CN110970483A - Display device, display substrate and manufacturing method thereof - Google Patents

Display device, display substrate and manufacturing method thereof Download PDF

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Publication number
CN110970483A
CN110970483A CN201911327504.3A CN201911327504A CN110970483A CN 110970483 A CN110970483 A CN 110970483A CN 201911327504 A CN201911327504 A CN 201911327504A CN 110970483 A CN110970483 A CN 110970483A
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CN
China
Prior art keywords
substrate
flexible substrate
display
display substrate
regions
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Pending
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CN201911327504.3A
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Chinese (zh)
Inventor
代伟男
张帅
季云龙
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BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
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BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
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Priority to CN201911327504.3A priority Critical patent/CN110970483A/en
Publication of CN110970483A publication Critical patent/CN110970483A/en
Pending legal-status Critical Current

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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/122Pixel-defining structures or layers, e.g. banks
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09FDISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
    • G09F9/301Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements flexible foldable or roll-able electronic displays, e.g. thin LCD, OLED

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

The present disclosure relates to a display substrate, a method for manufacturing the display substrate, and a display device, the display substrate including: the pixel structure comprises a flexible substrate, wherein a plurality of pixel island regions, empty regions arranged between adjacent pixel island regions and a connecting bridge region for connecting the adjacent pixel island regions are formed on the flexible substrate; at least part of the side wall of at least part of the vacant area is an inclined plane, and an included angle between the inclined plane and the surface of one side of the flexible substrate, which is provided with the pixel units, is an obtuse angle. The display substrate provided by the disclosure can improve the packaging effect of the display substrate.

