CN111207217B - Magnetic fluid sealing device integrating high-precision rotation function - Google Patents

Magnetic fluid sealing device integrating high-precision rotation function Download PDF

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Publication number
CN111207217B
CN111207217B CN201910796434.XA CN201910796434A CN111207217B CN 111207217 B CN111207217 B CN 111207217B CN 201910796434 A CN201910796434 A CN 201910796434A CN 111207217 B CN111207217 B CN 111207217B
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China
Prior art keywords
magnetic fluid
cooling
rotating shaft
motor
channel
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CN201910796434.XA
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CN111207217A (en
Inventor
刘黎明
周永君
张瀛
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Hangzhou Huixiang Electro Hydraulic Technology Development Co ltd
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Hangzhou Huixiang Electro Hydraulic Technology Development Co ltd
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Publication of CN111207217A publication Critical patent/CN111207217A/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/40—Sealings between relatively-moving surfaces by means of fluid
    • F16J15/43—Sealings between relatively-moving surfaces by means of fluid kept in sealing position by magnetic force
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C37/00—Cooling of bearings
    • F16C37/007—Cooling of bearings of rolling bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/162—Special parts or details relating to lubrication or cooling of the sealing itself
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/40—Sealings between relatively-moving surfaces by means of fluid

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)

Abstract

The invention relates to a magnetic fluid sealing device integrating a high-precision rotation function, which comprises: the motor comprises a rotating shaft, an upper shell, a lower shell, two magnetic fluid sealing assemblies, a motor spacer ring, a frameless torque motor, a vacuumizing channel and a cooling device, wherein the lower end of the rotating shaft is provided with a motor cavity and is pivoted with the rotating shaft through an upper bearing; the rotor of the frameless torque motor is connected with the rotating shaft, and the stator of the frameless torque motor is connected with the lower end of the motor spacer ring. According to the magnetic fluid sealing device integrating the high-precision rotation function, the frameless torque motor is integrated in the motor cavity, and the vacuumizing channel is arranged in the rotating shaft, so that a small equipment space is occupied; the rotor of the frameless torque motor is directly connected with the rotating shaft, and the rotating precision of the rotating shaft is high.

