CN111006800A - Flexible pressure sensor and preparation method thereof - Google Patents
Flexible pressure sensor and preparation method thereof Download PDFInfo
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- CN111006800A CN111006800A CN201911338688.3A CN201911338688A CN111006800A CN 111006800 A CN111006800 A CN 111006800A CN 201911338688 A CN201911338688 A CN 201911338688A CN 111006800 A CN111006800 A CN 111006800A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00349—Creating layers of material on a substrate
- B81C1/00373—Selective deposition, e.g. printing or microcontact printing
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0264—Pressure sensors
Abstract
The method comprises the steps of depositing graphene oxide dispersion liquid on a flexible substrate by adopting an electronic injection method, and carrying out silane modification on the graphene oxide deposited on the flexible substrate to obtain the modified reduced graphene oxide in the modified reduced graphene oxide layer in a sheet shape, a wrinkled shape and/or a spherical shape. The flexible pressure sensor has the advantages of wide range, low density, high mechanical stability and the like.
Description
Technical Field
The invention relates to the technical field of flexible equipment, in particular to a flexible pressure sensor and a preparation method thereof.
Background
The wearable sensor can realize continuous and noninvasive detection of various indexes of a human body, and plays an increasingly important role in modern medical detection. For example, flexible pressure sensors may be incorporated into clothing to monitor physiological signals such as heart rate, pulse, etc., or pressure sensors may be incorporated into shoes to monitor the user's plantar pressure, gait, and assess locomotor status and injury.
In recent years, a two-dimensional nano carbon material such as graphene has been studied more and more in the field of pressure sensors. Graphene can be used as an active material in a pressure sensor, and has the advantages of high conductivity, good assembly performance, structural designability and the like compared with other common active materials such as metal nanowires, carbon nanotubes and the like. The graphene is compounded with other porous elastic matrixes with high mechanical stability, so that the method is an effective method for preparing the pressure sensor with low density and high stability. However, although the mechanical stability, flexibility and elasticity of the pressure sensor can be effectively improved by the conventional method for compounding graphene and an elastic matrix, such as an immersion method, the sensitivity of the obtained sensor is often low due to the fact that the micro-nano structure in the material is relatively simple and the targeted design is lacked.
The sensitivity of the sensor can be greatly improved by designing fine micro-nano structures in the sensing material, such as micro-groove type, hemispherical type, pyramid type, interlocking type and other structures. On one hand, the preparation of the fine micro-nano structure usually requires more complicated procedures and higher cost, and is not suitable for large-scale manufacturing; on the other hand, the micro-nano structure design method based on the template method is difficult to realize in the porous structure of the low-density matrix, and the obtained sensing material is often high in density. Therefore, the method for regulating and controlling the internal micro-nano structure of the porous material by using a simple and effective method has very important significance for the preparation and application expansion of the flexible pressure sensor with high sensitivity, large range, low density and high mechanical stability, and is also a challenge at present.
Disclosure of Invention
In view of this, the invention provides a flexible pressure sensor and a preparation method thereof, and the preparation method has a simple process, and can enable the flexible pressure sensor to have the advantages of wide range, low density, high mechanical stability and the like.
The invention provides a preparation method of a flexible pressure sensor, which comprises the following steps:
providing a graphene oxide dispersion liquid and a flexible substrate;
depositing the graphene oxide dispersion liquid on the surface of the flexible substrate by adopting an electrospray method, and forming a graphene oxide layer on the surface of the flexible substrate;
carrying out silane modification on the graphene oxide layer deposited on the flexible substrate to obtain a modified reduced graphene oxide layer;
connecting a lead to two ends of the modified reduced graphene oxide layer on the flexible substrate.
Further, the concentration of the graphene oxide dispersion liquid is 3-5 mg/ml.
Further, in the electrospray process, the morphology of the graphene oxide in the graphene oxide layer is controlled by controlling an additive in the graphene oxide dispersion solution solvent, the temperature, the humidity, the electric field intensity and the receiving distance during electrospray.
Further, the graphene oxide in the graphene oxide layer is in a sheet shape, a corrugated shape and/or a spherical shape.
Further, depositing the graphene oxide dispersion liquid on the surface of the flexible substrate by adopting the electro-spraying method, wherein the electro-spraying voltage is 10-30KV, the flow rate is 1-5mL/h, and the receiving distance is 5-15 cm.
