CN110828363A - Automatic conversion machine table - Google Patents
Automatic conversion machine table Download PDFInfo
- Publication number
- CN110828363A CN110828363A CN201911031480.7A CN201911031480A CN110828363A CN 110828363 A CN110828363 A CN 110828363A CN 201911031480 A CN201911031480 A CN 201911031480A CN 110828363 A CN110828363 A CN 110828363A
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- China
- Prior art keywords
- vacuum
- vacuum chuck
- work platform
- wafer
- chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000006243 chemical reaction Methods 0.000 title claims abstract description 12
- 229910010271 silicon carbide Inorganic materials 0.000 claims abstract description 20
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 19
- 235000012431 wafers Nutrition 0.000 claims description 48
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 239000000741 silica gel Substances 0.000 claims description 5
- 229910002027 silica gel Inorganic materials 0.000 claims description 5
- 238000000926 separation method Methods 0.000 abstract description 2
- 210000000078 claw Anatomy 0.000 description 6
- 239000013078 crystal Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 239000013256 coordination polymer Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses an automatic conversion table, which comprises: work platform, vacuum chuck, vacuum device, vacuum chuck telescopic machanism and grabbing device, work platform's surface is provided with the vacuum mouth, the vacuum mouth runs through work platform, the vacuum mouth passes through the pipe connection vacuum device, be provided with directly over work platform vacuum chuck, vacuum chuck pass through the pipeline with vacuum device connects, the last suction nozzle that is provided with of vacuum chuck, vacuum chuck telescopic machanism's flexible end with vacuum chuck fixed connection, grabbing device sets up one side of work platform. The PCB and the wafer are separated by using a vacuum device and a vacuum chuck, and the vacuum chuck is provided with a suction nozzle capable of adsorbing the wafer, so that the wafer is uniformly stressed in the separation process, and the thinned wafer is not damaged; and secondly, the mechanical operation ensures that the conversion efficiency of the whole silicon carbide plate and the printed circuit board is higher.
Description
Technical Field
The invention relates to the field of semiconductor manufacturing, in particular to an automatic conversion machine.
Background
After the wafer foundry process is finished, each Chip needs to be subjected to CP test before the product is packaged, and the bad chips are screened out as much as possible to save the packaging cost. Before CP testing, the thinned wafer needs to be transferred from the silicon carbide board to a Printed Circuit Board (PCB) for testing, and after testing, the wafer needs to be transferred to the silicon carbide board for continuing the subsequent cutting process. At present, mutual transfer between a PCB and a SiC board is manually operated, and the structure is shown in figure 1, which has the following defects: 1. usually, the Wafer is only 75um after thinning, and manual operation is easy to apply force unevenly, so that the risk of splintering exists; 2. when the silicon carbide and the PCB are mutually transferred, a silicon carbide board or a PCB needs to be placed on the front surface of a Wafer (Wafer), then the Wafer (Wafer) is turned over, the silicon carbide board or the PCB on the back surface of the Wafer is taken down, and the Wafer (Wafer) has the risk of being scratched; 3. manual operation and low efficiency.
Disclosure of Invention
Therefore, an automatic conversion machine table is needed to be provided, and the problems of low efficiency and poor effect of manual transfer of silicon carbide and a PCB are solved.
To achieve the above object, the present invention provides an automatic converting machine, including: work platform, vacuum chuck, vacuum device, vacuum chuck telescopic machanism and grabbing device, work platform's surface is provided with the vacuum mouth, the vacuum mouth runs through work platform, the vacuum mouth passes through the pipe connection vacuum device, be provided with directly over work platform vacuum chuck, vacuum chuck pass through the pipeline with vacuum device connects, the last suction nozzle that is provided with of vacuum chuck, vacuum chuck telescopic machanism's flexible end with vacuum chuck fixed connection, vacuum chuck telescopic machanism sets up directly over work platform, vacuum chuck telescopic machanism is used for driving vacuum chuck is close to or keeps away from work platform, grabbing device sets up one side of work platform, grabbing device is used for snatching treats conversion wafer to work platform.
