CN110834334B - Control method and device of manipulator and treatment tank equipment - Google Patents

Control method and device of manipulator and treatment tank equipment Download PDF

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Publication number
CN110834334B
CN110834334B CN201911143323.5A CN201911143323A CN110834334B CN 110834334 B CN110834334 B CN 110834334B CN 201911143323 A CN201911143323 A CN 201911143323A CN 110834334 B CN110834334 B CN 110834334B
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China
Prior art keywords
sensor
manipulator
isolation door
door
preset
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CN201911143323.5A
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CN110834334A (en
Inventor
左国军
范生刚
马冠男
任金枝
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Changzhou Jiejiachuang Precision Machinery Co Ltd
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Changzhou Jiejiachuang Precision Machinery Co Ltd
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Priority to CN201911143323.5A priority Critical patent/CN110834334B/en
Publication of CN110834334A publication Critical patent/CN110834334A/en
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00Programme-controlled manipulators
    • B25J9/16Programme controls
    • B25J9/1674Programme controls characterised by safety, monitoring, diagnostic
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0075Means for protecting the manipulator from its environment or vice versa
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00Programme-controlled manipulators
    • B25J9/16Programme controls
    • B25J9/1679Programme controls characterised by the tasks executed
    • B25J9/1692Calibration of manipulator
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)

Abstract

The invention relates to a control method and a device of a manipulator and processing tank equipment, wherein the control method of the manipulator comprises the following steps: determining actual operation data of the manipulator; judging whether the actual operation data are equal to the preset operation data or not; when the actual operation data and the preset operation data are equal, the manipulator continues to move; when the actual operation data and the preset operation data are not equal, the manipulator stops moving and sends out an alarm signal. Determining whether the moving track of the manipulator is offset by judging whether the actual moving data are equal to the preset moving data, and indicating that the manipulator is not offset when the actual moving data are equal to the preset moving data; when the actual operation data and the preset operation data are unequal, the manipulator is indicated to deviate, so that the manipulator is controlled to stop moving and send out an alarm signal, and the manipulator always moves according to the preset operation track, so that the reliability of the manipulator in the operation process can be improved.

Description

Control method and device of manipulator and treatment tank equipment
Technical Field
The present invention relates to the field of control of a manipulator, and in particular, to a method and an apparatus for controlling a manipulator, and a processing tank device.
Background
In the production process of the solar cell panel, the silicon wafer needs to be subjected to working procedures such as an acid solution, a water tank, an alkaline solution and the like. Firstly, the silicon wafer is subjected to acidic solution, then is washed by water, and finally is subjected to alkaline solution. At present, as an isolating device is not arranged between the acid treatment tank and the alkaline treatment tank, and the acid solution or the alkaline solution has volatility, the cleaned silicon wafer is easy to be secondarily polluted, the process stability is poor, and the consistency of the same batch of products is poor, so that an isolating door is required to be added.
In the prior art, a loading station and a discharging station are positioned on two sides of an isolation door, a manipulator firstly grabs a silicon wafer box to the loading station, sequentially passes through an acid solution, a cleaning tank, the isolation door and an alkaline solution, and then drops the silicon wafer box to the discharging station. Because the manipulator is in corrosive gas, spare part is corroded easily, once the corrosion area is great, the manipulator breaks down easily, leads to its motion track to take place the skew to damage the silicon chip on the manipulator.
Disclosure of Invention
Based on the above, it is necessary to provide a control method and device for a manipulator and a processing tank device for the manipulator, aiming at the problem that the motion track is deviated due to corrosion of the manipulator in the prior art.
A method of controlling a manipulator, the manipulator including a motor and an encoder, the method comprising: determining actual operation data of the manipulator; judging whether the actual operation data are equal to the preset operation data or not; when the actual operation data and the preset operation data are equal, the manipulator continues to move; when the actual operation data and the preset operation data are not equal, the manipulator stops moving and sends out an alarm signal.
Wherein determining actual operational data of the manipulator comprises: receiving a coded value sent by an encoder, wherein the coded value is generated according to the rotating angle and the rotating direction of a motor; acquiring the running time of a motor; and determining actual operation data of the manipulator according to the operation time and the coding value.
