CN111246651A - Device and method for generating large-scale plasma plume by utilizing spray gun array - Google Patents
Device and method for generating large-scale plasma plume by utilizing spray gun array Download PDFInfo
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- CN111246651A CN111246651A CN202010269740.0A CN202010269740A CN111246651A CN 111246651 A CN111246651 A CN 111246651A CN 202010269740 A CN202010269740 A CN 202010269740A CN 111246651 A CN111246651 A CN 111246651A
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- 238000000034 method Methods 0.000 title claims abstract description 15
- 239000007921 spray Substances 0.000 title claims abstract description 10
- 230000007246 mechanism Effects 0.000 claims abstract description 32
- 239000007789 gas Substances 0.000 claims description 72
- 239000011261 inert gas Substances 0.000 claims description 11
- 239000000463 material Substances 0.000 abstract description 4
- 238000007599 discharging Methods 0.000 abstract description 2
- 210000002381 plasma Anatomy 0.000 description 38
- 238000009413 insulation Methods 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 229910052786 argon Inorganic materials 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000003491 array Methods 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- 238000004659 sterilization and disinfection Methods 0.000 description 1
- 230000029663 wound healing Effects 0.000 description 1
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/44—Plasma torches using an arc using more than one torch
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/34—Details, e.g. electrodes, nozzles
Abstract
The invention provides a device and a method for generating a large-scale plasma plume by utilizing a spray gun array. The device comprises a discharging mechanism, a first air supply mechanism, a second air supply mechanism and a power supply mechanism. The discharge mechanism comprises an insulating air passage and two needle electrodes, the first air supply mechanism is used for supplying discharge gas to the two needle electrodes, the second air supply mechanism is used for supplying air to the insulating air passage, and the power supply mechanism adopts a high-voltage direct-current power supply, so that the high-voltage output end and the grounding end of the high-voltage direct-current power supply are respectively connected with the two needle electrodes. When a switch of a high-voltage direct-current power supply is turned on, the power supply voltage is gradually increased, and low-temperature large-scale sheet air plasma plumes can be generated in an open space, so that the method has high application value for large-area material treatment.
Description
Technical Field
The invention relates to the technical field of low-temperature plasma, in particular to a device and a method for generating low-temperature large-scale sheet-shaped air plasma plume by utilizing a spray gun array.
Background
The non-equilibrium plasma generated by atmospheric gas discharge has wide application prospect, and can be used in the fields of industry, medicine, environment, military and the like, such as material growth, surface modification, sterilization, wound healing, processing, treatment of environmental pollutants, aircraft drag reduction, aircraft stealth and the like. Therefore, the atmospheric pressure plasma technology is an important technology related to civil medical treatment, national energy, environment and national defense safety. When the large-scale plasma is applied, the working efficiency can be greatly improved.
In the prior art, in order to enlarge the plasma size, a common method is to combine a plurality of plasma torches to form a torch array. For example, a microsecond pulse is used for exciting a plasma torch array device to generate a plasma plume array (see published phys. Plasmas 2017, 24, 093507); exciting a plasma torch device by using an alternating current power supply to generate a plasma plume array (see the published Phys. Plasmas 2017, 24, 093514); due to the strong interaction between the plasma torch arrays, part of the torches in the arrays are extinguished or the plasma plume is deflected. At present, no report of generating low-temperature large-scale sheet air plasma plume by a plasma spray gun array device exists.
Disclosure of Invention
One of the objectives of the present invention is to provide an apparatus for generating large-scale plasma plume using an array of torches to meet the requirements for large-area processing of materials in some fields.
The second purpose of the invention is to provide a method for generating low-temperature large-scale sheet-shaped air plasma plume by using a plasma torch array.
