CN110850586A

CN110850586A - Control system of laser in galvanometer scanning

Info

Publication number: CN110850586A
Application number: CN201911001030.3A
Authority: CN
Inventors: 张来风
Original assignee: Goertek Inc
Current assignee: Goertek Optical Technology Co Ltd
Priority date: 2019-10-21
Filing date: 2019-10-21
Publication date: 2020-02-28

Abstract

The invention discloses a control system of a laser in galvanometer scanning. The system comprises: the MEMS micro-electromechanical system comprises a timer device, a digital-to-analog conversion device, a laser control device and an MEMS galvanometer; the timer device is used for outputting a trigger signal to the digital-to-analog conversion device, and the laser control device outputs a laser control signal; the laser control device is used for controlling the laser to be turned on and off according to the laser control signal; the digital-to-analog conversion device is used for outputting a driving signal to the MEMS galvanometer under the triggering of the triggering signal; and the MEMS galvanometer is driven by the driving signal to vibrate.

Description

Control system of laser in galvanometer scanning

Technical Field

The invention relates to the technical field of micro-galvanometer control, in particular to a control system of a laser in galvanometer scanning.

Background

The laser scanning technology is a technology developed along with the wide application of technologies such as laser projection, and the galvanometer scanning is a scanning mode which is the most widely applied laser scanning technology. The galvanometer scanning means that the galvanometer drives the reflector to deflect, so as to drive the laser beam to move on a scanning plane for scanning. The mechanical part of the laser scanning device consists of a vibrating mirror which can run in X and Y directions, a reflecting mirror is arranged on the vibrating mirror, and the X and Y directions are matched with each other to deflect different angles so as to drive a laser beam to scan a complete pattern on a scanning plane.

Generally, the galvanometer starts scanning from the upper left corner to the lower right corner to be the last scanning point, then the galvanometer returns to the starting point from the last scanning point, and the operation is repeated to form continuous patterns on the projection surface. The Y-direction drive waveform is generally a sawtooth waveform, and the X-direction drive waveform is a sine wave.

However, the above scanning method has problems in that: in the Y direction, when the galvanometer returns to the starting point of the upper left corner from the last point of the lower right corner, the corresponding driving waveform is the time from the highest point to the lowest point of the sawtooth wave, and interference fringes can be generated on the projection surface due to the fact that the laser is not closed, and visual interference is caused; in the X direction, when the galvanometer is operated to the leftmost end and the rightmost end of the grating, that is, peak points of the sine wave, the change rate of the sine wave is minimum, so that the time for which the laser light is turned on at the position is prolonged, and relatively bright lines appear at the left end and the right end of the grating.

Therefore, in order to avoid interference fringes on the projection plane or bright lines at the left and right ends of the grating, it is necessary to provide a scheme for generating a synchronization signal to control the laser in the galvanometer scanning.

Disclosure of Invention

It is an object of the present invention to provide a new technical solution for controlling a laser in galvanometer scanning.

According to a first aspect of the present invention, there is provided a control system for a laser in galvanometer scanning, the system comprising: the MEMS micro-electromechanical system comprises a timer device, a digital-to-analog conversion device, a laser control device and an MEMS galvanometer;

the timer device is used for outputting a trigger signal to the digital-to-analog conversion device, and the laser control device outputs a laser control signal;

the laser control device is used for controlling the laser to be turned on and off according to the laser control signal;

the digital-to-analog conversion device is used for outputting a driving signal to the MEMS galvanometer under the triggering of the triggering signal;

and the MEMS galvanometer is driven by the driving signal to vibrate.

Optionally, the timer device comprises: a first timer, a second timer, and a third timer;

the first timer is used for outputting a trigger signal to the digital-to-analog conversion device, the second timer and the third timer;

the digital-to-analog conversion device is used for outputting a driving signal in the X direction and a driving signal in the Y direction to the MEMS galvanometer under the triggering of the triggering signal;

the second timer is used for outputting a Y-direction laser control signal to the laser control device according to the trigger signal;

and the third timer is used for outputting an X-direction laser control signal to the laser control device according to the trigger signal.

