CN110931407B - Lifting module for holding wafer box - Google Patents
Lifting module for holding wafer box Download PDFInfo
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- CN110931407B CN110931407B CN201911144224.9A CN201911144224A CN110931407B CN 110931407 B CN110931407 B CN 110931407B CN 201911144224 A CN201911144224 A CN 201911144224A CN 110931407 B CN110931407 B CN 110931407B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
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- Microelectronics & Electronic Packaging (AREA)
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a lifting module for holding a wafer box, which comprises: the vertical lifting mechanism is fixedly arranged in the lifting device installation area, and the upper end part of the vertical lifting mechanism is fixedly connected with an installation plate; the split sliding structure is fixed on the mounting plate and is positioned below the short-distance cylinder mechanism; run from opposite directions the bracket structure, run from opposite directions the bracket structure and be fixed in on the sliding structure that runs from opposite directions, run from opposite directions the bracket structure and include first bracket component and with the same and the second bracket component of symmetry setting of first bracket component structure, be connected with the connecting block between first bracket component and the second bracket component, first bracket component and second bracket component all with connecting block swing joint. According to the wafer lifting basket clamping device, the possibility of more configuration space is realized for clamping the wafer lifting basket through the horizontally-split motion clamping device, and the clamping device has an automatic resetting function, so that the lifting basket cannot deviate or shake in the moving process or the transferring process of the lifting basket.
Description
Technical Field
The invention relates to the technical field of lifting devices, in particular to a lifting module for holding a wafer cassette.
Background
In semiconductor chip products or semi-finished products such as wafers, a carrier loaded with wafers needs to be transported in various process equipment, such as a wafer wet equipment, for example, the carrier loaded with wafers or an unloaded wafer carrier needs to be transported, the equipment for transporting the carrier is basically installed on various types of process equipment, and generally, the transportation equipment of the carrier adopts an independent transportation channel for separating different environmental requirements and the requirement configuration of dust-free clean environment. The conventional wafer basket transmission module device mostly adopts a frame with fixed size and a specific motion module mechanism to meet the requirement of the basket transmission for loading wafers, the transmission device of the basket needs to be matched with the size requirement of other equipment in the process and is matched with the motion space, and the basket transmission device cannot be flexibly configured with other equipment in the process under the limitation of the overall external design requirement and the movement stroke in the equipment, and the conventional basket clamping device cannot stably clamp the basket in the motion process.
In view of the above, it is necessary to develop a lifting module for holding a wafer cassette to solve the above problems.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide the lifting module for holding the wafer box, the possibility of more configuration space for clamping the wafer basket is realized through the horizontally-split motion clamping device, the clamping device has the function of automatic resetting, and the basket cannot be deviated or shaken in the moving process or the transfer process of the basket. To achieve the above objects and other advantages in accordance with the present invention, there is provided a lift module for holding a wafer cassette, comprising:
the mounting seat is provided with a motor mounting area and a lifting device mounting area, the motor mounting area is fixedly provided with a variable speed motor mechanism, and the mounting seat is fixedly connected with a supporting plate;
the vertical lifting mechanism is fixedly arranged in the lifting device installation area, the upper end part of the vertical lifting mechanism is fixedly connected with an installation plate, and the vertical lifting mechanism drives the installation plate to move along the vertical direction;
the short-range cylinder mechanism is fixed at the upper end part of the mounting plate;
the split sliding structure is fixed on the mounting plate and is positioned below the short-distance cylinder mechanism; and
the split bracket structure comprises a first bracket component and a second bracket component which is the same as and symmetrically arranged with the first bracket component, a connecting block is connected between the first bracket component and the second bracket component, and the first bracket component and the second bracket component are both movably connected with the second bracket component of the connecting block;
the vertical lifting mechanism comprises a mounting box, the mounting box is mounted on the mounting base along the vertical direction, a lifting cylinder is mounted in the mounting box, the lifting cylinder is provided with a first lifting rod and a second lifting rod, and one end of each of the first lifting rod and the second lifting rod extends upwards through the mounting box;
the short-distance cylinder mechanism comprises a short-distance cylinder, the short-distance cylinder is provided with a telescopic piston rod, and the tail end of the piston rod is fixedly connected to the connecting block;
the mounting plate is fixedly connected with a strip-shaped slide rail, the strip-shaped slide rail is connected with a first sliding assembly in a sliding mode and a second sliding assembly which is identical to the first sliding assembly in structure and symmetrically arranged, the first sliding assembly comprises a first sliding block, the first sliding block is movably connected to the strip-shaped slide rail in a clamping mode, the first bracket assembly comprises a first L-shaped connecting block, the first L-shaped connecting block is fixed to the first sliding block, a first L-shaped crank is fixedly connected to one side face of the first L-shaped connecting block, one end of the first L-shaped crank is movably connected to the connecting block, and a first bracket is fixedly connected to the other side face of the first L-shaped connecting block.
