CN110988907A - Doppler compensation based three-dimensional coherent laser radar push-scanning imaging method - Google Patents

Doppler compensation based three-dimensional coherent laser radar push-scanning imaging method Download PDF

Info

Publication number
CN110988907A
CN110988907A CN201911167119.7A CN201911167119A CN110988907A CN 110988907 A CN110988907 A CN 110988907A CN 201911167119 A CN201911167119 A CN 201911167119A CN 110988907 A CN110988907 A CN 110988907A
Authority
CN
China
Prior art keywords
laser radar
speed
point
push
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201911167119.7A
Other languages
Chinese (zh)
Other versions
CN110988907B (en
Inventor
孙建锋
蔡新雨
许蒙蒙
劳陈哲
贺红雨
李跃新
韩荣磊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Suzhou Xuanguang Semiconductor Technology Co ltd
Original Assignee
Shanghai Institute of Optics and Fine Mechanics of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Institute of Optics and Fine Mechanics of CAS filed Critical Shanghai Institute of Optics and Fine Mechanics of CAS
Priority to CN201911167119.7A priority Critical patent/CN110988907B/en
Publication of CN110988907A publication Critical patent/CN110988907A/en
Application granted granted Critical
Publication of CN110988907B publication Critical patent/CN110988907B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88Lidar systems specially adapted for specific applications
    • G01S17/89Lidar systems specially adapted for specific applications for mapping or imaging
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/483Details of pulse systems
    • G01S7/486Receivers
    • G01S7/487Extracting wanted echo signals, e.g. pulse detection
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/491Details of non-pulse systems
    • G01S7/493Extracting wanted echo signals

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Electromagnetism (AREA)
  • Optical Radar Systems And Details Thereof (AREA)

Abstract

A Doppler compensation based three-dimensional coherent laser radar push-broom imaging method utilizes the characteristics of simultaneous Doppler speed measurement and distance measurement of a coherent laser radar, uses speed and distance information carried by an echo signal to perform Doppler compensation on a three-dimensional coordinate of a target point cloud, and realizes Doppler compensation three-dimensional push-broom imaging in a push-broom state. And filtering and enhancing the point cloud, improving the imaging quality and finally dynamically displaying the obtained three-dimensional point cloud. The invention uses the laser radar coherent detection method, contains all advantages of coherent detection, and has higher signal conversion gain and higher detection sensitivity compared with the traditional direct detection method. Compared with the traditional side-view push-broom technology, the invention can utilize Doppler frequency shift to finish speed detection. The method saves an additional speed detector, is easy to realize, and has wide application prospect.

Description

Doppler compensation based three-dimensional coherent laser radar push-scanning imaging method
Technical Field
The invention relates to the field of laser radar imaging and unmanned driving, in particular to a Doppler compensation-based three-dimensional coherent laser radar push-scanning imaging method.
Background
In the 60's of the 20 th century, a laser radar push-scan scanning mode was proposed for the first time and used in Airborne laser depth detection [ Gary C Guenther, Mark W Brooks, Paul E LaRocque. New Capabilities of the "SHOALS" air radar Bathmeter [ J ]. Remote Sensing of environmental, 2000,73(2) ], which has the characteristics of high resolution, wide field of view, and fast imaging, and the detection resolution and imaging rate of the laser radar can be greatly improved. In 1988, Japanese UCHU KAIHATSU JIGYO proposed the concept of push-scan scanning for satellite remote sensors [ Barry S, Mark G, Dale R, et al.push-noise scanning for aircraft or specific satellite tellite [ C ]. Proc.of SPIE,1999,3707: 421-. In 2003, the Linken Laboratory proposed a specific embodiment of airborne array arrangement three-dimensional Lidar push scanning [ Aull B F, Loomis A H, Young D J, et al. Geiger-mode Avalanche Photodiodes for three-dimensional Imaging [ J ]. Lincoln Laboratory Journal,2002,13(2): 335. 350 ], in the last 5 years, push scanning has been widely applied in aerospace missions such as NASA-emitted ICESat-2 and LIARRFACE TOPRAPHY (LIST) [ Dabney, P.
At present, the main application scene of the laser radar push-scan scanning mode is airborne satellite-borne ground scanning or satellite remote sensing detection. Their common feature is that the detection direction of the lidar is orthogonal to the direction of the pushing motion. When the scanning track and the target three-dimensional point cloud are imaged, the movement speed of the laser radar is indispensable, but the physical quantity can only be read from an additionally installed speed detector.
Disclosure of Invention
The invention provides a Doppler compensation based three-dimensional coherent laser radar push-scan imaging method, aiming at the defect that the conventional laser radar push-scan imaging method cannot automatically detect the movement speed of a laser radar. The method utilizes the characteristic that the coherent laser radar can simultaneously carry out Doppler velocity measurement and distance measurement to realize three-dimensional push-broom imaging based on Doppler compensation in a motion state. For the relative movement in the beam direction, the invention utilizes the Doppler frequency shift of the laser wavelength to carry out real-time detection on the movement speed of the laser wavelength, and carries out point-by-point movement compensation to remove the image stretching and distortion generated by the relative movement in the pushing scanning.
This approach is particularly well suited for axial motion push-broom imaging, as compared to other approaches. The three-dimensional coherent laser radar push-scanning imaging technology based on Doppler compensation has the advantages that: the method can directly utilize Doppler frequency shift without an additional speed detector, solves the pushing speed in the laser radar beam direction, and directly compensates the point cloud image stretching and distortion generated by pushing scanning. In addition, this approach uses coherent detection techniques, which include all the advantages of coherent detection.
The technical solution of the invention is as follows:
a Doppler compensation based three-dimensional coherent laser radar push-scanning imaging method comprises the following steps:
1) establishing a laser radar initial state coordinate system and a laser radar motion coordinate system: abstracting the laser radar to one point and taking the initial position of the laser radar as the origin of coordinates OlEstablishing a stationary coordinate system x using the right-hand rulelylzlOlAfter the time of delta t, the moving coordinate system where the laser radar is located takes the speed as
Figure BDA0002287751000000021
Straight line motion to x'ly′lz′lO′lWherein the speed
Figure BDA0002287751000000022
Direction of (a) and zlPositive direction of axis is same, origin of coordinates O'lIs the real-time position of the laser radar push state;
2) obtaining the distance L between the moving laser radar and the static target point in real time, wherein the azimuth angle of the emergent beam is theta, and the pitch angle of the emergent beam is theta
Figure BDA0002287751000000023
3) And (3) solving a compensation quantity according to the corresponding relation between the laser radar moving speed and the Doppler frequency shift: the laser radar moving speed and the laser Doppler frequency shift are in the following relationship:
v=fdλ/2
when the laser radar moving speed v is positive, the laser radar is close to a target object; when the laser radar moving speed v is negative, the laser radar is far away from the target object;
therefore, when the laser radar does variable speed movement, the laser radar speed value v obtained by each point is usediMultiplying the time interval Δ t of each point by a distance compensation amount corresponding to the time interval between each point and the previous point, where the distance compensation amount ^ vdt of the ith point of the laser radar scan in the laser radar motion direction is:
∫vdt=v1Δt+v2Δt+···+viΔt
4) writing out a point cloud space coordinate: scanning point spatial coordinates for time t
Figure BDA0002287751000000031
Comprises the following steps:
Figure BDA0002287751000000032
wherein the content of the first and second substances,
Figure BDA0002287751000000033
and
Figure BDA0002287751000000034
respectively a rotation matrix and a translation matrix generated during the transformation of a coordinate system, delta is the angle of the laser radar rotating in the counterclockwise direction when viewed from the top, and is 0 here,
Figure BDA0002287751000000035
respectively, x between the lidar and the target objectl、yl、zlRelative speed in direction, here
Figure BDA0002287751000000036
Is a non-volatile organic compound (I) with a value of 0,
Figure BDA0002287751000000037
the distance compensation quantity is obtained according to the Doppler frequency shift in the step 3);
the laser radar motion speed v obtained by using the laser doppler frequency shift of the receiving and transmitting laser can be represented as follows:
Figure BDA0002287751000000038
for a certain time period τ, the acquired set of spatial points may be written as:
Figure BDA0002287751000000039
and the point set sigma P forms the final point cloud image.
The invention has the following characteristics:
1. the echo signals carry signal frequency shift information, and are converted into motion speed information according to the Doppler effect, so that image correction motion compensation can be directly carried out, and independent detection is not needed.
2. This approach is particularly well suited for axial motion push-broom imaging, as compared to other approaches.
The invention has the technical effects that:
1. the invention can directly utilize Doppler frequency shift without an additional speed detector, solves the pushing speed in the laser radar beam direction to obtain, and directly compensates the point cloud image stretching and distortion generated by pushing scanning.
2. The present invention uses coherent detection techniques, which include all the advantages of coherent detection.
Drawings
FIG. 1 is a schematic diagram of a laser radar push-broom imaging coordinate system of the present invention;
FIG. 2 is a functional block diagram of the present invention;
fig. 3 is a block diagram of one embodiment of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the following drawings and examples, but the scope of the present invention should not be limited thereto.
FIG. 1 is a schematic diagram of a laser radar push-broom imaging coordinate system according to the present invention.
FIG. 2 is a schematic block diagram of the present invention, and the Doppler compensation-based three-dimensional coherent lidar push-scanning imaging method of the present invention comprises the following steps:
1) establishing a laser radar initial state coordinate system and a laser radar motion coordinate system: abstracting the laser radar to one point and taking the initial position of the laser radar as the origin of coordinates OlEstablishing a stationary coordinate system x using the right-hand rulelylzlOlAfter the time of delta t, the moving coordinate system where the laser radar is located takes the speed as
Figure BDA0002287751000000041
Straight line motion to x'ly′lz′lO′lWherein the speed
Figure BDA0002287751000000042
Direction of (a) and zlPositive direction of axis is same, origin of coordinates O'lThe real-time position of the laser radar push state. The change of the pitching attitude of the laser radar in the motion process is not considered;
2) obtaining a movement in real timeDistance L between the moving laser radar and the stationary target point, azimuth angle theta of the emergent beam, and pitch angle of the emergent beam
Figure BDA0002287751000000043
3) And (3) solving a compensation quantity according to the corresponding relation between the laser radar moving speed and the Doppler frequency shift: the laser radar moving speed and the laser Doppler frequency shift are in the following relationship:
v=fdλ/2
when the laser radar moving speed v is positive, the laser radar is close to a target object; and when the laser radar moving speed v is negative, the laser radar is far away from the target object.
Therefore, when the laser radar does variable speed movement, the laser radar speed value v obtained by each point is usediThe time interval at each point is multiplied by the distance compensation amount corresponding to the time interval between each point and the previous point. The distance compensation amount ^ vdt of the ith point of laser radar scanning in the laser radar motion direction is:
∫vdt=v1Δt+v2Δt+···+viΔt
4) writing out a point cloud space coordinate: a laser radar motion coordinate system x 'of a certain position point P on a scanning target at the moment t'ly′lz′lO′lIn the above, there are:
Figure BDA0002287751000000051
the coordinates of the point in the initial stationary coordinate system of the laser radar at the time 0 are:
Figure BDA0002287751000000052
so for a certain scanning point P the coordinates in the laser radar initial coordinate system
Figure BDA0002287751000000053
Comprises the following steps:
Figure BDA0002287751000000054
wherein the content of the first and second substances,
Figure BDA0002287751000000061
and
Figure BDA0002287751000000062
respectively a rotation matrix and a translation matrix generated when the coordinate system is transformed. Delta is the angle of the laser radar rotating counterclockwise when viewed from above, here is 0,
Figure BDA0002287751000000063
respectively, x between the lidar and the target objectl、yl、zlRelative speed in direction, here
Figure BDA0002287751000000064
Is a non-volatile organic compound (I) with a value of 0,
Figure BDA0002287751000000065
the distance compensation quantity is obtained according to the Doppler frequency shift in the step 3);
therefore, for the situation of the present invention, the laser radar motion velocity v obtained by using the doppler shift of the transmitted and received laser, the coordinates of any scanning point are expressed as:
Figure BDA0002287751000000066
for a certain time period τ, the acquired set of spatial points may be written as
Figure BDA0002287751000000067
And the point set sigma P forms the final point cloud image.
FIG. 3 is a schematic scanning diagram of an embodiment of the present invention. As can be seen from the figure, the laser emitted by the laser radar is guided by the scanner to be scanned in a circular ring shape. When the laser radar scanning module moves linearly to the right, the radius of the scanning ring is gradually reduced, and then the target is scanned layer by layer from the outer edge to the center.
Another embodiment of the invention may be an intra-tunnel scan probe. And when the scanning system passes through the tunnel, the scanning rings pass through the inner wall of the tunnel layer by layer to finish detection.
The present specification has completed a detailed description of a three-dimensional coherent lidar push-scanning imaging method based on doppler compensation.
Those skilled in the art will appreciate that the present invention has not been described in detail.

Claims (1)

1. A Doppler compensation based three-dimensional coherent laser radar push-scanning imaging method is characterized in that: the method comprises the following steps:
1) establishing a laser radar initial state coordinate system and a laser radar motion coordinate system: abstracting the laser radar to one point and taking the initial position of the laser radar as the origin of coordinates OlEstablishing a stationary coordinate system x using the right-hand rulelylzlOlAfter the time of delta t, the moving coordinate system where the laser radar is located takes the speed as
Figure FDA0002287750990000011
Straight line motion to x'ly′lz′lO′lWherein the speed
Figure FDA0002287750990000012
Direction of (a) and zlPositive direction of axis is same, origin of coordinates O'lIs the real-time position of the laser radar push state;
2) obtaining the distance L between the moving laser radar and a static target point in a real-time state, wherein the azimuth angle of an emergent beam is theta, and the pitch angle of the emergent beam is
Figure FDA0002287750990000015
3) From the speed of movement and Doppler shift of the laser radarThe compensation amount is calculated according to the corresponding relation: laser radar moving speed
Figure FDA0002287750990000016
The following relationship is formed between the Doppler frequency shift of the transmitting laser and the Doppler frequency shift of the receiving laser:
v=fdλ/2
when the laser radar moving speed v is positive, the laser radar is close to the target object; when the movement speed v of the laser radar is negative, the laser radar is far away from the target object;
therefore, when the laser radar does variable speed movement, the laser radar speed value v obtained by each point is usediMultiplying the time interval Δ t of each point by a distance compensation amount corresponding to the time interval between each point and the previous point, where the distance compensation amount ^ vdt of the ith point of the laser radar scan in the laser radar motion direction is:
∫vdt=v1Δt+v2Δt+…+viΔt
4) writing out a point cloud space coordinate: scanning point spatial coordinates for time t
Figure FDA0002287750990000013
Comprises the following steps:
Figure FDA0002287750990000014
wherein the content of the first and second substances,
Figure FDA0002287750990000021
and
Figure FDA0002287750990000022
respectively a rotation matrix and a translation matrix generated during the transformation of a coordinate system, wherein delta is the rotation angle of the laser radar in the overlooking and anticlockwise direction and is 0;
Figure FDA0002287750990000023
respectively, x between the lidar and the target objectl、yl、zlRelative speed in direction, here
Figure FDA0002287750990000024
Is a non-volatile organic compound (I) with a value of 0,
Figure FDA0002287750990000025
the distance compensation quantity is obtained according to the Doppler frequency shift in the step 3);
the laser radar motion speed v obtained by using the laser doppler frequency shift of the receiving and transmitting laser can be represented as follows:
Figure FDA0002287750990000026
for a certain time period τ, the acquired set of spatial points may be written as:
Figure FDA0002287750990000027
and the point set sigma P forms the final point cloud image.
CN201911167119.7A 2019-11-25 2019-11-25 Doppler compensation based three-dimensional coherent laser radar push-broom imaging method Active CN110988907B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201911167119.7A CN110988907B (en) 2019-11-25 2019-11-25 Doppler compensation based three-dimensional coherent laser radar push-broom imaging method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201911167119.7A CN110988907B (en) 2019-11-25 2019-11-25 Doppler compensation based three-dimensional coherent laser radar push-broom imaging method

Publications (2)

Publication Number Publication Date
CN110988907A true CN110988907A (en) 2020-04-10
CN110988907B CN110988907B (en) 2022-08-30

Family

ID=70086526

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201911167119.7A Active CN110988907B (en) 2019-11-25 2019-11-25 Doppler compensation based three-dimensional coherent laser radar push-broom imaging method

Country Status (1)

Country Link
CN (1) CN110988907B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111539488A (en) * 2020-05-27 2020-08-14 北京理工大学 Imaging distortion resisting target classification method for ultra-narrow pulse radar under complex dynamic track
CN111650601A (en) * 2020-06-01 2020-09-11 杭州爱莱达科技有限公司 High-resolution 3D imaging method and device for vehicle-mounted coherent laser radar

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106291512A (en) * 2016-07-29 2017-01-04 中国科学院光电研究院 A kind of method of array push-broom type laser radar range Nonuniformity Correction
CN108700665A (en) * 2017-06-01 2018-10-23 深圳市大疆创新科技有限公司 A kind of detection method, device and detecting devices based on laser radar
CN108828552A (en) * 2018-03-28 2018-11-16 郑州航空工业管理学院 A kind of target detection and track searching method of airbome pulse laser radar
CN109031339A (en) * 2018-05-23 2018-12-18 北京控制工程研究所 A kind of three-dimensional point cloud motion compensation process

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106291512A (en) * 2016-07-29 2017-01-04 中国科学院光电研究院 A kind of method of array push-broom type laser radar range Nonuniformity Correction
CN108700665A (en) * 2017-06-01 2018-10-23 深圳市大疆创新科技有限公司 A kind of detection method, device and detecting devices based on laser radar
CN108828552A (en) * 2018-03-28 2018-11-16 郑州航空工业管理学院 A kind of target detection and track searching method of airbome pulse laser radar
CN109031339A (en) * 2018-05-23 2018-12-18 北京控制工程研究所 A kind of three-dimensional point cloud motion compensation process

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
李铭 等: "一种推扫式光子计数激光雷达点云滤波算法及其验证", 《科学技术与工程》 *
王明军 等: "激光雷达距离高分辨多普勒成像技术研究进展及关键技术", 《激光与红外》 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111539488A (en) * 2020-05-27 2020-08-14 北京理工大学 Imaging distortion resisting target classification method for ultra-narrow pulse radar under complex dynamic track
CN111650601A (en) * 2020-06-01 2020-09-11 杭州爱莱达科技有限公司 High-resolution 3D imaging method and device for vehicle-mounted coherent laser radar
CN111650601B (en) * 2020-06-01 2022-10-25 孙建锋 High-resolution 3D imaging method and device for vehicle-mounted coherent laser radar

Also Published As

Publication number Publication date
CN110988907B (en) 2022-08-30

Similar Documents

Publication Publication Date Title
Liu et al. TOF lidar development in autonomous vehicle
US20240077614A1 (en) Velocity estimation using doppler per point lidar systems
CN112444811B (en) Target detection and imaging method for comprehensive MIMO radar and ISAR
CN109188433B (en) Control point-free dual-onboard SAR image target positioning method
CN104535996B (en) Image/laser ranging/ low-altitude frequency-modulated continuous wave radar integrated system
EP2930532A1 (en) Simultaneous forward and inverse synthetic aperture imaging ladar
CN110988907B (en) Doppler compensation based three-dimensional coherent laser radar push-broom imaging method
CN109932718B (en) Multi-rotor unmanned aerial vehicle-mounted circular track all-round-looking SAR (synthetic aperture radar) imaging method
US7145497B2 (en) Robust detection technique of fixed and moving ground targets using a common waveform
CN109633642B (en) Terahertz high-speed target radar imaging method
CN106597468A (en) Dual-mode laser imaging system and imaging method
CN112748443B (en) Dynamic target three-dimensional imaging device and method
CN113687356A (en) Airborne multi-channel circular track SAR moving target detection and estimation method
CN113504547A (en) Visual radar imaging system and method based on scanning light field
CN111999744A (en) Unmanned aerial vehicle multi-azimuth detection and multi-angle intelligent obstacle avoidance method
JP2596364B2 (en) Topographic map generator using three-dimensional information obtained from interferometric synthetic aperture radar
Iqbal et al. Imaging radar for automated driving functions
US4163231A (en) Radar mapping technique
US20190120965A1 (en) Method and system of digital light processing and light detection and ranging for guided autonomous vehicles
WO2024109347A1 (en) Method and apparatus for detecting travelable area, and vehicle and storage medium
Zhang et al. Scan denoising and normal distribution transform for accurate radar odometry and positioning
CN116736322B (en) Speed prediction method integrating camera image and airborne laser radar point cloud data
CN110632616B (en) Micro-motion imaging method of airborne inverse synthetic aperture laser radar under sparse sampling
CN109738890B (en) Method for generating ground range map based on missile-borne bistatic SAR range-Doppler image
TWI807528B (en) Method, apparatus and article for inspecting an underwater vehicle

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20221104

Address after: 215638 310A, Building B, Science and Technology Innovation Park, Zhangjiagang Free Trade Zone, Suzhou, Jiangsu Province

Patentee after: Suzhou Xuanguang Semiconductor Technology Co.,Ltd.

Address before: 201800 Qinghe Road 390, Shanghai, Jiading District

Patentee before: SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS CHINESE ACADEMY OF SCIENCES