CN111273515A - Mask plate, manufacturing method, display panel and display device - Google Patents

Mask plate, manufacturing method, display panel and display device Download PDF

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Publication number
CN111273515A
CN111273515A CN202010092628.4A CN202010092628A CN111273515A CN 111273515 A CN111273515 A CN 111273515A CN 202010092628 A CN202010092628 A CN 202010092628A CN 111273515 A CN111273515 A CN 111273515A
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Prior art keywords
shielding
area
partial
complete
shielding structure
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CN202010092628.4A
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CN111273515B (en
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潘晟恺
熊腾青
乔永康
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BOE Technology Group Co Ltd
Hefei Xinsheng Optoelectronics Technology Co Ltd
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BOE Technology Group Co Ltd
Hefei Xinsheng Optoelectronics Technology Co Ltd
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68Preparation processes not covered by groups G03F1/20 - G03F1/50
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09FDISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

The invention provides a mask plate, a manufacturing method, a display panel and a display device, wherein the mask plate comprises: the mask plate comprises a first complete shielding area, a partial shielding area surrounding the first complete shielding area and a second complete shielding area surrounding the partial shielding area, wherein the first complete shielding area is provided with a first shielding structure, the partial shielding area is provided with a partial shielding structure, the second complete shielding area is provided with a second shielding structure, and the partial shielding structure is formed by a latticed hollow structure. The mask plate can be used for manufacturing irregular display screens.

Description

Mask plate, manufacturing method, display panel and display device
Technical Field
The invention relates to the technical field of display, in particular to a mask plate, a manufacturing method of the mask plate, a display panel and a display device.
Background
With the development of display technology, in order to meet various requirements, irregular display screens, i.e. display screens with irregular figures, such as bang screens and water drop screens, are produced. The boundary of the special-shaped display screen puts higher requirements on the processing technology and the processing equipment.
At present, a series of problems still exist in the processing process, for example, the problem of high processing difficulty caused by complex mask graph design, the problem of low yield caused by uneven local stress caused by the existence of abnormity in the screen-stretching link in the mask plate, the optical problems of color mixing and uneven brightness in the abnormity area of the manufactured display panel and the like.
Therefore, how to realize the production of the irregular display screen through the mask plate becomes a technical problem to be solved urgently.
Disclosure of Invention
The invention provides a mask plate, a manufacturing method, a display panel and a display device.
In a first aspect, an embodiment of the present invention provides a mask, including:
the mask plate comprises a first complete shielding area, a partial shielding area surrounding the first complete shielding area and a second complete shielding area surrounding the partial shielding area, wherein the first complete shielding area is provided with a first shielding structure, the partial shielding area is provided with a partial shielding structure, the second complete shielding area is provided with a second shielding structure, and the partial shielding structure is formed by a latticed hollow structure.
In a possible implementation manner, the first shielding structure, the partial shielding structure, and the second shielding structure are integrally formed structures.
In a possible implementation manner, the mask plate includes a body structure formed by a whole metal screen, the first shielding structure includes a first shielding portion that is disposed on the body structure and located in the first complete shielding region, and the second shielding structure includes a second shielding portion that is disposed on the body structure and located in the second complete shielding region.
In a possible implementation manner, the cross-sectional shape of the partial shielding structure includes one of a circle, a drop, a triangle, a quadrangle, a hexagon and an alphabet.
In one possible implementation, the partial shielding structure includes a plurality of cells, and a cross-sectional shape of each of the cells includes at least one of a circle, an ellipse, a triangle, a quadrangle, and a hexagon.
In a second aspect, an embodiment of the present invention provides a method for manufacturing a mask, including:
welding the whole metal sheet on a frame for manufacturing the mask plate through a screen expanding machine;
the method comprises the steps of hollowing out a partially shielded area of the whole metal sheet to form a partially shielded structure comprising a latticed hollow structure, wherein the area, except the partially shielded area, of the whole metal sheet is a first completely shielded area and a second completely shielded area, the first completely shielded area is provided with a first shielding structure, the second completely shielded area is provided with a second shielding structure, the partially shielded area surrounds the first completely shielded area, and the second completely shielded area surrounds the partially shielded area.
