CN111228932A - Silica flour filtration system - Google Patents
Silica flour filtration system Download PDFInfo
- Publication number
- CN111228932A CN111228932A CN202010058699.2A CN202010058699A CN111228932A CN 111228932 A CN111228932 A CN 111228932A CN 202010058699 A CN202010058699 A CN 202010058699A CN 111228932 A CN111228932 A CN 111228932A
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- Prior art keywords
- silicon powder
- filter
- chlorosilane
- residual liquid
- main filter
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/54—Particle separators, e.g. dust precipitators, using ultra-fine filter sheets or diaphragms
- B01D46/543—Particle separators, e.g. dust precipitators, using ultra-fine filter sheets or diaphragms using membranes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D3/00—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
- B01D3/14—Fractional distillation or use of a fractionation or rectification column
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/037—Purification
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
- C01B33/10778—Purification
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
Abstract
The invention discloses a silicon powder filtering system which comprises a main filter and a residual liquid filter which are connected, wherein liquid chlorosilane is conveyed into the main filter, the chlorosilane liquid passes through micropores of a metal membrane element and is led out from a clear liquid outlet and is led into a subsequent steel heater to carry out a subsequent process flow, silicon powder and other particle impurities are intercepted outside the metal membrane element, the silicon powder and residual liquid which are filtered by the main filter are input into the residual liquid filter, the residual liquid filter heats the silicon powder and residual liquid, gaseous chlorosilane is output through the chlorosilane outlet, and the silicon powder which is heated and replaced completely is output through the silicon powder outlet and is collected. The silicon powder filtering system provided by the invention effectively intercepts the silicon powder in the reduction tail gas, greatly reduces the possibility that the silicon powder enters a steel structure and a subsequent system, ensures the stable and safe operation of the system, improves the quality of a refined rectification product, and realizes the drying and recycling of the silicon powder.
Description
Technical Field
The invention relates to the technical field of chlorosilane processing equipment and processes, in particular to a silicon powder filtering system.
Background
In the chlorosilane processing system at the present stage, the main production purpose of the tail gas recovery system is to cool, compress, condense, absorb, analyze and the like the reduction tail gas to reduce chlorosilane (including DCS, TCS and STC) and H in the tail gas2And separating HCl. Providing liquid chlorosilane for recovery and rectification and qualified H for reduction or adsorption2And qualified HCl is provided for TCS synthesis. However, the reduction tail gas contains a certain amount of amorphous fine silicon powder, and the silicon powder enters a steel structure liquid phase circulation along with silane condensed by a pre-mechanical condensing system and finally enters a rectifying system, so that a steel structure heat exchanger or a rectifying reboiler is scoured, worn or blocked; the chlorosilane containing silicon powder has more metal impurities, and the quality of a rectification product is seriously influenced.
Therefore, how to remove the silicon powder in the reduction tail gas, and avoid the silicon powder from entering a rectification system, so as to improve the quality of the chlorosilane product is an important technical problem to be solved by technical personnel in the field at present.
Disclosure of Invention
The invention aims to provide a silicon powder filtering system which can remove silicon powder in reduction tail gas, prevent the silicon powder from entering a rectification system and improve the product quality.
In order to solve the technical problems, the invention provides a silicon powder filtering system which comprises a main filter and a residual liquid filter, wherein the main filter and the residual liquid filter are connected, the main filter can be communicated with liquid chlorosilane, a metal membrane element is arranged in the main filter and can filter the silicon powder in the liquid chlorosilane, the main filter is provided with a clear liquid outlet, the clear liquid outlet can be connected with a steel heater, meanwhile, the main filter can convey the filtered silicon powder and residual liquid into the residual liquid filter, the residual liquid filter can heat the silicon powder and the residual liquid, and the residual liquid filter is provided with a silicon powder outlet and a chlorosilane outlet.
Preferably, the main filter comprises a tank body, the metal membrane elements are of a hollow cylindrical structure, the number of the metal membrane elements is multiple, the metal membrane elements are uniformly distributed in the tank body, and an inner cavity of the tank body is communicated with liquid chlorosilane.
Preferably, the main filter is connected with a back blowing mechanism, the back blowing mechanism is communicated with the inner cavity of the metal film element, and the back blowing mechanism can introduce gas into the inner cavity of the metal film element.
Preferably, the blowback mechanism comprises a nitrogen tank, and the nitrogen tank is communicated with the inner cavity of the metal film element.
Preferably, the residual liquid filter comprises a body and a jacket, the body is communicated with the main filter, the jacket is sleeved outside the body, an inner cavity of the jacket is communicated with an external heat source, and the silicon powder outlet and the chlorosilane outlet are both connected with the body.
