CN111229736A - Cleaning method of graphite boat for manufacturing solar cell - Google Patents
Cleaning method of graphite boat for manufacturing solar cell Download PDFInfo
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- CN111229736A CN111229736A CN202010064526.1A CN202010064526A CN111229736A CN 111229736 A CN111229736 A CN 111229736A CN 202010064526 A CN202010064526 A CN 202010064526A CN 111229736 A CN111229736 A CN 111229736A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0064—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by temperature changes
- B08B7/0071—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by temperature changes by heating
- B08B7/0085—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by temperature changes by heating by pyrolysis
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
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- Materials Engineering (AREA)
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- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
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Abstract
The application provides a cleaning method of a graphite boat for manufacturing a solar cell, the graphite boat with impurities is placed in a vacuum sintering furnace for vacuum high-temperature sintering, the impurities attached to the graphite boat in the vacuum high-temperature sintering are changed into gas to be separated from the graphite boat, the gas changed from the impurities is pumped by a vacuum pump and is conveyed to a tail gas treatment system for tail gas purification treatment, and therefore impurities such as foreign matter films on the surface of the graphite boat are burnt; the graphite boat can be cleaned in a short time, no chemical agents such as HF acid and the like are used in the whole process, the hidden danger of environmental pollution is avoided, the environmental protection pressure of a factory is reduced, no harm is caused to operators, and the cleaning efficiency and the cleaning effect are improved; the graphite boat does not need to be disassembled, so that the damage to the graphite boat in the disassembling process is avoided; and the treatment links are few, the cleaning time is short, and the production efficiency is higher.
Description
Technical Field
The invention relates to the technical field of tubular PECVD (plasma enhanced chemical vapor deposition), in particular to a cleaning method of a graphite boat for manufacturing solar cells.
Background
Solar cells are classified into crystalline silicon type and amorphous silicon type, wherein crystalline silicon type cells can be further classified into single crystal cells and polycrystalline cells. The production process flow of the solar cell slice comprises the following steps: silicon chip detection → surface texturing and acid washing → PN junction diffusion → phosphorus-removed silicate glass → plasma etching and acid washing → PECVD plating antireflection film → screen printing positive and negative electrodes → rapid sintering and the like.
The PECVD plating antireflection film comprises the following steps: the reflectivity of the polished silicon surface is 35%, and a silicon nitride antireflection film needs to be deposited in order to reduce surface reflection and improve the conversion efficiency of the battery; in industrial production, PECVD equipment is often adopted to prepare an antireflection film; PECVD (plasma enhanced chemical vapor deposition) is technically characterized in that low-temperature plasma is used as an energy source, a sample is placed on a cathode of glow discharge under low pressure, the sample is heated to a preset temperature by the aid of the glow discharge, and then a proper amount of SiH (hydrogen) reaction gas is introduced4And NH3The temperature is about 430 ℃, the air pressure is about 20Pa, and the gas forms a solid film, namely a silicon nitride film on the surface of the sample through a series of chemical reactions and plasma reactions; generally, the thickness of the film deposited by using the plasma enhanced chemical vapor deposition method is about 70nm, the film with the thickness has optical functionality, the reflection of light can be greatly reduced by using the film interference principle, the short-circuit current and the output of the battery can be greatly increased, and the efficiency can be greatly improved. PECVD is a method of ionizing a gas containing atoms of a film component by means of microwave or radio frequency, etc. to locally form plasma, which is chemically very active and easily reacts to deposit a desired film on a substrate, and utilizes the activity of the plasma to promote the reaction in order to allow the chemical reaction to proceed at a low temperature.
Tubular PECVD system: namely, a quartz tube like a diffusion furnace tube is used as a deposition chamber, a resistance furnace is used as a heating body, and a graphite boat capable of holding a plurality of silicon wafers is inserted into the quartz tube for plasma enhanced chemical vapor deposition.
