CN111077130A - Surface scanning probe system and spectrometer - Google Patents

Abstract

The present disclosure relates to a face scanning probe system and a spectrometer, the face scanning probe system includes: the first shell is provided with a light guide hole for the excitation light beam to irradiate into the first shell, and the excitation light beam comes from a light through hole of a Raman detection system of the spectrometer; a surface scanning optical module mounted to the first housing and including a reflective element; the MEMS module is fixed on the first shell and comprises a MEMS driver and a MEMS mirror, and the MEMS driver drives the MEMS mirror to move; and the objective lens module is fixed on the first shell and comprises a collimating lens, and the excitation light beam irradiated from the light guide hole is reflected by the reflecting element, then irradiated towards the MEMS reflecting mirror, and then reflected by the MEMS reflecting mirror to form a plurality of parallel light beams with different irradiation angles towards the image side surface of the collimating lens. Through above-mentioned technical scheme, this face scanning probe system that openly provides can realize the multiple spot and detect the scanning, is of value to the operational safety and the detection precision that improve the spectrum appearance.

Description

Surface scanning probe system and spectrometer

Technical Field

The present disclosure relates to the field of spectrometer technology, and in particular, to a surface scanning probe system and a spectrometer.

Background

The spectrometer is a scientific instrument capable of decomposing light with complex components into spectral lines, the light reflected by a detected substance can be measured by the spectrometer, an optical signal is converted into an electric signal through a light sensing element in the spectrometer and transmitted to a processor, and the electric signal is analyzed and compared with reference data in the spectrometer by the processor, so that the detected substance is identified.

In the process of identifying a substance, a laser transmitter in a spectrometer emits an excitation beam, the excitation beam is focused into a point through an optical element and then irradiates the substance to be detected, different Raman spectrums are scattered, the Raman spectrums are transmitted to a light sensing element along a light path defined by the optical element, the light sensing element converts an optical signal into an electric signal and transmits the electric signal to a processor, and different substances can be identified through analysis of the Raman spectrums.

However, because the energy of the excitation light beam is concentrated, flammable and explosive substances can be ignited, and therefore, the existing spectrometer is low in safety when the flammable and explosive substances are detected; and the detection precision of the spectrograph for the mixed substances is low due to the single detection point analysis.

Disclosure of Invention

The purpose of this disclosure is to provide a face scanning probe system and spectrum appearance, this face scanning probe system can realize the multiple spot and detect the scanning, is of value to improving the operation security and the detection precision of spectrum appearance.

In order to achieve the above object, the present disclosure provides a face scanning probe system, including: the Raman detection device comprises a first shell, a second shell and a light source, wherein the first shell is provided with a light guide hole for an excitation light beam to irradiate into the first shell, and the excitation light beam comes from a light through hole of a Raman detection system of a spectrometer; a surface scanning optical module mounted to the first housing and including a reflective element; the MEMS module is fixed on the first shell and comprises a MEMS driver and a MEMS mirror, and the MEMS driver drives the MEMS mirror to move; and the objective lens module is fixed on the first shell and comprises a collimating lens, the collimating lens is provided with an object side surface and an image side surface, the object side surface is a plane or a concave surface, and the image side surface is a convex surface, wherein the excitation light beams irradiated from the light guide holes are reflected by the reflecting element and then irradiated towards the MEMS reflector, and then reflected by the MEMS reflector to form a plurality of parallel light beams with different irradiation angles towards the image side surface of the collimating lens.

Optionally, the MEMS module has a reference plane defined by orthogonal X and Y axes, the MEMS actuator drives the MEMS mirror to oscillate about the X and Y axes.

Optionally, the scanning probe system comprises a connection module including a connection rod configured with a central axial hole and having a first end and a second end opposite to each other, one of the first end and the second end is used for detachably connecting with the raman detection system, the other of the first end and the second end is detachably connected to the first housing, and the light passing hole and the light guiding hole are coaxially arranged and communicated with the central axial hole, so that the excitation light beam is irradiated into the light guiding hole from the light passing hole through the central axial hole.

Optionally, the first housing is provided with a locating portion for engaging with a locating engagement of a second housing of the raman detection system to limit the attitude of the surface-scan probe system relative to the raman detection system.

Optionally, the positioning portion is configured as a positioning column extending outward from the first housing, the positioning column has a special-shaped cross section, and the positioning matching portion is configured as a special-shaped hole for inserting the positioning column.

Optionally, the second housing of the raman detection system is configured with a fitting hole for inserting the optical filter, and the fitting hole is used as the profile hole.

Optionally, the connection module includes a locking sleeve, the connection rod includes a main body section between the first end portion and the second end portion, the locking sleeve has a central counter bore having a large diameter hole section and a small diameter hole section, the first end portion is configured with a radial flange portion, the radial flange portion is clearance-fitted in the large diameter hole section, a part of the main body section is clearance-fitted in the small diameter hole section, a periphery of the locking sleeve is configured with a first external thread, the first housing or the second housing is configured with a connection hole, the connection hole is configured with a first internal thread capable of being fitted with the first external thread, the connection hole is configured as a counter bore structure together with the light guide hole or the light passing hole, and a diameter of the connection hole is larger than a diameter of the light guide hole or the light passing hole, the radial flange has an abutting surface, the abutting surface is used for abutting against a step surface between the large-diameter hole section and the small-diameter hole section, and the axial distance between the abutting surface and the end surface of the first end part is not smaller than the axial size of the large-diameter hole section, so that the end surface of the first end part abuts against the bottom wall of the connecting hole.

