CN111167266B - Exhaust gas treatment system and method - Google Patents
Exhaust gas treatment system and method Download PDFInfo
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- CN111167266B CN111167266B CN201811340431.7A CN201811340431A CN111167266B CN 111167266 B CN111167266 B CN 111167266B CN 201811340431 A CN201811340431 A CN 201811340431A CN 111167266 B CN111167266 B CN 111167266B
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- 238000000034 method Methods 0.000 title claims abstract description 23
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 241
- 238000005406 washing Methods 0.000 claims abstract description 101
- 239000007789 gas Substances 0.000 claims abstract description 83
- 238000011084 recovery Methods 0.000 claims abstract description 79
- 238000002485 combustion reaction Methods 0.000 claims abstract description 59
- 239000002912 waste gas Substances 0.000 claims abstract description 28
- 238000009792 diffusion process Methods 0.000 claims description 16
- 238000001816 cooling Methods 0.000 claims description 15
- 239000002253 acid Substances 0.000 claims description 4
- 238000004064 recycling Methods 0.000 abstract description 8
- 230000000694 effects Effects 0.000 abstract description 7
- 239000000428 dust Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 125000004122 cyclic group Chemical group 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000005275 alloying Methods 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
- B01D53/18—Absorbing units; Liquid distributors therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Treating Waste Gases (AREA)
Abstract
The invention provides a waste gas treatment system and a waste gas treatment method, comprising a washing chamber, a combustion chamber and a recovery chamber which are communicated with each other, wherein when set gas is introduced into the combustion chamber, a first pneumatic valve on a first water inlet pipeline of the washing chamber is opened, a third pneumatic valve on a water return pipeline is closed, and washing water with a second set flow rate is introduced into the washing chamber through the first water inlet pipeline; when the set gas is not introduced, the first pneumatic valve is closed, the third pneumatic valve is opened, and the recovered water in the recovery chamber flows into the washing chamber again through the first water return pipeline for recycling, and when the set gas is introduced and not introduced, different water use modes are adopted, so that water can be saved under the condition of ensuring the waste gas treatment effect, and the running cost of equipment is reduced.
Description
Technical Field
The present disclosure relates to semiconductor manufacturing, and more particularly, to an exhaust gas treatment system and method.
Background
In the semiconductor process, a diffusion furnace tube device is a very common device, which is mainly used for diffusion, oxidation, annealing and alloying processes, and is also suitable for special temperature treatment of materials. The diffusion furnace tube device can generate waste gas in the working process, and if the waste gas is directly discharged without treatment, the waste gas can cause great pollution to air and environment, so that the diffusion furnace tube device is generally connected with a waste gas treatment system, and the water consumption of the existing waste gas treatment system is very large for effectively treating the waste gas, and the running cost of the device is very high.
Disclosure of Invention
The invention aims to provide an exhaust gas treatment system and an exhaust gas treatment method, which are used for reducing the water consumption of the exhaust gas treatment system.
In order to achieve the above object, the present invention provides an exhaust gas treatment system, comprising a washing chamber, a combustion chamber and a recovery chamber, wherein the washing chamber and the combustion chamber are both communicated with the recovery chamber;
the washing chamber is provided with a first water inlet pipeline which is used for receiving washing water and leading the washing water into the washing chamber, and a first pneumatic valve is arranged on the first water inlet pipeline;
the recovery chamber is provided with a second water inlet pipeline for receiving washing water and leading the washing water into the recovery chamber, a second pneumatic valve is arranged on the second water inlet pipeline, the recovery chamber is communicated with the washing chamber through a first water return pipeline, and a third pneumatic valve is arranged on the first water return pipeline;
the second pneumatic valve is opened at intervals of a set time to enable washing water with a first set flow rate to be introduced into the recovery chamber through the second water inlet pipeline, when set gas is introduced into the combustion chamber, the first pneumatic valve is opened, the third pneumatic valve is closed to enable washing water with a second set flow rate to be introduced into the washing chamber through the first water inlet pipeline, and the first set flow rate is smaller than the second set flow rate; when the set gas is not introduced into the combustion chamber, the first pneumatic valve is closed, the third pneumatic valve is opened, and the reclaimed water in the reclaimed chamber flows into the washing chamber again through the first water return pipeline.