After the graphite boat is coated with films for many times, the process film layer can be attached to a product silicon wafer and can also be attached to the graphite boat serving as a carrier. The impurities attached to the graphite boat are mainly: SiNx H and AlOx. Taking SiNx: H as an example, normal SiThe Si/N ratio of Nx is 0.75, i.e. Si3N4. However, the stoichiometry of PECVD deposited silicon nitride will vary from process to process, and the Si/N ratio will vary from process to process, typically around 0.75-2. In addition to Si and N, PECVD silicon nitride typically contains a proportion of H atoms, SiNx: H.
After the PECVD process is completed, impurities may adhere to the graphite boat as a carrier, and the graphite boat needs to be cleaned. The cleaning efficiency and the cleaning effect of the graphite boat greatly affect the production efficiency of the tubular PECVD system and the quality of the coating, if the cleaning method is improper, not only too much production time is wasted, but also the cleaning effect is not good, and when the coating is produced, the thickness of the coating is difficult to control, the color difference proportion is increased, and the production efficiency and the benefit are seriously affected.
At present, graphite boats are generally cleaned by using a HF acid liquid soaking mode in China, then are washed by pure water, then are air-dried and oven-dried, the links are very many, the cleaning time is very long, the graphite boats are firstly soaked in a tank filled with HF acid for about 6 hours, then are rinsed by deionized pure water for 2 hours, and then are oven-dried for 6-8 hours, one pickling tank can only treat 4 graphite boats at the same time, the efficiency is low, hydrofluoric acid is harmful to the environment and human bodies, and the difficulty of recovery treatment of waste HF acid generated after the graphite boats are used for a period of time is larger.
Therefore, how to clean the graphite boat more environmentally and efficiently, remove impurities on the surface of the graphite boat, and improve the cleaning efficiency and cleaning effect is a technical problem that needs to be solved urgently by those skilled in the art.
Disclosure of Invention
The invention aims to provide a cleaning method of a graphite boat for manufacturing solar cells.
In order to solve the technical problems, the technical scheme provided by the invention is as follows:
a cleaning method of a graphite boat for manufacturing solar cells comprises the following steps in sequence:
1) placing the graphite boats in a vacuum sintering furnace, and placing the graphite boats in order for sintering a plurality of graphite boats at the same time;
2) vacuumizing a vacuum sintering furnace, controlling the vacuum degree in the vacuum sintering furnace to be less than or equal to 0.1Pa when the vacuum sintering furnace is in a cold state, controlling the vacuum degree in the vacuum sintering furnace to be less than or equal to 10Pa when the vacuum sintering furnace is in a hot state, raising the temperature of a furnace chamber of the vacuum sintering furnace to 1350-1500 ℃, then preserving the temperature at 1350-1500 ℃ for 0.5-1.5 h, performing vacuum sintering, changing impurities attached to a graphite boat into gas in the vacuum sintering process to be separated from the graphite boat, and pumping the gas changed from the impurities by a vacuum pump and conveying the gas to a tail gas treatment system for tail gas purification treatment;
3) after the heat preservation time is over, the heating of the vacuum sintering furnace is stopped after power failure, so that the graphite boat is cooled to 200-300 ℃ along with the furnace;
4) and opening the furnace to take out the graphite boat, and then cooling the graphite boat to a normal temperature state in a normal temperature environment for the next PECVD.
Preferably, in the step 2), when the temperature of a furnace chamber in the vacuum sintering furnace is controlled to be-30-50 ℃, the vacuum degree in the furnace is controlled to be less than or equal to 0.1 Pa;
when the temperature of the furnace chamber in the vacuum sintering furnace is controlled to be 50-1550 ℃, the vacuum degree in the furnace is controlled to be less than or equal to 10 Pa.