Optionally, the second end portion is configured with a second external thread, a second internal thread is configured in the light through hole or the light guide hole, and the second external thread and the second internal thread can be mutually matched to connect the connecting rod with the corresponding raman detection system or the sweep probe system.

Optionally, the connection module includes a limiting gasket sleeved on the connection rod, a tool withdrawal groove is disposed between the second end portion and the main body section, and the limiting gasket is partially accommodated in the tool withdrawal groove.

Optionally, the central axial bore is configured at the first end as a socket head wrench mating portion.

Optionally, the objective lens module includes an objective lens barrel having a mounting end and a free end opposite to each other, the objective lens barrel is detachably connected to the first housing or the raman detection system through the mounting end, the collimator lens is fixed to the mounting end, the objective lens barrel is configured with a detection window at the free end, and a distance between an optical axis center of the collimator lens and an end surface of the free end is equal to a focal length of the collimator lens.

Optionally, the objective lens barrel includes a detection cap and a fixing support, the detection window is formed at one end of the detection cap, the other end of the detection cap is detachably connected with the fixing support, the collimating lens is fixed to the fixing support, and the fixing support is detachably connected to the first housing or the raman detection system.

Optionally, the surface scanning optical module includes a holding bracket and a mounting bracket, the reflecting element is fixed on the holding bracket and has a reflecting surface, the holding bracket is supported on the adjusting bracket and can rotate around a first rotation axis, the adjusting bracket is mounted on the first housing and can rotate around a second rotation axis, the first rotation axis is parallel to the reflecting surface, and the second rotation axis is perpendicular to the first rotation axis and perpendicular to the axis of the light guide hole.

Optionally, the first rotation axis coincides with the reflection surface, and the first rotation axis, the second rotation axis and the central axis of the light guide hole intersect at a point located on the reflection surface.

Optionally, the holding bracket is configured as a cylindrical structure, the first axis of rotation being collinear with a central axis of the cylindrical structure, the mounting bracket being configured with a holding shaft aperture and with an opening for exposing a portion of the holding bracket to expose the reflective element; the holding bracket has an exposed operating end, the end face of which is configured with a first adjustment recess, which is perpendicular to the first axis of rotation.

Optionally, the surface scanning optical module includes a lock for limiting a position and an attitude of the holding bracket with respect to the mounting bracket.

Optionally, the locking member is configured as a jackscrew that is threadedly engaged with the mounting bracket and extends into the retaining shaft bore.

Alternatively, the mounting bracket has a columnar support body inserted into the second housing and having an exposed outer end face on which a second adjustment groove is configured, and a fixing portion connected to the second housing by a fastener and configured to allow the support body to rotate when the fastener is loosened and to restrict the rotation of the support body when the fastener is tightened.

Optionally, the fixing portion includes a plurality of engaging lugs extending radially outward from an outer end portion of the support main body, the engaging lugs are arranged at intervals in a circumferential direction with respect to a central axis of the support main body, each engaging lug is configured with an arc-shaped through hole, a center of each arc-shaped through hole coincides with and is located on the central axis of the support main body, each arc-shaped through hole is correspondingly provided with a fastener for connecting the mounting bracket to the first housing, a depth direction of the second adjustment groove and an axis direction of each arc-shaped through hole are parallel to the second rotation axis, and the center of each arc-shaped through hole is located in the second adjustment groove and is located on the second rotation axis.

On the basis of the technical scheme, the disclosure further provides a spectrometer which comprises a Raman detection system and the surface scanning probe system, wherein the surface scanning probe system is connected with the Raman detection system and enables the light guide hole and the light through hole to be coaxially arranged and communicated with each other.

Through the technical scheme, the surface scanning probe system provided by the disclosure can enable the excitation light beams from the Raman detection system to irradiate towards the collimating lens along different angles through the MEMS reflector in the MEMS module, then the excitation light beams are focused on a substance to be detected through the collimating lens, here, the parallel excitation light beams at different angles are focused on different points through the collimating lens, the effect of dispersing the energy of the excitation light beams is achieved, and therefore the energy concentration of the excitation light beams can be effectively avoided to ignite the inflammable and explosive substances, and the operation safety of a spectrometer is improved. And then, the Raman spectrum signal of the substance to be detected, which is irradiated and excited by the excitation beam, is refracted by the collimating lens to become a parallel signal, is reflected by the MEMS reflector and the reflecting element, then is incident towards the light through hole, and is processed and analyzed by a Raman detection system of the spectrometer. The MEMS module is driven by the MEMS driver, the change of the attitude angle of the MEMS reflector (which can also be understood as the reflection angle of the MEMS reflector) enables the reflection angle of the excitation light beam to change, therefore, the focuses of the same parallel excitation light beam at different moments after being refracted by the collimating lens are different, the focus is continuously changed, the excited Raman spectrum signal comes from different sampling points, the sampling is more comprehensive for mixed substances, and the detection precision of the spectrometer can be effectively improved. Here, the focus may be changed according to a regular pattern, such as a lissajous curve, by changing the attitude angle of the MEMS mirror, or may be scanned at a single point according to a 4 × 4 rectangular lattice, which is not limited in this disclosure.

Additional features and advantages of the disclosure will be set forth in the detailed description which follows.

