CN110907138A - Air floatation detection tower with supporting points arranged at center of mass - Google Patents
Air floatation detection tower with supporting points arranged at center of mass Download PDFInfo
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- CN110907138A CN110907138A CN201911227461.1A CN201911227461A CN110907138A CN 110907138 A CN110907138 A CN 110907138A CN 201911227461 A CN201911227461 A CN 201911227461A CN 110907138 A CN110907138 A CN 110907138A
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Abstract
The invention provides an air flotation detection tower with a supporting point arranged at the center of mass, which comprises a vibration isolation foundation, a plurality of supporting platforms, a plurality of air springs, a plurality of tower outward extending supporting plates and a tower body, wherein the tower body is arranged at the center of the vibration isolation foundation, the supporting platforms are uniformly arranged on the vibration isolation foundation and are arranged around the tower body, the upper end of each supporting platform is provided with the air spring, the air spring on the same supporting platform supports one tower outward extending supporting plate, all the tower outward extending supporting plates are arranged at the center of mass of the tower body in no-load, the tower outward extending supporting plates and the supporting platforms are arranged in a one-to-one correspondence manner, four layers of platforms are arranged in the tower body from top to bottom, and holes are formed in the centers of all the platforms. The air floatation detection tower with the supporting point arranged at the center of mass has the advantages that the bottom support is omitted, the center of mass support is changed into the center of mass support, the manufacturing cost is low, the height of the tower body is allowed to be larger than 8m, and the vibration isolation effect can reach the 3.12 mu m/s standard of VC-E with the micro-vibration index.
Description
Technical Field
The invention belongs to the technical field of air spring vibration isolation, and particularly relates to an air floatation detection tower with a supporting point arranged at a mass center.
Background
With the rapid development of scientific technology, ultra-precision machining and ultra-precision measurement technologies are more and more emphasized, and vibration isolation of machining equipment and detection equipment is also a popular research. The air spring has the best vibration isolation effect and mature vibration isolation technology, and related researches are more. On the other hand, due to engineering requirements, the aspheric reflection primary mirror is increasingly widely applied, the relative aperture of the aspheric reflection primary mirror is also increasingly large, and the traditional offline horizontal detection method needs to adjust the processing primary mirror from a processing horizontal state to a vertical state, so that the primary mirror is deformed due to the self gravity, and the detection reliability is influenced. The two reasons prompt the vertical detection equipment adopting the air spring for vibration isolation, namely the detection tower.
At present, the technical development of domestic detection towers is relatively slow, the traditional detection tower has a single structure, and the basic structure is as follows: the steel tower body is arranged above the ground, the vibration isolation foundation and the air springs are arranged below the ground, and the vibration isolation foundation and the air springs form a vibration isolation system of the detection tower. Because the vibration isolation system is arranged at the bottom of the tower, and the top of the tower is far away from the vibration isolation system, under the action of the far-end vibration amplification effect, the higher the tower body is, the greater the distance between the top of the tower and the vibration isolation system is, the greater the vibration amplitude is, and the tower top is very easy to be disturbed by wind. Therefore, the traditional detection tower has poor vibration isolation effect on the tower top, and the tower body is too high, so that the tower top cannot meet the micro-vibration index VC-E (3.12 mu m/s) standard, and the height of the tower body is limited. On the other hand, the vibration isolation foundation of the traditional detection tower supports the whole tower body, and the air spring supports the vibration isolation foundation, so that the load borne by the air spring is large, and the air spring with high performance is needed, so that the cost is increased. Moreover, under the condition that the tower body is higher, in order to ensure that the whole tower body is stable and does not overturn, the mass of the designed vibration isolation platform is greatly increased, so that the air springs fully distributed at the bottom of the platform cannot meet the bearing requirement, and the design fails.
Disclosure of Invention
In view of this, the present invention provides an air flotation detection tower with a support point disposed at the center of mass, so as to overcome the disadvantages of high cost, limited height of the tower body, and poor vibration isolation effect of the tower top in the conventional detection tower, and further meet the vibration isolation requirement of ultra-precise measurement.
