loop.
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| CN114018390A (en) * | 2021-11-04 | 2022-02-08 | 中国科学院半导体研究所 | Acceleration measuring device |
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