Preferably, the slide of two symmetries is seted up on mounting box a surface, and the rigid coupling has two fixed strips on the lift cylinder, the fixed strip passes the slide just is higher than the mounting box surface.
Preferably, the upper end portion rigid coupling of mounting box has first sensor, first sensor is used for detecting the initial position of folio bracket structure, is located first sensor below rigid coupling has the second sensor, the second sensor is used for detecting folio bracket structure terminal point position.
Preferably, the variable speed motor mechanism comprises a variable speed motor, a motor fixing plate is fixedly connected to the lower end of the variable speed motor, the motor fixing plate is fixed on the mounting seat, and a gear is fixedly connected to an output shaft of the variable speed motor.
Preferably, the short-distance cylinder mechanism comprises a motor mounting seat, an induction sheet is fixed on the motor mounting seat, and the short-distance cylinder is provided with a telescopic piston rod.
Preferably, a first limit column group and a second limit column group are arranged on two sides of the first sliding block and are fixed on the mounting plate.
Preferably, the upper surface of the first bracket is provided with at least a first mounting groove and a second fixing groove.
Compared with the prior art, the invention has the beneficial effects that:
(1) The vertical lifting mechanism is arranged, so that the holding lifting module can be controlled to move up and down, and the related requirements of the production process are met;
(2) The clamping lifting module can be driven to horizontally move on the transmission equipment through the variable speed motor mechanism, so that the clamping lifting module can be controlled to move the clamped lifting basket loaded with the wafers to the corresponding equipment;
(3) The split sliding structure and the split bracket structure are controlled to move through the short-range cylinder mechanism, so that the first bracket and the second bracket are opened and closed to stably clamp the lifting basket, and the first bracket and the second bracket always clamp the lifting basket in the moving process of the integral clamping lifting module;
(4) First mounting groove and second fixed slot have been seted up at least on first bracket and the second bracket upper surface and have been made, can press from both sides tight two hand-baskets simultaneously on first bracket and the second bracket, can a hand-basket of centre gripping according to first bracket of demand and second bracket, and the mounting groove plays a spacing effect to the hand-basket moreover.
Drawings
Fig. 1 is a front view of a lifting module holding a wafer cassette according to the present invention;
FIG. 2 is a schematic diagram of a three-dimensional structure of a vertical lifting mechanism of a lifting module holding a wafer cassette according to the present invention;
FIG. 3 is a schematic three-dimensional structural view of a split sliding structure of a lifting module holding a wafer cassette according to the present invention, in a downward motion working state;
FIG. 4 is a schematic three-dimensional structure of a split-frame structure of a lift module for holding a wafer cassette according to the present invention;
fig. 5 is a schematic diagram of a three-dimensional explosion structure of the connection of the first crank and the second crank of the wafer pod according to the present invention.
1. A mounting seat; 2. a slider; 3. a support plate; 4. a variable speed motor mechanism; 5. a vertical lifting mechanism; 6. mounting a plate; 7. a short-range cylinder mechanism; 8. a split sliding structure; 9. a split bracket structure; 41. a variable speed motor; 42. a motor fixing plate; 43. a gear; 51. mounting a box; 52. a lifting cylinder; 53. a fixing strip; 54. a first lifting rod; 55. a second lifting rod; 57. a first sensor; 58. a second sensor; 71. a motor mounting seat; 72. a short-range cylinder; 73. a piston rod; 74. an induction sheet; 821. A first slider; 822. a first limit column group; 823. a second limit column group; 831. a second slider; 832. a third limit column group; 834. a fourth limit column group; 93. connecting blocks; 911. a first L-shaped connecting block; 912. a first L-shaped crank; 913. a first bracket; 9131. a first mounting groove; 9132. a second fixing groove; 921. a second L-shaped connecting block; 922. a second L-shaped crank; 923. a second connecting member; 925. a first connecting member; 926. a second bracket; 9231. a second C-shaped clamp spring; 9232. a second rotating shaft; 9233. a second bearing; 9234. a second connection hole; 9251. a first C-shaped clamp spring is fixed; 9252. a first rotating shaft; 9253. a first bearing; 9254. a first connection hole.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1 and 3, the mounting base 1 is provided with a motor mounting area and a lifting device mounting area, the motor mounting area is fixedly provided with a speed change motor mechanism 4, the mounting base 1 is fixedly connected with a support plate 3, and the support plate 3 supports a vertical lifting mechanism 5 and the speed change motor mechanism 4 which are mounted on the mounting base 1; the vertical lifting mechanism 5 is fixedly arranged in the lifting device installation area, the upper end part of the vertical lifting mechanism 5 is fixedly connected with an installation plate 6, and the vertical lifting mechanism 5 drives the installation plate 6 to move along the vertical direction; the short-distance cylinder mechanism 7 is fixed at the upper end part of the mounting plate 6, and the short-distance cylinder mechanism 7 mainly controls the oppositely-opened bracket structure 9, so that the oppositely-opened bracket structure 9 drives the oppositely-opened sliding structure 8 to perform sliding motion; the split sliding structure 8 is fixed on the mounting plate 6, and the split sliding structure 8 is positioned below the short-distance cylinder mechanism 7; run from opposite directions bracket structure 9, run from opposite directions bracket structure 9 and be fixed in and run from opposite directions sliding structure 8 on, run from opposite directions bracket structure 9 and include first bracket component and with the same and the symmetrical second bracket component that sets up of first bracket component structure, be connected with connecting block 93 between first bracket component and the second bracket component, and first bracket component and second bracket component all with connecting block 93 swing joint.
Referring to fig. 2, the vertical lifting mechanism 5 includes a mounting box 51, the mounting box 51 is installed on the mounting base 1 along the vertical direction, and the mounting box 51 is a cavity, the mounting box 51 is used for installing a lifting cylinder 52, and the lifting cylinder 52 can move up and down in the cavity of the mounting box 51, the lifting cylinder 52 is provided with a first lifting rod 54 and a second lifting rod 55, one end of each of the first lifting rod 54 and the second lifting rod 55 extends upwards through the mounting box 51, and one end of each of the first lifting rod 54 and the second lifting rod 55 is fixed on the mounting box 51 through a nut, when the lifting cylinder 52 moves, the whole lifting cylinder 52 moves up and down on the mounting box 51, two symmetrical slideways are provided on one surface of the mounting box 51, two fixing strips 53 are fixedly connected to the lifting cylinder 52, the fixing strips 53 pass through the slideways and are higher than the surface of the mounting box 51, the mounting plate 6 is fixedly connected to the fixing strips 53, so that the lifting cylinder 52 moves down, and when the lifting cylinder 52 moves up, the mounting plate 6 is driven to move down.
Further, a first sensor 57 is fixedly connected to the upper end of the mounting box 51, the first sensor 57 is used for detecting the initial position of the split bracket structure 9, and a second sensor 58 is fixedly connected to the lower side of the first sensor 57, and the second sensor 58 is used for detecting the end position of the split bracket structure 9.
Referring to fig. 2, variable speed motor mechanism 4 includes variable speed motor 41, variable speed motor 41 lower extreme rigid coupling has motor fixed plate 42, motor fixed plate 42 is fixed in on mount pad 1, fixedly connected with gear 43 on variable speed motor 41's the output shaft, and gear 43 meshes with the rack on the transmission equipment mutually, and when variable speed motor 41 rotated to the drive is held lifting module and is followed on the transmission equipment rack motion, the equal rigid coupling in ground both sides of mount pad 1 has slider 2, when holding lifting module horizontal motion, moves on corresponding slide rail through slider 2.
Referring to fig. 3, the short-range cylinder mechanism 7 includes a motor mounting base 71, a short-range cylinder 72 and a sensing piece 74 are fixed on the motor mounting base 71, when the mounting plate 6 is at an initial position, the sensing piece 74 is located at the position of the first sensor 57, when the mounting plate 6 moves downward to a final position, the sensing piece 74 is located at the position of the second sensor 58, the short-range cylinder 72 is provided with a telescopic piston rod 73, the tail end of the piston rod 73 is fixedly connected to the connecting block 93, when the short-range cylinder 72 drives the piston rod 73 to move downward, the connecting block 93 moves downward under the downward pushing force of the piston rod 73, when the short-range cylinder 72 drives the piston rod 73 to move upward, the piston rod 73 pulls upward at this time, and the connecting block 93 moves upward.
