CN110753850B - 超小型高灵敏磁传感器 - Google Patents
超小型高灵敏磁传感器 Download PDFInfo
- Publication number
- CN110753850B CN110753850B CN201880039654.1A CN201880039654A CN110753850B CN 110753850 B CN110753850 B CN 110753850B CN 201880039654 A CN201880039654 A CN 201880039654A CN 110753850 B CN110753850 B CN 110753850B
- Authority
- CN
- China
- Prior art keywords
- coil
- magnetic field
- asic
- magnet wires
- magnet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/028—Electrodynamic magnetometers
- G01R33/0283—Electrodynamic magnetometers in which a current or voltage is generated due to relative movement of conductor and magnetic field
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B61/00—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/01—Manufacture or treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N59/00—Integrated devices, or assemblies of multiple devices, comprising at least one galvanomagnetic or Hall-effect element covered by groups H10N50/00 - H10N52/00
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/063—Magneto-impedance sensors; Nanocristallin sensors
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Hall/Mr Elements (AREA)
- Measuring Magnetic Variables (AREA)
Abstract
Description
Claims (4)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017141410A JP7262886B2 (ja) | 2017-07-21 | 2017-07-21 | 超小型高感度磁気センサ |
JP2017-141410 | 2017-07-21 | ||
PCT/JP2018/019705 WO2019017066A1 (ja) | 2017-07-21 | 2018-05-22 | 超小型高感度磁気センサ |
Publications (3)
Publication Number | Publication Date |
---|---|
CN110753850A CN110753850A (zh) | 2020-02-04 |
CN110753850B true CN110753850B (zh) | 2022-02-15 |
CN110753850B8 CN110753850B8 (zh) | 2022-04-01 |
Family
ID=65015185
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201880039654.1A Active CN110753850B8 (zh) | 2017-07-21 | 2018-05-22 | 超小型高灵敏磁传感器 |
Country Status (5)
Country | Link |
---|---|
US (1) | US11262419B2 (zh) |
EP (1) | EP3657192B1 (zh) |
JP (1) | JP7262886B2 (zh) |
CN (1) | CN110753850B8 (zh) |
WO (1) | WO2019017066A1 (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6839399B1 (ja) * | 2020-09-29 | 2021-03-10 | マグネデザイン株式会社 | 磁界検出素子 |
JP7329782B1 (ja) | 2022-12-09 | 2023-08-21 | マグネデザイン株式会社 | Gsr素子の製造方法 |
JP7201194B1 (ja) * | 2022-10-17 | 2023-01-10 | マグネデザイン株式会社 | 磁界検出素子の製造方法 |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1317698A (zh) * | 2000-04-13 | 2001-10-17 | 爱知制钢株式会社 | 磁场检测装置 |
US20060202291A1 (en) * | 2005-02-23 | 2006-09-14 | Stefan Kolb | Magnetoresistive sensor module and method for manufacturing the same |
JP2006300906A (ja) * | 2005-04-25 | 2006-11-02 | Aichi Steel Works Ltd | マグネト・インピーダンス・センサ素子 |
CN101228453A (zh) * | 2005-07-22 | 2008-07-23 | 机电联合股份有限公司 | 正交磁通门磁场传感器 |
CN101410723A (zh) * | 2006-03-31 | 2009-04-15 | 西铁城电子股份有限公司 | 磁传感器元件和使用该元件的磁传感器 |
CN102426344A (zh) * | 2011-08-30 | 2012-04-25 | 江苏多维科技有限公司 | 三轴磁场传感器 |
JP2014153309A (ja) * | 2013-02-13 | 2014-08-25 | Magne Design Corp | 磁界検出素子 |
CN104241520A (zh) * | 2013-06-12 | 2014-12-24 | 恩智浦有限公司 | 制造单片集成在半导体芯片处的磁传感器元件 |
US20160238673A1 (en) * | 2015-02-16 | 2016-08-18 | Magnedesign Corporation | High sensitive micro sized magnetometer |
CN109155327A (zh) * | 2016-04-28 | 2019-01-04 | 德州仪器公司 | 具有低磁通门噪声的磁通门装置 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS583975A (ja) | 1981-06-29 | 1983-01-10 | Hitachi Ltd | スパツタリングによる成膜方法及びその装置 |
JP2993017B2 (ja) * | 1989-11-14 | 1999-12-20 | ティーディーケイ株式会社 | 磁気検出装置 |
JP4007464B2 (ja) * | 1997-10-06 | 2007-11-14 | Tdk株式会社 | 磁気探知装置 |
JP2003167037A (ja) * | 2001-11-30 | 2003-06-13 | Tama Electric Co Ltd | 磁気センサ |
EP1336858A3 (en) * | 2002-02-19 | 2005-03-23 | Aichi Micro Intelligent Corporation | Two-dimensional magnetic sensor |
JP2005147998A (ja) * | 2003-11-19 | 2005-06-09 | Fuji Electric Holdings Co Ltd | 磁気インピーダンスセンサ |
DE112009000425B4 (de) * | 2008-02-25 | 2019-05-02 | Fairchild Semiconductor Corporation | Mikromodule mit integrierten Dünnfilminduktoren und Verfahren zum Herstellen dieser |