Preferably, in the step 2), the temperature rise and heat preservation process of the furnace chamber temperature of the vacuum sintering furnace is as follows: firstly, heating to 600 ℃ after 120min, and then preserving heat at 600 ℃ for 10 min; heating to 1100 deg.C for 120min, and maintaining at 1100 deg.C for 10 min; then heating to 1350-1500 ℃ after 120min, and then preserving the heat for 0.5-1.5 h at 1350-1500 ℃.
The application provides a cleaning method of a graphite boat for manufacturing a solar cell, the graphite boat with impurities is placed in a vacuum sintering furnace for vacuum high-temperature sintering, the impurities attached to the graphite boat are changed into gas to be separated from the graphite boat in the vacuum sintering process, the gas changed from the impurities is pumped by a vacuum pump and is conveyed to a tail gas treatment system for tail gas purification treatment, and therefore impurities such as foreign matter films on the surface of the graphite boat are removed;
the working principle of the cleaning method is as follows: the method comprises the steps of utilizing vacuum high-temperature sintering to gasify and separate out impurities of aluminum oxide and silicon nitride attached to a graphite boat, wherein the gasification separation temperature of the silicon nitride is 1350 ℃, the gasification separation temperature of the aluminum oxide is 1400 ℃, then conveying the gas formed by the impurities into a tail gas treatment system through a vacuum pump set, the tail gas treatment system is used for treating waste gas and then discharging the waste gas into the atmosphere, the graphite boat is high-temperature resistant, the vacuum high-temperature sintering cannot influence the performance of the graphite boat, and the vacuum environment cannot cause oxidation burning loss to the graphite boat;
the cleaning method simplifies the cleaning process into cleaning in the vacuum sintering furnace, the graphite boat can be directly used after high-temperature cleaning in the vacuum sintering furnace is finished, at most 8 graphite boats can be simultaneously processed in one vacuum sintering furnace, and the number of the cleaned graphite boats in unit time is increased by 33 percent compared with the number of the graphite boats cleaned by HF acid;
the graphite boat can be cleaned in a short time, no chemical agent participates in the whole process, no pollution hidden danger exists, the environmental protection pressure of a factory is reduced, no harm is caused to operators, and the cleaning efficiency and the cleaning effect are improved;
in the whole cleaning process, the graphite boat does not need to be disassembled, so that the damage to the graphite boat in the disassembling process is avoided;
compared with the existing cleaning method of hydrofluoric acid, the invention has the advantages that: the treatment links are few, the cleaning time is short, and the production efficiency is higher; the use of chemical agents such as HF acid is avoided, the environment is not harmed, the health of operators is not harmed, waste HF acid is not generated, and the harmless recovery treatment of the waste HF acid is not needed.
Detailed Description
For a further understanding of the invention, reference will now be made to the preferred embodiments of the invention by way of example, and it is to be understood that the description is intended to further illustrate the features and advantages of the invention and not to limit the scope of the claims.
The application provides a cleaning method of a graphite boat for manufacturing solar cells, which comprises the following steps in sequence:
1) placing the graphite boats in a vacuum sintering furnace, and placing the graphite boats in order for sintering a plurality of graphite boats at the same time;
2) vacuumizing a vacuum sintering furnace, controlling the vacuum degree in the vacuum sintering furnace to be less than or equal to 0.1Pa when the vacuum sintering furnace is in a cold state, controlling the vacuum degree in the vacuum sintering furnace to be less than or equal to 10Pa when the vacuum sintering furnace is in a hot state, raising the temperature of a furnace chamber of the vacuum sintering furnace to 1350-1500 ℃, then preserving the temperature at 1350-1500 ℃ for 0.5-1.5 h, performing vacuum sintering, changing impurities attached to a graphite boat into gas in the vacuum sintering process to be separated from the graphite boat, and pumping the gas changed from the impurities by a vacuum pump and conveying the gas to a tail gas treatment system for tail gas purification treatment;
3) after the heat preservation time is over, the heating of the vacuum sintering furnace is stopped after power failure, so that the graphite boat is cooled to 200-300 ℃ along with the furnace;
4) and opening the furnace to take out the graphite boat, and then cooling the graphite boat to a normal temperature state in a normal temperature environment for the next PECVD.
In one embodiment of the application, in the step 2), when the temperature of a furnace chamber in the vacuum sintering furnace is controlled to be-30-50 ℃, the vacuum degree in the furnace is controlled to be less than or equal to 0.1 Pa;
when the temperature of the furnace chamber in the vacuum sintering furnace is controlled to be 50-1550 ℃, the vacuum degree in the furnace is controlled to be less than or equal to 10 Pa.
In an embodiment of the present application, in step 2), the temperature raising and maintaining process of the furnace chamber temperature of the vacuum sintering furnace is as follows: firstly, heating to 600 ℃ after 120min, and then preserving heat at 600 ℃ for 10 min; heating to 1100 deg.C for 120min, and maintaining at 1100 deg.C for 10 min; then heating to 1350-1500 ℃ after 120min, and then preserving the heat for 0.5-1.5 h at 1350-1500 ℃.
For further understanding of the present invention, the following examples are provided to illustrate the cleaning method of the graphite boat for manufacturing solar cell, and the scope of the present invention is not limited by the following examples.
Example 1
A cleaning method of a graphite boat for manufacturing solar cells comprises the following steps in sequence:
1) placing the graphite boats in a vacuum sintering furnace, and placing the graphite boats in order for sintering a plurality of graphite boats at the same time;
2) vacuumizing and heating the vacuum sintering furnace to perform vacuum sintering;
in the step 2), controlling the vacuum degree in the vacuum sintering furnace to be less than or equal to 0.1Pa when the temperature of a furnace chamber in the vacuum sintering furnace is-30-50 ℃;
controlling the vacuum degree in the vacuum sintering furnace to be less than or equal to 10Pa when the temperature of a furnace chamber in the vacuum sintering furnace is 50-1550 ℃;
the temperature rise and heat preservation process of the furnace chamber temperature of the vacuum sintering furnace is as follows: firstly heating to 600 ℃ after 120min, then preserving heat for 10min at 600 ℃, then heating to 1100 ℃ after 120min, then preserving heat for 10min at 1100 ℃, then heating to 1450 ℃ after 120min, and then preserving heat for 1h at 1450 ℃;
impurities attached to the graphite boat are changed into gas to be separated from the graphite boat in the vacuum sintering process, and the gas changed into the impurities is pumped away by a vacuum pump and is conveyed to a tail gas treatment system for tail gas purification treatment;
3) after the heat preservation time is over, the heating of the vacuum sintering furnace is stopped after power failure, so that the graphite boat is cooled to 200-300 ℃ along with the furnace;
4) and opening the furnace to take out the graphite boat, and then cooling the graphite boat to a normal temperature state in a normal temperature environment for the next PECVD.
Through detection, the graphite boat is cleaned in a short time in the embodiment 1, no chemical agent participates in the whole process, no hidden danger of environmental pollution exists, the environmental protection pressure of a factory is reduced, no harm is caused to operators, and the cleaning efficiency and the cleaning effect are improved; in the whole cleaning process, the graphite boat does not need to be disassembled, so that the damage to the graphite boat in the disassembling process is avoided. Compared with the existing cleaning method of hydrofluoric acid, the invention has the advantages that: the treatment links are few, the cleaning time is short, and the production efficiency is higher; no HF acid and other chemical agents are used, no harm is caused to the environment, and the health of operators is not hurt.
Example 2
A cleaning method of a graphite boat for manufacturing solar cells comprises the following steps in sequence:
1) placing the graphite boats in a vacuum sintering furnace, and placing the graphite boats in order for sintering a plurality of graphite boats at the same time;
2) vacuumizing and heating the vacuum sintering furnace to perform vacuum sintering;
in the step 2), controlling the vacuum degree in the vacuum sintering furnace to be less than or equal to 0.1Pa when the temperature of a furnace chamber in the vacuum sintering furnace is-30-50 ℃;
controlling the vacuum degree in the vacuum sintering furnace to be less than or equal to 10Pa when the temperature of a furnace chamber in the vacuum sintering furnace is 50-1550 ℃;
the temperature rise and heat preservation process of the furnace chamber temperature of the vacuum sintering furnace is as follows: firstly heating to 600 ℃ after 120min, then preserving heat for 10min at 600 ℃, then heating to 1100 ℃ after 120min, then preserving heat for 10min at 1100 ℃, then heating to 1350 ℃ after 120min, and then preserving heat for 1h at 1350 ℃;
impurities attached to the graphite boat are changed into gas to be separated from the graphite boat in the vacuum sintering process, and the gas changed into the impurities is pumped away by a vacuum pump and is conveyed to a tail gas treatment system for tail gas purification treatment;
3) after the heat preservation time is over, the heating of the vacuum sintering furnace is stopped after power failure, so that the graphite boat is cooled to 200-300 ℃ along with the furnace;
4) and opening the furnace to take out the graphite boat, and then cooling the graphite boat to a normal temperature state in a normal temperature environment for the next PECVD.
Through detection, the graphite boat is cleaned in a short time in the embodiment 2, no chemical agent participates in the whole process, no hidden danger of environmental pollution exists, the environmental protection pressure of a factory is reduced, no harm is caused to operators, and the cleaning efficiency and the cleaning effect are improved; in the whole cleaning process, the graphite boat does not need to be disassembled, so that the damage to the graphite boat in the disassembling process is avoided. Compared with the existing cleaning method of hydrofluoric acid, the invention has the advantages that: the treatment links are few, the cleaning time is short, and the production efficiency is higher; no HF acid and other chemical agents are used, no harm is caused to the environment, and the health of operators is not hurt.
Example 3
A cleaning method of a graphite boat for manufacturing solar cells comprises the following steps in sequence:
1) placing the graphite boats in a vacuum sintering furnace, and placing the graphite boats in order for sintering a plurality of graphite boats at the same time;
2) vacuumizing and heating the vacuum sintering furnace to perform vacuum sintering;
in the step 2), controlling the vacuum degree in the vacuum sintering furnace to be less than or equal to 0.1Pa when the temperature of a furnace chamber in the vacuum sintering furnace is-30-50 ℃;
controlling the vacuum degree in the vacuum sintering furnace to be less than or equal to 10Pa when the temperature of a furnace chamber in the vacuum sintering furnace is 50-1550 ℃;
the temperature rise and heat preservation process of the furnace chamber temperature of the vacuum sintering furnace is as follows: firstly heating to 600 ℃ after 120min, then preserving heat for 10min at 600 ℃, then heating to 1100 ℃ after 120min, then preserving heat for 10min at 1100 ℃, then heating to 1400 ℃ after 120min, and then preserving heat for 1h at 1400 ℃;
impurities attached to the graphite boat are changed into gas to be separated from the graphite boat in the vacuum sintering process, and the gas changed into the impurities is pumped away by a vacuum pump and is conveyed to a tail gas treatment system for tail gas purification treatment;
3) after the heat preservation time is over, the heating of the vacuum sintering furnace is stopped after power failure, so that the graphite boat is cooled to 200-300 ℃ along with the furnace;
4) and opening the furnace to take out the graphite boat, and then cooling the graphite boat to a normal temperature state in a normal temperature environment for the next PECVD.
Through detection, in the embodiment 3, the graphite boat is cleaned in a short time, no chemical agent participates in the whole process, no hidden danger of environmental pollution exists, the environmental protection pressure of a factory is reduced, no harm is caused to operators, and the cleaning efficiency and the cleaning effect are improved; in the whole cleaning process, the graphite boat does not need to be disassembled, so that the damage to the graphite boat in the disassembling process is avoided. Compared with the existing cleaning method of hydrofluoric acid, the invention has the advantages that: the treatment links are few, the cleaning time is short, and the production efficiency is higher; no HF acid and other chemical agents are used, no harm is caused to the environment, and the health of operators is not hurt.
Methods and devices not described in detail in the present invention are all the prior art and are not described in detail.
The above description of the embodiments is only intended to facilitate the understanding of the method of the invention and its core idea. It should be noted that, for those skilled in the art, it is possible to make various improvements and modifications to the present invention without departing from the principle of the present invention, and those improvements and modifications also fall within the scope of the claims of the present invention.
Claims (3)
1. A cleaning method of a graphite boat for manufacturing solar cells is characterized by comprising the following steps of:
1) placing the graphite boats in a vacuum sintering furnace, and placing the graphite boats in order for sintering a plurality of graphite boats at the same time;
2) vacuumizing a vacuum sintering furnace, controlling the vacuum degree in the vacuum sintering furnace to be less than or equal to 0.1Pa when the vacuum sintering furnace is in a cold state, controlling the vacuum degree in the vacuum sintering furnace to be less than or equal to 10Pa when the vacuum sintering furnace is in a hot state, raising the temperature of a furnace chamber of the vacuum sintering furnace to 1350-1500 ℃, then preserving the temperature at 1350-1500 ℃ for 0.5-1.5 h, performing vacuum sintering, changing impurities attached to a graphite boat into gas in the vacuum sintering process to be separated from the graphite boat, and pumping the gas changed from the impurities by a vacuum pump and conveying the gas to a tail gas treatment system for tail gas purification treatment;
3) after the heat preservation time is over, the heating of the vacuum sintering furnace is stopped after power failure, so that the graphite boat is cooled to 200-300 ℃ along with the furnace;
4) and opening the furnace to take out the graphite boat, and then cooling the graphite boat to a normal temperature state in a normal temperature environment for the next PECVD.
2. The cleaning method according to claim 1, wherein in the step 2), when the temperature of the furnace chamber in the vacuum sintering furnace is controlled to be-30 ℃ to 50 ℃, the vacuum degree in the furnace is controlled to be less than or equal to 0.1 Pa;
when the temperature of the furnace chamber in the vacuum sintering furnace is controlled to be 50-1550 ℃, the vacuum degree in the furnace is controlled to be less than or equal to 10 Pa.
3. The cleaning method according to claim 1, wherein in the step 2), the temperature of the furnace chamber of the vacuum sintering furnace is raised and maintained by the following steps: firstly, heating to 600 ℃ after 120min, and then preserving heat at 600 ℃ for 10 min; heating to 1100 deg.C for 120min, and maintaining at 1100 deg.C for 10 min; then heating to 1350-1500 ℃ after 120min, and then preserving the heat for 0.5-1.5 h at 1350-1500 ℃.
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| CN115354298A (en) * | 2022-07-05 | 2022-11-18 | 湖南红太阳光电科技有限公司 | PECVD equipment graphite boat cleaning system |
| CN115710131A (en) * | 2022-11-22 | 2023-02-24 | 广西晶联光电材料有限责任公司 | Method for cleaning ITO target material burning bearing gasket |
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|---|---|---|---|---|
| CN115354298A (en) * | 2022-07-05 | 2022-11-18 | 湖南红太阳光电科技有限公司 | PECVD equipment graphite boat cleaning system |
| CN115710131A (en) * | 2022-11-22 | 2023-02-24 | 广西晶联光电材料有限责任公司 | Method for cleaning ITO target material burning bearing gasket |
| CN115710131B (en) * | 2022-11-22 | 2023-10-13 | 广西晶联光电材料有限责任公司 | Method for cleaning ITO target material burning-supporting gasket |
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