CN111037769A - Tubular ceramic target green compact machining clamp - Google Patents
Tubular ceramic target green compact machining clamp Download PDFInfo
- Publication number
- CN111037769A CN111037769A CN201911425903.3A CN201911425903A CN111037769A CN 111037769 A CN111037769 A CN 111037769A CN 201911425903 A CN201911425903 A CN 201911425903A CN 111037769 A CN111037769 A CN 111037769A
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- Prior art keywords
- support body
- target green
- ceramic target
- support
- shaft sleeve
- Prior art date
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- Pending
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- 239000000919 ceramic Substances 0.000 title claims abstract description 28
- 238000003754 machining Methods 0.000 title claims abstract description 25
- 238000012545 processing Methods 0.000 claims abstract description 16
- 229910000838 Al alloy Inorganic materials 0.000 claims description 8
- 230000003746 surface roughness Effects 0.000 claims description 5
- 229910001369 Brass Inorganic materials 0.000 claims description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 229910000975 Carbon steel Inorganic materials 0.000 claims description 3
- 229910001069 Ti alloy Inorganic materials 0.000 claims description 3
- 239000010951 brass Substances 0.000 claims description 3
- 239000010962 carbon steel Substances 0.000 claims description 3
- 229910002804 graphite Inorganic materials 0.000 claims description 3
- 239000010439 graphite Substances 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 238000000034 method Methods 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000005245 sintering Methods 0.000 description 6
- 229910010293 ceramic material Inorganic materials 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Inorganic materials O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
- B28D7/04—Accessories specially adapted for use with machines or devices of the preceding groups for supporting or holding work or conveying or discharging work
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a tubular ceramic target green body processing clamp. The clamp comprises a support body, a pull rod, a shaft sleeve, an end cover, a locking nut, a chuck and a support rib, wherein the end cover is arranged at the front end of the support body, a central hole is formed in the end cover, the pull rod is inserted into the support body through the central hole, the locking nut is screwed at one end of the pull rod, which is positioned outside the support body, and one end of the pull rod, which is positioned in the support body, is in threaded connection with the shaft sleeve; the number of the chucks is at least 3 groups, and the chucks of the at least 3 groups are provided with arc-shaped clamping surfaces and are uniformly arranged along the outer circumferential direction of the support body; the support body is provided with rectangular openings, each rectangular opening is embedded with a support rib with an inclined plane, the inclined planes are in contact with the outer circumferential surface of the shaft sleeve, and the support ribs are fixedly connected with the chucks. The ceramic target green body machining fixture can clamp the target green body once to complete machining, has uniform clamping force, and can solve the problem that the ceramic target green body is easy to crack in the machining process.
Description
Technical Field
The invention relates to the technical field of ceramic target processing equipment, in particular to a tubular ceramic target green compact processing clamp.
Background
The ceramic target is a very important vacuum coating material, and comprises ZnO, AZO, GZO, IZO, IGZO, ITO and TiO2、Nb2O5And the like. The ceramic target is a ceramic material formed by mixing, granulating, molding and sintering one or more oxide powders. The ceramic material is difficult to process due to low strength after being formed, and particularly, the ceramic material is easy to crack when being processed into a target green body due to the fact that the clamping force of the clamp is large and uneven in the processing process, and the yield is reduced. If the formed target green body is not machined to a regular size and the wall thickness of the green body is not uniform enough, the sintering uniformity can be influenced, the sintered target becomes a ceramic material, the post-processing is very difficult, the grinding amount is large, the efficiency is low, and the cost is wasted. Therefore, a fixture suitable for processing the tubular ceramic target is urgently needed, so that the tubular ceramic target green body is not easy to crack in the processing process, the processing can be completed by one-time clamping, the clamping force is uniform, and the processed size is standard.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide a tubular ceramic target green body processing clamp which can complete processing by one-time clamping, has uniform clamping force and standard processed size, can solve the problem that ceramic target green bodies are easy to crack in the processing process, ensures that the sintering process is more uniform, has small target green body processing allowance after sintering, greatly reduces the production working hours, improves the production efficiency, improves the product yield and reduces the cost.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows:
a tubular ceramic target green body machining clamp comprises a support body, a pull rod, a shaft sleeve, an end cover, a locking nut, a chuck and a support rib, wherein the end cover is arranged at the front end of the support body, a central hole is formed in the end cover, the pull rod is inserted into the support body through the central hole, the locking nut is screwed at the front end of the pull rod, which is positioned outside the support body, and the tail end of the pull rod, which is positioned inside the support body, is in threaded connection with the shaft sleeve; the number of the chucks is at least 3 groups, preferably 3 groups, and the at least 3 groups of chucks are provided with circular arc-shaped clamping surfaces and are uniformly arranged along the outer circumferential direction of the support body; the support body is provided with rectangular openings, each rectangular opening is embedded with a support rib with an inclined plane, the inclined planes are in contact with the outer circumferential surface of the shaft sleeve, and the support ribs are fixedly connected with the chucks.
