CN111252552A - Supporting assembly and carrying device - Google Patents
Supporting assembly and carrying device Download PDFInfo
- Publication number
- CN111252552A CN111252552A CN202010069767.5A CN202010069767A CN111252552A CN 111252552 A CN111252552 A CN 111252552A CN 202010069767 A CN202010069767 A CN 202010069767A CN 111252552 A CN111252552 A CN 111252552A
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- Prior art keywords
- sub
- base
- side wall
- support assembly
- thimble
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/062—Easels, stands or shelves, e.g. castor-shelves, supporting means on vehicles
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The application provides a supporting component and a carrying device. The support assembly comprises at least two support members and a carrier positioned on the support members. The support member includes: base, lateral wall, elastomeric element and thimble. The base comprises a first sub base and a second sub base, and the first sub base is positioned on the second sub base; the side wall comprises a first sub side wall and a second sub side wall which are oppositely arranged, and the first sub side wall and the second sub side wall are connected with the first sub base and the second sub base; the elastic component is positioned between the first sub base and the second sub base; the thimble at least penetrates through the first sub-base and moves between the first sub-base and the second sub-base through the elastic component. This application keeps treating the atress of transport product in handling even through supporting component's setting, can prevent effectively that the product is in handling, because the fragment that the atress inequality caused.
Description
Technical Field
The application relates to the technical field of machinery, especially, relate to a supporting component and handling device.
Background
With the development of society, people have higher and higher quality requirements on display equipment, and the development of various devices in the manufacturing process of the display equipment is promoted, wherein the devices comprise a carrying device.
In the conventional display panel conveying device, the support assembly is used for keeping the flatness and the uniform stress of the glass substrate in the conveying process. In the existing supporting assembly, due to long-term use, the ejector pins in part of the supporting assembly are worn or deformed, and the heights of the ejector pins are partially changed. The holding power increase of transporting the product is treated to high higher thimble, and the glass is treated the atress of transporting the product inhomogeneous, and the fragment risk increases, causes the damage to production facility to influence output.
Therefore, a new supporting assembly and a new carrying device are needed to solve the above technical problems.
Disclosure of Invention
The application provides a supporting component and a carrying device, which are used for solving the problem that the supporting component in the existing carrying device damages a product due to uneven force application of the product to be carried.
In order to solve the technical problem, the technical scheme provided by the application is as follows:
the application provides a support assembly, includes two at least support members and is located the microscope carrier on the support member, the support member includes:
a base comprising a first sub-base and a second sub-base, the first sub-base being located on the second sub-base;
the side wall comprises a first sub side wall and a second sub side wall which are oppositely arranged, and the first sub side wall and the second sub side wall are connected with the first sub base and the second sub base;
an elastic member located between the first sub-mount and the second sub-mount;
the ejector pin at least penetrates through the first sub-base, and moves between the first sub-base and the second sub-base through the elastic component.
In the support assembly provided by the present application, the first sub-base includes a first opening, and the thimble penetrates through the first sub-base through the first opening;
the first end of the elastic component close to the first sub-base is fixed on the thimble, and the second end of the elastic component far away from the first sub-base is fixed on the second sub-base.
In the support assembly provided herein, the support member further comprises a stopper part, the stopper part comprising at least a first sub-stopper part located between the first sub-base and the second sub-base;
wherein, the first sub-limiting part is connected with the first sub-side wall and the second sub-side wall.
In the support assembly that this application provided, first sub-spacing part with first sub-lateral wall and second sub-lateral wall sliding connection.
In the support assembly provided by the present application, the first sub-sidewall comprises a first rail, and the second sub-sidewall comprises a second rail;
the first sub-stopper member moves between the first sub-base and the second sub-base through the first rail and the second rail.
In the support assembly provided by the application, the first sub-limiting part is fixedly connected with the first sub-side wall and the second sub-side wall;
wherein the first sub-limiting part comprises a second opening corresponding to the first opening;
the thimble penetrates through the first sub-base and the first sub-limiting part through the first opening and the second opening.
In the support assembly provided by the application, the first sub-side wall comprises a first groove, and one side of the first sub-limiting part, which is close to the first sub-side wall, is located in the first groove;
the second sub-side wall comprises a second groove, and one side, close to the second sub-side wall, of the first sub-limiting part is located in the second groove.
In the supporting component that this application provided, elastomeric element is close to first end of first subbase is fixed in on the thimble, elastomeric element keeps away from the second end of first subbase is fixed in on the first sublimiting part.
