CN110803689A - 一种精馏法去除一氧化碳并集成高纯氮的氩气回收方法和装置 - Google Patents

一种精馏法去除一氧化碳并集成高纯氮的氩气回收方法和装置 Download PDF

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CN110803689A
CN110803689A CN201911261726.XA CN201911261726A CN110803689A CN 110803689 A CN110803689 A CN 110803689A CN 201911261726 A CN201911261726 A CN 201911261726A CN 110803689 A CN110803689 A CN 110803689A
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argon
tower
nitrogen
rectification
gas
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郝文炳
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Shanghai Union Wind Energy Technology Co Ltd
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Shanghai Union Wind Energy Technology Co Ltd
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Abstract

本发明涉及一种精馏法去除一氧化碳并集成高纯氮的氩气回收方法,包括氩气回收流路和空气氮气流路。还涉及一种精馏法去除一氧化碳并集成高纯氮的氩气回收装置,包括氩气压缩机、一氧化碳反应炉、氩气预冷纯化***、空气压缩机、空气预冷纯化***、换热器、精氩塔、氩塔第一再沸器、氩塔第二再沸器、氩塔冷凝蒸发器、氮塔和氮塔冷凝蒸发器。本发明利用集成的空气氮气流路,通过利用液氩的富足冷量,冷箱内自产氮气可降低再生气的限制,提高回收氩气的提取率;并利用富裕的液氩冷量产部分液氮,提高经济效益。

Description

一种精馏法去除一氧化碳并集成高纯氮的氩气回收方法和 装置
技术领域
本发明涉及一种氩气回收方法,尤其涉及一种精馏法去除一氧化碳并集成高纯氮的氩气回收方法和装置。
背景技术
直拉法(Czochralski method)是生产单晶硅的主要方法,全球70%~80%的单晶硅通过直拉法生产。最常用的直拉法生产单晶硅工艺是采用即像真空工艺又像流动气氛工艺的减压拉晶工艺;减压工艺是在硅单晶拉制过程中,连续等速地向单晶炉炉膛内通入高纯度氩气,同时真空泵不断地从炉膛向外抽送氩气,保持炉膛内真空度稳定在20托左右,这种工艺既有真空工艺的特点,又有流动气氛工艺的特点。减压拉晶工艺的真空泵一般采用滑阀泵,滑阀泵是用油来保持密封的机械真空泵。氩气携带单晶拉制过程中由于高温而产生的硅氧化物和杂质挥发物,并通过真空泵的抽送排放到大气。
通过对排放氩气的分析,主要杂质成分为,氧气、氮气、一氧化碳、二氧化碳、甲烷等烷烃,液态润滑油雾;回收利用这部分氩气有很大现实意义。
氩气回收纯化的公知技术:对来自单晶炉回收的氩气进行粗除油,再经压缩冷却后高精度除油除尘;接着通过高温催化使甲烷等烃类和一氧化碳同氧气反应生产水和二氧化碳,催化反应中保证氧气过量(杂质氧气不够则加入氧气);通过冷却后在催化剂作用下使过量氧气同加入的氢气反应生成水,并保证反应氢气过量,处理后氩气中杂质成分为水、二氧化碳、氢气和氮气;最后经过氩气常温吸附单元吸附水和二氧化碳,得到只含有氮气和氢气为杂质的粗氩气。氩气常温吸附单元由二个吸附器组成,吸附器中装有吸附水和二氧化碳的吸附剂,一个吸附器进行吸附工作,另一个吸附器进行包括泄压、加温、吹冷的再生工作。所述再生工作的气体使用氮气,该再生氮气来自冷箱中低温精馏塔生产或外购,氩气常温吸附单元通过时间程序控制器自动控制运行切换。
