CN111146558B - Terahertz narrow-beam transmission array antenna based on thin film technology and implementation method thereof - Google Patents

Terahertz narrow-beam transmission array antenna based on thin film technology and implementation method thereof Download PDF

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CN111146558B
CN111146558B CN201911075366.4A CN201911075366A CN111146558B CN 111146558 B CN111146558 B CN 111146558B CN 201911075366 A CN201911075366 A CN 201911075366A CN 111146558 B CN111146558 B CN 111146558B
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layer
transmission
array
conductive pattern
transmission array
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CN111146558A (en
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吴林晟
陈谢鹏
冯金龙
孔海龙
毛军发
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Shanghai Jiaotong University
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q1/00Details of, or arrangements associated with, antennas
    • H01Q1/12Supports; Mounting means
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q13/00Waveguide horns or mouths; Slot antennas; Leaky-waveguide antennas; Equivalent structures causing radiation along the transmission path of a guided wave
    • H01Q13/06Waveguide mouths
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q15/00Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
    • H01Q15/02Refracting or diffracting devices, e.g. lens, prism
    • H01Q15/12Refracting or diffracting devices, e.g. lens, prism functioning also as polarisation filter
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q15/00Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
    • H01Q15/24Polarising devices; Polarisation filters 
    • H01Q15/242Polarisation converters
    • H01Q15/246Polarisation converters rotating the plane of polarisation of a linear polarised wave
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q19/00Combinations of primary active antenna elements and units with secondary devices, e.g. with quasi-optical devices, for giving the antenna a desired directional characteristic
    • H01Q19/06Combinations of primary active antenna elements and units with secondary devices, e.g. with quasi-optical devices, for giving the antenna a desired directional characteristic using refracting or diffracting devices, e.g. lens

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Abstract

A terahertz narrow-beam transmission array antenna based on a thin film process comprises: top layer transmission that from top to bottom set gradually battle array is fixed with anchor clamps, upper strata for the protection foam, transmission battle array, middle level support with foam, feed waveguide and support, wherein: the inside three cavity that is equipped with from supreme down of top layer transmission battle array mounting fixture, transmission battle array includes: the semiconductor device comprises a protective layer, an upper conductive pattern, a dielectric layer, a lower conductive pattern and an adhesive layer. The invention carries out phase compensation on the electromagnetic wave through the units at different positions of the array, thereby accurately controlling the beam width of the antenna; compared with a conventional transmission array antenna, the polarization conversion unit only needs a single-layer medium, so that a smaller volume is obtained; meanwhile, the thin film technology has high processing precision, the conductive pattern has fine line size, and the problem of poor performance of the terahertz transmission array antenna caused by low PCB technology precision is solved.

Description

Terahertz narrow-beam transmission array antenna based on thin film technology and implementation method thereof
Technical Field
The invention relates to a technology in the field of microwave communication, in particular to a terahertz narrow-beam transmission array antenna based on a thin film process and an implementation method thereof.
Background
The planar transmission type array is a common method for realizing a narrow beam antenna in the prior art, and the design concept of the planar transmission type array is derived from a lens antenna which utilizes the change of the thickness of a medium to adjust the wave path difference. The planar transmission array consists of a large number of units which are arranged in a periodic or quasi-periodic manner and have specific transmission phases, and the curved surface structure of the dielectric lens can be planarized by adjusting the structural parameters of each array unit to realize the required phases. According to array design and geometric optics theory, the compensation phase of each unit of the transmission array surface is reasonably adjusted, spherical-like waves emitted by a feed source can be converted into plane-like waves, and finally pencil-shaped, fan-shaped or other-shaped beams are obtained in the designed direction of a far place; however, the existing planar transmission array antenna generally operates in a lower frequency band, and is usually implemented by using a PCB process. In the terahertz frequency band, the loss of the PCB board is large, the processing precision of the PCB technology is low, and the size requirement of the terahertz frequency band array unit is difficult to meet. Therefore, the performance of the terahertz transmission array antenna based on the PCB technology is poor, and the application requirement of the terahertz wireless system cannot be met.
Disclosure of Invention
Aiming at the defects in the prior art, the invention provides the terahertz narrow-beam transmission array antenna based on the thin film process and the implementation method thereof, which can cover a terahertz frequency band and have the advantages of high directivity, small beam width, simple structure, easy assembly, small volume, light weight, low cost and the like.