In the support assembly provided by the application, the limiting part further comprises a second sub-limiting part located between the first sub-base and the elastic part, and the second sub-limiting part is fixedly connected with the ejector pin;
the first end of the elastic component close to the first sub-base is fixed on the thimble or the second sub-limiting component, and the second end of the elastic component far away from the first sub-base is fixed on the first sub-limiting component.
The application also provides a carrying device, which comprises a moving platform and the support assembly positioned on the moving platform, wherein the support assembly is provided with a plurality of supporting holes;
when a target substrate is positioned on the carrier of the support assembly, the support member in the support assembly moves towards the target substrate through the moving platform, so that the target substrate is far away from the carrier.
Has the advantages that: this application keeps treating the atress of transport product in handling even through supporting component's setting, can prevent effectively that the product is in handling, because the fragment that the atress inequality caused.
Drawings
The technical solution and other advantages of the present application will become apparent from the detailed description of the embodiments of the present application with reference to the accompanying drawings.
FIG. 1 is a schematic view of a support assembly of the present application.
Fig. 2 is a first schematic view of the support member of the present application.
Fig. 3 is a schematic view of a first sub-base according to the present application.
Fig. 4 is a second schematic view of the support member of the present application.
Figure 5 is a schematic view of a first stop member of the present application.
FIG. 6 is a third schematic view of the support member of the present application.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. It is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
In the description of the present application, it is to be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the present application and for simplicity in description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated in a particular manner, and are not to be construed as limiting the present application. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", may explicitly or implicitly include one or more of the described features. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.
In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; may be mechanically connected, may be electrically connected or may be in communication with each other; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.
In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact of the first and second features, or may comprise contact of the first and second features not directly but through another feature in between. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
The following disclosure provides many different embodiments or examples for implementing different features of the application. In order to simplify the disclosure of the present application, specific example components and arrangements are described below. Of course, they are merely examples and are not intended to limit the present application. Moreover, the present application may repeat reference numerals and/or letters in the various examples, such repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, examples of various specific processes and materials are provided herein, but one of ordinary skill in the art may recognize applications of other processes and/or use of other materials.
In the existing conveying device, because the force application of the supporting component of the conveying device to the product to be conveyed is uneven, the problem of product damage is caused. Based on this, this application has proposed a supporting component and handling device.
Referring to fig. 1 to 6, the supporting assembly 100 includes at least two supporting members 102 and a carrier 101 disposed on the supporting members 102, wherein the supporting members 102 include:
the base 103 comprises a first sub-base 104 and a second sub-base 105, and the first sub-base 104 is located on the second sub-base 105.
And the side wall 106 comprises a first sub-side wall 107 and a second sub-side wall 108 which are oppositely arranged, and the first sub-side wall 107 and the second sub-side wall 108 connect the first sub-base 104 and the second sub-base 105.
An elastic member 109, the elastic member 109 being located between the first sub-base 104 and the second sub-base 105.
And the ejector pin 110, the ejector pin 110 at least penetrates through the first sub-base 104, and the ejector pin 110 moves between the first sub-base 104 and the second sub-base 105 through the elastic member 109.
In this embodiment, the base 103, the sidewall 106 and the thimble 110 may be made of a hard and non-deformable metal or non-metal material such as stainless steel or rigid plastic.
In this embodiment, the elastic component 109 may be a spring or a leaf spring.
In this embodiment, the elastic member 109 may be made of a metal material such as stainless steel.
This application keeps treating the atress of transport product in handling even through supporting component's setting, can prevent effectively that the product is in handling, because the fragment that the atress inequality caused.
The technical solution of the present application will now be described with reference to specific embodiments.
Example one
Referring to fig. 2 and fig. 3, the first sub-base 104 includes a first opening 114, and the thimble 110 penetrates through the first sub-base 104 through the first opening 114.
In this embodiment, a first end of the elastic member 109 close to the first sub-base 104 is fixed on the thimble 110, and a second end of the elastic member 109 far from the first sub-base 104 is fixed on the second sub-base 105.
In this embodiment, the orthographic projection of the thimble 110 on the first sub-base 104 is located in the first opening 114.
In this embodiment, the shape of the first opening 114 may be a circle, a rectangle, a triangle, an irregular polygon, etc., and the specific shape is not limited herein.
In the embodiment, the first opening 114 and the elastic component 109 are arranged, so that the thimble 110 can move between the first sub-base 104 and the second sub-base 105; moreover, the second end of the elastic component 109 away from the first sub-base 104 is fixed on the second sub-base 105, which is beneficial to limit the thimble 110 and prevent the thimble 110 from completely falling out of the first opening 114.