US8339132B2 (en) * | 2009-03-26 | 2012-12-25 | Aichi Steel Corporation | Magnetic detection device |
WO2013078348A1 (en) | 2011-11-22 | 2013-05-30 | Northern Digital Inc. | Tracking a guidewire |
JP2014042055A (ja) | 2013-10-18 | 2014-03-06 | Nikon Corp | 基板重ね合わせ装置、基板保持装置および半導体装置の製造方法 |
WO2015060344A1 (ja) * | 2013-10-22 | 2015-04-30 | 国立大学法人九州大学 | 勾配磁界センサ |
TWI538096B (zh) * | 2013-12-31 | 2016-06-11 | 財團法人工業技術研究院 | 具pn界面的微機電裝置 |
US9480416B2 (en) | 2014-01-17 | 2016-11-01 | Biosense Webster (Israel) Ltd. | Signal transmission using catheter braid wires |
JP6766333B2 (ja) * | 2015-10-06 | 2020-10-14 | 愛知製鋼株式会社 | 微小磁性体検知センサおよび異物検知装置 |
JP6864413B2 (ja) * | 2017-06-05 | 2021-04-28 | 朝日インテック株式会社 | Gsrセンサ素子 |
JP7262885B2 (ja) * | 2017-06-16 | 2023-04-24 | 朝日インテック株式会社 | 超高感度マイクロ磁気センサ |
JP6256962B1 (ja) * | 2017-06-21 | 2018-01-10 | 朝日インテック株式会社 | 磁気式の方位・位置測定装置 |
EP3467528B1 (en) * | 2017-10-06 | 2020-05-20 | Melexis Technologies NV | Magnetic sensor sensitivity matching calibration |
-
2017
- 2017-07-21 JP JP2017141410A patent/JP7262886B2/ja active Active
-
2018
- 2018-05-22 EP EP18834783.5A patent/EP3657192B1/en active Active
- 2018-05-22 WO PCT/JP2018/019705 patent/WO2019017066A1/ja unknown
- 2018-05-22 CN CN201880039654.1A patent/CN110753850B8/zh active Active
-
2019
- 2019-12-19 US US16/720,016 patent/US11262419B2/en active Active
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1317698A (zh) * | 2000-04-13 | 2001-10-17 | 爱知制钢株式会社 | 磁场检测装置 |
US20060202291A1 (en) * | 2005-02-23 | 2006-09-14 | Stefan Kolb | Magnetoresistive sensor module and method for manufacturing the same |
JP2006300906A (ja) * | 2005-04-25 | 2006-11-02 | Aichi Steel Works Ltd | マグネト・インピーダンス・センサ素子 |
CN101228453A (zh) * | 2005-07-22 | 2008-07-23 | 机电联合股份有限公司 | 正交磁通门磁场传感器 |
CN101410723A (zh) * | 2006-03-31 | 2009-04-15 | 西铁城电子股份有限公司 | 磁传感器元件和使用该元件的磁传感器 |
CN102426344A (zh) * | 2011-08-30 | 2012-04-25 | 江苏多维科技有限公司 | 三轴磁场传感器 |
JP2014153309A (ja) * | 2013-02-13 | 2014-08-25 | Magne Design Corp | 磁界検出素子 |
CN104241520A (zh) * | 2013-06-12 | 2014-12-24 | 恩智浦有限公司 | 制造单片集成在半导体芯片处的磁传感器元件 |
US20160238673A1 (en) * | 2015-02-16 | 2016-08-18 | Magnedesign Corporation | High sensitive micro sized magnetometer |
CN109155327A (zh) * | 2016-04-28 | 2019-01-04 | 德州仪器公司 | 具有低磁通门噪声的磁通门装置 |
Also Published As
Publication number | Publication date |
---|---|
WO2019017066A1 (ja) | 2019-01-24 |
EP3657192A4 (en) | 2021-04-28 |
EP3657192B1 (en) | 2023-10-04 |
JP2019020346A (ja) | 2019-02-07 |
JP7262886B2 (ja) | 2023-04-24 |
EP3657192A1 (en) | 2020-05-27 |
US11262419B2 (en) | 2022-03-01 |
US20200124686A1 (en) | 2020-04-23 |
CN110753850A (zh) | 2020-02-04 |
CN110753850B8 (zh) | 2022-04-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN110753850B (zh) | 超小型高灵敏磁传感器 | |
JP7062216B2 (ja) | 超薄型高感度磁気センサ | |
US20160116551A1 (en) | Magneto-impedance sensor element with electromagnetic coil and magneto-impedance sensor with electromagnetic coil | |
CN110073231B (zh) | Gsr传感器元件 | |
KR100810591B1 (ko) | 가속도 센서 | |
EP2711728A1 (en) | Magnetic sensor device | |
CN109844553A (zh) | 三维磁场检测元件及三维磁场检测装置 | |
KR102393394B1 (ko) | 초고감도 마이크로 자기 센서 | |
JP4244807B2 (ja) | 方位センサ | |
JP6924443B2 (ja) | 3次元磁界検出装置 | |
JP2000292295A (ja) | 密閉容器の内部圧力検出用センサ | |
JP2002350257A (ja) | 圧力センサ | |
JP2016224008A (ja) | センサ装置 | |
US20200371130A1 (en) | Inertial sensor | |
JP2001227999A (ja) | 容量形電磁流量計 | |
JP2009257947A (ja) | 直交フラックスゲートセンサおよびそれを用いた外部磁界の検出方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CI03 | Correction of invention patent | ||
CI03 | Correction of invention patent |
Correction item: Inventor Correct: Ben Yixin|Ben Jinping|Kudo Ichigo|Tian Chunyi|Kikuchi Yongxi False: Ben Yixin|Ben Jinping|Kudo Ichigo|Tian maichunyi|Kikuchi Yongxi Number: 07-01 Page: The title page Volume: 38 Correction item: Inventor Correct: Ben Yixin|Ben Jinping|Kudo Ichigo|Tian Chunyi|Kikuchi Yongxi False: Ben Yixin|Ben Jinping|Kudo Ichigo|Tian maichunyi|Kikuchi Yongxi Number: 07-01 Volume: 38 |