Optionally, the combustion chamber includes combustion chamber, water curtain chamber and the cooling chamber of intercommunication in proper order, water curtain chamber is located the combustion chamber with between the cooling chamber, set for gas after burning in the combustion chamber flow into the water curtain chamber, through water curtain chamber keeps apart the back inflow in the cooling chamber cools off the back inflow in the recovery chamber.
Optionally, the exhaust gas treatment system further includes a second water return pipe, the second water return pipe is communicated with the recovery chamber and the combustion chamber, and the recovered water in the recovery chamber flows into the water curtain chamber and the cooling chamber again through the second water return pipe.
Optionally, the recycling chamber further has a water outlet pipe and a fourth pneumatic valve disposed on the water outlet pipe, and when the water level of the recycled water in the recycling chamber reaches a set height, the fourth pneumatic valve is opened, and the recycled water in the recycling chamber is discharged through the water outlet pipe.
Optionally, the first water inlet pipeline and the second water inlet pipeline are further provided with a first flow regulator and a second flow regulator respectively, so as to regulate the flow of the washing water in the first water inlet pipeline or the second water inlet pipeline.
Optionally, the first set flow is less than or equal to 4 liters/min, and the second set flow is greater than or equal to 12 liters/min.
Optionally, the set gas is an acid gas.
The invention also provides an exhaust gas treatment method, which comprises the following steps:
providing the exhaust treatment system;
the second pneumatic valve is opened at intervals of a set time, so that washing water with a first set flow rate is introduced into the recovery chamber through the second water inlet pipeline; when the combustion chamber is filled with set gas, the first pneumatic valve is opened, the third pneumatic valve is closed, so that washing water with second set flow rate is filled into the washing chamber through the first water inlet pipeline, and the first set flow rate is smaller than the second set flow rate; when the set gas is not introduced into the combustion chamber, the first pneumatic valve is closed, the third pneumatic valve is opened, and the reclaimed water in the reclaimed chamber flows into the washing chamber again through the first water return pipeline.
Optionally, the air inlet of the combustion chamber is connected with a diffusion furnace tube device, and the set gas generated in the diffusion furnace tube device flows into the exhaust gas treatment system through the air inlet.
Optionally, the diffusion furnace tube device sends a control signal to the exhaust gas treatment system to control the opening and closing of the first pneumatic valve and the third pneumatic valve.
The invention provides an exhaust gas treatment system and method, comprising a washing chamber, a combustion chamber and a recovery chamber which are mutually communicated, wherein a first air valve is arranged on a first water inlet pipeline of the washing chamber, a second air valve is arranged on a second water inlet pipeline of the recovery chamber, a water return pipeline is communicated with the recovery chamber and the washing chamber, and a third air valve is arranged on the water return pipeline, wherein the second air valve is used for introducing washing water with a first set flow rate into the recovery chamber at a set time interval, when set gas is introduced into the combustion chamber, the first air valve is opened, the third air valve is closed, and washing water with a second set flow rate which is larger than the first set flow rate is introduced into the washing chamber through the first water inlet pipeline, so that the use amount of the introduced washing water is increased; when the set gas is not introduced, the first pneumatic valve is closed, the third pneumatic valve is opened, the second water inlet pipeline is opened once every certain time, and the reclaimed water in the reclaimed chamber flows into the washing chamber again through the first water return pipeline for recycling.
Drawings
FIG. 1 is a schematic diagram of an exhaust treatment system;
FIG. 2 is a schematic diagram of an exhaust treatment system according to an embodiment of the present invention;
in the drawings, reference numerals are:
1' -a washing chamber; 1-a washing chamber;
11' -a first water inlet pipe; 11-a first water inlet pipe;
2' -combustion chamber; 2-combustion chamber; 21-a combustion chamber; 22-a water curtain cavity; 23-cooling chamber;
a 3' -recovery chamber; 3-a recovery chamber;
31' -a second water inlet conduit; 31-a second water inlet pipe;
4' -a first return line; 4-a first return line;
k1' -first pneumatic valve; k1-a first pneumatic valve;
a K2' -second pneumatic valve; k2-a second pneumatic valve;
a K3' -third pneumatic valve; k3-a third pneumatic valve;
k4-normally closed pneumatic valve;
l1-a first flow regulator; l2-a second flow regulator;
5-a second water return pipeline; 6-a third water inlet pipeline.