Wherein, judging whether the actual operation data and the preset operation data are equal comprises: comparing the code value with a preset code value in the corresponding running time; when the code value is the same as the preset code value, the actual operation data is equal to the preset operation data; when the code value is different from the preset code value, the actual operation data and the preset operation data are not equal.
Wherein the method further comprises: opening the isolation door before the robot passes the isolation door; judging whether the manipulator passes through the isolation door or not; after the robot passes the isolation door, the isolation door is closed.
Wherein, open the isolation door includes: the isolation door moves along the F1 direction; when receiving the induction signals respectively sent by the first sensor, the second sensor and the fourth sensor, the isolation door stops moving; when the induction signals sent by the second sensor and the fourth sensor are received and the induction signals sent by the first sensor are not received, the isolation door stops moving and sends out alarm signals; when the induction signals sent by the first sensor and the second sensor are received and the induction signals sent by the fourth sensor are not received, the isolation door stops moving and sends out alarm signals; the first sensor and the isolation door are located on the same plane and located on different planes with the second sensor and the fourth sensor, the second sensor and the fourth sensor are located on the same straight line, the distance between the second sensor and the fourth sensor is smaller than the width of the isolation door, and the isolation door sequentially reaches the fourth sensor, the second sensor and the first sensor.
Wherein, judge whether the manipulator passes through the isolation door includes: when the actual operation data and the passing data on the preset operation data are equal, indicating that the manipulator passes through the isolation door; and when the actual operation data and the passing data on the preset operation data are not equal, indicating that the manipulator does not pass through the isolation door.
Wherein closing the isolation door comprises: the isolation door moves along the F2 direction; when receiving the induction signals sent by the third sensor and the fifth sensor, the isolation door stops moving; when the induction signal sent by the fifth sensor is received and the induction signal sent by the third sensor is not received, the isolation door stops moving and sends out an alarm signal; the distance between the third sensor and the fifth sensor is smaller than the width of the isolation door, the third sensor and the fifth sensor are positioned on the same straight line and are positioned on different planes with the isolation door, and the isolation door sequentially reaches the third sensor and the fifth sensor.
The control device of the manipulator controls the manipulator by adopting the control method.
Wherein the control device includes: the manipulator is used for clamping the object to be processed and moving the object to a preset position; the motor is used for driving the manipulator to move to a preset position; the encoder is used for acquiring the encoding value corresponding to the rotating angle and the rotating direction of the motor; and the controller is used for controlling the manipulator to operate according to the actual operation data and the preset operation data.
The processing tank equipment is characterized by comprising the control device.
According to the control method, the control device and the processing groove equipment of the manipulator, whether the moving track of the manipulator is deviated or not is determined by judging whether the actual moving data and the preset moving data are equal, and when the actual moving data and the preset moving data are equal, the fact that the manipulator is not deviated is indicated; when the actual operation data and the preset operation data are unequal, the manipulator is indicated to deviate, so that the manipulator is controlled to stop moving and send out an alarm signal, and the manipulator always moves according to the preset operation track, so that the reliability of the manipulator in the operation process can be improved.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions in the prior art, the drawings that are necessary for the description of the embodiments or the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the invention and that other drawings may be obtained from them without inventive effort for a person skilled in the art.
Fig. 1 is a partial schematic view of a control device of a robot according to an embodiment of the present invention.
Fig. 2 is a flow chart of a control method of a robot according to an embodiment of the present invention.
FIG. 3 is a flow chart of the steps of determining actual operational data according to one embodiment of the present invention.
FIG. 4 is a flowchart illustrating steps for determining whether operational data is equal according to one embodiment of the present invention.
Fig. 5 is a flow chart of a control method of an isolation gate according to an embodiment of the present invention.
Fig. 6 is a flow chart of the steps of opening an isolation door according to one embodiment of the present invention.
Fig. 7 is a flow chart of the steps of closing an isolation door according to one embodiment of the present invention.
1. An isolation door; 11. an active gate; 12. a driven door; 2. a first sensor; 3. a second sensor; 4. a third sensor; 5. a fourth sensor; 6. and a fifth sensor.