Referring to fig. 3, a bar-shaped sliding rail 81 is fixedly connected to the mounting plate 6, a first sliding assembly and a second sliding assembly are connected to the bar-shaped sliding rail 81 in a sliding mode, the first sliding assembly is identical in structure and symmetrically arranged, the first sliding assembly slides along the sliding rail towards one end of the sliding rail, the second sliding assembly slides along the other end of the sliding rail, and therefore the first sliding assembly and the second sliding assembly slide in opposite directions. First slip subassembly includes first slider 821, first slider 821 movable joint is on bar slide rail 81, be located first slider 821 both sides and install first spacing post group 822 and second spacing post group 823, first spacing post group 822 and second spacing post group 823 are two cylinders, two cylinders are fixed in the both sides of slide rail respectively, make first slider 821 only can slide between first spacing post group 822 and second spacing post group 823, first spacing post group 822 and second spacing post group 823 all are fixed in on mounting panel 6, second slip subassembly includes second slider 831, be located second slider 831 both sides and install third spacing post group 832 and fourth spacing post group 834, make second slider 831 only can slide between third spacing post group 832 and fourth spacing post group 834.
Referring to fig. 4-5, the split bracket structure 9 includes a first bracket component and a second bracket component that is the same as and symmetrical to the first bracket component, a connecting block 93 is connected between the first bracket component and the second bracket component, and both the first bracket component and the second bracket component are movably connected with the connecting block 93. The first bracket component comprises a first L-shaped connecting block 911, a first L-shaped connecting block 911 side face is fixedly connected with a first L-shaped crank 912, one end of the first L-shaped crank 912 is movably connected onto a connecting block 93 through a first connecting piece 925, the first connecting piece 925 comprises a first bearing 9253, the first bearing 9253 is placed into a first connecting hole 9254, a first rotating shaft 9252 is arranged in the first bearing 9253 in a penetrating manner, one end of the first rotating shaft 9252 penetrates through a first surface of the connecting block 93, the first rotating shaft 9252 is fixed on the first C-shaped clamping spring, the other end of the first rotating shaft 9252 penetrates through another surface of the connecting block 93, the first rotating shaft 9251 is fixed on the first L-shaped connecting block through a first C-shaped clamping spring, the other end of the first rotating shaft 9252 penetrates through a second rotating shaft 92923, the other end of the first L-shaped connecting block is fixed on the first L-shaped connecting block 911, the second connecting block 9232 comprises a second bearing 9233, the second rotating shaft 9233 is positioned in a second connecting hole 34, the second rotating shaft 9232 penetrates through another surface of the second rotating shaft 9232, the second rotating shaft 9232 is fixed on the second rotating shaft 9232, the second rotating shaft 9232 is fixed on the first connecting block 921 through a second rotating shaft 9231, and the second rotating shaft 9231, the second rotating shaft 9232, the second rotating shaft 9132 is fixed on the second rotating shaft 9232, the second rotating shaft 91921, and the second rotating shaft 9132, the second connecting block 921 through a second L-shaped clamping spring, and the second rotating shaft 9232 fixed on the second rotating shaft 9232, the second connecting block 921, therefore, the second bracket 926 and the first bracket 913 form a clasping structure, and when the connecting lugs at the two ends of the basket are respectively placed in the first mounting grooves 9131 of the second bracket 926 and the first bracket 913, the basket is not easy to shake during the movement process.
The working principle is as follows: before clamping the basket loaded with wafers, firstly, the short-distance air cylinder 72 controls the piston rod 73 to move upwards so as to drive the connecting block 93 to move upwards, the connecting block 93 is movably connected with a first L-shaped crank 912 and a second L-shaped crank 922, the other end of the first L-shaped crank 912 is movably connected with a first L-shaped connecting block 911, the first L-shaped connecting block 911 is fixed on the first slider 821, the other end of the second L-shaped crank 922 is movably connected with a second L-shaped connecting block 922, the second L-shaped connecting block 921 is fixed on the second slider 831, therefore, when the connecting block 93 moves upwards, the first L-shaped crank 912 and the second L-shaped crank 922 both rotate upwards, therefore, the first L-shaped crank 912 applies a force to the first slider 821 towards one end of the slide rail, the first slider 821 slides towards one end of the slide rail, the second L-shaped crank 831 applies a force to the second slider 831 towards the other end of the slide rail, and the second L-shaped crank 831 applies a force to the second slider 831 towards the other end of the slide rail 831, thereby when the first L-shaped crank 912 slides towards the other end of the first slider 821, the first slider 821 and the second slider 821 move downwards, thereby, when the first L-shaped crank 912 moves away from the first slider 821 and the first slider 73, the second slider 70, the first slider 70 move downwards, and the second slider 73 move towards the first slider 821 move towards the other end of the second slider 921, and the second slider 821 move, and the first slider 921 move downwards, thereby, when the first slider 70 move, the first slider 73 and the first slider 821 move downwards, and the second slider 70 move downwards, and the second slider 70 move towards the second slider 921 move horizontally, and the first slider 73, and the slider 70 move, thereby, and the slider 70 move towards the slider 70 move downwards, the second L-shaped crank 922 applies a force to the second slider 831 in a direction away from the other end of the slide rail, so that the second slider 831 slides in a direction away from the other end of the slide rail, the first bracket 913 is fixed to the first slider 821, and the second bracket 926 is fixed to the second slider 831, so that the first bracket 913 slides in a direction away from the one end of the slide rail following the first slider 821, and the second bracket 926 slides in a direction away from the other end of the slide rail following the second slider 831, so that the first bracket 913 and the second bracket 926 are in a state of clamping and holding the basket.
