CN110836641B - Method and equipment for detecting three-dimensional size of special-shaped surface microstructure of part - Google Patents
Method and equipment for detecting three-dimensional size of special-shaped surface microstructure of part Download PDFInfo
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- CN110836641B CN110836641B CN201911166413.6A CN201911166413A CN110836641B CN 110836641 B CN110836641 B CN 110836641B CN 201911166413 A CN201911166413 A CN 201911166413A CN 110836641 B CN110836641 B CN 110836641B
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- 238000000034 method Methods 0.000 title claims description 16
- 230000003287 optical effect Effects 0.000 claims abstract description 22
- 238000001514 detection method Methods 0.000 claims abstract description 21
- 238000005516 engineering process Methods 0.000 claims abstract description 6
- 238000012545 processing Methods 0.000 claims abstract description 6
- 238000005286 illumination Methods 0.000 claims description 4
- 238000005259 measurement Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000003491 array Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/22—Measuring arrangements characterised by the use of optical techniques for measuring depth
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention relates to a detection method and detection equipment for three-dimensional dimensions of a special-shaped surface microstructure of a part, wherein the detection method comprises the steps of S1, photographing the special-shaped surface microstructure; s2, measuring the two-dimensional size of the special-shaped surface microstructure; s3, scanning the special-shaped surface microstructure and recording scanned distance data; s4, processing the distance data in the step S3 to obtain the height or depth; the detection equipment comprises a frame, a workbench surface, an XY horizontal moving platform, a vertical support and a Z-axis moving assembly, wherein a CCD camera assembly is arranged on the vertical support, and a distance measuring assembly is arranged on the Z-axis moving assembly. The plane size of the special-shaped surface microstructure is accurately measured by a photographing technology, and the height or depth of the special-shaped surface microstructure is accurately measured by a one-dimensional optical ranging sensor, so that the three-dimensional size of the special-shaped surface microstructure of the part is accurately measured; automatic focusing is realized, and the automation degree of the equipment is improved.
Description
Technical Field
The invention relates to the technical field of high-precision detection equipment, in particular to a detection method and detection equipment for three-dimensional dimensions of a special-shaped surface microstructure of a part.
Background
Along with the development of technology, parts are developed towards small micro-sizes, and corresponding to some precise equipment, some small micro-parts have complex special-shaped surface structures, and the parts with the special-shaped surface micro-structures (functional surfaces) are widely applied to various high-end equipment, such as medical nail holders, optical aspheric micro-lens arrays and the like. Taking a medical nail propping seat as an example, one end of the nail propping seat is hinged with a nail pressing plate and a nail channel, the nail pressing plate presses a suture needle in the nail channel to penetrate through skin at two sides of a wound until the suture needle propping seat surface is in a special-shaped groove microstructure, and the special-shaped groove microstructure on the nail propping seat surface bends the suture needle to suture the wound. The quality of the wound suturing depends on the anastomotic and matching precision of the nail propping seat, the nail pressing plate and the nail channel, such as the distance precision from the joint of the nail propping seat and the nail pressing plate to the special-shaped groove microstructure on the surface of the nail propping seat, the depth precision of the special-shaped groove microstructure on the surface of the nail propping seat and the like. Therefore, it is necessary to perform high-precision detection of the three-dimensional size of the abutment seat, with the required detection precision being of the order of micrometers, so as to ensure the quality of wound suturing.
The current detection method generally adopts a commercial three-dimensional contour measuring instrument based on the optical interference principle to measure the three-dimensional dimension. The surface groove microstructure of the parts such as the nail propping seat is a special-shaped structure (generally a sphere+plane structure) unlike the parts with regular surface microstructure. Due to the characteristics of large curvature and the like of the special-shaped groove microstructure, the reflection angle of the light irradiated to the surface of the special-shaped microstructure is too large, so that the three-dimensional profile measuring instrument based on the plane light interference principle cannot receive effective reflected light, the depth of the special-shaped groove microstructure cannot be accurately measured, and therefore a high-precision three-dimensional profile dimension measuring result of the part with the special-shaped surface microstructure cannot be obtained.
Disclosure of Invention
The invention aims to solve the technical problem of providing a method and equipment for detecting the three-dimensional size of the special-shaped surface microstructure of a part, which realize high-precision measurement of the three-dimensional size of the special-shaped surface microstructure of the part and automation of measurement.