专利201210078306.x中,低温精馏部分使用空气循环制冷,能耗高,流程复杂,加入的过量氢气放空,利用率低;专利201410618341.5中,用空气压缩,双塔流程,能耗无优势,结构复杂,增加设备投资;专利201621146690.2中,为保持冷箱提供的外界液氩量较大,以及受再生气限制,提取率比较低,专利只设计以加氢方式来除氧,危险性较大;专利CN108645118 A中,带低温运动部件,稳定性较差;专利CN 109631495 A中,使用正流膨胀流程,带低温运动部件,稳定性较差,适用于氩气常压出塔情况,不适用于氩气带压力出塔。
因此,本领域的技术人员致力于开发流程更简洁,无氢除氧工艺,利用精馏法去除一氧化碳,无低温运动部件,操作更方便,提取率更高的氩气回收方法。
发明内容
本发明的目的是针对现有技术中的不足,提供一种精馏法去除一氧化碳并集成高纯氮的氩气回收方法和装置。
为实现上述目的,本发明采取的技术方案是:
提供一种精馏法去除一氧化碳并集成高纯氮的氩气回收方法,包括氩气回收流路和空气氮气流路,
所述的氩气回收流路,包括如下步骤:
S11、将回收氩气经氩气压缩机加压,并去除油及粉尘后,进入一氧化碳反应炉去除其中的氧气;除氧后的氩气经过冷却器冷却后,进入氩气预冷纯化***中脱除其中的水和二氧化碳,得到干燥的粗氩气;
S12、将干燥的粗氩气送入精馏冷箱,先经换热器降温至液化温度后,进入设立于精氩塔底部的氩塔第一再沸器,在氩塔第一再沸器中,气体被液化,出氩塔第一再沸器的液体经节流降压部分被气化后,送入精氩塔中上部参与精馏;
S13、进入精氩塔的气液混合流体,其中的液体部分随着塔内液体下降,在塔底得到纯液氩;从精氩塔底部抽出纯液氩经节流降压后送入氩塔冷凝蒸发器的蒸发侧,纯液氩在氩塔冷凝蒸发器的蒸发侧蒸发为氩气,经过换热器复热回收冷量后,送出精馏冷箱;
S14、进入精氩塔的气液混合流体,其中的气体部分随着塔内气体上升,在塔顶的气体主要是一氧化碳与氮气,从精氩塔顶部抽出的气体的一部分进入氩塔冷凝蒸发器,冷凝为液体后送入精氩塔;
所述的空气氮气流路,包括如下步骤:
S21、空气经过空气压缩机压缩后,进入空气预冷纯化***,去除其中的水和二氧化碳;干燥后的空气经精馏冷箱内的换热器降温至液化温度,之后送入氮塔底部,为氮塔提供精馏气体;
S22、进入氮塔底部的带液空气,其中的重组分在液体中积聚,在塔底得到液体的富氧气;其中的轻组分在气体中积聚,在塔顶得到高纯度氮气;
S23、从氮塔塔顶抽出的高纯度氮气分为两部分:第一部分氮气送入氮塔冷凝蒸发器的高温侧,被降温冷却为液氮后送回氮塔,参与氮塔的精馏;第二部分氮气经过换热器复热回收冷量后,送出精馏冷箱,然后送入氩气预冷纯化***内作为再生气使用;
S24、从氮塔的底部抽出的富氧液空经过调整压力后,进入氮塔冷凝蒸发器,为其提供冷源,本身被汽化为富氧气出氮塔冷凝蒸发器,然后进入换热器复热,出精馏冷箱后输送至空气预冷纯化***内作为干燥气体。
进一步地,步骤S11中,除氧后的氩气经过冷却器冷却至35-40℃,再进入氩气预冷纯化***中,经氩气预冷机冷却至5-8℃,进入氩气纯化器脱除水和二氧化碳,得到干燥的粗氩气。
进一步地,步骤S13中,来自所述精馏冷箱外界的补充液氩通过管道进入所述精氩塔冷凝蒸发器的蒸发侧。
