CN111142570A - High-precision parallel platform with alignment demonstration function - Google Patents

High-precision parallel platform with alignment demonstration function Download PDF

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Publication number
CN111142570A
CN111142570A CN201811300204.1A CN201811300204A CN111142570A CN 111142570 A CN111142570 A CN 111142570A CN 201811300204 A CN201811300204 A CN 201811300204A CN 111142570 A CN111142570 A CN 111142570A
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China
Prior art keywords
platform
fixed
precision parallel
precision
demonstration
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Pending
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CN201811300204.1A
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Chinese (zh)
Inventor
王卫军
姚迪
张弓
杨根
冯伟
侯至丞
蔡君义
李友浩
刘杰林
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Shenzhen Cas Derui Intelligent Tech Co ltd
Guangzhou Institute of Advanced Technology of CAS
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Shenzhen Cas Derui Intelligent Tech Co ltd
Guangzhou Institute of Advanced Technology of CAS
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Application filed by Shenzhen Cas Derui Intelligent Tech Co ltd, Guangzhou Institute of Advanced Technology of CAS filed Critical Shenzhen Cas Derui Intelligent Tech Co ltd
Priority to CN201811300204.1A priority Critical patent/CN111142570A/en
Publication of CN111142570A publication Critical patent/CN111142570A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00Control of position or direction
    • G05D3/12Control of position or direction using feedback

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention provides a high-precision parallel platform with an alignment demonstration function, and belongs to the technical field of machinery. This high-accuracy platform that connects in parallel includes the cushion cap, high-accuracy platform and demonstration mechanism that connects in parallel, high-accuracy platform that connects in parallel is fixed on the cushion cap, demonstration mechanism includes the section bar support, be fixed with horizontal displacement platform and sharp module on the section bar support, including module frame and slider on the sharp module, the slider is along direction of height sliding connection on the module frame, be provided with characters index point detection camera on the slider, the section bar support is fixed on the cushion cap, horizontal displacement platform includes base and sliding stand, the base is fixed on the section bar support, the sliding stand is along horizontal direction sliding connection on the base, be fixed with steel sheet index point detection camera on the sliding stand. The invention can carry out visual display and understanding on the high-precision alignment platform and can well display the high precision of the high-precision alignment platform.

