CN111306951B - Control method of multi-temperature-zone sliding rail tube furnace - Google Patents
Control method of multi-temperature-zone sliding rail tube furnace Download PDFInfo
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- CN111306951B CN111306951B CN201911014840.2A CN201911014840A CN111306951B CN 111306951 B CN111306951 B CN 111306951B CN 201911014840 A CN201911014840 A CN 201911014840A CN 111306951 B CN111306951 B CN 111306951B
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- 238000000034 method Methods 0.000 title claims abstract description 24
- 238000006243 chemical reaction Methods 0.000 claims abstract description 34
- 239000010453 quartz Substances 0.000 claims abstract description 28
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 28
- 238000010438 heat treatment Methods 0.000 claims description 9
- 238000001816 cooling Methods 0.000 claims description 5
- 238000002474 experimental method Methods 0.000 description 8
- 230000008569 process Effects 0.000 description 6
- 238000009529 body temperature measurement Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D19/00—Arrangements of controlling devices
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D19/00—Arrangements of controlling devices
- F27D2019/0003—Monitoring the temperature or a characteristic of the charge and using it as a controlling value
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D19/00—Arrangements of controlling devices
- F27D2019/0028—Regulation
- F27D2019/0059—Regulation involving the control of the conveyor movement, e.g. speed or sequences
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- Engineering & Computer Science (AREA)
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Abstract
The invention discloses a control method of a multi-temperature-zone sliding rail tube furnace, which comprises the following steps of S10, setting a target temperature value of each temperature zone; s20, measuring the temperature of at least three temperature measuring points in the temperature zone to obtain an actual temperature value set; s30, substituting the actual temperature value set into a cubic B-spline curve equation to obtain a temperature fitting curve in the temperature zone; s40, obtaining a target position where the temperature in the temperature zone is closest to the target temperature value according to the temperature fitting curve in the temperature zone; s50, moving the quartz boat to the target position of a temperature zone corresponding to the first reaction temperature, and introducing a first gas source for chemical reaction; and S60, after the current reaction step is completed, moving the quartz boat to the target position of the temperature zone corresponding to the next reaction temperature, and introducing the next gas source to perform the next chemical reaction. The invention can provide the most accurate temperature parameter for the experimenter and good experimental repeatability.
Description
Technical Field
The invention relates to the technical field of multi-temperature-zone sliding rail tube furnaces, in particular to a control method of a multi-temperature-zone sliding rail tube furnace.
Background
At present, in the technical field of experiments or production by using a multi-temperature-zone sliding rail tube furnace, a furnace body usually adopts a mode that a resistance wire is buried in a hearth to heat a quartz tube, a thermocouple detection temperature is communicated with a temperature control meter to control the temperature, and a PID module is used for adjusting and controlling the temperature precision. The slide rail adopts two modes, one mode is that the furnace body is fixed and the quartz tube slides; one is a fixed and sliding furnace body with a quartz tube. The two modes can adjust the positions of the heating temperature area of the furnace body and the tested material in the tube, thereby achieving the function of quickly cooling or switching the test temperature conditions by using multiple temperature areas.
The inventors found that, in any heating furnace, there was a certain fluctuation in the temperature region, for example, a heating region of 300mm length, the constant temperature region ranged only 200mm, and the temperature gradient of the constant temperature region also had a certain fluctuation. If different temperature controls are adopted in several temperature zones of the electric furnace with multiple temperature zones, the mutual temperature interference is larger. When the temperature control precision required by the experiment is higher, when the temperature change area of the moving furnace body is changed, the proper temperature position of the second temperature area cannot be found in the high-temperature environment, and the stability and the result of the experiment are influenced. If only by the temperature control of electric stove, according to the experiment result raise or reduce the temperature and change the experiment result, still there are two drawbacks: firstly, the original experimental result cannot be copied when the electric furnace is replaced; secondly, the samples are placed at the same position every time, and the flexibility is not enough.
Disclosure of Invention
In view of this, the present invention provides a method for controlling a sliding rail tube furnace with multiple temperature zones, which can provide the most accurate temperature parameters for experimenters and provide good experimental repeatability.
Based on the purpose, the invention provides a control method of a multi-temperature-zone sliding rail tube furnace, which comprises the steps of
Setting a target temperature value of each temperature zone;
measuring the temperature of at least three temperature measuring points in the temperature zone to obtain an actual temperature value set;
substituting the actual temperature value set into a cubic B-spline curve equation to obtain a temperature fitting curve in the temperature region;
according to the temperature fitting curve in the temperature zone, obtaining a target position of which the temperature in the temperature zone is closest to the target temperature value;
moving the quartz boat to the target position of a temperature zone corresponding to the first reaction temperature according to the reaction step, and introducing a first gas source to perform chemical reaction;
and after the current reaction step is completed, moving the quartz boat to the target position of the temperature area corresponding to the next reaction temperature, introducing the next gas source, and carrying out the next chemical reaction until all reaction steps are completed.