Drawings

The accompanying drawings, which are included to provide a further understanding of the disclosure and are incorporated in and constitute a part of this specification, illustrate embodiments of the disclosure and together with the description serve to explain the disclosure without limiting the disclosure. In the drawings:

FIG. 1 is a schematic perspective view of a surface scanning probe system provided by an embodiment of the present disclosure;

FIG. 2 is a schematic diagram of a portion of a face-scan probe system provided by an embodiment of the present disclosure, showing a reflective element, a MEMS module, and a collimating lens;

FIG. 3 is a schematic diagram of a partial structure of a face-scan probe system provided by an embodiment of the present disclosure, wherein the working principle of the face-scan probe system is shown;

FIG. 4 is a schematic perspective view of a spectrometer provided by an embodiment of the present disclosure;

fig. 5 is a schematic perspective view of a raman detection system in a spectrometer provided by an embodiment of the present disclosure;

FIG. 6 is a schematic cross-sectional view of a spectrometer provided by an embodiment of the disclosure;

FIG. 7 is an enlarged partial schematic view of the spectrometer shown in FIG. 6.

Description of the reference numerals

1-face scan probe system, 10-first housing, 101-positioning post, 102-connection hole, 11-reflection element, 12-collimating lens, 13-MEMS module, 131-MEMS mirror, 14-detection cap, 15-fixing bracket, 16-holding bracket, 161-first adjustment groove, 17-mounting bracket, 171-outer end face, 172-second adjustment groove, 173-connection lug, 174-fastener, 18-light guide hole, 19-locking piece;

2-Raman detection system, 20-second shell, 21-special-shaped hole, 22-light-passing hole, 23-laser emitter, 241-optical filter, 242-dichroic sheet, 243-collimating element, 244-slit, 245-first collimating lens, 246-dispersive element, 247-second collimating lens and 25-light sensing element;

3-connecting module, 31-connecting rod, 310-main body section, 311-first end part, 312-second end part, 313-central shaft hole, 314-abutting surface, 315-tool withdrawal groove, 316-inner hexagonal wrench matching part, 32-locking sleeve, 321-step surface and 33-limiting gasket.

Detailed Description

The following detailed description of specific embodiments of the present disclosure is provided in connection with the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating the present disclosure, are given by way of illustration and explanation only, not limitation.

In the present disclosure, the terms "inside" and "outside" are used in relation to the contour of the corresponding component itself, unless otherwise stated. Furthermore, the terms "first, second, etc. are used herein to distinguish one element from another, and are not necessarily sequential or significant. Furthermore, in the following description, when referring to the figures, the same reference numbers in different figures denote the same or similar elements, unless otherwise explained. The foregoing definitions are provided to illustrate and describe the present disclosure only and should not be construed to limit the present disclosure.

According to an embodiment of the present disclosure, referring to fig. 1 to 7, there is provided a surface-scanning probe system 1, the surface-scanning probe system 1 including: a first shell 10, wherein the first shell 10 is provided with a light guide hole 18 for the excitation light beam to irradiate into the first shell 10, and the excitation light beam comes from a light through hole 22 of a Raman detection system 2 of the spectrometer; a surface scanning optical module mounted to the first housing 10 and including a reflective element 11; a MEMS module 13(MEMS, Micro-Electro-Mechanical System), the MEMS module 13 being fixed to the first housing 10 and including a MEMS driver and a MEMS mirror 131, the MEMS driver driving the MEMS mirror 131 to move; and the objective lens module is fixed to the first housing 10, and includes a collimator lens 12, the collimator lens 12 has an object side surface and an image side surface, the object side surface is a plane or a concave surface, and the image side surface is a convex surface, so that the collimator lens 12 can focus the parallel excitation light beam on the substance to be measured, and can collimate a raman spectrum signal excited by the irradiation of the excitation light beam by the substance to be measured into a parallel light beam. The excitation light beam incident from the light guide hole 18 is reflected by the reflecting element 11, then irradiated toward the MEMS mirror 131, and then reflected by the MEMS mirror 131 into a plurality of parallel light beams with different angles of irradiation toward the image side surface of the collimator lens 12.

Through the technical scheme, the surface scanning probe system 1 provided by the disclosure can enable the excitation light beams from the raman detection system to irradiate towards the collimating lens 12 along different angles through the MEMS mirror 131 in the MEMS module 13, and then the excitation light beams are focused on a substance to be detected through the collimating lens 12, here, the parallel excitation light beams at different angles are focused on different points through the collimating lens 12, so that the effect of dispersing the energy of the excitation light beams is achieved, and therefore, the energy concentration of the excitation light beams can be effectively avoided to ignite flammable and explosive substances, so that the operation safety of a spectrometer is improved. Then, the raman spectrum signal of the substance to be detected, which is irradiated and excited by the excitation beam, is refracted by the collimating lens 12 to become a parallel signal, which is reflected by the MEMS mirror 131 and the reflecting element 11, and then enters the light through hole 22, and then is processed and analyzed by the raman detection system 2 of the spectrometer. The MEMS module 13 is driven by the MEMS driver, and the change of the posture angle of the MEMS mirror 131 (also can be understood as the reflection angle of the MEMS mirror 131) changes the reflection angle of the excitation beam, so that the same parallel excitation beam is refracted by the collimating lens 12 and then has different focuses at different times, and the focus changes continuously, so that the excited raman spectrum signal comes from different sampling points, and the sampling is more comprehensive for mixed substances, thereby effectively improving the detection accuracy of the spectrometer. Here, the focus may be changed according to a regular pattern, such as a lissajous curve, by changing the attitude angle of the MEMS mirror 131, or may be scanned at a single point according to a 4 × 4 rectangular lattice, which is not limited in this disclosure.

It should be noted that the excitation light beam is a light for exciting the raman spectrum signal, and may be, for example, a laser beam, and the like, and the disclosure is not limited thereto. The raman spectrum is a fingerprint spectrum and can reflect information on rotation and vibration of molecules. When the light beam passes through substances with different molecular structures, different Raman spectrums can be scattered, so that the aim of identifying different substances can be fulfilled by analyzing the Raman spectrums.