Example two
Referring to fig. 4 and 5, the present embodiment is the same as or similar to the first embodiment, except that:
the support member 102 further comprises a stopper part 111, and the stopper part 111 comprises at least a first sub-stopper part 112 located between the first sub-base 104 and the second sub-base 105.
The first sub-limiting part 112 is connected to the first sub-sidewall 107 and the second sub-sidewall 108.
In this embodiment, the first sub-stopper part 112 may include a second opening 115 corresponding to the first opening 114.
In this embodiment, the shape of the second opening 115 may be a circle, a rectangle, a triangle, an irregular polygon, and the like, and the specific shape is not limited herein.
The thimble 110 passes through the first sub-base 104 and the first sub-limiting member 112 through the first opening 114 and the second opening 115.
In this embodiment, the first sub-limiting member 112 is slidably connected to the first sub-sidewall 107 and the second sub-sidewall 108.
When the first sub-limiting part 112 is slidably connected to the first sub-sidewall 107 and the second sub-sidewall 108, the first sub-sidewall 107 includes a first track, and the second sub-sidewall 108 includes a second track.
The first sub-stopper 112 moves between the first sub-base 104 and the second sub-base 105 through the first rail and the second rail.
A pulley may be installed on a side of the first sub-limiting member 112 close to the first sub-sidewall 107 and/or a side of the first sub-limiting member 112 close to the second sub-sidewall 108.
The first sub-stopper 112 may be slid in the first rail and/or the second rail by a pulley installed to enable the first sub-stopper 112 and the ejector pin 110 to move between the first sub-base 104 and the second sub-base 105.
In this embodiment, when the first sub-stopper 112 is slidably connected to the first sub-sidewall 107 and the second sub-sidewall 108, other manners for moving the first sub-stopper 112 between the first sub-base 104 and the second sub-base 105 may be adopted, and are not limited in particular.
In this embodiment, when the first sub-stopper 112 is slidably connected to the first sub-sidewall 107 and the second sub-sidewall 108, the thimble 110 may be fixed to the first sub-stopper 112 by adhesion, may be fixed to the first sub-stopper 112 by other means such as engagement, or may be fixed to the first sub-stopper 112 by other means such as engagement, and specific modes thereof are not limited herein.
In this embodiment, the first sub-limiting part 112 and the first sub-sidewall 107 and the second sub-sidewall 108 may be fixedly connected.
When the first sub-limiting part 112 is fixedly connected with the first sub-sidewall 107 and the second sub-sidewall 108, the first sub-sidewall 107 may include a first groove, and a side of the first sub-limiting part 112 close to the first sub-sidewall 107 is located in the first groove.
The second sub-sidewall 108 may include a second groove, and a side of the first sub-limiting member 112 close to the second sub-sidewall 108 is located in the second groove.
When the first sub-stopper member 112 is fixedly connected to the first sub-sidewall 107 and the second sub-sidewall 108, the thimble 110 may include a third track, and the first sub-stopper member 112 and/or the first sub-base 104 may include at least one protrusion at a side thereof close to the thimble 110, the protrusion being at least partially located in the third track.
Through the arrangement of the protrusion and the third rail, the movement of the thimble 110 between the first sub-base 104 and the second sub-base 105 when the thimble is acted by the elastic member 109 is realized.
In this embodiment, the first sub-limiting member 112 may be fixedly connected to the first sub-sidewall 107 and the second sub-sidewall 108 by other fixing methods such as adhesive fixing, and the specific manner is not limited herein.
In this embodiment, the elastic member 109 is located between the first sub-base 104 and the first sub-limiting member 112.
In this embodiment, a first end of the elastic member 109 close to the first sub-base 104 may be fixed on the thimble 110, and a second end of the elastic member 109 far from the first sub-base 104 may be fixed on the first sub-limiting member 112.
In this embodiment, the length of the thimble 110 is greater than the distance between the first sub-base 104 and the first sub-limiting member 112.
In this embodiment, a distance between one side of the thimble 110 close to the second sub-base 105 and the second sub-base 105 may be smaller than or equal to a distance between one side of the first sub-limiting member 112 close to the second sub-base 105 and the second sub-base 105.