Optionally, the second timer is configured to: counting the trigger signals;

when the count value reaches a first comparison value, outputting a first Y-direction laser control signal to the laser control device;

when the count value reaches a first overload value, resetting the count value and restarting counting;

and when the count value reaches a first overflow value, outputting a second Y-direction laser control signal to the laser control device.

Optionally, the laser control device is configured to control the laser to be turned off according to the first Y-direction laser control signal; and controlling the laser to be started according to the second Y-direction laser control signal.

Optionally, the third timer is configured to: counting the trigger signals;

when the counting value reaches a second comparison value, outputting a first X-direction laser control signal to the laser control device;

when the count value reaches the second reloading value, resetting the count value and restarting counting;

and when the count value reaches a second overflow value, outputting a second X-direction laser control signal to the laser control device.

Optionally, the laser control device is configured to control the laser to be turned off according to the first X-direction laser control signal; and controlling the laser to be started according to the second X-direction laser control signal.

Optionally, the method further comprises:

and the MCU device is used for pre-storing the discrete value of the driving signal in the X direction and the discrete value of the driving signal in the Y direction.

Optionally, the digital-to-analog conversion device is configured to:

under the triggering of the trigger signal, sequentially reading the discrete value of the driving signal in the X direction and the discrete value of the driving signal in the Y direction from the MCU device;

converting the read discrete value of the driving signal in the X direction into an analog value of the driving signal in the X direction, and converting the discrete value of the driving signal in the Y direction into an analog value of the driving signal in the Y direction;

and outputting the analog value of the driving signal in the X direction and the analog value of the driving signal in the Y direction to the MEMS galvanometer.

Optionally, the MEMS galvanometer includes a driving circuit, configured to convert the driving signal in the X direction and the driving signal in the Y direction into a MEMS vibration signal in the X direction and a MEMS vibration signal in the Y direction, respectively, so that the MEMS galvanometer vibrates in the X direction and the Y direction.

Optionally, the laser control signal is a high level signal or a low level signal.

According to one embodiment of the present disclosure, a trigger signal is output to the digital-to-analog conversion device through a timer device, and the laser control device outputs a laser control signal; the laser control device controls the laser to be turned on and off according to the laser control signal; the digital-to-analog conversion device outputs a driving signal to the MEMS galvanometer under the triggering of the triggering signal; the MEMS galvanometer is driven by the driving signal to vibrate. The problem that the MEMS galvanometer is switched on or switched off when the MEMS galvanometer is operated to a specified position is effectively solved, and the problems of visual interference fringes caused by the rotation of the existing Y-direction MEMS and high brightness of X-direction grating edge lines are avoided.

Other features of the present invention and advantages thereof will become apparent from the following detailed description of exemplary embodiments thereof, which proceeds with reference to the accompanying drawings.

Drawings

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description, serve to explain the principles of the invention.

FIG. 1 is a diagram illustrating a hardware configuration of a MEMS provided by an embodiment of the present invention;

FIG. 2 is a schematic block diagram of a control system of a laser in galvanometer scanning according to a first embodiment of the present invention;

FIG. 3 is a schematic block diagram showing a control system of a laser in galvanometer scanning according to a second embodiment of the present invention;

FIG. 4 shows a schematic diagram of the Y-direction drive signals of an embodiment of the present invention;

fig. 5 shows a schematic diagram of a driving signal in the YX direction of the embodiment of the present invention.

Detailed Description

Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that: the relative arrangement of the components and steps, the numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless specifically stated otherwise.

The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses.

Techniques, methods, and apparatus known to those of ordinary skill in the relevant art may not be discussed in detail but are intended to be part of the specification where appropriate.

In all examples shown and discussed herein, any particular value should be construed as merely illustrative, and not limiting. Thus, other examples of the exemplary embodiments may have different values.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, further discussion thereof is not required in subsequent figures.

< hardware configuration >

Fig. 1 shows a hardware configuration diagram of a micro electro mechanical system.

The MEMS 1000 of the present embodiment includes a MEMS galvanometer 100 and a drive system 200.

A MEMS (Micro-Electro-Mechanical System) galvanometer 100 is a Micro mirror surface that can reflect various lights and the like by rotating rapidly around an axis.

