CN110777326A - Preparation method of semi-gold-plated high-reflection infrared heating hollow pipe - Google Patents

Preparation method of semi-gold-plated high-reflection infrared heating hollow pipe Download PDF

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CN110777326A
CN110777326A CN201910396686.3A CN201910396686A CN110777326A CN 110777326 A CN110777326 A CN 110777326A CN 201910396686 A CN201910396686 A CN 201910396686A CN 110777326 A CN110777326 A CN 110777326A
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glass tube
hollow
film
transparent glass
coating
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CN110777326B (en
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庞全伟
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Huai'an Lianggu Photoelectric Science & Technology Co Ltd
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Huai'an Lianggu Photoelectric Science & Technology Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04Coating on selected surface areas, e.g. using masks
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • C23C14/021Cleaning or etching treatments
    • C23C14/022Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08Oxides
    • C23C14/085Oxides of iron group metals
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/10Glass or silica
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50Substrate holders
    • C23C14/505Substrate holders for rotation of the substrates

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  • Engineering & Computer Science (AREA)
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  • Organic Chemistry (AREA)
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  • Physical Vapour Deposition (AREA)

Abstract

The invention provides a preparation method of a semi-gold-plated high-reflection infrared heating hollow tube, which comprises the following steps: s1: cleaning a hollow transparent glass tube; s2: clamping two ends of the hollow transparent glass tube by using a clamp, putting the hollow transparent glass tube into a vacuum system of a coating device, vacuumizing the coating device, and simultaneously starting a heating device in the vacuum system; s3: filling high-purity oxygen and high-purity argon into the coating equipment, and then starting an ion source in the coating equipment to treat the surface of the hollow transparent glass tube; s4: evaporating and coating a film material, wherein the film material is ferric oxide and silicon dioxide, the ferric oxide and the silicon dioxide are coated alternately back and forth, and after the film coating is finished, the surface of the hollow transparent glass tube is treated to ensure that only half of the surface of the hollow transparent glass tube along the center line of the section of the hollow transparent glass tube is provided with a reflection film layer; s5: and (4) putting the hollow pipe plated with the film into a high-temperature furnace for high-temperature aging. The infrared heating tube has high reflectivity and good firmness of the film layer.

Description

Preparation method of semi-gold-plated high-reflection infrared heating hollow pipe
Technical Field
The invention relates to the technical field of infrared heating pipes, in particular to a preparation method of a semi-gold-plated high-reflection infrared heating hollow pipe.
Background
Heating devices used in daily life are mostly heated by infrared heating lamps. The infrared heating lamp tube is a device which adopts a heat radiation mode to enable a heated substance to absorb energy so as to intensify molecular motion and further raise the temperature. At present, a plurality of infrared heating lamp tubes adopt 360-degree infrared heating, and heat in the direction not needing heating, so that objects not needing heating are damaged by infrared radiation, and energy waste is caused. If the infrared reflecting cover is arranged on the side which does not need to be heated, the occupied space of the device is increased, the cost is increased, the radiated infrared heat energy cannot be reflected by the reflecting cover, and partial heat energy bypasses the reflecting cover and acts outside the reflecting cover.
The reflecting layer of the infrared heating tube is obtained by spraying an oxide layer on the surface of the heating tube, so that the infrared heating tube has the following problems: firstly, the reflectivity of the reflecting layer on the surface of the existing common infrared heating pipe is lower, less than 50%, and the reflecting layer can be gradually attenuated along with the increase of the service time; and secondly, the sprayed oxide layer has poor adhesive force and is easy to fall off, and the aging and falling of the oxide layer are accelerated because the infrared heating pipe works at high temperature for a long time, so that the service life of the infrared heating pipe is shortened.
Disclosure of Invention
In view of the above problems, the present invention provides a method for preparing a semi-gold plated high-reflection infrared heating hollow tube, so as to solve the problems of energy waste caused by the infrared heating lamp tube in the prior art, as well as low reflectivity and poor adhesion of the coating of the infrared heating lamp tube.