进一步地,步骤S13中,送出所述精馏冷箱的氩气分为两部分:第一部分氩气作为氩气产品,可加压或者直接送气;第二部分氩气作为循环气,进入氩气循环压缩机加压后,送回精馏冷箱,经换热器降温后,进入精氩塔底部的氩塔第二再沸器,在其中被液化,经过降压后送至氩塔冷凝蒸发器内为其提供冷源。
进一步地,步骤S14中,从所述精氩塔顶部抽出的气体分成两部分:第一部分经换热器复热回收冷量后送出塔外放空;第二部分气体进入氩塔冷凝蒸发器的气体侧冷凝为液体,流入精氩塔,为精馏提供液体。
进一步地,步骤S23中,所述第一部分氮气送入氮塔冷凝蒸发器的高温侧,被降温冷却为液氮后,一部分送回氮塔参与氮塔的精馏,另一部分液氮可作为副产品,抽出精馏冷箱。
还提供一种基于上述所述的精馏法去除一氧化碳并集成高纯氮的氩气回收装置,包括氩气压缩机、一氧化碳反应炉、氩气预冷纯化***、空气压缩机、空气预冷纯化***、换热器、精氩塔、氩塔第一再沸器、氩塔第二再沸器、氩塔冷凝蒸发器、氮塔和氮塔冷凝蒸发器;其中:
所述氩气压缩机通过管道经所述一氧化碳反应炉与氩气预冷纯化***连接,所述氩气压缩机用于对回收氩气进行加压处理,加压后的回收氩气经所述一氧化碳反应炉去除其中的氧气,然后送入所述氩气预冷纯化***内经降温后脱除其中的水和二氧化碳;
所述氩气预冷纯化***通过管道经所述换热器与设置于所述精氩塔底部的氩塔第一再沸器连接,以将干燥的氩气经所述换热器降温至液化温度,并送入所述氩塔第一再沸器内形成气液混合流体,所述氩塔第一再沸器底部通过管道连通所述精氩塔中上部,以将所述氩塔再沸器内的气液混合流体经调压后送入所述精氩塔中上部参与精馏;
所述精氩塔的底部通过管道连通所述氩塔冷凝蒸发器,以将所述精氩塔塔底的纯液氩抽送至所述氩塔冷凝蒸发器的蒸发侧,并在蒸发侧蒸发为氩气;所述氩塔冷凝蒸发器的蒸发侧通过管道经所述换热器与所述精馏冷箱外界连通,以将蒸发侧的氩气经所述换热器复热后送出所述精馏冷箱;
其中,出所述精馏冷箱的管道分为两条支路,其中一条可直接或加压后连接氩气产品端,另外一条经换热器连接氩塔第二再沸器;以将送出所述精馏冷箱的氩气分为两部分:第一部分氩气作为氩气产品;第二部分氩气作为循环气,送回精馏冷箱,经换热器降温后,进入精氩塔底部的氩塔第二再沸器,在其中被液化,经过降压后送至氩塔冷凝蒸发器内为其提供冷源;
所述精氩塔的顶部分别通过管道经所述换热器出精馏冷箱连通所述氩气预冷纯化***以及通过管道连通所述氩塔冷凝蒸发器的气体侧;
从所述精氩塔顶部抽出的气体分成两部分:第一部分经换热器复热回收冷量后送出塔外放空;第二部分气体进入氩塔冷凝蒸发器的气体侧冷凝为液体,流入精氩塔,为精馏提供液体;
所述空气压缩机通过管道与所述空气预冷纯化***连接,空气经所述空气压缩机加压处理后送入所述空气预冷纯化***内,以经降温后脱除其中的水和二氧化碳;
所述空气预冷纯化***通过管道经所述换热器连通所述氮塔的底部,以将干燥的空气经所述换热器降温至液化温度后送入所述氮塔底部,为所述氮塔提供精馏气体;
所述氮塔的顶部分别通过管道经所述换热器出精馏冷箱连通所述氩气预冷纯化***、通过管道连通所述氮塔冷凝蒸发器的高温侧;从所述氮塔顶部抽出的气体分为两部分,第一部分送入所述氮塔冷凝蒸发器的高温侧,经降温冷却为液氮后,其中的一部分液氮通过管道送入所述氮塔顶部参与精馏,另一部分液氮通过管道送出精馏冷箱;第二部分经所述换热器复热后出精馏冷箱送入所述氩气预冷纯化***作为再生气使用;以及
所述氮塔的底部分别通过管道连通所述氮塔冷凝蒸发器的顶部;从所述氮塔底部抽出的富氧液空经调压后进入所述氮塔冷凝蒸发器为其提供冷源,本身被汽化为富氧气出氮塔冷凝蒸发器,然后进入换热器复热,出精馏冷箱后输送至空气预冷纯化***内作为干燥气体。
进一步地,还包括:
冷却器,其设置于所述一氧化碳反应炉与氩气预冷纯化***之间管道上;用于对经所述一氧化碳反应炉除氧后的高温氩气进行冷却处理。