In particular embodiments provided by the present disclosure, the attitude angle or reflection angle of the MEMS mirror 131 may be changed in a suitable manner. Alternatively, the MEMS module 13 has a reference plane defined by perpendicular X-axis (refer to fig. 2) and Y-axis (refer to fig. 2), and the MEMS actuator drives the MEMS mirror 131 to rotate around the X-axis and the Y-axis to change the attitude angle of the MEMS mirror 131 so that the excitation beam reflected by the MEMS mirror 131 is irradiated toward the collimator lens 12 at different angles. As can be seen with reference to fig. 2, parallel beams having the same angle reflected by the reflecting element 11 are reflected by the MEMS mirror 131 to become a plurality of parallel beams irradiated toward the collimator lens 12 along different angles. Furthermore, it can be seen in fig. 3 that the same parallel light beam has different focal points at different times, i.e. the excitation light beam has a first focal point at time T1 and a second focal point at time T2.

Wherein the intersection of the X-axis and the Y-axis is located at the center of the MEMS mirror 131 to be able to precisely control the angle of rotation of the MEMS mirror 131 around the X-axis and the Y-axis.

In the specific embodiment provided by the present disclosure, the surface-scanning probe system 1 includes a connection module 3, the connection module 3 includes a connection rod 31, the connection rod 31 is configured with a central axial hole 313 and has a first end 311 and a second end 312 opposite to each other, one of the first end 311 and the second end 312 is used for being detachably connected with the raman detection system 2, the other of the first end 311 and the second end 312 is detachably connected with the first housing 10, and the light-passing hole 22 and the light-guiding hole 18 are coaxially arranged and communicated with the central axial hole 313, so that the excitation light beam is irradiated into the light-guiding hole 18 from the light-passing hole 22 through the central axial hole 313. The detachable connection between the surface-scanning probe system 1 and the raman detection system 2 enables the surface-scanning probe system to be replaced by another probe system, such as a common objective lens, so that the spectrometer can be switched between a common raman detector and a MEMS surface-scanning raman detector, the use range of the spectrometer is expanded, and the single application scene of the spectrometer is avoided. If the spectrometer needs to be switched from, for example, a common raman detector to an MEMS surface-scanning raman detector, the surface-scanning probe system 1 can be connected to the raman detection system 2 through the connecting rod 31 after the objective module of the common raman detector is detached, so that the spectrometer has a surface-scanning function. On the contrary, if the spectrometer needs to be switched from the MEMS surface-scanning raman detector to, for example, a normal raman detector, the connection rod 31 is detached from the raman detection system 2, and the above-mentioned normal objective lens is attached to the raman detection system 2, so that the switching to the normal raman detector is performed.

Wherein, in order to ensure the accuracy of the relative position between the surface-scanning probe system 1 and the raman detection system 2, the first housing 10 is provided with a positioning portion for engaging with a positioning fitting portion of the second housing 20 of the raman detection system 2 to restrict the posture of the surface-scanning probe system 1 with respect to the raman detection system 2.

In the embodiments provided in the present disclosure, the positioning portion and the positioning fitting portion may be configured in any suitable manner. Alternatively, the positioning part is configured as a positioning post 101 extending outwardly from the first housing 10, the positioning post 101 having a profiled cross-section, and the positioning engagement part is configured as a profiled hole 21 into which the positioning post 101 is inserted. In other embodiments, the positioning engagement portion may be configured as a positioning column 101 extending outward from the first housing 10, and the positioning portion may be configured as a special-shaped hole 21 into which the positioning column 101 is inserted, and the disclosure is not particularly limited thereto.

Here, referring to fig. 3, the second housing 20 of the raman detection system 2 is configured with a fitting hole into which the optical filter 241 is inserted, and the fitting hole serves as the profile hole 21. It should be noted here that when the positioning column 101 is inserted into the mounting hole, the movement of the scanning probe system 1 relative to the raman detection system 2 in the transverse direction and the longitudinal direction is restricted, and the use of the optical filter 241 is not affected by the portion of the positioning column 101 inserted into the mounting hole.

Wherein, in the specific embodiment provided by the present disclosure, the connection module 3 comprises a locking sleeve 32, the connection rod 31 comprises a body section 310 located between a first end 311 and a second end 312, and as shown in fig. 6 and 7, the locking sleeve 32 has a central counter bore having a large diameter bore section and a small diameter bore section, the first end 311 is configured with a radial flange portion that is clearance-fitted in the large diameter bore section, and a portion of the body section 310 is clearance-fitted in the small diameter bore section. Wherein the locking sleeve 32 is configured with a first external thread at the outer circumference thereof, and the first housing 10 or the second housing 20 is configured with a connection hole 102, and the connection hole 102 is configured with a first internal thread capable of being engaged with the first external thread. The connecting hole 102 and the light guide hole 18 or the light through hole 22 are configured as a counter bore structure, the aperture of the connecting hole 102 is larger than that of the light guide hole 18 or the light through hole 22, the radial flange has an abutting surface 314, the abutting surface 314 is used for abutting against a step surface 321 between a large-diameter hole section and a small-diameter hole section, the axial distance between the abutting surface 314 and the end surface of the first end portion 311 is not smaller than the axial size of the large-diameter hole section, and therefore the end surface of the first end portion 311 abuts against the bottom wall of the connecting hole 102.

In the embodiment shown in fig. 4, 6 and 7, the first housing 10 is configured with a connecting hole 102, the connecting hole 102 is configured with a first internal thread capable of being matched with the first external thread on the outer periphery of the locking sleeve 32, the connecting hole 102 and the light guide hole 18 are configured in a counter bore structure, the hole diameter of the connecting hole 102 is larger than that of the light guide hole 18, the radial flange has an abutting surface 314, the abutting surface 314 is used for abutting against a step surface 321 between the large-diameter hole section and the small-diameter hole section, and the distance between the abutting surface 314 and the end surface of the first end 311 in the axial direction is not smaller than the dimension of the large-diameter hole section in the axial direction, so that the end surface of the first end 311 abuts against the bottom wall of the connecting hole 102, thereby fixedly connecting the first end 311 of the connecting rod 31.

Wherein, the second end 312 may be configured with a second external thread, and a second internal thread is configured in the light-passing hole 22 or the light-guiding hole 18, and the second external thread and the second internal thread can be mutually matched to connect the connecting rod 31 with the corresponding raman detection system 2 or the face scan probe system 1.

In the embodiment shown in fig. 4, 6 and 7, the light-passing hole 22 is configured with a second internal thread which is matched with a second external thread of the second end 312 to connect the second end 312 of the connecting rod 31 with the raman detection system 2.

The connecting module 3 includes a limiting pad 33 sleeved on the connecting rod 31, a tool withdrawal groove 315 is disposed between the second end 312 and the main body section 310, and the limiting pad 33 is partially accommodated in the tool withdrawal groove 315, so as to prevent the use of internal components of the raman detection system 2 from being affected by an excessively long length of the portion of the connecting rod 31, where the second end 312 is connected to the raman detection system 2, and thus, the size is limited.

Wherein the central axial hole 313 is configured at the first end 311 as an allen wrench mating portion 316, the allen wrench mating portion 316 mating with an allen wrench to connect the second end 312 of the connection rod 31 to the raman detection system 2.

In the specific implementation that this disclosure provided, objective module includes the objective barrel, this objective barrel has installation end and free end relative to each other, collimating lens 12 is fixed in the installation end, the objective barrel is constructed with the detection window at the free end, and the distance between collimating lens 12's optical axis center to the terminal surface of free end equals collimating lens 12's focus, consequently, when detecting the material constitution that awaits measuring, only need flush (mutually contact and laminate) with the terminal surface of free end and the material that awaits measuring, just can make the material that awaits measuring be located collimating lens 12's focal plane, thereby realize focusing. Wherein the objective lens barrel may be detachably connected to the first housing 10 or the raman detection system 2 by means of a mounting end, i.e. the objective lens barrel may be designed to be adapted to be connected to the first housing 10 and the raman detection system 2. It is possible that, for the area-scanning probe system 1, objective modules of different specifications can be conveniently replaced to meet different detection requirements. For the raman detection system 2, the objective lens module may be used as a spare objective lens, and in some situations, as a common objective lens and further assembled to the raman detection system 2, so that the MEMS surface-scanning raman detector may be modified into a common raman detector by a simple operation, which may satisfy various detection requirements of a user. Of course, it is also possible to design different objective modules for the surface-scanning probe system 1 and the raman detection system 2 according to actual requirements in order to reduce the operation steps for switching between the conventional raman detector and the MEMS surface-scanning raman detector.

As shown in fig. 4, the objective lens barrel includes a detection cap 14 and a fixing bracket 15, a detection window is formed at one end of the detection cap 14, the other end of the detection cap 14 is detachably connected to the fixing bracket 15, the collimator lens 12 is fixed to the fixing bracket 15, and the fixing bracket 15 is detachably connected to the first housing 10 or the raman detection system 2.

In the specific embodiment provided by the present disclosure, referring to fig. 1, 4 and 6, the surface scanning optical module includes a holding bracket 16 and a mounting bracket 17, the reflection element 11 is fixed on the holding bracket 16 and has a reflection surface defining a first rotation axis and a second rotation axis perpendicular to each other, the holding bracket 16 is supported on an adjustment bracket and is rotatable about the first rotation axis, the adjustment bracket is mounted on the first housing 10 and is rotatable about the second rotation axis, the first rotation axis is parallel to the reflection surface, and the second rotation axis is perpendicular to the first rotation axis and to the axis of the light guide hole 18. Adjusting the pitch angle of the reflecting element 11 by rotating the holding bracket 16 about the first rotation axis; by rotating the mounting bracket 17 around the second rotation axis and driving the holding bracket 16 to rotate, the deflection angle of the reflecting element 11 is adjusted to adjust the relative position between the reflecting element 11 and the MEMS mirror 131, so that a more accurate and precise detection effect can be obtained.

Wherein the first rotation axis may coincide with the reflection surface, and the first rotation axis, the second rotation axis and the central axis of the light guide hole 18 intersect at a point located on the reflection surface, so that the posture of the reflection element 11 with respect to the MEMS mirror 131 can be accurately adjusted.

In some embodiments provided by the present disclosure, to facilitate the positioning of the reflective element 11, the holding bracket 16 may be configured as a cylindrical structure, the first rotational axis being collinear with a central axis of the cylindrical structure, and the mounting bracket 17 is configured with a holding shaft hole and with an opening for exposing a portion of the holding bracket 16 to expose the reflective element 11. In some embodiments, the holding bracket 16 may be infinitely rotatable and held in a desired position when rotated to that position.

For example, in order to enable the holding bracket 16 to be rotationally operated, the holding bracket 16 has an operating end exposed outside the first housing 10, an end face of the operating end is configured with a first adjustment groove 161, the first adjustment groove 161 being perpendicular to the first rotation axis, and the holding bracket 16 is operable to be rotated about the first rotation axis by, for example, inserting an operating tool into the first adjustment groove 161 to adjust the posture of the reflecting element 11 with respect to the MEMS mirror 131. Here, the first adjustment groove 161 may be configured in any suitable manner, as long as the corresponding operating tool is correspondingly configured. For example, the first adjustment groove 161 may be formed in a straight line, so that articles commonly used in life, such as coins, may be used as an operation tool, which may eliminate the need for a special tool, thereby saving costs, and may improve convenience of operation, thereby avoiding inconvenience due to loss of the operation tool.