Description

Magnetic fluid sealing device integrating high-precision rotation function
Technical Field
The invention relates to the technical field of magnetic fluid sealing, in particular to a magnetic fluid sealing device integrating a high-precision rotation function.
Background
The magnetic fluid sealing technology is widely applied to vacuum equipment such as an etching machine, a monocrystalline silicon furnace, a vacuum brazing furnace, a vacuum smelting furnace, chemical vapor deposition, ion plating, liquid crystal regeneration and the like due to the superiority in structure and performance; the invention patent with Chinese patent publication No. CN102864437A discloses a rotating device for MOCVD equipment, wherein a rotating main shaft of the rotating device is connected with a motor through a magnetic fluid sealing device; traditional magnetic fluid sealing device is only a rotary sealing device who takes the pivot, through external and the motor drive who is connected through drive component with pivot one end, there is the great equipment space that occupies, and magnetic fluid sealing device's pivot rotation precision is lower not enough, consequently designs one kind and occupies less equipment space, the magnetic fluid sealing device of the higher integrated high accuracy rotation function of magnetic fluid sealing device's pivot rotation precision, becomes the problem that awaits the solution urgently.
Disclosure of Invention
The invention aims to overcome the defects that the existing magnetic fluid sealing device is only a rotary sealing device with a rotating shaft, and is driven by a motor which is arranged outside and is connected with one end of the rotating shaft through a transmission component, so that the magnetic fluid sealing device occupies a larger equipment space, and the rotating precision of the rotating shaft of the magnetic fluid sealing device is lower, and provides the magnetic fluid sealing device which occupies a smaller equipment space and has a higher rotating precision of the rotating shaft of the magnetic fluid sealing device and integrates a high-precision rotating function.
The specific technical scheme of the invention is as follows:
a magnetic fluid sealing device integrated with high-precision rotation function comprises: the motor comprises a rotating shaft, an upper shell, a lower shell, two magnetic fluid sealing assemblies, a motor spacer ring, a frameless torque motor, a vacuumizing channel and a cooling device, wherein the lower end of the rotating shaft is provided with a motor cavity and is pivoted with the rotating shaft through an upper bearing; the rotor of the frameless torque motor is connected with the rotating shaft, and the stator of the frameless torque motor is connected with the lower end of the motor spacer ring. The upper bearing is an angular contact ball bearing; the lower bearing is a deep groove ball bearing. According to the magnetic fluid sealing device integrating the high-precision rotation function, the frameless torque motor is integrated in the motor cavity, and the vacuumizing channel is arranged in the rotating shaft, so that a small equipment space is occupied; the rotor of the frameless torque motor is directly connected with the rotating shaft, the cooling device cools the bearing and the magnetic fluid, normal work of the bearing and the magnetic fluid is not influenced, the two magnetic fluid sealing assemblies are distributed at the two ends of the device, so that the middle area is an atmosphere side, the sealing effect is good, the work is stable, the frameless torque motor can normally run at a high rotating speed of 1200 rpm, and the rotating precision of the rotating shaft is high.
Preferably, the magnetic fluid seal assembly comprises: the magnetic rotor comprises a magnetic pole piece arranged at the side wall in the upper shell or the side wall in the lower shell, a permanent magnet arranged in the magnetic pole piece, and a magnetic fluid arranged between the magnetic pole piece and the outer side wall of the rotating shaft. The magnetic fluid sealing component has a simple and practical structure.
Preferably, the cooling device comprises: the magnetic fluid cooling device comprises an upper bearing cooling channel, a lower bearing cooling channel and two magnetic fluid cooling channels, wherein the upper bearing cooling channel is formed by an upper bearing cooling ring groove which is arranged on the outer side periphery of an upper shell and is opposite to an upper bearing, an upper sealing ring which covers the upper bearing cooling ring groove and is connected with the upper shell; the magnetic fluid cooling channel comprises: the magnetic fluid cooling ring grooves are arranged on the outer side of the magnetic pole piece, the cooling inlet is arranged on the outer side of the upper shell and communicated with the first magnetic fluid cooling ring groove of the first magnetic fluid cooling channel, the cooling outlet is arranged on the outer side of the lower shell and communicated with the second magnetic fluid cooling ring groove of the second magnetic fluid cooling channel, and the plurality of connecting pipes are arranged; the two magnetic fluid cooling ring grooves of the first magnetic fluid cooling channel arranged in the upper shell, the upper bearing cooling channel, the lower bearing cooling channel and the two magnetic fluid cooling ring grooves of the second magnetic fluid cooling channel arranged in the lower shell are sequentially communicated through a connecting pipe. The cooling device cools the upper magnetic fluid, the upper bearing, the lower bearing and the lower magnetic fluid through the upper magnetic fluid cooling channel, the upper bearing cooling channel, the lower bearing cooling channel and the lower magnetic fluid cooling channel, so that the bearing and the magnetic fluid work normally, and the service lives of the bearing and the magnetic fluid are prolonged; the number of the magnetic fluid cooling ring grooves arranged on the outer side wall of the magnetic pole piece is two, so that the cooling effect is improved.