The target green body is sleeved outside the chuck, the shaft sleeve is driven to move in the support body along the horizontal direction by rotating the pull rod, the outer circumferential surface of the shaft sleeve is in contact with the inclined surface on the support rib, the support rib is pushed to move outwards along the radial direction of the support body by the movement of the shaft sleeve, the chuck with the arc-shaped clamping surface is driven to be in contact with the inner wall of the target green body and to be tensioned, and the chuck and the target green body are kept in a tensioned state by screwing the locking nut.
After the target green compact is finished, the locking nut is loosened, the pull rod is rotated to move on the pull rod along the horizontal direction, so that the movement of the shaft sleeve pushes the support rib to move inwards along the radial direction of the support body, the chuck and the target green compact are in a loosening state, and the processed target green compact is convenient to take down from the clamp.
The fixture simultaneously clamps through at least three circular arc-shaped clamping surfaces in the circumferential direction, the contact area between the chuck and the target green body is large, the stress on the unit area of the target is small, the clamping force is uniform, the target green body is prevented from being clamped and cracked, and the size standard of the processed target green body is ensured.
Preferably, anchor clamps still include guiding mechanism, guiding mechanism includes that guiding axle, cushion and direction axle sleeve constitute, be equipped with the through-hole on the supporter, the guiding axle is installed on the chuck to pass in the through-hole gets into the supporter, the part that the guiding axle is located between supporter and chuck still overlaps and is equipped with the cushion, and with the supporting direction axle sleeve of guiding axle improves the chuck of anchor clamps in radial gliding precision.
Preferably, the part of the guide shaft in the support body is also sleeved with a spring to ensure that the clamp can be actively reset when being loosened.
Preferably, the surface roughness Ra of the through hole on the supporting body is less than 1.6 μm, so that the friction between the supporting body and the guide shaft is reduced, and the accuracy of the radial sliding of the chuck of the clamp is improved.
Preferably, the guide shaft and the chuck are fixed through bolt connection.
The supporting body and the chuck can adopt an integrated structure or a split structure, preferably, the supporting body and the chuck are of the split structure, and the supporting ribs and the chuck are fixedly connected through bolts, so that the chuck is convenient to replace.
Preferably, the tail end of the support body is provided with an ejector pin hole, when the fixture and the target green body are placed on a lathe to be machined, an ejector pin of a lathe tailstock is ejected into the ejector pin hole, and the fixture is convenient to fix on the lathe.
Preferably, the material of the support body is carbon steel, stainless steel, aluminum alloy or titanium alloy, preferably aluminum alloy, and the weight of the clamp can be further reduced by selecting the aluminum alloy.
Preferably, the shaft sleeve is a brass shaft sleeve or a graphite shaft sleeve, and the surface roughness of the shaft sleeve is favorably reduced.
Preferably, two ends of the shaft sleeve are respectively provided with a fixing plate, the fixing plates are respectively provided with a central hole, and the pull rod penetrates through the central holes and is tightly pressed through a fixing nut.
The use method of the clamp comprises the following steps:
(1) sleeving the target green body outside the chuck, driving the shaft sleeve to move along the horizontal direction by rotating the pull rod, enabling the shaft sleeve to be in contact with the inclined surface on the support rib, and enabling the support rib to move along the radial direction of the support body by the movement of the shaft sleeve so as to drive the chuck with the arc-shaped clamping surface to be in contact with the inner wall of the target green body and be tensioned;
(2) the mounted fixture and the target green body are mounted on a lathe, the front end of the fixture is clamped by a three-grab chuck, and the tail end of the fixture is tightly jacked by a thimble of a lathe tailstock;
(3) and turning the surface and two end faces of the target green body according to the machining requirement.
(4) And after the machining is finished, simultaneously taking down the fixture together with the target green body, loosening the locking nut and taking out the target green body.