The technical scheme adopted for solving the technical problems is as follows: a method for detecting the three-dimensional size of a microstructure on the special-shaped surface of a part, which comprises the steps of,
S1, photographing a special-shaped surface microstructure of a part by a photographing technology;
s2, measuring the two-dimensional size of the special-shaped surface microstructure of the part through a software technology;
s3, scanning the special-shaped surface microstructure of the part through a one-dimensional optical ranging sensor and recording the scanned distance data;
S4, processing the distance data in the step S3, and obtaining the height or depth of the special-shaped surface microstructure through fluctuation information generated by the distance data.
More specifically, the step of calculating the distance difference in step S4 is that,
S41, firstly taking a first point scanned by a one-dimensional optical ranging sensor as a distance reference;
And S42, forming corresponding coordinates by taking the distance reference as a zero point of the distance measured subsequently and recording.
Based on the detection method, the detection device comprises a frame, a workbench surface arranged on the frame, an XY horizontal moving platform arranged on the workbench surface, a vertical support arranged on the workbench surface and a Z-axis moving assembly arranged on the vertical support, wherein the vertical support is provided with a CCD camera assembly for detecting the two-dimensional size, and the Z-axis moving assembly is provided with a distance measuring assembly for detecting the height or depth size.
Further specifically, the CCD camera assembly comprises a camera mounting bracket arranged on the vertical bracket and a CCD camera arranged on the camera mounting bracket; and a lamp component for illumination is arranged on the camera mounting bracket beside the CCD camera.
Further specifically, the lamp assembly comprises a lamp bracket and lamps arranged on the lamp bracket, the lamp bracket is annular and sleeved on the CCD camera, and the lamps are arranged in a plurality and surround beside the CCD camera.
Further specifically, the distance measuring assembly comprises a distance measuring mounting bracket and a one-dimensional optical distance measuring sensor arranged on the distance measuring mounting bracket.
Further specifically, the Z-axis moving assembly comprises a linear guide rail arranged on the vertical support and a driving motor, the distance measuring assembly is arranged on the linear guide rail, and the driving motor drives the distance measuring assembly to move on the linear guide rail.
Further specifically, the XY horizontal moving platform comprises an X-axis moving assembly arranged on the workbench surface and a Y-axis moving assembly arranged on the X-axis moving assembly.
Further specifically, the X-axis moving assembly comprises an X-axis fixed table fixed on the table surface of the workbench, an X-axis sliding rail arranged on the X-axis fixed table, an X-axis moving table arranged on the X-axis sliding rail and an X-axis linear motor for driving the X-axis moving table to move.
The Y-axis moving assembly comprises a Y-axis fixed table fixed on the X-axis moving assembly, a Y-axis sliding rail arranged on the Y-axis fixed table, a Y-axis moving table arranged on the Y-axis sliding rail and a Y-axis linear motor for driving the Y-axis moving table to move.
The beneficial effects of the invention are as follows: by using the method and the equipment, the plane size of the special-shaped surface microstructure is accurately measured by a photographing technology, and the height of the special-shaped surface microstructure is accurately measured by a one-dimensional optical ranging sensor, so that the three-dimensional size of the special-shaped surface microstructure of a part is accurately measured; meanwhile, automatic scanning of height or depth measurement is realized through the XY horizontal movement platform, automatic focusing of the one-dimensional optical ranging sensor is realized through the use of the Z-axis movement assembly, the automation degree of equipment is improved, and the detection speed and quality are increased.
Drawings
FIG. 1 is a schematic flow chart of the detection method of the present invention;
FIG. 2 is a schematic diagram of the structure of the detecting device of the present invention;
FIG. 3 is a schematic diagram of the structure of the XY horizontal moving platform of the present invention;
FIG. 4 is a schematic diagram of the structure of the CCD camera assembly of the present invention;
FIG. 5 is a schematic view of the structure of the distance measuring assembly of the present invention;
FIG. 6 is a schematic view of the structure of the nail supporting seat of the detecting part according to the present invention.
In the figure: 1. a frame; 2. a work table; 3. an XY horizontal movement platform; 4. a vertical support; 5. a Y-axis moving assembly; 6. a CCD camera assembly; 7. a ranging assembly; 8. a clamp; 9. a nail supporting seat; 31. an X-axis moving assembly; 32. a Y-axis moving assembly; 311. an X-axis fixing table; 312. an X-axis sliding rail; 313. an X-axis moving stage; 314. an X-axis linear motor; 315. a first stopper; 321. a Y-axis fixed table; 322. a Y-axis sliding rail; 323. a Y-axis moving stage; 324. a Y-axis linear motor; 325. a second stopper; 51. a linear guide rail; 52. a driving motor; 61. a camera mounting bracket; 62. a CCD camera; 63. a lamp bracket; 64. a lamp; 71. a ranging mounting bracket; 72. a one-dimensional optical ranging sensor; 91. a hinge joint; 92. a nail-abutting groove; 93. an inner groove.