The driving system 200 may be configured to control a driving signal input to the MEMS galvanometer 100, and may be configured to collect a feedback signal output by the MEMS galvanometer 100, perform harmonic analysis on the feedback signal, and adjust the driving signal input to the MEMS galvanometer 100 based on an analysis result.

In one example, the drive system 200 may be as shown in fig. 1, including a processor 210, a memory 220, an interface device 230, a communication device 240, a display device 250, an input device 260, a speaker 270, a microphone 280, and/or the like.

The processor 210 may be a central processing unit CPU, a microprocessor MCU, or the like. The memory 220 includes, for example, a ROM (read only memory), a RAM (random access memory), a nonvolatile memory such as a hard disk, and the like. The interface device 230 includes, for example, a USB interface, a headphone interface, and the like. The communication device 240 may include a short-range communication device, such as any device that performs short-range wireless communication based on short-range wireless communication protocols, such as the Hilink protocol, WiFi (IEEE 802.11 protocol), Mesh, bluetooth, ZigBee, Thread, Z-Wave, NFC, UWB, LiFi, etc., and the communication device 240 may also include a long-range communication device, such as any device that performs WLAN, GPRS, 2G/3G/4G/5G long-range communication. The display device 250 is, for example, a liquid crystal display panel, a touch panel, or the like. Input device 260 may include, for example, a touch screen, a keyboard, a somatosensory input, and the like. A user can input/output voice information through the speaker 270 and the microphone 280.

Although a number of devices are shown for drive system 200 in fig. 1, the present invention may relate to only some of the devices, for example, drive system 200 may relate to only memory 220 and processor 210.

In the above description, the skilled person can design the instructions according to the solutions provided in the present disclosure. How the instructions control the operation of the processor is well known in the art and will not be described in detail herein.

The MEMS illustrated in FIG. 1 is illustrative only and is not intended to limit the present disclosure, its application, or uses in any way.

< example >

The embodiment provides a control system of a laser in galvanometer scanning.

As shown in fig. 2, the control system 2000 of the laser in galvanometer scanning may include: a timer device 2100, a digital-to-analog conversion device 2200, a laser control device 2300, and a MEMS galvanometer 2400.

The timer device 2100 is configured to output a trigger signal to the digital-to-analog conversion device 2200(DAC), and the laser control device 2300 outputs a laser control signal. The laser control device 2300 is configured to control the laser to be turned on or off according to the laser control signal. The digital-to-analog conversion device 2200 is configured to output a driving signal to the MEMS galvanometer 2400 under the triggering of the trigger signal. The MEMS galvanometer 2400 is configured to vibrate under the driving of the driving signal.

Specifically, referring to fig. 3, the timer device 2100 may include: a first timer TIM1, a second timer TIM2, and a third timer TIM 3.

The first timer TIM1, configured to output a trigger signal to the digital-to-analog conversion apparatus 2200, the second timer TIM2, and the third timer TIM 3; the digital-to-analog conversion device 2200 is configured to output a driving signal in an X direction and a driving signal in a Y direction to the MEMS galvanometer 2400 under the triggering of the trigger signal; the second timer TIM2 is configured to output a Y-direction laser control signal to the laser control device 2300 according to the trigger signal; the third timer TIM3 is configured to output an X-direction laser control signal to the laser control device 2300 according to the trigger signal.

It should be noted that, in this embodiment, the first timer TIM1 is configured as a main timer, a clock source of the main timer is an external crystal oscillator of the MCU, and a frequency of an output trigger signal is a frequency multiplied by a Phase Locked Loop (PLL) of the external crystal oscillator. The second timer TIM2 and the third timer TIM3 may be configured as slave timers clocked by the first timer TIM1 at a frequency at which the first timer TIM1 outputs a trigger signal.

The second timer TIM2 is configured to control the laser control device 2300 in the Y-direction, and the third timer TIM3 is configured to control the laser control device 2300 in the X-direction.

Specifically, the second timer TIM2 is configured to count the trigger signal; outputting a first Y-direction laser control signal to the laser control device 2300 when the count value reaches a first comparison value; when the count value reaches a first overload value, resetting the count value and restarting counting; when the count value reaches a first overflow value, a second Y-direction laser control signal is output to the laser control device 2300.