In a possible implementation manner, the performing hollow processing on the partial shielding area of the whole metal sheet to form a partial shielding structure including a grid-shaped hollow structure includes:
determining the duty ratio of the hollow part of the partial shielding structure relative to the partial shielding structure;
and according to the duty ratio, hollowing out the partial shielding area of the whole metal sheet through laser equipment to form the partial shielding structure comprising the latticed hollow structure.
In one possible implementation, after the welding the whole sheet of metal foil on the frame for manufacturing the mask plate by the screen-tensioning machine, the method further includes:
performing hollow-out treatment on the whole metal sheet through laser equipment to form a whole metal screen;
and welding a metal sheet on the metal screen in an area corresponding to the first complete shielding area and the second complete shielding area, forming a first shielding part of the first shielding structure on the first complete shielding area, and forming a second shielding part of the second shielding structure on the second complete shielding area.
In a third aspect, an embodiment of the present invention further provides a display panel, where the display panel is formed by using the mask plate as described above.
In a fourth aspect, embodiments of the present invention further provide a display device, where the display device includes the display panel as described above.
The invention has the following beneficial effects:
the embodiment of the invention provides a mask plate and a manufacturing method thereof, a display panel and a display device, wherein the mask plate comprises a first complete shielding area, a partial shielding area surrounding the first complete shielding area and a second complete shielding area surrounding the partial shielding area, the first complete shielding area is provided with a first shielding structure, the partial shielding area is provided with a partial shielding structure, the second complete shielding area is provided with a second shielding structure, and the partial shielding structure is formed by a latticed hollow structure. Because latticed hollow out construction in this mask plate both can see through the coating by vaporization material, can shelter from structure to first sheltering from structure and second again and play the supporting effect, like this, when guaranteeing the mask plate to display panel's film forming effect through latticed hollow out construction, can carry out better support to irregular area (for example, hang the empty region, the hollow out region) to can realize the preparation to irregular display screen through this mask plate.
Drawings
FIG. 1 is a schematic structural diagram of a mask for manufacturing a special-shaped display panel with a letter "B" in the prior art;
FIG. 2 is a schematic structural diagram of a mask for manufacturing a special-shaped display panel with a letter "E" in the prior art;
fig. 3 is a schematic structural diagram of a mask according to an embodiment of the present invention;
FIG. 4 is a schematic view of one of the cross-sectional structures along the direction AA' in FIG. 3;
FIG. 5 is a schematic view of one of the cross-sectional structures along the direction AA' in FIG. 3;
fig. 6 is a schematic structural view of a partial shielding structure of a mask plate according to an embodiment of the present invention, in which a cross-sectional shape of the partial shielding structure is circular;
fig. 7 is a schematic structural view of a partial shielding structure of a mask plate according to an embodiment of the present invention, in which a cross-sectional shape of the partial shielding structure is a letter "B";
fig. 8 is a schematic structural view of a partial shielding structure of a mask plate according to an embodiment of the present invention, in which a cross-sectional shape of the partial shielding structure is a letter "E";
FIG. 9 is an enlarged view of the area F in FIG. 7;
fig. 10 is a schematic diagram illustrating a relationship between uniformity of a film layer deposited through a partially blocked area of a mask and a grid width according to an embodiment of the present invention;
fig. 11 is a flowchart of a method of manufacturing a mask according to an embodiment of the present invention;
fig. 12 is a flowchart of a method in step S102 in the mask manufacturing method according to the embodiment of the present invention;
fig. 13 is a schematic process flow diagram of steps S201 to S202 when a cross-sectional shape of a mesh is a quadrilateral in the mask manufacturing method according to the embodiment of the present invention;
fig. 14 is a flowchart of a method after step S101 in a method for manufacturing a mask according to an embodiment of the present invention;
fig. 15 is a schematic process flow diagram corresponding to steps S301 to S302 when the interface shape of the mesh is a regular hexagon in the mask manufacturing method according to the embodiment of the present invention;
fig. 16 is a schematic structural diagram of a display device according to an embodiment of the present invention.
