CN111121665A - Optical aiming and orienting device and method based on phase shift differential motion - Google Patents
Optical aiming and orienting device and method based on phase shift differential motion Download PDFInfo
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- CN111121665A CN111121665A CN201811285855.8A CN201811285855A CN111121665A CN 111121665 A CN111121665 A CN 111121665A CN 201811285855 A CN201811285855 A CN 201811285855A CN 111121665 A CN111121665 A CN 111121665A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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Abstract
The optical aiming and orienting device and method based on phase shift differential motion provided by the invention can improve the detection precision of the detection position by adopting two photoelectric receivers to carry out phase shift differential motion to measure the corner displacement reference, compared with the prior scheme, the detection precision is as high as dozens of times to hundred times, meanwhile, the device can also avoid the phenomenon that the detection position information is widened or lost due to the change of the light source intensity, and the working efficiency can be greatly improved without adopting a manual sampling mode.
Description
Technical Field
The invention relates to the field of ultra-precise photoelectric measurement, in particular to an optical aiming and orienting device and method based on phase shift differential motion.
Background
The requirement for extracting direction aiming information in a precision optical instrument is higher and higher, for example, a CCD autocollimator is generally used at present when a polyhedron is used for detecting the precision of an ultra-precision rotary table (including an ultra-high precision encoder, an goniometer and the like).
As shown in fig. 1, a conventional typical precision detection mechanism is provided, light emitted from a light source 1 is converged by a lens 3 and irradiated onto a reticle 54, then passes through a beam splitter 2 and a collimating lens 4 to become parallel light beams, and then is incident on a working surface (optical surface) of a polyhedron 8, and the light is reflected back and then is reflected by the collimating lens 4 and the beam splitter 2 to a CCD 51. The core hole of the polyhedron 8 is coaxially and fixedly connected with a main shaft 9 of an ultra-precision rotary table 10 (or an ultra-high precision encoder, an angle gauge and the like), and when the main shaft 9 drives the polyhedron 8 to rotate at a specified position, an angular error output numerical value of the CCD is recorded.
The existing CCD autocollimator used has the following defects: 1. manual sampling or semi-automatic manual sampling, which has different environmental jitter influences; 2. aiming position information extraction requires higher and higher, and resolution and precision of CCD output can not meet the requirements, such as: f is a collimator with 300mm, and the angular resolution is about 0.1 'and the precision is about 0.2'; 3. the working efficiency is low.
Disclosure of Invention
Embodiments of the present invention provide an optical aiming and directing apparatus and method based on phase shift differential.
The invention provides an optical aiming and orienting device based on phase shift differential, which comprises a phase shift photoelectric receiver and a reflector mounted on a measured object, wherein the phase shift photoelectric receiver comprises a slit, a comparison trigger, a first photoelectric receiver and a second photoelectric receiver, the first photoelectric receiver and the second photoelectric receiver are arranged along the scanning direction of light, parallel light irradiates on the reflector in the rotating process of the reflector, a convergence intersection point of reflected light generated by reflection of the reflector moves on a slit surface and passes through the slit, the light reflected light penetrates through the slit surface to irradiate the first photoelectric receiver and the second photoelectric receiver in sequence when passing through the slit, the first photoelectric receiver generates a first photoelectric signal according to the reflected light, the second photoelectric receiver generates a second photoelectric signal according to the reflected light, and finishing phase shift, wherein a phase difference exists between the first path of signal and the second path of signal, the comparison trigger starts to work when the amplitude of the first path of optical signal reaches a first amplitude or the second path of optical signal reaches a second amplitude, the first path of optical signal and the second path of optical signal are intersected at a first coincident point to finish differential motion, and the first coincident point is used for determining the directional reference position of the object to be measured.
Optionally, the phase-shift photoelectric receiver further comprises a semiconductor laser, a polarization beam splitter, a quarter wave plate and a collimating lens, wherein horizontally-vibrating polarized light emitted by the semiconductor laser enters the polarization beam splitter and passes through the quarter wave plate to form circularly-polarized light, the circularly-polarized light enters the collimating lens to be collimated and then irradiates the reflecting mirror in parallel, the reflected light is formed by reflection of the reflecting mirror, and the reflected light passes through the collimating lens and the quarter wave plate and then is reflected and converged by the polarization beam splitter to enter the phase-shift photoelectric receiver.