As an alternative embodiment, the process of moving the quartz boat to the target position corresponding to the temperature zone comprises
Moving the quartz boat from the current position to the central position of the corresponding temperature zone at a first preset speed;
moving the quartz boat to a target position from the central position of the corresponding temperature zone at a second preset speed;
wherein the second preset speed is less than the first preset speed.
As an optional implementation mode, after all the reaction steps are completed, the method further comprises the steps of stopping heating in each temperature zone, and cooling.
From the above, the method for controlling a multi-temperature-zone sliding rail tube furnace provided by the invention comprises the steps of setting a plurality of temperature measuring points in each temperature zone of the tube furnace, measuring the temperature of a plurality of positions in each temperature zone, obtaining a three-order B-spline curve equation by a three-order B-spline curve fitting method according to the temperature measuring result fed back by each temperature zone, using the equation to perform fitting data of a temperature curve, performing real-time temperature fitting on the temperature of each temperature zone to obtain a temperature fitting curve in each temperature zone, obtaining the position, closest to a target temperature value, of the temperature in each temperature zone as a target position according to the temperature fitting curve in each temperature zone, moving a quartz boat to the corresponding target position to heat when performing experiments of related steps, so that the actual temperature is as close to the theoretical temperature as possible, thereby providing the most accurate temperature parameter for an experimenter, and provides good experimental repeatability.
Drawings
FIG. 1 is a logic flow diagram of an embodiment of the present invention;
fig. 2 is a schematic diagram of a fitted temperature curve of the first temperature zone in the embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to specific embodiments and the accompanying drawings.
The following embodiments are provided to describe the embodiments of the present invention, and to further describe the detailed description of the embodiments of the present invention, such as the shapes, configurations, mutual positions and connection relationships of the components, the functions and operation principles of the components, the manufacturing processes and operation methods, etc., so as to help those skilled in the art to more fully, accurately and deeply understand the inventive concept and technical solutions of the present invention.
As an embodiment of the invention, as shown in FIG. 1, a method for controlling a multi-temperature-zone sliding rail tube furnace is provided, which comprises the following steps
S10, setting a target temperature value of each temperature zone;
s20, measuring the temperature of at least three temperature measuring points in the temperature zone to obtain an actual temperature value set;
s30, substituting the actual temperature value set into a cubic B-spline curve equation to obtain a temperature fitting curve in the temperature zone;
s40, obtaining a target position where the temperature in the temperature zone is closest to the target temperature value according to the temperature fitting curve in the temperature zone;
s50, moving the quartz boat to the target position of a temperature zone corresponding to the first reaction temperature according to the reaction step, and introducing a first gas source to perform chemical reaction;
and S60, after the current reaction step is completed, moving the quartz boat to the target position of the temperature zone corresponding to the next reaction temperature, and introducing the next gas source to perform the next chemical reaction until all the reaction steps are completed.
In the invention, a plurality of temperature measuring points are arranged in each temperature zone of the tube furnace, the temperature of a plurality of positions in each temperature zone is measured, and according to the temperature measuring result fed back by each temperature zone, a general equation P (t) ═ Σ i ═ 0nPiFi, k (t) in a three-order B spline curve fitting method is added with a formula Fi of a basis function, k (t) ═ k! 1 Σ m ═ 0k-i (-1) m (k +1m) (t + k-m-j) k), the final third-order B-spline curve equation P (t) ═ P0 × F0,3(t) + P1 × F1,3(t) + P2 × F2,3(t) + P3 × F3,3(t) was obtained, and the fitting data of the temperature curve was performed using this equation, performing real-time temperature fitting on the temperature of each temperature zone to obtain a temperature fitting curve in each temperature zone, obtaining a position, closest to a target temperature value, in each temperature zone as a target position according to the temperature fitting curve in each temperature zone, then, when the relevant step experiment is carried out, the quartz boat is moved to the corresponding target position to be heated, so that the actual temperature is as close to the theoretical temperature as possible, thereby not only providing the most accurate temperature parameter for the experimenter, but also providing good experimental repeatability.