One of the objects of the invention is achieved by: a device for generating large-scale plasma plumes by utilizing a spray gun array comprises a discharge mechanism, a first gas supply mechanism, a second gas supply mechanism and a power supply mechanism;
the discharge mechanism comprises two needle electrodes and two insulating plates which are oppositely and parallelly arranged, the two needle electrodes are arranged between the two insulating plates and are positioned at the left end and the right end of the insulating plates, and the two needle electrodes at the two ends of the two insulating plates are clamped by the two insulating plates; the space surrounded by the two insulating plates and the two needle electrodes forms an insulating air passage; the lower end of the insulating plate is provided with an air inlet of the insulating air passage, and the upper end of the insulating plate is provided with an air outlet of the insulating air passage;
the first air supply mechanism comprises a first air supply pipeline and an air storage tank, and the air storage tank is connected with the air inlets of the two needle electrodes through the first air supply pipeline; the air inlet of the needle electrode and the air inlet of the insulating air passage are positioned on the same side of the insulating plate;
the second air supply mechanism comprises a second air supply pipeline and an air pump, and the air pump is connected with an air inlet of the insulating air passage through the second air supply pipeline; an air valve, an air pressure gauge and a flowmeter are arranged on the first air supply pipeline and the second air supply pipeline respectively;
the power supply mechanism comprises a high-voltage direct-current power supply and a plurality of wires; and the high-voltage output end and the grounding end of the high-voltage direct-current power supply are respectively connected with the two needle electrodes through leads.
The inner diameter of the needle electrode is 0.2 mm-1 mm.
The cross section of the inside of the insulating air passage is 1.0 mm multiplied by 15.0 mm-5.0 mm multiplied by 15.0 mm, and the length of the insulating air passage is 5 mm-60 mm.
The gas in the gas storage tank is inert gas.
The second purpose of the invention is realized by the following steps: a method of generating a large-scale plasma plume using an array of spray guns, comprising the steps of:
a. arranging an insulating air channel and two needle electrodes; the insulating air channel is formed by clamping the two needle electrodes by two insulating plates which are parallel and oppositely arranged, and the two needle electrodes are respectively positioned at the left end and the right end of the insulating plates; the lower end of the insulating plate is provided with an air inlet of the insulating air passage, and the upper end of the insulating plate is provided with an air outlet of the insulating air passage; the lower end of the needle electrode is an air inlet of the needle electrode, and the upper end of the needle electrode is an air outlet of the needle electrode;
b. connecting a gas inlet of the needle electrode with a gas storage tank through a first gas supply pipeline, wherein inert gas is stored in the gas storage tank; connecting an air inlet of the insulated air passage with an air pump through a second air supply pipeline; an air valve, an air pressure gauge and a flowmeter are arranged on the first air supply pipeline and the second air supply pipeline respectively;
c. the two pin electrodes are respectively connected with a high-voltage output end and a grounding end of a high-voltage direct-current power supply through leads;
d. opening an air valve on the first air supply pipeline to enable air in the air storage tank to enter the needle electrode through the first air supply pipeline and flow out of an air outlet of the needle electrode to enter an open discharge space; opening an air valve on the second air supply pipeline to enable air in the air pump to enter the insulating air channel through the second air supply pipeline, flow out of an air outlet of the insulating air channel and enter the opened discharge space;
e. and opening a switch of the high-voltage direct-current power supply, and gradually increasing the output voltage of the high-voltage direct-current power supply so as to form low-temperature large-scale sheet air plasma plume in the discharge space.
In the step e, the output voltage range of the high-voltage direct-current power supply is 0-20 kV.
In the step d, the flow rate of the inert gas introduced into the needle electrode is controlled to be 0.1-1L/min by controlling the flow meter on the first gas supply pipeline.
In the step d, the flow rate of the air introduced into the insulated air passage is controlled to be 0-50L/min by controlling a flow meter on the second air supply pipeline.
The invention has simple structure and convenient operation, and the device is arranged in an open atmospheric environment and does not depend on an expensive vacuum chamber. The invention utilizes the plasma torch array to generate low-temperature large-scale sheet air plasma plume. The plasma generated by the discharge has low temperature and cannot damage the workpiece to be processed. And the discharge does not transit to the arc discharge due to thermal instability, i.e., the discharge can stably operate for a long time.
The low-temperature large-scale sheet air plasma plume generated by the invention has higher application value for treating large-area materials.
Drawings
FIG. 1 is a schematic diagram of the structure of the apparatus of the present invention.
FIG. 2 is a photograph of a discharge at a voltage of 14kV using the apparatus of FIG. 1.
In the figure: 1. a gas storage tank; 2. an air valve; 3. a barometer; 4. a flow meter; 5. a first air supply line; 6. an insulating air passage; 7. a needle electrode; 8. a high voltage direct current power supply; 9. An air pump; 10. a second gas supply line; 11. an insulating plate.