Optionally, the linear length direction of the slit is parallel to the rotation axis of the object to be measured.
Optionally, the comparison trigger triggers a pulse signal when the first photo-electric signal and the second photo-electric signal are equal.
Optionally, the pulse signal is a positive pulse signal or a negative pulse signal.
Optionally, the mirror is parallel to the rotation axis of the object to be measured.
Optionally, the photoreceiver employs a photodiode, a phototriode, or a photomultiplier tube.
The invention also provides an optical aiming and orientation method based on the phase shift differential, which is used for the optical aiming and orientation device based on the phase shift differential.
According to the technical scheme, the embodiment of the invention has the following advantages:
the optical aiming and orienting device and method based on phase shift differential motion provided by the invention can improve the detection precision of the detection position by adopting two photoelectric receivers to carry out phase shift differential motion to carry out corner displacement detection, compared with the prior scheme, the detection precision is up to more than dozens of times, meanwhile, the device can also avoid the phenomenon that the corner displacement measurement position information is widened or reduced due to the change of the light source intensity, and the working efficiency can be greatly improved without adopting a manual sampling mode.
Drawings
Fig. 1 is a schematic view of the collimation operation of a CCD autocollimator provided in the prior art;
FIG. 2 is a schematic structural diagram of an optical sighting and orientation device based on phase shift differential in an embodiment of the present invention;
FIG. 3 is a schematic diagram of the photosensitive areas of two photo-receivers of an optical aiming and directing device based on phase shift differentiation in an embodiment of the present invention;
FIG. 4a is a schematic phase difference diagram of an optical sighting and orientation device based on phase shift differential in an embodiment of the present invention;
fig. 4b is a schematic diagram of a lissajous figure synthesized by two photoelectric signals of an optical aiming and directing device based on phase shift differential in an embodiment of the present invention.
Reference numerals:
the device comprises a semiconductor laser 1, a polarization beam splitter 2, a quarter-wave plate 3, a collimating lens 4, a phase-shifting photoelectric receiver 5, a first photoelectric receiver 51, a second photoelectric receiver 52, a comparison trigger 53, a slit 54, a reflecting mirror 8 and an ultra-precise rotary table 10.
Detailed Description
In order to make the technical solutions of the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The terms "first," "second," "third," "fourth," and the like in the description and in the claims, as well as in the drawings, are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It will be appreciated that the data so used may be interchanged under appropriate circumstances such that the embodiments described herein may be practiced otherwise than as specifically illustrated or described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
Referring to fig. 2, the optical aiming and directing device based on phase shift differential provided by the present invention includes a semiconductor laser 1, a polarization beam splitter 2, a quarter-wave plate 3, a collimating lens 4, a phase-shift photoelectric receiver 5 and a reflecting mirror 8 mounted on an object to be measured, the reflecting mirror 8 is disposed in parallel with a rotation axis of the object to be measured, the phase-shift photoelectric receiver 5 includes a slit 54, a comparison trigger 53, a first photoelectric receiver 51 and a second photoelectric receiver 52, the first photoelectric receiver 51 and the second photoelectric receiver 52 are disposed along a light spot scanning direction of the light, a horizontally vibrating polarized light emitted by the semiconductor laser 1 enters the polarization beam splitter, passes through the quarter-wave plate 3 to form a circularly polarized light, the circularly polarized light enters the collimating lens 4 to be collimated and then irradiates the reflecting mirror 8 in parallel, the reflected light formed by reflection of the reflector 8 passes through the collimating lens 4 and the quarter-wave plate 3 and then is reflected and converged by the polarization beam splitter to enter the phase-shift photoelectric receiver 5, in the rotation process of the object to be measured, the reflector 8 synchronously rotates, the convergence intersection point of the reflected light moves on the slit surface, the emitted light sequentially irradiates the first photoelectric receiver 51 and the second photoelectric receiver 52 to generate a phase difference through the slit 54, the first photoelectric receiver 51 generates a first photoelectric signal according to the reflected light, the second photoelectric receiver 52 generates a second photoelectric signal according to the reflected light, the phase-shift process is realized, because the first path of signal and the second path of signal have a phase difference, the comparison trigger 53 starts to work when the amplitude of the first path of signal reaches a first amplitude or the amplitude of the second path of signal reaches a second amplitude, and the first path of optical signal and the second path of optical signal are intersected at a first coincident point to realize a differential process, and the first coincident point is used for determining a directional reference position of the measured object.