The invention is realized by the following technical scheme:
the invention relates to a terahertz narrow-beam transmission array antenna based on a thin film process, which comprises the following components: top layer transmission that from top to bottom set gradually battle array is fixed with anchor clamps, upper strata for the protection foam, transmission battle array, middle level support with foam, feed waveguide and support, wherein: the top layer transmission array fixing clamp and the support fix the transmission array, the upper layer protection foam and the middle layer support foam together, the upper layer protection foam prevents the transmission array from being directly exposed in the air and being oxidized and polluted, the middle layer support foam ensures that the distance between the transmission array and the feed source waveguide meets the design requirement, the feed source waveguide radiates electromagnetic waves, the electromagnetic waves reach the transmission array through the middle layer support foam, and the transmission array regulates and controls received electromagnetic wave beams and forms required narrow-beam electromagnetic radiation in the edge radiation direction.
The top layer transmission matrix mounting fixture inside be equipped with three cavity from bottom to top, wherein: the cavity at the bottom is a cylinder, the size of the cavity is the same as that of the disc at the upper part of the feed source waveguide, the cavity at the middle part is a cuboid, the size of the cavity is the same as that of the middle-layer supporting foam, and the cavity at the upper part is a cuboid, and the size of the cavity is the same as that of the upper-layer protecting foam.
The top layer transmission array fixing clamp is a medium with a low dielectric constant, and disturbance to electromagnetic waves is effectively avoided.
The upper layer protection foam and the middle layer support foam are both of cuboid structures, the materials are media with dielectric constants approximate to 1, electromagnetic properties are close to that of air, the transmission array is effectively prevented from being directly exposed in the air and being oxidized and polluted, the transmission array and the feed source waveguide distance are guaranteed to accord with the design size, and meanwhile the radiation properties of the antenna are guaranteed not to be affected.
The transmission array is based on a polarization conversion resonance principle, and each unit has an independently controlled compensation phase while orthogonal linear polarization interconversion is realized; the shape of the transmission array is a cuboid so as to realize the functions of regulating and controlling received electromagnetic wave beams and forming required narrow beam electromagnetic radiation in the edge emitting direction, and the transmission array specifically comprises the following components: protective layer, upper conductive pattern, dielectric layer, lower floor's conductive pattern and bond line, wherein: the upper conductive pattern has conductivity to transmit transverse linearly polarized electromagnetic waves and reflect longitudinal linearly polarized electromagnetic waves, the dielectric layer is a medium with a dielectric constant of 3.4, the lower conductive pattern has conductivity to convert the longitudinal and transverse linearly polarized electromagnetic waves in a frequency band near a resonance frequency, the bonding layer of the cuboid structure is a viscous low dielectric constant medium, and the protection layer of the cuboid structure is a low dielectric constant medium with an anti-oxidation protection function.
The feed waveguide comprises: rectangular waveguide, the disc and the flange dish that are located rectangular waveguide both ends respectively, wherein: the disc is located and is close to transmission battle array one side, and the ring flange is located and keeps away from transmission battle array one side, all opens rectangular waveguide mouth on disc and the ring flange.
And the rectangular waveguide port on the flange plate at one side of the feed source waveguide, which is far away from the transmission array, is used for external connection.
The support is of a circular truncated cone-shaped structure and comprises an upper-layer circular ring, a middle-layer connecting inclined arm and a bottom-layer circular ring.
The transmission array is realized by the following thin film process, and comprises the following steps:
step 1, preparing two masks and paving the masks on the upper side and the lower side of a dielectric layer film, putting the masks and the dielectric layer into an electron beam evaporation machine, and completing the processing of an upper conductive pattern and a lower conductive pattern on two sides of the dielectric layer film through electron beam evaporation.
Step 2, performing oxygen plasma treatment on both sides of the dielectric layer film, so as to play a cleaning role and improve the overall hydrophilicity of the film; the dielectric layer film is adsorbed on a spin coater, the upper conductive pattern faces upwards, a pre-prepared protective layer solution is dripped by using a liquid transfer gun, the rotating speed of the spin coater is set to 3000 r/min, and the spin coating time is set to 40 seconds, so that a uniform protective layer with an anti-oxidation protection effect can be obtained on the upper layer of the dielectric layer film.