As an alternative embodiment, the process of moving the quartz boat to the target position corresponding to the temperature zone comprises
Moving the quartz boat from the current position to the central position of the corresponding temperature zone at a first preset speed;
moving the quartz boat to a target position from the central position of the corresponding temperature zone at a second preset speed;
wherein the second preset speed is less than the first preset speed.
Therefore, the quartz boat is controlled to move from the current position to the central position of the corresponding temperature area at a first faster preset speed, the moving time can be controlled, the quartz boat is controlled to move from the central position of the corresponding temperature area to the target position at a second slower preset speed, and the temperature disturbance of the quartz boat to the temperature area can be controlled.
As an optional implementation mode, after all the reaction steps are completed, the method further comprises the steps of stopping heating in each temperature zone, and cooling.
To further illustrate the invention in detail, a specific example is provided below.
Examples
The experiment content is that two chemical sources are used, two times of chemical reactions are respectively carried out in the environment of 950 ℃ and 1200 ℃, a double-temperature-zone slide rail furnace is used for temperature switching, and 5 temperature measuring points are arranged in each temperature zone at intervals.
1) Setting process parameters, setting a target temperature value of a first temperature zone of the electric furnace to be 950 ℃, setting a target temperature value of a second temperature zone of the electric furnace to be 1200 ℃, setting the lengths of the two temperature zones to be 80cm, taking a point 0 as a sample point, setting the position of a motor at the central point of the first temperature zone to be +150 and the position of a motor at the central point of the second temperature zone to be-150, and placing a quartz boat at the position of the point 0;
2) heating the first temperature zone and the second temperature zone;
3) after the preset time, starting to capture the actual temperature value of each temperature measuring point in the first temperature zone and the second temperature zone, and carrying out curve fitting in a cubic B-spline curve equation to respectively obtain a temperature fitting curve of the first temperature zone and a temperature fitting curve of the second temperature zone;
5) obtaining a temperature zone one target position with the temperature in the temperature zone one closest to the temperature zone one target temperature (950 ℃) according to the temperature zone one temperature fitting curve, and obtaining a temperature zone two target position with the temperature in the temperature zone two closest to the temperature zone two target temperature (1200 ℃) according to the temperature zone two temperature fitting curve;
4) the quartz boat moves from the position of 0 point to the central position of the first temperature zone at a first preset speed, and moves from the central position of the first temperature zone to the target position of the first temperature zone at a second preset speed, and then the chemical source 1 is introduced for reaction;
5) after the reaction is finished, temperature zone switching is carried out, the position of the quartz boat is moved from the current position (namely the target position of the first temperature zone) to the central position of the second temperature zone at a first preset speed, and is moved from the central position of the second temperature zone to the target position of the second temperature zone at a second preset speed, and a chemical source 2 is introduced for reaction;
6) and (5) after the reaction is finished, carrying out subsequent cooling treatment.
By using the method, the accuracy of the experimental environment temperature is ensured, experimenters can optimize the process through results, extra furnace temperature measurement work is not needed for the temperature field range of the electric furnace, and the process can be duplicated at any time when the heating wire or the electric furnace is replaced.
The calculation process of the temperature fitting curve in the first temperature zone in this embodiment is given below.
The coordinates of five temperature measurement points in the first temperature zone and the temperature measurement values are shown in table 1:
and the temperature gradient at the two positions of the coordinates 100 and 180 is close to 0, namely, the cubic spline curve F '(100) ═ F' (180) ═ 0;
the distance h 0-x 1-x 0-20, h 1-x 2-x 1-20, h 2-x 3-x 2-20, h 3-x 4-x 3-20;
according to
Obtaining:
μ 1 ═ μ 2 ═ μ 3 ═ 0.5, μ 4 ═ 1, λ 1 ═ λ 2 ═ λ 3 ═ 0.5, λ 0 ═ 1;
the system of equations in matrix form is thus:
the solution to this system of linear equations is found as:
the cubic spline expression is obtained as follows:
wherein j is 0, 1, 2, 3;
substituting M0, M1, M2, M3 and M4 into a temperature fitting equation of the first temperature zone:
obtaining a temperature fitting curve of the first temperature zone according to the temperature fitting equation of the first temperature zone, as shown in fig. 2, the temperatures of the positions x ═ 110, 130, 150, and 170 can be obtained as follows according to the temperature fitting equation:
F(110)＝938.927、F(130)＝951.257、F(150)＝951.943、F(170)＝937.773
those of ordinary skill in the art will understand that: the discussion of any embodiment above is meant to be exemplary only, and is not intended to intimate that the scope of the disclosure, including the claims, is limited to these examples; within the idea of the invention, also features in the above embodiments or in different embodiments may be combined, steps may be implemented in any order, and there are many other variations of the different aspects of the invention as described above, which are not provided in detail for the sake of brevity.