Detailed Description
Example 1 apparatus for generating a low temperature large scale sheet air plasma plume using a plasma torch array.
As shown in fig. 1, the apparatus provided by the present invention includes a discharging mechanism, a first gas supply mechanism, a second gas supply mechanism, and a power supply mechanism.
The discharge mechanism includes two hollow-shaped needle electrodes 7 disposed in an open space (i.e., in an atmospheric environment) and two insulating plates 11. The inner diameter of the needle electrode 7 is 0.2 mm-1 mm, and the outer diameter is 0.5mm-1.3 mm. The insulating plate 11 may be made of glass, quartz, teflon, or silica gel. The two insulation plates 11 are arranged in parallel and oppositely, the two needle electrodes 7 are arranged between the two insulation plates 11 in parallel and are positioned at the left end and the right end of the insulation plates 11, and the two insulation plates 11 clamp the needle electrodes 7 at the two ends of the insulation plates. The upper and lower ends of the needle electrode 7 are flush with the upper and lower ends of the insulating plate 11, respectively. The space enclosed by the two insulating plates 11 and the two needle electrodes 7 forms an insulating air passage 6, and the insulating plates 11 and the needle electrodes 7 form the outer side wall of the insulating air passage 6. The size of the inner cross section of the insulating air passage 6 is 1.0 mm multiplied by 15.0 mm to 5.0 mm multiplied by 15.0 mm, and the size of the outer cross section (namely the cross section including the inner part of the insulating air passage and the outer side wall thereof) is 1.0 mm multiplied by 30 mm to 5.0 mm multiplied by 30 mm. The length of the insulating air passage 6 is 5 mm-60 mm. The lower extreme of insulation board 11 is equipped with the air inlet that lets in insulating air flue 6, is equipped with the gas outlet of insulating air flue 6 in the upper end of insulation board 11, and the gas outlet of insulating air flue 6 is full uncovered structure, and this gas outlet intercommunication atmospheric environment. The lower end of the needle electrode 7 is an air inlet thereof, and the upper end of the needle electrode 7 is an air outlet thereof. The air outlet of the needle electrode 7 is also in an open structure and is communicated with the atmospheric environment.
The first gas supply mechanism comprises a first gas supply pipeline 5 and a gas storage tank 1, inert gas is stored in the gas storage tank 1, the gas storage tank 1 is connected with gas inlets of the two needle electrodes 7 through the first gas supply pipeline 5, the inert gas (or called discharge gas) can be introduced into the needle electrodes 7 through the gas storage tank 1 and the first gas supply pipeline 5, and the inert gas flows in the needle electrodes 7 from bottom to top. As shown in fig. 1, two branch lines may be provided in the first gas supply line 5, and the gas in the first gas supply line 5 may flow into the two needle electrodes 7 through the two branch lines, respectively. The first air supply line 5 is provided with an air valve 2, a barometer 3, and a flow meter 4.
The second air supply mechanism includes a second air supply line 10 and an air pump 9. The air pump 9 is connected with an air inlet of the insulating air passage 6 through the second air supply pipeline 10, air can be introduced into the insulating air passage 6 through the air pump 9 and the second air supply pipeline 10, and the air circulates in the insulating air passage 6 from bottom to top. As shown in fig. 1, the second air supply line 10 can be connected to the air inlet of the insulated air duct 6 through a tapered pipe. A gas valve 2, a gas pressure gauge 3 and a flow meter 4 are also provided in the second gas supply line 10. The flow rate or velocity of the gas in the gas supply line (including the first gas supply line 5 and the second gas supply line 10) can be controlled by the flow meter 4. The gas flow rate may vary depending on the inner diameter of the needle electrode 7 and the inner cross-sectional area of the insulating gas passage 6, and may be selected within a certain range. Generally, the flow rate of the inert gas introduced into the needle electrode 7 is controlled to be 0.1-1L/min, and the flow rate of the air introduced into the insulating air passage 6 is controlled to be 0-50L/min.
The power supply mechanism comprises a high-voltage direct-current power supply 8 and a plurality of wires. The high-voltage output end of the high-voltage direct-current power supply 8 is connected with one of the needle electrodes 7 through a lead, the other needle electrode 7 is grounded, and the ground end of the high-voltage direct-current power supply 8 is grounded.