Description

Display device, display substrate and manufacturing method thereof
Technical Field
The disclosure relates to the technical field of display, and particularly relates to a display substrate, a manufacturing method of the display substrate and a display device.
Background
With the development of technology, flexible display devices have been used more and more widely in recent years, and therefore, the flexible display has been greatly improved from the size of a screen to the quality of display. Currently, flexible Display devices include different types such as electronic paper (flexible electrophoretic Display), flexible Organic Light Emitting Diode (OLED) Display devices, and flexible Liquid Crystal Displays (LCD).
The most prominent advantages of flexible displays over conventional flat panel displays are: the inherent idea of the original two-dimensional display is broken through, and the application field of the display is expanded to more lives and portable equipment. The most important problems and difficulties are: the flexible display device is relatively light and thin, and the overall bending resistance and impact resistance are poor; the large local deformation caused by long-time bending may cause the display substrate to fail in packaging, resulting in the failure of the display.
It is to be noted that the information disclosed in the above background section is only for enhancement of understanding of the background of the present disclosure, and thus may include information that does not constitute prior art known to those of ordinary skill in the art.
Disclosure of Invention
The present disclosure provides a display substrate, a method of manufacturing the display substrate, and a display device, which can improve a packaging effect of the display substrate.
According to an aspect of the present disclosure, there is provided a display substrate, the restriction substrate including:
the pixel structure comprises a flexible substrate, wherein a plurality of pixel island regions, empty regions arranged between adjacent pixel island regions and a connecting bridge region for connecting the adjacent pixel island regions are formed on the flexible substrate; wherein the content of the first and second substances,
at least part of the side wall of at least part of the dead zone is an inclined plane, and an included angle between the inclined plane and the surface of one side of the flexible substrate, which is provided with the pixel units, is an obtuse angle.
In an exemplary embodiment of the present disclosure, the inclined surface is a concave-convex surface structure.
In an exemplary embodiment of the present disclosure, the concavo-convex structure is a stepped structure.
In an exemplary embodiment of the present disclosure, at least a portion of a sidewall of each of the vacant areas is the inclined surface.
In an exemplary embodiment of the present disclosure, the side walls of the vacant area are all the inclined planes.
According to another aspect of the present disclosure, there is provided a method of manufacturing a display substrate, the method including:
providing a flexible substrate;
forming a plurality of pixel island regions, empty regions arranged between adjacent pixel island regions and a connecting bridge region for connecting the adjacent pixel island regions on the substrate, wherein at least part of the side wall of at least part of the empty regions is an inclined surface, and an included angle between the inclined surface and the surface of the flexible substrate on one side where the pixel units are arranged is an obtuse angle.
In an exemplary embodiment of the present disclosure, forming a plurality of pixel island regions, a vacant region disposed between adjacent pixel island regions, and a bridge region connecting adjacent pixel island regions on the substrate, making at least a part of a sidewall of at least a part of the vacant region an inclined surface, and making an angle between the inclined surface and a surface of the flexible substrate on a side where pixel units are disposed an obtuse angle, includes:
forming a photoresist layer on the flexible substrate, and removing the photoresist layer and the photoresist at the part corresponding to the position of the preset empty area so as to form a via hole with a preset characteristic size on the photoresist layer;
etching the flexible substrate through the via hole to form a through hole in the flexible substrate;
reducing the characteristic size of the through hole, and etching the flexible substrate through the through hole with the reduced characteristic size to form a step structure in the through hole; repeating the steps to form a vacant zone with an inclined surface which is of a step structure;
a plurality of pixel island regions and a connecting bridge region connecting adjacent pixel island regions are formed through the empty region.
In an exemplary embodiment of the present disclosure, at least a portion of a sidewall of each of the vacant areas is made the slope.
In an exemplary embodiment of the present disclosure, the side walls of the vacant area are all made the slopes.
According to another aspect of the present disclosure, there is provided a display device including the display substrate described above.
According to the display substrate provided by the disclosure, the side wall of the dead zone is the inclined plane, the contact area between the packaging layer and the side wall of the dead zone is increased, poor packaging caused by cracks at the vacancy position can be avoided in the subsequent stripping and film tearing process, the packaging effect of the flexible display substrate can be effectively enhanced, and the reliability of a display device is further improved.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the disclosure.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present disclosure and together with the description, serve to explain the principles of the disclosure. It is to be understood that the drawings in the following description are merely exemplary of the disclosure, and that other drawings may be derived from those drawings by one of ordinary skill in the art without the exercise of inventive faculty.
Fig. 1 is a schematic view of a display substrate according to an embodiment of the disclosure;
FIG. 2 is a cross-sectional view taken along the line A-A in FIG. 1;
fig. 3-6 are process diagrams of a method for manufacturing a display substrate according to the present disclosure;
fig. 7 is a flowchart of a method for manufacturing a display substrate according to an embodiment of the disclosure.
Description of reference numerals:
10. the flexible substrate 20, the pixel island region 30, the bridge region 40, the empty region 410, the inclined plane 420, the through hole 50, the packaging layer 510 and the through hole.
Detailed Description
Example embodiments will now be described more fully with reference to the accompanying drawings. Example embodiments may, however, be embodied in many different forms and should not be construed as limited to the examples set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of example embodiments to those skilled in the art. The described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments. In the following description, numerous specific details are provided to give a thorough understanding of embodiments of the disclosure. One skilled in the relevant art will recognize, however, that the subject matter of the present disclosure can be practiced without one or more of the specific details, or with other methods, steps, etc. In other instances, well-known technical solutions have not been shown or described in detail to avoid obscuring aspects of the present disclosure.