进一步地,所述氩塔冷凝蒸发器的蒸发侧通过管道与所述精馏冷箱外界连通,以通过该管道为所述氩塔冷凝蒸发器补充液氩。
进一步地,还包括:
氩气循环压缩机,其设置于依次经所述氩塔冷凝蒸发器、换热器与依次经所述换热器、氩塔第二再沸器之间的管道上;用于对送出所述精馏冷箱的循环氩气加压后送回精馏冷箱。
本发明采用以上技术方案,与现有技术相比,具有如下技术效果:
本发明的利用回收现场会有液氩提供的便利,用液氩提供冷量;利用拉晶过程中产生的一氧化碳气来去除混入的氧气,再利用低温精馏法脱除氮气、过量的一氧化碳,提高了氩气的回收率,简化了低温精馏的流程和操作,降低了运行能耗;利用集成的空气氮气流路,通过利用液氩的富足冷量,冷箱内自产氮气可降低再生气的限制,提高回收氩气的提取率;并利用富裕的液氩冷量产部分液氮,提高经济效益。
附图说明
图1是本发明的精馏法去除一氧化碳并集成高纯氮的氩气回收装置的流程示意图;
其中,附图标记为:
氩气压缩机1;一氧化碳反应炉2;冷却器3;氩气预冷纯化***4;精馏冷箱5;换热器6;精氩塔7;氩塔第一再沸器8;氩塔第二再沸器9;氩塔冷凝蒸发器10;氮塔11;氮塔冷凝蒸发器12;空气压缩机13;空气预冷纯化***14;氩气循环压缩机15;V1纯液氩节流阀;V2粗液氩节流阀;V5循环液氩节流阀。
具体实施方式
下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有作出创造性劳动的前提下所获得的所有其他实施例,都属于本发明保护的范围。
需要说明的是,在不冲突的情况下,本发明中的实施例及实施例中的特征可以相互组合。
下面结合附图和具体实施例对本发明作进一步说明,但不作为本发明的限定。
实施例1
如图1所示,本发明实施例提供一种精馏法去除一氧化碳并集成高纯氮的氩气回收方法,包括氩气回收流路和空气氮气流路,
所述的氩气回收流路,包括如下步骤:
S11、回收氩气组分:O2≤400ppm,N2≤2000ppm,CO:~1000ppm,其余为Ar。其中CO含量需要>2倍的O2含量。因O2量主要是混入空气量产生的,N2会与O2成比例存在;
将回收氩气经氩气压缩机1加压至1.0~1.1MPa(A),并去除油及粉尘后,进入一氧化碳反应炉2去除其中的氧气;除氧后的氩气经过冷却器3冷却至约40℃后,进入氩气预冷纯化***4中,先经过氩气预冷机冷却后,进入氩气纯化器脱除其中的水和二氧化碳,得到干燥的粗氩气;剩下的粗氩气主要成为为:Ar、N2、CO等;
S12、将干燥的粗氩气送入精馏冷箱5,先经换热器6降温至约-155℃~-158℃后,进入设立于精氩塔7底部的氩塔第一再沸器8,在氩塔第一再沸器8中,气体被液化,出氩塔第一再沸器8的液体经节流降压部分被气化后,送入精氩塔7中上部参与精馏;氩塔第一再沸器8的操作压力为0.95MPa(A)~1.05MPa(A),精氩塔7的压力为0.75MPa(A)~0.85MPa(A);由于存在压力差,介质沸点温度会根据压力改变,使氩塔第一再沸器8内外侧形成约1~1.5℃的温差,保证氩塔第一再沸器8的热交换;
S13、进入精氩塔7的气液混合流体,其中的液体部分随着塔内液体下降,在塔底得到纯液氩;从精氩塔7底部抽出纯液氩经节流降压后送入氩塔冷凝蒸发器10的蒸发侧,来自所述精馏冷箱5外界的补充液氩通过管道进入所述精氩塔冷凝蒸发器12的蒸发侧,纯液氩在氩塔冷凝蒸发器10的蒸发侧蒸发为氩气,经过换热器6复热回收冷量后,送出精馏冷箱5;
送出所述精馏冷箱5的氩气分为两部分:第一部分氩气作为氩气产品,其压力为0.6MPa(A)~0.65MPa(A);第二部分氩气作为循环气,进入氩气循环压缩机15加压至0.9MPa(A)~1.0MPa(A)后,送回精馏冷箱5,经换热器6降温至-155~-158℃后,进入精氩塔7底部的氩塔第二再沸器8,在其中被液化,经过降压后送至氩塔冷凝蒸发器12内为其提供冷源;氩塔冷凝蒸发器10的操作压力约为0.63~0.68Mpa(A);如出冷箱压力要求降低,整个***的压力可降低操作;