Description

High-precision parallel platform with alignment demonstration function
Technical Field
The invention belongs to the technical field of machinery, and relates to a high-precision parallel platform with an alignment demonstration function.
Background
With the continuous progress and development of scientific technology, robotics becomes the standard of productivity and technology level in the industry, and high-precision alignment technology is a key core technology in the fields of micromachines, ultra-precision machining, nanotechnology, semiconductors and the like as a high-end technology with obvious representativeness in the field of current robotics, and is widely applied to the fields of LCD (liquid crystal display), network printing equipment, Surface Mount Technology (SMT), integrated circuit manufacturing and the like.
The high-precision contraposition platform is the core of the high-precision contraposition technology and consists of a mechanical structure, electrical control, visual detection and the like. Under the combined action of the three parts, the platform can achieve micron-scale or even nano-scale alignment precision, and plays an important role in finishing accurate device alignment by assembling alignment equipment.
In the prior art, the high-precision alignment platform is difficult to visually align and display, how to set one alignment platform is visual and understandable, and the high precision of the platform can be well displayed, so that the alignment platform is very important work.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides a high-precision parallel platform with an alignment demonstration function, and the technical problems to be solved by the invention are as follows: how to show the high precision of the platform.
The purpose of the invention can be realized by the following technical scheme:
the utility model provides a high-accuracy platform that connects in parallel with counterpoint demonstration function, includes shock attenuation platform, high-accuracy platform and the demonstration mechanism that connects in parallel, high-accuracy platform that connects in parallel is fixed on the shock attenuation bench, a serial communication port, the demonstration mechanism includes the section bar support, be fixed with horizontal displacement platform and sharp module on the section bar support, including module frame and slider on the sharp module, the slider is along direction of height sliding connection on the module frame, be provided with characters mark point detection camera on the slider, the section bar support is fixed on the shock attenuation bench, horizontal displacement platform includes base and sliding stand, the base is fixed on the section bar support, the sliding stand is along horizontal direction sliding connection on the base, be fixed with steel sheet mark point detection camera on the sliding stand.
The working principle is as follows: the high-precision parallel platform is fixed on the damping table, the demonstration mechanism comprises a section bar support, the section bar support can be fixed on the damping table through a bolt through an angle piece, during work, a steel plate is placed on the high-precision parallel platform, a demonstration character module is placed on the high-precision parallel platform, two optical calibration points are respectively stuck on the upper surfaces of the demonstration character module and the steel plate, a sliding block on the linear module drives a character calibration point detection camera to move in the Z-axis direction (namely the height direction), and the horizontal displacement platform can detect the positions of the camera in the X-axis direction and the Y-axis direction (namely the horizontal direction) through manually adjusting the steel plate calibration points; the method comprises the steps that calibration points on a steel plate are enabled to be in a visual field of a camera, then two calibration points pasted on a demonstration character module are detected through a character calibration point detection camera, two calibration points pasted on the steel plate are detected through a steel plate calibration point detection camera, the relative poses of the steel plate and the demonstration character module on a horizontal plane are judged through comparison of a visual control algorithm, the poses of the steel plate are changed through corresponding translation and rotation of a high-precision parallel platform, and the poses of the steel plate detected by the steel plate calibration point detection camera are enabled to be consistent with the poses of the demonstration character module. Through this process, the high accuracy of the alignment platform is demonstrated.
In the high-precision parallel platform with the alignment demonstration function, the sliding block is fixed with the suction nozzle support, and the suction nozzle support is fixed with the plurality of cylindrical air pressure suction nozzles. The number of the air pressure suction nozzles is more than one, for example four. In the structure, a slide block of a linear module drives an air pressure suction nozzle to move in the Z-axis direction, and a demonstration character module is placed in a vacancy corresponding to a steel plate; the air pressure suction nozzle can finish two actions of air suction and air blowing, and the demonstration scheme can repeatedly take out and put down the demonstration characters to achieve the demonstration effect.
In the above high-precision parallel platform with the alignment demonstration function, the suction nozzle support comprises a fixed plate, the fixed plate is square, and each air pressure suction nozzle is fixed at the edge of the fixed plate respectively.
In the high-precision parallel platform with the alignment demonstration function, the high-precision parallel platform is a 3-PPR high-precision parallel platform, the high-precision parallel platform comprises a base and a top plate, and the top plate can rotate and translate in the horizontal direction relative to the base.
In the high-precision parallel platform with the alignment demonstration function, the section bar support comprises a cross beam and two oppositely arranged vertical beams, two end parts of the cross beam are fixedly connected with one vertical beam respectively, and the module frame and the base are fixed on the cross beam.