Further, the flexible substrate is a sponge.
Further, polyvinylpyrrolidone is added to the graphene oxide dispersion liquid so that the graphene oxide deposited in the graphene oxide layer on the surface of the flexible substrate is spheroidized after the electrospray step.
Further, silane modifying the graphene oxide layer deposited on the flexible substrate includes:
simultaneously placing the flexible substrate deposited with the graphene oxide layer and a container containing silane into a closed container;
heating the sealed container to enable the silane to react with the graphene oxide layer after being volatilized;
and vacuumizing the closed container to remove the unreacted silane.
The invention also provides a flexible pressure sensor which is prepared by the preparation method of the flexible pressure sensor.
The invention also provides a flexible pressure sensor which comprises a flexible substrate, a modified reduced graphene oxide layer arranged on the surface of the flexible substrate and wires connected with two ends of the modified reduced graphene oxide layer, wherein the modified reduced graphene oxide in the modified reduced graphene oxide layer is flaky, wrinkled and/or spherical.
In summary, the invention firstly utilizes an electrospray method to spray the graphene oxide dispersion liquid on the surface of the flexible substrate, so that the shape of the graphene oxide deposited on the flexible substrate can be controlled relatively simply by controlling environmental factors during electrospray, and the modified reduced graphene oxide in the modified reduced graphene oxide layer can be flaky, wrinkled and/or spherical after silane modification, so that the flexible pressure sensor of the invention has the advantages of high sensitivity and large range, and can simplify the manufacturing process, save the cost and be beneficial to large-scale manufacturing. Through silane modified graphene oxide, the mechanical property of the modified reduced graphene oxide layer can be improved while the graphene oxide is reduced.
The foregoing description is only an overview of the technical solutions of the present invention, and in order to make the technical means of the present invention more clearly understood, the present invention may be implemented in accordance with the content of the description, and in order to make the above and other objects, features, and advantages of the present invention more clearly understood, the following preferred embodiments are described in detail with reference to the accompanying drawings.
Drawings
Fig. 1 is a schematic flow chart of a method for manufacturing a flexible pressure sensor according to an embodiment of the present invention.
Fig. 2 is a schematic cross-sectional view of a flexible pressure sensor according to a first embodiment of the present invention.
Fig. 3 is a schematic cross-sectional view of a flexible pressure sensor according to a second embodiment of the present invention.
Detailed Description
To further explain the technical means and effects of the present invention adopted to achieve the predetermined objects, the following detailed description is given with reference to the accompanying drawings and preferred embodiments.
The invention provides a flexible pressure sensor and a preparation method thereof, wherein the preparation method has a simple process, and the flexible pressure sensor has the advantages of wide range, low density, high mechanical stability and the like.
Fig. 1 is a schematic flow chart of a method for manufacturing a flexible pressure sensor according to an embodiment of the present invention. As shown in fig. 1, a method for manufacturing a flexible pressure sensor according to an embodiment of the present invention includes the following steps:
s1: providing a graphene oxide dispersion liquid and a flexible substrate 10;
s2: depositing the graphene oxide dispersion liquid on the surface of the flexible substrate 10 by adopting an electrospray method, and forming a graphene oxide layer on the flexible substrate 10;
s3: performing silane modification on the graphene oxide layer deposited on the flexible substrate 10 to obtain a modified reduced graphene oxide layer 20;
s4: wires 30 are connected to both ends of the modified reduced graphene oxide layer 20 on the flexible substrate 10 to form a flexible pressure sensor.
In the embodiment, the graphene oxide dispersion liquid is deposited on the surface of the flexible substrate 10 by using an electrospray method, and when the graphene oxide dispersion liquid is deposited on the surface of the flexible substrate 10 by using the electrospray method, because the shape of the graphene oxide in the graphene oxide dispersion liquid deposited on the flexible substrate 10 is related to the environmental factors during electrospray, the shape of the graphene oxide in the graphene oxide layer deposited on the flexible substrate 10 can be controlled according to the requirements by controlling the environmental factors during electrospray, and after the silane modification is completed, the modified reduced graphene oxide deposited on the flexible substrate 10 can be stacked in various forms such as a sheet form, a wrinkled form or a spherical form to form the modified reduced graphene oxide microstructure.