Detailed Description
The present invention will be described in detail with reference to the accompanying drawings.
As shown in fig. 1, a method for detecting the three-dimensional size of a microstructure on the special-shaped surface of a part comprises the following steps,
S1, photographing the special-shaped surface microstructure of the part by a photographing technology, wherein the special-shaped surface is required to be vertically opposite to the CCD camera as much as possible in the photographing process.
S2, measuring the two-dimensional size of the special-shaped surface microstructure of the part through a software technology, and correcting and calculating the two-dimensional size information of the special-shaped surface microstructure through a software internal program according to the photo information and the distance between the CCD camera and the part.
S3, scanning the special-shaped surface microstructure of the part through a one-dimensional optical ranging sensor, recording scanned distance data, setting two-dimensional size information of a detection position required by the special-shaped surface microstructure in software according to the specific functional size of the part required to be detected, and rapidly determining the position required to be detected on a plane through the actual two-dimensional size information obtained in the step S2, wherein the one-dimensional optical ranging sensor detects the position to obtain corresponding distance data.
S4, processing the distance data in the step S3, and obtaining the height or depth of the special-shaped surface microstructure through fluctuation information generated by the distance data.
The step of calculating the height in step S4 is,
S41, firstly taking a first point scanned by a one-dimensional optical ranging sensor as a distance reference, recording the distance reference into software, and setting the distance reference as a zero point;
And S42, forming corresponding coordinates by taking the distance measured subsequently as a zero point and recording to obtain the height or depth of the special-shaped surface microstructure.
Based on the method, the detection equipment for the three-dimensional size of the special-shaped surface microstructure of the part is designed, and as shown in fig. 2, the detection equipment comprises a frame 1, a working table surface 2 arranged on the frame 1, an XY horizontal moving platform 3 arranged on the working table surface 2, a vertical support 4 arranged on the working table surface 2 and a Z-axis moving assembly 5 arranged on the vertical support 4, wherein the vertical support 4 is provided with a CCD camera assembly 6 for detecting the two-dimensional size, and the Z-axis moving assembly 5 is provided with a distance measuring assembly 7 for detecting the height or depth size.
The CCD camera assembly 6 as shown in fig. 4 includes a camera mounting bracket 61 provided to the vertical bracket 4, and a CCD camera 62 provided on the camera mounting bracket 61; the CCD camera 62 has the characteristics of ultra-high pixels and large depth of field, and can measure the two-dimensional profile of the micron level; the camera mounting bracket 61 beside the CCD camera 62 is provided with a lamp assembly for illumination, the lamp assembly comprises a lamp bracket 63 and lamps 64 arranged on the lamp bracket 63, the lamp bracket 63 is annular and sleeved on the CCD camera 62, and a plurality of lamps 64 are arranged and surround beside the CCD camera 62; the annular lamp 64 is arranged on the circumference side of the CCD camera, so that better illumination can be provided, and the shooting precision of the CCD camera 62 is improved.
As shown in fig. 5, the ranging component 7 includes a ranging mounting bracket 71 and a one-dimensional optical ranging sensor 72 disposed on the ranging mounting bracket 71, where the one-dimensional optical ranging sensor 72 has the characteristics of high resolution and extremely small spot diameter, and the high resolution can obtain higher measurement accuracy; the micro-structure can be measured by the small spot diameter, and meanwhile, the high-precision measurement (10 nm level) of the arc surface of the micro-structure can be realized.
The Z-axis moving assembly 5 comprises a linear guide rail 51 and a driving motor 52, the linear guide rail 51 is arranged on the vertical support 4, the ranging assembly 7 is arranged on the linear guide rail 51, the driving motor 52 drives a ranging mounting support 71 on the ranging assembly 7 to move on the linear guide rail 51 for focusing the one-dimensional optical ranging sensor 72, and in the use process, the axis of the one-dimensional optical ranging sensor 72 is required to be ensured to be parallel to the moving direction of the linear guide rail 51, and meanwhile, the linear guide rail 51 is ensured to move in the vertical direction.
