CN111025197A - Test circuit and test method for E-fuse fusing characteristic - Google Patents
Test circuit and test method for E-fuse fusing characteristic Download PDFInfo
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Abstract
The invention provides a test circuit for E-fuse fusing characteristics, which comprises a switch controller, a voltage source, at least one E-fuse to be tested and a switch module, wherein the switch controller is connected with the voltage source; the output end of the switch control module is connected to the switch module; one end of each E-fuse to be tested is connected to a fixed potential end, the other end of each E-fuse to be tested is connected to the voltage source, and each E-fuse to be tested is connected with a switch module and used for controlling the on-off of a test circuit where the E-fuse to be tested is located through the switch module; the test circuit greatly increases the number of testable DUTs, saves the area of a test chip, and adopts the fusing voltage and a non-fusing voltage for testing to judge whether the E-fuse fusing is caused by the test; when the pulse voltage test signal is adopted, the hidden danger of current accumulation caused by E-fuse test by the traditional addressable test structure is avoided, and the area occupation of a peripheral test circuit can be further reduced.
Description
Technical Field
The invention relates to the technical field of chip testing, in particular to a testing circuit and a testing method for E-fuse fusing characteristics.
Background
Fuse is always used for guiding electronic signals in a chip, is a key element for realizing a repair technology, changes the connection relation of an original circuit by utilizing the difference of resistances before and after Fuse fusing, and enables a failed memory cell to be replaced by a Redundancy cell, so that the aims of repairing a failed memory cell array and improving the yield of the chip are fulfilled. Most chip manufacturers have traditionally employed Laser-fuse technology, i.e., a fuse is blown by emitting a Laser of a certain energy and time. However, with the miniaturization of the manufacturing process, the Laser-fuse occupies a large amount of chip area, the size of the Laser-fuse cannot be reduced along with the improvement of the process, and meanwhile, the Laser-fuse needs special Laser and test flows, so that the low productivity is caused, and the use of the Laser-fuse is limited.
The birth of E-fuse originated from a discovery by IBM engineers several years ago: electromigration (EM) can be used to create much smaller fuse structures than older Laser-fuse technologies. The EM fuse may be programmed on-chip, either during the wafer probing phase or in the package. With the on-chip voltage of the I/O circuit (typically 2.5V), a 10 ma dc pulse lasting 200 microseconds is sufficient to program a single fuse.
E-fuse is a two-end structure, one end is a Poly end, the other end is an Active end, a certain fusing voltage is applied to the ends, and whether fusing is carried out or not is judged by measuring the current value of the E-fuse. The existing testing method for the E-fuse is very simple, and a port of the E-fuse is generally directly connected out for testing. Such a test method can measure few DUTs and consumes a large amount of test chip area.
Disclosure of Invention
The invention aims to provide a test circuit and a test method for E-fuse fusing characteristics, which increase the number of testable DUTs and solve the problem of the area of a test chip through the design of the test circuit.
The invention also aims to provide a test circuit and a test method for the E-fuse fusing characteristic, which further reduce the area occupation of a peripheral test circuit and improve the area utilization rate through the design of a simplified test circuit and a pulse test signal of a single-way transmission gate.
The invention also aims to provide a test circuit and a test method for the E-fuse fusing characteristic, which can measure the current before the E-fuse fusing before the pulse is applied by adopting a pulse test signal mode and determine whether the E-fuse fusing is caused by the test.
The invention also aims to provide a test circuit and a test method for the E-fuse fusing characteristic, which adopt a mode of two-switch control and two-time test, can measure the current of the E-fuse under two-time voltage signals, determine whether the E-fuse fusing is normally fused or not, and simultaneously can judge whether the E-fuse fusing is caused by the test or not.
To meet the above objects and other objects and advantages of the present invention, there is provided a test circuit for an E-fuse blowing characteristic, comprising: the device comprises a switch controller, a voltage source, at least one to-be-tested E-fuse and a switch module; the output end of the switch control module is connected to the switch module; one end of each E-fuse to be tested is connected to a fixed potential end, the other end of each E-fuse to be tested is connected to the voltage source, and each E-fuse to be tested is connected with a switch module and used for controlling the on-off of a test circuit where the E-fuse to be tested is located through the switch module.
The potential value of the fixed potential end can be provided by a voltage source or an external circuit.