Compared with the prior art, the invention has the beneficial effects that:
the fixture simultaneously clamps through at least three circular arc-shaped clamping surfaces in the circumferential direction, the contact area between the chuck and the target green body is large, the stress on the unit area of the target is small, the ceramic target green body is not easy to crack in the machining process, the machining can be completed by one-time clamping, the clamping force is uniform, the machined size is standard, the sintering process is more uniform, the machining allowance of the sintered target green body is small, the production working time is greatly reduced, the production efficiency is improved, the product yield is improved, and the cost is reduced.
Drawings
FIG. 1 is a front view of a green compact machining fixture for a tubular ceramic target according to the present invention;
FIG. 2 is a cross-sectional view of the green compact processing fixture for tubular ceramic target material according to the present invention;
FIG. 3 is an enlarged view of a portion of the guide mechanism of the present invention;
1-support body, 2-pull rod, 3-shaft sleeve, 4-end cover, 5-locking nut, 6-chuck, 7-support rib, 8-guide shaft, 9-cushion block, 10-guide shaft sleeve, 11-spring, 12-bolt, 13-thimble hole and 14-fixing plate.
Detailed Description
To better illustrate the objects, aspects and advantages of the present invention, the present invention will be further described with reference to specific examples. It will be understood by those skilled in the art that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
In the examples, the experimental methods used were all conventional methods unless otherwise specified, and the materials, reagents and the like used were commercially available without otherwise specified.
A tubular ceramic target green body processing clamp is shown in figures 1-3 and comprises a support body 1, a pull rod 2, a shaft sleeve 3, an end cover 4, a locking nut 5, a chuck 6 and a support rib 7, wherein the end cover 2 is arranged at the front end of the support body 1, a central hole is formed in the end cover 2, the pull rod 2 is inserted into the support body 1 through the central hole, the locking nut 5 is screwed at the front end of the pull rod 2, which is positioned outside the support body 1, and the tail end of the pull rod 2, which is positioned inside the support body 1, is in threaded connection with the shaft sleeve 3; the number of the chucks 6 is at least 3 groups, preferably 3 groups, and the at least 3 groups of chucks 6 are provided with circular arc-shaped clamping surfaces and are uniformly arranged along the outer circumferential direction of the support body 1; the supporting body 1 is provided with rectangular openings, each rectangular opening is embedded with a supporting rib 7 with an inclined plane, the inclined planes are in contact with the outer circumferential surface of the shaft sleeve 3, and the supporting ribs 7 are fixedly connected with the clamping heads 6.
The length of the pull rod 2 is not less than the linear distance between the rectangular opening and the end cover 4, and the support rib 7 is embedded into the support body 1 through the rectangular opening, so that the inclined surface can be contacted with the outer circumferential surface of the shaft sleeve 3.
The target green compact is sleeved outside the chuck, the shaft sleeve is driven to move along the horizontal direction by rotating the pull rod, so that the shaft sleeve is in contact with the inclined surface on the supporting rib, the supporting rib is pushed to move outwards along the radial direction of the supporting body by the movement of the shaft sleeve, the chuck with the arc-shaped clamping surface is driven to be in contact with the inner wall of the target green compact and to be tensioned, and the chuck and the target green compact are kept in a tensioned state by screwing the locking nut. After the target green compact is finished, the locking nut is loosened, the pull rod is rotated to move on the pull rod along the horizontal direction, so that the movement of the shaft sleeve pushes the support rib to move inwards along the radial direction of the support body, and the chuck and the target green compact are in a loosened state.
The fixture simultaneously clamps through at least three circular arc-shaped clamping surfaces in the circumferential direction, the contact area between the chuck and the target green body is large, the stress on the unit area of the target is small, the clamping force is uniform, the target green body is prevented from being clamped and cracked, and the size standard of the processed target green body is ensured.
In the invention, the fixture further comprises a guide mechanism, the guide mechanism comprises a guide shaft 8, a cushion block 9 and a guide shaft sleeve 10, a through hole is formed in the support body 1, the guide shaft 8 is installed on the chuck 6 and penetrates through the through hole to enter the support body 1, the cushion block 9 and the guide shaft sleeve 10 matched with the guide shaft 8 are further sleeved on the part, located between the support body 1 and the chuck 6, of the guide shaft 8, and the accuracy of the chuck of the fixture in radial sliding is improved.