In order to realize the scanning action, the scanning action is realized by an XY horizontal moving platform 3, and the XY horizontal moving platform 3 comprises an X-axis moving assembly 31 arranged on the workbench surface 2 and a Y-axis moving assembly 32 arranged on the X-axis moving assembly 31 as shown in figure 3; the X-axis moving assembly 31 comprises an X-axis fixed table 311 fixed on the table top 2, an X-axis sliding rail 312 arranged on the X-axis fixed table 311, an X-axis moving table 313 arranged on the X-axis sliding rail 312, and an X-axis linear motor 314 driving the X-axis moving table 313 to move, wherein the X-axis sliding rail 312 is provided with two sliding blocks which are arranged in parallel, two sliding blocks are arranged at the bottom of the X-axis moving table 313 and correspond to the two X-axis sliding rails 312 respectively to realize that the X-axis moving table 313 spans the two X-axis sliding rails 312, so that the stability of the movement of the X-axis moving table 313 is improved, and meanwhile, a first stop block 315 for blocking the X-axis moving table 313 from sliding out of the X-axis sliding rail 312 is arranged at two ends of the X-axis fixed table 311; the Y-axis moving assembly 32 comprises a Y-axis fixed table 321 fixed on the X-axis moving table 313, a Y-axis sliding rail 322 arranged on the Y-axis fixed table 321, a Y-axis moving table 323 arranged on the Y-axis sliding rail 322 and a Y-axis linear motor 324 for driving the Y-axis moving table 323 to move, the Y-axis sliding rail 322 is provided with two sliding blocks which are arranged in parallel, two sliding blocks are arranged at the bottom of the Y-axis moving table 323 and correspond to the two Y-axis sliding rails 322 respectively to realize that the Y-axis moving table 323 spans the two Y-axis sliding rails 322, so that the stability of the movement of the Y-axis moving table 323 is improved, and meanwhile, two ends of the Y-axis fixed table 321 are provided with a second stop block 325 for blocking the Y-axis moving table 323 from sliding out of the Y-axis sliding rail 322.
The three-dimensional size of the special-shaped surface microstructure of the part can be measured through the equipment.
The medical nail holder 9 will be described in detail.
The measurement of the three-dimensional dimensions of the profiled surface microstructure of the abutment 9 is required, including the height of the hinge joint 91, the dimensions of the abutment recess 92 and the dimensions of the inner recess 93 as shown in fig. 6.
First, the nail holder is fixed on the Y-axis moving table 323 by the clamp 8, a plurality of nail holders 9 can be assembled on the Y-axis moving table 323 for simultaneous detection, an auxiliary rod is inserted into the hinge opening 91 of the nail holder 9 for detecting the height thereof, and after the nail holder 9 is moved to a proper position by the control system of the device, at this time, the focusing operation is completed by adjusting the one-dimensional optical ranging sensor 72 by the Z-axis moving assembly 5, and the preparation work is completed.
Secondly, the control system turns on the lighting assembly, the position of the nail propping seat 9 is adjusted by driving the XY horizontal moving platform 3, meanwhile, the CCD camera 62 is controlled to photograph the special-shaped surface microstructure of the nail propping seat 9, photographing information is transmitted into the control system to be processed, the control system internally measures the two-dimensional size of the special-shaped surface microstructure through embedded software, and the central positions of the nail propping grooves 92 and the inner side grooves 93 are judged.
Then, the control system moves the center positions of the nail supporting groove 92 and the inner side groove 93 to the position right below the one-dimensional optical ranging sensor 72 through the XY horizontal moving platform 3, measures the depth of the nail supporting groove 92 through controlling the X-axis moving assembly 31, simultaneously measures the position height of the hinge opening 91 through the auxiliary rod, and measures the depth of the nail supporting groove 92 or the inner side groove 93 of the next row of nail supporting seats 9 through moving the Y-axis moving assembly 32.
And finally, transmitting the obtained measurement data into a control system for processing, wherein the control system can display the measurement data through a display screen, and can send out early warning if a certain size deviation is large.
In summary, the above detection method and device are used, capture of the two-dimensional size of the special-shaped surface microstructure is achieved through the CCD camera 62, capture of the distance of the special-shaped surface microstructure is achieved through the one-dimensional optical ranging sensor 72, height or depth information is obtained after processing, and the purpose of high-precision measurement of the three-dimensional size of the special-shaped surface microstructure of the part is achieved.
It is emphasized that: the above embodiments are merely preferred embodiments of the present invention, and the present invention is not limited in any way, and any simple modification, equivalent variation and modification made to the above embodiments according to the technical substance of the present invention still fall within the scope of the technical solution of the present invention.