When the flexible pressure sensor is subjected to smaller pressure, the modified reduced graphene oxide with a smaller sheet or fold degree deforms, so that the resistance of the whole modified reduced graphene oxide layer 20 changes to respond to the pressure, and the sensitivity of the pressure sensor can be improved; when the flexible pressure sensor is subjected to higher pressure, the modified reduced graphene oxide with larger wrinkle degree or spherical shape begins to deform; as the pressure increases, the entire modified reduced graphene oxide layer 20 deforms, so that the resistance of the entire modified reduced graphene oxide layer 20 changes to respond to a larger pressure, which can increase the range of the pressure sensor. Therefore, the preparation method is simple in process, and the flexible pressure sensor has the advantages of being wide in range, low in density, high in mechanical stability and the like.
Further, in the present embodiment, the flexible substrate 20 may be a sponge, and the sponge substrate can increase the flexibility of the pressure sensor on the one hand and reduce the weight of the pressure sensor on the other hand through the porous structure of the sponge. The modified reduced graphene oxide layer 20 is formed on the sponge substrate by adopting an electric spraying method, so that the modified reduced graphene oxide layer is formed on the surface of the sponge substrate, the modified reduced graphene oxide can enter a small amount of surface gaps of the sponge substrate, which are opposite to the modified reduced graphene oxide layer, and the measuring range of the pressure sensor can be further increased. Compared with an impregnation method, the forming method has the advantages that the modified reduced graphene oxide in the modified reduced graphene oxide layer 20 cannot enter the interior of the sponge substrate too much, and the modified reduced graphene oxide cannot be coated on the framework in the sponge substrate. In this embodiment, the sponge substrate may be melamine sponge or polyvinyl alcohol sponge, etc.
In the S1 step, graphene oxide is generally prepared by a Hummer method or a modified Hummer method. In this embodiment, an improved Hummer method is used to prepare graphene oxide, and the specific process is as follows: in the first pre-oxidation stage, 16.8gK is added2S2O8And 16.8g P2O5Dispersing in 80mL of concentrated H at 60 deg.C2SO4Then 20g of graphite powder was slowly added and reacted at 80 ℃ for 5 hours. After cooling to room temperature, it was slowly diluted with deionized water and allowed to stand for delamination. After the supernatant was discarded, the filtrate was filtered through a Teflon filter with a pore size of 0.22 μm, and the upper filter cake was washed with 3L of deionized water and then dried naturally. In the second oxidation stage, the pre-oxidation product was dispersed in 460mL of concentrated H2SO4Neutralizing and stirring continuously in ice salt bath to reduce the temperature to 0-3 ℃. 60g of KMnO were slowly added with stirring4And always keeping the temperature below 5 ℃. The mixed reaction solution was then heated to 35 ℃ and stirred for 2h, diluted with 1.5L deionized water, warmed to 85 ℃ and stirred for 2.5 h. 1.5L of deionized water and 500mL of H were added sequentially2O2The reaction was terminated and the reaction solution was allowed to cool naturally to room temperature. And standing the product for two days for layering, removing supernatant, centrifugally separating bottom precipitates, and washing the precipitates to the pH value of 6 by using 1M HCl solution and deionized water in sequence to obtain the graphene oxide dispersion liquid with the concentration of 3-5 mg/ml.
In the present invention, the solvent of the graphene oxide dispersion is related to the solvent resistance of the flexible substrate 10, and when the flexible substrate 10 is melamine sponge, the solvent of the graphene oxide dispersion may be water because it is relatively stable. When the flexible substrate 10 is a polyvinyl alcohol sponge, the graphene oxide dispersion liquid may be further prepared by dispersing graphene oxide in an organic solvent such as N, N-dimethylformamide and ethanol by a solvent exchange method, so as to prevent the solvent of the graphene oxide dispersion liquid from causing dissolution or swelling of the sponge substrate and damaging the sponge structure.
