CN110849516A - Photoelectric flexible touch sensor and manufacturing method thereof - Google Patents
Photoelectric flexible touch sensor and manufacturing method thereof Download PDFInfo
- Publication number
- CN110849516A CN110849516A CN201910846969.3A CN201910846969A CN110849516A CN 110849516 A CN110849516 A CN 110849516A CN 201910846969 A CN201910846969 A CN 201910846969A CN 110849516 A CN110849516 A CN 110849516A
- Authority
- CN
- China
- Prior art keywords
- light
- auxiliary
- silicon rubber
- flexible
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 239000000463 material Substances 0.000 claims abstract description 28
- 238000005259 measurement Methods 0.000 claims abstract description 5
- 238000002360 preparation method Methods 0.000 claims abstract description 5
- 229920002379 silicone rubber Polymers 0.000 claims description 35
- 239000000758 substrate Substances 0.000 claims description 25
- 229920000742 Cotton Polymers 0.000 claims description 18
- 235000009508 confectionery Nutrition 0.000 claims description 18
- 239000011521 glass Substances 0.000 claims description 12
- 239000011148 porous material Substances 0.000 claims description 11
- 238000003825 pressing Methods 0.000 claims description 9
- 238000001514 detection method Methods 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 7
- 238000011161 development Methods 0.000 claims description 6
- 238000002474 experimental method Methods 0.000 claims description 5
- 238000012360 testing method Methods 0.000 claims description 5
- 238000005516 engineering process Methods 0.000 claims description 4
- 230000000694 effects Effects 0.000 claims description 3
- 239000012535 impurity Substances 0.000 claims description 3
- 239000012466 permeate Substances 0.000 claims description 3
- 238000002791 soaking Methods 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 238000010146 3D printing Methods 0.000 claims description 2
- 239000000654 additive Substances 0.000 claims description 2
- 230000000996 additive effect Effects 0.000 claims description 2
- 238000012545 processing Methods 0.000 claims description 2
- 238000002834 transmittance Methods 0.000 abstract description 3
- 239000004945 silicone rubber Substances 0.000 description 4
- 230000000149 penetrating effect Effects 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000000844 transformation Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L25/00—Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
The invention provides a photoelectric flexible touch sensor and a preparation method thereof. According to the invention, by combining the light transmittance change generated when the flexible base material is extruded by an external force, the size of the contact force can be accurately detected, and the function curve fitting is carried out according to the contact force-light intensity data so as to increase the accuracy and the real-time property of the measurement.
Description
Technical Field
The invention relates to a flexible touch sensor, in particular to a photoelectric flexible touch sensor, which detects the magnitude of contact force according to the light transmittance change of a flexible base material in the sensor and belongs to the technical field of sensors.
Background
Among them, a tactile sensor is currently one of the sensors that has attracted attention. Compared with a flexible touch sensor, the traditional touch sensor has the advantages that the base material is not easy to stretch and compress, and the structure and the measurement precision of the traditional touch sensor are damaged after deformation, so that the application field of the traditional touch sensor is greatly limited. However, in order to overcome various disadvantages of the conventional tactile sensor, the flexible tactile sensor employs a base material having good ductility and maintaining its physical structure and characteristics after deformation, so that the flexible tactile sensor has been widely researched and can be flexibly applied to the fields of robots, electronic skins, wearable devices, and the like.
According to the knowledge of the applicant, the touch sensor technology for detecting the contact force at home and abroad is mature, but the technology still has the following defects: the photoelectric sensor for detecting the contact force is mainly used for realizing the detection purpose by designing an internal mechanical structure (for example, a baffle is arranged in the sensor or an elastic sensitive element is adopted), and the photoelectric sensor has a complex internal structure and is difficult to miniaturize and process, so that the application range of the photoelectric sensor is limited.