It should be noted that, because the monochromatic laser emits monochromatic polarized light, in order to better utilize the energy of the light, the polarization beam splitter 2 and the quarter-wave plate 3 need to be used, when the light source is an LED light source, the polarization beam splitter 2 can be replaced by a reflective mirror, and the quarter-wave plate 3 is not needed.
In this embodiment, when the first and second photoelectric receivers 51 and 52 are disposed along the light spot scanning direction of the light, specifically, the first and second photoelectric receivers 51 and 52 are disposed in parallel and are disposed toward the reflection direction of the polarization beam splitter 2.
The first and second photoelectric receivers 51 and 52 may be PIN photodiodes, phototransistors, or photomultiplier tubes, or may be other photoelectric receivers, such as single-point photoelectric receivers, which are not limited herein.
Alternatively, the slit 54 has a line width of 2 μm, and the line length of the slit is parallel to the rotation axis of the object to be measured, which is not limited.
Alternatively, the comparison trigger 53 starts to operate when the amplitude of the first photoelectric signal or the second photoelectric signal reaches a predetermined threshold, and determines the rotation angle displacement position of the mirror at the position of the mirror 8 corresponding to the phase intersection of the first photoelectric signal and the second photoelectric signal, and the corresponding position of the phase intersection of the first photoelectric signal and the second photoelectric signal when performing zero position detection may be determined as the rotation angle direction.
Optionally, the comparison trigger 53 triggers a pulse signal when the first photoelectric signal and the second photoelectric signal are equal, and the pulse signal is used for prompting the rotation angle displacement.
Optionally, the testee can be the polyhedron, speculum 8 sets up on the working face of polyhedron, and speculum 8 and polyhedron can adopt integrated into one piece, the polyhedron has the core hole that is used for installing the revolving stage, and the polyhedron adopts the hexahedron, and the core hole is coaxial to be linked firmly with the main shaft 9 of ultra-precision revolving stage 10 (or super high accuracy encoder, goniometer etc.), records CCD's angle error output numerical value when main shaft 9 drives polyhedron 8 and turns to 0 °, 60 °, 120 °, 180 °, 240 °, 300 when the position.
Fig. 3 is a diagram of photosensitive areas of two photoelectric receivers, when a slit passes through a converged light intersection point, signals received by the two receivers cannot reach the highest peak at the same time due to a difference of scanning positions, that is, two paths of signals have a phase difference.
Fig. 2 at 53 is a comparison trigger circuit, which is used to compare the magnitude of two signals when the amplitude of the photoelectric signal is greater than point E (or F), and when the signals are equal (reaching point O), the trigger circuit will trigger a pulse signal, which can be divided into a positive pulse signal and a negative pulse signal according to the penetration or reflection of the slit 54.
As shown in fig. 4a, when the mirror 8 rotates counterclockwise and passes through the collimation value point O, the first photoelectric receiver 51 receives the self-alignment signal before the second photoelectric receiver 52, the bottom width of each photoelectric signal of the photoelectric receiver is less than 5 μm, the two photoelectric signals are intersected at the point O, from the lissajous diagram synthesized by the two photoelectric signals in fig. 4b, the point O signal is very sharp and easy to interpret, when F is 300mm, the length from the point E to the point F is 3 μm, and the comparison dead zone of the comparator 53 is 5mV, the pulse accuracy reaches Δ ═ 5mV/2 ═ 2500mV ═ 3 μm/2 ═ 0.0015 μm, the resolution ═ 0.5 Δ/F ═ 0.0005 ", and the zero position information obtained by phase difference detection has higher accuracy.
Correspondingly, the invention also provides an optical aiming and orientation method based on the phase shift differential, which is applied to the optical aiming and orientation device based on the phase shift differential.
The optical aiming and orienting device and method based on phase shift differential motion provided by the invention can improve the detection precision of the detection position by adopting two photoelectric receivers to carry out phase shift differential motion to detect the corner displacement, compared with the prior scheme, the detection precision is as high as dozens of times, meanwhile, the device can also avoid the phenomenon that the detection position information is widened or reduced due to the change of the light source intensity, and the working efficiency can be greatly improved without adopting a manual sampling mode.