Detailed Description
Fig. 1 is a schematic structural diagram of an exhaust gas treatment system, which includes a washing chamber 1', a combustion chamber 2' and a recovery chamber 3', wherein the washing chamber 1' and the combustion chamber 2 'are all located above the recovery chamber 3', the washing chamber 1', the combustion chamber 2' and the recovery chamber 3 'are mutually communicated, the washing chamber 1' has a first water inlet pipe 11', a first air valve K1' is disposed on the first water inlet pipe 11', the recovery chamber 3' has a second water inlet pipe 31', a second air valve K2' is disposed on the second water inlet pipe 31', a first water return pipe 4' is communicated with the recovery chamber 3 'and the washing chamber 1', and a third air valve K3 'is disposed on the first water return pipe 4'. The exhaust treatment system has a large circulation mode and an internal circulation mode. The large circulation mode opens the first pneumatic valve K1', closes the second pneumatic valve K2' and the third pneumatic valve K3', and introduces the washing water into the washing chamber 1' through the first water inlet pipe 11', so that the water consumption is very large (the combustion chamber 2' is not always provided with the set gas introduction), but the effect of waste gas treatment can be ensured, and the treatment effect on the acid gas and the high dust is better; the internal circulation mode is to open the second pneumatic valve K2 'and the third pneumatic valve K3', close the first pneumatic valve K1', and introduce the washing water into the recovery chamber 3' through the second water inlet pipe 31', and the recovered water in the recovery chamber 3' flows back into the washing chamber 1 'through the first water return pipe 4', so that the water consumption in the internal circulation mode is small, but the effect of waste gas treatment is not good, the neutrality of the recovered water cannot be effectively maintained for the high-acidity process, and the equipment parts are easily corroded; further, the switching of the two modes is inconvenient, and the mode switching can be performed only by stopping the machine.
Based on the above, the invention provides an exhaust gas treatment system and method, comprising a washing chamber, a combustion chamber and a recovery chamber which are mutually communicated, wherein a first air valve is arranged on a first water inlet pipeline of the washing chamber, a second air valve is arranged on a second water inlet pipeline of the recovery chamber, a water return pipeline is communicated with the recovery chamber and the washing chamber, and a third air valve is arranged on the water return pipeline, wherein the second air valve is used for introducing washing water with a first set flow rate into the recovery chamber at a set time interval, when the set gas is introduced into the combustion chamber, the first air valve is opened, the third air valve is closed, and washing water with a second set flow rate which is larger than the first set flow rate is introduced into the washing chamber through the first water inlet pipeline, so that the consumption of the washing water is increased; when the set gas is not introduced, the first pneumatic valve is closed, the third pneumatic valve is opened, the second water inlet pipeline is opened once every certain time, and the reclaimed water in the reclaimed chamber flows into the washing chamber again through the first water return pipeline for recycling.
Specific embodiments of the present invention will be described in more detail below with reference to the drawings. Advantages and features of the invention will become more apparent from the following description and claims. It should be noted that the drawings are in a very simplified form and are all to a non-precise scale, merely for convenience and clarity in aiding in the description of embodiments of the invention.
Fig. 2 is a schematic structural diagram of an exhaust gas treatment system according to the present embodiment. As shown in fig. 2, the exhaust gas treatment system comprises a washing chamber 1, a combustion chamber 2 and a recovery chamber 3, wherein the washing chamber 1 and the combustion chamber 2 are communicated with the recovery chamber 3; the washing chamber 1 is provided with a first water inlet pipeline 11 for receiving washing water and leading the washing water into the washing chamber 1, a first pneumatic valve K1 is arranged on the first water inlet pipeline 11, the recovery chamber 3 is provided with a second water inlet pipeline 31 for receiving the washing water and leading the washing water into the recovery chamber 3, a second pneumatic valve K2 is arranged on the second water inlet pipeline 31, the recovery chamber 3 is communicated with the washing chamber 1 through a first water return pipeline 4, and a third pneumatic valve K3 is arranged on the first water return pipeline 4; the second pneumatic valve K2 is opened at intervals of a set time to allow the washing water with a first set flow rate to be introduced into the recovery chamber 3 through the second water inlet pipe 31, the first pneumatic valve K1 is opened when the set gas is introduced into the combustion chamber 2, the third pneumatic valve K3 is closed to allow the washing water with a second set flow rate to be introduced into the washing chamber 1 through the first water inlet pipe 11, and the first set flow rate is smaller than the second set flow rate; when the set gas is not introduced into the combustion chamber 2, the first pneumatic valve K1 is closed, the third pneumatic valve K3 is opened, and the reclaimed water in the reclaimed chamber 3 is caused to flow into the washing chamber 1 again through the first water return pipe 4.