Detailed Description
In order to make the objects, features and advantages of the present invention more comprehensible, the technical solutions in the embodiments of the present invention will be clearly described in conjunction with the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are only some embodiments of the present invention, but not all embodiments of the present invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In this embodiment, the motor is a stepper motor, it being understood that in alternative embodiments, a servo motor may be used. For easy understanding, the working principle of the stepper motor is briefly described as follows:
the controller sends uniform pulse signals to the driver, and the driver can pulse the stepping motor every time the driver receives one pulse signal, so that the stepping motor rotates by a fixed angle, and the operation of the stepping motor is accurately controlled. The encoder detects the rotating angle and the rotating direction of the stepping motor in real time, converts the rotating angle and the rotating direction of the stepping motor into coded values and sends the coded values to the controller, and the controller calculates the current position of the stepping motor according to the coded values.
In this embodiment, the control device of the manipulator may have a motor, a driver, an encoder, the manipulator, and a controller, where the controller sends a pulse signal to the driver according to a preset running track, and the driver controls the angle and direction of rotation of the motor, so as to drive the manipulator to move. The encoder detects the rotating angle and the rotating direction of the motor in real time and sends the corresponding coded values to the controller, the controller compares the coded values with preset coded values in the corresponding running time, when the coded values are identical to the preset coded values, the actual running data of the manipulator are identical to the preset running data, and the controller continues to send pulse signals to control the motor to drive the manipulator to move; when the code value is different from the preset code value, the actual operation data of the manipulator are unequal to the preset operation data, the controller sends a pulse signal to control the motor to stop driving the manipulator to move and send an alarm signal to prompt a user that the manipulator deviates from the preset operation track, and the equipment is maintained in time, so that the silicon wafer on the manipulator is prevented from being crashed.
In this embodiment, the manipulator needs to clamp the basket of flowers that carries the silicon chip from the material loading station to dip the basket of flowers that is clamped into a plurality of acid-base solution tanks in proper order, in order to prevent the volatilized gas of acid-base solution tank and interfere with each other, thereby set up the isolation door between acid-base solution tank. Before the manipulator passes through the isolation door, the isolation door needs to be opened; after passing the isolation door, the isolation door needs to be closed.
As shown in fig. 1, the control device of the manipulator may have an isolation door 1, and a first sensor 2, a second sensor 3, a third sensor 4, a fourth sensor 5, and a fifth sensor 6 that are disposed in this order from top to bottom. Wherein the first sensor 2 and the isolation door 1 are positioned on the same plane, the second sensor 3, the third sensor 4, the fourth sensor 5 and the fifth sensor 6 are positioned on the same straight line and positioned on different planes with the isolation door 1. The isolation door 1 includes a driving door 11, a driven door 12, and a cylinder, the second sensor 3 and the fourth sensor 5 are disposed at a distance smaller than the width of the driven door 12, and the third sensor 4 and the fifth sensor 6 are disposed at a distance smaller than the width of the driven door 12. In this embodiment, the driving door 11 is fixed, and the side of the driven door 12 opposite to the driving door 11 is connected to the piston rod of the cylinder. When the door is opened, the cylinder drives the driven door 12 to move along the F1 direction; when the door is closed, the cylinder drives the driven door 12 to move along the direction F2, and the isolation door 1 referred to below is the driven door 12.
When the isolation door 1 is opened, the controller controls the isolation door 1 to move toward the first sensor 2, and when the first sensor 2, the second sensor 3 and the fourth sensor 5 all detect the isolation door 1, it indicates that the isolation door 1 is completely opened, and the controller controls the isolation door 1 to stop moving. When the isolation door 1 is closed, the controller controls the isolation door 1 to move toward the fifth sensor 6, and when both the third sensor 4 and the fifth sensor 6 detect the isolation door 1, it indicates that the isolation door 1 is completely closed, and the controller controls the isolation door 1 to stop moving.
In the present embodiment, the first sensor 2 is a capacitive sensor, and the second sensor 3, the third sensor 4, the fourth sensor 5, and the fifth sensor 6 are magnetic proximity switches.
In one embodiment, the present invention provides a process tank apparatus. The treatment tank device may be provided with a control device according to any of the embodiments described above.
In one embodiment, as shown in fig. 2, a method for controlling a manipulator is provided, where the method specifically includes the following steps:
s102, determining actual operation data of the manipulator.
Specifically, the controller determines actual operation data of the manipulator according to the operation time of the motor and the encoding value sent by the encoder.
S104, judging whether the actual operation data and the preset operation data are equal.
The preset operation data are pre-stored in a database or a cache.
Specifically, the controller receives actual operation data sent by the encoder, and then obtains preset operation data from the database or the cache, so as to judge whether the actual operation data and the preset operation data are equal.
And S106, when the actual operation data and the preset operation data are equal, the manipulator continues to move.
Specifically, when the actual running data and the preset running data are equal, the actual running track of the manipulator is in a safe range, and the controller controls the manipulator to continue moving.
S108, when the actual operation data and the preset operation data are not equal, the manipulator stops moving and sends out an alarm signal.
Specifically, when the actual operation data and the preset operation data are unequal, the fact that the manipulator deviates from the preset operation track is indicated, the controller controls the manipulator to stop moving and send an alarm signal to remind a worker to process equipment, the manipulator is prevented from deviating to crash silicon chips on the manipulator, or the manipulator is prevented from being crashed and damaged by surrounding stations, or the manipulator is prevented from moving into an acid-alkali solution tank to be corroded, and therefore the operation reliability of the manipulator can be improved.
In this embodiment, whether the movement track of the manipulator is offset is determined by judging whether the actual movement data and the preset movement data are equal, and when the actual movement data and the preset movement data are equal, it is indicated that the manipulator is not offset; when the actual operation data and the preset operation data are unequal, the manipulator is indicated to deviate, so that the manipulator is controlled to stop moving and send out an alarm signal, and the manipulator always moves according to the preset operation track, so that the reliability of the manipulator in the operation process can be improved.
As shown in fig. 3, in one embodiment, S102 specifically includes a step of determining actual operation data, which specifically includes the following:
s202, receiving the coded value sent by the encoder, wherein the coded value is generated according to the rotating angle and the rotating direction of the motor.
Specifically, the encoder generates a coded value according to the angle and direction of rotation of the motor, and sends the coded value to the controller. The running data of the motor is monitored in real time through the encoder, so that the reliability of the manipulator in running is improved.
S204, acquiring the running time of the motor.
Specifically, the controller obtains the running time of the motor.
S206, determining actual operation data of the manipulator according to the operation time and the coding value.
If the running time of the motor is now T and the code value received by the controller is 000101, the actual running data of the manipulator at T is (T, 000101).
As shown in fig. 4, in one embodiment, S104 specifically includes a step of determining whether the operation data are equal, and the step specifically includes the following:
s302, comparing the coded value with a preset coded value in the corresponding running time.
If the running time of the motor is now T 1 The controller is at T 1 The code value received at the point is 000100, and the controller obtains the code value from the database or the buffer at T 1 Preset code value of time, if at T 1 The preset code value is 000100, which indicates that the actual operation data and the preset operation data are equal. If at T 1 The preset code value is 000101, which indicates that the actual operation data and the preset operation data are not equal.
And S304, when the code value is the same as the preset code value, the actual operation data is equal to the preset operation data.
S306, when the code value and the preset code value are different, the actual operation data and the preset operation data are not equal.
As shown in fig. 5, in an embodiment, the method for controlling a manipulator specifically further includes the following steps:
s101, before the manipulator passes through the isolation door, the isolation door is opened.
In this embodiment, before the manipulator moves, the controller controls the isolation door to open first, and after the isolation door is opened, the controller controls the manipulator to pass through the isolation door according to a preset moving track.
S109, judging whether the manipulator passes through the isolation door.
Specifically, the preset operation data is provided with door passing data, the door passing data comprises door passing time and door passing code values, and when the operation time and the door passing time of the motor are the same, the current position of the manipulator is indicated to pass through the isolation door. When the code value received by the controller is the same as the passing code value, the manipulator is indicated to move according to the preset running track, and the isolation door cannot collide with the manipulator when the door is closed. Through double judgment of the passing time and the passing code value, the reliability of the isolation door in the closing process is improved.
If the pass time is T 2 The pass gate code value is 001100 if the controller is at T 2 The received code value is 001100, which indicates that the manipulator has passed through the isolation door according to the preset running track. If the controller is at T 2 The received code value is 001101, which indicates that the manipulator does not pass through the isolation door according to the preset running trackThe controller controls the isolation door to stop moving and sends out an alarm signal to remind a user.
