CN110846154A - 一种oled有机蒸镀设备防着板清洗剂及应用 - Google Patents
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Abstract
本发明提供了一种OLED有机蒸镀设备防着板清洗剂及应用,介绍了配比、制作和应用,其目的在于克服现有清洗技术的不足,即导致清洗后的防着板存在很多肉眼不可见的残留有机物(通过显微镜紫外灯可见),形成particle源的问题,本发明提供一种OLED有机蒸镀设备防着板清洗剂及应用,既能确保该类蒸镀防着板彻底清洗干净,无微观的有机残留,从而减少设备运行过程中出现particle的风险,又可以保证防着板材质清洗过程中不受损害,提高设备使用寿命,降低采购成本。
Description
技术领域
本发明涉及一种OLED有机蒸镀设备防着板清洗剂及应用。
背景技术
随着面板显示技术的不断发展更迭,传统的电子管、液晶晶体管显示技术逐步成熟,基于有机发光二极管(Organic Light Emitting Diode,OLED) 作为一种新型的纯固体显示技术,具备之前的技术优势,并具有独特的自发光、超轻薄、响应快、宽视角等优点被广泛关注,OLED显示技术已被广泛的研究、生产。
OLED显示屏中有机发光层的制备,通常是采用真空蒸镀技术,即在真空腔体设备内,通过加热坩埚中的蒸镀材料,使其蒸发并沉积在目标基板上。其中涉及到有机蒸镀过程中防着板使用一段时间后,表面吸附的有机物逐渐累积,形成particle,所以需要定期对其进行拆卸清洗。图1所示,现有清洗方法主要是通过纯吡咯烷酮等有机溶剂浸泡去除,清洗后的防着板存在很多肉眼不可见的残留有机物(通过显微镜紫外灯可见),装入设备后形成particle,造成玻璃基板报废。因此研发一种彻底去除有机膜的清洗剂尤为重要。而到目前为止,尚未有关于此类清洗剂的相关文献报道。
发明内容
本发明的目的在于提供一种OLED有机蒸镀设备防着板清洗剂及应用,以解决上述背景技术中提出的问题。
为实现上述目的,本发明提供如下技术方案:一种OLED有机蒸镀设备防着板清洗剂及应用,以重量份计,该清洗剂包含以下组分:
有机酮类溶剂 40~60份
有机胺类溶剂 15~20份
有机酯类溶剂 10~15份
有机砜、亚砜类溶剂 10~15份;
其中,所述有机酮类溶剂为丙酮、苯基甲基甲酮、N-甲基吡咯烷酮、N-乙基吡咯烷酮的一种或两种以上的组合。
其中,所述的有机胺类溶剂为一乙醇胺、二乙醇胺、三乙醇胺、N,N-二甲基甲酰胺的一种或两种以上的组合;
其中,所述有机酯类溶剂为乙酸乙酯、乙酸丁酯、乙二酸乙二酯的一种或两种以上的组合;
其中,所述有机砜、亚砜类溶剂为二甲砜、苯乙砜、二乙基砜、二苯基砜、环丁砜的一种或两种以上的组合。
优选的,所述清洗剂,以重量百分比计,包括如下组分:
N-甲基吡咯烷酮 55份
N,N-二甲基甲酰胺 15份
一乙醇胺 5份
乙酸乙酯 15份
二甲砜 10份。
优选的,一种OLED有机蒸镀设备防着板的清洗剂的制备方法,包括:
按上述的重量份,取各种组分依次加入搅拌釜内,其中搅拌速度控制在30~50转/分钟,搅拌釜夹套内使用冷却水进行冷却,温度控制在40度以下,常温缓慢搅拌30min后制得清洗剂。
优选的,在温度40~60℃的条件下,将有机蒸镀设备防着板在所述清洗剂中浸泡30~60min,去除防着板表面的有机污染物;所述温度为50℃;所述浸泡时间为60min。
与现有技术相比,本发明的有益效果是:本发明的清洗剂为中性有机溶剂配方,利用有机溶剂对蒸镀设备防着板附着的有机污染物快速溶解,使得污染物脱离防着板表面,图2所示,通过微观紫外灯观察,有机污染物彻底去除,同时防着板的腐蚀小,该方法使用成本低,清洗效果彻底。
附图说明
图1为本传统方法使用纯吡咯烷酮浸泡除膜。
图2为按实施例浸泡防着板进行除膜。
具体实施方式