It is clear to those skilled in the art that, for convenience and brevity of description, the specific working processes of the above-described systems, apparatuses and units may refer to the corresponding processes in the foregoing method embodiments, and are not described herein again.
In the several embodiments provided in the present application, it should be understood that the disclosed system, apparatus and method may be implemented in other manners. For example, the above-described apparatus embodiments are merely illustrative, and for example, the division of the units is only one logical division, and other divisions may be realized in practice, for example, a plurality of units or components may be combined or integrated into another system, or some features may be omitted, or not executed. In addition, the shown or discussed mutual coupling or direct coupling or communication connection may be an indirect coupling or communication connection through some interfaces, devices or units, and may be in an electrical, mechanical or other form.
The units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of the embodiment.
In addition, functional units in the embodiments of the present invention may be integrated into one processing unit, or each unit may exist alone physically, or two or more units are integrated into one unit. The integrated unit can be realized in a form of hardware, and can also be realized in a form of a software functional unit.
Those skilled in the art will appreciate that all or part of the steps in the methods of the above embodiments may be implemented by associated hardware instructed by a program, which may be stored in a computer-readable storage medium, and the storage medium may include: a Read Only Memory (ROM), a Random Access Memory (RAM), a magnetic or optical disk, or the like.
While the phase shift differential based optical pointing and orientation apparatus and method of the present invention have been described in detail, it will be apparent to those skilled in the art that the embodiments of the present invention can be modified in many ways.
Claims (8)
1. An optical aiming and orienting device based on phase shift differential is characterized by comprising a phase shift photoelectric receiver and a reflector arranged on a measured object, wherein the phase shift photoelectric receiver comprises a slit, a comparison trigger, a first photoelectric receiver and a second photoelectric receiver, the first photoelectric receiver and the second photoelectric receiver are arranged along the scanning direction of light, parallel light irradiates on the reflector in the process that the reflector rotates along with the measured object, a convergence intersection point of reflected light generated by reflection of the reflector moves on a slit surface and passes through the slit, the light penetrates through the slit surface to irradiate the first photoelectric receiver and the second photoelectric receiver in sequence when passing through the slit, the first photoelectric receiver generates a first photoelectric signal according to the reflected light, and the second photoelectric receiver generates a second photoelectric signal according to the reflected light, and finishing phase shift, wherein a phase difference exists between the first path of signal and the second path of signal, the comparison trigger starts to work when the amplitude of the first path of optical signal reaches a first amplitude or the second path of optical signal reaches a second amplitude, the first path of optical signal and the second path of optical signal are intersected at a first coincident point to finish differential motion, and the first coincident point is used for determining the directional reference position of the object to be measured.
2. The optical aiming and directing device based on phase shift differential motion as claimed in claim 1, further comprising a semiconductor laser, a polarization beam splitter, a quarter-wave plate, and a collimating lens, wherein the horizontally vibrating polarized light emitted from the semiconductor laser enters the polarization beam splitter, passes through the quarter-wave plate to form circularly polarized light, enters the collimating lens for collimation, then irradiates the reflecting mirror in parallel, and is reflected by the reflecting mirror to form the reflected light, and the reflected light passes through the collimating lens and the quarter-wave plate, then is reflected by the polarization beam splitter and converged into the phase shift photoelectric receiver.
3. The phase shift differential based optical sighting and orienting device of claim 1 wherein the linear length direction of the slit is parallel to the rotation axis of the object to be measured.
4. The phase-shift differential based optical sighting and orienting device of claim 2 wherein the comparison trigger triggers a pulse signal when the first opto-electronic signal and the second opto-electronic signal are equal.
5. The phase-shifted differential based optical sighting and orienting device of claim 4 wherein the pulse signal is a positive pulse signal or a negative pulse signal.
6. The phase shift differential based optical sighting and orienting device of claim 1 wherein the mirror is parallel to the rotational axis of the object under test.
7. The phase shift differential based optical sighting and orienting device of claim 2 wherein the photoreceiver employs a photodiode, a phototriode or a photomultiplier tube.
8. An optical aiming and orientation method based on phase shift differential, which is applied to the optical aiming and orientation device based on phase shift differential as claimed in any one of claims 1 to 7.
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Application publication date: 20200508 |