And 3, adsorbing the dielectric layer film on a spin coater, enabling the lower layer conductive pattern to face upwards, dripping a prepared bonding layer solution, setting the rotation speed of the spin coater to be 4200 r/min, and setting the spin coating time to be 1 min, so that a uniform and sticky bonding layer can be obtained on the lower layer of the dielectric layer film.
And 4, placing the middle-layer supporting foam cut in advance on the adhesive layer, and heating and curing for 30 minutes to bond the medium-layer film and the middle-layer supporting foam together by using the adhesive layer.
Technical effects
Compared with the prior art, the invention realizes a narrow beam antenna with reduced weight and volume by utilizing a thin film process in the terahertz frequency band; the invention carries out phase compensation on the electromagnetic wave through the units at different positions of the array, thereby accurately controlling the beam width of the antenna; compared with a conventional transmission array antenna, the polarization conversion unit only needs a single-layer medium, so that a smaller volume is obtained; meanwhile, the thin film technology has high processing precision, the conductive pattern has fine line size, and the problem of poor performance of the terahertz transmission array antenna caused by low PCB technology precision is solved.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIGS. 2 and 3 are schematic and bottom views of a top transmissive matrix mounting fixture according to the present invention;
FIG. 4 is a schematic diagram of a transmissive array according to the present invention;
FIG. 5a is a schematic view of a portion of a transmissive array conductive pattern in accordance with the present invention; b is a schematic diagram of a lower conductive pattern patterning unit of the transmission array;
FIG. 6 is a schematic view of a feed waveguide in the present invention;
FIG. 7 is an explanatory diagram of the positional relationship among the middle and upper protective foam, the transmissive array, the middle supporting foam, and the feed waveguide according to the present invention;
FIG. 8 is a front view, a top view and a left side view of the stand according to the present invention;
figure 9 shows a single feed waveguide at 310GHz,
Figure GDA0002427818540000031
a directional pattern of time;
figure 10 shows a single feed waveguide at 310GHz,
Figure GDA0002427818540000032
a directional pattern of time;
figure 11 shows a transmissive array antenna at 310GHz,
Figure GDA0002427818540000033
a directional pattern of time;
figure 12 shows a transmissive array antenna at 310GHz,
Figure GDA0002427818540000034
directional pattern of time.
In the figure: a top transmission array fixing clamp 1, four equal-size holes 11 of the top transmission array fixing clamp, a first cuboid region 12 hollowed inside the top transmission array fixing clamp, a second cuboid region 13 hollowed inside the top transmission array fixing clamp, a cylindrical region 14 hollowed inside the top transmission array fixing clamp, foam 2 for upper protection, a transmission array 3, an upper pattern 31 of the transmission array, a transmission array dielectric layer 32, a lower pattern 33 of the transmission array, a single unit 331 of the lower pattern of the transmission array, a transmission array bonding layer 34, a transmission array protection layer 35, foam 4 for middle support, a feed source waveguide 5, a disc 51 on one side of the feed source waveguide close to the transmission array, a rectangular waveguide port 52 on one side of the feed source waveguide close to the transmission array, a rectangular waveguide port 53 on one side of the feed source waveguide far away from the transmission array, a flange 54 on one side of the feed source waveguide far away from the transmission array, a bracket 6, an upper ring 61 of the bracket, The middle layer of the bracket is connected with an inclined arm 62 and a bracket bottom layer ring 63.
Detailed Description
As shown in fig. 1, the present embodiment relates to a thin film process-based terahertz narrow-beam transmissive array antenna, including: the device comprises a top layer transmission array fixing clamp 1, upper layer protection foam 2, a transmission array 3, middle layer support foam 4, a feed source waveguide 5 and a bracket 6; the transmission array 3 is arranged between the upper-layer protection foam 2 and the middle-layer support foam 4, and the upper-layer protection foam 2, the transmission array 3 and the middle-layer support foam 4 are arranged between the top-layer transmission array fixing clamp 1 and the feed source waveguide 5 and are fixed with the bracket 6 through four plastic screws penetrating through the top-layer transmission array fixing clamp 1; and the rectangular waveguide port 53 at one side of the feed source waveguide far away from the transmission array forms an external excitation connecting end.