The number of apparatuses and the scale of the process described herein are intended to simplify the description of the present invention. Applications, modifications and variations of the present invention will be apparent to those skilled in the art.
While embodiments of the invention have been described above, it is not limited to the applications set forth in the description and the embodiments, which are fully applicable in various fields of endeavor to which the invention pertains, and further modifications may readily be made by those skilled in the art, it being understood that the invention is not limited to the details shown and described herein without departing from the general concept defined by the appended claims and their equivalents.
Claims (7)
1. The utility model provides a lift module of wafer box embraces which characterized in that includes:
the mounting base (1), the said mounting base (1) has installation areas of electrical machinery and lifting gear, the said electrical machinery installation area is fitted with the variable speed electrical machinery mechanism (4) fixedly, the rigid coupling has shoe plates (3) on the mounting base (1);
the vertical lifting mechanism (5) is fixedly arranged in the lifting device installation area, the upper end part of the vertical lifting mechanism (5) is fixedly connected with an installation plate (6), and the vertical lifting mechanism (5) drives the installation plate (6) to move along the vertical direction;
the short-range cylinder mechanism (7), the short-range cylinder mechanism (7) is fixed on the upper end part of the mounting plate (6);
the split sliding structure (8) is fixed on the mounting plate (6) and is positioned below the short-distance cylinder mechanism (7); and
the split bracket structure (9) is fixed on the split sliding structure (8), the split bracket structure (9) comprises a first bracket component and a second bracket component which is the same as the first bracket component in structure and symmetrically arranged, a connecting block (93) is connected between the first bracket component and the second bracket component, and the first bracket component and the second bracket component are both movably connected with the connecting block (93);
the vertical lifting mechanism (5) comprises a mounting box (51), the mounting box (51) is mounted on the mounting base (1) along the vertical direction, a lifting cylinder (52) is mounted in the mounting box (51), the lifting cylinder (52) is provided with a first lifting rod (54) and a second lifting rod (55), and one ends of the first lifting rod (54) and the second lifting rod (55) extend upwards through the mounting box (51);
the short-distance cylinder mechanism (7) comprises a short-distance cylinder (72), the short-distance cylinder (72) is provided with a telescopic piston rod (73), and the tail end of the piston rod (73) is fixedly connected to the connecting block (93);
the mounting plate (6) is fixedly connected with a strip-shaped sliding rail (81), the strip-shaped sliding rail (81) is connected with a first sliding assembly and a second sliding assembly which is identical to the first sliding assembly in structure and symmetrically arranged, the first sliding assembly comprises a first sliding block (821), the first sliding block (821) is movably connected to the strip-shaped sliding rail (81) in a clamped mode, the first bracket assembly comprises a first L-shaped connecting block (911), the first L-shaped connecting block (911) is fixed to the first sliding block (821), a first L-shaped crank (912) is fixedly connected to one side face of the first L-shaped connecting block (911), one end of the first L-shaped crank (912) is movably connected to the connecting block (93), and a first bracket (913) is fixedly connected to the other side face of the first L-shaped connecting block (911).
2. The lifting module for embracing a wafer cassette according to claim 1, wherein two symmetrical slideways are formed on one surface of the mounting box (51), two fixing strips (53) are fixedly connected to the lifting cylinder (52), and the fixing strips (53) penetrate through the slideways and are higher than the surface of the mounting box (51).