Detailed Description
Unless defined otherwise, technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art to which this invention belongs. The use of "first," "second," and similar terms in the present application do not denote any order, quantity, or importance, but rather the terms are used to distinguish one element from another. The word "comprising" or "comprises", and the like, means that the element or item listed before the word covers the element or item listed after the word and its equivalents, but does not exclude other elements or items.
It should be noted that the sizes and shapes of the figures in the drawings are not to be considered true scale, but are merely intended to schematically illustrate the present invention. And the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout.
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the drawings of the embodiments of the present invention. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. And the embodiments and features of the embodiments may be combined with each other without conflict. All other embodiments, which can be derived by a person skilled in the art from the described embodiments of the invention without any inventive step, are within the scope of protection of the invention.
The existing surface mesh-stretching mode usually uses a hollowed metal sheet to stretch a mesh, and due to the irregularity of patterns on a special-shaped display panel, the deformation and the wrinkle of partial positions can be caused by stress, so that the display effect of the display panel is influenced. Taking the mask shown in fig. 1 for manufacturing the special-shaped display panel with the letter "B" as an example, the suspended area in the middle of the letter "B" cannot be effectively supported, and thus the required display panel cannot be manufactured. Taking the mask for manufacturing the irregular display panel with the letter "E" shown in fig. 2 as an example, the half-suspended position of the letter "E" may sag due to lack of support, and thus, the mask manufactured in the existing surface-tensioned-mesh manner cannot be applied to manufacturing the display panel with irregular patterns. In addition, the existing OPEN Mask (OPEN Mask) and high-precision metal Mask (FMM Mask) can not produce a display panel with a hollow center. That is to say, the existing mask plate cannot be applied to the manufacture of irregular display panels, and the utilization rate of the mask plate is low.
In view of this, an embodiment of the present invention provides a mask, and a non-regular display screen is manufactured by using the mask.
Referring to fig. 3, an embodiment of the present invention provides a mask 1, where the mask 1 includes:
the mask plate 1 comprises a first complete shielding region 11, a partial shielding region 10 surrounding the first complete shielding region 11, and a second complete shielding region 12 surrounding the partial shielding region 10, wherein the first complete shielding region 11 is provided with a first shielding structure 111, the partial shielding region 10 is provided with a partial shielding structure 100, the second complete shielding region 12 is provided with a second shielding structure 122, and the partial shielding structure 100 is formed by a latticed hollow structure.
In the embodiment of the present invention, both the first complete occlusion region 11 and the second complete occlusion region may be independent and separate regions (as shown in fig. 3) or may be regions communicating with each other (as shown in fig. 8), which is not limited herein.
In the embodiment of the present invention, since the first complete shielding region 11 of the mask 1 is provided with the first shielding structure 111, the second complete shielding region 12 is provided with the second shielding structure 122, and the first shielding structure 111 and the second shielding structure 122 are opaque to the evaporation material. In addition, because the partial shielding region 10 surrounding the first complete shielding region 11 is provided with the partial shielding structure 100, and the partial shielding structure 100 is formed by the latticed hollow structure, because the latticed hollow structure can not only penetrate through the evaporation material, but also can play a supporting effect for the first shielding structure 111 and the second shielding structure 122, in this way, when the film forming effect of the mask plate on the display panel is ensured through the latticed hollow structure, the irregular region (for example, the suspended region and the hollow region) can be better supported, and therefore the irregular display screen can be manufactured through the mask plate.
In the embodiment of the present invention, the first shielding structure 111, the partial shielding structure 100, and the second shielding structure 122 are integrally formed, so that the manufacturing cost is saved, and the manufacturing efficiency of the mask plate 1 is improved. Fig. 4 is a schematic view of one of the cross-sectional structures along the direction AA' in fig. 3.
