CN111217364B - Rapid transfer method based on graphene adhesive tape - Google Patents
Rapid transfer method based on graphene adhesive tape Download PDFInfo
- Publication number
- CN111217364B CN111217364B CN201811427260.1A CN201811427260A CN111217364B CN 111217364 B CN111217364 B CN 111217364B CN 201811427260 A CN201811427260 A CN 201811427260A CN 111217364 B CN111217364 B CN 111217364B
- Authority
- CN
- China
- Prior art keywords
- graphene
- adhesive tape
- target substrate
- film
- tape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 124
- 229910021389 graphene Inorganic materials 0.000 title claims abstract description 124
- 239000002390 adhesive tape Substances 0.000 title claims abstract description 71
- 238000000034 method Methods 0.000 title claims abstract description 23
- 239000000758 substrate Substances 0.000 claims abstract description 45
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 15
- 239000008367 deionised water Substances 0.000 claims abstract description 10
- 229910021641 deionized water Inorganic materials 0.000 claims abstract description 10
- 238000004140 cleaning Methods 0.000 claims abstract description 8
- 238000010438 heat treatment Methods 0.000 claims abstract description 8
- 229920003229 poly(methyl methacrylate) Polymers 0.000 claims description 26
- 239000004926 polymethyl methacrylate Substances 0.000 claims description 26
- 238000005516 engineering process Methods 0.000 claims description 12
- RDOXTESZEPMUJZ-UHFFFAOYSA-N anisole Chemical compound COC1=CC=CC=C1 RDOXTESZEPMUJZ-UHFFFAOYSA-N 0.000 claims description 10
- 238000005530 etching Methods 0.000 claims description 9
- 239000012535 impurity Substances 0.000 claims description 6
- UZKWTJUDCOPSNM-UHFFFAOYSA-N methoxybenzene Substances CCCCOC=C UZKWTJUDCOPSNM-UHFFFAOYSA-N 0.000 claims description 5
- ROOXNKNUYICQNP-UHFFFAOYSA-N ammonium persulfate Chemical compound [NH4+].[NH4+].[O-]S(=O)(=O)OOS([O-])(=O)=O ROOXNKNUYICQNP-UHFFFAOYSA-N 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- VCJMYUPGQJHHFU-UHFFFAOYSA-N iron(3+);trinitrate Chemical compound [Fe+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O VCJMYUPGQJHHFU-UHFFFAOYSA-N 0.000 claims description 4
- 230000003746 surface roughness Effects 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 3
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 claims description 3
- 229910001870 ammonium persulfate Inorganic materials 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 239000010408 film Substances 0.000 abstract 3
- 230000007774 longterm Effects 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
- 239000000243 solution Substances 0.000 description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 15
- GZRQNURXIQGETR-UHFFFAOYSA-N methane;methyl 2-methylprop-2-enoate Chemical compound C.COC(=O)C(C)=C GZRQNURXIQGETR-UHFFFAOYSA-N 0.000 description 11
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 7
- 239000000377 silicon dioxide Substances 0.000 description 7
- 239000011889 copper foil Substances 0.000 description 6
- 235000012239 silicon dioxide Nutrition 0.000 description 4
- 239000002356 single layer Substances 0.000 description 4
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 2
- 239000004793 Polystyrene Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 239000004205 dimethyl polysiloxane Substances 0.000 description 2
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000000861 blow drying Methods 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- -1 polydimethylsiloxane Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/182—Graphene
- C01B32/194—After-treatment
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Nanotechnology (AREA)
- Inorganic Chemistry (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201811427260.1A CN111217364B (en) | 2018-11-27 | 2018-11-27 | Rapid transfer method based on graphene adhesive tape |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201811427260.1A CN111217364B (en) | 2018-11-27 | 2018-11-27 | Rapid transfer method based on graphene adhesive tape |
Publications (2)
Publication Number | Publication Date |
---|---|
CN111217364A CN111217364A (en) | 2020-06-02 |
CN111217364B true CN111217364B (en) | 2021-09-07 |
Family
ID=70830438
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201811427260.1A Active CN111217364B (en) | 2018-11-27 | 2018-11-27 | Rapid transfer method based on graphene adhesive tape |
Country Status (1)
Country | Link |
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CN (1) | CN111217364B (en) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102351175A (en) * | 2011-11-03 | 2012-02-15 | 东南大学 | High-quality transfer method of graphene prepared by chemical vapor deposition method |
KR20130081028A (en) * | 2012-01-06 | 2013-07-16 | 전북대학교산학협력단 | Process for graphene based transparent electrode with no resistance change by curvature |
WO2015197217A1 (en) * | 2014-06-25 | 2015-12-30 | Instytut Technologii Materialow Elektronicznych | Method of transferring a graphene film |
CN106145098A (en) * | 2016-06-23 | 2016-11-23 | 无锡格菲电子薄膜科技有限公司 | A kind of with glued membrane be medium transfer Graphene method |
-
2018
- 2018-11-27 CN CN201811427260.1A patent/CN111217364B/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102351175A (en) * | 2011-11-03 | 2012-02-15 | 东南大学 | High-quality transfer method of graphene prepared by chemical vapor deposition method |
KR20130081028A (en) * | 2012-01-06 | 2013-07-16 | 전북대학교산학협력단 | Process for graphene based transparent electrode with no resistance change by curvature |
WO2015197217A1 (en) * | 2014-06-25 | 2015-12-30 | Instytut Technologii Materialow Elektronicznych | Method of transferring a graphene film |
CN106145098A (en) * | 2016-06-23 | 2016-11-23 | 无锡格菲电子薄膜科技有限公司 | A kind of with glued membrane be medium transfer Graphene method |
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CN111217364A (en) | 2020-06-02 |
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Inventor after: Zhao Pei Inventor after: Zhang Xuewei Inventor after: Zhang Yang Inventor after: Zheng Haoran Inventor after: Zhang Xuqing Inventor after: Ren Qiancheng Inventor after: Zhou Chuiying Inventor after: Wang Hongtao Inventor before: Zhao Pei Inventor before: Zhang Xuewei Inventor before: Zheng Haoran Inventor before: Zhang Xuqing Inventor before: Ren Qiancheng Inventor before: Zhou Chuiying Inventor before: Wang Hongtao |