Preferably, the silicon powder outlet is connected with a dry silicon powder collecting bag, and the chlorosilane outlet is connected with a buffer tank.
Preferably, the number of the main filters and the residual liquid filters is two, and the two main filters and the residual liquid filters are arranged in parallel.
Preferably, a control valve is arranged between the main filter and the residual liquid filter.
Compared with the background art, the silicon powder filtering system provided by the invention comprises a main filter and a residual liquid filter which are connected, wherein the main filter can be communicated with liquid chlorosilane, a metal film element is arranged in the main filter and can filter silicon powder in the liquid chlorosilane, the main filter is provided with a clear liquid outlet which can be connected with a steel heater, meanwhile, the main filter can convey the filtered silicon powder and residual liquid into the residual liquid filter, the residual liquid filter can heat the silicon powder and the residual liquid, and the residual liquid filter is provided with a silicon powder outlet and a chlorosilane outlet. During operation, liquid chlorosilane is conveyed to the main filter, chlorosilane liquid passes through the micropores of the metal membrane element and is led out from the clear liquid outlet and is guided into a subsequent steel heater to perform subsequent process flows, silicon powder and other particle impurities are intercepted outside the metal membrane element, the main filter inputs the filtered silicon powder and residual liquid into the residual liquid filter, the residual liquid filter heats the silicon powder and the residual liquid, the gaseous chlorosilane is output through the chlorosilane outlet, and the heated and replaced silicon powder is output through the silicon powder outlet to be collected. The silicon powder filtering system provided by the invention effectively intercepts the silicon powder in the reduction tail gas, greatly reduces the possibility that the silicon powder enters a steel structure and a subsequent system, ensures the stable and safe operation of the system, improves the quality of a refined rectification product, and realizes the drying and recycling of the silicon powder.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a silicon powder filtering system according to an embodiment of the present invention.
Wherein, the device comprises 11-a main filter, 111-a metal membrane element, 12-a residual liquid filter, 13-a back blowing mechanism and 14-a dry silicon powder collecting bag.
Detailed Description
The core of the invention is to provide a silicon powder filtering system, which can remove silicon powder in the reduction tail gas, prevent the silicon powder from entering a rectification system and improve the product quality.
In order that those skilled in the art will better understand the disclosure, the invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
Referring to fig. 1, fig. 1 is a schematic structural diagram of a silicon powder filtering system according to an embodiment of the present invention.
In a specific embodiment, the silicon powder filtering system provided by the invention comprises a main filter 11 and a residual liquid filter 12 which are connected, wherein the main filter 11 can be communicated with liquid chlorosilane, a metal membrane element 111 is arranged in the main filter 11, the metal membrane element 111 can filter silicon powder in the liquid chlorosilane, the main filter 11 is provided with a clear liquid outlet, the clear liquid outlet can be connected with a steel heater, meanwhile, the main filter 11 can convey the filtered silicon powder and residual liquid into the residual liquid filter 12, the residual liquid filter 12 can heat the silicon powder and residual liquid, and the residual liquid filter 12 is provided with a silicon powder outlet and a chlorosilane outlet.
When the silicon powder filtering system works, liquid chlorosilane is conveyed into the main filter 11, chlorosilane liquid passes through micropores of the metal membrane element 111 and is led out from a clear liquid outlet and is guided into a subsequent steel heater to perform a subsequent process flow, silicon powder and other particle impurities are intercepted outside the metal membrane element 111, the silicon powder and residual liquid filtered by the main filter 11 are conveyed into the residual liquid filter 12, the residual liquid filter 12 heats the silicon powder and residual liquid, gaseous chlorosilane is output through the chlorosilane outlet, and the heated and replaced clean silicon powder is output through the silicon powder outlet and is collected. The silicon powder filtering system provided by the invention effectively intercepts the silicon powder in the reduction tail gas, greatly reduces the possibility that the silicon powder enters a steel structure heater and a subsequent system, ensures the stable and safe operation of the system, improves the quality of a refined rectification product, and realizes the drying and reutilization of the silicon powder.
The main filter 11 comprises a tank body, the metal membrane elements 111 are hollow cylindrical structures, the number of the metal membrane elements 111 is multiple, the metal membrane elements 111 are uniformly distributed in the tank body, and an inner cavity of the tank body is communicated with the liquid chlorosilane. Liquid chlorosilane is conveyed into the main filter 11, the chlorosilane liquid passes through the micropores of the metal membrane element 111 and is led out from the clear liquid outlet, and silicon powder and other particle impurities are intercepted outside the metal membrane element 111, so that a filter cake layer is formed on the outer surface of the metal membrane element 111.