The invention is realized by the following technical scheme:
a preparation method of a semi-gold-plated high-reflection infrared heating hollow tube comprises the following steps:
s1: selecting a hollow transparent glass tube with a proper specification, and cleaning the surface of the hollow transparent glass tube;
s2: clamping two ends of the cleaned hollow transparent glass tube by using a clamp, putting the glass tube on a heating device of a coating device, vacuumizing the coating device, and simultaneously starting the heating device in a vacuum system to ensure that the vacuum degree in the vacuum system is 7.0-8.0 multiplied by 10 < -3 > MP and the temperature reaches 170-;
s3: filling high-purity oxygen and high-purity argon into the coating equipment, wherein the filling amount of the high-purity oxygen is 10-20cc, and the filling amount of the high-purity argon is 10-20cc, starting an ion source in the coating equipment to carry out bombardment treatment on the surface of the hollow transparent glass tube, and the ion beam current of the ion source is 100-150 ma;
s4: evaporating and coating a film material, wherein the film material is ferric oxide and silicon dioxide, the ferric oxide and the silicon dioxide are coated in a reciprocating and alternating manner, the central wavelength of the film system is 450-550nm, 12-15 layers of films are coated in a reciprocating and alternating manner, and after the film coating is finished, the surface of the hollow transparent glass tube is treated so that only half of the surface of the hollow transparent glass tube along the central line of the section of the hollow transparent glass tube is provided with a reflecting film layer;
s5: and (3) placing the coated hollow glass tube into a high-temperature furnace for high-temperature aging, wherein the temperature in the high-temperature furnace is maintained at 450-500 ℃, and the aging time is 25-35 min.
Further, in step S1, the surface of the hollow transparent glass tube is cleaned by a hydrofluoric acid solution with a concentration of 3-4% or by an ultrasonic cleaning machine.
Further, after the hollow transparent glass tube is cleaned, covering half of the surface of the hollow transparent glass tube along the center line of the section of the hollow transparent glass tube, then performing the coating operations from step S2 to step S4, after the coating operation in step S4 is completed, removing the covering of the surface of the hollow transparent glass tube, and then performing the operation in step S5, so that a reflective film layer is formed on the surface of the half of the hollow glass tube.
Further, after the hollow transparent glass tube is cleaned, the whole hollow transparent glass tube is put into coating equipment to be coated with a film on the whole surface, after the coating in the step S4 is completed, a half of the film layer on the surface of the hollow transparent glass tube is covered along the center line of the section of the coated hollow glass tube, and then the hollow transparent glass tube is put into hydrofluoric acid solution to etch the uncovered film layer on the hollow glass tube, so that the reflection film layer is arranged on the surface of the half of the hollow glass tube, the hollow transparent glass tube is taken out after being etched, washed clean, removed of the cover and then subjected to high-temperature aging in the step S5.
Furthermore, a heating device in the vacuum system is provided with a turntable, the hollow transparent glass tube clamped by the clamp is placed on the turntable, and the turntable rotates to drive the hollow transparent glass tube to rotate in the film coating process.
Furthermore, the cylindrical hollow glass tube revolves on the turntable and is driven by the clamp to rotate; for the hollow glass tube in a circular ring shape or other special shapes, the hollow glass tube only revolves on the rotation.
Further, in step S4, the center wavelength of the film system is 500nm, and 15 layers of film are alternately coated back and forth.
Further, the film system of the coating film is sequentially H, L, H, L, H, L, 2.8H, 0.5L, 2.5H, 2.5L, 2.5H, 2.5L, 2.5H, 2.5L and 2.5H.
Compared with the prior art, the invention has at least the following beneficial effects:
1) after the coating of the hollow transparent glass tube is finished, only one half of the surface of the center line of the section of the hollow transparent glass tube is provided with the reflecting film layer, the working space is only required to be heated in one direction, the half of the lamp tube which is not coated with the reflecting film layer is arranged towards the direction which is required to be heated, when the lamp tube is started for heating, the heat irradiated to the half of the reflecting layer in the lamp tube is reflected by the reflecting layer and then transmitted to an object which is required to be heated in the working space from the half of the lamp tube which is not coated with the reflecting film layer, so that the heat transmitted from the half of the lamp tube which is not coated with the reflecting film layer is twice as much as that of the common lamp tube, the heating efficiency is greatly; compared with the common lamp tube, the infrared ray lamp tube can prevent objects in the direction which does not need to be heated from being damaged by infrared radiation, and an infrared ray reflecting cover is omitted, so that the occupied space of the device is reduced, and the production cost is reduced;
2) the reflective film is plated in a vacuum environment, an ion source is started to bombard the surface of the hollow transparent glass tube during film plating, and the ion beam current of the ion source is 100-; the reflecting layer of the invention has 15 layers of alternate coating layers, the coating film systems are sequentially H, L, H, L, H, L, 2.8H, 0.5L, 2.5H, 2.5L, 2.5H, 2.5L, 2.5H, 2.5L and 2.5H, the film layers and the film systems are the best film layers and film systems determined by the inventor through a plurality of tests, the spectral interference between the film layers under the film layers and the film systems is optimal, so that the reflectivity of the prepared infrared heating tube reaches the maximum, the hollow tube of the invention finds that the reflectivity of the hollow tube is more than 92% for infrared light with the wavelength of 750-1550nm, and under the reflectivity, the infrared heating tube can reflect the heat of the lamp tube to the other half of the lamp tube to the maximum extent, so that the heat transmitted from the lamp tube reaches the maximum heating efficiency; in addition, tests show that the reflecting layer on the infrared heating pipe prepared by the method can resist the high temperature of 750 ℃ without falling off, so that the firmness of the film layer is improved to a greater extent by the preparation method of the invention, and the service life of the infrared heating pipe is greatly prolonged;
3) in the process of coating, the hollow transparent glass tube is known to be in a rotating state in the process of coating, so that the coating layer of the coating can be ensured to be very uniform.
To the accomplishment of the foregoing and related ends, one or more aspects of the invention comprise the features hereinafter fully described. The following description and the annexed drawings set forth in detail certain illustrative aspects of the invention. These aspects are indicative, however, of but a few of the various ways in which the principles of the invention may be employed. Further, the present invention is intended to include all such aspects and their equivalents.
Detailed Description
Specific examples of the present invention are described in detail below.
Example 1:
a preparation method of a semi-gold-plated high-reflection infrared heating hollow tube comprises the following steps:
s1: selecting a circular hollow transparent glass tube with proper specification, putting the cylindrical hollow transparent glass tube into an ultrasonic cleaning agent to clean the surface of the circular hollow transparent glass tube, taking out the circular hollow transparent glass tube, and removing water on the circular hollow transparent glass tube for later use;
s2: putting the annular hollow transparent glass tube into a matched mould so that one half of the annular hollow transparent glass tube along the center line of the section of the annular hollow transparent glass tube is covered by the mould and the other half is exposed outside the mould, and then fixing the annular hollow transparent glass tube in the mould by using a clamp;
s3: a turntable is arranged in a heating device of a vacuum system in the vacuum coating machine, and a mould which is clamped by a clamp in the step S2 and is accommodated with the circular hollow transparent glass tube is placed on the turntable;
s4: vacuumizing the vacuum coating machine to ensure that the vacuum degree in the vacuum coating machine is about 7.0 multiplied by 10 -3MP, turn on the heating device in the coating apparatus at the same time and heat, make the temperature in the oven reach about 175 degrees C, the rotary table is in the rotating state all the time in the course of heating of the heating device and thus drive the round hollow transparent glass tube of the ring form to rotate;
s5: continuously filling high-purity oxygen and high-purity argon into a vacuum coating machine, wherein the filling amount of the high-purity oxygen is 20cc, and the filling amount of the high-purity argon is 20cc, and then starting an ion source in the vacuum coating machine to carry out bombardment treatment on the surface of the circular hollow transparent glass tube, wherein the ion beam current of the ion source is 150 ma;
s6: performing evaporation coating on a film material, wherein the coating material is ferric oxide and silicon dioxide, the ferric oxide and the silicon dioxide are coated alternately back and forth, 15 layers of coatings are formed, the film system is sequentially H, L, H, L, H, L, 2.8H, 0.5L, 2.5H, 2.5L, 2.5H, 2.5L, 2.5H, 2.5L and 2.5H, and the coating is started reversely during coating, wherein H represents ferric oxide, and L represents silicon dioxide; the center wavelength of the film system is 500nm, and according to the formula nd ═ 1/4 × λ, where n is the refractive index of the film material, n is the refractive index of ferric oxide is 2.6, n is the refractive index of silicon dioxide is 1.46, λ is 500nm, so the physical thickness d of each film is 10 × λ/4n, and thus the physical thicknesses of each film from bottom to top are in sequence:
Figure BDA0002058373410000041
Figure BDA0002058373410000042
the film system and thickness are determined by a plurality of experiments performed by the inventor, and the film system and the thickness can enable the spectral interference between film layers to reach the optimum each timeSo that the reflectivity of the infrared heating pipe reaches the maximum;
s7: and taking out the mold from the vacuum coating machine, then taking out the annular hollow glass tube from the mold, scrubbing the surface of the annular hollow glass tube by using alcohol, then putting the annular hollow glass tube into a high-temperature furnace with the temperature of 450 ℃ for high-temperature aging for 35min, and taking out the annular hollow glass tube to obtain the semi-gold-plated high-reflection infrared heating hollow tube.
Example 2:
a preparation method of a semi-gold-plated high-reflection infrared heating hollow tube comprises the following steps:
s1: selecting a cylindrical hollow transparent glass tube with a proper specification, putting the cylindrical hollow transparent glass tube into a hydrofluoric acid solution with the concentration of 3% for cleaning, so as to clean the surface of the cylindrical hollow transparent glass tube, taking out the cylindrical hollow transparent glass tube, and removing water on the cylindrical hollow transparent glass tube for later use;
s2: a turntable is arranged in a heating device of a vacuum system in the vacuum coating machine, two ends of a cleaned cylindrical hollow transparent glass tube are clamped by a clamp and then placed on the turntable;
s3: vacuumizing the vacuum coating machine to make the vacuum degree in the vacuum coating machine be 8.0 x 10 -3MP, turn on the heating device in the coating equipment to heat at the same time, make the temperature in the oven reach 180 degrees C, turn on the rotary table in the heating device to make it in the rotating state, and the clamp to grasp cylindrical hollow transparent glass tube also rotates round oneself and then the cylindrical hollow transparent glass tube not only revolves round under the drive of the rotary table but also rotates round oneself shaft axis under the drive of the clamp;
s4: continuously filling high-purity oxygen and high-purity argon into a vacuum coating machine, wherein the filling amount of the high-purity oxygen is 16cc, and the filling amount of the high-purity argon is 15cc, and then starting an ion source in the vacuum coating machine to carry out bombardment treatment on the surface of the cylindrical hollow transparent glass tube, wherein the ion beam current of the ion source is 120 ma;
s5: and (3) performing evaporation coating on a film material, wherein the film material is ferric oxide and silicon dioxide, the ferric oxide and the silicon dioxide are coated alternately back and forth, and 15 layers of films are coated, and the film system sequentially comprises H, L, H, L, H, L, 2.8H, 0.5L, 2.5H, 2.5L and 2.5H, 2.5L, 2.5H, 2.5L and 2.5H, and starting coating in the reverse direction during coating, wherein H represents ferric oxide, and L represents silicon dioxide; the center wavelength of the film system is 500nm, and according to the formula nd ═ 1/4 × λ, where n is the refractive index of the film material, n is the refractive index of ferric oxide is 2.6, n is the refractive index of silicon dioxide is 1.46, λ is 500nm, so the physical thickness d of each film is 10 × λ/4n, and thus the physical thicknesses of each film from bottom to top are in sequence:
Figure BDA0002058373410000051
Figure BDA0002058373410000052
s6: taking out the cylindrical hollow glass tube from the vacuum coating machine, covering half of the film layer on the surface of the cylindrical hollow glass tube along the center line of the section of the cylindrical hollow glass tube with a rubber belt, then putting the cylindrical hollow glass tube into a hydrofluoric acid solution to corrode the uncovered film layer, taking out the cylindrical hollow glass tube after corrosion, washing the cylindrical hollow glass tube, removing the rubber belt, and scrubbing the surface of the cylindrical hollow transparent glass tube with alcohol;
s7: and (3) putting the cleaned cylindrical hollow transparent glass tube into a high-temperature furnace at the temperature of 500 ℃ for high-temperature aging for 30min, and taking out the cylindrical hollow transparent glass tube to obtain the semi-gold-plated high-reflection infrared heating hollow tube.
Example 3:
a preparation method of a high-reflection infrared heating hollow tube comprises the following steps:
s1: selecting a U-shaped hollow transparent glass tube with a proper specification, putting the cylindrical hollow transparent glass tube into a hydrofluoric acid solution with the concentration of 4% for cleaning, so as to clean the surface of the cylindrical hollow transparent glass tube, and then taking out the cylindrical hollow transparent glass tube to remove the water on the cylindrical hollow transparent glass tube for later use;
s2: putting the U-shaped hollow transparent glass tube into a matched mould so that one half of the U-shaped hollow transparent glass tube along the center line of the section of the U-shaped hollow transparent glass tube is covered by the mould and the other half is exposed out of the mould, and then fixing the U-shaped hollow transparent glass tube in the mould by using a clamp;
s3: a turntable is arranged in a heating device of a vacuum system in the vacuum coating machine, and a mold which is clamped by a clamp in the step S2 and is accommodated with a U-shaped hollow transparent glass tube is placed on the turntable;
s4: vacuumizing the vacuum coating machine to ensure that the vacuum degree in the vacuum coating machine is 7.8 multiplied by 10 -3MP, turn on the heating device in the coating apparatus at the same time and heat, make the temperature in the oven reach 170 degrees centigrade, the rotary table is in the rotating state all the time in the course of heating of the heating device and thus drive the U-shaped hollow transparent glass tube to rotate;
s5: continuously filling high-purity oxygen and high-purity argon into a vacuum coating machine, wherein the filling amount of the high-purity oxygen is 10cc, and the filling amount of the high-purity argon is 10cc, and then starting an ion source in the vacuum coating machine to carry out bombardment treatment on the surface of the U-shaped hollow transparent glass tube, wherein the ion beam current of the ion source is 100 ma;
s6: performing evaporation coating on a film material, wherein the coating material is ferric oxide and silicon dioxide, the ferric oxide and the silicon dioxide are coated alternately back and forth, 15 layers of coatings are formed, the film system is sequentially H, L, H, L, H, L, 2.8H, 0.5L, 2.5H, 2.5L, 2.5H, 2.5L, 2.5H, 2.5L and 2.5H, and the coating is started reversely during coating, wherein H represents ferric oxide, and L represents silicon dioxide; the center wavelength of the film system is 500nm, and according to the formula nd ═ 1/4 × λ, where n is the refractive index of the film material, n is the refractive index of ferric oxide is 2.6, n is the refractive index of silicon dioxide is 1.46, λ is 500nm, so the physical thickness d of each film is 10 × λ/4n, and thus the physical thicknesses of each film from bottom to top are in sequence:
Figure BDA0002058373410000061
Figure BDA0002058373410000062
s7: and taking out the mold from the vacuum coating machine, taking out the U-shaped hollow glass tube from the mold, scrubbing the surface of the U-shaped hollow glass tube by using alcohol, placing the U-shaped hollow glass tube into a high-temperature furnace at the temperature of 450 ℃ for high-temperature aging for 25min, and taking out the U-shaped hollow glass tube to obtain the semi-gold-plated high-reflection infrared heating hollow tube.
The semi-gold plated infrared heating hollow tubes prepared in example 1, example 2 and example 3 were used to test the reflectivity of the film coating to infrared light with wavelength of 750-:
Figure BDA0002058373410000071
as can be seen from the above table, the reflectivity of the reflecting layer prepared by the invention reaches about 90%, so that most of heat on the lamp tube can be reflected and utilized, and the infrared heating tube prepared by the invention has a good heating effect; in addition, as can be seen from the above table, the film firmness of the infrared heating tube of the present invention is significantly increased relative to the control group, thereby increasing the service life of the infrared heating tube.
