CN110966167B - 一种压电微泵 - Google Patents
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- 239000000696 magnetic material Substances 0.000 claims abstract description 10
- 239000002861 polymer material Substances 0.000 claims abstract description 9
- 238000013329 compounding Methods 0.000 claims abstract description 3
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 239000000741 silica gel Substances 0.000 claims description 3
- 229910002027 silica gel Inorganic materials 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims description 2
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- 229920006254 polymer film Polymers 0.000 description 1
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- 239000010409 thin film Substances 0.000 description 1
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/0009—Special features
- F04B43/0054—Special features particularities of the flexible members
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
- F04B53/102—Disc valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
- F05C2225/00—Synthetic polymers, e.g. plastics; Rubber
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
- F05C2225/00—Synthetic polymers, e.g. plastics; Rubber
- F05C2225/02—Rubber
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
- F05C2225/00—Synthetic polymers, e.g. plastics; Rubber
- F05C2225/10—Polyimides, e.g. Aurum
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- Engineering & Computer Science (AREA)
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- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Abstract
本发明保护一种压电微泵,包括压电振子、磁性复合微阀和泵体,磁性复合微阀包括磁性复合膜片和支撑梁,所述磁性复合膜片由表层的高分子材料层、底层的柔性材料层以及中间层的磁性材料层复合而成,所述磁性复合微阀由支撑梁分别支承位于泵体的泵进口和泵出口上方;在所述泵进口和泵出口上设置磁性吸环,利用磁性吸环与磁性复合微阀的吸合力关闭进口和出口。本发明采用多层磁性复合微阀,能提高微泵气密性,防止反向泄漏,增大微泵的输出压力。
Description
技术领域
本发明属于微流体控制领域,具体涉及微流体泵。
背景技术
微泵作为微流控***中的核心控制元件,在药物输送、合成、微量流体供给和精确控制等领域都有着广泛的应用前景。
目前,国内外对微泵的研究大多是基于压电晶片驱动的压电薄膜泵。压电薄膜泵主要是由压电振子、泵阀和泵体组成。工作中,压电振子两端施加交流电,在电场作用下压电振子产生径向压缩,腔体内部产生应力,使压电振子弯曲变形。当压电振子正向弯曲时,压电振子伸长,泵腔容积增大,腔内流体压力减小,泵阀打开,液体进入泵腔;当压电振子向反向弯曲时,压电振子收缩,泵腔容积减小,腔内流体压力增大,泵阀关闭,泵腔液体被挤压排出,形成平缓的连续不断的定向流动。