Correspondingly, the laser control device 2300 controls the laser to be turned off according to the first Y-direction laser control signal; and controlling the laser to be started according to the second Y-direction laser control signal.

The third timer TIM3 is configured to count the trigger signal; outputting a first X-direction laser control signal to the laser control device 2300 when the count value reaches a second comparison value; when the count value reaches the second reloading value, resetting the count value and restarting counting; when the count value reaches a second overflow value, a second X-direction laser control signal is output to the laser control device 2300.

Correspondingly, the laser control device 2300 controls the laser to be turned off according to the first X-direction laser control signal; and controlling the laser to be started according to the second X-direction laser control signal.

The MEMS galvanometer 2400 includes a driving circuit, configured to convert the driving signal in the X direction and the driving signal in the Y direction into an MEMS vibration signal in the X direction and an MEMS vibration signal in the Y direction, respectively, so that the MEMS galvanometer 2400 vibrates in the X direction and the Y direction.

In one example, the laser control signal is a high level signal or a low level signal.

For example, if the first Y-direction laser control signal is at a high level, the second Y-direction laser control signal is at a low level. Correspondingly, if the second Y-direction laser control signal is at a high level, the first Y-direction laser control signal is at a low level.

For another example, if the first X-direction laser control signal is at a high level, the second X-direction laser control signal is at a low level. Correspondingly, if the first X-direction laser control signal is at a low level, the second X-direction laser control signal is at a high level.

In one example, the system of this embodiment may further include: and the MCU device is used for pre-storing the discrete value of the driving signal in the X direction and the discrete value of the driving signal in the Y direction.

The digital-to-analog conversion apparatus 2200 is configured to: under the triggering of the trigger signal, sequentially reading the discrete value of the driving signal in the X direction and the discrete value of the driving signal in the Y direction from the MCU device; converting the read discrete value of the driving signal in the X direction into an analog value of the driving signal in the X direction, and converting the discrete value of the driving signal in the Y direction into an analog value of the driving signal in the Y direction; and outputting the analog value of the driving signal in the X direction and the analog value of the driving signal in the Y direction to the MEMS galvanometer 2400.

The operation of the control system 2000 for the laser in galvanometer scanning according to this embodiment will be described with reference to fig. 4 and 5.

As shown in fig. 4, the discrete points in the upper half represent the discrete values of the driving signal in the Y direction, which are stored in the MCU device memory as buf1[16] = {0,1,2,3,4,5,6,7,8,9,10,11,8,6,4,2 }. The solid line in the upper half is an analog value of the drive signal in the Y direction output from the DAC at a certain clock cycle, that is, the drive signal in the Y direction (the drive signal in the Y direction is generally a sawtooth wave). The lower half of the discrete dots represents the count value of the second timer TIM 2.

As shown in fig. 5, the upper half of the discrete points represent subscripts of discrete values of the driving signal in the X direction, and the values are stored in the memory of the MCU device and are denoted as buf2[0] ═ sin (2 × PI 0/16-PI/2); buf2[1] ═ sin (2 × PI 1/16-PI/2); buf2[2] ═ sin (2 × PI 2/16-PI/2); … …, respectively; buf2[15] ═ sin (2 × PI 15/16-PI/2). The solid line in the upper half is an analog value output by the DAC according to a certain clock beat, that is, the driving signal in the X direction, where the discrete value of the driving signal in the X direction is a sine wave. The lower half of the discrete dots represents the count value of the third timer TIM 3.

Principle of generating laser control signal in Y direction:

first, the count initial value of TIM1 is set to 0, the reload value is set to 1, and the update event is valid. The TIM2 is set to count initial value 0, reload value 16, compare value 12, and update event invalid. The DAC is set to the cyclic output.

It should be noted that the reload value means that the counter counts up from 0 to the reload value and then starts counting from 0 again. An update/overflow value refers to the next clock-generated update/overflow event after the counter reaches the reload value. The comparison value means that the counter starts counting from 0, when the counter counts to the comparison value, the pin is triggered to output, if the pin outputs a high level, the counter continues counting, and when the counter counts to a heavy load value, the pin outputs a reverse, if the pin outputs a low level, so that a complete PWM signal is output. And after the overload value is reached, the counter starts counting from 0 again, and the steps are circulated in sequence.