In step S2, more specifically, the graphene oxide dispersion is placed in a syringe, a metal needle having an appropriate outer diameter is selected, and the flow rate is controlled by a microsyringe. The flat panel receiver is placed with the flexible substrate 10 cut to size. Electrospray was carried out at a voltage of 10-30kV, a flow rate of 1-5mL/h and a receiving distance of 5-15 cm. In order to ensure that the graphene oxide dispersion liquid is uniformly sprayed on the surface of the sponge, the spray head is controlled to reciprocate within the range of 5-10cm by using a motion control system of the spray head. The thickness of the graphene oxide layer on the flexible substrate 10 is controlled by controlling the initial concentration, flow rate and electrospray duration of the graphene oxide dispersion. And then controlling parameters such as an additive in the graphene oxide dispersion solution solvent, voltage, flow rate, temperature, humidity, electric field intensity and receiving distance during spraying to regulate and control the appearance of the graphene oxide in the obtained graphene oxide layer. The obtained graphene oxide/sponge composite material is dried in vacuum for 24 hours at 40 ℃.
In this embodiment, when the ejection speed of the graphene oxide dispersion liquid is relatively stable and the volatilization speed of the solvent is relatively slow, the graphene oxide can be substantially aggregated in a sheet shape (as shown in fig. 2). Under the combined action of high temperature and low humidity, the solvent between two adjacent graphene oxide sheets can be quickly volatilized in each atomized small liquid droplet in the spraying process of the atomized small liquid droplets of the graphene oxide dispersion liquid, and when the solvent is quickly volatilized, capillary force can be generated on the two adjacent graphene oxide sheets, and the capillary force promotes the folding of the sheet graphene oxide.
In a low-temperature and low-humidity environment, the solvent cannot be completely and rapidly volatilized due to low temperature, the volatilization of the liquid drops is relatively fast, the flaky graphene oxide can be wrinkled, and the graphene oxide with large liquid drops is flaky due to relatively slow volatilization of the solvent. At this time, the graphene oxide layer is stacked by a plurality of sheet-like and corrugated graphene oxide interlayers.
In another embodiment, the polyvinylpyrrolidone is added to the graphene oxide aqueous dispersion, and during the spraying process, since the polyvinylpyrrolidone dilute dispersion cannot be filamentized but only forms microspheres under an electric field, the sheet-shaped or wrinkled graphene oxide can be spheroidized (see fig. 3).
Through the control mode, the graphene oxide layer can be formed by stacking a plurality of graphene oxide layers in one or at least two of sheet shape, fold shape and spherical shape, so as to further change the sensitivity and the measuring range of the flexible pressure sensor.
In step S3, the method includes the steps of:
simultaneously placing the flexible substrate 10 sprayed with the graphene oxide layer and a container containing silane into a closed container;
heating the sealed container to enable silane to react with the graphene oxide layer after being volatilized;
and vacuumizing the closed container to remove unreacted silane to obtain the modified reduced graphene oxide film.
In the above step, the silane may be methyltriethoxysilane, 3-aminopropyltriethoxysilane, N-propyltriethoxysilane, or the like. The dosage ratio of the silane to the graphene oxide film is 2-5 mu L: 1 mg. The heating temperature is 160-180 ℃, and the reaction time is 3 h.
The above process is illustrated below with specific examples:
(1) graphene oxide N, N-dimethylformamide dispersion liquid with a concentration of 5mg/mL was taken and placed in a 10mL syringe equipped with a metal needle having an outer diameter of 0.7mm, and the flow rate was controlled with a microsyringe. Selecting melamine sponge as a flexible substrate, placing the melamine sponge on a flat receiver, and cutting the melamine sponge into 3cm by 2cm by 0.5cm in size. The electrospray was carried out at 20kV voltage, flow rate of 1mL/h and receiving distance of 5cm, with the temperature in the chamber controlled at 100 ℃ by an electric heating wire and the relative humidity controlled at 20% by dry air. In the electrospray process, graphene oxide dispersion liquid is atomized into small droplets at high pressure, a solvent in the droplets is quickly volatilized under the combined action of high temperature and low humidity, and when the solvent clamped between two different graphene oxide sheets is volatilized, capillary force is generated on the graphene oxide sheets to promote the graphene oxide sheets to be wrinkled. In order to ensure that the graphene oxide dispersion liquid is uniformly sprayed on the surface of the sponge, the spray head is controlled to reciprocate within the range of 8cm by using a motion control system of the spray head, and the duration of electric spraying is 12 h. The obtained sponge substrate and graphene oxide layer are dried in vacuum at 40 ℃ for 24h and then placed in a dryer, a culture dish containing 200 mu L of methyltriethoxysilane is placed in the dryer, and the obtained product is sealed and reacted at 180 ℃ for 3 h. And after the reaction is finished, taking out the modified reduced graphene oxide layer/sponge substrate, and vacuumizing for three times. And then leading out the two ends of the modified reduced graphene oxide layer by using conductive silver paste and a copper wire respectively, and connecting the two ends of the modified reduced graphene oxide layer with current or voltage measuring equipment to obtain the flexible pressure sensor.
