CN110829880A - T-shaped creeping type piezoelectric driving platform - Google Patents
T-shaped creeping type piezoelectric driving platform Download PDFInfo
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- CN110829880A CN110829880A CN201910719469.3A CN201910719469A CN110829880A CN 110829880 A CN110829880 A CN 110829880A CN 201910719469 A CN201910719469 A CN 201910719469A CN 110829880 A CN110829880 A CN 110829880A
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- 230000007246 mechanism Effects 0.000 claims abstract description 40
- 230000009193 crawling Effects 0.000 claims abstract description 11
- 229910000838 Al alloy Inorganic materials 0.000 claims description 3
- 229910000639 Spring steel Inorganic materials 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 238000003754 machining Methods 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 238000005516 engineering process Methods 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/005—Mechanical details, e.g. housings
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
- H02N2/043—Mechanical transmission means, e.g. for stroke amplification
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
- H02N2/065—Large signal circuits, e.g. final stages
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Abstract
The invention relates to a T-shaped crawling type piezoelectric driving platform which comprises two groups of same piezoelectric driving units, a rotor and a base. Each group of piezoelectric units comprises a piezoelectric stack, a T-shaped flexible hinge mechanism, a pre-tightening screw, a pre-tightening wedge block and a spiral micrometer head. The piezoelectric stack can be stretched and recovered under the drive of a voltage signal, and the T-shaped flexible hinge mechanism is driven to deform to realize pre-tightening and driving; the initial pretightening force between the T-shaped flexible hinge mechanism and the rotor can be adjusted by the pretightening screw and the screw micrometer head; the base supports other components. The two groups of piezoelectric driving units work alternately to drive the rotor to realize crawling type motion. The platform can be applied to the fields of precision ultra-precision machining, micro electro mechanical systems, micro operation robots, large-scale integrated circuit manufacturing and biotechnology.
Description
Technical Field
The invention relates to the field of precise and ultra-precise machining, micro-nano operation robots and micro electro mechanical systems, in particular to a T-shaped crawling type piezoelectric driving platform.
Background
The precise driving technology with micro/nano positioning precision is a key technology in high-end scientific and technical fields such as ultra-precision machining and measurement, optical engineering, modern medical treatment, aerospace technology and the like. In order to realize the micro/nano-scale output precision, the application of the modern precision driving technology puts higher requirements on the precision of the driving platform. The traditional driving platform has low output precision and large integral size, and cannot meet the requirements of a precision system in the modern advanced technology on micro/nano-scale high precision and small size of the driving platform. The piezoelectric driving platform has the advantages of small volume size, high displacement resolution, large output load, high energy conversion rate and the like, can realize micro/nano-scale output precision, is increasingly applied to micro positioning and precise ultra-precision machining, but the working stroke of the piezoelectric driving platform is limited due to the inverse piezoelectric effect of a single piezoelectric element, so that the application of the piezoelectric driving platform is greatly limited. Therefore, it is necessary to design a piezoelectric precision driving platform capable of achieving micro/nano positioning accuracy and realizing larger working stroke.
Disclosure of Invention
The invention aims to provide a T-shaped crawling type piezoelectric driving platform, which solves the problems in the prior art. The invention has the characteristics of simple and compact structure, high output precision, high output rigidity and output load and high output frequency, and can realize the creeping type linear motion output function with large stroke.
According to the invention, two groups of piezoelectric driving units work alternately, the piezoelectric stack is electrified to push the T-shaped flexible hinge mechanism to move, driving force and pretightening force are provided, and linear motion of the rotor is finally realized.
The above object of the present invention is achieved by the following technical solutions:
a T-shaped creeping piezoelectric driving platform mainly comprises two groups of same piezoelectric driving units, a rotor and a base. Each group of piezoelectric units comprises a piezoelectric stack, a T-shaped flexible hinge mechanism, a pre-tightening screw, a pre-tightening wedge block and a spiral micrometer head, and the driving platform drives the rotor to realize micro-nano grade crawling type linear motion by alternately working of the two groups of piezoelectric driving units. The rotor adopts a high-precision linear guide rail with a slide block, and the guide rail is fixed on the base through a screw, so that high-precision reciprocating linear motion can be realized; the T-shaped flexible hinge mechanism is arranged on the base through a screw; the piezoelectric stack is arranged in the T-shaped flexible hinge mechanism and can be pre-tightened through a pre-tightening wedge block; the initial pretightening force between the T-shaped flexible hinge mechanism and the rotor can be adjusted by the pretightening screw and the screw micrometer head.