In the above-mentioned high-precision parallel platform with alignment demonstration function, the top of each vertical beam is fixed with a connection bottom plate, the bottom of each connection bottom plate is a plane, and the bottom surfaces of the two are on the same plane. In this structure, each vertical beam is fixed on the shock attenuation platform through linking up the bottom plate.
Compared with the prior art, the invention has the following advantages:
the invention can carry out visual display and understanding on the high-precision alignment platform and can well display the high precision of the high-precision alignment platform.
Drawings
FIG. 1 is a schematic diagram of a high-precision parallel platform.
Fig. 2 is a schematic structural view of the demonstration mechanism.
In the figure, 1 a damping table; 2, high-precision parallel connection of platforms; 2a base; 2b a top plate; 3, a demonstration mechanism; 3a profile holder; 3a1 crossbeam; 3a2 vertical beams; 3b a horizontal displacement platform; 3b1 base; 3b2 sliding table; 3c a linear module; 3c1 module rack; 3c2 slider; 4 a text index point detection camera; 5, a steel plate calibration point detection camera; 6 suction nozzle support; 7 connecting the bottom plate; 8, a character demonstration module; 9 steel plates; 10 air pressure suction nozzle.
Detailed Description
The following are specific embodiments of the present invention and are further described with reference to the drawings, but the present invention is not limited to these embodiments.
As shown in fig. 1-2, the high-precision parallel platform 2 includes a damping platform 1, a high-precision parallel platform 2 and a demonstration mechanism 3, the high-precision parallel platform 2 is fixed on the damping platform 1, the demonstration mechanism 3 includes a profile bracket 3a, a horizontal displacement platform 3b and a linear module 3c are fixed on the profile bracket 3a, the linear module 3c includes a module bracket 3c1 and a slider 3c2, the slider 3c2 is slidably connected on the module bracket 3c1 along the height direction, the slider 3c2 is provided with a character index point detection camera 4, the profile bracket 3a is fixed on the damping platform 1, the horizontal displacement platform 3b includes a base 3b1 and a sliding platform 3b2, the base 3b1 is fixed on the profile bracket 3a, the sliding platform 3b2 is slidably connected on the base 3b1 along the horizontal direction, and the sliding platform 3b2 is fixed with a steel plate index point detection camera 5.
The high-precision parallel platform 2 is fixed on the damping table 1, the demonstration mechanism 3 comprises a section bar support 3a, the section bar support 3a can be fixed on the damping table 1 through a bolt for an angle piece, during work, a steel plate 9 is placed on the high-precision parallel platform 2, a demonstration character module 8 is placed on the high-precision parallel platform 2, two optical calibration points are respectively stuck on the upper surfaces of the demonstration character module 8 and the steel plate 9, a sliding block 3c2 on a linear module 3c drives a character calibration point detection camera 4 to move in the Z-axis direction (namely the height direction), and the horizontal displacement platform 3b can manually adjust the positions of the steel plate calibration point detection camera 5 in the X-axis direction and the Y-axis direction (namely the horizontal direction); the calibration points on the steel plate 9 are in the field of view of the camera, then the two calibration points pasted on the demonstration character module 8 are detected by the character calibration point detection camera 4, the two calibration points pasted on the steel plate 9 are detected by the steel plate calibration point detection camera 5, the relative poses of the steel plate 9 and the demonstration character module 8 on the horizontal plane are judged through comparison of a visual control algorithm, the pose of the steel plate 9 is changed by the high-precision parallel platform 2 through corresponding translation and rotation, and the pose of the steel plate 9 detected by the steel plate calibration point detection camera 5 is matched with the pose of the demonstration character module 8. Through this process, the high accuracy of the alignment platform is demonstrated.
As shown in fig. 2, in the present embodiment, a suction nozzle support 6 is fixed to the slider 3c2, and a plurality of cylindrical air pressure suction nozzles 10 are fixed to the suction nozzle support 6. The number of the air pressure nozzles 10 is more than one, for example, four. In the structure, a slide block 3c2 of a linear module 3c drives an air pressure suction nozzle 10 to move in the Z-axis direction, and a demonstration character module 8 is placed in a vacant position corresponding to a steel plate 9; the air pressure suction nozzle 10 can complete two actions of air suction and air blowing, and the demonstration scheme can repeatedly take out and put down the demonstration characters to achieve the demonstration effect.
As shown in fig. 2, in the present embodiment, the nozzle holder 6 includes a fixing plate having a square shape, and the air pressure nozzles 10 are respectively fixed at edges of the fixing plate.
Preferably, the high-precision parallel platform 2 is a 3-PPR high-precision parallel platform 2, and the high-precision parallel platform 2 comprises a base 2a and a top plate 2b, and the top plate 2b can rotate and translate in the horizontal direction relative to the base 2 a.
As shown in fig. 1, in this embodiment, the profile support 3a includes a cross beam 3a1 and two opposite vertical beams 3a2, two ends of the cross beam 3a1 are respectively connected to one vertical beam 3a2, and the module frame 3c1 and the base 3b1 are both fixed to the cross beam 3a 1.
In the present embodiment, as shown in fig. 1, an engaging bottom plate 7 is fixed to the top of each vertical beam 3a2, and the bottom of each engaging bottom plate 7 is a flat surface and the bottom surfaces of the two are on the same plane. In this structure, each vertical beam 3a2 is fixed to the damping table 1 by engaging the bottom plate 7.
The specific embodiments described herein are merely illustrative of the spirit of the invention. Various modifications or additions may be made to the described embodiments or alternatives may be employed by those skilled in the art without departing from the spirit or ambit of the invention as defined in the appended claims.