Disclosure of Invention
The invention aims to: aiming at the defects in the prior art, the invention provides a photoelectric flexible touch sensor, which adopts a flexible base material as a sensor main body, realizes the detection of contact force by detecting the light intensity change after penetrating through the flexible base material in the sensor, and can be flexibly applied to the fields of robot grippers and the like after being processed by utilizing an MEMS technology, as shown in figure 1.
In order to achieve the above purpose, the invention adopts the technical scheme that:
designing a photoelectric flexible touch sensor, which comprises a light sensing module, a flexible substrate, a light source, a development board, an adjustable stabilized voltage supply module, an auxiliary device and a glass sheet;
the flexible base material is made of silicon rubber, is filled with pores and is opaque and vaporous, and can gradually recover a transparent state when being extruded by external force;
the glass sheets are 2 transparent glass sheets with the thickness of 20mm by 0.5mm, and are symmetrically arranged on the upper side and the lower side of the flexible substrate so as to clamp the flexible substrate between the two glass sheets;
the light sensing module is fixed in the auxiliary pressure head, is a VL6180X light sensor and converts the collected light signals into electric signals;
the auxiliary device is composed of an auxiliary pressure head and an auxiliary platform, the auxiliary pressure head is U-shaped and is bonded below the pressure head of the universal measuring machine, a through hole is formed in the middle of the bottom of the auxiliary pressure head and is used for installing a light sensor, and a light collector arranged in the middle of the light sensor extends out of the through hole; the auxiliary platform is arranged on the pressure platform of the universal measuring machine and is a hollow five-sided cube, the light source is arranged in the auxiliary platform, the flexible base material is arranged on the upper surface of the auxiliary platform, a through hole is formed in the middle of the upper surface of the auxiliary platform and used for leading out the light source, and a through groove for leading out a light source line is formed in the side surface of the auxiliary platform;
the development board is electrically connected with the light sensor and is used for processing data acquired by the light sensor and outputting 5V direct current voltage;
the adjustable voltage-stabilized power supply module is used for supplying power to the light sensor, and adjusting the received 5V direct-current voltage output by the development board to 2.8V direct-current voltage to supply power to the light sensor module;
the light source is a DC12V patch light strip cut to a length of 50mm to serve as the light source.
Furthermore, the flexible base material adopts cotton candy as an additive to make pores for the flexible base material.
Further, the flexible substrate has dimensions of 15mm by 3mm, and a mold is made for the substrate using 3D printing techniques.
A preparation method of a photoelectric flexible touch sensor comprises the following steps:
Further, in order to increase the accuracy and real-time performance of detection, function fitting is carried out on contact force-light intensity data with contact force less than 45N, and the result of the fitting function is f (x) a1*exp(-((x-b1)/c1)2) Wherein a is1=3813,b1=36.49,c1=29.15。
Description of the drawings:
FIG. 1 is a schematic representation of the use of the flexible tactile sensor of the present invention.
FIG. 2 is a light transmittance test chart of the flexible substrate according to the present invention.
FIG. 3 is a diagram of a process for making a flexible substrate according to the present invention.
Fig. 4 is a schematic structural view of the auxiliary device in the present invention, wherein fig. 4.a is a schematic structural view of the auxiliary ram, and fig. 4.b is a schematic structural view of the auxiliary platform.
FIG. 5 is a diagram of the experimental environment in the present invention.
Fig. 6 is a schematic view of the installation of the photoelectric sensor in the present invention.
FIG. 7 is a graph of the function fit of the present invention, wherein FIG. 7.a is a graph of the relationship of contact force to light intensity, and FIG. 7.b is a graph of the function fit of contact force to light intensity.
The specific implementation method comprises the following steps:
the embodiment provides an optoelectronic flexible touch sensor, which has the following principle: when the surface of the flexible base material is extruded, a recess is generated, the internal pore space of the base material is continuously reduced, and the whole base material gradually recovers a transparent state along with the continuous increase of the contact force. The light source is arranged below the flexible substrate, and the light sensor is arranged above the flexible substrate. The intensity of light after penetrating through the flexible base material is measured in real time through the light sensing module, and the light signal is directly output as a light intensity numerical value with the unit of Lux through a computer. The light transmission test is shown in FIG. 2.