Specifically, as shown in fig. 2, the washing chamber 1, the combustion chamber 2 and the recovery chamber 3 are communicated with each other, the combustion chamber 2 includes a combustion chamber 21, a water curtain chamber 22 and a cooling chamber 23 which are communicated with each other in this order, the water curtain chamber 22 is located between the combustion chamber 21 and the cooling chamber 23, the cooling chamber 23 is communicated with the recovery chamber 3 and the washing chamber 1, the combustion chamber 2 has an air inlet, the set gas generated in a diffusion furnace tube apparatus flows into the combustion chamber 21 through the air inlet, and other combustible gas is introduced into the combustion chamber 21, the set gas is usually an acid gas and may contain a large amount of dust, the set gas is mixed with the other combustible gas and then enters the water curtain chamber 22, the set gas and the other combustible gas are combusted and then further generate dust, the water curtain chamber 22 has water to block off-gas after combustion, cool down, attach to the gas and prevent the water curtain chamber from flowing into the combustion chamber 1, the waste gas from flowing into the cooling chamber 3 and the waste gas from flowing into the recovery chamber 1, and the waste gas from flowing into the washing chamber 1 is recovered when the set gas is not flowing into the cooling chamber 1, and the waste gas is recovered from flowing into the waste gas recovery chamber 1, for a small amount of dust is recovered, for example, the waste gas is recovered from the waste gas is cooled, and the waste gas is recovered from the waste gas is discharged into the waste gas is recovered.
The washing chamber 1 has the first water inlet pipe 11, the first air valve K1 and the first flow regulator L1 are provided on the first water inlet pipe 11, the recovery chamber 3 has the second water inlet pipe 31, the second air valve K2 and the second flow regulator L2 are provided on the second water inlet pipe 31, the first flow regulator L1 and the second flow regulator L2 are used for regulating the flow rate of the washing water on the first water inlet pipe 11 and the second water inlet pipe 31, respectively, for example, the second set flow rate of the first water inlet pipe 11 can be set to be 12 liters/min or more through the first flow regulator L1, and the first set flow rate of the second water inlet pipe 31 can be set to be 4 liters/min or less through the second flow regulator L2. Further, the inlet ends of the first water inlet pipe 11 and the second water inlet pipe 31 may be connected together, and then commonly connected to a water inlet, so as to simplify the whole apparatus.
The washing chamber 1 is communicated with the recovery chamber 3 through a first water return pipeline 4, the recovered water in the recovery chamber 3 reenters the washing chamber 1 through the first water return pipeline 4 for cyclic utilization, and a third pneumatic valve K3 is further arranged on the first water return pipeline 4. The recovery chamber 3 is communicated with the combustion chamber 2 through a second water return pipeline 5, so that the recovery water in the recovery chamber 3 is sent into the combustion chamber 2 for cyclic utilization, water consumption is saved, and the second water return pipeline 5 is in a state of always circulating no matter what state other pneumatic valves are. Further, the ends of the first water return pipe 4 and the second water return pipe 5 connected to the recovery chamber 3 may be connected together and then connected to the recovery chamber 3, so that a water pump, a filter and a heat exchanger may be shared. Alternatively, the end of the second water return pipe 5 connected to the combustion chamber 2 may have two branch pipes, and the two branch pipes are respectively connected to the water curtain chamber 22 and the cooling chamber 23 of the combustion chamber 2, so as to form a water curtain isolation in the water curtain chamber 22.
The exhaust gas treatment system also has a main circulation mode and an internal circulation mode, in which the second air-operated valve K2 is opened at intervals of a set time, that is, every the set time (for example, 300 seconds), the first set flow rate is smaller than the second set flow rate by the first water inlet pipe 31 to ensure the supply of the wash water in the recovery chamber 3, when the set gas is introduced into the combustion chamber 2, a large amount of wash water is required to treat the exhaust gas, the first air-operated valve K1 is opened, the third air-operated valve K3 is closed, the second set flow rate of wash water is introduced into the washing chamber 1 through the first water inlet pipe 11, that is, the first set flow rate is smaller than the second set flow rate, that is, the first water inlet pipe 31 is supplied with the wash water of the second set flow rate by the first water inlet pipe 11 in the whole system, and the water consumption of the mode is high, but the operation cost of the device is high, and the dust treatment effect is good. When the set gas is not introduced into the combustion chamber 2, the first pneumatic valve K1 is closed, the third pneumatic valve K3 is opened, and the washing water with a first set flow rate is introduced into the recovery chamber 3 only through the second water inlet pipe 31, and the recovered water in the recovery chamber 3 flows into the washing chamber 1 again through the first water return pipe 4 for recycling, which is an internal circulation mode, and in this mode, even if the water consumption is small, the waste gas treatment effect is not affected because the set gas is not introduced.
