CN111089091A - Micro-flow controller and method - Google Patents

Micro-flow controller and method Download PDF

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Publication number
CN111089091A
CN111089091A CN201911235602.4A CN201911235602A CN111089091A CN 111089091 A CN111089091 A CN 111089091A CN 201911235602 A CN201911235602 A CN 201911235602A CN 111089091 A CN111089091 A CN 111089091A
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outlet
inlet
air
pipe joint
gas
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CN111089091B (en
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韩罗峰
朱康武
李云涛
于学文
孙俊
韩飞
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Shanghai Aerospace Control Technology Institute
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Shanghai Aerospace Control Technology Institute
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02Fluid distribution or supply devices characterised by their adaptation to the control of servomotors

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Flow Control (AREA)

Abstract

The present invention provides a micro-flow controller, comprising: a pressure regulation module; the pressure regulating module includes: a valve seat; the inlet gas pipe joint is arranged at the first end of the valve seat and is used for inputting working medium gas; the outlet gas pipe joint is arranged at the second end of the valve seat and used for outputting working medium gas; the outlet pressure sensor is arranged at the first end of the valve seat and used for measuring the air pressure value of the output working medium gas; the inlet electromagnetic valve is used for controlling the working medium gas to enter the valve seat from the inlet gas pipe joint; the control module is in signal connection with the outlet pressure sensor and the inlet electromagnetic valve; the control module generates a first control instruction signal according to the air pressure value measured by the outlet pressure sensor, drives the inlet electromagnetic valve to be opened or closed through the first control instruction signal, and adjusts the air pressure value of the output working medium gas. The invention also provides a working medium gas flow control method. The invention has high integration degree and can accurately adjust the flow of the working medium gas in a large range.

Description

Micro-flow controller and method
Technical Field
The invention relates to the technical field of space propulsion, in particular to a micro-flow controller and a micro-flow control method for an electric propulsion system.
Background
The electric propulsion system has the characteristics of higher thrust, lower thrust, more power consumption and the like, has small disturbance on the spacecraft, high control precision and long working time, and therefore the electric propulsion system is required to have long service life and high reliability. The ion thruster is widely applied to various countries as an advanced spacecraft on-orbit propulsion device. An ion thruster, also called an ion engine, is a core subsystem of an electric propulsion system, is characterized by high specific impulse, low power consumption and long service life, and is widely applied to space propulsion, such as spacecraft attitude control, position maintenance, orbital maneuver, interplanetary flight and the like.
The micro-flow controller is used for adjusting the propellant flow of the ion thruster and is the basis of the work of the electric propulsion system. However, the traditional flow controller has narrow flow regulation range, low integration degree and low flow control precision, and reduces the working reliability and effective specific impulse of the electric propulsion system.
Disclosure of Invention
The invention aims to provide a micro-flow controller and a micro-flow control method. The working medium gas flow output by the micro-flow controller can be adjusted in a large range by measuring the pressure value of the working medium gas output by the pressure adjusting module in real time and automatically adjusting the working medium gas flow input to the pressure adjusting module according to the pressure value, and the accuracy of flow adjustment is ensured. The invention solves the problems of narrow flow regulation range and low integration degree of the traditional flow controller, can reduce the weight of the electric propulsion working medium supply system to a greater extent, and improves the effective specific impulse of the electric propulsion system.
In order to achieve the above object, the present invention provides a micro-flow controller for an electric propulsion system, comprising: a pressure regulation module;
the pressure regulating module includes:
a valve seat;
the inlet gas pipe joint is used for inputting working medium gas; the first end of the inlet air pipe connector is positioned outside the first end of the valve seat, and the second end of the inlet air pipe connector is embedded in the first end of the valve seat;
the first end of the outlet gas pipe joint is embedded in the second end of the valve seat, and the gas path is connected with the second end of the inlet gas pipe joint; the second end of the outlet gas pipe joint is positioned outside the second end of the valve seat;
the input end of the outlet pressure sensor is embedded in the first end of the valve seat and is connected with the first end of the outlet gas pipe connector in a gas path mode, and the output end of the outlet pressure sensor is positioned outside the first end of the valve seat; measuring the pressure value of the working medium gas output by the outlet gas pipe joint through the outlet pressure sensor;
the inlet electromagnetic valve is arranged at the second end of the inlet air pipe joint; the valve seat is used for controlling the working medium gas to enter the valve seat from the inlet gas pipe joint;
the control module is in signal connection with the output end of the outlet pressure sensor and the inlet electromagnetic valve; the control module generates a first control instruction signal according to the air pressure value measured by the outlet pressure sensor, and drives the inlet electromagnetic valve to be opened or closed through the first control instruction signal.
The pressure regulating module also comprises a buffer cavity; the buffer cavity is arranged in the valve seat and is positioned between the second end of the inlet air pipe joint and the first end of the outlet air pipe joint; the buffer cavity is connected with the second end of the inlet air pipe connector through the inlet runner air passage and is connected with the first end of the outlet air pipe connector through the outlet runner air passage.
The pressure regulating module also comprises an outlet electromagnetic valve which is arranged at the first end of the outlet gas pipe joint and is used for controlling the discharge of the working medium gas from the valve seat; the control module is in signal connection with the outlet electromagnetic valve and drives the outlet electromagnetic valve to be opened or closed according to the received external instruction signal.
The pressure regulating module also comprises an inlet pressure sensor, the input end of the inlet pressure sensor is embedded in the second end of the valve seat and is connected with the second end of the inlet air pipe connector in an air path manner, and the output end of the inlet pressure sensor is arranged outside the second end of the valve seat; and the pressure value of the working medium gas input by the inlet gas pipe joint is measured by the inlet pressure sensor and is sent to the control module.
The micro-flow controller also comprises a flow regulating module; the inlet end of the flow regulating module is connected with the second end of the outlet gas pipe joint and is used for regulating the flow of the working medium gas output from the pressure regulating module; the output end of the flow regulating module is connected with the ion thruster through an air path.
The flow regulating module comprises a porous metal sheet, and an air inlet pipe, a flow regulating pipe and an air outlet pipe which are connected in sequence; an air inlet channel is arranged in the air inlet pipe, and an air channel of the air inlet channel is connected with the second end of the outlet air pipe joint; a throttling cavity is arranged in the flow regulating pipe, the porous metal chip is arranged in the throttling cavity, and the throttling cavity is divided into a first cavity and a second cavity along the length direction of the throttling cavity; a second air outlet flow channel is arranged in the air outlet pipe; the air inlet channel, the throttling cavity and the air outlet channel are communicated with each other.
The porous metal chip and the flow regulating tube are integrally formed in a 3D printing or powder sintering mode.
The flow regulating range of the micro-flow controller is 0.1-10 sccm (standard rise per minute) standard centrifuge per minute.
A working medium gas flow control method is realized by adopting a micro-flow controller, and comprises the following steps:
s1, the control module receives an external instruction signal and opens the outlet electromagnetic valve and the inlet electromagnetic valve;
s2, the working medium gas enters the flow regulating module from the inlet gas pipe joint, the buffer cavity and the outlet gas pipe joint;
s3, an outlet pressure sensor measures the air pressure value of the working medium gas output by the outlet gas pipe joint and sends the air pressure value to the control module; if the air pressure value measured by the outlet pressure sensor is equal to or higher than the set threshold value, entering S4; if the air pressure value measured by the outlet pressure sensor is lower than the set threshold value, entering S5;
s4, the control module drives the inlet electromagnetic valve to close, and working medium gas is prevented from entering the buffer cavity from the inlet gas pipe joint;
s5, the control module drives the inlet electromagnetic valve to be opened, and the working medium gas enters the buffer cavity from the inlet gas pipe joint.
Compared with the prior art, the invention has the beneficial effects that:
the invention can be used for a micro electric propulsion system, has the advantages of large-range adjustable flow, high control precision, high reliability and the like, and can meet the requirements of an ion thruster on the aspects of power, quality, volume, service life and the like of a micro-flow controller. The invention has high integration degree, can greatly reduce the space size and the weight occupied by the working medium supply system, can be widely applied to an electric propulsion system, and has good application prospect in the field of aircrafts.
Drawings
In order to more clearly illustrate the technical solution of the present invention, the drawings used in the description will be briefly introduced, and it is obvious that the drawings in the following description are an embodiment of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts according to the drawings:
FIG. 1 is a flow chart of a working medium gas flow control method of the present invention;
FIG. 2 is a schematic diagram of the external structure of the pressure regulating module of the present invention;
FIG. 3 is a cross-sectional view of a pressure regulation module of the present invention;
FIG. 4 is a cross-sectional view of a flow conditioning module of the present invention;
in the figure: 1. an inlet pressure sensor; 2. an outlet gas pipe joint; 3. an outlet solenoid valve; 4. a valve seat; 5. an inlet solenoid valve; 6. an outlet pressure sensor; 7. an inlet air pipe joint; 8. an outlet flow passage; 9. a buffer chamber; 10. an inlet flow passage; 11. a porous metal chip; 12. an air inlet pipe; 121. an air inlet channel; 13. a flow rate regulating tube; 131. a throttle chamber; 14. an air outlet pipe; 141. an air outlet flow channel.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention provides a micro-flow controller, the flow rate adjusting range is 0.1-10 sccm (standard raised cubic center per minute). The micro-flow controller is for an electric propulsion system, comprising: the pressure regulating module and the flow regulating module are connected through a gas circuit.
As shown in fig. 2 and 3, the pressure regulating module includes: valve seat 4, inlet air pipe connector 7, outlet air pipe connector 2, outlet pressure sensor 6, inlet solenoid valve 5, control module (not shown in the figure), outlet solenoid valve 3, inlet pressure sensor 1 and buffer chamber 9.
The inlet gas pipe joint 7 is used for inputting working medium gas; as shown in fig. 2 and 3, the first end of the inlet air pipe connector is located outside the first end of the valve seat, and the second end of the inlet air pipe connector is embedded inside the first end of the valve seat.
The outlet gas pipe joint 2 is used for outputting working medium gas; as shown in fig. 2 and 3, the first end of the outlet air pipe joint is embedded in the second end of the valve seat, and the air passage is connected with the second end of the inlet air pipe joint; the outlet gas pipe joint second end is located outside the valve seat second end.
The buffer cavity 9 is arranged in the valve seat and is positioned between the second end of the inlet air pipe joint and the first end of the outlet air pipe joint; as shown in FIG. 3, the buffer chamber 9 is fluidly connected to the second end of the inlet air fitting via the inlet flow passage 10 and to the first end of the outlet air fitting via the outlet flow passage 8.
As shown in fig. 2 and 3, the input end of the inlet pressure sensor 1 is embedded in the second end of the valve seat and is connected with the second end of the inlet air pipe connector in an air path, and the output end of the inlet pressure sensor 1 is arranged outside the second end of the valve seat. And measuring the pressure value of the working medium gas input by the inlet gas pipe joint 7 through the inlet pressure sensor 1.
As shown in fig. 2 and 3, the input end of the outlet pressure sensor 6 is embedded in the first end of the valve seat and is connected with the first end of the outlet air pipe joint in an air circuit manner, and the output end of the outlet pressure sensor 6 is located outside the first end of the valve seat. And measuring the pressure value of the working medium gas output by the outlet gas pipe joint 2 through the outlet pressure sensor 6. In one embodiment of the present invention, as shown in FIG. 2, the input of the outlet pressure sensor 6 is connected to the first end of the outlet gas pipe joint through the buffer chamber 9 and the outlet flow passage 8.
As shown in fig. 2 and 3, the inlet solenoid valve 5 is arranged at the second end of the inlet air pipe joint; for controlling the working medium gas to enter the valve seat from the inlet gas pipe joint 7. When the inlet electromagnetic valve 5 is closed, the second end of the inlet air pipe joint is blocked, and working medium gas cannot enter the valve seat from the inlet air pipe joint 7. When the inlet solenoid valve 5 is opened, the working medium gas flows into the buffer chamber 9 from the inlet gas pipe joint 7.
As shown in fig. 2 and 3, the outlet solenoid valve 3 is disposed at a first end of the outlet gas pipe joint and is used for controlling the discharge of the working medium gas from the valve seat 4. When the outlet electromagnetic valve 3 is closed, the first end of the outlet gas pipe connector is blocked, and the working medium gas cannot be discharged from the outlet gas pipe connector 2. When the outlet solenoid valve 3 is opened, the working medium gas is discharged from the outlet gas pipe joint 2.
In one embodiment of the present invention, the inlet pressure sensor 1, the outlet pressure sensor 6, the inlet air pipe joint 7, the outlet air pipe joint 2, the inlet solenoid valve 5 and the outlet solenoid valve 3 are respectively assembled with the valve seat into a whole by being inserted into corresponding mounting holes reserved in the valve seat 4.
The control module is in signal connection with the outlet electromagnetic valve 3, the inlet electromagnetic valve 5, the outlet pressure sensor 6 and the inlet pressure sensor 1. When the micro-flow controller needs to work, the control module opens the outlet electromagnetic valve 3 and the inlet electromagnetic valve 5 according to the received external command signal. The control module generates a first control instruction signal according to the air pressure value measured by the outlet pressure sensor 6, and drives the inlet electromagnetic valve 5 to be opened or closed through the first control instruction signal. The control module also receives the air pressure value measured by the inlet pressure sensor 1, and adjusts the air pressure of the working medium gas input into the inlet air pipe joint 7 according to the air pressure value. In one embodiment of the invention, the control module drives the inlet solenoid valve and the outlet solenoid valve through PWM signals.
The inlet end of the flow regulating module is connected with the second end of the outlet gas pipe joint and is used for regulating the flow of the working medium gas output from the pressure regulating module; the output end of the flow regulating module is connected with the ion thruster through an air path.
As shown in fig. 4, the flow rate adjusting module comprises a porous metal sheet, and an air inlet pipe 12, a flow rate adjusting pipe 13 and an air outlet pipe 14 which are connected in sequence; an intake runner 121 is arranged in the intake pipe 12, and the intake runner 121 is connected with the second end of the outlet pipe joint in an air path; a throttling cavity 131 is arranged in the flow regulating pipe 13, the porous metal chip 11 is arranged in the throttling cavity 131, and the throttling cavity 131 is divided into a first cavity and a second cavity along the length direction of the throttling cavity 131; the porous metal chip 11 and the flow rate adjusting pipe 13 are integrally formed by means of 3D printing or powder sintering. A second outlet flow channel 141 is arranged in the outlet pipe 14; the air inlet channel 121, the throttling cavity 131 and the air outlet channel 141 are in air path communication.
After the pressure of the working medium gas is adjusted by the pressure adjusting module, the working medium gas enters the throttling cavity 131 in the flow adjusting module from the gas inlet flow passage 121. The porous metal chip 11 in the throttling cavity 131 reduces the speed and flow of the working medium gas, thereby playing a role in throttling. Because the section of the porous metal chip 11 is constant, the flow change of the working medium gas output by the flow adjusting module is only related to the pressure of the working medium gas input by the flow adjusting module. Namely, the output flow is constant under a certain input pressure, and when the input air pressure of the air inlet pipe 12 is changed, the flow of the working medium gas output by the air outlet pipe 14 is changed.
A working medium gas flow control method is realized by adopting a micro-flow controller, as shown in figure 1, and comprises the following steps:
s1, the control module receives an external instruction signal and opens the outlet electromagnetic valve 3 and the inlet electromagnetic valve 5;
s2, the working medium gas enters the flow regulating module from the inlet gas pipe joint 7, the buffer cavity 9 and the outlet gas pipe joint 2;
s3, the outlet pressure sensor 6 measures the pressure value of the working medium gas output by the outlet gas pipe joint 2 and sends the pressure value to the control module; if the air pressure value measured by the outlet pressure sensor 6 is equal to or higher than the set threshold value, the process proceeds to S4; if the air pressure value measured by the outlet pressure sensor 6 is lower than the set threshold value, entering S5;
s4, the control module drives the inlet electromagnetic valve 5 to close, and working medium gas is prevented from entering the buffer cavity 9 from the inlet gas pipe joint 7;
s5, the control module drives the inlet electromagnetic valve 5 to be opened, and the working medium gas enters the buffer cavity 9 from the inlet gas pipe joint 7.
Compared with the prior art, the invention has the beneficial effects that:
the invention can be used for a micro electric propulsion system, has the advantages of large-range adjustable flow, high control precision, high reliability and the like, and can meet the requirements of an ion thruster on the aspects of power, quality, volume, service life and the like of a micro-flow controller. The invention has high integration degree, can greatly reduce the space size and the weight occupied by the working medium supply system, can be widely applied to an electric propulsion system, and has good application prospect in the field of aircrafts.
While the invention has been described with reference to specific embodiments, the invention is not limited thereto, and various equivalent modifications and substitutions can be easily made by those skilled in the art within the technical scope of the invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (8)

1. A micro-flow controller for an electric propulsion system, comprising: a pressure regulation module;
the pressure regulating module includes:
a valve seat;
the inlet gas pipe joint is used for inputting working medium gas; the first end of the inlet air pipe connector is positioned outside the first end of the valve seat, and the second end of the inlet air pipe connector is embedded in the first end of the valve seat;
the first end of the outlet gas pipe joint is embedded in the second end of the valve seat, and the gas path is connected with the second end of the inlet gas pipe joint; the second end of the outlet gas pipe joint is positioned outside the second end of the valve seat;
the input end of the outlet pressure sensor is embedded in the first end of the valve seat and is connected with the first end of the outlet gas pipe connector in a gas path mode, and the output end of the outlet pressure sensor is positioned outside the first end of the valve seat; measuring the pressure value of the working medium gas output by the outlet gas pipe joint through the outlet pressure sensor;
the inlet electromagnetic valve is arranged at the second end of the inlet air pipe joint; the valve seat is used for controlling the working medium gas to enter the valve seat from the inlet gas pipe joint;
the control module is in signal connection with the output end of the outlet pressure sensor and the inlet electromagnetic valve; the control module generates a first control instruction signal according to the air pressure value measured by the outlet pressure sensor, and drives the inlet electromagnetic valve to be opened or closed through the first control instruction signal.
2. The micro-fluidic controller of claim 1 wherein the pressure regulation module further comprises a buffer chamber; the buffer cavity is arranged in the valve seat and is positioned between the second end of the inlet air pipe joint and the first end of the outlet air pipe joint; the buffer cavity is connected with the second end of the inlet air pipe connector through the inlet runner air passage and is connected with the first end of the outlet air pipe connector through the outlet runner air passage.
3. The micro-flow controller of claim 1 wherein the pressure regulating module further comprises an outlet solenoid valve disposed at the first end of the outlet gas tube connector for controlling the discharge of working fluid gas from the valve seat; the control module is in signal connection with the outlet electromagnetic valve and drives the outlet electromagnetic valve to be opened or closed according to the received external instruction signal.
4. The micro-flow controller of claim 1, wherein the pressure regulation module further comprises an inlet pressure sensor having an input end embedded within the second end of the valve seat and pneumatically coupled to the second end of the inlet air fitting and an output end external to the second end of the valve seat; and the pressure value of the working medium gas input by the inlet gas pipe joint is measured by the inlet pressure sensor and is sent to the control module.
5. The micro-fluidic controller of claim 1 further comprising a flow regulation module; the inlet end of the flow regulating module is connected with the second end of the outlet gas pipe joint and is used for regulating the flow of the working medium gas output from the pressure regulating module;
the flow regulating module comprises a porous metal sheet, and an air inlet pipe, a flow regulating pipe and an air outlet pipe which are connected in sequence; an air inlet channel is arranged in the air inlet pipe, and an air channel of the air inlet channel is connected with the second end of the outlet air pipe joint; a throttling cavity is arranged in the flow regulating pipe, the porous metal chip is arranged in the throttling cavity, and the throttling cavity is divided into a first cavity and a second cavity along the length direction of the throttling cavity; a second air outlet flow channel is arranged in the air outlet pipe; the air inlet channel, the throttling cavity and the air outlet channel are communicated with each other.
6. The micro-flow controller of claim 5 wherein the porous metal chip and the flow regulating tube are integrally formed by means of 3D printing or powder sintering.
7. The micro-fluidic controller of claim 1 wherein the micro-fluidic controller has a flow rate adjustment range of 0.1 to 10 sccm.
8. A working fluid gas flow control method implemented by the micro-flow controller according to any of claims 1 to 7, comprising the steps of:
s1, the control module receives an external instruction signal and opens the outlet electromagnetic valve and the inlet electromagnetic valve;
s2, the working medium gas enters the flow regulating module from the inlet gas pipe joint, the buffer cavity and the outlet gas pipe joint;
s3, an outlet pressure sensor measures the air pressure value of the working medium gas output by the outlet gas pipe joint and sends the air pressure value to the control module; if the air pressure value measured by the outlet pressure sensor is equal to or higher than the set threshold value, entering S4; if the air pressure value measured by the outlet pressure sensor is lower than the set threshold value, entering S5;
s4, the control module drives the inlet electromagnetic valve to close, and working medium gas is prevented from entering the buffer cavity from the inlet gas pipe joint;
s5, the control module drives the inlet electromagnetic valve to be opened, and the working medium gas enters the buffer cavity from the inlet gas pipe joint.
CN201911235602.4A 2019-12-05 2019-12-05 Micro-flow controller and method Active CN111089091B (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116149385A (en) * 2022-12-03 2023-05-23 中国科学院力学研究所 High-precision micro-flow gas control device and calibration method

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US20050150552A1 (en) * 2004-01-06 2005-07-14 Randy Forshey Device, method, and system for controlling fluid flow
CN201496578U (en) * 2009-07-17 2010-06-02 李治国 Ratio adjusting valve
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CN104696638A (en) * 2013-12-09 2015-06-10 江苏江淮动力股份有限公司 Unidirectional fixed throttle pipe joint
CN105042155A (en) * 2015-08-12 2015-11-11 无锡乐华自动化科技有限公司 Speed regulation method for gate type flow speed control valve
CN205618772U (en) * 2016-03-23 2016-10-05 安徽振海重工机械有限公司 Can realize pressure control's butterfly valve
CN208431438U (en) * 2018-01-22 2019-01-25 上海芳甸灌溉设备有限公司 A kind of valve with flow detection function

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050150552A1 (en) * 2004-01-06 2005-07-14 Randy Forshey Device, method, and system for controlling fluid flow
CN201496578U (en) * 2009-07-17 2010-06-02 李治国 Ratio adjusting valve
CN202418728U (en) * 2012-02-16 2012-09-05 北京兰天达汽车清洁燃料技术有限公司 Electronic pressure reducer
CN104696638A (en) * 2013-12-09 2015-06-10 江苏江淮动力股份有限公司 Unidirectional fixed throttle pipe joint
CN105042155A (en) * 2015-08-12 2015-11-11 无锡乐华自动化科技有限公司 Speed regulation method for gate type flow speed control valve
CN205618772U (en) * 2016-03-23 2016-10-05 安徽振海重工机械有限公司 Can realize pressure control's butterfly valve
CN208431438U (en) * 2018-01-22 2019-01-25 上海芳甸灌溉设备有限公司 A kind of valve with flow detection function

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116149385A (en) * 2022-12-03 2023-05-23 中国科学院力学研究所 High-precision micro-flow gas control device and calibration method
CN116149385B (en) * 2022-12-03 2024-04-09 中国科学院力学研究所 High-precision micro-flow gas control device and calibration method

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