After the components are connected according to the figure 1, the gas valves 2 on the two gas supply pipelines are opened, the inert gas in the gas storage tank 1 is introduced into the needle electrode 7 through the first gas supply pipeline 5, flows through the needle electrode 7 and then flows out of the gas outlet to enter the open discharge space; air in the air pump 9 is introduced into the insulating air passage 6 through the second air supply pipeline 10, flows through the insulating air passage 6, flows out of the air outlet, and enters the open discharge space. The flow rate of gas into the needle electrode 7 and the insulated gas channel 6 can be regulated by the flow meter 4.
And opening a switch of the high-voltage direct-current power supply 8, and gradually increasing the power supply voltage to enable the needle electrode 7 to generate low-temperature large-scale flaky air plasma plumes in an open space. The output voltage range of the high voltage direct current power supply 8 is 0-20 kV.
Example 2, a method for generating a low temperature large scale sheet air plasma plume using a plasma torch array.
The method of the present invention adopts the device described in embodiment 1, and the related similarities can be referred to each other, and the method of the present invention for generating a low-temperature large-scale sheet-like air plasma plume by using a plasma torch array specifically includes the following steps:
a. an insulating gas channel 6 and two needle electrodes 7 are provided. The insulating air flue 6 is formed by clamping two needle electrodes 7 by two parallel insulating plates 11 which are oppositely arranged, and the two needle electrodes 7 are respectively positioned at the left end and the right end of the insulating plates 11. The lower end of the insulating plate 11 is an air inlet of the insulating air passage 6, and the upper end of the insulating plate 11 is an air outlet of the insulating air passage 6. The lower end of the needle electrode 7 is an air inlet thereof, and the upper end of the needle electrode 7 is an air outlet thereof. The needle electrode 7 had an inner diameter of 0.6 mm and an outer diameter of 0.9 mm. The insulating air flue 6 is made of quartz, the inner cross section of the insulating air flue 6 is 1.0 mm multiplied by 15.0 mm, and the outer cross section area is 3.0 mm multiplied by 70 mm.
b. The gas inlet of the needle electrode 7 is connected with the gas storage tank 1 through the first gas supply pipeline 5, and argon gas is stored in the gas storage tank 1; the air inlet of the insulated air passage 6 is connected with an air pump 9 through a second air supply pipeline 10; the first air supply pipeline 5 and the second air supply pipeline 10 are respectively provided with an air valve 2, a barometer 3 and a flowmeter 4.
c. The two pin electrodes 7 are respectively connected with a high-voltage output end and a grounding end of a high-voltage direct-current power supply 8 through leads, and the grounding end of the high-voltage direct-current power supply 8 is grounded.
d. Opening the gas valve 2 on the first gas supply pipeline 5, so that the argon in the gas storage tank 1 enters the needle electrode 7 through the first gas supply pipeline 5 and flows out of a gas outlet of the needle electrode 7 to enter an open discharge space; and opening the air valve 2 on the second air supply pipeline 10, so that air in the air pump 9 enters the insulating air passage 6 through the second air supply pipeline 10, flows out of an air outlet of the insulating air passage 6 and enters the opened discharge space. The flow meter 4 was adjusted so that the flow rate of argon gas introduced into the needle electrode 7 was 0.3L/min and the flow rate of air introduced into the insulated gas duct 6 was 10L/min.
e. And opening a switch of the high-voltage direct-current power supply 8, and gradually increasing the output voltage of the high-voltage direct-current power supply 8 to 14kV, so that low-temperature large-scale sheet-shaped air plasma plumes are formed in the discharge space, as shown in figure 2.
The plasma plume formed in the present invention is actually formed by superposition of the movement of the microdischarge filaments along the direction of the gas flow. The plasma generated by the discharge has higher electron temperature and lower gas temperature, and the heat generated by the discharge can be taken away by the flow of the working gas, so that an additional cooling device is not needed for the discharge electrode.