Furthermore, the drawings are merely schematic illustrations of the present disclosure and are not necessarily drawn to scale. The same reference numerals in the drawings denote the same or similar parts, and thus their repetitive description will be omitted. The terms "a," "an," "the," and "said" are used to indicate the presence of one or more elements/components/etc.; the terms "comprising" and "having" are intended to be inclusive and mean that there may be additional elements/components/etc. other than the listed elements/components/etc.
The applicant finds that the existing stretchable device is generally processed in an island-bridge-vacancy mode, and the flexible substrate at the vacancy is also subjected to hole digging treatment, so that cracks are easily formed at the vacancy in the subsequent peeling and TPF (Temporary Protective Film) tearing process, so that poor packaging is caused, or the packaging fails, and further the device fails.
First, in the present exemplary embodiment, there is provided a display substrate, as shown in fig. 1 and 2, including: a flexible substrate 10 on which a plurality of pixel island regions 20, a vacant region 40 disposed between adjacent pixel island regions 20, and a connection bridge region 30 connecting adjacent pixel island regions 20 are formed; wherein, at least a part of the sidewall of at least a part of the empty region 40 is an inclined plane 410, and an included angle between the inclined plane 410 and a surface of the flexible substrate 10 on the side where the pixel unit is disposed is an obtuse angle.
An included angle between the inclined plane 410 and a surface of the flexible substrate 10 on the side where the pixel unit is disposed is an obtuse angle, that is, the size of the opening of the empty region 40 decreases from the side where the pixel unit is disposed on the flexible substrate 10 to the other side of the flexible substrate 10, so that the inclined plane 410 is formed on the sidewall of the empty region 40.
According to the display substrate provided by the disclosure, the side wall of the empty area 40 is the inclined plane 410, so that the contact area between the packaging layer 50 and the side wall of the empty area 40 is increased, poor packaging caused by cracks at the vacancy position can be avoided in the subsequent stripping and TPF (thermoplastic film) stripping processes, the packaging effect of the flexible display substrate can be effectively enhanced, and the reliability of a display device is further improved.
The material of the flexible substrate 10 may be at least one of Polyimide (PI), Polydimethylsiloxane (PDMS), polyethylene naphthalate, parylene, or Polymethylmethacrylate (PMMA), but is not limited thereto. The flexible substrate 10 may be one or more layers, and when the flexible substrate 10 is a plurality of layers, the materials of the layers may be different or the same.
Specifically, the inclined surface 410 is a concave-convex structure. Through setting up inclined plane 410 to the concave-convex surface structure, can increase inclined plane 410's effective area, and then increase the effective area of contact between the lateral wall in dead zone 40 and the encapsulated layer 50 to further strengthen flexible display substrate's encapsulation effect, further promote display device's reliance. In addition, the inclined plane 410 adopts a concave-convex surface structure, which is equivalent to improving the surface roughness of the side wall of the empty area 40, so that the friction force between the side wall of the empty area 40 and the packaging layer 50 is increased, the occurrence of the condition that the packaging of the display substrate fails due to local large deformation caused by long-time bending can be avoided, and the reliability of the display device is further improved.
Specifically, as shown in fig. 2 and 6, the concave-convex surface structure is a step-like structure. Inclined plane 410 adopts the concave-convex face that is step-like structure, and step-like structure includes a plurality of step faces, can increase inclined plane 410's effective area through the step face, and then increases the effective area of contact between the lateral wall in dead zone 40 and the encapsulation layer 50 to further strengthen flexible display substrate's encapsulation effect, further promote display device's reliability. In addition, the inclined plane 410 adopts a concave-convex surface with a step-shaped structure, and the side wall of the dead zone 40 and the packaging layer 50 have adhesive force in two directions, so that the connection strength between the side wall of the dead zone 40 and the packaging layer 50 is increased, the condition that the packaging of the display substrate fails due to local large deformation caused by long-time bending can be avoided, and the reliability of the display device is further improved.
In addition, the concave-convex structure can be continuous triangle-shaped structure, and inclined plane 410 adopts the concave-convex for continuous triangle-shaped structure, and the stair structure includes a plurality of convex triangle-shaped structures, can increase the effective area of inclined plane 410 through continuous triangle-shaped structure, and then increases the effective area of contact between lateral wall and the encapsulated layer 50 in dead zone 40 to further strengthen flexible display substrate's encapsulation effect, further promote display device's reliability.
In addition, the concave-convex structure can be continuous semicircular structure, and inclined plane 410 adopts the concave-convex for semicircular structure, and the stair structure includes a plurality of convex semicircular structures, can increase the effective area of inclined plane 410 through continuous semicircular structure, and then increases the effective area of contact between the lateral wall of dead zone 40 and encapsulating layer 50 to further strengthen flexible display substrate's encapsulation effect, further promote display device's reliability.
In addition, the concave-convex structure can be a trapezoid, a rectangle or an irregular structure formed by continuous protrusion or depression, which is not limited by the present disclosure, and all technical schemes of increasing the effective contact area between the side wall of the empty area 40 and the encapsulation layer 50 by changing the concave-convex structure formed by the inclined plane 410 belong to the protection scope of the present application.
Specifically, at least a portion of the sidewall of each vacant area 40 is a slope 410. By forming the inclined plane 410 on the sidewall of each empty area 40, the effective contact area between the sidewall of the empty area 40 and the encapsulation layer 50 can be increased, thereby further enhancing the encapsulation effect of the flexible display substrate and further improving the reliability of the display device. Of course, a portion of the sidewall of the partially empty area 40 may be the inclined plane 410, and the sidewall of the partially empty area 40 is not formed with the inclined plane 410, which is not limited in the present disclosure.