In the invention, the part of the guide shaft 8, which is positioned in the support body 1, is also sleeved with a spring 11, when the chuck and the target green body are in a tensioned state, the spring is in a compressed state, when the clamp is loosened, the spring is reset, and further, the chuck and the support rib can be actively reset through the guide shaft and the guide shaft sleeve.
The guide shaft 8 is provided with a protrusion at the end part positioned in the support body 1, so that the spring 11 can be prevented from falling off.
In the present invention, the surface roughness Ra of the through hole on the support body 1 is less than 1.6 μm, and the friction between the support body 1 and the guide shaft 8 is reduced.
In the invention, the guide shaft 8 and the chuck 6 are fixedly connected through a bolt 12.
In the invention, the end cover 4 and the support body 1 are fixedly connected through a bolt 12.
The supporting body 1 and the chuck 6 can adopt an integrated structure or a split structure, preferably, the supporting body 1 and the chuck 6 are in the split structure, and the supporting ribs 7 and the chuck 6 are fixedly connected through bolts 12, so that the chuck is convenient to replace.
In the invention, the support body 1 is a hollow cylindrical structure, the tail end of the support body 1 is provided with an ejector pin hole 13, when the fixture and the target green body are placed on a lathe for processing, an ejector pin of a lathe tailstock is ejected into the ejector pin hole, so that the fixture can be conveniently fixed on the lathe.
In the present invention, the material of the support body 1 is carbon steel, stainless steel, aluminum alloy or titanium alloy, preferably aluminum alloy, and the weight of the fixture can be further reduced by selecting aluminum alloy.
In the invention, the shaft sleeve 3 is a brass shaft sleeve or a graphite shaft sleeve, which is beneficial to reducing the surface roughness of the shaft sleeve.
Two ends of the shaft sleeve 3 are respectively provided with a fixing plate 14, the fixing plates 14 are respectively provided with a central hole, and the pull rod penetrates through the central holes and is tightly pressed through a fixing nut.
The use method of the clamp comprises the following steps:
(1) sleeving the target green body outside the chuck 6, driving the shaft sleeve 3 to move along the horizontal direction by rotating the pull rod 2, enabling the shaft sleeve 3 to be in contact with the inclined surface on the support rib 7, pushing the support rib 7 to move along the radial direction of the support body 1 by the movement of the shaft sleeve 3, further driving the chuck 6 with the arc-shaped clamping surface to be in contact with the inner wall of the target green body and tension, and screwing the locking nut 5;
(2) the mounted fixture and the target green body are mounted on a lathe, the front end of the fixture is clamped by a three-grab chuck, and the tail end of the fixture is tightly jacked by a thimble of a lathe tailstock through a thimble hole 13;
(3) and turning the surface and two end faces of the target green body according to the machining requirement.
(4) After the machining is finished, the fixture and the target green body are taken down simultaneously, the locking nut 5 is loosened, and the target green body is taken out.
The fixture simultaneously clamps through at least three circular arc-shaped clamping surfaces in the circumferential direction, the contact area between the chuck and the target green body is large, the stress on the unit area of the target is small, the ceramic target green body is not easy to crack in the machining process, the machining can be completed by one-time clamping, the clamping force is uniform, the machined size is standard, the sintering process is more uniform, the machining allowance of the sintered target green body is small, the production working time is greatly reduced, the production efficiency is improved, the product yield is improved, and the cost is reduced.
Finally, it should be noted that the above embodiments are only used for illustrating the technical solutions of the present invention and not for limiting the protection scope of the present invention, and although the present invention is described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that modifications or equivalent substitutions can be made on the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention.
Claims (10)
1. A tubular ceramic target green body machining clamp is characterized by comprising a support body, a pull rod, a shaft sleeve, an end cover, a locking nut, a chuck and a support rib, wherein the end cover is arranged at the front end of the support body, a central hole is formed in the end cover, the pull rod is inserted into the support body through the central hole, the locking nut is screwed at the front end of the pull rod, which is positioned outside the support body, and the tail end of the pull rod, which is positioned in the support body, is in threaded connection with the shaft sleeve; the number of the chucks is at least 3 groups, and the chucks of the at least 3 groups are provided with arc-shaped clamping surfaces and are uniformly arranged along the outer circumferential direction of the support body; the support body is provided with rectangular openings, each rectangular opening is embedded with a support rib with an inclined plane, the inclined planes are in contact with the outer circumferential surface of the shaft sleeve, and the support ribs are fixedly connected with the chucks.