Specifically, when the 1 st overflow event (a trigger signal) of the TIM1 arrives, the count value of the TIM1 returns to 0, and the overflow event triggers the DAC to convert the value corresponding to buf1[0] (i.e., 0) into an analog quantity and output the analog quantity. Meanwhile, the TIM2 increases its count value by 1, changing the count value from 0 to 1.

When the TIM1 arrives at the 2 nd overflow event (a trigger signal), the TIM1 counts back to 0, and the overflow event triggers the DAC to output buf1[1] (i.e., 1); at the same time, the TIM2 count is incremented by 1, and the operations are repeated in sequence from 1 to 2.

When the TIM1 arrives at the 12 th overflow event (a trigger signal), the TIM1 counts back to 0, and the overflow event triggers the DAC to output buf1[11] (i.e., 11); meanwhile, the count value of TIM2 changes from 11 to 12, and reaches the first comparison value, triggering the output of the first Y-direction laser control signal, e.g., outputting a high level signal to laser control device 2300.

When the 16 th overflow event (a trigger signal) of the TIM1 arrives, the TIM1 counts back to 0, and the overflow event triggers the DAC to output buf1[15] (i.e., 2); meanwhile, the count value of the TIM2 changes from 15 to 16, reaching the first reload value of the TIM2, and when the next pulse arrives, the count value starts to count again from 0, i.e., the count value of the next TIM2 is 0.

When the TIM1 arrives at the 17 th overflow event (a trigger signal), the TIM1 counts back to 0, and the overflow event triggers the DAC to output buf1[0] (i.e., 0); at the same time, the count value of TIM2 reaches the first overflow value, triggering the output of a second Y-direction laser control signal, e.g., a low signal, to laser control device 2300, and the count value starts counting again from 0. To this end, a complete first PWM signal (laser control signal in Y direction) is output.

In this example, laser control device 2300 detects the first PWM signal, turns the laser on when a low level signal is detected, and turns the laser off when a high level signal is detected.

Repeating the above process can continuously output the driving signal in the Y direction and the first PWM signal, and the first PWM signal changes in level at the fixed position of the driving signal in the Y direction, thereby realizing synchronization of the two.

Principle of generating laser control signal in X direction:

the method for generating the laser control signal in the X direction is different from the method for generating the laser control signal in the Y direction in that the laser control signal in the X direction needs to generate two second PWM signals within one period of the drive signal in the X direction.

First, the count initial value of TIM1 is set to 0, the reload value is set to 1, and the update event is valid. The TIM3 is set to have an initial count value of 0, a reload value of 7, and a compare value of 1, with the update event being invalid. The DAC is set to the cyclic output.

When the 1 st overflow event (a trigger signal) of the TIM1 arrives, the TIM1 counts back to 0, and the overflow event triggers the DAC to convert the value corresponding to buf2[0] into an analog quantity and output the analog quantity. Meanwhile, the TIM3 increases its count value by 1, changing the count value from 0 to 1.

When TIM 12 nd overflow event (a trigger signal) comes, TIM1 count value returns to 0, and the overflow event triggers DAC to output buf2[1 ]; meanwhile, the count value of TIM3 changes from 1 to 2, reaching the second comparison value, triggering the output of the first X-direction laser control signal, e.g., outputting a high level signal to laser control device 2300.

When the TIM1 comes about the 7 th overflow event (a trigger signal), the TIM1 counts back to 0, and the overflow event triggers the DAC to output buf2[6 ]; meanwhile, the count value of TIM3 changes from 6 to 7, reaching the second reload value of TIM3, and when the next pulse arrives, the count value starts counting again from 0, i.e., the count value of the next TIM3 is 0.

When the 8 th overflow event (a trigger signal) of the TIM1 comes, the TIM1 counts back to 0, and the overflow event triggers the DAC to output buf2[7 ]; at the same time, the count value of TIM3 reaches the second overflow value, triggering the output of a second X-direction laser control signal, e.g., a low signal, to laser control device 2300, and the count value starts to count again from 0.

When TIM1 occurs for 8 th to 16 th overflow events (one trigger), TIM1 repeats the preceding actions and outputs buf2[8] to buf2[15 ]; and outputting a second complete PWM signal twice in one sine wave period to realize synchronous control of the laser.

