CN111146967A - High-reliability surface breakdown discharge trigger type pulse arc striking power supply - Google Patents
High-reliability surface breakdown discharge trigger type pulse arc striking power supply Download PDFInfo
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- CN111146967A CN111146967A CN201911353705.0A CN201911353705A CN111146967A CN 111146967 A CN111146967 A CN 111146967A CN 201911353705 A CN201911353705 A CN 201911353705A CN 111146967 A CN111146967 A CN 111146967A
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- photothyristor
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K3/00—Circuits for generating electric pulses; Monostable, bistable or multistable circuits
- H03K3/02—Generators characterised by the type of circuit or by the means used for producing pulses
- H03K3/53—Generators characterised by the type of circuit or by the means used for producing pulses by the use of an energy-accumulating element discharged through the load by a switching device controlled by an external signal and not incorporating positive feedback
- H03K3/57—Generators characterised by the type of circuit or by the means used for producing pulses by the use of an energy-accumulating element discharged through the load by a switching device controlled by an external signal and not incorporating positive feedback the switching device being a semiconductor device
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Abstract
The invention discloses a surface breakdown discharge triggering type pulse arc striking power supply, and designs that the triggering type pulse arc striking power supply comprises a rectifying circuit, a capacitor charging and discharging circuit and a triggering control circuit; when the output voltage of the arc main power supply is higher than 75% of the no-load output voltage or the output current is lower than 30A, the trigger control circuit judges that the cathode arc source is in an arc extinguishing state and triggers a pulse signal, the rectifying circuit synchronously converts alternating current 220V into direct current 360V and starts to charge the capacitor, when the charging voltage reaches 360V, the photothyristor VS1 is automatically turned off, the photothyristor VS1 is reliably turned off for 2ms, the trigger control circuit sends a conduction trigger pulse signal to the photothyristor VS2, and the voltage of the capacitor is applied to a ceramic trigger of the cathode arc source through the photothyristor VS2 to provide pulse discharging voltage for the surface breakdown of the ceramic.
Description
Technical Field
The invention belongs to the technical field of power pulse power supplies, and relates to a special power supply matched with a surface breakdown discharge trigger type pulse arc striking device.
Background
The vacuum cathode arc ion source is a core component of multi-arc ion plating equipment, and because arc discharge of the vacuum cathode arc ion source needs to undergo an arc striking process, initial plasma can be provided to initiate arc discharge through a surface breakdown discharge triggered arc striking technology. The triggered pulse power supply is a key technology for causing arc discharge, and usually adopts an IGBT module circuit to control the on and off of a circuit. However, in the actual multi-arc ion plating process, the coating is additionally deposited on the trigger electrode of the arc striking device, the insulating property of the edge position of the coating is reduced along with the increase of the deposition thickness of the coating, the current is rapidly increased, the high current change rate dI/dt can cause overcurrent impact on the IGBT device, the voltage and current capacity of the commercial IGBT device is limited, the breakdown voltage is low, the overcurrent is small, the IGBT can be overheated or damaged, and the trigger type pulse arc striking power supply is short-circuited and damaged.
Disclosure of Invention
Aiming at the defects of the prior art, the invention aims to provide a trigger type pulse power supply circuit designed by adopting a photo-thyristor module, and aims to solve the problems of reliability and efficiency of an edge-surface breakdown trigger type arc ignition power supply. And the circuit structure is simple in design, safe and reliable, low in manufacturing cost, space-saving and convenient to popularize and apply.
The invention mainly solves the problems by the following technical scheme: an electrical power source triggered by breakdown along a surface for striking an arc, comprising: the device comprises a rectifying circuit, a capacitor charging and discharging circuit and a trigger control circuit; the rectifying circuit comprises a fuse FU1, a transformer TV and a rectifying bridge U1 and is used for converting alternating current into direct current; the capacitor charging and discharging circuit comprises a resistor R1, a resistor R2, a resistor R3, a photothyristor VS1, a photothyristor VS2, a capacitor C1, a capacitor C2, a capacitor C3, a freewheeling diode U2 and an inductor L, wherein the cathode of the photothyristor VS1 is connected with the anodes of the capacitors C1, C2 and C3, the three capacitors are connected in parallel and then connected to the anode of the photothyristor VS2 through R2, the cathode of the photothyristor VS2 is respectively connected with the inductor L and the freewheeling diode U2, the inductor L is connected with the ceramic edge of a trigger electrode of a cathode arc source through a current-limiting resistor R3, and the capacitor charging and discharging circuit provides pulse voltage required; the trigger control circuit comprises an integrated trigger control circuit board, and two paths of pulse signal output ends of the integrated trigger control circuit board are respectively connected with signal trigger electrodes of photothyristors VS1 and VS2 and used for controlling the time sequence of charging and discharging of a capacitor.