Claims (8)
1. A device for generating large-scale plasma plumes by utilizing a spray gun array is characterized by comprising a discharge mechanism, a first gas supply mechanism, a second gas supply mechanism and a power supply mechanism;
the discharge mechanism comprises two needle electrodes and two insulating plates which are oppositely and parallelly arranged, the two needle electrodes are arranged between the two insulating plates and are positioned at the left end and the right end of the insulating plates, and the two needle electrodes at the two ends of the two insulating plates are clamped by the two insulating plates; the space surrounded by the two insulating plates and the two needle electrodes forms an insulating air passage; the lower end of the insulating plate is provided with an air inlet of the insulating air passage, and the upper end of the insulating plate is provided with an air outlet of the insulating air passage;
the first air supply mechanism comprises a first air supply pipeline and an air storage tank, and the air storage tank is connected with the air inlets of the two needle electrodes through the first air supply pipeline; the air inlet of the needle electrode and the air inlet of the insulating air passage are positioned on the same side of the insulating plate;
the second air supply mechanism comprises a second air supply pipeline and an air pump, and the air pump is connected with an air inlet of the insulating air passage through the second air supply pipeline; an air valve, an air pressure gauge and a flowmeter are arranged on the first air supply pipeline and the second air supply pipeline respectively;
the power supply mechanism comprises a high-voltage direct-current power supply and a plurality of wires; and the high-voltage output end and the grounding end of the high-voltage direct-current power supply are respectively connected with the two needle electrodes through leads.
2. The apparatus of claim 1, wherein the needle electrode has an inner diameter of 0.2mm to 1 mm.
3. The apparatus of claim 1, wherein the cross-section of the inside of the insulating air passage is 1.0 mm x 15.0 mm to 5.0 mm x 15.0 mm, and the length of the insulating air passage is 5mm to 60 mm.
4. The apparatus of claim 1, wherein the gas in the gas tank is an inert gas.
5. A method for generating large-scale plasma plumes by utilizing a spray gun array is characterized by comprising the following steps:
a. arranging an insulating air channel and two needle electrodes; the insulating air channel is formed by clamping the two needle electrodes by two insulating plates which are parallel and oppositely arranged, and the two needle electrodes are respectively positioned at the left end and the right end of the insulating plates; the lower end of the insulating plate is provided with an air inlet of the insulating air passage, and the upper end of the insulating plate is provided with an air outlet of the insulating air passage; the lower end of the needle electrode is an air inlet of the needle electrode, and the upper end of the needle electrode is an air outlet of the needle electrode;
b. connecting a gas inlet of the needle electrode with a gas storage tank through a first gas supply pipeline, wherein inert gas is stored in the gas storage tank; connecting an air inlet of the insulated air passage with an air pump through a second air supply pipeline; an air valve, an air pressure gauge and a flowmeter are arranged on the first air supply pipeline and the second air supply pipeline respectively;
c. the two pin electrodes are respectively connected with a high-voltage output end and a grounding end of a high-voltage direct-current power supply through leads;
d. opening an air valve on the first air supply pipeline to enable air in the air storage tank to enter the needle electrode through the first air supply pipeline and flow out of an air outlet of the needle electrode to enter an open discharge space; opening an air valve on the second air supply pipeline to enable air in the air pump to enter the insulating air channel through the second air supply pipeline, flow out of an air outlet of the insulating air channel and enter the opened discharge space;
e. and opening a switch of the high-voltage direct-current power supply, and gradually increasing the output voltage of the high-voltage direct-current power supply so as to form low-temperature large-scale sheet air plasma plume in the discharge space.
6. The method for generating large-scale plasma plume using spray gun array as claimed in claim 5, wherein the output voltage of the HVDC power supply in step e is in the range of 0-20 kV.
7. The method of claim 5, wherein in step d, the flow meter of the first gas supply line is controlled to provide a flow rate of the inert gas into the needle electrode of 0.1-1L/min.
8. The method of claim 5, wherein the flow rate of the air introduced into the insulated gas duct is controlled to be 0-50L/min by controlling the flow meter of the second air supply line in step d.
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| CN202010269740.0A CN111246651B (en) | 2020-04-08 | 2020-04-08 | Device and method for generating large-scale plasma plume by utilizing spray gun array |
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| CN113923846A (en) * | 2021-10-29 | 2022-01-11 | 河北大学 | Device and method for generating one-dimensional plasma photonic crystal by using jet array |
| CN113966064A (en) * | 2021-09-18 | 2022-01-21 | 河北大学 | Device and method for generating sheet plasma plume |
| CN114269058A (en) * | 2021-11-25 | 2022-04-01 | 河北大学 | Device and method for generating large-scale sheet plasma plume on water surface |
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Cited By (5)
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| CN111246651B (en) | 2022-06-21 |
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