The voltage source provides a test voltage signal, and a voltage difference is formed between the test voltage signal and a fixed potential end to test the E-fuse.
As a further improvement, the switch module comprises a switch, the voltage source can generate a pulse test signal, the frequency of the pulse test signal is consistent with the switching frequency of the switch control module, the current before the E-fuse is fused before the pulse is applied can be measured, and whether the E-fuse is fused or not is determined to be caused by the test.
As a further improvement, the switch is a transmission gate.
As a further improvement, the switch control module comprises a decoder, and an output signal of the decoder selects the tested E-fuse so as to form a test path.
As a further improvement, the test circuit further comprises a current acquisition unit for acquiring the current flowing through the selected E-fuse to be tested.
As a further improvement, the test circuit further comprises at least (Y +4) bonding pads, the number of the E-fuses to be tested is X is not more than M multiplied by N, the E-fuses to be tested are divided into M blocks, and N E-fuses exist in each block, so that at least two bonding pads are connected to the switch control module and the switch module and used for providing a voltage source; at least two bonding pads are connected to two ends of all E-fuses to be tested; at least Y-m + n pads connected to the switch control module for providing address signals, when log2M、log2When N is an integer, then m is log2M，n＝log2N, when log2M、log2When N is not an integer, then m is compared log2M is an integer of which the difference is less than 1, and n is taken as a ratio log2N is large and the difference is an integer less than 1.
In order to meet the above objects and other objects and advantages of the present invention, the present invention further provides a method for testing an E-fuse fusing characteristic, comprising the steps of:
step 1: applying voltage Vdd to one end of all E-fuses by the fixed potential end, and selecting the E-fuses to be tested by the switch control module;
step 2: a voltage source applies a pulse test signal to the other end of the E-fuse, when the pulse test signal outputs a high potential, un-fusing voltage is formed at two ends of the E-fuse, a current value I1 is measured at the voltage source, when the pulse test signal outputs a low potential, fusing voltage is formed at two ends of the E-fuse, and a current value I2 is measured at the voltage source;
and step 3: judging whether the E-fuse is normally fused or not according to current values I1 and I2;
and 4, step 4: and (3) selecting the next E-fuse to be tested through the switch control module, and repeating the step (2) and the step (3) until the judgment of all the E-fuses to be tested is completed.
As a further improvement, the switch module comprises two switches, namely a switch a and a switch B; the two voltage sources are respectively a voltage source A and a voltage source B, the voltage source A is used for providing a fusing test voltage, and the voltage source B is used for providing an un-fusing test voltage; each E-fuse to be tested is connected with a power supply A through a respective switch A, and each E-fuse to be tested is connected with a power supply B through a respective switch B. In the test process, only one switch of the E-fuse to be tested is kept on.
With the test circuit, the method for testing the E-fuse fusing characteristic comprises the following specific steps:
step 1: applying voltage Vdd to one end of all E-fuses by the fixed potential end, and selecting the E-fuses to be tested by the switch control module;
step 2: the switch control module selects the switch A to be disconnected and the switch B to be connected, the voltage source B applies a voltage signal Vdd1 to the other end of the E-fuse, the two ends of the E-fuse form unmelted voltage, and the current value I1 is measured at the voltage source B;
and step 3: the switch control module selects the switch A to be connected and the switch B to be disconnected, the voltage source A applies a voltage signal of Vdd2 to the other end of the E-fuse, unmelted voltage is formed at two ends of the E-fuse, and current I2 is measured at the voltage source A;
and 4, step 4: judging whether the E-fuse is normally fused or not according to current values I1 and I2;
and 5: and (4) selecting the next E-fuse to be tested through the switch control module, and repeating the steps 2, 3 and 4 until the judgment of all the E-fuses to be tested is completed.
The invention also provides a test system which comprises the test circuit for the E-fuse fusing characteristic.
The invention has the advantages that the invention provides the test circuit and the test method for the E-fuse fusing characteristic, the number of DUTs which can be tested is greatly increased, the area of a test chip is saved, and meanwhile, the fusing voltage and the non-fusing voltage are adopted for testing, so that whether the E-fuse fusing is caused by the test can be judged. When the pulse voltage test signal is adopted, the hidden danger of current accumulation caused by E-fuse test by the traditional addressable test structure is avoided, meanwhile, the area occupation of a peripheral test circuit can be further reduced, and the area utilization rate is improved.