Further, the frequency of charging and discharging of the capacitor is 0.5Hz, namely, the trigger type pulse arc ignition power supply circuit applies pulse voltage to the edge surface of the trigger electrode ceramic at the frequency of 0.5Hz until the edge surface is broken down to discharge and ignite the arc successfully.
Further, when the output voltage of the arc main power supply is higher than 75% of the no-load output voltage or the output current is lower than 30A, the trigger control circuit judges that the cathode arc source is in an arc extinguishing state and triggers the pulse signal.
Further, when the pulse signal is triggered, the rectifying circuit synchronously converts the alternating current 220V into the direct current 360V, and the capacitors C1, C2 and C3 are charged; when the charging voltage reaches 360V, the photothyristor VS1 turns off automatically; after the photothyristor VS1 is reliably turned off for 2ms, the trigger control circuit sends out a conduction trigger pulse signal to the photothyristor VS2, and the voltages of the capacitors C1, C2 and C3 are applied to the ceramic trigger electrode of the cathode arc source through the photothyristor VS2 to provide pulse discharge voltage for the surface breakdown of the ceramic surface.
Furthermore, a starting interface and a counting pulse signal interface of the trigger control panel are both connected with the PLC.
Furthermore, the trigger control board is connected to the main arc loop and used for feeding back voltage and current of the main loop.
In summary, the trigger type pulse power supply circuit obtained by the specially designed photothyristor module replaces the on and off of the IGBT module circuit control circuit in the prior art, so as to solve the problems of reliability and efficiency of the surface breakdown trigger type arc ignition power supply in the prior art. The invention has the following beneficial effects: the power supply has simple structure, safety, durability, convenient realization and product miniaturization, low economic cost, and simultaneously improves the reliability of trigger work and the arc striking stability, and can be widely matched with a surface breakdown discharge arc striking device for use.
Drawings
Fig. 1 is a schematic diagram of an arc ignition power supply circuit triggered by surface breakdown discharge according to an embodiment of the invention.
Fig. 2 is a block diagram of the operation principle of the arc ignition power supply triggered by the breakdown along the surface in the embodiment of the invention.
Detailed Description
In order to make the technical scheme of the invention easier to understand and master, the invention is further described in detail below with reference to the accompanying drawings and embodiments. The specific embodiments described herein are merely illustrative of the invention and do not delimit the invention.
Fig. 1 shows a schematic diagram of an arc ignition power supply circuit triggered by breakdown along a surface according to an embodiment of the present invention, including: the device comprises a rectifying circuit, a capacitor charging and discharging circuit and a trigger control circuit; the rectifying circuit comprises a fuse FU1, a transformer TV and a rectifying bridge U1; the capacitor charging and discharging circuit comprises a resistor R1, a resistor R2, a resistor R3, a photothyristor VS1, a photothyristor VS2, a capacitor C1, a capacitor C2, a capacitor C3, a freewheeling diode U2 and an inductor L, can provide pulse voltage required by surface breakdown triggering discharge, and can naturally end the charging process and the discharging process by controlling the self-turn-off characteristic of the photothyristor so as to avoid overvoltage impact caused by forced turn-off; the trigger control circuit comprises an integrated trigger control circuit board which controls the time sequence of charging and discharging of the capacitor.
When the output voltage of the arc main power supply is higher than 75% of the no-load output voltage or the output current is lower than 30A, the trigger control circuit judges that the cathode arc source is in an arc extinguishing state and triggers a pulse signal, meanwhile, the rectifying circuit synchronously converts alternating current 220V into direct current 360V, the direct current 360V is connected to the anode of a photothyristor VS1 through a current limiting resistor R1, the cathode of the photothyristor VS1 is connected with the anodes of capacitors C1, C2 and C3, the three capacitors are connected in parallel and then connected to the anode of the photothyristor VS2 through R2, the cathode of the photothyristor VS2 is respectively connected with an inductor L and a freewheeling diode U2, and the inductor L is connected with the ceramic edge.
It can be seen from fig. 1 that two paths of pulse signal output ends of a trigger circuit control board are respectively connected with signal trigger electrodes of photothyristors VS1 and VS2, when the charging voltage reaches 360V, the photothyristors VS1 are automatically turned off, and after the photothyristors VS1 are reliably turned off for 2ms, the trigger control circuit sends a conduction trigger pulse signal to the photothyristors VS2, and voltages of capacitors C1, C2 and C3 are applied to a ceramic trigger electrode of a cathode arc source through the photothyristors VS2 to provide pulse discharge voltage for surface breakdown of a ceramic surface.
In addition, the start-stop and counting pulse signals of the trigger control board are connected with the PLC, the trigger control board is connected into the main arc loop, and the voltage and the current of the main loop are fed back. The frequency of capacitor charging and discharging is 0.5Hz, namely the trigger type pulse arc ignition power circuit applies pulse voltage to the triggering electrode ceramic edge surface at the frequency of 0.5Hz until the edge surface breakdown discharge arc ignition is successful.