Further, the recovery chamber 3 further has a water outlet pipe (not shown) and a fourth pneumatic valve provided on the water outlet pipe, and when the water level of the recovery water in the recovery chamber 3 reaches a set level, the fourth pneumatic valve is opened to discharge the recovery water in the recovery chamber 3 through the water outlet pipe. Or after the internal circulation mode circulates for a fixed time, for example, after the internal circulation mode circulates for half an hour, the fourth pneumatic valve can be opened to discharge the recovered water in the recovery chamber 3, and the recovered water is introduced into the recovery chamber 3 again, because the second water inlet pipeline 31 introduces the first set flow of the wash water into the recovery chamber 3 every other set time, the water outlet pipeline correspondingly discharges the recovered water in the recovery chamber 3, the circulating water in the whole waste gas treatment system can be replaced timely, the damage of various devices in the waste gas treatment system caused by the too high acidity of the recovered water in the waste gas treatment system is avoided, and the waste gas treatment effect is better. Further, the recovery chamber 3 may further be provided with a third water inlet pipe 6, a normally closed pneumatic valve K4 is disposed on the third water inlet pipe 6, the normally closed pneumatic valve K4 is in a normally closed state, when the shutdown maintenance is required, the recovery water in the recovery chamber 3 is drained, and the washing water can be introduced into the recovery chamber 3 by opening the normally closed pneumatic valve K4, so as to ensure the maintenance process. It will be appreciated that the water inlet of the third water inlet pipe 6 may be connected to the water inlet of the first water inlet pipe 11 and the water inlet of the second water inlet pipe 31, and the water outlet of the third water inlet pipe 6 may be connected to the water outlet of the second water inlet pipe 31, so as to simplify the whole system.
Based on the above, the present invention also provides an exhaust gas treatment method, comprising:
s1: providing the exhaust treatment system;
s2: the second pneumatic valve is opened at intervals of a set time, so that washing water with a first set flow rate is introduced into the recovery chamber through the second water inlet pipeline; when the combustion chamber is filled with set gas, the first pneumatic valve is opened, the third pneumatic valve is closed, so that washing water with second set flow rate is filled into the washing chamber through the first water inlet pipeline, and the first set flow rate is smaller than the second set flow rate; when the set gas is not introduced into the combustion chamber, the first pneumatic valve is closed, the third pneumatic valve is opened, and the reclaimed water in the reclaimed chamber flows into the washing chamber again through the first water return pipeline.
Specifically, the air inlet of the combustion chamber 2 is connected to a diffusion furnace tube device, the set gas generated in the diffusion furnace tube device flows into the exhaust gas treatment system through the air inlet, the diffusion furnace tube device sends a control signal to the exhaust gas treatment system to control the opening and closing of the first pneumatic valve K1 and the third pneumatic valve K3, for example, the diffusion furnace tube device sends a high-level signal to the exhaust gas treatment system when the set gas is introduced into the exhaust gas treatment system, the first pneumatic valve K1 is opened, the third pneumatic valve K3 is closed and enters a main circulation mode, the diffusion furnace tube device stops introducing the set gas into the exhaust gas treatment system and sends a low-level signal to the exhaust gas treatment system, the first pneumatic valve K1 is closed, the third pneumatic valve K3 is opened and enters an internal circulation mode.
In summary, in the exhaust gas treatment system and the method provided by the embodiment of the invention, the exhaust gas treatment system comprises a washing chamber, a combustion chamber and a recovery chamber which are mutually communicated, wherein a first air valve is arranged on a first water inlet pipeline of the washing chamber, a second air valve is arranged on a second water inlet pipeline of the recovery chamber, a water return pipeline is communicated with the recovery chamber and the washing chamber, and a third air valve is arranged on the water return pipeline, wherein the second air valve is used for introducing washing water with a first set flow rate into the washing chamber at a set time interval, when the set gas is introduced into the combustion chamber, the first air valve is opened, the third air valve is closed, and washing water with a second set flow rate which is larger than the first set flow rate is introduced into the washing chamber through the first water inlet pipeline, so that the flow rate of the washing water introduced into the washing chamber is increased; when the set gas is not introduced, the first pneumatic valve is closed, the third pneumatic valve is opened, the second water inlet pipeline is opened once every certain time, and the reclaimed water in the reclaimed chamber flows into the washing chamber again through the first water return pipeline for recycling.