Drawings
FIG. 1 is a schematic diagram of an E-fuse blowing characteristic testing circuit according to a preferred embodiment of the present invention;
FIG. 2 is a schematic diagram of an E-fuse blowing characteristic testing circuit according to another preferred embodiment of the present invention;
fig. 3 schematic PAD assignment under 1 x 24PAD conditions.
Detailed Description
The following description is presented to disclose the invention so as to enable any person skilled in the art to practice the invention. The preferred embodiments in the following description are given by way of example only, and other obvious variations will occur to those skilled in the art. The basic principles of the invention, as defined in the following description, may be applied to other embodiments, variations, modifications, equivalents, and other technical solutions without departing from the spirit and scope of the invention.
It will be understood by those skilled in the art that in the present disclosure, the terms "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in an orientation or positional relationship indicated in the drawings for ease of description and simplicity of description, and do not indicate or imply that the referenced devices or components must be constructed and operated in a particular orientation and thus are not to be considered limiting.
Referring to FIG. 1 of the drawings accompanying the present specification, a circuit and method for testing an E-fuse characteristic according to a preferred embodiment of the present invention is illustrated. The E-fuse fusing characteristic test circuit comprises a switch control module, a voltage source, at least one E-fuse to be tested and a switch module; the output end of the switch control module is connected to the switch module; one end of each E-fuse to be tested is connected to a 6V fixed potential end, the other end of each E-fuse to be tested is connected to the voltage source, each E-fuse to be tested is connected with a switch module, and each switch module is connected to the voltage source and controls the on-off of a test circuit where the E-fuse to be tested is located.
In some embodiments, the switch module includes a switch that is a transmission gate. The voltage source can generate a 0-3V pulse test signal, the frequency of the pulse test signal is consistent with the conversion frequency of the switch control module, and the current before the E-fuse is fused before the pulse is applied can be measured, so that whether the E-fuse is fused or not can be determined.
In some embodiments, the switch control module comprises a decoder, the switch control module selects a switch connected with a specified E-fuse to be tested according to a signal of the decoder to be communicated, meanwhile, the voltage source provides a pulse voltage signal, two voltage signals with different heights are provided to form un-fusing voltage and fusing voltage at two ends of the E-fuse respectively, current information of the voltage source is measured at the voltage source respectively, and the fusing condition of the E-fuse is judged according to the measured current value.
In some implementations, the number of the decoders is at least one, when the number of the decoders is one, the designated E-fuse to be tested can be directly selected, and when the number of the decoders is multiple, the local selection can be performed on the E-fuse region to be tested, and then the corresponding designated E-fuse to be tested is selected.
In some embodiments, an E-fuse blowing characteristic test circuit further includes a pad. As shown in fig. 3, in this embodiment, the switch control module is a decoder, and the switch module is a transmission gate. Under the conditions of 1 × 24 PADs, 240E-fuse DUTs and two decoders, 20 PADs are used in total, and the specific allocation is as follows:
2 VDD pads and 2 GND pads are connected to the decoder and the transmission gate, and a power supply supplies power to the VDD pads and the GND pads through the group of pads; in some embodiments, only 1 VDD pad, 1 GND pad may be connected to the switch control module and the switch module;
4S end bonding pads are connected to the Poly end of the E-fuse in common, and 3D end bonding pads select the Active end of the E-fuse through a transmission gate; in some embodiments, only 2 pads are connected to the E-fuse to be tested, wherein 1S terminal pad is connected to the Poly terminal of the E-fuse in common, and 1D terminal pad is connected to the Active terminal of the E-fuse through a transmission gate;
the 240E-fuse DUTs are divided into 20 blocks, each block has 12 DUTs, 5 pads in total from Draw 1 to Draw 5 are connected with the address of a decoder for controlling the selection block in the switch control module, and 4 pads in total from Dcol1 to Dcol4 are connected with the address of a decoder for controlling the selection DUT in the switch control module.