Specifically, the sidewalls of the vacant area 40 are all inclined planes 410. By making the sidewalls of the empty area 40 all be the inclined plane 410, the effective contact area between the sidewalls of the empty area 40 and the encapsulation layer 50 can be relatively larger, and the encapsulation effect of the flexible display substrate can be further enhanced, thereby further improving the reliability of the display device. In addition, the sidewalls of the empty regions 40 are all the inclined planes 410, so that the effective contact area between the sidewalls of the empty regions 40 and the encapsulation layer 50 can be relatively maximized, and the encapsulation effect of the flexible display substrate can be maximally enhanced, thereby further improving the reliability of the display device. In addition, the sidewalls of the partially empty area 40 may be all the inclined planes 410, and a portion of the sidewalls of the partially empty area 40 may be the inclined planes 410, which is not limited in this disclosure.
The following are embodiments of the disclosed method that may be used to implement embodiments of the disclosed apparatus. For details not disclosed in the embodiments of the disclosed method, refer to the embodiments of the disclosed apparatus.
Example embodiments provide another manufacturing method of a display substrate, as shown in fig. 7, the manufacturing method including:
step S100, providing a flexible substrate;
step S200, forming a plurality of pixel island regions, empty regions arranged between adjacent pixel island regions and a connecting bridge region connecting adjacent pixel island regions on the substrate, wherein at least part of the side wall of at least part of the empty regions is an inclined surface, and an included angle between the inclined surface and the surface of the flexible substrate on the side where the pixel units are arranged is an obtuse angle.
According to the manufacturing method of the display substrate, the side wall of the empty area is the inclined plane, the contact area between the packaging layer and the side wall of the empty area is increased, the packaging effect of the flexible display substrate can be effectively enhanced, and the reliability of a display device is further improved.
Next, each step of the manufacturing method of the display substrate in the present exemplary embodiment will be further described.
In step S100, a flexible substrate is provided.
Specifically, the material of the flexible substrate may be at least one of Polyimide (PI), Polydimethylsiloxane (PDMS), polyethylene naphthalate, parylene, or Polymethylmethacrylate (PMMA), but is not limited thereto. The flexible substrate 10 may be one or more layers, and when the flexible substrate 10 is a plurality of layers, the materials of the layers may be different or the same.
In step S200, a plurality of pixel island regions, empty regions disposed between adjacent pixel island regions, and bridge regions connecting adjacent pixel island regions are formed on a substrate such that at least a portion of a sidewall of at least a portion of the empty regions is an inclined surface and an angle between the inclined surface and a surface of the flexible substrate on a side where the pixel unit is disposed is an obtuse angle.
Specifically, as shown in fig. 3, a photoresist layer may be formed on the flexible substrate 10, and the photoresist layer is removed from a portion corresponding to the predetermined empty area 40, so as to form a via hole 510 with a predetermined characteristic dimension on the photoresist layer;
as shown in fig. 3, the flexible substrate 10 is etched through the via 510, and a through hole 420 is formed in the flexible substrate 10;
as shown in fig. 4, the feature size of the via 510 is reduced, and the flexible substrate 10 is etched through the via 510 with the reduced feature size to form a step structure in the through hole 420; as shown in fig. 5, the process is repeated to form the vacant region 40 having the inclined surface 410 and the inclined surface 410 in a stepped structure;
as shown in fig. 5, by repeating the above steps, a stepped structure having a plurality of stepped surfaces is formed, thereby forming a slope 410 having a stepped structure;
as shown in fig. 6, the remaining photoresist layer is removed to form a vacant region 40, and a pixel island region 20 and a connecting bridge region 30 connecting adjacent pixel islands 20 are formed on the flexible substrate 10 through the formed vacant region 40.
Specifically, at least a portion of the sidewall of each vacant region 40 may be made to be the slope 410. The inclined plane 410 is formed on the sidewall of each empty area 40, so that the effective contact area between the sidewall of each empty area 40 and the encapsulation layer 50 can be increased, the encapsulation effect of the flexible display substrate can be further enhanced, and the reliability of the display device can be further improved. Of course, a portion of the sidewall of the partially empty area 40 may be the inclined plane 410, and the sidewall of the partially empty area 40 is not formed with the inclined plane 410, which is not limited in the present disclosure.
Specifically, the sidewalls of the vacant area 40 may be all the slopes 410. By making the sidewalls of the empty area 40 all be the inclined plane 410, the effective contact area between the sidewalls of the empty area 40 and the encapsulation layer 50 can be relatively larger, and the encapsulation effect of the flexible display substrate can be further enhanced, thereby further improving the reliability of the display device. In addition, the sidewalls of the empty regions 40 are all the inclined planes 410, so that the effective contact area between the sidewalls of the empty regions 40 and the encapsulation layer 50 can be relatively maximized, and the encapsulation effect of the flexible display substrate can be maximally enhanced, thereby further improving the reliability of the display device. In addition, the sidewalls of the partially empty area 40 may be all the inclined planes 410, and a portion of the sidewalls of the partially empty area 40 may be the inclined planes 410, which is not limited in this disclosure.
Moreover, although the steps of the methods of the present disclosure are depicted in the drawings in a particular order, this does not require or imply that the steps must be performed in this particular order, or that all of the depicted steps must be performed, to achieve desirable results. Additionally or alternatively, certain steps may be omitted, multiple steps combined into one step execution, and/or one step broken down into multiple step executions, etc.
The present disclosure also provides a display device, which includes the above display substrate, and the display device is a flexible display device. The specific type of the display device is not particularly limited, and any display device commonly used in the art may be used, specifically, for example, a liquid crystal display, an OLED display, a mobile device such as a mobile phone, a wearable device such as a watch, a VR device, and the like.
It should be noted that the display device includes other necessary components and components besides the display panel, for example, a display, specifically, such as a housing, a circuit board, a power line, etc., and it is well understood in the art that the components and components can be supplemented correspondingly according to the specific requirements of the display device, and the details are not repeated herein.
Other embodiments of the disclosure will be apparent to those skilled in the art from consideration of the specification and practice of the disclosure disclosed herein. This application is intended to cover any variations, uses, or adaptations of the disclosure following, in general, the principles of the disclosure and including such departures from the present disclosure as come within known or customary practice within the art to which the disclosure pertains. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the disclosure being indicated by the following claims.