The foregoing is merely a preferred embodiment of the present invention and is not intended to limit the present invention in any way. Any person skilled in the art will make any equivalent substitution or modification to the technical solution and technical content disclosed in the invention without departing from the scope of the technical solution of the invention, and the technical solution of the invention is not departing from the scope of the invention.
Claims (8)
1. A method for treating waste gas is characterized in that,
providing an exhaust gas treatment system, wherein the exhaust gas treatment system comprises a washing chamber, a combustion chamber and a recovery chamber, and the washing chamber and the combustion chamber are communicated with the recovery chamber;
the washing chamber is provided with a first water inlet pipeline which is used for receiving washing water and leading the washing water into the washing chamber, and a first pneumatic valve is arranged on the first water inlet pipeline;
the recovery chamber is provided with a second water inlet pipeline for receiving washing water and leading the washing water into the recovery chamber, a second pneumatic valve is arranged on the second water inlet pipeline, the recovery chamber is communicated with the washing chamber through a first water return pipeline, and a third pneumatic valve is arranged on the first water return pipeline;
the waste gas treatment system further comprises a second water return pipeline, the second water return pipeline is communicated with the recovery chamber and the combustion chamber, and the second water return pipeline is in a state of always flowing;
the second pneumatic valve is opened at intervals of a set time, so that washing water with a first set flow rate is introduced into the recovery chamber through the second water inlet pipeline; when the combustion chamber is filled with set gas, the first pneumatic valve is opened, the third pneumatic valve is closed, so that washing water with second set flow rate is filled into the washing chamber through the first water inlet pipeline, and the first set flow rate is smaller than the second set flow rate; when the set gas is not introduced into the combustion chamber, the first pneumatic valve is closed, the third pneumatic valve is opened, and the recovered water in the recovery chamber flows into the washing chamber again through the first water return pipeline, wherein the set gas is acid gas.
2. The exhaust gas treatment method according to claim 1, wherein the combustion chamber includes a combustion chamber, a water curtain chamber and a cooling chamber which are communicated in this order, the water curtain chamber is located between the combustion chamber and the cooling chamber, the set gas flows into the water curtain chamber after being combusted in the combustion chamber, flows into the cooling chamber after being isolated by the water curtain chamber, and flows into the recovery chamber after being cooled.
3. The exhaust gas treatment method according to claim 2, wherein the reclaimed water in the reclaimed chamber is redirected into the water curtain chamber and the cooling chamber through the second return water pipe.
4. The exhaust gas treatment method according to claim 1, wherein the recovery chamber further has a water outlet pipe and a fourth air-operated valve provided on the water outlet pipe, the fourth air-operated valve being opened when the water level of the recovered water in the recovery chamber reaches a set level, and the recovered water in the recovery chamber is discharged through the water outlet pipe.
5. The exhaust gas treatment method according to claim 1, wherein a first flow regulator and a second flow regulator are further provided on the first water intake pipe and the second water intake pipe, respectively, to regulate a flow rate of wash water in the first water intake pipe or the second water intake pipe.
6. The exhaust gas treatment method according to claim 5, wherein the first set flow rate is 4 liters/min or less and the second set flow rate is 12 liters/min or more.
7. The exhaust gas treatment method according to any one of claims 1 to 6, wherein an air inlet of the combustion chamber is connected to a diffusion furnace tube apparatus, and the set gas generated in the diffusion furnace tube apparatus flows into the exhaust gas treatment system through the air inlet.
8. The exhaust gas treatment method of claim 7, wherein the diffusion furnace apparatus sends control signals to the exhaust gas treatment system to control opening and closing of the first pneumatic valve and the third pneumatic valve.
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| CN201811340431.7A CN111167266B (en) | 2018-11-12 | 2018-11-12 | Exhaust gas treatment system and method |
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| CN201811340431.7A CN111167266B (en) | 2018-11-12 | 2018-11-12 | Exhaust gas treatment system and method |
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| CN111167266B true CN111167266B (en) | 2024-03-29 |
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