With the test circuit, the method for testing the E-fuse fusing characteristic comprises the following specific steps:
step 1: a fixed voltage source applies a voltage Vdd of 6V to one end of all the E-fuses, and the switch control module selects the E-fuses to be tested;
step 2: a voltage source applies a pulse test signal to the other end of the E-fuse through a switch module, when the pulse test signal outputs a high-level signal, the voltage value of 3V is applied by the voltage source, an unblown voltage is formed at two ends of the E-fuse, and a current value I1 is measured at the voltage source; when the pulse test signal outputs a low level, the voltage value at the moment is 0V, fusing voltage is formed at two ends of the E-fuse, and a current value I2 is measured at a voltage source;
and step 3: whether the E-fuse is normally fused is judged according to the current values I1 and I2, and the specific judgment is as follows:
if I1 ≈ 1E-8A and I2 ≈ 6mA, the E-fuse is normally fused in the test;
if I1 ≈ 6mA, I2 ≈ 6mA, indicating that the E-fuse has been blown before the test;
if I1 ≈ 1E-8A, I2 ≈ 1E-8A, it indicates that the E-fuse is not fused in the test.
And 4, step 4: and (3) selecting the next E-fuse to be tested through the switch control module, and repeating the step (2) and the step (3) until the judgment of all the E-fuses to be tested is completed.
Referring to FIG. 2 of the drawings accompanying the present specification, a circuit and method for testing an E-fuse blowing characteristic according to another preferred embodiment of the present invention is illustrated. The test circuit of the embodiment comprises a switch control module, a voltage source, at least one to-be-tested E-fuse and a switch module; wherein the output end of the switch control module is connected to the switch module; one end of each E-fuse to be tested is connected to a fixed potential end, the other end of each E-fuse to be tested is connected to the voltage source, each E-fuse to be tested is connected with a switch module, and each switch module is connected to the voltage source and controls the on-off of a test circuit where the E-fuse to be tested is located. The switch module comprises at least two switches which are set as a switch A and a switch B; the two voltage sources are respectively a voltage source A and a voltage source B, the voltage source A is used for providing a fusing test voltage, and the voltage source B is used for providing an un-fusing test voltage; each E-fuse to be tested is connected with a power supply A through a respective switch A, and each E-fuse to be tested is connected with a power supply B through a respective switch B. In the test process, only one switch of the E-fuse to be tested is kept on.
With the test circuit, the method for testing the E-fuse fusing characteristic comprises the following specific steps:
step 1: the fixed potential end applies voltage Vdd to one end of all E-fuses to be 6V, and the switch control module selects the E-fuses to be tested;
step 2: the switch control module selects the switch A to be disconnected and the switch B to be connected, the voltage source B applies a 3V voltage signal to the other end of the E-fuse, unmelted voltage is formed at the two ends of the E-fuse, and a current value I1 is measured at the voltage source B;
and step 3: the switch control module selects the switch A to be connected and the switch B to be disconnected, the voltage source A applies a voltage signal of 0V to the other end of the E-fuse, unmelted voltage is formed at two ends of the E-fuse, and current I2 is measured at the voltage source A;
and 4, step 4: whether the E-fuse is normally fused is judged according to the current values I1 and I2, and the specific judgment is as follows:
if I1 ≈ 1E-8A and I2 ≈ 6mA, the E-fuse is normally fused in the test;
if I1 ≈ 6mA, I2 ≈ 6mA, indicating that the E-fuse has been blown before the test;
if I1 ≈ 1E-8A, I2 ≈ 1E-8A, it indicates that the E-fuse is not fused in the test.
And 5: and (4) selecting the next E-fuse to be tested through the switch control module, and repeating the steps 2, 3 and 4 until the judgment of all the E-fuses to be tested is completed.
The test circuit and the test method provided by the invention greatly increase the number of the testable DUTs, save the area of the test chip, and simultaneously adopt the fusing voltage and a non-fusing voltage for testing to judge whether the E-fuse fusing is caused by the test. When the pulse voltage test signal is adopted, the hidden danger of current accumulation caused by E-fuse test by the traditional addressable test structure is avoided, meanwhile, the area occupation of a peripheral test circuit can be further reduced, and the area utilization rate is improved.
It will be appreciated by persons skilled in the art that the embodiments of the invention described above and shown in the drawings are given by way of example only and are not limiting of the invention. The objects of the invention have been fully and effectively accomplished. The functional and structural principles of the present invention have been shown and described in the examples, and any variations or modifications of the embodiments of the present invention may be made without departing from the principles.
Claims (10)
1. The test circuit for the E-fuse fusing characteristic is characterized by comprising a switch control module, a voltage source, at least one E-fuse to be tested and a switch module; the output end of the switch control module is connected to the switch module; one end of each E-fuse to be tested is connected to a fixed potential end, the other end of each E-fuse to be tested is connected to the voltage source, and each E-fuse to be tested is connected with a switch module and used for controlling the on-off of a test circuit where the E-fuse to be tested is located through the switch module.