Among other things, the surface scanning optical module may include a lock 19 for limiting the position and attitude of the holding bracket 16 relative to the mounting bracket 17. Allowing the retaining bracket 16 to move relative to the mounting bracket 17 along the central axis of the cylindrical structure when the locking member 19 is released for mounting or dismounting the retaining bracket 16 from the mounting bracket 17; the retaining bracket 16 is restrained from moving and rocking radially relative to the mounting bracket 17 along the central axis of the cylindrical structure as the locking member 19 is tightened to secure the retaining bracket 16 to the mounting bracket 17.

Wherein the locking member 19 may be configured in any suitable manner. Alternatively, the locking member 19 is configured as a jack screw that is screw-fitted to the mounting bracket 17 and extends into the holding shaft hole. Of course, in other embodiments of the present disclosure, there may be other configurations to achieve the stepless rotational adjustment and position retention of the holding bracket 16, and the present disclosure is not particularly limited thereto.

In some embodiments provided by the present disclosure, referring to fig. 1, the mounting bracket 17 may be configured to have a support body having a cylindrical shape, which is inserted into the second housing 20 and has an exposed outer end surface 171, the outer end surface 171 being configured with a second adjustment recess 172 thereon, a central axis of the support body being collinear with the second rotation axis, and a fixing portion connected with the second housing 20 by a fastener 174, and configured to allow the support body to rotate when the fastener 174 is loosened, and to restrict the support body from rotating when the fastener 174 is tightened. When the fastener 174 is loosened, the mounting bracket 17 can be rotated about the second rotation axis by operating the second adjustment recess 172, and the holding bracket 16 is brought into rotation to adjust the attitude of the reflecting element 11 with respect to the MEMS mirror 131. In some embodiments, the mounting bracket 17 may be infinitely rotatable and remain in a desired position when rotated to that position. Here, the second adjustment recess 172 may be configured in any suitable manner, as long as the corresponding operating tool is correspondingly configured. For example, the second adjustment recess 172 may be formed in a straight line, so that articles commonly used in daily life, such as coins, can be used as an operation tool, thereby eliminating the need for a special tool, thereby saving costs, improving convenience of operation, and avoiding inconvenience due to loss of the operation tool

For example, in order to achieve the rotation of the mounting bracket 17, the fixing portion includes a plurality of engaging lugs 173 radially extending outward from the outer end portion of the support main body, the plurality of engaging lugs 173 are arranged at intervals in a circumferential direction with respect to the central axis of the support main body, each of the engaging lugs 173 is configured with an arc-shaped through hole, and a center of each of the arc-shaped through holes coincides with and is located on the central axis of the support main body, each of the arc-shaped through holes is correspondingly provided with a fastening member 174 for connecting the mounting bracket 17 to the first housing 10, a depth direction of the second adjusting recess 172 and an axial direction of the arc-shaped through hole are parallel to the second rotation axis, and a center of the arc-shaped through hole is located in the second adjusting recess. When it is desired to rotate the mounting bracket 17, the fasteners may be loosened (but not removed) to the extent that the mounting bracket 17 is movable relative to the first housing 10. When it is necessary to lock the mounting bracket 17, the fastening member is tightened to fasten the mounting bracket 17 to the first housing 10. Here, the arc-shaped extending direction of the arc-shaped through hole is perpendicular to the axial direction thereof, and the arc-shaped shape cooperates with the fastener for restraining and guiding the movement of the mounting bracket 17. Of course, in other embodiments of the present disclosure, there may be other configurations to achieve the stepless rotational adjustment and position retention of the mounting bracket 17, and the present disclosure is not particularly limited thereto.

On the basis of the technical scheme, the present disclosure further provides a spectrometer, which includes a raman detection system 2 and the above surface scanning probe system 1, wherein the surface scanning probe system 1 and the raman detection system 2 are connected and the light guide hole 18 and the light through hole 22 are coaxially arranged and communicated with each other. The spectrometer comprises the above-mentioned surface-scanning probe system 1, and therefore has the same features as above, and therefore, in order to avoid redundancy, the description thereof is omitted.

The raman detection system 2 includes an excitation module, an optical module and a detection module, the excitation module includes a laser emitter 23, the optical module defines a light path, the optical module includes a dichroic sheet 242, a slit 244 and a dispersion element 246, which are sequentially arranged along the light path from front to back, and the detection module includes a light sensing element 25 located behind a first collimating lens 245. Wherein, the optical module still includes: a filter 241 between the laser emitter 23 and the dichroic sheet 242, a collimating element 243 between the dichroic sheet 242 and the slit 244, a first collimating lens 245 between the slit 244 and the dispersing element 246, and a second collimating lens 247 between the dispersing element 246 and the light sensing element 25.

Here, in one embodiment of the spectrometer provided by the present disclosure, the first housing of the face-scan probe system 1 and the second housing of the raman detection system 2 may be integrated into one integral component, and therefore, the detection mode of the spectrometer configured in this manner is specific and is determined by the face-scan probe system 1. In another embodiment of the spectrometer provided by the present disclosure, the first housing 10 of the scanning probe system 1 and the second housing 20 of the raman detection system 2 are independent components, so that the scanning probe system 1 and the raman detection system 2 can be independently assembled, and the split housings enable the scanning probe system 1 and the raman detection system 2 to be assembled independently without affecting each other, and only need to be assembled together when the spectrometer is manufactured, thereby effectively reducing the assembly time and simultaneously reducing the assembly difficulty. In addition, in the processing process of the two split shells, the required working procedures, clamps and processing time are obviously less than those of the integral shell, and the production cost of the split shell is also obviously less than that of the integral shell.