The laser control device 2300 detects the second PWM signal, turns off the laser when detecting a low level signal, and turns on the laser when detecting a high level signal.

Repeating the above process can continuously output the driving signal in the X direction and the second PWM signal, and the level of the second PWM signal changes at the fixed position of the driving signal in the X direction, so as to realize the synchronization of the two.

The control system 2000 of the laser in galvanometer scanning according to the embodiment has been described above with reference to the drawings and examples, and outputs a trigger signal to the digital-to-analog conversion device 2200 through the timer device 2100, and the laser control device 2300 outputs a laser control signal; the laser control device 2300 controls the on and off of the laser according to the laser control signal; the digital-to-analog conversion device 2200 outputs a driving signal to the MEMS galvanometer 2400 under the triggering of the triggering signal; the MEMS galvanometer 2400 is driven by the driving signal to vibrate. The problem that the MEMS galvanometer 2400 turns on or turns off laser when running to a specified position is effectively solved, and the problems of visual interference fringes caused by the rotation of the existing Y-direction MEMS and high brightness of grating edge lines in the X direction are avoided.

The above embodiments mainly focus on differences from other embodiments, but it should be clear to those skilled in the art that the above embodiments can be used alone or in combination with each other as needed.

The embodiments in the present disclosure are described in a progressive manner, and the same and similar parts among the embodiments can be referred to each other, and each embodiment focuses on the differences from the other embodiments, but it should be clear to those skilled in the art that the embodiments described above can be used alone or in combination with each other as needed. In addition, for the device embodiment, since it corresponds to the method embodiment, the description is relatively simple, and for relevant points, refer to the description of the corresponding parts of the method embodiment. The system embodiments described above are merely illustrative, in that modules illustrated as separate components may or may not be physically separate.

The present invention may be a system, method and/or computer program product. The computer program product may include a computer-readable storage medium having computer-readable program instructions embodied therewith for causing a processor to implement various aspects of the present invention.

The computer readable storage medium may be a tangible device that can hold and store the instructions for use by the instruction execution device. The computer readable storage medium may be, for example, but not limited to, an electronic memory device, a magnetic memory device, an optical memory device, an electromagnetic memory device, a semiconductor memory device, or any suitable combination of the foregoing. More specific examples (a non-exhaustive list) of the computer readable storage medium would include the following: a portable computer diskette, a hard disk, a Random Access Memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), a Static Random Access Memory (SRAM), a portable compact disc read-only memory (CD-ROM), a Digital Versatile Disc (DVD), a memory stick, a floppy disk, a mechanical coding device, such as punch cards or in-groove projection structures having instructions stored thereon, and any suitable combination of the foregoing. Computer-readable storage media as used herein is not to be construed as transitory signals per se, such as radio waves or other freely propagating electromagnetic waves, electromagnetic waves propagating through a waveguide or other transmission medium (e.g., optical pulses through a fiber optic cable), or electrical signals transmitted through electrical wires.

The computer-readable program instructions described herein may be downloaded from a computer-readable storage medium to a respective computing/processing device, or to an external computer or external storage device via a network, such as the internet, a local area network, a wide area network, and/or a wireless network. The network may include copper transmission cables, fiber optic transmission, wireless transmission, routers, firewalls, switches, gateway computers and/or edge servers. The network adapter card or network interface in each computing/processing device receives computer-readable program instructions from the network and forwards the computer-readable program instructions for storage in a computer-readable storage medium in the respective computing/processing device.

The computer program instructions for carrying out operations of the present invention may be assembler instructions, Instruction Set Architecture (ISA) instructions, machine-related instructions, microcode, firmware instructions, state setting data, or source or object code written in any combination of one or more programming languages, including an object oriented programming language such as Smalltalk, C + + or the like and conventional procedural programming languages, such as the "C" programming language or similar programming languages. The computer-readable program instructions may execute entirely on the user's computer, partly on the user's computer, as a stand-alone software package, partly on the user's computer and partly on a remote computer or entirely on the remote computer or server. In the case of a remote computer, the remote computer may be connected to the user's computer through any type of network, including a Local Area Network (LAN) or a Wide Area Network (WAN), or the connection may be made to an external computer (for example, through the Internet using an Internet service provider). In some embodiments, aspects of the present invention are implemented by personalizing an electronic circuit, such as a programmable logic circuit, a Field Programmable Gate Array (FPGA), or a Programmable Logic Array (PLA), with state information of computer-readable program instructions, which can execute the computer-readable program instructions.

Aspects of the present invention are described herein with reference to flowchart illustrations and/or block diagrams of methods, apparatus (systems) and computer program products according to embodiments of the invention. It will be understood that each block of the flowchart illustrations and/or block diagrams, and combinations of blocks in the flowchart illustrations and/or block diagrams, can be implemented by computer-readable program instructions.

These computer-readable program instructions may be provided to a processor of a general purpose computer, special purpose computer, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, create means for implementing the functions/acts specified in the flowchart and/or block diagram block or blocks. These computer-readable program instructions may also be stored in a computer-readable storage medium that can direct a computer, programmable data processing apparatus, and/or other devices to function in a particular manner, such that the computer-readable medium storing the instructions comprises an article of manufacture including instructions which implement the function/act specified in the flowchart and/or block diagram block or blocks.

The computer readable program instructions may also be loaded onto a computer, other programmable data processing apparatus, or other devices to cause a series of operational steps to be performed on the computer, other programmable apparatus or other devices to produce a computer implemented process such that the instructions which execute on the computer, other programmable apparatus or other devices implement the functions/acts specified in the flowchart and/or block diagram block or blocks.

The flowchart and block diagrams in the figures illustrate the architecture, functionality, and operation of possible implementations of systems, methods and computer program products according to various embodiments of the present invention. In this regard, each block in the flowchart or block diagrams may represent a module, segment, or portion of instructions, which comprises one or more executable instructions for implementing the specified logical function(s). In some alternative implementations, the functions noted in the block may occur out of the order noted in the figures. For example, two blocks shown in succession may, in fact, be executed substantially concurrently, or the blocks may sometimes be executed in the reverse order, depending upon the functionality involved. It will also be noted that each block of the block diagrams and/or flowchart illustration, and combinations of blocks in the block diagrams and/or flowchart illustration, can be implemented by special purpose hardware-based systems which perform the specified functions or acts, or combinations of special purpose hardware and computer instructions. It is well known to those skilled in the art that implementation by hardware, by software, and by a combination of software and hardware are equivalent.

Having described embodiments of the present invention, the foregoing description is intended to be exemplary, not exhaustive, and not limited to the embodiments disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments. The terminology used herein is chosen in order to best explain the principles of the embodiments, the practical application, or improvements made to the technology in the marketplace, or to enable others of ordinary skill in the art to understand the embodiments disclosed herein. The scope of the invention is defined by the appended claims.

Claims

1. A control system for a laser in galvanometer scanning, the system comprising: the MEMS micro-electromechanical system comprises a timer device, a digital-to-analog conversion device, a laser control device and an MEMS galvanometer;

and the MEMS galvanometer is driven by the driving signal to vibrate.

2. The system of claim 1, wherein the timer means comprises: a first timer, a second timer, and a third timer;

3. The system of claim 2, wherein the second timer is configured to: counting the trigger signals;

4. The system of claim 3, wherein the laser control device is configured to control the laser to turn off according to the first Y-direction laser control signal; and controlling the laser to be started according to the second Y-direction laser control signal.

5. The system of claim 2, wherein the third timer is configured to: counting the trigger signals;

6. The system of claim 5, wherein said laser control means is configured to control said laser to turn off in response to said first X-direction laser control signal; and controlling the laser to be started according to the second X-direction laser control signal.

7. The system of claim 2, further comprising:

8. The system of claim 7, wherein the digital-to-analog conversion means is configured to:

9. The system of claim 2, wherein the MEMS galvanometer comprises a drive circuit for converting the X-direction drive signal and the Y-direction drive signal into an X-direction MEMS vibration signal and a Y-direction MEMS vibration signal, respectively, to vibrate the MEMS galvanometer in the X-direction and the Y-direction.

10. The system of claim 1, wherein the laser control signal is a high level signal or a low level signal.