CN110794442B - High-precision calorimeter for measuring high-energy x-ray energy and manufacturing method thereof - Google Patents
High-precision calorimeter for measuring high-energy x-ray energy and manufacturing method thereof Download PDFInfo
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- CN110794442B CN110794442B CN201911049489.0A CN201911049489A CN110794442B CN 110794442 B CN110794442 B CN 110794442B CN 201911049489 A CN201911049489 A CN 201911049489A CN 110794442 B CN110794442 B CN 110794442B
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Abstract
The invention relates to a high-precision calorimeter for measuring high-energy x-ray energy and a manufacturing method thereof, and mainly solves the problems that the conventional calorimeter is narrow in measuring range, difficult to calibrate, low in measuring precision and capable of influencing output cable head signals. The high-precision thermal measurement meter comprises a temperature measuring element, wherein the temperature measuring element comprises a thermocouple or a thermistor; the outer side of the temperature measuring element is packaged into a glass body through glass, and the surface of the glass body, which is opposite to the device to be measured, is a curved surface which is symmetrical about the center of the glass body; an inner lead layer, an inner aluminum alloy layer, an outer aluminum alloy layer and an outer aluminum layer are sequentially arranged on the outer side of the glass body; a first gap is formed between the inner lead layer and the inner aluminum alloy layer; a second gap is formed between the inner aluminum alloy layer and the outer aluminum alloy layer; and the lead-out cable of the thermocouple or the thermistor is packaged and led out by cable glass and is used for being connected with a measuring system.
Description
Technical Field
The invention relates to the field of interaction of high-power high-current pulsed electron beams and substances, in particular to a high-precision calorimeter for measuring high-energy x-ray energy and a manufacturing method thereof.
Background
High-dose high-energy x-rays (>100KeV, >1rad) are often generated by high-power high-current pulsed electron beam material interaction, and the measurement of energy is a difficult point in the field of pulse power. Current measurement devices for x-ray energy mainly include scintillator detectors, x-ray diodes, semiconductor detectors (PINs) and calorimeters. Because the calorimeter principle is simple, the spectral response is smooth, and the application in the X-ray energy measurement is wider. The main principle of the calorimeter is as follows: when X-ray irradiates on the thermistor or thermocouple, the energy deposited on the material can cause the temperature of the thermistor or thermocouple to rise, the resistivity is increased, and the resistance change of the thermistor or thermocouple is measured, so that the deposited X-ray energy can be obtained.
A nickel film calorimeter was developed in the article "high power Z pinch soft X-ray total energy measurement by film calorimeter", by Wang Wensheng et al, which is characterized by depositing high purity nickel on a substrate material of low thermal conductivity and low thermal expansion coefficient, but has the following disadvantages: the measurement range is narrow, and only the X-ray below soft 3KeV can be measured; secondly, the substrate conduction heat loss exists, and the calibration is difficult; electrons cannot be shielded, and the electrons are incident on the nickel to generate deposition heat, so that the measurement error is increased, and the measurement precision is low; and fourthly, no electromagnetic shielding measure is adopted, and the output cable head signal is influenced.
Disclosure of Invention
The invention aims to solve the problems that the conventional calorimeter is narrow in measuring range, difficult to calibrate, low in measuring precision and capable of influencing output cable head signals, and provides a high-precision calorimeter for measuring high-energy x-ray energy and a manufacturing method thereof, wherein the calorimeter aims at measuring high-energy x-rays (100 KeV, 1rad) with large dose.
In order to solve the problems, the technical scheme of the invention is as follows:
a high accuracy calorimeter for measuring high energy x-ray energy comprising a temperature sensing element, said temperature sensing element comprising a thermocouple or a thermistor; the outer side of the temperature measuring element is packaged into a glass body through glass, and the surface of the glass body, which is opposite to the device to be measured, is a curved surface which is symmetrical about the center of the glass body; an inner lead layer, an inner aluminum alloy layer, an outer aluminum alloy layer and an outer aluminum layer are sequentially arranged on the outer side of the glass body; a first gap is formed between the inner lead layer and the inner aluminum alloy layer; a second gap is formed between the inner aluminum alloy layer and the outer aluminum alloy layer; and the leading-out cable of the temperature measuring element is packaged and led out by cable glass and is used for being connected with a measuring system.
Furthermore, the outer surface of the inner aluminum alloy layer is treated by a blackening process, so that the heat conduction effect of the layer is better.
Further, a plurality of heat-insulating hollow beads are arranged between the inner aluminum alloy layer and the outer aluminum alloy layer, so that a second gap is formed.
Furthermore, the outer side of the temperature measuring element is packaged into a spherical glass body through glass.
Further, the diameter of the heat-insulating hollow bead is 0.1 mm.
Further, the inner aluminum alloy layer and the outer aluminum alloy layer are aluminum alloy layers doped with polycrystalline silicon.
Further, the thickness of the inner lead layer is 10-30 μm, the diameter of the spherical glass body is 0.5mm, the thickness of the inner aluminum alloy layer is 4-7 mm, the thickness of the outer aluminum alloy layer is 1-2 cm, and the thickness of the outer aluminum layer is 100-300 μm.
Meanwhile, the invention also provides a manufacturing method of the high-precision calorimeter for measuring the energy of the high-energy x-ray, which comprises the following steps:
the method comprises the following steps that firstly, a temperature measuring element is packaged into a glass body through glass in a vacuum mode, the surface, opposite to a device to be measured, of the glass body is a curved surface symmetrical about the center of the glass body, meanwhile, a lead-out cable of the temperature measuring element is packaged through cable glass, and the temperature measuring element comprises a thermocouple or a thermistor;
step two, coating a lead layer on the surface of the glass body finished in the step one to form an inner lead layer;
step three, wrapping an inner aluminum alloy layer outside the inner lead layer completed in the step two, wherein a first gap is formed between the inner lead layer and the inner aluminum alloy layer;
step four, wrapping an outer aluminum alloy layer outside the inner aluminum alloy layer completed in the step three; a second gap is arranged between the inner aluminum alloy layer and the outer aluminum alloy layer;
and step five, plating an aluminum layer on the outer surface of the outer aluminum alloy layer to form an outer aluminum layer.
Further, in the third step, after the inner aluminum alloy layer is finished, the outer surface of the inner aluminum alloy layer is treated by adopting a blackening process.
Further, in the fourth step, the inner aluminum alloy layer and the outer aluminum alloy layer are supported by a plurality of heat-insulating hollow balls, so that a second gap is formed.
The invention has the advantages that:
1. the high-precision calorimeter for measuring high-energy x-ray energy provided by the invention has a fine structure, a thermistor or a thermocouple for measuring temperature is sequentially wrapped by a glass layer, a lead layer, an inner aluminum alloy layer and an outer aluminum alloy layer, two gaps are formed between the aluminum layer and the inner and outer aluminum alloy layers, the outer aluminum alloy layer has a good electronic isolation effect, the two gaps have the capability of isolating the background temperature of the environment, and the measurement temperature change precision is higher and can reach 0.1K.
2. The high-precision calorimeter for measuring high-energy x-ray energy provided by the invention is plated with a layer of aluminum on the outermost layer, and the output lead is also positioned in the aluminum layer, so that the calorimeter can shield electromagnetic interference and does not influence the output of a cable head signal.
3. Compared with other devices for measuring high-energy x-ray energy, the high-precision calorimeter for measuring high-energy x-ray energy provided by the invention is formed by wrapping a plurality of layers of spherical layers, has a compact structure and a small size (about 3cm), and can measure the x-ray energy at different positions in an array mode.
4. The high-precision calorimeter for measuring high-energy x-ray energy provided by the invention realizes the measurement of the x-ray energy of different energy sections by setting the thicknesses of the inner and outer aluminum alloy layers.
5. The high-precision calorimeter for measuring the high-energy x-ray energy provided by the invention has good capability of isolating the environment background temperature, and can be precisely calibrated by adopting a cobalt source.
6. The surface of the high-precision calorimeter for measuring the energy of the high-energy x-ray, which is opposite to the measured device, of the glass body is set to be a curved surface which is symmetrical about the center of the glass body, the measured x-ray radiation field has spatial distribution, and the symmetrical curved surface can ensure that the calorimeter receives the same number of x-ray photons in each direction, so that the measurement error is avoided.
Drawings
FIG. 1 is a schematic structural diagram of a high-precision calorimeter for measuring high-energy x-ray energy provided by the present invention.
Reference numerals: 1-temperature measuring element, 2-glass body, 3-inner lead layer, 4-first gap, 5-inner aluminum alloy layer, 6-heat insulation hollow ball, 7-second gap, 8-outer aluminum alloy layer, 9-outer aluminum layer, 10-cable glass and 11-leading-out cable.
Detailed Description
The invention is described in further detail below with reference to the figures and specific embodiments.
Aiming at the problem of measuring the energy of high-dose high-energy x-rays (>100KeV, >1rad), the invention provides a multilayer wrapped small-size high-precision calorimeter. The calorimeter is directed to the measurement of a large dose of high-energy x-rays, unlike the measurement range and measurement object of a conventional calorimeter. The calorimeter can measure the energy of the x-ray with high precision when the interaction of the high-current electron beam and the substance generates a large dose of high-energy x-ray.
As shown in fig. 1, the high-precision calorimeter for measuring high-energy x-ray energy provided by the present invention comprises a temperature measuring element, which may be a thermocouple or a thermistor; the outer side of the thermocouple or the thermistor is packaged into a glass body 2 through glass, the surface of the glass body 2 opposite to the device to be measured is set to be a curved surface which is symmetrical about the center of the glass body 2, the measured x-ray radiation field has spatial distribution, and the symmetrical curved surface can ensure that the calorimeter receives the same number of x-ray photons in each direction, so that measurement errors are avoided. The outer side of the glass body 2 is sequentially provided with an inner lead layer 3, an inner aluminum alloy layer 5, an outer aluminum alloy layer 8 and an outer aluminum layer 9, and the thickness of each layer is consistent in the circumferential direction of the glass body 2. A first gap 4 is arranged between the inner lead layer 3 and the inner aluminum alloy layer 5; a second gap 7 is arranged between the inner aluminum alloy layer 5 and the outer aluminum alloy layer 8; the lead-out cable 11 of the thermocouple or the thermistor is packaged and led out by the cable glass 10 and is used for being connected with a measuring system.
The structure of the high-precision calorimeter provided by the invention for measuring high-energy x-ray energy is described in detail below.
The high-precision calorimeter comprises a temperature measuring element 1, wherein the temperature measuring element 1 can be a thermocouple or a thermistor specifically; the thermocouple or the thermistor is vacuum-packaged into the spherical glass body 2 through glass, and meanwhile, the lead-out cable 11 of the thermocouple or the thermistor is vacuum-packaged by adopting cable glass 10. The present invention does not require the shape of the glass body 2, but requires only the shape of the surface of the glass body 2 facing the device under test, which is necessarily a surface that is symmetrical about the center of the glass body 2. In this embodiment, the cable glass 10 is a hollow rod-shaped structure, one end of which is connected with the glass body 2, and the other end of which passes through the inner lead layer 3, the inner aluminum alloy layer 5, the outer aluminum alloy layer 8 and the outer aluminum layer 9, and the lead-out cable 11 is led out of the high-precision calorimeter for connecting with a measuring system and transmitting signals.
The surface of the glass body 2 is plated with a lead layer to form an inner lead layer 3. The lead-plated glass ball is wrapped by an inner aluminum alloy ball layer and an outer aluminum alloy ball layer (doped polysilicon) in sequence. An installation gap (a first gap 4) is arranged between the inner lead layer 3 and the inner aluminum alloy layer 5, the gap is supported and formed by cable glass 10, an air heat insulation gap (a second gap 7) is arranged between the outer aluminum alloy layer 8 and the inner aluminum alloy layer 5, the gap is supported and formed by 4 heat insulation hollow small balls 6, the diameter of each heat insulation hollow small ball 6 is 0.1mm, and the value ensures that the size is compact on the basis of heat insulation. The outer spherical surface of the inner aluminum alloy layer 5 is treated by adopting a blackening process, and the heat conduction effect of the layer is better by adopting the blackening process. The surface of the outer aluminum alloy layer 8 is aluminized to form an outer aluminum layer 9 for electromagnetic shielding.
The thickness of the inner lead layer 3 is about 10-30 μm, the diameter of the lead-plated glass ball is about 0.5mm, the thickness of the inner aluminum alloy layer 5 is 4-7 mm, the thickness of the outer aluminum alloy layer is 1-2 cm, and the thickness of the outer aluminum layer is
100-300 μm, and the thickness of each layer can be adjusted according to different measured objects and different electromagnetic environments.
In addition, the present invention provides a method of making a high accuracy calorimeter for measuring high energy x-ray energy comprising the steps of:
step one, a thermocouple or a thermistor is vacuum-packaged into a glass body 2 by adopting a high-thermal-conductivity glass material, the surface of the glass body 2 opposite to a tested device is set to be a curved surface which is centrosymmetric about the glass body 2, and simultaneously, a lead-out cable 11 of the thermocouple or the thermistor is packaged through cable glass 10;
step two, coating a lead layer on the surface of the glass body 2 finished in the step one to form an inner lead layer 3;
step three, wrapping an inner aluminum alloy layer 5 (doped polysilicon) outside the lead-plated glass ball completed in the step two; namely, the inner lead layer 3 is wrapped by an inner aluminum alloy layer 5 (doped polysilicon), the inner aluminum alloy layer 5 is formed by bonding two hemispherical shells, a first gap 4 is arranged between the inner lead layer 3 and the inner aluminum alloy layer 5, and the first gap 4 is a formed assembly gap; meanwhile, the inner surface of the inner aluminum alloy layer 5 is blackened, and the ball layer is used for interacting with x-rays to generate temperature rise;
step four, wrapping an outer aluminum alloy layer 8 (doped polysilicon) outside the inner aluminum alloy layer 5 finished in the step three, and blocking electrons and the environment background temperature; a second gap 7 exists between the inner aluminum alloy layer 5 and the outer aluminum alloy layer 8 (doped polysilicon), an air gap of 0.1mm exists between the two ball layers, the two ball layers are supported by four insulating hollow small balls, the diameters of the air gap and the small balls are both 0.1mm, and the air gap is used for isolating external heat conduction;
and fifthly, aluminizing the outer aluminum alloy layer 8, and arranging the lead-out cable 11 in the aluminum alloy layer for electromagnetic shielding.
Claims (4)
1. A high accuracy calorimeter for measuring energy of high energy x-rays, comprising: the temperature measuring device comprises a temperature measuring element (1), wherein the temperature measuring element (1) comprises a thermocouple or a thermistor; the outer side of the temperature measuring element (1) is sealed into a spherical glass body (2) through glass, and the surface of the glass body (2) opposite to the measured device is a curved surface which is symmetrical about the center of the glass body; an inner lead layer (3), an inner aluminum alloy layer (5), an outer aluminum alloy layer (8) and an outer aluminum layer (9) are sequentially arranged on the outer side of the glass body (2);
a first gap (4) is arranged between the inner lead layer (3) and the inner aluminum alloy layer (5); a second gap (7) is arranged between the inner aluminum alloy layer (5) and the outer aluminum alloy layer (8);
the leading-out cable (11) of the temperature measuring element (1) is packaged and led out by cable glass (10) and is used for being connected with a measuring system;
the outer surface of the inner aluminum alloy layer (5) is treated by adopting a blackening process; a plurality of heat-insulating hollow small balls (6) are arranged between the inner aluminum alloy layer (5) and the outer aluminum alloy layer (8), so that a second gap (7) is formed, and the inner aluminum alloy layer (5) and the outer aluminum alloy layer (8) are aluminum alloy layers doped with polycrystalline silicon.
2. The high accuracy calorimeter for measuring energy of high energy x-rays of claim 1, wherein: the diameter of the heat-insulating hollow small ball (6) is 0.1 mm.
3. The high accuracy calorimeter for measuring the energy of high energy x-rays of claim 2, wherein: the thickness of interior lead layer (3) is 10 ~ 30 mu m, the diameter of globular glass body (2) is 0.5mm, the thickness of interior aluminium alloy layer (5) is 4 ~ 7mm, the thickness of outer aluminium alloy layer (8) is 1 ~ 2cm, the thickness of outer aluminium layer (9) is 100 ~ 300 mu m.
4. A method of making a high accuracy calorimeter for measuring energy of high energy x-rays in accordance with any one of claims 1 to 3, comprising the steps of:
the method comprises the following steps that firstly, a temperature measuring element is packaged into a glass body through glass in a vacuum mode, the surface, opposite to a device to be measured, of the glass body is a curved surface symmetrical about the center of the glass body, meanwhile, a lead-out cable of the temperature measuring element is packaged through cable glass, and the temperature measuring element comprises a thermocouple or a thermistor;
step two, coating a lead layer on the surface of the glass body finished in the step one to form an inner lead layer;
step three, wrapping an inner aluminum alloy layer outside the inner lead layer completed in the step two, and after the inner aluminum alloy layer is manufactured, treating the outer surface of the inner aluminum alloy layer by adopting a blackening process; a first gap is formed between the inner lead layer and the inner aluminum alloy layer;
step four, wrapping an outer aluminum alloy layer outside the inner aluminum alloy layer completed in the step three; a second gap is arranged between the inner aluminum alloy layer and the outer aluminum alloy layer; in the step, a plurality of heat-insulating hollow balls are supported between the inner aluminum alloy layer and the outer aluminum alloy layer, so that a second gap is formed;
and step five, plating an aluminum layer on the outer surface of the outer aluminum alloy layer to form an outer aluminum layer.
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| US4130694A (en) * | 1977-08-15 | 1978-12-19 | Bell Telephone Laboratories, Incorporated | Amorphous metal oxide material between electrodes of a cell |
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