In this embodiment, through the arrangement of the ejector pin 110 through the first sub-limiting member 112, when the first sub-limiting member 112 is slidably connected with the first sub-sidewall 107 and the second sub-sidewall 108, the ejector pin 110 is fixed on the first sub-limiting member 112, which is beneficial to enabling the length of the part between the first sub-base 104 and the carrier 101 to be consistent with that of other shorter ejector pins when the ejector pins in the supporting assembly 100, which are obviously longer than those of other ejector pins, carry the product to be transported, so as to facilitate the uniform stress on the product to be transported and prevent the product to be transported from being damaged; when the first sub-limiting member 112 is fixedly connected to the first sub-sidewall 107 and the second sub-sidewall 108, the thimble 110 moves between the first sub-base 104 and the second sub-base 105 through the first opening 114 and the second opening 115 correspondingly disposed to the first opening 114 under the action of the elastic member 109, and the corresponding disposition of the first opening 114 and the second opening 115 limits the moving range of the thimble 110 in the plane where the first opening 114 and the second opening 115 are located, so as to avoid the problem that the thimble 110 is obviously inclined when the carrying device carries the product to be transported, which results in uneven stress on the product to be transported.
EXAMPLE III
Referring to fig. 6, the present embodiment is the same as or similar to the first embodiment and the second embodiment, except that:
the limiting part 111 further includes a second sub-limiting part 113 located between the first sub-base 104 and the elastic part 109, and the second sub-limiting part 113 is fixedly connected to the thimble 110.
In this embodiment, a first end of the elastic member 109 close to the first sub-base 104 is fixed on the thimble 110 or the second sub-limiting member 113, and a second end of the elastic member 109 far from the first sub-base 104 is fixed on the first sub-limiting member 112
In this embodiment, the elastic member 109 is located between the second sub-stopper member 113 and the first sub-stopper member 112.
In this embodiment, the second sub-limiting member 113 may be adhered to the thimble 110, or fixed to the thimble 110 by being fastened with the thimble 110, or fixed to the thimble 110 by other means, and the specific manner is not limited herein.
In the embodiment, the second sub-limiting part 113 is provided, which is beneficial to controlling the lifting height of the thimble 110 in the supporting member 102 in a non-conveying state, and prevents the problem that the length of the part of the thimble 110 between the first sub-base 104 and the carrier 101 is significantly longer than that of the other thimbles 110, which causes uneven stress on the product to be conveyed at the beginning of conveying and damages the product.
In the above examples, the elastic component 109 may further be connected to a pressure display and control device, and when the product to be transported starts to be transported, the elastic component 109 of the supporting member 102 involved in the transportation is immediately adjusted by the pressure display and control device, so that the product to be transported is kept in a uniformly stressed state at any time during the transportation process, which is beneficial to preventing the product to be transported from being broken.
In the above embodiments, by the arrangement of the supporting assembly 100, the stress of the product to be carried in the carrying process is kept uniform, and the product can be effectively prevented from being broken due to uneven stress in the carrying process.
The present application also proposes a carrying device, which comprises a moving platform, and the support assembly 100 of the above embodiment located on the moving platform.
When a target substrate is positioned on the stage 101 of the support assembly 100, the support member 102 of the support assembly 100 is moved toward the target substrate by the moving platform, so that the target substrate is away from the stage 101.
The application handling device, through supporting component's setting has kept treating the atress of carrying the product in handling even, can prevent effectively that the product from in handling because the uneven fragment that causes of atress.
The application provides a supporting component and a carrying device. The support assembly comprises at least two support members and a carrier positioned on the support members. The support member includes: base, lateral wall, elastomeric element and thimble. The base comprises a first sub base and a second sub base, and the first sub base is positioned on the second sub base; the side wall comprises a first sub side wall and a second sub side wall which are oppositely arranged, and the first sub side wall and the second sub side wall are connected with the first sub base and the second sub base; an elastic member is located between the first sub-mount and the second sub-mount; the thimble at least penetrates through the first sub-base and moves between the first sub-base and the second sub-base through the elastic component. This application keeps treating the atress of transport product in handling even through supporting component's setting, can prevent effectively that the product is in handling, because the fragment that the atress inequality caused.
In the foregoing embodiments, the descriptions of the respective embodiments have respective emphasis, and for parts that are not described in detail in a certain embodiment, reference may be made to related descriptions of other embodiments.
The above detailed description is provided for a supporting assembly and a carrying device provided in the embodiments of the present application, and specific examples are applied herein to explain the principle and the embodiments of the present application, and the above description of the embodiments is only used to help understanding the technical solutions and the core ideas of the present application; those of ordinary skill in the art will understand that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications or substitutions do not depart from the spirit and scope of the present disclosure as defined by the appended claims.
Claims (10)
1. A support assembly comprising at least two support members and a carrier positioned on the support members, the support members comprising:
a base comprising a first sub-base and a second sub-base, the first sub-base being located on the second sub-base;
the side wall comprises a first sub side wall and a second sub side wall which are oppositely arranged, and the first sub side wall and the second sub side wall are connected with the first sub base and the second sub base;
an elastic member located between the first sub-mount and the second sub-mount;
the ejector pin at least penetrates through the first sub-base, and moves between the first sub-base and the second sub-base through the elastic component.