S14、进入精氩塔7的气液混合流体,其中的气体部分随着塔内气体上升,在塔顶的气体主要是一氧化碳与氮气,从精氩塔7顶部抽出的气体的一部分进入氩塔冷凝蒸发器10,冷凝为液体后送入精氩塔7;
从所述精氩塔7顶部抽出的气体分成两部分:第一部分经换热器6复热至常温,一般与比进气温度低1.5~3℃回收冷量后送出塔外放空;第二部分气体进入氩塔冷凝蒸发器10的气体侧冷凝为液体,流入精氩塔7,为精馏提供液体;
所述的空气氮气流路,包括如下步骤:
S21、空气经过空气压缩机13压缩至0.7~1.2MPa(G)后,进入空气预冷纯化***14,去除其中的水和二氧化碳;干燥后的空气经精馏冷箱5内的换热器6降温至-160~-175℃,之后送入氮塔11底部,为氮塔11提供精馏气体;
S22、进入氮塔11底部的带液空气,其中的重组分在液体中积聚,在塔底得到液体的富氧气,含氧量约为30%~40%;其中的轻组分在气体中积聚,在塔顶得到高纯度氮气,含氧量为<1ppm;
S23、氮塔11的压力为0.4~0.8MPa(G),温度为该压力下的液体沸点;从氮塔11塔顶抽出的高纯度氮气分为两部分:第一部分氮气送入氮塔冷凝蒸发器12的高温侧,被降温冷却为液氮后,一部分送回氮塔11,参与氮塔11的精馏,另一部分液氮可作为副产品,抽出精馏冷箱5;第二部分氮气经过换热器6复热回收冷量后,送出精馏冷箱5,然后送入氩气预冷纯化***4内作为再生气使用;
S24、从氮塔11的底部抽出的富氧液空经过调整压力至0.3~0.5MPa(A)后,进入氮塔冷凝蒸发器12,为其提供冷源,本身被汽化为富氧气出氮塔冷凝蒸发器12,此时的温度为富氧气在此压力下(0.3~0.5MPa(A))的沸点温度或高一点,与精氩塔7顶部的粗氩气沸点温度有5~15℃的温差;然后进入换热器6复热,出精馏冷箱5后输送至空气预冷纯化***14内作为干燥气体。
实施例2
如图1所示,本发明实施例提供一种精馏法去除一氧化碳并集成高纯氮的氩气回收装置,包括氩气压缩机1、一氧化碳反应炉2、冷却器3、氩气预冷纯化***4、空气压缩机13、空气预冷纯化***14、换热器6、精氩塔7、氩塔第一再沸器8、氩塔第二再沸器9、氩塔冷凝蒸发器10、氮塔11、氮塔冷凝蒸发器12、氩气循环压缩机15;其中:
所述氩气压缩机1通过管道经所述一氧化碳反应炉2与氩气预冷纯化***4连接,所述氩气压缩机1用于对回收氩气进行加压处理,加压后的回收氩气经所述一氧化碳反应炉2去除其中的氧气,然后送入所述氩气预冷纯化***4内经降温后脱除其中的水和二氧化碳;
冷却器3设置于所述一氧化碳反应炉2与氩气预冷纯化***4之间管道上;用于对经所述一氧化碳反应炉2除氧后的高温氩气进行冷却处理。
所述氩气预冷纯化***4通过管道经所述换热器6与设置于所述精氩塔7底部的氩塔第一再沸器8连接,以将干燥的氩气经所述换热器6降温至液化温度,并送入所述氩塔第一再沸器8内形成气液混合流体,所述氩塔第一再沸器8底部通过管道连通所述精氩塔7中上部,以将所述氩塔再沸器8内的气液混合流体经调压后送入所述精氩塔7中上部参与精馏;
所述精氩塔7的底部通过管道连通所述氩塔冷凝蒸发器10,以将所述精氩塔7塔底的纯液氩抽送至所述氩塔冷凝蒸发器10的蒸发侧,并在蒸发侧蒸发为氩气;所述氩塔冷凝蒸发器10的蒸发侧通过管道经所述换热器6与所述精馏冷箱5外界连通,以将蒸发侧的氩气经所述换热器6复热后送出所述精馏冷箱5;
其中,出所述精馏冷箱的管道分为两条支路,其中一条可直接或加压后连接氩气产品端,另外一条经换热器连接氩塔第二再沸器;以将送出所述精馏冷箱5的氩气分为两部分:第一部分氩气作为氩气产品;第二部分氩气作为循环气,送回精馏冷箱5,经换热器6降温后,进入精氩塔7底部的氩塔第二再沸器9,在其中被液化,经过降压后送至氩塔冷凝蒸发器10内为其提供冷源;