By applying the embodiment, the working principle of the edge breakdown discharge trigger type pulse arc ignition power supply is shown in fig. 2, when the output voltage of the arc main power supply is higher than 75% of the no-load output voltage, or the output current is lower than 30A, the trigger control circuit judges that the cathode arc source is in an arc extinguishing state, triggers a pulse signal, the rectifying circuit synchronously converts alternating current 220V into direct current 360V, and starts to charge capacitors C1, C2 and C3, when the charging voltage reaches 360V, the photothyristor VS1 is automatically turned off, and the photothyristor VS1 is reliably turned off for 2ms, the trigger control circuit sends a conduction trigger pulse signal to the photothyristor VS2, and the voltages of the capacitors C1, C2 and C3 are applied to a ceramic trigger electrode of the cathode arc source through the photothyristor VS2 to provide pulse discharge voltage for edge breakdown of the ceramic surface.
The above description is only exemplary of the present invention and should not be taken as limiting the scope of the present invention, and any modifications, equivalents, improvements and the like that are within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (6)
1. The utility model provides an it triggers formula pulse arc starting power to puncture along face, its characterized in that: the trigger type pulse arc striking power supply comprises a rectifying circuit, a capacitor charging and discharging circuit and a trigger control circuit; the rectifying circuit comprises a fuse FU1, a transformer TV and a rectifying bridge U1 and is used for converting alternating current into direct current; the capacitor charging and discharging circuit comprises a resistor R1, a resistor R2, a resistor R3, a photothyristor VS1, a photothyristor VS2, a capacitor C1, a capacitor C2, a capacitor C3, a freewheeling diode U2 and an inductor L, wherein the cathode of the photothyristor VS1 is connected with the anodes of the capacitors C1, C2 and C3, the three capacitors are connected in parallel and then connected to the anode of the photothyristor VS2 through R2, the cathode of the photothyristor VS2 is respectively connected with the inductor L and the freewheeling diode U2, the inductor L is connected with the ceramic edge of a trigger electrode of a cathode arc source through a current-limiting resistor R3, and the capacitor charging and discharging circuit provides pulse voltage required; the trigger control circuit comprises an integrated trigger control circuit board, and two paths of pulse signal output ends of the integrated trigger control circuit board are respectively connected with signal trigger electrodes of photothyristors VS1 and VS2 and used for controlling the time sequence of charging and discharging of a capacitor.
2. The surface breakdown discharge triggered pulse arc ignition power supply of claim 1, wherein: the frequency of capacitor charging and discharging is 0.5Hz, namely the trigger type pulse arc ignition power circuit applies pulse voltage to the triggering electrode ceramic edge surface at the frequency of 0.5Hz until the edge surface breakdown discharge arc ignition is successful.
3. The surface breakdown discharge triggered pulse arc ignition power supply of claim 1, wherein: when the output voltage of the arc main power supply is higher than 75% of the no-load output voltage or the output current is lower than 30A, the trigger control circuit judges that the cathode arc source is in an arc extinguishing state and triggers a pulse signal.
4. The surface breakdown discharge triggered pulse arc ignition power supply of claim 1, wherein: when a pulse signal is triggered, the rectifying circuit synchronously converts alternating current 220V into direct current 360V, and capacitors C1, C2 and C3 are charged; when the charging voltage reaches 360V, the photothyristor VS1 turns off automatically; after the photothyristor VS1 is reliably turned off for 2ms, the trigger control circuit sends out a conduction trigger pulse signal to the photothyristor VS2, and the voltages of the capacitors C1, C2 and C3 are applied to the ceramic trigger electrode of the cathode arc source through the photothyristor VS2 to provide pulse discharge voltage for the surface breakdown of the ceramic surface.
5. The surface breakdown discharge triggered pulse arc ignition power supply of claim 1, wherein: the starting interface and the counting pulse signal interface of the trigger control panel are both connected with the PLC controller.
6. The surface breakdown discharge triggered pulse arc ignition power supply of claim 1, wherein: the trigger control board is connected to the main arc loop and used for feeding back voltage and current of the main loop.
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| CN201911353705.0A CN111146967B (en) | 2019-12-25 | 2019-12-25 | High-reliability edge surface breakdown discharge trigger type pulse arc striking power supply |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112795874A (en) * | 2020-12-14 | 2021-05-14 | 兰州空间技术物理研究所 | Surface breakdown triggered arc striking structure |
| CN115189586A (en) * | 2022-09-07 | 2022-10-14 | 新铂科技(东莞)有限公司 | Power supply device capable of realizing multi-energy conversion output in pulse |
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Cited By (2)
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|---|---|---|---|---|
| CN112795874A (en) * | 2020-12-14 | 2021-05-14 | 兰州空间技术物理研究所 | Surface breakdown triggered arc striking structure |
| CN115189586A (en) * | 2022-09-07 | 2022-10-14 | 新铂科技(东莞)有限公司 | Power supply device capable of realizing multi-energy conversion output in pulse |
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| CN111146967B (en) | 2023-08-15 |
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