(2) Placing 5mg/mL graphene oxide ethanol dispersion in a 10mL syringe, preparing a metal needle with an outer diameter of 0.7mm, controlling the flow rate by using a microsyringe, placing polyvinyl alcohol sponge on a flat receiver, and cutting the size to 3cm by 2cm by 0.5 cm. The electrospray was carried out at a voltage of 20kV, a flow rate of 1mL/h and a receiving distance of 5cm, with the temperature and humidity set at 50 ℃ and 30%, respectively. Due to the fact that the temperature is low, the solvent cannot be completely and rapidly volatilized, the graphene oxide sheet is wrinkled due to the fact that the liquid drop is small and the volatilization is fast, and the flaky graphene oxide is formed due to the fact that the liquid drop is large and the volatilization of the solvent is slow. In order to ensure that the graphene oxide is uniformly collected, the movement control system of the spray nozzle is utilized to control the spray nozzle to reciprocate within the range of 8cm, and the processing duration is 12 h. The obtained graphene oxide layer and the sponge substrate are dried in vacuum at 40 ℃ for 24h and then placed in a dryer, a culture dish containing 200 mu L of N-propyl triethoxysilane is placed in the dryer, and the graphene oxide layer and the sponge substrate react at 180 ℃ for 3h after being sealed. And after the reaction is finished, taking out the modified reduced graphene oxide layer/sponge substrate, and carrying out vacuum treatment for three times. And then leading out the two ends of the modified reduced graphene oxide layer by using conductive silver paste and a copper wire respectively, and connecting the two ends of the modified reduced graphene oxide layer with current or voltage measuring equipment to obtain the flexible pressure sensor.
(3) Graphene oxide aqueous dispersion (3% polyvinylpyrrolidone added to improve processability) was taken at a concentration of 3mg/mL and placed in a 10mL syringe equipped with a metal needle having an outer diameter of 0.7mm, the flow rate was controlled with a microsyringe, and melamine sponge was placed on a plate receiver and cut to a size of 3cm by 2cm by 0.5 cm. The electrospray was carried out at a voltage of 30kV, a flow rate of 1mL/h and a receiving distance of 5cm, with the temperature and humidity set at 100 ℃ and 10%, respectively. In the process of electrospray, graphene oxide dispersion liquid is atomized into small droplets at high pressure, a solvent in the droplets is quickly volatilized under the combined action of high temperature and low humidity, and when the solvent clamped between two different graphene oxide sheets is volatilized, capillary force is generated on the graphene oxide sheets to promote the graphene oxide sheets to wrinkle. Meanwhile, the polyvinylpyrrolidone dilute dispersion liquid can not be filamentized under an electric field and only forms microspheres, so that the obtained graphene oxide layer is of a microspherical graphene oxide composite structure with folds. In order to ensure that the graphene oxide is uniformly collected, the movement control system of the spray nozzle is utilized to control the spray nozzle to reciprocate within the range of 8cm, and the processing duration is 12 h. The obtained graphene oxide layer and the sponge substrate are dried in vacuum at 40 ℃ for 24h and then placed in a dryer, a culture dish containing 200 mu L of 3-aminopropyltriethoxysilane is placed in the dryer, and the graphene oxide layer and the sponge substrate react at 180 ℃ for 3h after being sealed. And after the reaction is finished, taking out the modified reduced graphene oxide layer and the sponge substrate, and carrying out vacuum treatment for three times. And then leading out the two ends of the modified reduced graphene oxide layer 20 by using conductive silver paste and copper wires respectively, and connecting the two ends with current or voltage measuring equipment to obtain the flexible pressure sensor.
Fig. 2 is a schematic cross-sectional structure diagram of a flexible pressure sensor according to a first embodiment of the present invention, and fig. 3 is a schematic cross-sectional structure diagram of a flexible pressure sensor according to a second embodiment of the present invention. As shown in fig. 2 and 3, the present invention also provides a flexible pressure sensor, which is prepared by the above method for preparing a flexible pressure sensor.