2. The support assembly of claim 1, wherein the first sub-base includes a first opening through which the thimble extends through the first sub-base;
the first end of the elastic component close to the first sub-base is fixed on the thimble, and the second end of the elastic component far away from the first sub-base is fixed on the second sub-base.
3. The support assembly of claim 1,
the support member further comprises a stopper part including at least a first sub-stopper part between the first sub-base and the second sub-base;
wherein, the first sub-limiting part is connected with the first sub-side wall and the second sub-side wall.
4. The support assembly of claim 3,
the first sub-limiting part is connected with the first sub-side wall and the second sub-side wall in a sliding mode.
5. The support assembly of claim 4,
the first sub-sidewall comprises a first track and the second sub-sidewall comprises a second track;
the first sub-stopper member moves between the first sub-base and the second sub-base through the first rail and the second rail.
6. The support assembly of claim 3,
the first sub-limiting part is fixedly connected with the first sub-side wall and the second sub-side wall;
wherein the first sub-limiting part comprises a second opening corresponding to the first opening;
the thimble penetrates through the first sub-base and the first sub-limiting part through the first opening and the second opening.
7. The support assembly of claim 6,
the first sub side wall comprises a first groove, and one side, close to the first sub side wall, of the first sub limiting part is positioned in the first groove;
the second sub-side wall comprises a second groove, and one side, close to the second sub-side wall, of the first sub-limiting part is located in the second groove.
8. The support assembly of claim 4 or 6,
the first end of the elastic component close to the first sub-base is fixed on the thimble, and the second end of the elastic component far away from the first sub-base is fixed on the first sub-limiting component.
9. The support assembly of claim 4 or 6,
the limiting part further comprises a second sub-limiting part positioned between the first sub-base and the elastic part, and the second sub-limiting part is fixedly connected with the ejector pin;
the first end of the elastic component close to the first sub-base is fixed on the thimble or the second sub-limiting component, and the second end of the elastic component far away from the first sub-base is fixed on the first sub-limiting component.
10. A handling apparatus comprising a mobile platform and a support assembly according to any one of claims 1 to 9 located on the mobile platform;
when a target substrate is positioned on the carrier of the support assembly, the support member in the support assembly moves towards the target substrate through the moving platform, so that the target substrate is far away from the carrier.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010069767.5A CN111252552A (en) | 2020-01-21 | 2020-01-21 | Supporting assembly and carrying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010069767.5A CN111252552A (en) | 2020-01-21 | 2020-01-21 | Supporting assembly and carrying device |
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| Publication Number | Publication Date |
|---|---|
| CN111252552A true CN111252552A (en) | 2020-06-09 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010069767.5A Pending CN111252552A (en) | 2020-01-21 | 2020-01-21 | Supporting assembly and carrying device |
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| CN (1) | CN111252552A (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10120173A (en) * | 1996-08-27 | 1998-05-12 | Kuwana Eng Plast Kk | Substrate press fitting jig and substrate holder |
| CN1558814A (en) * | 2001-11-01 | 2004-12-29 | 芝浦机械电子装置股份有限公司 | Substrate transfer apparatus, and substrate transfer method |
| CN102437076A (en) * | 2010-09-27 | 2012-05-02 | 东丽工程株式会社 | Substrate delivery device |
| CN103982761A (en) * | 2014-05-20 | 2014-08-13 | 深圳市华星光电技术有限公司 | Support member |
| CN207645352U (en) * | 2017-12-21 | 2018-07-24 | 安徽预立兴川机器人技术股份有限公司 | A kind of LCD panel platform fine tuning pedestal that floats |
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2020
- 2020-01-21 CN CN202010069767.5A patent/CN111252552A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10120173A (en) * | 1996-08-27 | 1998-05-12 | Kuwana Eng Plast Kk | Substrate press fitting jig and substrate holder |
| CN1558814A (en) * | 2001-11-01 | 2004-12-29 | 芝浦机械电子装置股份有限公司 | Substrate transfer apparatus, and substrate transfer method |
| CN102437076A (en) * | 2010-09-27 | 2012-05-02 | 东丽工程株式会社 | Substrate delivery device |
| CN103982761A (en) * | 2014-05-20 | 2014-08-13 | 深圳市华星光电技术有限公司 | Support member |
| CN207645352U (en) * | 2017-12-21 | 2018-07-24 | 安徽预立兴川机器人技术股份有限公司 | A kind of LCD panel platform fine tuning pedestal that floats |
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Application publication date: 20200609 |