Claims (7)
1. The detection method for the three-dimensional size of the special-shaped surface microstructure of the part is characterized by comprising a frame (1), a workbench surface (2) arranged on the frame (1), an XY horizontal moving platform (3) arranged on the workbench surface (2), a vertical support (4) arranged on the workbench surface (2) and a Z-axis moving assembly (5) arranged on the vertical support (4), wherein a CCD camera assembly (6) for detecting the two-dimensional size is arranged on the vertical support (4), and a distance measuring assembly (7) for detecting the height or depth size is arranged on the Z-axis moving assembly (5); the CCD camera assembly (6) comprises a camera mounting bracket (61) arranged on the vertical bracket (4) and a CCD camera (62) arranged on the camera mounting bracket (61); a lamp component for illumination is arranged on a camera mounting bracket (61) beside the CCD camera (62); the distance measuring assembly (7) comprises a distance measuring mounting bracket (71) and a one-dimensional optical distance measuring sensor (72) arranged on the distance measuring mounting bracket (71);
The step of the detection method is that,
S1, photographing a special-shaped surface microstructure of a part by a photographing technology, wherein the special-shaped surface is required to be vertically opposite to a CCD camera as much as possible in the photographing process;
s2, measuring the two-dimensional size of the special-shaped surface microstructure of the part by a software technology, and calculating the two-dimensional size information of the special-shaped surface microstructure by correcting an internal program of the software according to the photo information and the distance between the CCD camera and the part;
s3, scanning the special-shaped surface microstructure of the part through a one-dimensional optical ranging sensor and recording the scanned distance data;
And S4, processing the distance data in the step S3, and obtaining the height or depth of the special-shaped surface microstructure through fluctuation information generated by the distance data.
2. The method for detecting the three-dimensional size of the special-shaped surface microstructure of a part according to claim 1, wherein the step of calculating the height or depth in the step S4 is,
S41, firstly taking a first point scanned by a one-dimensional optical ranging sensor as a distance reference;
And S42, forming corresponding coordinates by taking the distance reference as a zero point of the distance measured subsequently and recording.
3. The method for detecting the three-dimensional size of the special-shaped surface microstructure of the part according to claim 1, wherein the lamp assembly comprises a lamp bracket (63) and lamps (64) arranged on the lamp bracket (63), the lamp bracket (63) is annular and sleeved on the CCD camera (62), and the lamps (64) are arranged in a plurality and surround the CCD camera (62).
4. The method for detecting the three-dimensional size of the special-shaped surface microstructure of the part according to claim 1, wherein the Z-axis moving assembly (5) comprises a linear guide rail (51) arranged on the vertical support (4) and a driving motor (52), the distance measuring assembly (7) is arranged on the linear guide rail (51), and the driving motor (52) drives the distance measuring assembly (7) to move on the linear guide rail (51).
5. The method for detecting the three-dimensional size of the special-shaped surface microstructure of the part according to claim 1, wherein the XY horizontal moving platform (3) comprises an X-axis moving assembly (31) arranged on the workbench surface (2) and a Y-axis moving assembly (32) arranged on the X-axis moving assembly (31).
6. The method for detecting the three-dimensional size of the special-shaped surface microstructure of the part according to claim 5, wherein the X-axis moving assembly (31) comprises an X-axis fixing table (311) fixed on the table top (2), an X-axis sliding rail (312) arranged on the X-axis fixing table (311), an X-axis moving table (313) arranged on the X-axis sliding rail (312), and an X-axis linear motor (314) for driving the X-axis moving table (313) to move.
7. The method for detecting the three-dimensional size of the special-shaped surface microstructure of the part according to claim 5, wherein the Y-axis moving assembly (32) comprises a Y-axis fixing table (321) fixed on the X-axis moving assembly (31), a Y-axis sliding rail (322) arranged on the Y-axis fixing table (321), a Y-axis moving table (323) arranged on the Y-axis sliding rail (322), and a Y-axis linear motor (324) for driving the Y-axis moving table (323) to move.
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| CN201911166413.6A CN110836641B (en) | 2019-11-25 | 2019-11-25 | Method and equipment for detecting three-dimensional size of special-shaped surface microstructure of part |
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| CN113847888B (en) * | 2021-11-30 | 2022-03-04 | 中国工程物理研究院激光聚变研究中心 | Automatic measurement device and method for heterogeneous jump surface morphology |
| CN114324387A (en) * | 2021-12-14 | 2022-04-12 | 北京玖瑞科技有限公司 | Plate defect detection device and method |
| CN114295075B (en) * | 2022-03-09 | 2022-06-03 | 中国工程物理研究院激光聚变研究中心 | Device and method for measuring integral three-dimensional contour of inner surface of concave workpiece |
| CN117020501B (en) * | 2023-10-08 | 2024-02-23 | 宁德时代新能源科技股份有限公司 | Pole addressing method and addressing system |
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