氩气循环压缩机15设置于依次经所述氩塔冷凝蒸发器10、换热器6与依次经所述换热器6、氩塔第二再沸器9之间的管道上;用于对送出所述精馏冷箱5的循环氩气加压后送回精馏冷箱5。
所述精氩塔7的顶部分别通过管道经所述换热器6出精馏冷箱5连通所述氩气预冷纯化***4以及通过管道连通所述氩塔冷凝蒸发器10的气体侧;
从所述精氩塔7顶部抽出的气体分成两部分:第一部分经换热器6复热回收冷量后送出塔外放空;第二部分气体进入氩塔冷凝蒸发器10的气体侧冷凝为液体,流入精氩塔7,为精馏提供液体;
进一步地,所述氩塔冷凝蒸发器10的蒸发侧通过管道与所述精馏冷箱5外界连通,以通过该管道为所述氩塔冷凝蒸发器10补充液氩。
所述空气压缩机13通过管道与所述空气预冷纯化***14连接,空气经所述空气压缩机13加压处理后送入所述空气预冷纯化***14内,以经降温后脱除其中的水和二氧化碳;
所述空气预冷纯化***14通过管道经所述换热器6连通所述氮塔11的底部,以将干燥的空气经所述换热器6降温至液化温度后送入所述氮塔11底部,为所述氮塔11提供精馏气体;
所述氮塔11的顶部分别通过管道经所述换热器6出精馏冷箱5连通所述氩气预冷纯化***4、通过管道连通所述氮塔冷凝蒸发器12的高温侧;从所述氮塔11顶部抽出的气体分为两部分,第一部分送入所述氮塔冷凝蒸发器12的高温侧,经降温冷却为液氮后,其中的一部分液氮通过管道送入所述氮塔11顶部参与精馏,另一部分液氮通过管道送出精馏冷箱5;第二部分经所述换热器6复热后出精馏冷箱5送入所述氩气预冷纯化***4作为再生气使用;以及
所述氮塔11的底部分别通过管道连通所述氮塔冷凝蒸发器12的顶部;从所述氮塔11底部抽出的富氧液空经调压后进入所述氮塔冷凝蒸发器12为其提供冷源,本身被汽化为富氧气出氮塔冷凝蒸发器12,然后进入换热器6复热,出精馏冷箱5后输送至空气预冷纯化***14内作为干燥气体。
综上,本发明利用回收现场会有液氩提供的便利,用液氩提供冷量;利用拉晶过程中产生的一氧化碳气来去除混入的氧气,再利用低温精馏法脱除氮气、过量的一氧化碳,提高了氩气的回收率,简化了低温精馏的流程和操作,降低了运行能耗;利用集成的空气氮气流路,通过利用液氩的富足冷量,冷箱内自产氮气可降低再生气的限制,提高回收氩气的提取率;并利用富裕的液氩冷量产部分液氮,提高经济效益。
以上所述仅为本发明较佳的实施例,并非因此限制本发明的实施方式及保护范围,对于本领域技术人员而言,应当能够意识到凡运用本发明说明书及图示内容所作出的等同替换和显而易见的变化所得到的方案,均应当包含在本发明的保护范围内。

Claims (10)

1.一种精馏法去除一氧化碳并集成高纯氮的氩气回收方法,包括氩气回收流路和空气氮气流路,其特征在于:
所述的氩气回收流路,包括如下步骤:
S11、将回收氩气经氩气压缩机加压,并去除油及粉尘后,进入一氧化碳反应炉去除其中的氧气;除氧后的氩气经过冷却器冷却后,进入氩气预冷纯化***中脱除其中的水和二氧化碳,得到干燥的粗氩气;
S12、将干燥的粗氩气送入精馏冷箱,先经换热器降温至液化温度后,进入设立于精氩塔底部的氩塔第一再沸器,在氩塔第一再沸器中,气体被液化,出氩塔第一再沸器的液体经节流降压部分被气化后,送入精氩塔中上部参与精馏;
S13、进入精氩塔的气液混合流体,其中的液体部分随着塔内液体下降,在塔底得到纯液氩;从精氩塔底部抽出纯液氩经节流降压后送入氩塔冷凝蒸发器的蒸发侧,纯液氩在氩塔冷凝蒸发器的蒸发侧蒸发为氩气,经过换热器复热回收冷量后,送出精馏冷箱;
S14、进入精氩塔的气液混合流体,其中的气体部分随着塔内气体上升,在塔顶的气体主要是一氧化碳与氮气,从精氩塔顶部抽出的气体的一部分进入氩塔冷凝蒸发器,冷凝为液体后送入精氩塔;