Preferably, the upper sealing ring is formed by connecting two upper half sealing rings; the lower sealing ring is formed by connecting two lower half sealing rings. The installation is convenient.
The cooling inlet is provided with an inlet connector, and the cooling outlet is provided with an outlet connector. Is convenient for connecting the water inlet pipe and the water outlet pipe.
Preferably, the rotating shaft is provided with: the middle hole, the inner shaft coaxially arranged in the middle hole, the fixed rings respectively connected with the lower end of the lower shell and the lower end of the inner shaft, and the baffle ring arranged at the upper end of the inner shaft and having the outer diameter smaller than the diameter of the middle hole; and a vacuumizing channel is formed by a gap between the outer side wall of the inner shaft and the middle hole side wall. The gap between the inner shaft outer side wall and the middle hole side wall forms a vacuumizing channel, and two ends of the vacuumizing channel are respectively communicated with a vacuum cavity and a vacuumizing device of vacuum equipment during working, so that the structure is simple and compact; the baffle ring is beneficial to keeping off dust.
Preferably, the upper end of the upper shell, the lower end of the lower shell and the upper end of the inner shaft are provided with sealing ring grooves and O-shaped sealing rings arranged in the sealing ring grooves; vacuum grease is filled in the sealing ring groove. Is beneficial to vacuum sealing.
Preferably, the magnetic fluid sealing device integrated with the high-precision rotation function further comprises: the encoder is arranged in the motor cavity, the encoder seat is connected with the rotating shaft, the induction ring of the encoder is positioned on the lower side of the frameless torque motor and is connected with the encoder seat, and the reading head of the encoder is connected with the side wall of the motor cavity. The encoder is directly integrated into the magnetic fluid, so that the rotating speed of the magnetic fluid transmission device can be accurately controlled, the space is saved, and the encoder is protected from being damaged.
Preferably, the upper shell is provided with a silencing channel communicated with the motor cavity and a silencer arranged in the silencing channel. The silencer is beneficial to silencing and reducing noise.
Compared with the prior art, the invention has the beneficial effects that: according to the magnetic fluid sealing device integrating the high-precision rotation function, the frameless torque motor is integrated in the motor cavity, and the vacuumizing channel is arranged in the rotating shaft, so that a small equipment space is occupied; the rotor of the frameless torque motor is directly connected with the rotating shaft, the cooling device cools the bearing and the magnetic fluid, normal work of the bearing and the magnetic fluid is not influenced, the two magnetic fluid sealing assemblies are distributed at the two ends of the device, so that the middle area is an atmosphere side, the sealing effect is good, the work is stable, the frameless torque motor can normally run at a high rotating speed of 1200 rpm, and the rotating precision of the rotating shaft is high. The magnetic fluid sealing component has a simple and practical structure. The cooling device cools the upper magnetic fluid, the upper bearing, the lower bearing and the lower magnetic fluid through the upper magnetic fluid cooling channel, the upper bearing cooling channel, the lower bearing cooling channel and the lower magnetic fluid cooling channel, so that the bearing and the magnetic fluid work normally, and the service lives of the bearing and the magnetic fluid are prolonged; the number of the magnetic fluid cooling ring grooves arranged on the outer side wall of the magnetic pole piece is two, so that the cooling effect is improved. The upper sealing ring is formed by connecting two upper half sealing rings, and the lower sealing ring is formed by connecting two lower half sealing rings, so that the installation is convenient. The cooling inlet is provided with an inlet connector, and the cooling outlet is provided with an outlet connector which is convenient for connecting a water inlet pipe and a water outlet pipe. The gap between the inner shaft and the rotating shaft forms a vacuumizing channel which is respectively communicated with a vacuum cavity and a vacuumizing device of vacuum equipment during working, so that the structure is simple and compact; the baffle ring is beneficial to keeping off dust. The upper end of the upper shell, the lower end of the lower shell and the upper end of the inner shaft are respectively provided with a sealing ring groove and an O-shaped sealing ring arranged in the sealing ring groove, and the sealing ring grooves are filled with vacuum lubricating grease to facilitate vacuum sealing. The encoder is directly integrated into the magnetic fluid, so that the rotating speed of the magnetic fluid transmission device can be accurately controlled, the space is saved, and the encoder is protected from being damaged. The silencer is beneficial to silencing and reducing noise.
Drawings
FIG. 1 is a schematic diagram of an embodiment of the present invention.
In the figure: the magnetic fluid cooling device comprises a rotating shaft 1, a motor cavity 2, an upper bearing 3, an upper shell 4, a lower bearing 5, a lower shell 6, a motor spacer ring 7, a vacuumizing channel 8, a rotor 9, a stator 10, a magnetic pole piece 11, a permanent magnet 12, a magnetic fluid 13, an upper bearing cooling ring groove 14, an upper sealing ring 15, a lower bearing cooling ring groove 16, a lower sealing ring 17, a magnetic fluid cooling ring groove 18, a cooling inlet 19, a cooling outlet 20, a connecting pipe 21, an inlet joint 22, an outlet joint 23, an inner shaft 24, a fixing ring 25, a baffle ring 26, a sealing ring groove 27, an O-shaped sealing ring 28, a coder seat 29, an induction ring 30, a reading head 31, a silencing channel 32 and a silencer 33.