微阀是控制流体方向的重要元件,可以让液体或气体向一个方向流动,其性能对微型泵的开启及过流特性有直接影响,包括反向泄漏、开启压力、响应时间及制作成本等。微泵中的微阀分为主动阀和被动阀两大类,被动阀结构简单,重量轻,制作成本低,应用广泛。被动阀常采用SU-8、聚酰亚胺等制作,但存在气密性差,反向泄漏等问题。为解决微流体在微流控芯片上的单向流动问题,耿照新等设计了一种SU-8 胶微型阀片。此阀片具有弹性模量和弹性常数低、开启压力小、易于加工等特点,但仍存在反向泄漏问题。
总体而言,被动微阀结构简单,在微泵中应用广泛,其性能对微泵特性有重要影响。但现有报道的微泵阀结构大多只有一层高分子膜,气密性不够好,反向泄漏较大,影响了泵的输出流量及输出压力。
发明内容
本发明提出一种压电微泵,采用多层磁性复合微阀,旨在提高微泵气密性,防止反向泄漏,增大微泵的输出压力。
本发明的技术方案如下:
一种压电微泵,主要包括压电振子、磁性磁性复合微阀和泵体。
其中,磁性复合微阀包括磁性复合膜片和支撑结构。所述磁性复合膜片由表层的高分子材料层、底层的柔性材料层以及中间层的磁性材料层复合而成,所述磁性复合微阀由支撑结构分别支承位于泵体的泵进口和泵出口上方。在所述泵体的进口和出口上设置有磁性吸环,利用磁性吸环与磁性复合微阀的磁性材料层的吸合力、以及柔性材料层的变形密闭进口和出口,增加泵体与微阀间的结合,从而提高微泵的气密性,防止内部液体或气体的反向泄漏。同时,磁性材料的吸引预应力进一步提高泵的输出压力。
所述顶层的高分子材料层可采用聚酰亚胺等其他高分子材料制作,具有柔性和高强度,如采用聚酰亚胺膜、SU8膜、PET膜等。
所述中间层采用磁膜,是利用磁体间相互吸引,使泵体与微阀间的结合更加紧密,提高压电泵的气密性。
所述底层的柔性材料层可采用硅胶或橡胶等其他柔性材料,泵体与泵阀的磁性吸引产生预应力,会引起弹性材料的形变。
本发明的压电微泵依托泵体与微阀间的磁性吸引,通过两者间吸合力使得柔性层发生变形,紧密的贴合在液体出入口,获得极佳的气密性,抑制液体的反向泄漏,提高泵的输出能力。磁性预应力的存在,使微阀开启压力增大。压电微泵工作时,内外压力差大于微阀开启压力时,才能调节微阀的开启与关闭,从而有利于提高压电泵的输出压力。另外,该微泵具有结构简单,易于实现的特点。
附图说明
图1 是压电微泵的结构原理图;
图2是图1的A-A剖面图;
图3是微泵下层结构俯视图;
图4是微阀结构示意图,
图5是图4的B-B剖面图。
具体实施方式
下面结合附图对本发明做进一步详细说明。需要说明的是,附图仅用于解释本发明专利,是对本发明实施例的示意性说明,而不能理解为对本发明的限定。
参见图1和图2,压电微泵可分为上层结构和下层结构。上层结构中主要包括压电振子3、弹性膜片4。下层结构包括泵体1、泵腔2、泵出口5、泵进口6和磁性复合微阀7。压电振子3和弹性膜片4两个部件是直接粘接在一起,弹性膜片4与泵体1粘接,由于泵体内部凹陷,从而形成泵腔2。泵出口5和泵进口6上分别设置磁性复合微阀7,微阀是被动开启阀。
参见图4和图5,磁性复合微阀7包括磁性磁性复合膜片9和四周的四根支撑梁10,磁性复合膜片9由顶层的高分子材料层9c、中间的磁性材料层9b和底层的柔性材料层9a组成。本实施例中,高分子材料层9c采用聚酰亚胺制作,中间的磁性材料层9b采用磁膜,柔性材料层9a采用硅胶。
支撑梁10与高分子材料层9c是采用同一层材料制作,通过刻蚀该材料层,形成四根支撑梁和阀边框,支撑梁一端与分子材料层边缘一体连接,另一端与阀边框一体连接。阀边框是粘接在泵出口5和泵进口6上,这样支撑梁10将磁性复合膜片9支承于泵出口5和泵进口6上方,与它们形成开闭关系。
参见图3,在泵出口5和泵进口6处,设置磁性吸环8,利用磁性吸环8与磁性材料层9b的吸合力,关闭泵出口5和泵进口6,提高微泵的气密性,防止内部液体或气体的反向泄漏。
压电微泵工作时,内外压力差小于微阀开启压力时,微阀仍维持原状态;内外压力差大于微阀开启压力时,才能调节微阀的开启与关闭,磁性预应力的存在,使微阀开启压力增大,从而提高微泵的输出压力。同时,由于泵体与微阀间的磁性吸引,使微阀与泵体间的结合更紧密,提高微泵的气密性,有效防止流体的反向泄漏。
Claims (2)
1.一种压电微泵,包括压电振子、微阀和泵体,其特征在于:所述微阀为磁性复合微阀,包括磁性复合膜片和支撑结构,所述磁性复合膜片由表层的高分子材料层、底层的柔性材料层以及中间层的磁性材料层复合而成,所述磁性材料层为磁膜;所述磁性复合微阀由支撑结构分别支承位于泵体的泵进口和泵出口上方;在所述泵进口和泵出口上设置磁性吸环,利用磁性吸环与磁性复合微阀的磁性材料层的吸合力、以及柔性材料层的变形密闭进口和出口,提高微阀的气密性,降低反向泄漏;
所述高分子材料层具有较好的柔韧性和较高的强度,采用聚酰亚胺膜、SU8膜、PET膜;所述底层的柔性材料层采用硅胶或橡胶。
2.根据权利要求1所述的压电微泵,其特征在于:所述支撑结构与所述高分子材料层是采用同一层材料,通过刻蚀形成多根支撑梁和阀边框,支撑梁一端与磁性复合微阀的分子材料层边缘一体连接,另一端与阀边框一体连接。
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