This example uses Ecoflex00-50 model silicone rubber from Smooth-on corporation as the material for the flexible substrate, which model silicone rubber can be cured at room temperature. Considering the solubility of the cotton candy used in the silicone rubber, the loose cotton candy 6 is pressed into a thin sheet of about 1mm in thickness by applying a pressure of 40N to 50N. A 0.2g cotton candy sheet was spread in a mold 7, and silicone rubber was dropped into the mold from above the center of the mold. After the silicon rubber completely permeates into the cotton candy sheet, putting the cotton candy sheet into a vacuum machine, and pumping out air to eliminate impurity holes in the silicon rubber. And taking out the silicon rubber after the silicon rubber is completely solidified in the vacuum machine, and soaking the silicon rubber in warm water 9 at 60 ℃ to ensure that the cotton candy in the silicon rubber is completely dissolved and flows out along with the pores. And taking out the silicon rubber, placing the silicon rubber in the air, and completing the preparation of the flexible substrate 8 after the redundant moisture in the pores of the silicon rubber is completely volatilized. The manufacturing process is shown in fig. 3.
The universal measuring machine 12 is used for providing pressure in the gravity direction. During the experiment, a dark space is needed to be established to reduce the influence of external light on the experiment effect. Adopt paster lamp area as light emitting component, adopt VL6180X sensor as light sensing module. First, an experimental environment as shown in fig. 5 is created, which includes a notebook computer 14, a universal testing machine, and a dark indoor environment. The manufactured electro-optical flexible tactile sensor 13 was placed on a universal measuring machine, and auxiliary devices as shown in fig. 4 were designed to mount the tape strip 22, the flexible substrate 20, and the VL6180X sensor 19, including an auxiliary ram 18 and an auxiliary platform 21. The auxiliary platform 21 shown in fig. 6 is first placed on the pressure platform 23 of the multimeter. The paster lamp area 22 is installed to work platform internally mounted, and glass piece and flexible substrate sample 20 are placed in proper order to the upper surface. The purpose of the glass sheet is to ensure that the lower surface of the flexible substrate 20 is flat and does not affect the light intensity of the light source. The VL6180X sensor 19 is placed in the auxiliary ram 18 as shown in figure 6 and the auxiliary ram 18 is bonded under the multimeter ram 17. The auxiliary pressure head 18 is used for installing the VL6180X sensor 19 and ensuring that the flexible base material 20 is uniformly stressed when the universal measuring machine is pressed down.
After the detection device is installed, the pressure is set through the universal measuring machine online system. In order to ensure the accuracy of measurement, the pressure is superposed, namely the pressure is not returned to the initial state after the pressure is finished each time, and the next pressure is continuously set. The pressure level set in the experiment rises exponentially. And recording the output value of the VL6180X sensor after each pressing stabilization. The relationship between the contact force applied to the flexible substrate and the detected intensity of light after penetrating the flexible substrate is shown in FIG. 7. a.
As can be seen from fig. 7.a, the initial light intensity is 689Lux, and when the applied pressure is less than 45N, the light intensity rises significantly each time the contact force is increased; when the intensity is more than 45N, the light intensity fluctuates up and down at 2685Lux and tends to be stable. It shows that the flexible substrate gradually returns to the transparent state when the contact force is increased, and the flexible substrate completely returns to the transparent state when the contact force is larger than 45N. To increase the accuracy and real-time of detection, a function fit was made to the contact force-light intensity data for contact forces less than 45N, as shown in fig. 7. b. The result of the fitting function is f (x) a1*exp(-((x-b1)/c1)2). Wherein a is1=3813,b1=36.49, c1=29.15。。
In addition to the above embodiments, the present invention may have other embodiments. All technical solutions formed by adopting equivalent substitutions or equivalent transformations fall within the protection scope of the claims of the present invention.