所述的空气氮气流路,包括如下步骤:
S21、空气经过空气压缩机压缩后,进入空气预冷纯化***,去除其中的水和二氧化碳;干燥后的空气经精馏冷箱内的换热器降温至液化温度,之后送入氮塔底部,为氮塔提供精馏气体;
S22、进入氮塔底部的带液空气,其中的重组分在液体中积聚,在塔底得到液体的富氧气;其中的轻组分在气体中积聚,在塔顶得到高纯度氮气;
S23、从氮塔塔顶抽出的高纯度氮气分为两部分:第一部分氮气送入氮塔冷凝蒸发器的高温侧,被降温冷却为液氮后送回氮塔,参与氮塔的精馏;第二部分氮气经过换热器复热回收冷量后,送出精馏冷箱,然后送入氩气预冷纯化***内作为再生气使用;
S24、从氮塔的底部抽出的富氧液空经过调整压力后,进入氮塔冷凝蒸发器,为其提供冷源,本身被汽化为富氧气出氮塔冷凝蒸发器,然后进入换热器复热,出精馏冷箱后输送至空气预冷纯化***内作为干燥气体。
2.根据权利要求1所述的精馏法去除一氧化碳并集成高纯氮的氩气回收方法,其特征在于,步骤S11中,除氧后的氩气经过冷却器冷却至35-40℃,再进入氩气预冷纯化***中,经氩气预冷机冷却至5-8℃,进入氩气纯化器脱除水和二氧化碳,得到干燥的粗氩气。
3.根据权利要求1所述的精馏法去除一氧化碳并集成高纯氮的氩气回收方法,其特征在于,步骤S13中,来自所述精馏冷箱外界的补充液氩通过管道进入所述精氩塔冷凝蒸发器的蒸发侧。
4.根据权利要求1所述的精馏法去除一氧化碳并集成高纯氮的氩气回收方法,其特征在于,步骤S13中,送出所述精馏冷箱的氩气分为两部分:第一部分氩气作为氩气产品,可加压或者直接送气;第二部分氩气作为循环气,进入氩气循环压缩机加压后,送回精馏冷箱,经换热器降温后,进入精氩塔底部的氩塔第二再沸器,在其中被液化,经过降压后送至氩塔冷凝蒸发器内为其提供冷源。
5.根据权利要求1所述的精馏法去除一氧化碳并集成高纯氮的氩气回收方法,其特征在于,步骤S14中,从所述精氩塔顶部抽出的气体分成两部分:第一部分经换热器复热回收冷量后送出塔外放空;第二部分气体进入氩塔冷凝蒸发器的气体侧冷凝为液体,流入精氩塔,为精馏提供液体。
6.根据权利要求1所述的精馏法去除一氧化碳并集成高纯氮的氩气回收方法,其特征在于,步骤S23中,所述第一部分氮气送入氮塔冷凝蒸发器的高温侧,被降温冷却为液氮后,一部分送回氮塔参与氮塔的精馏,另一部分液氮可作为副产品,抽出精馏冷箱。
7.一种基于权利要求1-6任一项所述的精馏法去除一氧化碳并集成高纯氮的氩气回收装置,其特征在于,包括氩气压缩机、一氧化碳反应炉、氩气预冷纯化***、空气压缩机、空气预冷纯化***、换热器、精氩塔、氩塔第一再沸器、氩塔第二再沸器、氩塔冷凝蒸发器、氮塔和氮塔冷凝蒸发器;其中:
所述氩气压缩机通过管道经所述一氧化碳反应炉与氩气预冷纯化***连接,所述氩气压缩机用于对回收氩气进行加压处理,加压后的回收氩气经所述一氧化碳反应炉去除其中的氧气,然后送入所述氩气预冷纯化***内经降温后脱除其中的水和二氧化碳;
所述氩气预冷纯化***通过管道经所述换热器与设置于所述精氩塔底部的氩塔第一再沸器连接,以将干燥的氩气经所述换热器降温至液化温度,并送入所述氩塔第一再沸器内形成气液混合流体,所述氩塔第一再沸器底部通过管道连通所述精氩塔中上部,以将所述氩塔再沸器内的气液混合流体经调压后送入所述精氩塔中上部参与精馏;
所述精氩塔的底部通过管道连通所述氩塔冷凝蒸发器,以将所述精氩塔塔底的纯液氩抽送至所述氩塔冷凝蒸发器的蒸发侧,并在蒸发侧蒸发为氩气;所述氩塔冷凝蒸发器的蒸发侧通过管道经所述换热器与所述精馏冷箱外界连通,以将蒸发侧的氩气经所述换热器复热后送出所述精馏冷箱;
其中,出所述精馏冷箱的管道分为两条支路,其中一条可直接或加压后连接氩气产品端,另外一条经换热器连接氩塔第二再沸器;以将送出所述精馏冷箱的氩气分为两部分:第一部分氩气作为氩气产品;第二部分氩气作为循环气,送回精馏冷箱,经换热器降温后,进入精氩塔底部的氩塔第二再沸器,在其中被液化,经过降压后送至氩塔冷凝蒸发器内为其提供冷源;