In the working process of the spectrometer, after an excitation beam emitted by the laser emitter 23 is filtered by the optical filter 241, light with redundant wavelengths emitted by the laser emitter 23 is filtered, the excitation beam is reflected by the dichroic sheet 242 and then propagates towards the light through hole 22 along a light path, passes through the central shaft hole 313 of the connecting rod 31 and enters the surface scanning probe system 1 through the light guide hole 18, the excitation beam is reflected by the reflecting element 11 and then irradiates towards the MEMS mirror 131, the excitation beam can irradiate towards the collimating lens 12 along different angles through the MEMS mirror 131, and then the excitation beam is focused on a substance to be measured by the collimating lens 12; then, the raman spectrum signal of the substance to be detected excited by the irradiation of the excitation beam is collimated into a parallel signal by the collimating lens 12, reflected by the MEMS mirror 131 and the reflecting element 11, passes through the light guide hole 18, the central shaft hole 313 of the connecting rod 31 and the light through hole 22, and then enters the raman detection system 2; the parallel signal passes through the dichroic sheet 242, enters the slit 244 after passing through the collimating element 243, is converted into divergent light, the divergent light is collimated into parallel light by the first collimating lens 245 and reaches the dispersing element 246, after being diffracted by the dispersing element 246, the light with different wavelengths is diffracted in different directions, the diffracted light with all wavelengths is transmitted to the light sensing element 25 (such as a light sensing element CCD) through the second collimating lens 247, and the light sensing element 25 converts the light signal into an electrical signal, so that spectral data output is formed, and the substance to be detected is identified.

The preferred embodiments of the present disclosure are described in detail with reference to the accompanying drawings, however, the present disclosure is not limited to the specific details of the above embodiments, and various simple modifications may be made to the technical solution of the present disclosure within the technical idea of the present disclosure, and these simple modifications all belong to the protection scope of the present disclosure.

It should be noted that, in the foregoing embodiments, various features described in the above embodiments may be combined in any suitable manner, and in order to avoid unnecessary repetition, various combinations that are possible in the present disclosure are not described again.

In addition, any combination of various embodiments of the present disclosure may be made, and the same should be considered as the disclosure of the present disclosure, as long as it does not depart from the spirit of the present disclosure.

Claims (20)

1. A face scan probe system, characterized in that the face scan probe system (1) comprises:

a first housing (10), the first housing (10) being provided with a light guide hole (18) for an excitation light beam to shine into the first housing (10), the excitation light beam coming from a light through hole (22) of a Raman detection system (2) of a spectrometer;

a face scanning optical module mounted to the first housing (10) and comprising a reflective element (11);

a MEMS module (13), the MEMS module (13) being fixed to the first housing (10) and comprising a MEMS driver and a MEMS mirror (131), the MEMS driver driving the MEMS mirror (131) to move; and the number of the first and second groups,

an objective module fixed to the first housing (10) and comprising a collimator lens (12), the collimator lens (12) having an object side surface and an image side surface, the object side surface being planar or concave and the image side surface being convex,

the excitation light beams irradiated from the light guide holes (18) are reflected by the reflecting element (11), irradiated towards the MEMS reflecting mirror (131), and then reflected by the MEMS reflecting mirror (131) to be a plurality of parallel light beams with different angles irradiated towards the image side surface of the collimating lens (12).

2. The face scan probe system of claim 1, wherein the MEMS module (13) has a reference plane defined by orthogonal X and Y axes, and the MEMS actuator drives the MEMS mirror (131) to rotate about the X and Y axes.

3. The sweep probe system of claim 1 wherein the sweep probe system (1) includes a connection module (3), the connection module (3) comprising a connection rod (31), the connection rod (31) being configured with a central shaft bore (313) and having a first end (311) and a second end (312) opposite to each other, one of the first end portion (311) and the second end portion (312) is for detachable connection with the Raman detection system (2), the other of the first end portion (311) and the second end portion (312) is detachably connected to the first housing (10), and the light through hole (22) and the light guide hole (18) are coaxially arranged and communicated with the central shaft hole (313), so that the excitation light beam is irradiated from the light passing hole (22) into the light guiding hole (18) through the central axis hole (313).

4. The surface-scanning probe system of claim 3, wherein the first housing (10) is provided with a locating portion for engaging with a locating mating portion of a second housing (20) of the Raman detection system (2) to limit the attitude of the surface-scanning probe system (1) relative to the Raman detection system (2).

5. The surface scanning probe system according to claim 4, wherein the positioning part is configured as a positioning column (101) extending outwards from the first housing (10), the positioning column (101) has a profiled cross section, and the positioning matching part is configured as a profiled hole (21) for inserting the positioning column (101).

6. The surface-scanning probe system according to claim 5, wherein the second housing (20) of the Raman detection system (2) is configured with a fitting hole for inserting the optical filter (241), which serves as the profile hole (21).

7. The surface scanning probe system according to claim 3, characterized in that the connection module (3) comprises a locking sleeve (32), the connection rod (31) comprises a body section (310) between the first end (311) and the second end (312),

the locking sleeve (32) having a central counterbore with a large bore section and a small bore section, the first end portion (311) being configured with a radial flange portion that is clearance fitted in the large bore section, a portion of the body section (310) being clearance fitted in the small bore section,

the outer circumference of the locking sleeve (32) is configured with a first external thread, the first shell (10) or the second shell (20) is configured with a connecting hole (102), the connecting hole (102) is configured with a first internal thread which can be matched with the first external thread,

the connecting hole (102) and the light guide hole (18) or the light through hole (22) are together constructed to be a counter bore structure, the aperture of the connecting hole (102) is larger than that of the light guide hole (18) or the light through hole (22), the radial flange is provided with an abutting surface (314), the abutting surface (314) is used for abutting against a step surface (321) between the large-diameter hole section and the small-diameter hole section, and the distance between the abutting surface (314) and the end surface of the first end portion (311) in the axial direction is not smaller than the size of the large-diameter hole section in the axial direction, so that the end surface of the first end portion (311) abuts against the bottom wall of the connecting hole (102).

8. The surface scanning probe system according to claim 7, characterized in that the second end portion (312) is configured with a second external thread, the light through hole (22) or the light guide hole (18) is configured with a second internal thread, and the second external thread and the second internal thread can be mutually matched to connect the connecting rod (31) with the corresponding Raman detection system (2) or the surface scanning probe system (1).

9. The surface scanning probe system according to claim 8, wherein the connecting module (3) comprises a limiting pad (33) sleeved on the connecting rod (31), and a relief groove (315) is arranged between the second end portion (312) and the main body section (310), wherein the limiting pad (33) is partially accommodated in the relief groove (315).

10. The surface scanning probe system according to claim 8, wherein the central shaft bore (313) is configured at the first end (311) as a socket head wrench mating portion (316).

11. The surface scanning probe system according to claim 1, wherein the objective module comprises an objective cylinder having a mounting end and a free end opposite to each other, the objective cylinder being detachably connected to the first housing (10) or the raman detection system (2) via the mounting end, the collimator lens (12) being fixed to the mounting end, the objective cylinder being configured with a detection window at the free end, and a distance between an optical axis center of the collimator lens (12) and an end face of the free end being equal to a focal length of the collimator lens (12).

12. The surface scanning probe system according to claim 11, wherein the objective lens barrel includes a detection cap (14) and a fixing bracket (15), the detection window is formed at one end of the detection cap (14), the other end of the detection cap (14) is detachably connected with the fixing bracket (15), the collimator lens (12) is fixed to the fixing bracket (15), and the fixing bracket (15) is detachably connected to the first housing (10) or the raman detection system (2).

13. The surface scanning probe system according to claim 1, characterized in that the surface scanning optical module comprises a holding bracket (16) and a mounting bracket (17), the reflecting element (11) being fixed on the holding bracket (16) and having a reflecting surface, the holding bracket (16) being supported on the adjusting bracket and being rotatable about a first axis of rotation, the adjusting bracket being mounted on the first housing (10) and being rotatable about a second axis of rotation, the first axis of rotation being parallel to the reflecting surface, the second axis of rotation being perpendicular to the first axis of rotation and to the axis of the light guide hole (18).

14. The surface scanning probe system of claim 13, wherein the first axis of rotation coincides with the reflecting surface, and the first axis of rotation, the second axis of rotation and the central axis of the light guide hole (18) intersect at a point that is located on the reflecting surface.

15. The sweep probe system of claim 13 wherein the holding bracket (16) is configured as a cylindrical structure, the first axis of rotation being collinear with a central axis of the cylindrical structure, the mounting bracket (17) being configured with a holding shaft aperture and with an opening for exposing a portion of the holding bracket (16) to expose the reflective element (11);

the holding bracket (16) has an operating end exposed outside the first housing (10), and an end face of the operating end is configured with a first adjustment groove (161), and the first adjustment groove (161) is perpendicular to the first rotation axis.

16. The surface scanning probe system according to claim 15, characterized in that the surface scanning optical module comprises a lock (19) for limiting the position and attitude of the holding bracket (16) relative to the mounting bracket (17).

17. The surface scanning probe system according to claim 16, wherein the locking member (19) is configured as a jackscrew that is screw-fitted to the mounting bracket (17) and extends into the retaining shaft hole.

18. The face scan probe system of claim 13, wherein the mounting bracket (17) has a cylindrical support body inserted into the second housing (20) and having an exposed outer end face (171), the outer end face (171) being configured with a second adjustment recess (172), the support body having a central axis collinear with the second axis of rotation, and a fixing portion connected to the second housing (20) by a fastener (174) and configured to allow rotation of the support body when the fastener (174) is loosened and to limit rotation of the support body when the fastener (174) is tightened.

19. The surface scanning probe system as claimed in claim 18, wherein said fixing portion includes a plurality of engaging lugs (173) extending radially outwardly from an outer end portion of said support body, a plurality of said engaging lugs (173) being disposed at intervals in a circumferential direction with respect to a central axis of said support body, each of said engaging lugs (173) being configured with an arc-shaped through hole, the circle centers of the arc through holes are overlapped and positioned on the central axis of the supporting main body, a fastening piece (174) is correspondingly arranged on each arc through hole, for connecting the mounting bracket (17) to the first housing (10), the depth direction of the second adjustment groove (172) and the axial direction of the arc-shaped through hole being parallel to the second rotation axis, the circle center is located in the second adjusting groove (172) and located on the second rotation axis.

20. Spectrometer comprising a raman detection system (2), characterized in that it further comprises a swept-area probe system (1) according to any one of claims 1 to 19, said swept-area probe system (1) and said raman detection system (2) being connected and such that said light guide hole (18) is arranged coaxially and in communication with said light through hole (22).

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