Detailed Description
The invention will be further described with reference to the drawings.
As shown in figure 1: a magnetic fluid sealing device integrated with high-precision rotation function comprises: the device comprises a rotating shaft 1, an upper shell 4, a lower shell 6, two magnetic fluid sealing assemblies, a motor spacer ring 7, a frameless torque motor, a vacuumizing channel 8 and a cooling device, wherein the lower end of the rotating shaft 1 is provided with a motor cavity 2 and is pivoted with the rotating shaft 1 through an upper bearing 3; the rotor 9 of the frameless torque motor is in bolt connection with the rotating shaft 1, and the stator 10 of the frameless torque motor is in bolt connection with the lower end of the motor spacer ring 7. The upper bearing 3 is an angular contact ball bearing; the lower bearing 5 is a deep groove ball bearing.
The magnetic fluid seal assembly comprises: a magnetic pole piece 11 arranged at the inner side wall of the upper shell 4 or the inner side wall of the lower shell 6, a permanent magnet 12 arranged in the magnetic pole piece 11, and a magnetic fluid 13 arranged between the magnetic pole piece 11 and the outer side wall of the rotating shaft 1.
The cooling device comprises: an upper bearing cooling channel which is composed of an upper bearing cooling ring groove 14 which is arranged at the outer side of the upper shell 4 and is opposite to the upper bearing 3, an upper sealing ring 15 which covers the upper bearing cooling ring groove 14 and is welded with the upper shell 4, a lower bearing cooling channel which is composed of a lower bearing cooling ring groove 16 which is arranged at the outer side of the lower shell 6 and is opposite to the lower bearing 5, a lower sealing ring 17 which covers the lower bearing cooling ring groove 16 and is screwed with the lower shell 6, and two magnetic fluid cooling channels which are corresponding to the two magnetic fluid 13 sealing components one by one; the magnetic fluid cooling channel comprises: two magnetic fluid cooling ring grooves 18 arranged on the outer side of the magnetic pole piece 11, a cooling inlet 19 arranged on the outer side of the upper shell 4 and communicated with the first magnetic fluid cooling ring groove 18 of the first magnetic fluid cooling channel, a cooling outlet 20 arranged on the outer side of the lower shell 6 and communicated with the second magnetic fluid cooling ring groove 18 of the second magnetic fluid cooling channel, and a plurality of connecting pipes 21; the two magnetic fluid cooling ring grooves 18 of the first magnetic fluid cooling channel arranged in the upper shell 4, the upper bearing cooling channel, the lower bearing cooling channel and the two magnetic fluid cooling ring grooves 18 of the second magnetic fluid cooling channel arranged in the lower shell 6 are sequentially communicated through a connecting pipe 21.
The upper sealing ring 15 is formed by welding two upper half sealing rings; the lower seal ring 17 is formed by welding two lower half seal rings.
The cooling inlet 19 is provided with an inlet joint 22, and the cooling outlet 20 is provided with an outlet joint 23.
The rotating shaft 1 is provided with: the middle hole, an inner shaft 24 coaxially arranged in the middle hole, a fixed ring 25 respectively screwed with the lower end of the lower shell 6 and the lower end of the inner shaft 24, and a baffle ring 26 arranged at the upper end of the inner shaft 24 and having an outer diameter smaller than the diameter of the middle hole; the gap between the outer side wall and the middle hole side wall of the inner shaft 24 forms a vacuum pumping channel 8. A gap is formed between the lower end of the rotating shaft 1 and the fixed ring 25.
The upper end of the upper shell 4, the lower end of the lower shell 6 and the upper end of the inner shaft 24 are respectively provided with a sealing ring groove 27 and an O-shaped sealing ring 28 arranged in the sealing ring groove 27; the seal ring groove 27 is filled with vacuum grease.
The integrated high-precision rotation function magnetic fluid 13 sealing device further comprises: the encoder is arranged in the motor cavity 2, the encoder base 29 is in threaded connection with the rotating shaft 1, the induction ring 30 of the encoder is positioned on the lower side of the frameless torque motor and is in threaded connection with the encoder base 29, and the reading head 31 of the encoder is in threaded connection with the side wall of the motor cavity 2.
The upper shell 4 is provided with a sound deadening way 32 communicated with the motor cavity 2 and a sound deadening device 33 arranged in the sound deadening way 32.
When the magnetic fluid 13 sealing device integrated with the high-precision rotation function is used, the frameless torque motor is electrically connected with the driver, and the rotation of the rotating shaft 1 can be controlled at high precision by setting parameters of the driver; the inlet connector 22 is connected with a water inlet pipe, and the outlet connector 23 is connected with a water outlet pipe; two ends of the vacuumizing channel 8 are respectively communicated with a vacuum cavity and a vacuumizing device of the vacuum equipment.
In addition to the above embodiments, the technical features or technical data of the present invention may be reselected and combined to form new embodiments within the scope of the claims and the specification of the present invention, which are all realized by those skilled in the art without creative efforts, and thus, the embodiments of the present invention not described in detail should be regarded as specific embodiments of the present invention and are within the protection scope of the present invention.