In this embodiment, top layer transmission battle array mounting fixture 1 be the cylinder, three geometry region is dug out to inside, is upper portion cuboid region 12, middle part cuboid region 13 and bottom cylinder region 14 respectively, and top layer transmission battle array mounting fixture 1 uses 3D printing technology processing, and the composition material has avoided the disturbance to the electromagnetic wave effectively when guaranteeing the machining precision for polylactic acid PLA medium that has the low dielectric constant.
The electromagnetic properties of the foam in the upper layer protection foam 2 and the middle layer support foam 4 are close to those of air, the foam is polymethacrylimide PMI, the dielectric constant is close to 1, the transmission array is effectively prevented from being directly exposed in the air and being oxidized and polluted, the distance between the transmission array and the feed source waveguide is ensured to accord with the design size, and meanwhile the radiation property of the antenna is also ensured not to be influenced.
The terahertz narrow-beam transmission array antenna related to the embodiment is particularly applied to wireless communication and radar detection systems in terahertz frequency bands and the like, and the antennaThe size of the core component transmission array 3 is only 15X 0.1009mm3Wherein: the dimensions of the dielectric layer 32 are 15X 0.1mm3The diameter of a disc 51 on one side of the feed source waveguide 5 close to the transmission array is 11mm, the height of the disc is 2mm, the upper layer protection foam 2 is a cuboid, and the size of the upper layer protection foam is 13 multiplied by 1mm3The middle layer support 4 is a cuboid with the size of 15 multiplied by 5mm3. As the working center frequency of the antenna is 310GHz, the standard waveguide working in the frequency band is WR3 waveguide, and the inner diameter of the waveguide is 0.86 multiplied by 0.43mm2. Therefore, in the present invention, the rectangular waveguide port 52 on the side of the feed waveguide close to the transmissive array and the rectangular waveguide port 53 on the side of the feed waveguide far from the transmissive array are all 0.86 × 0.43mm in size2
The transmissive array 3 includes: the upper conductive pattern 31, the dielectric layer 32, the lower conductive pattern 33, the adhesive layer 34, and the protective layer 35 operate based on the polarization conversion principle. The dielectric layer 32 is a cuboid, the constituent material is a polyimide PI film with a relative dielectric constant of 3.4, and the thickness, volume and weight of the transmission array can be effectively reduced by adopting a film process compared with the conventional multilayer dielectric stacking scheme. The upper layer conductive pattern 31 is formed by arranging rectangular strips at equal intervals along the longitudinal direction, the composition substance is metallic nickel, the thickness is 400nm, the lower layer conductive pattern 32 is formed by arranging 196L-shaped patterns with different sizes in a non-periodic mode, the composition substance is metallic copper, and the thickness is 500 nm. The shape of the transmission array adhesive layer 34 is a cuboid, and the composition substance of the adhesive layer is a polydimethylsiloxane film with the relative dielectric constant of 2.35, and the thickness of the polydimethylsiloxane film is 10 micrometers. The shape of the transmissive array protective layer 35 is a cuboid, and the protective layer is composed of a polymethyl methacrylate film with a relative dielectric constant of 3.7 and a thickness of 300 nm.
As shown in fig. 5a, the upper layer conductive pattern 31 is metal strips arranged at equal intervals in the vertical direction, and the width and the interval of the metal strips are 0.105 mm. The lower conductive pattern 32 of the transmissive array is arranged in a non-periodic manner by 196 "L" shaped patterns of different sizes, the "L" shaped patterns are connected by two identical metal strips at 90 °, the width of the metal strips is 0.06mm, and the length of the metal strips is varied from 183 μm to 339 μm, as shown in fig. 5 b.
The embodiment relates to a transmission array 3 in the terahertz narrow-beam transmission array antenna, which is prepared in the following way:
step 1) manufacturing two mask plates, wherein the thickness of the two mask plates is 0.05 mm; and (3) flatly laying the mask plates on the upper side and the lower side of the polyimide PI dielectric layer film with the relative dielectric constant of 3.4, putting the mask plates and the polyimide PI dielectric layer film into an electron beam evaporation machine together, and completing the processing of the upper conductive pattern and the lower conductive pattern on the two sides of the polyimide PI dielectric layer film through electron beam evaporation.
Step 2) after the processing of the double-sided conductive patterns of the dielectric layer film is finished, performing oxygen plasma treatment on the double sides of the polyimide PI dielectric layer film, so that the cleaning effect is achieved and the overall hydrophilicity of the film is improved; the polyimide PI medium layer film is adsorbed on a spin coater, an upper conductive pattern faces upwards, a prepared polymethyl methacrylate protective layer solution is dripped, the rotating speed of the spin coater is set to 3000 r/min, and the spin coating time is set to 40 seconds, so that the uniform polymethyl methacrylate protective layer film with the anti-oxidation protection effect is obtained.
Step 3) after the processing of the double-sided conductive patterns of the dielectric layer film is finished, performing oxygen plasma treatment on the polyimide PI dielectric layer film to play a cleaning role and improve the overall hydrophilicity of the film; and adsorbing the polyimide PI medium layer film on a spin coater, enabling a lower-layer conductive pattern to face upwards, dripping a pre-prepared polydimethylsiloxane bonding layer solution, setting the rotation speed of the spin coater to be 4200 r/min, and setting the spin coating time to be 1 min, thereby obtaining the uniform viscous polydimethylsiloxane bonding layer film.
And 4) placing the middle-layer supporting foam which is cut in advance on the polydimethylsiloxane adhesive layer, and heating and curing for 30 minutes to bond the polyimide PI medium layer film and the middle-layer supporting foam together by utilizing the polydimethylsiloxane adhesive layer film.
The working process of the antenna of the embodiment is that when electromagnetic waves enter the feed waveguide 5, the electromagnetic waves are radiated outwards from the rectangular waveguide port 52 on the feed waveguide 5, which is close to one side of the transmission array, and the radiated electromagnetic waves reach the transmission array 3 through the middle layer supporting foam 4, and the beam width of the radiated electromagnetic waves is wide and the gain is low. The conductive pattern on the transmissive array 3 converts the received spherical-like wave into a plane-like wave, and finally obtains the required specific beam width and high gain in the designed direction of the far field.
As shown in fig. 8, for a single feed waveguide at 310GHz,
Figure GDA0002427818540000051
the gain pattern of time, it can be seen that the antenna gain is 6.8dBi at 0 ° and the-10 dB beamwidth is 178.8 °.
As shown in fig. 9, for a single feed waveguide at 310GHz,
Figure GDA0002427818540000052
the gain pattern of time, it can be seen that the antenna gain is 6.8dBi at 0 deg., the-10 dB beamwidth is 102.4 deg.,
Figure GDA0002427818540000053
the lobe beamwidth in the plane is smaller.
As shown in fig. 10, for a transmissive array antenna at 310GHz,
Figure GDA0002427818540000054
the gain pattern of time, it can be seen that the antenna gain is 17.45dBi at 0 ° and the-10 dB beamwidth is 14.87 °.
As shown in fig. 11, for a transmissive array antenna at 310GHz,
Figure GDA0002427818540000055
the gain pattern of time, it can be seen that the antenna gain is 17.45dBi at 0 °, and the-10 dB beamwidth is 15.46 °.
It can be seen that after the transmissive array is loaded, the gain of the antenna at θ 0 ° increases from 6.8dBi to 17.45dBi, and the-10 dB beamwidth of the main polarization plane of the antenna decreases from 178.8 ° and 102.4 ° to 14.87 ° and 15.46 °.
Which of the above components is original to the invention, has never been disclosed and does not operate in the same manner as any of the prior literature references: a transmissive array based on thin film technology.
The technical details of the transmission array based on the thin film technology are as follows: and processing the conductive patterns on the two sides of the polyimide PI film by an electron beam evaporation process.
Through software simulation, experimental data which can be obtained are as follows: after loading the transmissive array, the gain of the antenna at θ 0 ° increases from 6.8dBi to 17.45dBi, and the-10 dB beamwidth of the main polarization plane of the antenna decreases from 178.8 ° and 102.4 ° to 14.87 ° and 15.46 °.
Compared with the prior art, the device realizes a narrow beam antenna with the beam width of 15 degrees in a 310GHz terahertz frequency band.
The foregoing embodiments may be modified in many different ways by those skilled in the art without departing from the spirit and scope of the invention, which is defined by the appended claims and all changes that come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein.