Claims (10)

1. A display substrate, comprising:
the pixel structure comprises a flexible substrate, wherein a plurality of pixel island regions, empty regions arranged between adjacent pixel island regions and a connecting bridge region for connecting the adjacent pixel island regions are formed on the flexible substrate; wherein the content of the first and second substances,
at least part of the side wall of at least part of the dead zone is an inclined plane, and an included angle between the inclined plane and the surface of one side of the flexible substrate, which is provided with the pixel units, is an obtuse angle.
2. The display substrate of claim 1, wherein the bevel is a relief structure.
3. The display substrate of claim 2, wherein the relief surface structure is a step-like structure.
4. The display substrate of claim 1, wherein at least a portion of the sidewall of each of the empty regions is the slope.
5. The display substrate of claim 1, wherein the sidewalls of the empty region are all the slopes.
6. A method for manufacturing a display substrate, comprising:
providing a flexible substrate;
forming a plurality of pixel island regions, empty regions arranged between adjacent pixel island regions and a connecting bridge region for connecting the adjacent pixel island regions on the substrate, wherein at least part of the side wall of at least part of the empty regions is an inclined surface, and an included angle between the inclined surface and the surface of the flexible substrate on one side where the pixel units are arranged is an obtuse angle.
7. The manufacturing method according to claim 6, wherein forming a plurality of pixel island regions, a vacant region provided between adjacent pixel island regions, and a connecting bridge region connecting adjacent pixel island regions on the substrate such that at least part of a sidewall of at least part of the vacant region is an inclined surface and an angle between the inclined surface and a surface of the flexible substrate on a side where pixel units are provided is an obtuse angle comprises:
forming a photoresist layer on the flexible substrate, and removing the photoresist layer and the photoresist at the part corresponding to the position of the preset empty area so as to form a via hole with a preset characteristic size on the photoresist layer;
etching the flexible substrate through the via hole to form a through hole in the flexible substrate;
reducing the characteristic size of the through hole, and etching the flexible substrate through the through hole with the reduced characteristic size to form a step structure in the through hole; repeating the steps to form the empty area with an inclined surface which is of a step structure.
8. The method of claim 6, wherein at least a portion of the sidewall of each of the vacant areas is the inclined surface.
9. The manufacturing method according to claim 6, wherein the side walls of the vacant area are all the slopes.
10. A display device comprising the display substrate of claims 1-5.
CN201911327504.3A 2019-12-20 2019-12-20 Display device, display substrate and manufacturing method thereof Pending CN110970483A (en)