3. The lift module for holding a wafer cassette according to claim 1, wherein a first sensor (57) is fixed to an upper end of the mounting box (51), the first sensor (57) is used for detecting an initial position of the split-bracket structure (9), and a second sensor (58) is fixed below the first sensor (57), the second sensor (58) is used for detecting an end position of the split-bracket structure (9).
4. The lifting module for holding the wafer cassette according to claim 1, wherein the variable speed motor mechanism (4) comprises a variable speed motor (41), a motor fixing plate (42) is fixedly connected to a lower end of the variable speed motor (41), the motor fixing plate (42) is fixed to the mounting base (1), and a gear (43) is fixedly connected to an output shaft of the variable speed motor (41).
5. The lifting module for holding the wafer cassette according to claim 1, wherein the short-distance cylinder mechanism (7) comprises a motor mounting base (71), and an induction sheet (74) is fixed on the motor mounting base (71).
6. The lifting module for embracing a wafer cassette according to claim 5, wherein a first limit column set (822) and a second limit column set (823) are installed at two sides of the first slider (821), and the first limit column set (822) and the second limit column set (823) are fixed on the mounting plate (6).
7. The lifting module for holding a wafer cassette of claim 6, wherein the first bracket (913) has at least a first mounting groove (9131) and a second fixing groove (9132) formed on an upper surface thereof.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911144224.9A CN110931407B (en) | 2019-11-20 | 2019-11-20 | Lifting module for holding wafer box |
| TW109114472A TWI769451B (en) | 2019-11-20 | 2020-04-30 | Lifting module holding wafer cassette |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911144224.9A CN110931407B (en) | 2019-11-20 | 2019-11-20 | Lifting module for holding wafer box |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110931407A CN110931407A (en) | 2020-03-27 |
| CN110931407B true CN110931407B (en) | 2022-10-18 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911144224.9A Active CN110931407B (en) | 2019-11-20 | 2019-11-20 | Lifting module for holding wafer box |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN110931407B (en) |
| TW (1) | TWI769451B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112768391B (en) * | 2020-12-31 | 2022-12-20 | 上海至纯洁净***科技股份有限公司 | Mechanical clamping device is listened in wafer box linkage |
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| JP3066986B2 (en) * | 1991-04-30 | 2000-07-17 | 沖電気工業株式会社 | Wet processing apparatus and wet processing method |
| TW457623B (en) * | 1997-12-15 | 2001-10-01 | Semitool Inc | Semiconductor processing apparatus having lift and tilt mechanism |
| TWI625814B (en) * | 2012-07-27 | 2018-06-01 | 荏原製作所股份有限公司 | Workpiece transport device |
| JP6294130B2 (en) * | 2014-04-04 | 2018-03-14 | 株式会社荏原製作所 | Inspection device |
| JP6368567B2 (en) * | 2014-07-10 | 2018-08-01 | 東京エレクトロン株式会社 | Transfer robot changing device and transfer robot changing method |
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- 2019-11-20 CN CN201911144224.9A patent/CN110931407B/en active Active
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- 2020-04-30 TW TW109114472A patent/TWI769451B/en active
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09270449A (en) * | 1996-03-29 | 1997-10-14 | Mitsubishi Electric Corp | Wafer cassette transport jig |
| CN106601659A (en) * | 2016-12-30 | 2017-04-26 | 上海新阳半导体材料股份有限公司 | Novel wafer transfer device |
| CN108565237A (en) * | 2018-05-30 | 2018-09-21 | 郑州恒之博新能源科技有限公司 | A kind of clamping lifting type transloading equipment |
| CN209544303U (en) * | 2019-04-26 | 2019-10-25 | 昆山基侑电子科技有限公司 | Cassette clamps arm displacement drive mechanism |
| CN111081617A (en) * | 2019-11-12 | 2020-04-28 | 至微半导体(上海)有限公司 | Device for high-speed transmission and automatic offset reset of chip product lifting basket |
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| Publication number | Publication date |
|---|---|
| TW202046436A (en) | 2020-12-16 |
| CN110931407A (en) | 2020-03-27 |
| TWI769451B (en) | 2022-07-01 |
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Effective date of registration: 20210713 Address after: 170 Zihai Road, Minhang District, Shanghai Applicant after: PURE & CLEAN PROCESS SYSTEMS Co.,Ltd. Applicant after: ZHIWEI SEMICONDUCTOR (SHANGHAI) Co.,Ltd. Address before: 170 Zihai Road, Minhang District, Shanghai Applicant before: PURE & CLEAN PROCESS SYSTEMS Co.,Ltd. |
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