S110, after the manipulator passes through the isolation door, the isolation door is closed.
Specifically, after the manipulator passes through the isolation door, the controller controls the isolation door to be closed, so that the volatilized gas of the acid-alkali solution tank is prevented from undergoing chemical reaction, and the process flow of the silicon wafer is not facilitated.
As shown in fig. 6, in one embodiment, S101 specifically includes a step of opening an isolation door, which specifically includes the following:
in the prior art, in order to prevent the corrosive gas on two sides of the isolation door from interfering, a certain allowance is arranged on two sides of the isolation door, and at present, the two sides of the isolation door are generally wrapped by adhesive tapes, so that a certain allowance is added. However, the adhesive tape is easily corroded by the corrosive gas, and once the adhesive tape is corroded, the corrosive gas is easily interfered with each other through the corroded position, so that the cleaned silicon wafer is easily polluted again by the acid-base gas.
S402, the isolation door moves along the F1 direction.
S404, when the induction signals respectively sent by the first sensor, the second sensor and the fourth sensor are received, the isolation door stops moving.
Specifically, when the isolation door reaches the fourth sensor, the fourth sensor sends an inductive signal to the controller. When the isolation door reaches the second sensor, the second sensor sends an inductive signal to the controller. When the isolation door reaches the first sensor, the first sensor sends an inductive signal to the controller. When the controller receives the sensing signals sent by the first sensor, the second sensor and the fourth sensor at the same time, the isolation door is completely opened and is not damaged.
S406, when the sensing signals sent by the second sensor and the fourth sensor are received and the sensing signals sent by the first sensor are not received, the isolation door stops moving and sends out an alarm signal.
Specifically, when the second sensor and the fourth sensor sense the isolation door and the first sensor cannot sense the isolation door within a preset time, it is indicated that the isolation door is located at one side of the first sensor and damage has occurred. The controller controls the isolation door to stop moving and sends an alarm signal to remind workers that the isolation door is damaged, and the isolation door is maintained in time, so that the isolation effect of the isolation door is guaranteed.
S408, when the sensing signals sent by the first sensor and the second sensor are received and the sensing signal sent by the fourth sensor is not received, the isolation door stops moving and sends out an alarm signal.
Specifically, when the first sensor and the second sensor sense the isolation door and the fourth sensor cannot sense the isolation door, it indicates that damage has occurred to the isolation door located on one side of the fourth sensor. The controller controls the isolation door to stop moving and sends an alarm signal to remind workers that the isolation door is damaged, and the isolation door is maintained in time, so that the isolation effect of the isolation door is guaranteed.
In one embodiment, S109 specifically includes the following:
and when the actual operation data and the passing data on the preset operation data are equal, indicating that the manipulator has passed through the isolation door.
And when the actual operation data and the passing data on the preset operation data are not equal, indicating that the manipulator does not pass through the isolation door.
The specific case of the above two steps may refer to step S109, and will not be described here again.
As shown in fig. 7, in one embodiment, S110 specifically includes a step of closing the isolation door, which specifically includes the following:
s502, the isolation door moves along the F2 direction.
S504, when the sensing signals transmitted from the third sensor and the fifth sensor are received, the isolation door stops moving.
S506, when the induction signal sent by the fifth sensor is received and the induction signal sent by the third sensor is not received, the isolation door stops moving and sends out an alarm signal.
The specific cases of the above three steps can refer to S402-S408, and will not be described here again.
It should be understood that each step in each flowchart is shown in turn as indicated by an arrow, but the steps are not necessarily performed in turn as indicated by the arrow. The steps are not strictly limited to the order of execution unless explicitly recited herein, and the steps may be executed in other orders. Moreover, at least some of the steps in the flowcharts may include a plurality of sub-steps or stages that are not necessarily performed at the same time, but may be performed at different times, and the order of execution of the sub-steps or stages is not necessarily sequential, but may be performed in rotation or alternately with at least a portion of the sub-steps or stages of other steps or other steps.
In the foregoing embodiments, the descriptions of the embodiments are emphasized, and for parts of one embodiment that are not described in detail, reference may be made to the related descriptions of other embodiments.