Specifically, the main filter 11 is connected with a back flushing mechanism 13, the back flushing mechanism 13 is communicated with the inner cavity of the metal membrane element 111, the back flushing mechanism 13 can introduce gas into the inner cavity of the metal membrane element 111, the back flushing mechanism 13 can remove a cake layer attached to the outer surface of the metal membrane element 111, and then the cake layer is conveyed to the residual liquid filter 12 for subsequent treatment, so that the working efficiency is improved.
In order to avoid the reaction between the gas blown out by the back blowing mechanism 13 and the silicon powder and the residual liquid, the gas blown out by the back blowing mechanism 13 is nitrogen, the back blowing mechanism 13 comprises a nitrogen tank, the nitrogen tank is communicated with an external nitrogen source and is communicated with the inner cavity of the metal membrane element 111, and the nitrogen is introduced into the inner cavity of the metal membrane element 111 to remove the filter cake layer attached to the outer surface of the metal membrane element 111.
More specifically, the raffinate filter 12 comprises a body and a jacket, the body is communicated with the main filter 11, the jacket is sleeved outside the body, the inner cavity of the jacket is communicated with an external heat source, and the silicon powder outlet and the chlorosilane outlet are both connected with the body. An external heat source can introduce hot steam into the jacket, gaseous chlorosilane obtained after heating is output from a chlorosilane outlet, and heated silicon powder is output from a silicon powder outlet.
In addition, the silicon powder outlet is connected with a dry silicon powder collecting bag 14, so that the silicon powder can be conveniently collected and recycled, the production cost is saved, the chlorosilane outlet is connected with a buffer tank, the chlorosilane is conveyed to the buffer tank, and the chlorosilane is conveyed to a subsequent production unit after being condensed.
Further, in order to realize continuous production, the number of the main filters 11 and the residual liquid filters 12 is two, the two groups of main filters 11 and the residual liquid filters 12 are arranged in parallel, and when one group of the main filters 11 and the residual liquid filters 12 remove slag or are maintained, the other group of the main filters 11 and the residual liquid filters 12 are in a working state, so that the working efficiency is improved.
In order to control the working state of the system conveniently, a control valve is arranged between the main filter 11 and the residual liquid filter 12, and similarly, control valves are arranged between all connecting parts.
When the silicon powder filtering system works, liquid chlorosilane is conveyed into the main filter 11, chlorosilane liquid passes through micropores of the metal film element 111 and is led out from a clear liquid outlet and is led into a subsequent steel heater to perform a subsequent process flow, the silicon powder and other particle impurities are intercepted outside the metal film element 111 to form a filter cake, the back blowing mechanism 13 is used for introducing nitrogen into an inner cavity of the metal film element 111 to remove the filter cake attached to the outside of the metal film element 111, the main filter 11 is used for inputting the filtered silicon powder and residual liquid into the residual liquid filter 12, the residual liquid filter 12 is used for heating the silicon powder and the residual liquid, gaseous chlorosilane is output through the chlorosilane outlet, and the heated and replaced clean silicon powder is output into the dry silicon powder collecting bag 14 through the silicon powder outlet to be collected. The invention is provided with two groups of main filters 11 and residual liquid filters 12, the two groups of main filters 11 and residual liquid filters 12 are arranged in parallel, when one group of main filters 11 and residual liquid filters 12 carries out slag removal or maintenance, the other group of main filters 11 and residual liquid filters 12 are in a working state, and the working efficiency is improved. It should be noted here that the steel-structured heater is a common device in chlorosilane production equipment, and is a conventional means for those skilled in the art, and therefore, the description thereof is omitted here.
The silicon powder filtering system provided by the invention is described in detail above. The principles and embodiments of the present invention are explained herein using specific examples, which are presented only to assist in understanding the method and its core concepts. It should be noted that, for those skilled in the art, it is possible to make various improvements and modifications to the present invention without departing from the principle of the present invention, and those improvements and modifications also fall within the scope of the claims of the present invention.
Claims (8)
1. A silica powder filtration system is characterized in that: including continuous main filter and raffinate filter, the main filter can be linked together with liquid chlorosilane, set up the metal film component in the main filter, the silica flour in the metal film component can the filtering liquid chlorosilane, the main filter sets up the clear solution export, the clear solution export can link to each other with steel structure heater, simultaneously, the main filter can with silica flour and the raffinate after filtering carry extremely in the raffinate filter, the raffinate filter can heat silica flour and raffinate, the raffinate filter is provided with silica flour export and chlorosilane export.