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CN111584537A (en) * 2020-05-28 2020-08-25 京东方科技集团股份有限公司 Stretchable display panel, preparation method thereof and display device
US20220080697A1 (en) * 2020-09-16 2022-03-17 Boe Technology Group Co., Ltd. Display panel, display device and manufacturing method thereof
WO2022111094A1 (en) * 2020-11-27 2022-06-02 京东方科技集团股份有限公司 Display substrate and manufacturing method therefor, and display device

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CN107871761A (en) * 2016-09-23 2018-04-03 三星显示有限公司 Display device and its manufacture method
CN109346504A (en) * 2018-09-30 2019-02-15 云谷(固安)科技有限公司 Flexible display panels and display device

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CN105742321A (en) * 2014-12-26 2016-07-06 三星显示有限公司 Display Device And Method Of Manufacturing The Same
CN107871761A (en) * 2016-09-23 2018-04-03 三星显示有限公司 Display device and its manufacture method
CN109346504A (en) * 2018-09-30 2019-02-15 云谷(固安)科技有限公司 Flexible display panels and display device

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Publication number Priority date Publication date Assignee Title
CN111584537A (en) * 2020-05-28 2020-08-25 京东方科技集团股份有限公司 Stretchable display panel, preparation method thereof and display device
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CN111584537B (en) * 2020-05-28 2023-10-27 京东方科技集团股份有限公司 Stretchable display panel, preparation method thereof and display device
US20220080697A1 (en) * 2020-09-16 2022-03-17 Boe Technology Group Co., Ltd. Display panel, display device and manufacturing method thereof
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WO2022111094A1 (en) * 2020-11-27 2022-06-02 京东方科技集团股份有限公司 Display substrate and manufacturing method therefor, and display device

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