2. An E-fuse blowing characteristic testing circuit as claimed in claim 1, wherein said switching module includes a switch, said voltage source is capable of generating a pulsed test signal, and the frequency of the pulsed test signal is consistent with the switching frequency of the switching control module.
3. A method for testing an E-fuse blowing characteristic, based on the test circuit of claim 2, the method comprising:
step 1: applying voltage Vdd to one ends of all E-fuses by the fixed potential end, and selecting the E-fuses to be tested through the switch control module;
step 2: a voltage source applies a pulse test signal to the other end of the E-fuse, when the pulse test signal outputs a high potential, un-fusing voltage is formed at two ends of the E-fuse, a current value I1 is measured at the voltage source, when the pulse test signal outputs a low potential, fusing voltage is formed at two ends of the E-fuse, and a current value I2 is measured at the voltage source;
and step 3: judging whether the E-fuse is normally fused or not according to current values I1 and I2;
and 4, step 4: and (3) selecting the next E-fuse to be tested through the switch control module, and repeating the step (2) and the step (3) until the judgment of all the E-fuses to be tested is completed.
4. An E-fuse blowing characteristic testing circuit as claimed in claim 1, wherein said switch module comprises two switches, set as switch A and switch B; the two voltage sources are respectively a voltage source A and a voltage source B, the voltage source A is used for providing a fusing test voltage, and the voltage source B is used for providing an un-fusing test voltage; each E-fuse to be tested is connected with a power supply A through a respective switch A, and each E-fuse to be tested is connected with a power supply B through a respective switch B.
5. A method for testing E-fuse fusing characteristics, which is based on the test circuit of claim 4, and is characterized in that the method comprises the following steps:
step 1: applying voltage Vdd to one ends of all E-fuses by the fixed potential end, and selecting the E-fuses to be tested by the switch control module;
step 2: the switch control module selects the switch A to be disconnected and the switch B to be connected, the voltage source B applies a voltage signal to the other end of the E-fuse, the two ends of the E-fuse form an unblown voltage, and the current value I1 is measured at the voltage source B;
and step 3: the switch control module selects the switch A to be connected and the switch B to be disconnected, the voltage source A applies a voltage signal to the other end of the E-fuse, fusing voltage is formed at the two ends of the E-fuse, and current I2 is measured at the voltage source A;
and 4, step 4: judging whether the E-fuse is normally fused or not according to current values I1 and I2;
and 5: and (4) selecting the next E-fuse to be tested through the switch control module, and repeating the steps 2, 3 and 4 until the judgment of all the E-fuses to be tested is completed.
6. An E-fuse blowing characteristic test circuit as claimed in claim 2 or 4, wherein the switch is a transmission gate.
7. An E-fuse blowing characteristic testing circuit as claimed in claim 1, wherein the switch control module includes a decoder, and the decoder output signal selects the tested E-fuse to form a testing path.
8. An E-fuse blowing characteristic testing circuit according to claim 1, further comprising at least (Y +4) pads; the number of the E-fuses to be tested is that X is not more than M multiplied by N, the E-fuses to be tested are divided into M blocks, and N E-fuses exist in each block, so that at least two bonding pads are connected to the switch control module and the switch module and used for providing a voltage source; at least two bonding pads are connected to two ends of all E-fuses to be tested; at least Y is m + n (m is log)2M，n＝log2N) pads connected to the switch control module for providing address signals, m being a ratio log when m and N are not integers2M is an integer of which the difference is less than 1, and n is taken as a ratio log2N is large and the difference is an integer less than 1.
9. The E-fuse fusing characteristic test circuit of claim 1, further comprising a current collection unit for collecting the current flowing through the selected E-fuse to be tested.
10. A test system comprising an E-fuse fusing characteristic test circuit as claimed in claim 1, 2, 4, 7 or 8.
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| CN113657071A (en) * | 2021-08-31 | 2021-11-16 | 杭州广立微电子股份有限公司 | Method for automatically correcting leakage path of MOS device |
| CN117590296A (en) * | 2024-01-11 | 2024-02-23 | 杭州广立微电子股份有限公司 | Test circuit, method and system for E-fuse fusing characteristics |
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