The foregoing describes a method, apparatus, and processing tank device for controlling a manipulator according to the present invention, and those skilled in the art should not understand the present invention to limit the scope of the present invention.

Claims (4)

1. A control method of a manipulator including a motor and an encoder, the method comprising:
the controller sends pulse signals to the driver according to a preset running track, the driver controls the rotating angle and direction of the motor so as to drive the manipulator to move, and the encoder detects the rotating angle and direction of the motor in real time and sends corresponding coding values to the controller;
determining actual operational data of the manipulator, comprising: the controller receives the coded value sent by the encoder, wherein the coded value is generated according to the rotating angle and the rotating direction of the motor; acquiring the running time of a motor; determining actual operation data of the manipulator according to the operation time and the coding value;
comparing the coded value with a preset coded value in the corresponding running time, and judging whether the actual running data and the preset running data are equal or not;
when the corresponding code value in the running time is the same as the preset code value, the actual running data are equal to the preset running data, and the manipulator continues to move;
when the corresponding coded value on the running time is different from the preset coded value, the actual running data and the preset running data are not equal, and the manipulator stops moving and sends out an alarm signal;
before a manipulator passes through the isolation door, the isolation door is opened, and comprises a driving door and a driven door which is arranged on one side of the driving door and is movably connected with the driving door through an air cylinder;
judging whether the manipulator passes through the isolation door or not through the door passing time and the door passing code value, when the running time and the door passing time of the motor are the same, indicating that the current position of the manipulator passes through the isolation door, and when the code value and the door passing code value are the same, indicating that the manipulator moves according to a preset running track, wherein the isolation door cannot collide with the manipulator when the door is closed;
closing the isolation door after the manipulator passes the isolation door;
judging whether the manipulator passes through the isolation door comprises:
when the actual operation data and the passing data on the preset operation data are equal, indicating that the manipulator passes through the isolation door;
when the actual operation data and the passing data on the preset operation data are not equal, the fact that the manipulator does not pass through the isolation door is indicated;
the opening of the isolation door includes:
the isolation door moves along the F1 direction;
when receiving the induction signals respectively sent by the first sensor, the second sensor and the fourth sensor, the isolation door stops moving;
when the induction signals sent by the second sensor and the fourth sensor are received and the induction signals sent by the first sensor are not received, the isolation door stops moving and sends out alarm signals;
when the induction signals sent by the first sensor and the second sensor are received and the induction signals sent by the fourth sensor are not received, the isolation door stops moving and sends out alarm signals;
closing the isolation door includes:
the isolation door moves along the F2 direction;
when receiving the induction signals sent by the third sensor and the fifth sensor, the isolation door stops moving;
when the induction signal sent by the fifth sensor is received and the induction signal sent by the third sensor is not received, the isolation door stops moving and sends out an alarm signal;
the first sensor and the isolation door are positioned on the same plane and are positioned on different planes from the second sensor and the fourth sensor, the second sensor and the fourth sensor are positioned on the same straight line, the distance between the second sensor and the fourth sensor is smaller than the width of the isolation door, and the isolation door sequentially reaches the fourth sensor, the second sensor and the first sensor; the distance between the third sensor and the fifth sensor is smaller than the width of the isolation door, the third sensor and the fifth sensor are positioned on the same straight line and positioned on different planes with the isolation door, and the isolation door sequentially reaches the third sensor and the fifth sensor;
the first sensor is a capacitance sensor, and the second sensor, the third sensor, the fourth sensor and the fifth sensor are magnetic proximity switches.
2. A control device for a manipulator, wherein the control device for a manipulator controls the manipulator by using the control method according to claim 1.
3. The control device according to claim 2, characterized in that the control device comprises:
the manipulator is used for clamping the object to be processed and moving the object to a preset position;
the motor is used for driving the manipulator to move to a preset position;
the encoder is used for acquiring the encoding value corresponding to the rotating angle and the rotating direction of the motor;
and the controller is used for controlling the manipulator to operate according to the actual operation data and the preset operation data.
4. A processing tank apparatus comprising the control device according to claim 2.
CN201911143323.5A 2019-11-20 2019-11-20 Control method and device of manipulator and treatment tank equipment Active CN110834334B (en)

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