CN111262548B - 体声波谐振器组、滤波器、电子设备、机电耦合系数调整方法 - Google Patents
体声波谐振器组、滤波器、电子设备、机电耦合系数调整方法 Download PDFInfo
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- CN111262548B CN111262548B CN201911419061.0A CN201911419061A CN111262548B CN 111262548 B CN111262548 B CN 111262548B CN 201911419061 A CN201911419061 A CN 201911419061A CN 111262548 B CN111262548 B CN 111262548B
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- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
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- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/56—Monolithic crystal filters
- H03H9/564—Monolithic crystal filters implemented with thin-film techniques
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
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- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
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- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
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- H03H9/02086—Means for compensation or elimination of undesirable effects
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- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
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- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
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- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H2003/021—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks the resonators or networks being of the air-gap type
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- H03H2009/02503—Breath-like, e.g. Lam? mode, wine-glass mode
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- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
Claims (23)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201911419061.0A CN111262548B (zh) | 2019-12-31 | 2019-12-31 | 体声波谐振器组、滤波器、电子设备、机电耦合系数调整方法 |
PCT/CN2020/088719 WO2021135010A1 (zh) | 2019-12-31 | 2020-05-06 | 体声波谐振器组、滤波器、电子设备、机电耦合系数调整方法 |
EP20910858.8A EP4087132A4 (en) | 2019-12-31 | 2020-05-06 | ACOUSTIC VOLUME RESONATOR, FILTER, ELECTRONIC DEVICE, METHOD FOR ADJUSTING THE ELECTROMECHANICAL COUPLING COEFFICIENT |
Applications Claiming Priority (1)
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CN201911419061.0A CN111262548B (zh) | 2019-12-31 | 2019-12-31 | 体声波谐振器组、滤波器、电子设备、机电耦合系数调整方法 |
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Publication Number | Publication Date |
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CN111262548A CN111262548A (zh) | 2020-06-09 |
CN111262548B true CN111262548B (zh) | 2021-06-22 |
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CN201911419061.0A Active CN111262548B (zh) | 2019-12-31 | 2019-12-31 | 体声波谐振器组、滤波器、电子设备、机电耦合系数调整方法 |
Country Status (3)
Country | Link |
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EP (1) | EP4087132A4 (zh) |
CN (1) | CN111262548B (zh) |
WO (1) | WO2021135010A1 (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
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CN111600566B (zh) * | 2020-04-21 | 2021-06-01 | 诺思(天津)微***有限责任公司 | 滤波器、体声波谐振器组件及其制造方法、电子设备 |
WO2022183379A1 (zh) * | 2021-03-02 | 2022-09-09 | 天津大学 | 石英薄膜谐振器及其制造方法 |
CN115241622B (zh) * | 2021-04-23 | 2024-05-03 | 诺思(天津)微***有限责任公司 | 谐振器、滤波器及电子设备 |
CN115694388A (zh) * | 2022-10-26 | 2023-02-03 | 河源市艾佛光通科技有限公司 | 一种体声波滤波器及其制作方法 |
CN115567026B (zh) * | 2022-12-06 | 2023-04-14 | 深圳新声半导体有限公司 | 基于压电材料的声表面滤波器 |
CN116722837B (zh) * | 2023-05-31 | 2024-07-02 | 锐石创芯(重庆)科技有限公司 | 体声波滤波器组件、射频前端模块及电子设备 |
Citations (1)
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JP2019186655A (ja) * | 2018-04-04 | 2019-10-24 | 太陽誘電株式会社 | 弾性波デバイス、マルチプレクサおよび複合基板 |
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US6518860B2 (en) * | 2001-01-05 | 2003-02-11 | Nokia Mobile Phones Ltd | BAW filters having different center frequencies on a single substrate and a method for providing same |
US6787048B2 (en) * | 2001-03-05 | 2004-09-07 | Agilent Technologies, Inc. | Method for producing thin bulk acoustic resonators (FBARs) with different frequencies on the same substrate by subtracting method and apparatus embodying the method |
EP1575165B1 (en) * | 2004-03-09 | 2008-05-07 | Infineon Technologies AG | Bulk acoustic wave filter and method for eliminating unwanted side passands |
JPWO2009013938A1 (ja) * | 2007-07-20 | 2010-09-30 | 株式会社村田製作所 | 圧電共振子及び圧電フィルタ装置 |
US9450561B2 (en) * | 2009-11-25 | 2016-09-20 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Bulk acoustic wave (BAW) resonator structure having an electrode with a cantilevered portion and a piezoelectric layer with varying amounts of dopant |
JP5360432B2 (ja) * | 2011-01-27 | 2013-12-04 | 株式会社村田製作所 | 圧電デバイス |
US9148117B2 (en) * | 2011-02-28 | 2015-09-29 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Coupled resonator filter comprising a bridge and frame elements |
US10284173B2 (en) * | 2011-02-28 | 2019-05-07 | Avago Technologies International Sales Pte. Limited | Acoustic resonator device with at least one air-ring and frame |
US9490771B2 (en) * | 2012-10-29 | 2016-11-08 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator comprising collar and frame |
WO2014094884A1 (en) * | 2012-12-21 | 2014-06-26 | Epcos Ag | Baw component, lamination for a baw component, and method for manufacturing a baw component, said baw component comprising two stacked piezoelectric materials that differ |
US10097152B2 (en) * | 2012-12-21 | 2018-10-09 | Snaptrack, Inc. | MEMS component having AlN and Sc and method for manufacturing a MEMS component |
US9401691B2 (en) * | 2014-04-30 | 2016-07-26 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator device with air-ring and temperature compensating layer |
US9608594B2 (en) * | 2014-05-29 | 2017-03-28 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Capacitive coupled resonator device with air-gap separating electrode and piezoelectric layer |
US10312882B2 (en) * | 2015-07-22 | 2019-06-04 | Cindy X. Qiu | Tunable film bulk acoustic resonators and filters |
US9948272B2 (en) * | 2015-09-10 | 2018-04-17 | Qorvo Us, Inc. | Air gap in BAW top metal stack for reduced resistive and acoustic loss |
US10038422B2 (en) * | 2016-08-25 | 2018-07-31 | Qualcomm Incorporated | Single-chip multi-frequency film bulk acoustic-wave resonators |
CN110166014B (zh) * | 2018-02-11 | 2020-09-08 | 诺思(天津)微***有限责任公司 | 体声波谐振器及其制造方法 |
US10727811B2 (en) * | 2018-06-01 | 2020-07-28 | Akoustis, Inc. | Effective coupling coefficients for strained single crystal epitaxial film bulk acoustic resonators |
CN111010108A (zh) * | 2019-03-02 | 2020-04-14 | 天津大学 | 带凹陷和空气翼结构的体声波谐振器、滤波器及电子设备 |
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- 2019-12-31 CN CN201911419061.0A patent/CN111262548B/zh active Active
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2020
- 2020-05-06 EP EP20910858.8A patent/EP4087132A4/en active Pending
- 2020-05-06 WO PCT/CN2020/088719 patent/WO2021135010A1/zh unknown
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2019186655A (ja) * | 2018-04-04 | 2019-10-24 | 太陽誘電株式会社 | 弾性波デバイス、マルチプレクサおよび複合基板 |
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EP4087132A4 (en) | 2023-11-15 |
CN111262548A (zh) | 2020-06-09 |
WO2021135010A1 (zh) | 2021-07-08 |
EP4087132A1 (en) | 2022-11-09 |
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Denomination of invention: Bulk acoustic wave resonator bank, filter, electronic equipment, electromechanical coupling coefficient adjustment method Effective date of registration: 20210908 Granted publication date: 20210622 Pledgee: Tianjin TEDA Haihe intelligent manufacturing industry development fund partnership (L.P.) Pledgor: ROFS MICROSYSTEM(TIANJIN) Co.,Ltd. Registration number: Y2021980009022 |
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Effective date of registration: 20240130 Granted publication date: 20210622 |