The flexible pressure sensor comprises a flexible substrate 10, a modified reduced graphene oxide layer 20 arranged on the surface of the flexible substrate 10, and leads 30 at two ends of the modified reduced graphene oxide layer 20, wherein the modified reduced graphene oxide in the modified reduced graphene oxide layer 20 is sheet-shaped (as shown in fig. 2), wrinkled and/or approximately spherical (as shown in fig. 3).
The flexible pressure sensor can be used for detecting the real-time pulse of a human body, and detecting the micro deformation such as the vibration of the larynx, the bending of the finger and the like.
Although the present invention has been described with reference to a preferred embodiment, it should be understood that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (10)
1. A preparation method of a flexible pressure sensor is characterized by comprising the following steps: the method comprises the following steps:
providing a graphene oxide dispersion liquid and a flexible substrate;
depositing the graphene oxide dispersion liquid on the surface of the flexible substrate by adopting an electrospray method, and forming a graphene oxide layer on the surface of the flexible substrate;
carrying out silane modification on the graphene oxide layer deposited on the flexible substrate to obtain a modified reduced graphene oxide layer;
connecting a lead to two ends of the modified reduced graphene oxide layer on the flexible substrate.
2. The method of manufacturing a flexible pressure sensor according to claim 1, wherein: the concentration of the graphene oxide dispersion liquid is 3-5 mg/ml.
3. The method of manufacturing a flexible pressure sensor according to claim 1, wherein: in the electric spraying process, the appearance of the graphene oxide in the graphene oxide layer is controlled by controlling additives in the graphene oxide dispersion solution solvent, the temperature, the humidity, the electric field intensity and the receiving distance during electric spraying.
4. The method of manufacturing a flexible pressure sensor according to claim 1, wherein: the graphene oxide in the graphene oxide layer is flaky, wrinkled and/or spherical.
5. The method of manufacturing a flexible pressure sensor according to claim 1, wherein: and depositing the graphene oxide dispersion liquid on the surface of the flexible substrate by adopting the electro-spraying method, wherein the electro-spraying voltage is 10-30KV, the flow rate is 1-5mL/h, and the receiving distance is 5-15 cm.
6. The method of manufacturing a flexible pressure sensor according to claim 1, wherein: the flexible substrate is a sponge.
7. The method of manufacturing a flexible pressure sensor according to claim 5, wherein: adding polyvinylpyrrolidone into the graphene oxide dispersion liquid so that graphene oxide in the graphene oxide layer deposited on the surface of the flexible substrate is spheroidized after the electrospray step.
8. The method of manufacturing a flexible pressure sensor according to claim 1, wherein: silane modifying the graphene oxide layer deposited on the flexible substrate, comprising:
simultaneously placing the flexible substrate deposited with the graphene oxide layer and a container containing silane into a closed container;
heating the sealed container to enable the silane to react with the graphene oxide layer after being volatilized;
and vacuumizing the closed container to remove the unreacted silane.
9. A flexible pressure sensor, characterized by: the flexible pressure sensor is manufactured by the manufacturing method of the flexible pressure sensor according to any one of claims 1 to 8.
10. The flexible pressure sensor of claim 9, wherein: the flexible pressure sensor comprises a flexible substrate, a modified reduced graphene oxide layer arranged on the surface of the flexible substrate, and wires connected with two ends of the modified reduced graphene oxide layer, wherein the modified reduced graphene oxide in the modified reduced graphene oxide layer is flaky, wrinkled and/or spherical.
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| CN113649252A (en) * | 2021-08-18 | 2021-11-16 | 中国科学院重庆绿色智能技术研究院 | Spraying preparation micro-nano multistage self-compensation structure and flexible pressure sensor thereof |
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| CN110272562A (en) * | 2018-10-15 | 2019-09-24 | 杭州师范大学 | A kind of conducting particles@foam of polymers sandwich and preparation method thereof, application |
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| CN113649252A (en) * | 2021-08-18 | 2021-11-16 | 中国科学院重庆绿色智能技术研究院 | Spraying preparation micro-nano multistage self-compensation structure and flexible pressure sensor thereof |
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