The piezoelectric stack is electrified to push the T-shaped flexible hinge mechanism to move, driving force and pretightening force are provided, the driving force pushes the rotor to do linear motion, and the pretightening force enables the T-shaped flexible hinge mechanism to jack the rotor tightly.
The piezoelectric stack adopts a piezoelectric ceramic stack PZT with a shape controllable surface.
The T-shaped flexible hinge mechanism can be made of spring steel, high-strength aluminum alloy and other materials and is connected into a T shape through a thin-wall flexible hinge.
The contact part of the upper end of the T-shaped flexible hinge mechanism and the mover is of an arc-shaped structure.
The rotor can adopt a ball linear guide rail, a roller linear guide rail, a V-shaped groove linear guide rail, a dovetail groove linear guide rail and other mechanisms capable of realizing reciprocating linear motion.
The main advantages of the invention are: two groups of piezoelectric driving units work alternately, and the T-shaped flexible hinge mechanism moves to provide driving force and pretightening force to push the rotor to do crawling linear motion. The platform has the advantages of high driving reliability, good stability, high working efficiency and the like. The micro-motion precision control method can be applied to the important scientific engineering fields of precision ultra-precision machining, micro-operation robots, micro-electro-mechanical systems, large-scale integrated circuit manufacturing, biotechnology and the like, greatly improves the micro-motion precision of the micro-electro-mechanical systems, improves the disadvantages of complex and large structure, unreliable performance and the like of the traditional driver, and has wide application prospect.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention.
FIG. 1 is a schematic isometric view of the present invention;
FIG. 2 is a schematic front view of the present invention;
FIG. 3 is a schematic view of the T-shaped flexible hinge mechanism of the present invention.
In the figure:
1. a mover; 2, pre-tightening a wedge block I; 3, piezoelectric stack I;
4. a piezoelectric stack II; 5, pre-tightening a wedge block II; 6, a T-shaped flexible hinge mechanism;
7. pre-tightening the screw; 8, piezoelectric stack III; 9, pre-tightening a wedge block III;
10. a micrometer screw head; a base; 12, piezoelectric stack IV;
13. a piezoelectric stack V; 14. piezoelectric stack VI; a piezoelectric driving unit II;
16. and a piezoelectric driving unit I.
Detailed Description
The details of the present invention and its embodiments are further described below with reference to the accompanying drawings.
Referring to fig. 1 to 3, a T-shaped crawling piezoelectric driving platform mainly includes a piezoelectric driving unit I (16), a piezoelectric driving unit II (15), a mover (1), and a base (11). The piezoelectric driving unit I (16) comprises a pre-tightening wedge block I (2), a piezoelectric stack I (3), a piezoelectric stack II (4), a pre-tightening wedge block II (5), a T-shaped flexible hinge mechanism (6), a pre-tightening screw (7), a piezoelectric stack III (8), a pre-tightening wedge block III (9) and a spiral micrometer head (10), and the piezoelectric driving unit II (15) and the piezoelectric driving unit I (16) are completely the same in composition structure. The mover (1) adopts a high-precision linear guide rail with a slide block, and the guide rail is fixed on the base (11) through a screw; the T-shaped flexible hinge mechanism (6) is arranged on the base (11) through screws; the piezoelectric stack I (3), the piezoelectric stack III (8) and the piezoelectric stack II (4) are arranged in a T-shaped flexible hinge mechanism (6); the pre-tightening wedge block (2), the pre-tightening wedge block (5) and the pre-tightening wedge block (9) pre-tighten the piezoelectric stack I (3), the piezoelectric stack II (4) and the piezoelectric stack III (8) respectively; the pre-tightening screw (7) is fastened on the base (11), and the initial pre-tightening force between the T-shaped flexible hinge mechanism (6) and the rotor (1) can be adjusted through the pre-tightening screw (7) and the spiral micrometer head (10); the arc-shaped structure at the upper end of the T-shaped flexible hinge mechanism (6) is contacted with the rotor (1); the base (11) plays a role in supporting, installing and fixing other parts, and the rotor (1) and the T-shaped flexible hinge mechanism (6) are installed on the base (11) through screws.