下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。
本发明提供一种技术方案:一种OLED有机蒸镀设备防着板清洗剂及应用,以重量份计,该清洗剂包含以下组分:
有机酮类溶剂 40~60份
有机胺类溶剂 15~20份
有机酯类溶剂 10~15份
有机砜、亚砜类溶剂 10~15份;
其中,所述有机酮类溶剂为丙酮、苯基甲基甲酮、N-甲基吡咯烷酮、N-乙基吡咯烷酮的一种或两种以上的组合。
其中,所述的有机胺类溶剂为一乙醇胺、二乙醇胺、三乙醇胺、N,N-二甲基甲酰胺的一种或两种以上的组合;
其中,所述有机酯类溶剂为乙酸乙酯、乙酸丁酯、乙二酸乙二酯的一种或两种以上的组合。
其中,所述有机砜、亚砜类溶剂为二甲砜、苯乙砜、二乙基砜、二苯基砜、环丁砜的一种或两种以上的组合。
所述清洗剂,以重量百分比计,包括如下组分:
N-甲基吡咯烷酮 55份
N,N-二甲基甲酰胺 15份
一乙醇胺 5份
乙酸乙酯 15份
二甲砜 10份。
一种OLED有机蒸镀设备防着板的清洗剂的制备方法,包括:
按权利要求2中的重量份,取各种组分依次加入搅拌釜内,其中搅拌速度控制在30~50转/分钟,搅拌釜夹套内使用冷却水进行冷却,温度控制在40度以下,常温缓慢搅拌30min后制得清洗剂。
一种OLED有机蒸镀设备防着板的清洗剂的应用,在温度40~60℃的条件下,将有机蒸镀设备防着板在所述清洗剂中浸泡30~60min,去除防着板表面的有机污染物;所述温度为50℃;所述浸泡时间为60min。
实施例:
取N-甲基吡咯烷酮55kg、N,N-二甲基甲酰胺15kg、一乙醇胺5kg、乙酸乙酯15kg、二甲砜10kg,依次加入搅拌釜内,其中搅拌速度控制在30转/分钟,搅拌釜夹套内使用冷却水进行冷却,温度控制在40度以下,常温缓慢搅拌30min后制得清洗剂。
在60℃条件下,使用上述成分的清洗剂对蒸镀设备防着板进行60min的浸泡,使得有机污染物彻底去除,通过微观紫外灯观察,表面无肉眼可见污染物残留。
尽管已经示出和描述了本发明的实施例,对于本领域的普通技术人员而言,可以理解在不脱离本发明的原理和精神的情况下可以对这些实施例进行多种变化、修改、替换和变型,本发明的范围由所附权利要求及其等同物限定。
Claims (4)
3.根据权利要求1所述的一种OLED有机蒸镀设备防着板清洗剂及应用,其特征是:一种OLED有机蒸镀设备防着板的清洗剂的制备方法,包括:
按权利要求2中的重量份,取各种组分依次加入搅拌釜内,其中搅拌速度控制在30~50转/分钟,搅拌釜夹套内使用冷却水进行冷却,温度控制在40度以下,常温缓慢搅拌30min后制得清洗剂。
4.根据权利要求1所述的一种OLED有机蒸镀设备防着板的清洗剂的应用,其特征是:在温度40~60℃的条件下,将有机蒸镀设备防着板在所述清洗剂中浸泡30~60min,去除防着板表面的有机污染物;所述温度为50℃;所述浸泡时间为60min。
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CN108424818A (zh) * | 2017-02-14 | 2018-08-21 | 东友精细化工有限公司 | 掩模清洗液组合物 |
CN109415798A (zh) * | 2017-06-26 | 2019-03-01 | Agc株式会社 | 真空蒸镀用的掩模的清洗方法和冲洗组合物 |
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CN112474656A (zh) * | 2020-12-10 | 2021-03-12 | 四川富乐德科技发展有限公司 | 一种有机蒸镀源陶瓷坩埚洗净再生方法 |
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