The embodiments of the invention are intended to embrace all such alternatives, modifications and variances that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, substitutions, improvements and the like that may be made without departing from the spirit and principles of the invention are intended to be included within the scope of the invention.
Claims (3)
1. A control method of a multi-temperature-zone sliding rail tube furnace is characterized by comprising the following steps
Setting a target temperature value of each temperature zone;
heating the temperature zone, measuring the temperature of at least three temperature measuring points in the temperature zone after a preset time, and obtaining an actual temperature value set;
substituting the actual temperature value set into a cubic B-spline curve equation to obtain a temperature fitting curve in the temperature region;
according to the temperature fitting curve in the temperature zone, obtaining a target position of which the temperature in the temperature zone is closest to the target temperature value;
moving the quartz boat to the target position of a temperature zone corresponding to the first reaction temperature according to the reaction step, and introducing a first gas source to perform chemical reaction;
and after the current reaction step is completed, moving the quartz boat to the target position of the temperature area corresponding to the next reaction temperature, introducing the next gas source, and carrying out the next chemical reaction until all reaction steps are completed.
2. The method as claimed in claim 1, wherein the step of moving the quartz boat to the target position corresponding to the temperature zone comprises
Moving the quartz boat from the current position to the central position of the corresponding temperature zone at a first preset speed;
moving the quartz boat to a target position from the central position of the corresponding temperature zone at a second preset speed;
wherein the second preset speed is less than the first preset speed.
3. The method for controlling the sliding rail tube furnace with multiple temperature zones according to claim 1, wherein the method further comprises the steps of stopping heating and cooling each temperature zone after all the reaction steps are completed.
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6139627A (en) * | 1998-09-21 | 2000-10-31 | The University Of Akron | Transparent multi-zone crystal growth furnace and method for controlling the same |
| CN102269530A (en) * | 2011-08-26 | 2011-12-07 | 西南铝业（集团）有限责任公司 | Furnace temperature control method and furnace temperature control device |
| CN102994731A (en) * | 2012-11-30 | 2013-03-27 | 中冶南方(武汉)威仕工业炉有限公司 | System and method for calculating optimal heating curve of blank in heating furnace |
| CN103499101A (en) * | 2013-09-27 | 2014-01-08 | 中冶长天国际工程有限责任公司 | Method and device for regulating temperature of hearth of ternary ignition furnace |
| CN105571320A (en) * | 2016-02-18 | 2016-05-11 | 西北工业大学 | Multi-temperature-zone tube furnace based on real-time temperature measurement |
| CN107655929A (en) * | 2017-08-10 | 2018-02-02 | 全球能源互联网研究院 | A kind of multi-temperature zone tube furnace |
-
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- 2019-10-24 CN CN201911014840.2A patent/CN111306951B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6139627A (en) * | 1998-09-21 | 2000-10-31 | The University Of Akron | Transparent multi-zone crystal growth furnace and method for controlling the same |
| CN102269530A (en) * | 2011-08-26 | 2011-12-07 | 西南铝业（集团）有限责任公司 | Furnace temperature control method and furnace temperature control device |
| CN102994731A (en) * | 2012-11-30 | 2013-03-27 | 中冶南方(武汉)威仕工业炉有限公司 | System and method for calculating optimal heating curve of blank in heating furnace |
| CN103499101A (en) * | 2013-09-27 | 2014-01-08 | 中冶长天国际工程有限责任公司 | Method and device for regulating temperature of hearth of ternary ignition furnace |
| CN105571320A (en) * | 2016-02-18 | 2016-05-11 | 西北工业大学 | Multi-temperature-zone tube furnace based on real-time temperature measurement |
| CN107655929A (en) * | 2017-08-10 | 2018-02-02 | 全球能源互联网研究院 | A kind of multi-temperature zone tube furnace |
Non-Patent Citations (1)
| Title |
|---|
| "电热隧道窑炉温自动化测控***的研究";傅邱云等;《仪表技术与传感器》;20000131(第1期);全文 * |
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Address after: 518000 unit 1b-1, building A6, Guangming Science Park, China Merchants Group, Fenghuang street, Guangming District, Shenzhen City, Guangdong Province Patentee after: Shenzhen Nashe Intelligent Equipment Co.,Ltd. Address before: 518000 unit 1b-1, building A6, Guangming Science Park, China Merchants Group, Fenghuang street, Guangming District, Shenzhen City, Guangdong Province Patentee before: Shenzhen Nashi Intelligent Equipment Co.,Ltd. |