In the embodiment of the present invention, as shown in fig. 5, which is a schematic view of one of the cross-sectional structures along the direction AA' in fig. 3, specifically, the mask plate 1 includes a body structure 20 formed by a whole metal screen, the first shielding structure 111 includes a first shielding portion 201 disposed on the body structure 20 and located in the first complete shielding region 11, and the second shielding structure 122 includes a second shielding portion 202 disposed on the body structure 20 and located in the second complete shielding region 12. The material of the first shielding portion 201 and the second shielding portion 202 may be the same as the material of the metal screen, such as invar, or may be different. In the embodiment of the present invention, the cross-sectional shape of the partial shielding structure 100 includes one of a circle, a drop shape, a triangle, a quadrangle, and an alphabet shape, so that the mask 1 is variously designed. Fig. 6 is a schematic view showing that the sectional shape of the partial shielding structure 100 is a circle, fig. 7 is a schematic view showing that the sectional shape of the partial shielding structure 100 is a letter "B", and fig. 8 is a schematic view showing that the sectional shape of the partial shielding structure 100 is a letter "E". Of course, those skilled in the art can design mask plates 1 with partial shielding structures 100 having other cross-sectional shapes according to the practical application, and are not limited herein.
In the embodiment of the present invention, the partial shielding structure 100 includes a plurality of grids 30, and effective support of the first shielding structure 111 of the first complete shielding region 11 and the second shielding structure 122 of the second complete shielding region 12 is achieved through the grids 30, so that various designs of the mask plate 1 on the display screen are improved.
In the present embodiment, the cross-sectional shape of each mesh 30 includes at least one of a circle, an ellipse, a triangle, a quadrangle, and a hexagon. Fig. 9 is an enlarged structural view of one of regions F (regions indicated by dashed boxes) of the mask 1 of fig. 7, specifically, one of the structural views in which the cross-sectional shape of the mesh 30 is a regular hexagon. Of course, those skilled in the art can also design the cross-sectional shape of the mesh 30 in the mask 1 according to the actual application requirement, and will not be described herein again.
In practical applications, the inventors found that when the distance between the mask 1 and the substrate is 1 μm, the relationship between the uniformity of the film layer deposited in the partially shielded region 10 of the mask 1 and the width of the grid 30 is schematically shown in fig. 10, and specifically, the relationship between the uniformity of the film layer and the width of the grid 30 is as follows: y 0.4386 x +0.92, where y represents film uniformity and x represents grid width. In addition, the linear relationship between the shadow of the film edge and the Gap between the substrate and the mask 1 is 0.768 Gap + 0.136. In this way, after the distance Gap between the mask 1 and the substrate is determined, the specific value of the film edge shadow of the final product can be determined. For example, if the Gap between the mask 1 and the substrate is 1000 μm, the shadow of the film edge is 1.125 mm. For another example, the allowable value of the unevenness of the product film layer is 90%, the calculated width B of the mesh 30 is 0.46 × Gap — 51.3 μm, and when the mask 1 is actually manufactured, the width of the mesh 30 may be a value less than or equal to 51.3 μm.
Based on the same inventive concept, as shown in fig. 11, an embodiment of the present invention further provides a method for manufacturing a mask plate 1, including:
s101: welding the whole metal sheet on a frame for manufacturing the mask plate through a screen expanding machine;
s102: the method comprises the steps of hollowing out a partially shielded area of the whole metal sheet to form a partially shielded structure comprising a latticed hollow structure, wherein the area, except the partially shielded area, of the whole metal sheet is a first completely shielded area and a second completely shielded area, the first completely shielded area is provided with a first shielding structure, the second completely shielded area is provided with a second shielding structure, the partially shielded area surrounds the first completely shielded area, and the second completely shielded area surrounds the partially shielded area.
In the embodiment of the present invention, as shown in fig. 12, step S102: the partial shielding area of the whole metal sheet is hollowed out to form a partial shielding structure 100 comprising a grid-shaped hollow structure, and the method comprises the following steps:
s201: determining the duty ratio of the hollow part of the partial shielding structure relative to the partial shielding structure;
s202: and according to the duty ratio, hollowing out the partial shielding area of the whole metal sheet through laser equipment to form the partial shielding structure comprising the latticed hollow structure.
In a specific implementation process, firstly, software simulation may be performed on the partial shielding structure 100 of the partial shielding area 10 under the tension of the screen expanding machine without permanent deformation, so as to determine a duty ratio of the hollow portion of the partial shielding structure 100 relative to the partial shielding structure 100. After the duty ratio of the hollowed-out part of the partial shielding structure 100 relative to the partial shielding structure 100 is determined, according to the duty ratio, the partial shielding region 10 of the whole metal sheet 40 is hollowed out by using laser equipment, so that the partial shielding structure 100 including the grid 30-shaped hollowed-out structure is formed. In the specific implementation process, the proper size of the openings of the grids 30 can be selected according to the size relation between the partially shielded area 10 and the completely shielded area, so that the problems of low strength and poor support of the mask plate caused by too large openings of the grids 30 are solved, and the problem of low material utilization rate of the mask plate 1 caused by too small openings of the grids 30 is solved. In practical applications, software simulation may be used to select the openings of the grid 30 that meet the strength condition, and will not be described in detail herein.
In the specific implementation process, according to the actual need that the user partially shields the partial shielding structure 100 of the partial shielding region 10 of the mask plate 1, the corresponding partial shielding region 10 is hollowed out through the laser device, so that the first shielding structure 111, the partial shielding structure 100 and the second shielding structure 122 are directly formed integrally, and the manufacturing efficiency of the mask plate 1 is improved. In addition, the laser device may be a laser cutting machine, such as a femtosecond laser, or may be other laser devices that conform to the processing precision, and is not limited herein. The sectional shape of the partially shielded region 10 cut by the laser device includes one of a circle, a drop, a triangle, a quadrangle, a hexagon, and an alphabet. The cross-sectional shape of the mesh 30 in the partial shielding structure 100 of the partial shielding region 10 includes at least one of a circle, an ellipse, a triangle, a quadrangle, and a hexagon. Fig. 13 is a schematic process flow diagram corresponding to steps S201 to S202 when the cross-sectional shape of the partial occlusion region 10 is a regular hexagon and the cross-sectional shape of the mesh 30 is a quadrilateral.
In the embodiment of the present invention, as shown in fig. 14, in step S101: after the whole metal sheet is welded on a frame for manufacturing the mask plate 1 by a screen machine, the method further comprises the following steps:
s301: performing hollow-out treatment on the whole metal sheet through laser equipment to form a whole metal screen;
s302: and welding a metal sheet on the metal screen in an area corresponding to the first complete shielding area and the second complete shielding area, forming a first shielding part of the first shielding structure on the first complete shielding area, and forming a second shielding part of the second shielding structure on the second complete shielding area.
In the specific implementation process, after the entire metal sheet is welded on the frame for manufacturing the mask plate 1 by the screen-stretching machine, the entire metal sheet 40 is hollowed by the laser device to form an entire metal screen, and the entire metal screen is specifically a metal screen including the grid 30. A metal sheet is then welded to the metal screen in the areas corresponding to the first complete shielding area 11 and the second complete shielding area 12, forming a first shielding portion 201 of the first shielding structure 111 on the first complete shielding area 11 and a second shielding portion 202 of the second shielding structure 122 on the second complete shielding area 12. Specifically, a metal sheet may be expanded and welded again in the first full shielding area 11 and the second full shielding area 12, so that the first shielding portion 201 of the first shielding structure 111 is formed on the first full shielding area 11, and the second shielding portion 202 of the second shielding structure 122 is formed on the second full shielding area 12. Fig. 15 is a schematic process flow diagram corresponding to steps S301 to S302 when the cross-sectional shape of the partial occlusion region 10 is a regular hexagon and the cross-sectional shape of the mesh 30 is a quadrilateral.
Based on the same inventive concept, the embodiment of the invention also provides a display panel, and the display panel is manufactured and formed by adopting the mask plate 1.
