CN110989334A8 - 一种激光切割晶圆控制参数动态调节装置 - Google Patents

一种激光切割晶圆控制参数动态调节装置 Download PDF

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Publication number
CN110989334A8
CN110989334A8 CN201911062697.4A CN201911062697A CN110989334A8 CN 110989334 A8 CN110989334 A8 CN 110989334A8 CN 201911062697 A CN201911062697 A CN 201911062697A CN 110989334 A8 CN110989334 A8 CN 110989334A8
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laser
laser cutting
controller
cutting wafer
parameters
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CN110989334A (zh
CN110989334B (zh
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盛建雄
杨秋松
李波
左思华
周玉兰
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Wuhan Optical Valley Aerospace Sanjiang Laser Industry Technology Research Institute Co Ltd
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Wuhan Optical Valley Aerospace Sanjiang Laser Industry Technology Research Institute Co Ltd
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B11/00—Automatic controllers
    • G05B11/01—Automatic controllers electric
    • G05B11/36—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential
    • G05B11/42—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential for obtaining a characteristic which is both proportional and time-dependent, e.g. P. I., P. I. D.
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Laser Beam Processing (AREA)

Abstract

本发明涉及一种激光切割晶圆控制参数动态调节装置，包括控制器、激光器，还包括伺服驱动器、智能控制器、振动传感器、功率计，振动传感器和功率计分别与智能控制器通讯连接，激光器与智能控制器通讯连接，智能控制器与控制器之间通过并行接口连接，控制器与伺服驱动之间通过总线连接。解决了激光切割晶圆控制***中需手动整定PID参数，无法动态调节参数，对激光频率和电流实现动态调节的问题；通过智能控制器内置神经网络模型和算法实时整定PID参数和激光参数，将该技术应用于激光切割晶圆控制***中，减少设备调试时间，提高了设备的控制精度；所述装置可提高现有激光切割晶圆设备控制精度。
CN201911062697.4A 2019-11-03 2019-11-03 一种激光切割晶圆控制参数动态调节装置 Active CN110989334B (zh)

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CN201911062697.4A CN110989334B (zh) 2019-11-03 2019-11-03 一种激光切割晶圆控制参数动态调节装置

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CN201911062697.4A CN110989334B (zh) 2019-11-03 2019-11-03 一种激光切割晶圆控制参数动态调节装置

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CN110989334A CN110989334A (zh) 2020-04-10
CN110989334A8 true CN110989334A8 (zh) 2020-07-07
CN110989334B CN110989334B (zh) 2023-07-14

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112631124A (zh) * 2020-12-07 2021-04-09 苏州华光智控电子科技有限公司 一种中低功率激光切割设备的高精度运动控制***及其控制方法

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Publication number Priority date Publication date Assignee Title
FR2518278A1 (fr) * 1981-12-15 1983-06-17 Peiffert Jean Procede et dispositif pour la commande du deplacement asservi d'un mobile, notamment d'un porte-outil de machine a generateur de plasma, a rayon laser ou analogue
CN101630143A (zh) * 2008-07-14 2010-01-20 深圳市华德激光技术有限公司 一种用于激光切割设备上的运动机构的控制方法
CN101592938A (zh) * 2009-06-30 2009-12-02 刘文祥 数控网络及其各种***
DE102010020183B4 (de) * 2010-05-11 2013-07-11 Precitec Kg Laserschneidkopf und Verfahren zum Schneiden eines Werkstücks mittels eines Laserschneidkopfes
EP2585248B1 (en) * 2010-06-28 2017-10-18 Precitec GmbH & Co. KG Method for controlling a laser processing operation by means of a reinforcement learning agent and laser material processing head using the same
CN102117053A (zh) * 2010-12-20 2011-07-06 山西飞虹激光科技有限公司 激光切割机智能化计算机数控***
ITTO20110352A1 (it) * 2011-04-21 2012-10-22 Adige Spa Metodo per il controllo di un processo di taglio laser e sistema di taglio laser implementante tale metodo
CN106950915B (zh) * 2016-01-06 2019-01-29 中江机电科技江苏有限公司 一种基于pmac的水切割机及其轨迹优化方法
GB201604097D0 (en) * 2016-03-09 2016-04-20 Spi Lasers Uk Ltd Apparatus and method for controlling laser processing of a material
CN107052570A (zh) * 2017-01-03 2017-08-18 武汉光谷航天三江激光产业技术研究院有限公司 一种激光精密加工装置
CN108620746A (zh) * 2018-04-17 2018-10-09 武汉光谷航天三江激光产业技术研究院有限公司 一种基于激光的路面切割装置
CN109901383A (zh) * 2019-03-01 2019-06-18 江苏理工学院 一种交流伺服电机驱动器控制方法

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CN110989334A (zh) 2020-04-10
CN110989334B (zh) 2023-07-14

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Correction item: Applicant

Correct: Wuhan Optical Valley Aerospace Sanjiang Laser Industry Technology Research Institute Co.,Ltd.

False: Wuhan Optical Valley Aerospace Sanjiang laser industry technology research Co.,Ltd.

Volume: 36

Correction item: Applicant

Correct: Wuhan Optical Valley Aerospace Sanjiang Laser Industry Technology Research Institute Co.,Ltd.

False: Wuhan Optical Valley Aerospace Sanjiang laser industry technology research Co.,Ltd.

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Page: The title page

Volume: 36

CI02 Correction of invention patent application
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