所述精氩塔的顶部分别通过管道经所述换热器出精馏冷箱连通所述氩气预冷纯化***以及通过管道连通所述氩塔冷凝蒸发器的气体侧;
从所述精氩塔顶部抽出的气体分成两部分:第一部分经换热器复热回收冷量后送出塔外放空;第二部分气体进入氩塔冷凝蒸发器的气体侧冷凝为液体,流入精氩塔,为精馏提供液体;
所述空气压缩机通过管道与所述空气预冷纯化***连接,空气经所述空气压缩机加压处理后送入所述空气预冷纯化***内,以经降温后脱除其中的水和二氧化碳;
所述空气预冷纯化***通过管道经所述换热器连通所述氮塔的底部,以将干燥的空气经所述换热器降温至液化温度后送入所述氮塔底部,为所述氮塔提供精馏气体;
所述氮塔的顶部分别通过管道经所述换热器出精馏冷箱连通所述氩气预冷纯化***、通过管道连通所述氮塔冷凝蒸发器的高温侧;从所述氮塔顶部抽出的气体分为两部分,第一部分送入所述氮塔冷凝蒸发器的高温侧,经降温冷却为液氮后,其中的一部分液氮通过管道送入所述氮塔顶部参与精馏,另一部分液氮通过管道送出精馏冷箱;第二部分经所述换热器复热后出精馏冷箱送入所述氩气预冷纯化***作为再生气使用;以及
所述氮塔的底部分别通过管道连通所述氮塔冷凝蒸发器的顶部;从所述氮塔底部抽出的富氧液空经调压后进入所述氮塔冷凝蒸发器为其提供冷源,本身被汽化为富氧气出氮塔冷凝蒸发器,然后进入换热器复热,出精馏冷箱后输送至空气预冷纯化***内作为干燥气体。
8.根据权利要求7所述的精馏法去除一氧化碳并集成高纯氮的氩气回收装置,其特征在于,还包括:
冷却器,其设置于所述一氧化碳反应炉与氩气预冷纯化***之间管道上;用于对经所述一氧化碳反应炉除氧后的高温氩气进行冷却处理。
9.根据权利要求7所述的精馏法去除一氧化碳并集成高纯氮的氩气回收装置,其特征在于,所述氩塔冷凝蒸发器的蒸发侧通过管道与所述精馏冷箱外界连通,以通过该管道为所述氩塔冷凝蒸发器补充液氩。
10.根据权利要求7所述的精馏法去除一氧化碳并集成高纯氮的氩气回收装置,其特征在于,还包括:
氩气循环压缩机,其设置于依次经所述氩塔冷凝蒸发器、换热器与依次经所述换热器、氩塔第二再沸器之间的管道上;用于对送出所述精馏冷箱的循环氩气加压后送回精馏冷箱。
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111637684A (zh) * 2020-07-03 2020-09-08 上海迎飞能源科技有限公司 一种带循环的单塔低温精馏回收氩气***及方法
CN111637685A (zh) * 2020-07-03 2020-09-08 上海迎飞能源科技有限公司 一种带氩气循环和氢气循环的单塔低温精馏回收氩气***及方法
CN115744845A (zh) * 2022-10-20 2023-03-07 上海联风能源科技有限公司 一种氩气回收提纯增效***

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111637684A (zh) * 2020-07-03 2020-09-08 上海迎飞能源科技有限公司 一种带循环的单塔低温精馏回收氩气***及方法
CN111637685A (zh) * 2020-07-03 2020-09-08 上海迎飞能源科技有限公司 一种带氩气循环和氢气循环的单塔低温精馏回收氩气***及方法
CN115744845A (zh) * 2022-10-20 2023-03-07 上海联风能源科技有限公司 一种氩气回收提纯增效***

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