Claims (5)
1. An electro-optical flexible tactile sensor, comprising: the device comprises a light sensing module, a flexible substrate, a light source, a development board, an adjustable voltage-stabilized power supply module, an auxiliary device and a glass sheet;
the flexible base material is made of silicon rubber, is filled with pores and is opaque and vaporous, and can gradually recover a transparent state when being extruded by external force;
the glass sheets are 2 transparent glass sheets with the thickness of 20mm by 0.5mm, and are symmetrically arranged on the upper side and the lower side of the flexible substrate so as to clamp the flexible substrate between the two glass sheets;
the light sensing module is fixed in the auxiliary pressure head, is a VL6180X light sensor and converts the collected light signals into electric signals;
the auxiliary device is composed of an auxiliary pressure head and an auxiliary platform, the auxiliary pressure head is U-shaped and is bonded below the pressure head of the universal measuring machine, a through hole is formed in the middle of the bottom of the auxiliary pressure head and is used for installing a light sensor, and a light collector arranged in the middle of the light sensor extends out of the through hole; the auxiliary platform is arranged on the pressure platform of the universal measuring machine and is a hollow five-sided cube, the light source is arranged in the auxiliary platform, the flexible base material is arranged on the upper surface of the auxiliary platform, a through hole is formed in the middle of the upper surface of the auxiliary platform and used for leading out the light source, and a through groove for leading out a light source line is formed in the side surface of the auxiliary platform;
the development board is electrically connected with the light sensor and is used for processing data acquired by the light sensor and outputting 5V direct current voltage;
the adjustable voltage-stabilized power supply module is used for supplying power to the light sensor, and adjusting the received 5V direct-current voltage output by the development board to 2.8V direct-current voltage to supply power to the light sensor module;
the light source is a DC12V patch light strip cut to a length of 50mm to serve as the light source.
2. The electro-optic flexible tactile sensor according to claim 1, wherein: the flexible base material adopts cotton candy as an additive to make pores for the flexible base material.
3. The electro-optic flexible tactile sensor according to claim 1, wherein: the flexible substrate is 15mm 3mm in size, and a mold is made for the substrate by a 3D printing technology.
4.A method for manufacturing the photoelectric flexible tactile sensor according to claim 1, wherein: the method comprises the following steps:
step 1, preparing a flexible base material, preparing 0.2g of cotton candy, applying pressure of 40N-50N to press loose cotton candy into a sheet with the thickness of 1mm, flatly paving the cotton candy sheet in a mold, dropping silicon rubber into the mold from the upper part of the center of the mold, and after the silicon rubber completely permeates into the cotton candy sheet, putting the mold into a vacuum machine to pump out air so as to eliminate impurity holes in the silicon rubber; taking out the silicon rubber after the silicon rubber is completely solidified in the vacuum machine, and soaking the silicon rubber in warm water at 60 ℃ to ensure that the cotton candy in the silicon rubber is completely dissolved and flows out along with the pores; taking out the silicon rubber, placing the silicon rubber in the air, and completing the preparation of the flexible base material after the excessive moisture in the pores of the silicon rubber is completely volatilized;
step 2, establishing an experimental environment, wherein during the experimental period, a dark space needs to be established to reduce the influence of external light on the experimental effect, a patch lamp strip is used as a light-emitting element, and a VL6180X sensor is used as a light sensing module; comprises a notebook computer and a universal measuring machine, which are placed in a dark indoor environment;
step 3, placing the manufactured flexible base material on a universal testing machine, and preparing an auxiliary device for mounting the paster lamp strip, the flexible base material and the VL6180X sensor, wherein the auxiliary device comprises an auxiliary pressure head and an auxiliary platform; firstly, placing an auxiliary platform on a pressure platform of a universal measuring machine, installing a patch lamp belt in a working platform, sequentially placing a glass sheet and a flexible substrate sample on the upper surface of the working platform, placing a light sensor in an auxiliary pressure head, and bonding the auxiliary pressure head below the pressure head of the universal measuring machine;
step 4, after the detection device is installed, setting the pressure through an online system of a universal measuring machine; in order to ensure the accuracy of measurement, the pressure is pressed down in a pressure superposition mode, namely the pressure is not returned to the initial state after each pressing down is finished, and the next pressing pressure is continuously set; the pressure set in the experiment rises in an exponential function; and recording the output numerical value of the light sensor after the pressing is stable each time.