In order to achieve the purpose, the technical scheme of the invention is realized as follows:
the utility model provides an air supporting detection tower of strong point at barycenter department, includes that vibration isolation foundation, a plurality of brace table, a plurality of air spring, a plurality of tower stretch backup pad and body of the tower outward, the body of the tower install at the center of vibration isolation foundation, a plurality of brace table evenly set up the vibration isolation foundation on and center on the body of the tower arrange, every the upper end of brace table all install air spring, and the air spring on same brace table supports a tower and stretches the backup pad outward, all the tower stretch the backup pad outward and all set up the barycenter department of body of the tower when no-load, the tower stretch backup pad outward and brace table one-to-one setting the body of the tower in from the top down have four layers of platform, and all the centers of platform all open porosel.
Furthermore, the tower body is built by a plurality of stand columns, horizontal cross beams and diagonal rods.
Further, the vibration isolation foundation is of a rectangular structure, and the four support tables are arranged at the four corners of the vibration isolation foundation.
Furthermore, the number of the air springs is eight, and every two air springs are in a group and are respectively arranged on the four support tables.
Furthermore, each tower overhanging support plate comprises two flat plates which are arranged at a right angle and are integrally arranged, and each flat plate is supported by an air spring.
Further, the height of the support platform is determined by the height of the center of mass of the tower body and the type of the air spring when the tower body is unloaded.
Furthermore, the diameter of a hole formed in the center of each of the four layers of the platforms is gradually increased from top to bottom.
Furthermore, the bottom space of the tower body is a structure with one open side and the rest closed by steel.
Compared with the prior art, the air floatation detection tower with the supporting point arranged at the center of mass has the following advantages:
according to the air floatation detection tower with the support point arranged at the mass center, the air spring is supported at the mass center of the tower body, the mechanical balance principle is fully applied, the far-end vibration amplification effect is effectively reduced, the vibration isolation capability of the air spring to the tower top is increased, the height of the tower body is allowed to be greatly increased, and the tower height can reach more than 8 m; through canceling the bottom support, change into the support of barycenter department, reduced the load that air spring received, be favorable to higher tower structural design, reduce the cost of whole testing tower simultaneously.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate an embodiment of the invention and, together with the description, serve to explain the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic perspective view of an air floatation detecting tower with a supporting point at the center of mass according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a middle tower body of an air floatation detecting tower with a support point arranged at a center of mass according to an embodiment of the present invention;
FIG. 3 is an air spring layout;
FIG. 4 is a mass distribution graph;
FIG. 5 is a diagram of modal analysis of the air flotation detection tower.
Description of reference numerals:
1-platform, 2-tower body, 3-tower extension supporting plate, 4-vibration isolation foundation, 5-supporting table, 6-air spring, 7-upright post, 8-horizontal beam and 9-diagonal rod.
Detailed Description
It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict.
The present invention will be described in detail below with reference to the embodiments with reference to the attached drawings.
As shown in fig. 1-5, an air flotation detection tower with a supporting point arranged at the center of mass comprises a vibration isolation foundation 4, a plurality of supporting tables 5, a plurality of air springs 6, a plurality of supporting plates 3 extending out of the tower and a tower body 2, wherein the tower body 2 is arranged at the center of the vibration isolation foundation 4, the supporting tables 5 are uniformly arranged on the vibration isolation foundation 4 and surround the tower body 2, each supporting table 5 is provided with an air spring 6 at the upper end, the air spring 6 on the same supporting table 5 supports one supporting plate 3 extending out of the tower, all the supporting plates 3 extending out of the tower are arranged at the center of mass of the tower body 2 in no-load, the supporting plates extending out of the tower and the supporting tables 5 are arranged in a one-to-one correspondence manner, the tower body 2 is provided with four layers of platforms 1 from top to bottom, and the centers of all the platforms 1 are.
The vibration isolation foundation 4 is a rectangular structure, and the four support tables 5 are arranged at four corners of the vibration isolation foundation 4. The number of the air springs 6 is eight, and every two air springs are in a group and are respectively arranged on the four support tables 5. Each tower overhang support plate 3 includes two flat plates arranged at a right angle and integrally provided, and each flat plate is supported by an air spring 6.
The bottom space of body of the tower 2 is one side opening, and the remaining face is with steel confined structure for conveniently placing by survey piece and frock.