In a specific implementation process, the display panel may be used in any product or component with a display function, such as a tablet computer, a television, a display, a notebook computer, a digital photo frame, a navigator, and the like. Other essential components of the display panel are understood by those skilled in the art, and are not described herein again, nor should they be construed as limiting the present invention.
Based on the same inventive concept, as shown in fig. 16, an embodiment of the present invention also provides a display device including the display panel 200 as described above.
In a specific implementation process, the display device may be: any product or component with a display function, such as a mobile phone (as shown in fig. 16), a tablet computer, a television, a display, a notebook computer, a digital photo frame, a navigator, a watch, and the like. The display device can be implemented by referring to the above embodiments of the display panel, and repeated descriptions are omitted.
While preferred embodiments of the present invention have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. Therefore, it is intended that the appended claims be interpreted as including preferred embodiments and all such alterations and modifications as fall within the scope of the invention.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present application without departing from the spirit and scope of the application. Thus, if such modifications and variations of the present application fall within the scope of the claims of the present application and their equivalents, the present application is intended to include such modifications and variations as well.

Claims (10)

1. A mask, comprising:
the mask plate comprises a first complete shielding area, a partial shielding area surrounding the first complete shielding area and a second complete shielding area surrounding the partial shielding area, wherein the first complete shielding area is provided with a first shielding structure, the partial shielding area is provided with a partial shielding structure, the second complete shielding area is provided with a second shielding structure, and the partial shielding structure is formed by a latticed hollow structure.
2. A mask according to claim 1, wherein the first shielding structure, the partial shielding structure and the second shielding structure are integrally formed structures.
3. A mask plate according to claim 1, wherein the mask plate comprises a body structure formed by a whole metal screen mesh, the first shielding structure comprises a first shielding portion disposed on the body structure and located in the first complete shielding region, and the second shielding structure comprises a second shielding portion disposed on the body structure and located in the second complete shielding region.
4. A mask according to claim 1, wherein the cross-sectional shape of the partial masking structure includes one of a circle, a drop, a triangle, a quadrangle, a hexagon, and an alphabet.
5. A mask according to claim 1, wherein the partial shielding structure comprises a plurality of meshes, and the cross-sectional shape of each mesh comprises at least one of a circle, an ellipse, a triangle, a quadrangle and a hexagon.
6. A manufacturing method of a mask plate according to any one of claims 1 to 5, comprising:
welding the whole metal sheet on a frame for manufacturing the mask plate through a screen expanding machine;
the method comprises the steps of hollowing out a partially shielded area of the whole metal sheet to form a partially shielded structure comprising a latticed hollow structure, wherein the area, except the partially shielded area, of the whole metal sheet is a first completely shielded area and a second completely shielded area, the first completely shielded area is provided with a first shielding structure, the second completely shielded area is provided with a second shielding structure, the partially shielded area surrounds the first completely shielded area, and the second completely shielded area surrounds the partially shielded area.
7. The manufacturing method of claim 6, wherein the step of hollowing out the partially shielded area of the whole metal sheet to form a partially shielded structure comprising a grid-shaped hollow structure comprises:
determining the duty ratio of the hollow part of the partial shielding structure relative to the partial shielding structure;
and according to the duty ratio, hollowing out the partial shielding area of the whole metal sheet through laser equipment to form the partial shielding structure comprising the latticed hollow structure.
8. The method of manufacturing of claim 6, wherein after the entire sheet of metal foil is welded to a frame for manufacturing the mask by a tenter, the method further comprises:
performing hollow-out treatment on the whole metal sheet through laser equipment to form a whole metal screen;
and welding a metal sheet on the metal screen in an area corresponding to the first complete shielding area and the second complete shielding area, forming a first shielding part of the first shielding structure on the first complete shielding area, and forming a second shielding part of the second shielding structure on the second complete shielding area.
9. A display panel, which is formed by using the mask plate according to any one of claims 1 to 5.
10. A display device characterized in that the display device comprises the display panel according to claim 9.
CN202010092628.4A 2020-02-14 2020-02-14 Mask plate, manufacturing method, display panel and display device Active CN111273515B (en)

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