Further, the suction nozzle is the silica gel material.
Furthermore, the number of the suction nozzles is multiple, and the suction nozzles are arranged on the vacuum chuck in an annular array and form a plane.
Further, the gripping device comprises a mechanical claw, a mechanical arm and a mechanical arm track, wherein the mechanical arm is arranged in the mechanical arm track in a sliding mode, and the mechanical claw is arranged on the mechanical arm in a hinged mode.
Furthermore, the wafer picking device further comprises a wafer boat, wherein the wafer boat is arranged beside the picking device and used for placing wafers.
Further, the wafer boat comprises two wafer boats for respectively placing the printed circuit board and the silicon carbide board.
Further, the vacuum device comprises a vacuum pump, and an air inlet of the vacuum pump is connected with the pipeline.
Further, the vacuum chuck telescopic mechanism is sleeved on the outer side of a pipeline between the vacuum chuck and the vacuum device.
Furthermore, the vacuum chuck device further comprises a control system, and the control system is connected with and controlled by the working platform, the vacuum chuck telescopic mechanism and the gripping device.
Different from the prior art, the technical scheme separates the PCB and the wafer by using the vacuum device and the vacuum chuck, and the vacuum chuck is provided with the suction nozzle which can adsorb the wafer, so that the wafer is uniformly stressed in the separation process, and the thinned wafer cannot be damaged; and secondly, the mechanical operation enables the conversion efficiency of the whole silicon carbide board and a Printed Circuit Board (PCB) to be higher.
Drawings
FIG. 1 is a schematic diagram of a conversion process of silicon carbide and a printed circuit board according to the prior art;
FIG. 2 is a schematic diagram of an automatic converting machine according to an embodiment;
FIG. 3 is a schematic diagram of the structure of the vacuum chuck according to the embodiment;
fig. 4 is a schematic structural diagram of a workbench according to an embodiment.
Description of reference numerals:
1. a working platform;
11. a vacuum port;
2. a vacuum device;
3. a vacuum chuck;
31. suction nozzle
4. A vacuum chuck telescoping mechanism;
5. a gripper;
6. a mechanical arm;
7. a robotic arm track;
8. a second wafer boat;
9. a first wafer boat.
Detailed Description
To explain technical contents, structural features, and objects and effects of the technical solutions in detail, the following detailed description is given with reference to the accompanying drawings in conjunction with the embodiments.
Referring to fig. 2 to 4, the present embodiment provides an automatic converting machine, where the automatic converting machine includes a working platform 1, a vacuum chuck 2, a gripping device, a vacuum chuck telescopic mechanism 4, and a control system, a vacuum port 11 is disposed in the center of the working platform 1, the vacuum port 11 penetrates through the working platform 1, the vacuum port 11 is connected to the vacuum device 2, the vacuum device 2 may be disposed below the vacuum port 1, the vacuum device 2 includes a vacuum pump and a pipeline, an air inlet of the vacuum pump is connected to the vacuum port 11 through the pipeline, an air outlet of the vacuum pump is communicated with the outside through another pipeline, and a valve is disposed on the pipeline.
In some embodiments, a plurality of vacuum ports 11 may be provided on the work platform 1. The plurality of vacuum ports 11 can be symmetrically distributed on the working platform 1, and the PCB and the silicon carbide board can be adsorbed through the vacuum ports 11.
In some embodiments, a groove may be dug on the surface of the work platform 1 near the vacuum port 11, so as to accommodate a gripping device for gripping a wafer placed on the work platform 1.
Referring to fig. 2 and 4, a vacuum chuck 3 is disposed right above the working platform 1, and a suction nozzle 31 made of silica gel is disposed on the vacuum chuck 3. The number of the suction nozzles 31 is plural, and the plural suction nozzles 31 are arranged in a circular array at the center of the vacuum chuck 3 and form a plane. Wafer only has 75 microns (um) after the attenuate, suction nozzle 31 because the material of silica gel is soft and can adsorb the different positions of wafer simultaneously, and each local position atress of wafer is even, can not damage the wafer after the thin. The vacuum chuck 3 is connected with the vacuum device 2, the air inlet of the vacuum pump is connected with the vacuum chuck 3 through a pipeline, and a valve is arranged on the pipeline. The vacuum chuck telescopic mechanism 4 is sleeved on the vacuum chuck 3 and the outer side of a pipeline between the vacuum devices 2, the vacuum chuck telescopic mechanism 4 is electrically connected with the control system, the control system controls the vacuum chuck telescopic mechanism 4 to move up and down, and the telescopic end of the vacuum chuck telescopic mechanism 4 is fixedly connected with the vacuum chuck 3. The vacuum chuck telescopic mechanism 4 is used for driving the vacuum chuck 3 to be close to or far away from the working platform 1.
In this embodiment, vacuum chuck telescopic machanism 4 includes slider, axis of rotation and spring, one side sliding connection of vacuum chuck telescopic machanism 4's inner wall has two sliders, and one side of slider is rotated and is connected with the axis of rotation, and the axis of rotation is rotated through the pivot and is connected with and promotes the axle, and the one end that promotes the axle is rotated and is connected the opposite side of vacuum chuck telescopic machanism inner wall, the first elastomeric element of fixedly connected with between two sliders, the one end of pivot pass through the second elastomeric element with vacuum chuck telescopic machanism 4's inner wall fixed connection. The vacuum chuck telescopic mechanism is provided with a motor, and the motor is electrically connected with the control system.
In some embodiments, the vacuum chuck telescoping mechanism 4 is formed by combining two telescoping pieces and an elastic component, a groove is arranged on the inner wall of the outer telescoping piece, the inner telescoping piece is slidably nested on the groove of the outer telescoping piece, one end of the elastic component is connected with the inner telescoping piece, and the other end of the elastic component is connected with the outer telescoping piece. The vacuum chuck telescopic mechanism 4 is provided with a motor, and the motor is electrically connected with the control system. Or the vacuum chuck telescopic mechanism 4 is a telescopic mechanism with other components and functions similar to those of the vacuum chuck telescopic mechanism, and only needs to drive the vacuum chuck 3 to be close to or far away from the working platform 1.
In some embodiments, the vacuum chuck retracting mechanism 4 may not be sleeved outside the pipeline between the vacuum chuck 3 and the vacuum device 2, that is, the retracting end of the vacuum chuck retracting mechanism 4 is fixedly connected to the vacuum chuck 3, and the other end of the vacuum chuck retracting mechanism 4 is fixed on the fixing surface.
Referring to fig. 2, in order to transfer the separated silicon carbide board and the separated Printed Circuit Board (PCB), the grabbing device is disposed at one side of the working platform 1, and is configured to grab the wafer to be converted to the working platform 1 and grab the PCB to be converted and the silicon carbide board to the working platform 1. In this embodiment, the grabbing device includes gripper 5, arm 6 and arm track 7, the last slip recess that has of arm track 7, the slip recess runs through arm track 7, arm 6 slides and sets up in the slip recess, arm 6 passes the slip recess, gripper 5 articulates on arm 6, gripper 5 can snatch carborundum board and PCB board to all directions.
In this embodiment, the mechanical arm 5 is slidably disposed in the sliding groove, two sides of the mechanical arm 5 are connected to one end of a support rod, the other end of the support rod is provided with a limiting piece, and the limiting piece is disposed in the sliding groove, so that the mechanical arm 6 which can slide on the mechanical arm rail 7 is formed.
In some embodiments, the gripping device comprises the gripper, a robot arm and a base, the gripper is hinged to the top end of the robot arm, the robot arm is formed by a plurality of connecting rods hinged together, the bottom end of the robot arm is hinged to a connecting plate, a bearing is arranged between the connecting plate and the base, and the connecting plate can rotate for a shaft and carry the robot arm above the connecting plate to rotate.
Referring to fig. 2, the automatic converting table further includes a plurality of crystal boats disposed at one side of the grabbing device, each crystal boat includes a first crystal boat 9 and a second plate crystal boat 8, the first crystal boat 9 is disposed with a silicon carbide plate, and the second crystal boat 8 is disposed with a PCB plate.
Referring to fig. 1, the automatic transfer table further includes a control system, and the control system is connected to and controlled by the work platform 1, the vacuum chuck 3, the vacuum device 2, the vacuum chuck telescopic mechanism 4, and the gripping device. Through control system can play control vacuum device 2 with vacuum chuck 3 adsorbs wafer, PCB board, silicon nitride board etc. can play control grabbing device snatchs wafer, PCB board, silicon nitride board etc. can play control vacuum chuck telescopic machanism 4 drives vacuum chuck 3 is close to or keeps away from work platform 1.
The specific implementation mode of the invention is as follows: 1. the control system controls the gripping device (mechanical arm) to place a wafer based on a Printed Circuit Board (PCB) on the working platform 1, and the Printed Circuit Board (PCB) is arranged below the wafer; 2. the control system controls the vacuum chuck telescopic mechanism 4 to lower the vacuum chuck 3 to a preset safety height (so that the vacuum chuck can adsorb the wafer without extruding the wafer), controls the vacuum device 2 to open the vacuum of the pipeline between the vacuum device 2 and the vacuum chuck 3 (such as opening an electromagnetic valve of the pipeline), and controls the vacuum of the working platform to be opened, and at the moment, the vacuum chuck 3 sucks the wafer on the working platform; 3. controlling the vacuum chuck telescoping mechanism 4 to enable the vacuum chuck telescoping mechanism 4 to ascend, and then separating the wafer from the printed circuit board; 4. the control system closes the vacuum of the working platform, controls the mechanical arm 6 to adjust the height of the mechanical claw 5, and the mechanical claw 5 moves along with the position of the mechanical arm track 7, then picks up the PCB on the working platform 1 and places the PCB on the second wafer boat 8; 5. the mechanical arm 6 is controlled to adjust the height of the mechanical claw 5, the mechanical claw 5 moves along with the position of the mechanical arm track 7, and the silicon carbide plate on the first wafer boat 9 is grabbed and placed on the working platform 1; 6. the control system controls the vacuum chuck telescopic mechanism 4 to lower the vacuum chuck 3 to a safe height, then controls a pipeline between the vacuum device 2 and the vacuum port 11 to open vacuum, controls a pipeline between the vacuum device 2 and the vacuum chuck 3 to close vacuum, and places the wafer on the silicon carbide plate on the working platform 1; 7. controlling the vacuum chuck telescoping mechanism 4 to lift the vacuum chuck telescoping mechanism 4; 8. and controlling the pipeline between the vacuum device 2 and the vacuum port 11 to close the vacuum, and then controlling the gripping device to grip the converted wafer, so that the operation is finished.
The PCB and the wafer are separated by using a vacuum device and a vacuum chuck, and a silica gel suction nozzle arranged on the vacuum chuck is soft in material and can simultaneously suck different positions of the wafer, so that the stress of each local position of the wafer is uniform, and the thin wafer cannot be damaged; and secondly, mechanical operation is carried out, so that the conversion efficiency of the whole silicon carbide board and the PCB is higher.
It should be noted that, although the above embodiments have been described herein, the invention is not limited thereto. Therefore, based on the innovative concepts of the present invention, the technical solutions of the present invention can be directly or indirectly applied to other related technical fields by making changes and modifications to the embodiments described herein, or by using equivalent structures or equivalent processes performed in the content of the present specification and the attached drawings, which are included in the scope of the present patent.
Claims (9)
1. An automatic conversion machine, comprising: work platform, vacuum chuck, vacuum device, vacuum chuck telescopic machanism and grabbing device, work platform's surface is provided with the vacuum mouth, the vacuum mouth runs through work platform, the vacuum mouth passes through the pipe connection vacuum device, be provided with directly over work platform vacuum chuck, vacuum chuck pass through the pipeline with vacuum device connects, the last suction nozzle that is provided with of vacuum chuck, vacuum chuck telescopic machanism's flexible end with vacuum chuck fixed connection, vacuum chuck telescopic machanism sets up directly over work platform, vacuum chuck telescopic machanism is used for driving vacuum chuck is close to or keeps away from work platform, grabbing device sets up one side of work platform, grabbing device is used for snatching treats conversion wafer to work platform.
2. The automatic converting machine station of claim 1, wherein the suction nozzle is made of silica gel.
3. The automatic converting machine station of claim 1 or 2, wherein the number of the suction nozzles is plural, and the plural suction nozzles are arranged on the vacuum chuck in a circular array and form a plane.
4. The automatic converting machine station of claim 1, wherein the gripping device comprises a gripper, a robot arm, and a robot track, the robot arm is slidably disposed in the robot track, and the gripper is hinged to the robot arm.
5. The automatic transfer machine as claimed in claim 1, further comprising a boat disposed beside the grabbing device, wherein the boat is used for placing wafers.
6. The automatic converting machine of claim 5, wherein the boat comprises two boats for placing the printed circuit board and the silicon carbide board, respectively.
7. The automatic converting machine station of claim 1, wherein the vacuum device comprises a vacuum pump, and an air inlet of the vacuum pump is connected to the pipeline.
8. The automatic transfer machine of claim 1, wherein the vacuum chuck telescoping mechanism is sleeved outside the pipe between the vacuum chuck and the vacuum device.
9. The automatic converting machine station of claim 1, further comprising a control system, wherein the control system is connected to and controls the work platform, the vacuum chuck retracting mechanism and the gripping device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911031480.7A CN110828363A (en) | 2019-10-28 | 2019-10-28 | Automatic conversion machine table |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911031480.7A CN110828363A (en) | 2019-10-28 | 2019-10-28 | Automatic conversion machine table |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110828363A true CN110828363A (en) | 2020-02-21 |
Family
ID=69550836
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911031480.7A Pending CN110828363A (en) | 2019-10-28 | 2019-10-28 | Automatic conversion machine table |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110828363A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114104614A (en) * | 2020-08-28 | 2022-03-01 | 武汉锐晶激光芯片技术有限公司 | Semi-automatic integrated sample feeding device of end face treatment equipment |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202275809U (en) * | 2011-10-19 | 2012-06-13 | 科达半导体有限公司 | Separation tool |
| JP2017045784A (en) * | 2015-08-25 | 2017-03-02 | 株式会社ディスコ | Robot hand |
| CN106783699A (en) * | 2017-03-03 | 2017-05-31 | 爱立发自动化设备（上海）有限公司 | A kind of wafer and glass separation device and method |
| CN210535644U (en) * | 2019-10-28 | 2020-05-15 | 福建省福联集成电路有限公司 | Automatic wafer conversion machine platform |
-
2019
- 2019-10-28 CN CN201911031480.7A patent/CN110828363A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202275809U (en) * | 2011-10-19 | 2012-06-13 | 科达半导体有限公司 | Separation tool |
| JP2017045784A (en) * | 2015-08-25 | 2017-03-02 | 株式会社ディスコ | Robot hand |
| CN106783699A (en) * | 2017-03-03 | 2017-05-31 | 爱立发自动化设备（上海）有限公司 | A kind of wafer and glass separation device and method |
| CN210535644U (en) * | 2019-10-28 | 2020-05-15 | 福建省福联集成电路有限公司 | Automatic wafer conversion machine platform |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114104614A (en) * | 2020-08-28 | 2022-03-01 | 武汉锐晶激光芯片技术有限公司 | Semi-automatic integrated sample feeding device of end face treatment equipment |
| CN114104614B (en) * | 2020-08-28 | 2024-05-28 | 武汉锐晶激光芯片技术有限公司 | Semi-automatic integrated sample injection device of end face treatment equipment |
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