An example of a specific detection tower is given below:
the bottom of the detection column was designed to be 8.90m square, the top of the column to be 6.55m square, and the height of the column to be 14.5 m. The detection tower is mainly formed by welding square steel pipes, and the tower body 2 is formed by building a plurality of upright posts 7, a plurality of horizontal cross beams 8 and a plurality of diagonal rods 9; wherein the upright post is 7.300 × 300 × 10 square tube, the horizontal beam is 8.250 × 250 × 8 square tube, and the diagonal rod is 9.100 × 100 × 6 square tube, as shown in detail in fig. 2. Set up four layers testing platform in order to satisfy the different detection light path demands of user in the tower, each layer testing platform is 4.5m, 8.4m, 11m, 14.5m apart from ground height in proper order, four layers the diameter from the top down crescent of the inspection hole that platform 1's center was seted up, inspection hole diameter down be 1m, 2m, 3m, 3.2m from the top in proper order, satisfy the detection light path through calculating the aperture size and pass through.
The detection tower is designed into a symmetrical form, so that the vibration of the tower in the horizontal direction is consistent, the modes in different directions have consistency, and the realization of micro-vibration indexes is facilitated.
As shown in FIG. 4, the test tower is designed with a tested piece and tooling load of 10t and a test equipment and tooling load of 1t, and the total weight of the air floatation tower is 117.81t and the total weight of 128.81 t. And (3) natural frequency calculation of the vibration isolation system of the detection tower:
In the formula (f)0vFor natural frequency, K, in the vertical direction of the air-floating vibration isolation platformVAnd m is the total mass of the air floatation tower and the load.
In the formula (f)0hFor the horizontal natural frequency, K, of the air-floating vibration isolation platformHAnd m is the total mass of the air floatation tower and the load.
As shown in figure 5, the modal analysis of the detection tower is calculated by special software, and the figure shows that the first-order natural frequency is 14.7Hz, the rigidity of the detection tower is high, the natural frequency is far greater than the working frequency, resonance is not easy to cause, the system is stable, the use requirement is met, and the vibration isolation effect can reach the 3.12 mu m/s standard of VC-E of the micro-vibration index.
The mass center of the detection tower is 4.342m away from the tower bottom, the outward extending support plate 3 of the detection tower is designed at the position, the mass center of the detection tower is 204mm below the outward extending support plate under the full-load floating working condition, the mass center position meets the requirement of the overall stability of the detection tower, and simultaneously, the mass center coincides with the rigidity center of the air spring, and the micro-vibration design is optimized and reasonable.
The height of the support platform 5 is determined by the height of the center of mass of the tower body 2 when the tower body is empty and the type of the air spring 6. Four corners around the detection tower are provided with support tables with height 3.202m, two HX780 type air springs are mounted on each support table, and the arrangement is as shown in FIG. 3, and the air springs are loaded in total: 160t is multiplied by 20 t/machine, and the total weight of the carried detection tower, experimental equipment, a tested piece and a tool is 128.81t, so the carrying requirement is met.
The construction process of the air floatation detection tower with the supporting point arranged at the center of mass is as follows: firstly, a reinforced concrete vibration isolation foundation 4 is built, the length and width of the foundation is 15m, the thickness of the foundation is 3m, the concrete strength grade is C30, 4 support tables 5 are built, and the concrete strength grade of the support tables is C30. The construction of the detection tower is started after the concrete strength reaches a design value, all parts of the detection tower are connected in a welding mode, and the construction process of the detection tower comprises the steps of structural installation below a tower outer support plate → air spring installation → structural installation above the tower outer support plate → installation of a detection platform in the tower. And finally, carrying out gas path installation and control system installation, and carrying out system debugging.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (8)
1. The utility model provides an air supporting detection tower that strong point was established at barycenter department which characterized in that: comprises a vibration isolation foundation (4), a plurality of supporting platforms (5), a plurality of air springs (6), a plurality of tower extending supporting plates (3) and a tower body (2), the tower body (2) is arranged at the center of a vibration isolation foundation (4), a plurality of supporting tables (5) are uniformly arranged on the vibration isolation foundation (4) and are arranged around the tower body (2), an air spring (6) is arranged at the upper end of each supporting table (5), the air spring (6) on the same supporting table (5) supports a tower extension supporting plate (3), all the tower extension supporting plates (3) are arranged at the mass center of the tower body (2) when the tower is in no load, the tower extension supporting plates and the supporting tables (5) are arranged in a one-to-one correspondence manner, four layers of platforms (1) are arranged in the tower body (2) from top to bottom, and the centers of all the platforms (1) are provided with holes.