2. The silicon powder filtration system of claim 1, wherein: the main filter comprises a tank body, the metal film elements are of hollow cylindrical structures, the number of the metal film elements is multiple, the metal film elements are uniformly distributed in the tank body, and an inner cavity of the tank body is communicated with liquid chlorosilane.
3. The silicon powder filtration system of claim 2, wherein: the main filter is connected with a back blowing mechanism, the back blowing mechanism is communicated with the inner cavity of the metal film element, and the back blowing mechanism can introduce gas into the inner cavity of the metal film element.
4. The silicon powder filtration system of claim 3, wherein: the back flushing mechanism comprises a nitrogen tank, and the nitrogen tank is communicated with the inner cavity of the metal film element.
5. The silicon powder filtration system of claim 1, wherein: the residual liquid filter comprises a body and a jacket, the body is communicated with the main filter, the jacket is sleeved outside the body, the inner cavity of the jacket is communicated with an external heat source, and the silicon powder outlet and the chlorosilane outlet are both connected with the body.
6. The silicon powder filtration system of claim 5, wherein: the silica powder outlet is connected with a dry silica powder collecting bag, and the chlorosilane outlet is connected with a buffer tank.
7. The silicon powder filtration system of any one of claims 1-6, wherein: the number of the main filters and the residual liquid filters is two, and the two main filters and the residual liquid filters are arranged in parallel.
8. The silicon powder filtration system of any one of claims 1-6, wherein: and a control valve is arranged between the main filter and the residual liquid filter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010058699.2A CN111228932A (en) | 2020-01-19 | 2020-01-19 | Silica flour filtration system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010058699.2A CN111228932A (en) | 2020-01-19 | 2020-01-19 | Silica flour filtration system |
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| Publication Number | Publication Date |
|---|---|
| CN111228932A true CN111228932A (en) | 2020-06-05 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010058699.2A Pending CN111228932A (en) | 2020-01-19 | 2020-01-19 | Silica flour filtration system |
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| CN (1) | CN111228932A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111661827A (en) * | 2020-06-22 | 2020-09-15 | 四川永祥多晶硅有限公司 | System and method for recycling silicon powder in polycrystalline silicon reduction tail gas |
Citations (6)
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|---|---|---|---|---|
| EP1545770A2 (en) * | 2002-09-30 | 2005-06-29 | IKO Minerals GmbH | Method for the production of catalytically active layer silicates |
| US20110229398A1 (en) * | 2008-09-10 | 2011-09-22 | Evonik Degussa Gmbh | Fluidized bed reactor, the use thereof, and a method for the energy-independent hydrogenation of chlorosilanes |
| CN104841195A (en) * | 2015-06-02 | 2015-08-19 | 中国恩菲工程技术有限公司 | Purification and recovery device for chlorosilane waste liquid and purification and recovery method for chlorosilane waste liquid |
| CN204735022U (en) * | 2015-06-02 | 2015-11-04 | 中国恩菲工程技术有限公司 | Purification recovery unit of chlorosilane waste liquid |
| CN109835904A (en) * | 2019-04-12 | 2019-06-04 | 四川永祥多晶硅有限公司 | Restore the treatment process of amorphous silicon in tail gas |
| CN110627069A (en) * | 2019-10-22 | 2019-12-31 | 中国恩菲工程技术有限公司 | System for handle chlorosilane raffinate |
-
2020
- 2020-01-19 CN CN202010058699.2A patent/CN111228932A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1545770A2 (en) * | 2002-09-30 | 2005-06-29 | IKO Minerals GmbH | Method for the production of catalytically active layer silicates |
| US20110229398A1 (en) * | 2008-09-10 | 2011-09-22 | Evonik Degussa Gmbh | Fluidized bed reactor, the use thereof, and a method for the energy-independent hydrogenation of chlorosilanes |
| CN104841195A (en) * | 2015-06-02 | 2015-08-19 | 中国恩菲工程技术有限公司 | Purification and recovery device for chlorosilane waste liquid and purification and recovery method for chlorosilane waste liquid |
| CN204735022U (en) * | 2015-06-02 | 2015-11-04 | 中国恩菲工程技术有限公司 | Purification recovery unit of chlorosilane waste liquid |
| CN109835904A (en) * | 2019-04-12 | 2019-06-04 | 四川永祥多晶硅有限公司 | Restore the treatment process of amorphous silicon in tail gas |
| CN110627069A (en) * | 2019-10-22 | 2019-12-31 | 中国恩菲工程技术有限公司 | System for handle chlorosilane raffinate |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111661827A (en) * | 2020-06-22 | 2020-09-15 | 四川永祥多晶硅有限公司 | System and method for recycling silicon powder in polycrystalline silicon reduction tail gas |
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Application publication date: 20200605 |