Claims (8)

1. A terahertz narrow-beam transmission array antenna based on a thin film process is characterized by comprising: top layer transmission that from top to bottom set gradually battle array is fixed with anchor clamps, upper strata for the protection foam, transmission battle array, middle level support with foam, feed waveguide and support, wherein: the inside three cavity that is equipped with from supreme down of top layer transmission battle array mounting fixture, transmission battle array includes: the protective layer, the upper conductive pattern, the dielectric layer, the lower conductive pattern and the bonding layer;
the transmission array is realized by the following thin film process, and comprises the following steps:
step 1, preparing two masks and paving the masks on the upper side and the lower side of a dielectric layer, putting the masks and the dielectric layer into an electron beam evaporation machine, and completing the processing of an upper conductive pattern and a lower conductive pattern on two sides of the dielectric layer through electron beam evaporation;
step 2, performing oxygen plasma treatment on both sides of the dielectric layer to play a cleaning role and improve the overall hydrophilicity of the film; adsorbing the medium layer on a spin coater, enabling an upper conductive pattern to face upwards, dropping a pre-prepared protective layer solution by using a liquid-transferring gun, setting the rotating speed of the spin coater to be 3000 r/min, and setting the spin coating time to be 40 seconds, so as to obtain a uniform protective layer with an anti-oxidation protection effect;
step 3, adsorbing the dielectric layer on a spin coater, enabling the lower-layer conductive pattern to face upwards, dripping a prepared bonding layer solution, setting the rotation speed of the spin coater to be 4200 r/min, and setting the spin coating time to be 1 min, so as to obtain a uniform bonding layer with viscosity;
and 4, placing the middle-layer supporting foam cut in advance on the adhesive layer, and heating and curing for 30 minutes to bond the medium layer and the middle-layer supporting foam together by using the adhesive layer.
2. The terahertz narrow-beam transmission array antenna as claimed in claim 1, wherein in the top layer transmission array fixing clamp, the cavity at the bottom is a cylinder and has the same size as the disc at the upper part of the feed waveguide, the cavity at the middle part is a cuboid and has the same size as the foam for supporting the middle layer, and the cavity at the upper part is a cuboid and has the same size as the foam for protecting the upper layer.
3. The terahertz narrow-beam transmission array antenna as claimed in claim 1, wherein the transmission array is a rectangular parallelepiped structure to realize the functions of controlling the received electromagnetic wave beam and forming the required narrow-beam electromagnetic radiation in the broadside direction.
4. The thz narrow-beam transmissive array antenna as claimed in claim 1, wherein the upper conductive pattern has conductivity to transmit the transverse linearly polarized electromagnetic wave and reflect the longitudinal linearly polarized electromagnetic wave, and the lower conductive pattern has conductivity to convert the longitudinal and transverse linearly polarized electromagnetic waves into each other in a frequency band around a resonance frequency.
5. The terahertz narrow-beam transmission array antenna as claimed in claim 4, wherein the adhesive layer of the rectangular parallelepiped structure is polydimethylsiloxane with viscous low dielectric constant, and the protective layer of the rectangular parallelepiped structure is polymethyl methacrylate with low dielectric constant and anti-oxidation protection effect.
6. The terahertz narrow-beam transmissive array antenna as claimed in claim 1, wherein the feed waveguide comprises: rectangular waveguide, the disc and the flange dish that are located rectangular waveguide both ends respectively, wherein: the disc is located and is close to transmission battle array one side, and the ring flange is located and keeps away from transmission battle array one side, all opens rectangular waveguide mouth on disc and the ring flange.
7. The terahertz narrow-beam transmission array antenna as claimed in claim 6, wherein the feed waveguide is provided with a rectangular waveguide port on a flange plate at a side far away from the transmission array for external connection.
8. The terahertz narrow-beam transmission array antenna as claimed in claim 1, wherein the support is a truncated cone-shaped structure comprising an upper ring, a middle connecting oblique arm and a bottom ring.
CN201911075366.4A 2019-11-06 2019-11-06 Terahertz narrow-beam transmission array antenna based on thin film technology and implementation method thereof Active CN111146558B (en)

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CN110380222A (en) * 2019-06-17 2019-10-25 东南大学 A kind of super surface cell of Huygens, transmission array antenna and unit phase control method

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