The piezoelectric stack I (3) and the piezoelectric stack III (8) are electrically driven to move the T-shaped flexible hinge mechanism (6) and respectively provide driving force and pretightening force, the driving force drives the rotor (1) to do linear motion, and the pretightening force enables the T-shaped flexible hinge mechanism (6) to jack the rotor (1).
The piezoelectric stacks I (3), III (8) and II (4) adopt piezoelectric ceramic stacks PZT with controllable surface shapes.
The T-shaped flexible hinge mechanism (6) can be made of spring steel, high-strength aluminum alloy and other materials and is connected into a T shape through a thin-wall flexible hinge.
The upper end of the T-shaped flexible hinge mechanism (6) is in an arc-shaped structure with the contact part of the mover (1).
Referring to fig. 1 to 3, the specific working process of the present invention is as follows:
realization of creeping motion of the mover (1), initial state: adjusting the pretightening screw (7) and the screw micrometer head (10) to control the initial pretightening force between the T-shaped flexible hinge mechanism (6) and the rotor (1). Piezoelectric signals in the form of four groups of square waves are adopted to respectively control a piezoelectric stack I (3), a piezoelectric stack III (8), a piezoelectric stack V (13) and a piezoelectric stack IV (12) in a piezoelectric driving unit I (16) and a piezoelectric driving unit II (15). The piezoelectric stack I (3) and the piezoelectric stack III (8) are not electrified, and the system is in a free state; when the piezoelectric stack I (3) and the piezoelectric stack III (8) are electrified, the piezoelectric stack I (3) and the piezoelectric stack III (8) extend through an inverse piezoelectric effect to drive the T-shaped flexible hinge mechanism (6) to deform to generate a driving force and a pretightening force, the piezoelectric stack III (8) drives the T-shaped flexible hinge mechanism (6) to compress the mover (1), and the piezoelectric stack I (3) drives the T-shaped flexible hinge mechanism (6) to drive the mover (1) to move; when the piezoelectric stack I (3) and the piezoelectric stack III (8) start to lose power, the piezoelectric stack V (13) and the piezoelectric stack IV (12) are electrified. The piezoelectric stack I (3) and the piezoelectric stack III (8) return to a free state after power failure, the T-shaped flexible hinge mechanism (6) returns to an initial state, and the mover (1) is still kept at a moved position under the action of inertia force; after the piezoelectric stack V (13) and the piezoelectric stack IV (12) are energized, the piezoelectric driving unit II (15) repeats the operation of the piezoelectric driving unit I (16). When the piezoelectric stack V (13) and the piezoelectric stack IV (12) start to lose power, the piezoelectric stack I (3) and the piezoelectric stack III (8) are electrified, and the next cycle is started. And repeating the steps, and alternately electrifying the piezoelectric driving unit I (16) and the piezoelectric driving unit II (15) to work, so that the driving platform can realize crawling type motion and obtain larger output displacement. The piezoelectric stacks II (4) and III (8) and VI (14) and IV (12) in the piezoelectric driving unit I (16) and the piezoelectric driving unit II (15) are respectively loaded with the same voltage, and the steps are repeated, so that the creeping type large-stroke linear motion in the opposite direction can be realized.
The T-shaped creeping piezoelectric driving platform adopts the piezoelectric stack as a driving source and the T-shaped flexible hinge mechanism as a power transmission element, has the characteristics of small heat, stable driving, reliability and high efficiency, and can realize creeping large-stroke reciprocating linear precise driving.
Claims (4)
1. A T-shaped creeping type piezoelectric driving platform comprises two groups of same piezoelectric driving units, a rotor and a base. Each group of piezoelectric units comprises a piezoelectric stack, a T-shaped flexible hinge mechanism, a pre-tightening screw, a pre-tightening wedge block and a spiral micrometer head, and is characterized in that: the driving platform drives the rotor to realize micro-nano grade crawling type motion by alternately working of the two groups of piezoelectric driving units. The rotor adopts a high-precision linear guide rail with a slide block, and the guide rail is fixed on the base through a screw, so that high-precision reciprocating linear motion can be realized; the T-shaped flexible hinge mechanism is arranged on the base through a screw; the piezoelectric stack is arranged in the T-shaped flexible hinge mechanism and can be pre-tightened through a pre-tightening wedge block; the initial pretightening force between the T-shaped flexible hinge mechanism and the rotor can be adjusted by the pretightening screw and the screw micrometer head.
2. A T-shaped crawling type piezoelectric driving platform according to claim 1, characterized in that the two groups of T-shaped flexible hinge mechanisms are made of spring steel, high-strength aluminum alloy and other materials and are connected into a T shape through thin-wall flexible hinges.
3. A T-shaped creeping piezoelectric driving platform according to claim 1, wherein the mover is provided with a mechanism for reciprocating linear motion such as a ball linear guide, a roller linear guide, a V-groove linear guide, a dovetail groove linear guide, or the like.
4. The T-shaped crawling type piezoelectric driving platform according to claim 1, wherein the piezoelectric stack is electrically driven to move the T-shaped flexible hinge mechanism to provide a driving force and a pre-tightening force, the driving force drives the mover to linearly move, and the pre-tightening force enables the T-shaped flexible hinge mechanism to tightly press the mover.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910719469.3A CN110829880B (en) | 2019-07-25 | 2019-07-25 | T-shaped crawling piezoelectric driving platform |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910719469.3A CN110829880B (en) | 2019-07-25 | 2019-07-25 | T-shaped crawling piezoelectric driving platform |
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| CN110829880A true CN110829880A (en) | 2020-02-21 |
| CN110829880B CN110829880B (en) | 2024-02-20 |
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| CN104167953A (en) * | 2014-08-26 | 2014-11-26 | 哈尔滨工业大学 | Inner driving type passive clamping piezoelectric actuator |
| CN107040163A (en) * | 2017-06-08 | 2017-08-11 | 盐城工学院 | A kind of step-by-step movement miniature piezoelectric motors and its method of work |
| CN206559258U (en) * | 2017-01-19 | 2017-10-13 | 吉林大学 | A kind of accurate piezoelectric actuator of adjustable parasitic inertia motion formula of pretightning force |
| WO2018000516A1 (en) * | 2016-06-29 | 2018-01-04 | 广东工业大学 | Precision movement platform for single-drive rigid-flexible coupling, and method of realization and application thereof |
| CN207573263U (en) * | 2017-12-25 | 2018-07-03 | 吉林大学 | The device of the pre- parasitic principle piezoelectric actuator output performance of frictional force regulation and control |
| CN109921680A (en) * | 2019-04-25 | 2019-06-21 | 宁波大学 | A kind of stick-slip inertia linear actuator becoming pretightning force |
-
2019
- 2019-07-25 CN CN201910719469.3A patent/CN110829880B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20050107056A (en) * | 2004-05-07 | 2005-11-11 | 학교법인 포항공과대학교 | High speed, ultraprecision and long displacement stage |
| CN104167953A (en) * | 2014-08-26 | 2014-11-26 | 哈尔滨工业大学 | Inner driving type passive clamping piezoelectric actuator |
| WO2018000516A1 (en) * | 2016-06-29 | 2018-01-04 | 广东工业大学 | Precision movement platform for single-drive rigid-flexible coupling, and method of realization and application thereof |
| CN206559258U (en) * | 2017-01-19 | 2017-10-13 | 吉林大学 | A kind of accurate piezoelectric actuator of adjustable parasitic inertia motion formula of pretightning force |
| CN107040163A (en) * | 2017-06-08 | 2017-08-11 | 盐城工学院 | A kind of step-by-step movement miniature piezoelectric motors and its method of work |
| CN207573263U (en) * | 2017-12-25 | 2018-07-03 | 吉林大学 | The device of the pre- parasitic principle piezoelectric actuator output performance of frictional force regulation and control |
| CN109921680A (en) * | 2019-04-25 | 2019-06-21 | 宁波大学 | A kind of stick-slip inertia linear actuator becoming pretightning force |
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