2. The tubular ceramic target green body processing clamp of claim 1, wherein the clamp further comprises a guiding mechanism, the guiding mechanism comprises a guiding shaft, a cushion block and a guiding shaft sleeve, a through hole is formed in the support body, the guiding shaft is mounted on the chuck and penetrates through the through hole to enter the support body, and the cushion block and the guiding shaft sleeve matched with the guiding shaft are further sleeved on a portion of the guiding shaft between the support body and the chuck.
3. The tubular ceramic target green body machining fixture of claim 2, wherein a spring is further sleeved on a portion of the guide shaft located in the support body.
4. The green compact machining fixture of claim 2, wherein the surface roughness Ra of the through hole on the support body is less than 1.6 μm.
5. The tubular ceramic target green body machining fixture of claim 1, wherein the guide shaft and the chuck are fixed by bolting.
6. The tubular ceramic target green body machining fixture of claim 1, wherein the support ribs and the chuck are fixed by bolts.
7. The tubular ceramic target green body machining fixture of claim 1, wherein the end of the support body is provided with an thimble hole.
8. The tubular ceramic target green body machining fixture of any one of claims 1 to 7, wherein the support body is made of carbon steel, stainless steel, aluminum alloy or titanium alloy, preferably aluminum alloy.
9. The tubular ceramic target green body machining fixture of any one of claims 1 to 7, wherein the bushing is a brass bushing or a graphite bushing.
10. The tubular ceramic target green body processing fixture as claimed in claim 9, wherein the shaft sleeve has a fixing plate at each end, the fixing plate has a central hole, and the pull rod passes through the central hole and is pressed by the fixing nut.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911425903.3A CN111037769A (en) | 2019-12-31 | 2019-12-31 | Tubular ceramic target green compact machining clamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911425903.3A CN111037769A (en) | 2019-12-31 | 2019-12-31 | Tubular ceramic target green compact machining clamp |
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| Publication Number | Publication Date |
|---|---|
| CN111037769A true CN111037769A (en) | 2020-04-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911425903.3A Pending CN111037769A (en) | 2019-12-31 | 2019-12-31 | Tubular ceramic target green compact machining clamp |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202922254U (en) * | 2012-11-29 | 2013-05-08 | 浙江澳太机械制造有限公司 | Internal expansion mechanism of internal expansion type pipe beveling machine |
| CN203317072U (en) * | 2013-06-25 | 2013-12-04 | 浙江澳太机械制造有限公司 | Tensioning mechanism of internal tensioning pipe bevelling machine |
| CN104002123A (en) * | 2014-05-21 | 2014-08-27 | 浙江金洲管道科技股份有限公司 | Portable steel-plastic tube end protecting ring expanding and closing device |
| CN207447389U (en) * | 2017-11-07 | 2018-06-05 | 深圳市诺泰自动化设备有限公司 | A kind of tension wheel construction |
| CN209737351U (en) * | 2019-03-18 | 2019-12-06 | 深圳市众诚达应用材料科技有限公司 | Tool and machine tool for rotating target workpiece |
| CN211868260U (en) * | 2019-12-31 | 2020-11-06 | 广州市尤特新材料有限公司 | Tubular ceramic target green compact machining clamp |
-
2019
- 2019-12-31 CN CN201911425903.3A patent/CN111037769A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202922254U (en) * | 2012-11-29 | 2013-05-08 | 浙江澳太机械制造有限公司 | Internal expansion mechanism of internal expansion type pipe beveling machine |
| CN203317072U (en) * | 2013-06-25 | 2013-12-04 | 浙江澳太机械制造有限公司 | Tensioning mechanism of internal tensioning pipe bevelling machine |
| CN104002123A (en) * | 2014-05-21 | 2014-08-27 | 浙江金洲管道科技股份有限公司 | Portable steel-plastic tube end protecting ring expanding and closing device |
| CN207447389U (en) * | 2017-11-07 | 2018-06-05 | 深圳市诺泰自动化设备有限公司 | A kind of tension wheel construction |
| CN209737351U (en) * | 2019-03-18 | 2019-12-06 | 深圳市众诚达应用材料科技有限公司 | Tool and machine tool for rotating target workpiece |
| CN211868260U (en) * | 2019-12-31 | 2020-11-06 | 广州市尤特新材料有限公司 | Tubular ceramic target green compact machining clamp |
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