The method for producing the semi-gold plated high reflection infrared heating hollow tube according to the present invention is described above with reference to examples. However, it should be understood by those skilled in the art that various modifications can be made to the above-mentioned method for preparing a semi-gold plated high-reflectivity infrared heating hollow tube without departing from the scope of the present invention. Therefore, the scope of the present invention should be determined by the contents of the appended claims.

Claims (8)

1. A preparation method of a semi-gold-plated high-reflection infrared heating hollow tube is characterized by comprising the following steps:
s1: selecting a hollow transparent glass tube with a proper specification, and cleaning the surface of the hollow transparent glass tube;
s2: clamping two ends of the cleaned hollow transparent glass tube with a clamp, placing the glass tube on a heating device of a coating device, vacuumizing the coating device, and simultaneously starting the heating device in a vacuum system to ensure that the vacuum degree in the vacuum system is 7.0-8.0 multiplied by 10 -3MP, the temperature reaches 170-180 ℃;
s3: filling high-purity oxygen and high-purity argon into the coating equipment, wherein the filling amount of the high-purity oxygen is 10-20cc, and the filling amount of the high-purity argon is 10-20cc, starting an ion source in the coating equipment to carry out bombardment treatment on the surface of the hollow transparent glass tube, and the ion beam current of the ion source is 100-150 ma;
s4: evaporating and coating a film material, wherein the film material is ferric oxide and silicon dioxide, the ferric oxide and the silicon dioxide are coated in a reciprocating and alternating manner, the central wavelength of the film system is 450-550nm, 12-15 layers of films are coated in a reciprocating and alternating manner, and after the film coating is finished, the surface of the hollow transparent glass tube is treated so that only half of the surface of the hollow transparent glass tube along the central line of the section of the hollow transparent glass tube is provided with a reflecting film layer;
s5: and (3) placing the coated hollow glass tube into a high-temperature furnace for high-temperature aging, wherein the temperature in the high-temperature furnace is maintained at 450-500 ℃, and the aging time is 25-35 min.
2. The method of claim 1, wherein the hollow glass tube is cleaned by hydrofluoric acid solution with concentration of 3-4% or by ultrasonic cleaning machine in step S1.
3. The method of claim 1, wherein after cleaning the transparent hollow glass tube, covering a half of the surface of the transparent hollow glass tube along the center line of the cross-section of the transparent hollow glass tube, and then performing the steps S2-S4, after the step S4, removing the covering of the surface of the transparent hollow glass tube, and then performing the step S5, so that the surface of the half of the transparent hollow glass tube has the reflective coating.
4. The method of claim 1, wherein the transparent hollow glass tube is cleaned, the entire surface of the transparent hollow glass tube is coated with a film by placing the glass tube in a coating apparatus, after the step S4, the half of the surface film of the transparent hollow glass tube is covered along the center line of the cross section of the coated hollow glass tube, then the hollow glass tube is placed in a hydrofluoric acid solution to etch off the uncovered film, so that the reflective film is formed on the surface of the half of the transparent hollow glass tube, and the transparent hollow glass tube is washed clean after etching, removed of the cover and then subjected to the step S5 of high temperature aging.
5. The method of claim 1, wherein a turntable is disposed on a heating device in the vacuum system, the transparent glass tube held by the fixture is placed on the turntable, and the turntable rotates to rotate the transparent glass tube during the coating process.
6. The method of claim 5, wherein the cylindrical hollow glass tube is revolved on the turntable and also revolved by the clamp; for the hollow glass tube in a circular ring shape or other special shapes, the hollow glass tube only revolves on the rotation.
7. The method of claim 1, wherein in step S4, 15 layers of film are coated alternately back and forth with the center wavelength of the film system being 500 nm.
8. The method of claim 7, wherein the film is H, L, H, L, H, L, 2.8H, 0.5L, 2.5H, 2.5L, 2.5H, or 2.5H.
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