Claims (6)

1. A high-precision parallel platform (2) with an alignment demonstration function comprises a shock absorption platform (1), a high-precision parallel platform (2) and a demonstration mechanism (3), wherein the high-precision parallel platform (2) is fixed on the shock absorption platform (1), the demonstration mechanism (3) comprises a profile support (3a), a horizontal displacement platform (3b) and a linear module (3c) are fixed on the profile support (3a), the linear module (3c) comprises a module frame (3c1) and a sliding block (3c2), the sliding block (3c2) is connected on the module frame (3c1) in a sliding mode along the height direction, a character calibration point detection camera (4) is arranged on the sliding block (3c2), the profile support (3a) is fixed on the shock absorption platform (1), the horizontal displacement platform (3b) comprises a base (3b1) and a sliding platform (3b2), the base (3b1) is fixed on the section bar bracket (3a), the sliding table (3b2) is connected on the base (3b1) in a sliding mode along the horizontal direction, and a steel plate index point detection camera (5) is fixed on the sliding table (3b 2).
2. The high-precision parallel platform (2) with the alignment demonstration function is characterized in that a suction nozzle support (6) is fixed on the sliding block (3c2), and a plurality of cylindrical air pressure suction nozzles (10) are fixed on the suction nozzle support (6).
3. The high-precision parallel platform (2) with the alignment demonstration function according to claim 2, wherein the suction nozzle bracket (6) comprises a fixed plate which is square, and each air pressure suction nozzle (10) is fixed at the edge of the fixed plate.
4. The high-precision parallel platform (2) with the alignment demonstration function is characterized in that the high-precision parallel platform (2) is a 3-PPR high-precision parallel platform (2), the high-precision parallel platform (2) comprises a base (2a) and a top plate (2b), and the top plate (2b) can rotate and translate in the horizontal direction relative to the base (2 a).
5. The high-precision parallel platform (2) with the function of alignment demonstration of claim 1, wherein the profile bracket (3a) comprises a cross beam (3a1) and two oppositely arranged vertical beams (3a2), two ends of the cross beam (3a1) are respectively fixedly connected with one vertical beam (3a2), and the module frame (3c1) and the base (3b1) are both fixed on the cross beam (3a 1).
6. The high-precision parallel platform (2) with the alignment demonstration function as claimed in claim 5, wherein the top of each vertical beam (3a2) is fixed with an engagement bottom plate (7), the bottom of each engagement bottom plate (7) is a plane, and the bottom surfaces of the two are in the same plane.
CN201811300204.1A 2018-11-02 2018-11-02 High-precision parallel platform with alignment demonstration function Pending CN111142570A (en)

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104296728A (en) * 2014-09-28 2015-01-21 安徽新华印刷股份有限公司 Deviation correcting device applied to printing equipment
CN104455970A (en) * 2014-12-26 2015-03-25 鲁东大学 Six-freedom-degree electronic microscope support
CN204749477U (en) * 2015-02-13 2015-11-11 厦门大学 Screen printing aims at system
KR101597352B1 (en) * 2015-04-09 2016-02-25 서울과학기술대학교 산학협력단 Stage 4 axis parallel alignment device
CN105445643A (en) * 2015-11-12 2016-03-30 杭州长川科技股份有限公司 Full-automatic prober image positioning system
CN207747013U (en) * 2018-01-10 2018-08-21 广州中国科学院先进技术研究所 A kind of big stroke precision is to bit platform
CN209014981U (en) * 2018-11-02 2019-06-21 广州中国科学院先进技术研究所 A kind of high-accuracy parallel connection platform with contraposition demo function

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104296728A (en) * 2014-09-28 2015-01-21 安徽新华印刷股份有限公司 Deviation correcting device applied to printing equipment
CN104455970A (en) * 2014-12-26 2015-03-25 鲁东大学 Six-freedom-degree electronic microscope support
CN204749477U (en) * 2015-02-13 2015-11-11 厦门大学 Screen printing aims at system
KR101597352B1 (en) * 2015-04-09 2016-02-25 서울과학기술대학교 산학협력단 Stage 4 axis parallel alignment device
CN105445643A (en) * 2015-11-12 2016-03-30 杭州长川科技股份有限公司 Full-automatic prober image positioning system
CN207747013U (en) * 2018-01-10 2018-08-21 广州中国科学院先进技术研究所 A kind of big stroke precision is to bit platform
CN209014981U (en) * 2018-11-02 2019-06-21 广州中国科学院先进技术研究所 A kind of high-accuracy parallel connection platform with contraposition demo function

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