Claims (8)

1. A magnetic fluid sealing device integrated with high-precision rotation function comprises: the pivot, characterized by, integrated high accuracy rotation function's magnetic fluid sealing device still include: the motor comprises an upper shell, a lower shell, two magnetic fluid sealing assemblies, a motor spacer ring, a frameless torque motor, a vacuumizing channel and a cooling device, wherein the lower end of the upper shell is provided with a motor cavity and is pivoted with a rotating shaft through an upper bearing; the rotor of the frameless torque motor is connected with the rotating shaft, and the stator of the frameless torque motor is connected with the lower end of the motor spacer ring; the magnetic fluid seal assembly includes: the magnetic pole piece is arranged at the side wall in the upper shell or the side wall in the lower shell, the permanent magnet is arranged in the magnetic pole piece, and the magnetic fluid is arranged between the magnetic pole piece and the outer side wall of the rotating shaft; the cooling device includes: the magnetic fluid cooling device comprises an upper bearing cooling channel, a lower bearing cooling channel and two magnetic fluid cooling channels, wherein the upper bearing cooling channel is formed by an upper bearing cooling ring groove which is arranged on the outer side periphery of an upper shell and is opposite to an upper bearing, an upper sealing ring which covers the upper bearing cooling ring groove and is connected with the upper shell; the magnetic fluid cooling channel comprises: the magnetic fluid cooling ring grooves are arranged on the outer side of the magnetic pole piece, the cooling inlet is arranged on the outer side of the upper shell and communicated with the first magnetic fluid cooling ring groove of the first magnetic fluid cooling channel, the cooling outlet is arranged on the outer side of the lower shell and communicated with the second magnetic fluid cooling ring groove of the second magnetic fluid cooling channel, and the connecting pipes are arranged.
2. The magnetic fluid sealing device integrating the high-precision rotation function according to claim 1, wherein the two magnetic fluid cooling ring grooves of the first magnetic fluid cooling channel arranged in the upper housing, the upper bearing cooling channel, the lower bearing cooling channel and the two magnetic fluid cooling ring grooves of the second magnetic fluid cooling channel arranged in the lower housing are sequentially communicated through a connecting pipe.
3. The magnetic fluid sealing device integrating the high-precision rotation function as claimed in claim 2, wherein the upper sealing ring is formed by connecting two upper half sealing rings; the lower sealing ring is formed by connecting two lower half sealing rings.
4. The magnetic fluid sealing device integrating the high-precision rotation function as claimed in claim 2, wherein the cooling inlet is provided with an inlet joint, and the cooling outlet is provided with an outlet joint.
5. A magnetic fluid sealing device integrating high-precision rotation function according to claim 1, 2, 3 or 4, characterized in that the rotating shaft is provided with: the middle hole, the inner shaft coaxially arranged in the middle hole, the fixed rings respectively connected with the lower end of the lower shell and the lower end of the inner shaft, and the baffle ring arranged at the upper end of the inner shaft and having the outer diameter smaller than the diameter of the middle hole; and a vacuumizing channel is formed by a gap between the outer side wall of the inner shaft and the middle hole side wall.
6. The magnetic fluid sealing device integrating the high-precision rotation function according to claim 5, wherein the upper end of the upper shell, the lower end of the lower shell and the upper end of the inner shaft are respectively provided with a sealing ring groove and an O-shaped sealing ring arranged in the sealing ring groove; vacuum grease is filled in the sealing ring groove.
7. The integrated high-precision rotary-function magnetic fluid sealing device according to claim 1, 2, 3 or 4, characterized by further comprising: the encoder is arranged in the motor cavity, the encoder seat is connected with the rotating shaft, the induction ring of the encoder is positioned on the lower side of the frameless torque motor and is connected with the encoder seat, and the reading head of the encoder is connected with the side wall of the motor cavity.
8. The magnetic fluid sealing device integrating the high-precision rotating function as claimed in claim 1, 2, 3 or 4, wherein the upper shell is provided with a sound deadening channel communicated with the motor cavity and a sound silencer arranged in the sound deadening channel.
CN201910796434.XA 2019-08-27 2019-08-27 Magnetic fluid sealing device integrating high-precision rotation function Active CN111207217B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910796434.XA CN111207217B (en) 2019-08-27 2019-08-27 Magnetic fluid sealing device integrating high-precision rotation function

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910796434.XA CN111207217B (en) 2019-08-27 2019-08-27 Magnetic fluid sealing device integrating high-precision rotation function

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Publication Number Publication Date
CN111207217A CN111207217A (en) 2020-05-29
CN111207217B true CN111207217B (en) 2021-10-08

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Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6558042B1 (en) * 2001-12-28 2003-05-06 Sae Magnetics(H. K.) Ltd. Bearing guided ferrofluid seal and seal carrier
CN2859087Y (en) * 2005-06-13 2007-01-17 北京东方新材科技有限公司 Gearing device used in vacuum coating field
JP5651596B2 (en) * 2008-10-09 2015-01-14 リガク イノベイティブ テクノロジーズ インコーポレイテッド Magnetic fluid sealing device centering bearing and shaft by compressible ring
CN207213174U (en) * 2017-08-11 2018-04-10 杭州慧翔电液技术开发有限公司 A kind of optical coating system device for sealing magnetic fluid
CN207848417U (en) * 2017-12-27 2018-09-11 杭州维科磁电技术有限公司 The integrated magnetic fluid seal driving device of a kind of multichannel gas circuit and water route

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