2. The air floatation detecting tower with the supporting point arranged at the mass center as claimed in claim 1, wherein: the tower body (2) is constructed by a plurality of upright posts (7), a plurality of horizontal cross beams (8) and a plurality of diagonal rods (9).
3. The air floatation detecting tower with the supporting point arranged at the mass center as claimed in claim 1, wherein: the vibration isolation foundation (4) is of a rectangular structure, and the four supporting tables (5) are arranged at the four corners of the vibration isolation foundation (4).
4. The air floatation detecting tower with the supporting point arranged at the mass center as claimed in claim 3, wherein: the number of the air springs (6) is eight, and every two air springs are in a group and are respectively arranged on the four support tables (5).
5. The air floatation detection tower with the supporting point arranged at the mass center as claimed in claim 4, wherein: each tower overhanging support plate (3) comprises two flat plates which are arranged at a right angle and are integrally arranged, and each flat plate is supported by an air spring (6).
6. The air floatation detecting tower with the supporting point arranged at the mass center as claimed in claim 5, wherein: the height of the supporting platform (5) is determined by the height of the mass center of the tower body (2) and the type of the air spring (6) when the tower body is unloaded.
7. The air floatation detection tower with the supporting point arranged at the center of mass according to any one of claims 1 to 6, wherein: the diameter of a hole formed in the center of the four layers of the platforms (1) is gradually increased from top to bottom.
8. The air floatation detecting tower with the supporting point arranged at the mass center as claimed in claim 7, wherein: the bottom space of the tower body (2) is a structure with one open side and the rest closed by steel.
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Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH0674297A (en) * | 1992-08-28 | 1994-03-15 | Ebara Corp | Electromagnetic actuator |
CN103048892A (en) * | 2012-12-19 | 2013-04-17 | 哈尔滨工业大学 | Vibration-isolation platform based on height/horizontal attitude six-dimensional position detection and control |
CN103062582A (en) * | 2012-12-19 | 2013-04-24 | 哈尔滨工业大学 | Air spring vibration isolation platform based on floatation zero position reference and laser auto-collimation measurement |
CN203630384U (en) * | 2013-12-17 | 2014-06-04 | 嘉兴华嶺机电设备有限公司 | Large-size grating manufacturing equipment |
CN106402261A (en) * | 2016-08-08 | 2017-02-15 | 中国电子工程设计院 | Penetration type micro-vibration air spring vibration isolation system |
CN207197761U (en) * | 2017-08-31 | 2018-04-06 | 北京空间飞行器总体设计部 | A kind of micro-vibration source ground survey system containing gravity unloading |
JP3216607U (en) * | 2018-03-30 | 2018-06-07 | 浩 倉林 | Air floating vibration control system |
-
2019
- 2019-12-04 CN CN201911227461.1A patent/CN110907138B/en active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0674297A (en) * | 1992-08-28 | 1994-03-15 | Ebara Corp | Electromagnetic actuator |
CN103048892A (en) * | 2012-12-19 | 2013-04-17 | 哈尔滨工业大学 | Vibration-isolation platform based on height/horizontal attitude six-dimensional position detection and control |
CN103062582A (en) * | 2012-12-19 | 2013-04-24 | 哈尔滨工业大学 | Air spring vibration isolation platform based on floatation zero position reference and laser auto-collimation measurement |
CN203630384U (en) * | 2013-12-17 | 2014-06-04 | 嘉兴华嶺机电设备有限公司 | Large-size grating manufacturing equipment |
CN106402261A (en) * | 2016-08-08 | 2017-02-15 | 中国电子工程设计院 | Penetration type micro-vibration air spring vibration isolation system |
CN207197761U (en) * | 2017-08-31 | 2018-04-06 | 北京空间飞行器总体设计部 | A kind of micro-vibration source ground survey system containing gravity unloading |
JP3216607U (en) * | 2018-03-30 | 2018-06-07 | 浩 倉林 | Air floating vibration control system |
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