5. The method for manufacturing an electro-optical flexible tactile sensor according to claim 4, wherein: in order to increase the detection accuracy and real-time performance, the contact force-light intensity data with the contact force less than 45N is subjected to function fitting, and the result of the fitting function is f (x) a1*exp(-((x-b1)/c1)2) Wherein a is1=3813,b1=36.49,c1=29.15。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910846969.3A CN110849516B (en) | 2019-09-09 | 2019-09-09 | Photoelectric flexible touch sensor and manufacturing method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910846969.3A CN110849516B (en) | 2019-09-09 | 2019-09-09 | Photoelectric flexible touch sensor and manufacturing method thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
CN110849516A true CN110849516A (en) | 2020-02-28 |
CN110849516B CN110849516B (en) | 2021-07-02 |
Family
ID=69594803
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201910846969.3A Active CN110849516B (en) | 2019-09-09 | 2019-09-09 | Photoelectric flexible touch sensor and manufacturing method thereof |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN110849516B (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112229553A (en) * | 2020-10-26 | 2021-01-15 | 华中科技大学 | Flexible touch sensor based on light attenuation, array and preparation method thereof |
CN114910199A (en) * | 2022-05-09 | 2022-08-16 | 北京纳米能源与***研究所 | Touch sensor, preparation method and information acquisition method |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3638338A1 (en) * | 1986-11-10 | 1988-05-19 | Enguvu Ag Baar | MOTION MEASURING DEVICE |
CN1571920A (en) * | 2000-08-31 | 2005-01-26 | 株式会社东京大学Tlo | Optical tactile sensor |
CN102032964A (en) * | 2009-09-29 | 2011-04-27 | 张美超 | Pressure sensitive film and using method thereof |
JP2014153169A (en) * | 2013-02-07 | 2014-08-25 | Kyushu Institute Of Technology | Pressure measuring device |
CN106164635A (en) * | 2014-04-14 | 2016-11-23 | 富士胶片株式会社 | Stress determination method, stress determination component and stress determination device |
CN106662491A (en) * | 2014-06-03 | 2017-05-10 | 学校法人冲绳科学技术大学院大学学园 | System and method for obtaining force based on photoelasticity |
CN107357061A (en) * | 2017-09-07 | 2017-11-17 | 京东方科技集团股份有限公司 | Pressure sensor and pressure detection method |
CN108240799A (en) * | 2016-12-26 | 2018-07-03 | 柯尼卡美能达株式会社 | Changing sensor and deformation quantity measuring method |
-
2019
- 2019-09-09 CN CN201910846969.3A patent/CN110849516B/en active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3638338A1 (en) * | 1986-11-10 | 1988-05-19 | Enguvu Ag Baar | MOTION MEASURING DEVICE |
CN1571920A (en) * | 2000-08-31 | 2005-01-26 | 株式会社东京大学Tlo | Optical tactile sensor |
CN102032964A (en) * | 2009-09-29 | 2011-04-27 | 张美超 | Pressure sensitive film and using method thereof |
JP2014153169A (en) * | 2013-02-07 | 2014-08-25 | Kyushu Institute Of Technology | Pressure measuring device |
CN106164635A (en) * | 2014-04-14 | 2016-11-23 | 富士胶片株式会社 | Stress determination method, stress determination component and stress determination device |
CN106662491A (en) * | 2014-06-03 | 2017-05-10 | 学校法人冲绳科学技术大学院大学学园 | System and method for obtaining force based on photoelasticity |
CN108240799A (en) * | 2016-12-26 | 2018-07-03 | 柯尼卡美能达株式会社 | Changing sensor and deformation quantity measuring method |
CN107357061A (en) * | 2017-09-07 | 2017-11-17 | 京东方科技集团股份有限公司 | Pressure sensor and pressure detection method |
Non-Patent Citations (1)
Title |
---|
曹建国等: "电子皮肤触觉传感器研究进展与发展趋势", 《哈尔滨工业大学学报》 * |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112229553A (en) * | 2020-10-26 | 2021-01-15 | 华中科技大学 | Flexible touch sensor based on light attenuation, array and preparation method thereof |
CN112229553B (en) * | 2020-10-26 | 2024-06-04 | 华中科技大学 | Flexible touch sensor based on light attenuation, array and preparation method thereof |
CN114910199A (en) * | 2022-05-09 | 2022-08-16 | 北京纳米能源与***研究所 | Touch sensor, preparation method and information acquisition method |
CN114910199B (en) * | 2022-05-09 | 2023-08-18 | 北京纳米能源与***研究所 | Touch sensor, preparation method and information acquisition method |
Also Published As
Publication number | Publication date |
---|---|
CN110849516B (en) | 2021-07-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN110849516B (en) | Photoelectric flexible touch sensor and manufacturing method thereof | |
CN106197772B (en) | Flexible pressure sensor and preparation method thereof | |
CN108161994B (en) | Multi-modal touch sensing device | |
CN109406012B (en) | Flexible piezoelectric three-dimensional touch sensor array and preparation method thereof | |
CN206192984U (en) | Quality of water temperature, PH and conductivity sensor | |
CN109373964B (en) | Flatness intelligent detection device | |
CN203432737U (en) | MEMS pressure transducer | |
CN103344377A (en) | Capacitive barometric sensor of micro electro mechanical system | |
CN110285898A (en) | Pliable pressure sensing device and its manufacturing method based on carbon black dust-free paper | |
CN106768508A (en) | A kind of gel capacitance type sensor and method for measuring plantar pressure and dynamic change | |
Peng et al. | High sensitivity capacitive pressure sensor with bi-layer porous structure elastomeric dielectric formed by a facile solution based process | |
CN106197253B (en) | A kind of graphene detecting element for the subtle shape changing detection of apparatus casing | |
CN109259891A (en) | A kind of electronic skin and preparation method thereof measuring pressure | |
CN203416570U (en) | Alignment assembly machine | |
CN110108393A (en) | A kind of flexibility piezoresistance sensor | |
CN108072389B (en) | A kind of wearable health monitoring sensor manufacturing process of bionical attaching type | |
CN111786590A (en) | Friction nanometer generator capable of detecting temperature and pressure simultaneously and flexible sensor | |
CN103344183A (en) | Sugar size detection device and method | |
CN204177507U (en) | One is novel flushes mould resistive ceramic pressure sensor | |
CN206300606U (en) | Suitable for the integrating device of geotextiles strain measurement | |
CN109959476A (en) | A kind of sucked type pressure sensor and preparation method thereof | |
CN201569623U (en) | Device for testing maximum static friction coefficient on surface of rod piece | |
CN106323512B (en) | Method for packaging diversified piezoelectric sensors by using heat-sensitive hydrophobic elastic high polymer material | |
CN105509937A (en) | Pressure sensor, pressure detection method and manufacturing process | |
CN108393793A (en) | A kind of free sticky single side polishing Workpiece carrier device of aspirated-air type |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |